CN103273687A - TiSiN+ZrSiN composite nanometer coated cutting tool and preparation method thereof - Google Patents
TiSiN+ZrSiN composite nanometer coated cutting tool and preparation method thereof Download PDFInfo
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Abstract
The invention provides a TiSiN+ZrSiN composite nanometer coated cutting tool and a preparation method thereof and belongs to the field of mechanical machining. A base material of the coated cutting tool is a hard alloy or high-speed steel. The TiSiN+ZrSiN composite nanometer coated cutting tool is manufactured by adopting a multi-arc ion plating+intermediate frequency magnetron sputtering method. The TiSiN+ZrSiN composite nanometer coated cutting tool is of multilayered structure, a ZrSiN coating is formed on the surface of the cutting tool, a TiZrSiN transition coating is formed between the ZrSiN coating and a TiSiN coating, and a Ti transition coating is formed between the TiSiN coating and a substrate, wherein the atomic percentage of Si content in the TiSiN coating and the ZrSiN coating is 6%-10%. The TiSiN+ZrSiN composite nanometer coated cutting tool well combines the high hardness of the TiSiN coating and the low friction coefficient of the ZrSiN coating and has high hardness, good friction and wear property and excellent high-temperature oxidation resistance; and the bonding can be alleviated in the cutting process, and the wearing of the cutting tool is reduced, so that the service life of the cutting tool is prolonged. The coated cutting tool can be widely applied to drying machining and machining of difficult-to-machine materials.
Description
One, technical field
The invention belongs to technical field of mechanical cutting tool manufacture, particularly relate to a kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof.
Two, background technology
The TiSiN film is as a kind of nano superhard coating, and its hardness is very high, and oxidative resistance, wearability have greatly improved with respect to the binary nitride coatings, have obtained application at aspects such as cutter, moulds.Si content atomic percentage is in 6～10% scopes the time, the hardness maximum, but coefficient of friction higher (0.6～0.9) easily bonds in processes such as cutting, and energy loss is more.ZrSiN film crystal grain is also at nanoscale, and coefficient of friction is comparatively responsive to Si content, and it has lower coefficient of friction (0.2～0.5) in the time of in Si content atomic percentage 6～10% scopes, and high-temperature oxidation, wearability are better, but hardness is lower.In recent years, along with the development that is coated with layer deposition techniques, compoundization of coating material structure, multiple stratification can be integrated the function of different coating, become one of important directions of coating development.
Chinese patent " patent No.: 200910044474.5 " has been reported overbrushing layer cutter that the method for employing physical vapour deposition (PVD) periodically deposits and preparation method thereof, each cycle of this coating comprise the TiN layer to the TiSiN layer to the TiAlSiN layer to the TiSiN layer, coating was superposeed by a plurality of cycles; Chinese patent " patent No.: 201010274510.X " has been reported the method for preparing nanostructured ZrSiN coating at carbide surface, and it is to adopt the method for direct magnetic control and radio frequency magnetron cosputtering to deposit the ZrSiN coating in the atmosphere of argon gas and nitrogen; Chinese patent: " patent No.: 200880018340.X " reported a kind of surface-coated cutting tool, its overlay film is compound super plural layers, its structure can be divided into two big layers, first layer alternately is made up of one or more A1 layers and B layer, second largest layer is alternately piled up by one or more A2 layers and C layer, wherein A1 layer and A2 layer are respectively a kind of among TiN, TiCN, TiAlN and the TiAlCN, B layer and C layer are alternately piled up by one or more TiSiN or TiSiCN layer and AlCrN or AlCrCN layer respectively and form, its method complex process requires very high to equipment.
Three, summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art, a kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof is provided.This cutter coat is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, and the Ti transition zone is arranged between TiSiN layer and matrix.TiSiN+ZrSiN composite Nano coated cutting tool also is combined the high rigid and low-friction coefficient of ZrSiN of TiSiN in the high-temperature oxidation with siliceous nitride coatings excellence.This coated cutting tool is done when cutting, and can fall to reduce friction, reduces bonding, reduces cutting force, and raising cutter high temperature oxidative resistance reduces tool wear, improves cutter life.
The present invention realizes in the following manner.
TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof, the tool matrix material is high-speed steel or carbide alloy, coating is sandwich construction, tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix, and wherein the atomic percentage of TiSiN layer, ZrSiN layer Si content is in 6～10% scopes.
The preparation method of TiSiN+ZrSiN composite Nano coated cutting tool adopts the mode of multi-arc ion coating+medium frequency magnetron sputtering codeposition, and its concrete preparation process is:
(1) pre-treatment: the tool matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10 after the drying
-3Pa is heated to 200～250 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, atmospheric pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 800～900V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 400～600V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 1～2min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti5～7min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.4～0.5Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 140～180sccm, opens intermediate frequency Si target current 3.5～4.5A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN90～100min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 120～160sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN50～60min.
