CN104846340A - Mo-S-N-Cr self-lubricating gradient-coated cutting tool and preparation process thereof - Google Patents
Mo-S-N-Cr self-lubricating gradient-coated cutting tool and preparation process thereof Download PDFInfo
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Abstract
The invention belongs to the technical field of mechanical cutting tool manufacture and in particular relates to a Mo-S-N-Cr self-lubricating gradient-coated cutting tool and a preparation process thereof. The cutting tool is prepared by virtue of a method of medium-frequency magnetron sputtering and multiple arc ion plating. A Mo-S-N-Cr gradient layer is formed on the surface of the tool; a Cr transitional layer is formed between the Mo-S-N-Cr gradient layer and the substrate of the cutting tool. According to the cutting tool, the nonmetallic element N and the metal element Cr are added to improve the hardness of the MoS2 coating; and due to the gradient design of the Mo-S-N-Cr layer, the binding strength of the coating and the substrate is improved. The prepared coating has relatively high hardness and relatively low frictional coefficient. When the cutting tool is applied to dry cutting, a transfer film having a lubrication effect is formed on the surface of the cutting tool, and therefore, the self-lubrication function of the cutting tool can be realized. The Mo-S-N-Cr self-lubricating gradient-coated cutting tool can be widely applied to dry cutting and the cutting of difficult-to-machine materials.
Description
One, technical field
The invention belongs to technical field of mechanical cutting tool manufacture, particularly relate to a kind of Mo-S-N-Cr self-lubricating gradient cladding cutter and preparation technology thereof.
Two, background technology
Transition metal two chalkogenide (TMD) has excellent lubricity, wherein MoS
2and WS
2be most widely used.But, because the water vapour in air can reduce the lubricity of TMD, thus limit TMD and be applied in the environment of vacuum or drying.In addition, there is when TMD is used alone lower hardness, limit it needs high-bearing capacity occasion application in Tool in Cutting processing etc.
TMD is applied in cutter coat the friction that can reduce between cutter and workpiece, improves the cutting ability of cutter.The laminate structure of TMD not only makes TMD coated cutting tool have self-lubricating function, also makes TMD coated cutting tool easily be taken away by chip in cutting process, TMD coating premature abrasion, and tool matrix is exposed and absorption surface.By adding N, Cr, Ni, Ti etc. in TMD coating, other element alloyedly can make TMD lattice distort in various degree, and the changing of the relative positions of TMD lattice needs larger energy, thus improve the wear resistance of TMD coating.
Chinese patent " application number: 201110081807.9 " reports the preparation method of soft coating of hard alloy cutter, but owing to adopting sol-gel method principle to prepare MoS
2soft coating, the bonding force of coating and matrix is lower, and coating hardness is lower.Document [Wear 258 (2005) 812-825] reports the MoS adopting magnetically controlled sputter method to prepare
2-Cr coating, when Cr content is 13at.%, coating hardness reaches maximum value is 8.29GPa, but not inserting the non-metallic elements such as N, B in the coating improves coating performance further.
Three, summary of the invention
The object of this invention is to provide a kind of Mo-S-N-Cr self-lubricating gradient cladding cutter and preparation technology thereof, to overcome above-mentioned the deficiencies in the prior art.This coated cutting tool improves coating hardness by adding non-metallic element N and metallic element Cr, by Mo-S-N-Cr layer is designed to gradient-structure, reduce coating internal stress, improve coating and basal body binding force, coating is made both to have had higher hardness, again there is self-lubricating function, thus the cutting ability of coated cutting tool is improved.
The object of the invention is to realize in the following manner.
Mo-S-N-Cr self-lubricating gradient cladding cutter, tool matrix material is rapid steel or Wimet, and tool surface is Mo-S-N-Cr gradient layer, is Cr transition layer between Mo-S-N-Cr gradient layer and tool matrix.
Mo-S-N-Cr self-lubricating gradient cladding cutter preparation technology, depositional mode is electric arc ion-plating deposition Cr transition layer+medium frequency magnetron sputtering deposition Mo-S-N-Cr gradient layer, and use 1 Cr electric arc target, 2 Mo-S-Cr composition targets during deposition, its step of preparation process is:
(1) Mo-S-Cr composition target is prepared: be diametrically the uniform processing in sputter area central position 10 ~ 15 circumferential blind holes that 101.6mm, thickness are the Cr target of 4.7mm with numerical-control processing method, the diameter of blind hole is less than the width of sputter area, the degree of depth of blind hole is 3mm, and in blind hole, identical with blind hole diameter, that thickness is 5mm Cr disk, MoS are put in interval respectively
2disk;
(2) Mo-S-Cr composition target is installed: in vacuum chamber of film coating machine medium frequency magnetron sputtering target installation site, 2 Mo-S-Cr composition targets are installed;
(3) pre-treatment: by tool matrix surface finish to minute surface, removes surface contamination layer, puts into alcohol and acetone respectively successively, the each 15min of ultrasonic cleaning, remove tool surface greasy dirt and other pollutents, put into vacuum chamber of film coating machine rapidly after hair dryer drying fully, be evacuated to 7.0 × 10
-3pa, is heated to 100 ~ 250 DEG C, insulation 30 ~ 40min;
(4) Ion Cleaning: pass into Ar gas, air pressure is 1.5Pa, and open grid bias power supply, voltage is 800V, and dutycycle is 0.2, aura cleaning 15min; Reduce and be biased into 300 ~ 400V, air pressure is down to 0.5Pa, opens ion source, and open arc source Cr target, target current is adjusted to 55 ~ 65A, Ion Cleaning 2 ~ 3min;
(5) Cr transition layer is deposited: bias voltage is down to 150 ~ 200V, and Cr target current is adjusted to 65 ~ 100A, electric arc plating Cr 5 ~ 7min;
(6) Mo-S-N-Cr gradient layer is deposited: close Cr target, adjustment operating air pressure is 0.6 ~ 0.7Pa, passes into N
2, adjustment N
2initial flow is 2 ~ 12sccm, N
2flow-time change interval is 10min, 20min, 30min, 40min, 50min, each timed interval N
2flow increases by 2 ~ 12sccm, N
2flow is finally increased to 10 ~ 60sccm; Adjustment Ar airshed is 60 ~ 70sccm; Bias voltage is down to 100V, and open 2 Mo-S-Cr composition targets, Mo-S-Cr composition target target current is 1.0 ~ 2.0A, and adjusting bias voltage successively every 30min is 100V, 75V, 50V, 75V, 100V, deposition Mo-S-N-Cr gradient layer 150min;
(7) aftertreatment: close 2 Mo-S-Cr composition targets, closes ion source and gas source, and close pulsed bias, deposited coatings terminates.