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
By the TiSiN+ZrSiN composite Nano coated cutting tool of above-mentioned technology preparation, coating is sandwich construction, is respectively Ti, TiSiN, TiZrSiN and ZrSiN from inside to outside.Transition zone Ti can reduce matrix and the residual stress that is coated with interlayer, strengthens coating's adhesion; The TiZrSiN layer can reduce the adverse effect of TiSiN layer and the sudden change of ZrSiN composition of layer, helps two-layer good combination; Coating also is combined the high rigid and low-friction coefficient of ZrSiN of TiSiN except having excellent high-temperature oxidation, has improved the friction and wear behavior of coated cutting tool.This coated cutting tool can be widely used in doing the machining of machining and difficult-to-machine material.
Four, description of drawings
Accompanying drawing is the coating structure schematic diagram of TiSiN+ZrSiN composite Nano coated cutting tool of the present invention.Wherein: 1 is tool matrix, and 2 is the Ti transition zone, and 3 is the TiSiN layer, and 4 is the TiZrSiN layer, and 5 is the ZrSiN layer.
Five, the specific embodiment
Provide two most preferred embodiments of the present invention below:
Embodiment 1:
A kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof, the tool matrix material is the YS8 carbide alloy, and coating is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix.The preparation method of TiSiN+ZrSiN composite Nano coated cutting tool adopts the mode of multi-arc ion coating+medium frequency magnetron sputtering codeposition, and its concrete preparation process is:
(1) pre-treatment: YS8 hard alloy cutter matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10-after the drying
-3Pa is heated to 250 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, atmospheric pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 900V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 600V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 2min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti6min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.5Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 180sccm, opens intermediate frequency Si target current 4.5A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN90min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 160sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN60min.
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
Embodiment two:
A kind of TiSiN+ZrSiN composite Nano coated cutting tool and preparation method thereof, the tool matrix material is the W18Cr4V high-speed steel, and coating is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix.The preparation method of TiSiN+ZrSiN composite Nano coated cutting tool adopts the mode of multi-arc ion coating+medium frequency magnetron sputtering codeposition, and its concrete preparation process is:
(1) pre-treatment: W18Cr4V high-speed steel tool matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10 after the drying
-3Pa is heated to 200 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, atmospheric pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 800V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 400V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 1min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti7min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.45Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 150sccm, opens intermediate frequency Si target current 4A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN120min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 130sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN40min;
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
Claims (3)
1.TiSiN+ZrSiN composite Nano coated cutting tool, the tool matrix material is high-speed steel or carbide alloy, it is characterized in that: coating is sandwich construction, and tool surface is the ZrSiN layer, between ZrSiN layer and the TiSiN layer TiZrSiN transition zone is arranged, the Ti transition zone is arranged between TiSiN layer and matrix.
2.TiSiN+ZrSiN the preparation method of composite Nano coated cutting tool, the method that it is characterized in that adopting multi-arc ion coating+medium frequency magnetron sputtering codeposition is coated with Ti transition zone and TiSiN layer, TiZrSiN layer, ZrSiN layer at tool surface, and its concrete preparation process is:
(1) pre-treatment: the tool matrix material is polished to minute surface, removes surface contamination layer, put into alcohol ultrasonic cleaning 15min, fully put into the coating machine vacuum chamber, vacuum chamber base vacuum 7.0 * 10 after the drying
-3Pa is heated to 200～250 ℃, insulation 30min;
(2) ion cleans: feed Ar gas, air pressure is 1.5Pa, and unbalanced pulse grid bias power supply, voltage are 800～900V, dutycycle 0.2, and aura cleans 15min; Bias voltage is down to 400～600V, opens ion gun, opens arc source Ti target, and electric current transfers to 65A, and ion cleans 1～2min;
(3) depositing Ti: adjusting Ar air pressure is 0.5Pa, and bias voltage is down to 150V, electric arc plating Ti5～7min;
(4) depositing Ti SiN: the adjustment operating air pressure is 0.4～0.5Pa, and bias voltage 150V, electric arc target Ti target current are 65A, opens N
2, adjust N
2Flow is 140～180sccm, opens intermediate frequency Si target current 3.5～4.5A, electric arc plating+medium frequency magnetron sputtering codeposition TiSiN90～120min;
(5) depositing Ti ZrSiN: open electric arc target Zr target, electric current transfers to 60A, and the Zr target current is 70A every the 1min 1A that raises until electric current then, multi-arc ion coating+medium frequency magnetron sputtering depositing Ti ZrSiN10min;
(6) deposition ZrSiN: adjust N
2Flow is 120～160sccm, closes the Ti target, electric arc plating+medium frequency magnetron sputtering deposition ZrSiN50～60min;
(7) post processing: close Zr target, Si target, close ion gun and gas source, close pulsed bias power supply, coating finishes.
3. according to claim 1,2 described nanometer coating cutting tools, it is characterized in that: the atomic percentage of described TiSiN layer, ZrSiN layer Si content is in 6～10% scopes.
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Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103628024A (en) * | 2013-11-15 | 2014-03-12 | 桂林电子科技大学 | Technology for depositing titanium nitride film on surface of 4Cr13 stainless steel vernier caliper |
| CN104060222A (en) * | 2014-06-13 | 2014-09-24 | 山东大学 | TiSiN-WS2/Zr-WS2 coated cutting tool and preparation process thereof |
| CN104593737A (en) * | 2015-01-13 | 2015-05-06 | 上海应用技术学院 | Preparation process for high-silicon super-hard PVD coating |
| CN104846332A (en) * | 2015-04-17 | 2015-08-19 | 岭南师范学院 | Superlubricity multilayer nano composite coating and preparation method thereof |
| CN104846340A (en) * | 2015-05-29 | 2015-08-19 | 山东大学 | Mo-S-N-Cr self-lubricating gradient-coated cutting tool and preparation process thereof |
| CN104878359A (en) * | 2015-06-12 | 2015-09-02 | 浙江金盾链条制造有限公司 | High-hardness and high-abrasion-resisting TiA1N/ZrSiN nano-structure protective coating and preparation method thereof |
| CN105063554A (en) * | 2015-07-31 | 2015-11-18 | 山东大学 | ZrSiCN nano-composite gradient coating cutter and preparation process thereof |
| CN105312600A (en) * | 2014-07-29 | 2016-02-10 | 山特维克知识产权股份有限公司 | Coated cutting tool and method of producing coated cutting tool |
| CN105714233A (en) * | 2016-04-27 | 2016-06-29 | 贵州航天风华精密设备有限公司 | Surface treatment method for magnesium alloy |
| CN105734362A (en) * | 2016-04-27 | 2016-07-06 | 贵州航天风华精密设备有限公司 | Aluminum magnesium alloy and surface modifying method thereof |
| CN106552755A (en) * | 2016-11-24 | 2017-04-05 | 超微中程纳米科技（苏州）有限公司 | A kind of hobboing cutter nano coating film plating pretreatment process |
| CN107740052A (en) * | 2017-10-16 | 2018-02-27 | 东南大学 | A kind of TiSiTaN coated cutting tools and preparation method thereof |
| CN108866491A (en) * | 2018-07-24 | 2018-11-23 | 山东大学 | TiAlN/CrAlSiN nanocomposite laminated coating and preparation method thereof |
| CN109763097A (en) * | 2019-01-09 | 2019-05-17 | 纳狮新材料(浙江)有限公司 | Mechanical part and preparation method thereof with composite coating |
| CN109913836A (en) * | 2019-04-11 | 2019-06-21 | 湖南工学院 | A kind of method that MF reactive magnetron sputtering prepares TiSiN coating |
| CN112593188A (en) * | 2021-03-04 | 2021-04-02 | 中南大学湘雅医院 | Composite nano multilayer film, preparation method thereof and medical surgical knife |
| CN114990480A (en) * | 2022-05-25 | 2022-09-02 | 宜昌永鑫精工科技股份有限公司 | PCB milling cutter coating and processing method thereof |
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| CN103628024A (en) * | 2013-11-15 | 2014-03-12 | 桂林电子科技大学 | Technology for depositing titanium nitride film on surface of 4Cr13 stainless steel vernier caliper |
| CN104060222B (en) * | 2014-06-13 | 2016-08-24 | 山东大学 | TiSiN-WS2/ Zr-WS2coated cutting tool and preparation technology thereof |
| CN104060222A (en) * | 2014-06-13 | 2014-09-24 | 山东大学 | TiSiN-WS2/Zr-WS2 coated cutting tool and preparation process thereof |
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| CN104593737A (en) * | 2015-01-13 | 2015-05-06 | 上海应用技术学院 | Preparation process for high-silicon super-hard PVD coating |
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| CN108866491A (en) * | 2018-07-24 | 2018-11-23 | 山东大学 | TiAlN/CrAlSiN nanocomposite laminated coating and preparation method thereof |
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| CN109913836A (en) * | 2019-04-11 | 2019-06-21 | 湖南工学院 | A kind of method that MF reactive magnetron sputtering prepares TiSiN coating |
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| CN114990480A (en) * | 2022-05-25 | 2022-09-02 | 宜昌永鑫精工科技股份有限公司 | PCB milling cutter coating and processing method thereof |
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