N element content in Mo-S-N-Cr gradient cladding is along the change of coat-thickness dimension linear, and in Mo-S-N-Cr gradient cladding outermost sublayer, N element content reaches maximum value;
By MoS in adjustment Mo-S-Cr composition target
2quantity and the adjustment of disk pass into N
2flow adjusts Cr constituent content atomic percent in Mo-S-N-Cr gradient cladding, N element content atomic percent, make the best atomic percent of Cr constituent content in Mo-S-N-Cr gradient cladding between 5 ~ 15%, the best atomic percent of N element content is between 5 ~ 40%.
The Mo-S-N-Cr self-lubricating gradient cladding cutter prepared by above-mentioned technique, is Cr transition layer between Mo-S-N-Cr gradient layer and tool matrix, can reduces unrelieved stress, improves the bonding strength between coating and matrix.The raising of Mo-S-N-Cr self-lubricating gradient coating layer cutter coat hardness mainly contains following mechanism: adding of (1) Cr element makes WS
2lattice distorts, and produces solution strengthening; (2) N element, adding of Cr element CrN Nitride Phase can be generated in coating deposition process.Mo-S-N-Cr layer is designed to gradient-structure and can increases the toughness of Mo-S-N-Cr layer and the bonding strength of Mo-S-N-Cr layer and matrix.
The Mo-S-N-Cr self-lubricating gradient cladding cutter prepared by above-mentioned technique, can form one deck MoS continuously between cutter and workpiece in working angles
2solid lubricant film, makes friction occur in MoS
2solid lubricant film is inner, thus reduces friction.Mo-S-N-Cr self-lubricating gradient cladding cutter can reduce cutting force and cutting temperature, reduces tool wear, improves cutter life, can be widely used in the machining of dry cutting and difficult-to-machine material.
Four, accompanying drawing explanation
Fig. 1 is Mo-S-N-Cr self-lubricating gradient cladding cutter coat structural representation of the present invention.
In figure: 1 is Mo-S-N-Cr gradient layer 1 sublayer, 2 is Mo-S-N-Cr gradient layer 2 sublayer, and 3 is Mo-S-N-Cr gradient layer 3 sublayer, and 4 is Mo-S-N-Cr gradient layer 4 sublayer, and 5 is Mo-S-N-Cr gradient layer 5 sublayer, and 6 is that Cr layer, 7 is for tool matrix.
Fig. 2 is Mo-S-Cr composition target structural representation of the present invention.
In figure: 8 is MoS
2disk, 9 is Cr target, and 10 is Cr disk.
Five, embodiment:
Provide two most preferred embodiments of the present invention below:
Embodiment one:
Mo-S-N-Cr self-lubricating gradient cladding cutter and preparation technology thereof, tool matrix 7 is YS8 carbide-tipped lathe tool, and tool surface is Mo-S-N-Cr gradient layer, is Cr layer 6 between Mo-S-N-Cr gradient layer and tool matrix.Depositional mode is electric arc ion-plating deposition Cr transition layer+medium frequency magnetron sputtering deposition Mo-S-N-Cr gradient layer.Its step of preparation process is as follows:
(1) Mo-S-Cr composition target is prepared: be diametrically the uniform processing in sputter area central position 10 ~ 15 circumferential blind holes that 101.6mm, thickness are the Cr target 9 of 4.7mm with numerical-control processing method, the diameter of blind hole is 17mm, the degree of depth of blind hole is 3mm, and in blind hole, Cr disk 10, the MoS that diameter is 17mm, thickness is 5mm is put at interval respectively
2disk 8;
(2) Mo-S-Cr composition target is installed: in vacuum chamber of film coating machine medium frequency magnetron sputtering target installation site, 2 Mo-S-Cr composition targets are installed;
(3) pre-treatment: by the surface finish of YS8 carbide-tipped lathe tool tool matrix 7 to minute surface, remove surface contamination layer, put into alcohol and acetone respectively successively, the each 15min of ultrasonic cleaning, remove tool surface greasy dirt and other pollutents, put into vacuum chamber of film coating machine rapidly after hair dryer drying fully, be evacuated to 7.0 × 10
-3pa, is heated to 150 DEG C, insulation 30min;
(4) Ion Cleaning: pass into Ar gas, air pressure is 1.5Pa, and open grid bias power supply, voltage is 800V, and dutycycle is 0.2, aura cleaning 15min; Reduce and be biased into 300V, air pressure is down to 0.5Pa, opens ion source, and open arc source Cr target, target current is adjusted to 55A, Ion Cleaning 2min;
(5) Cr transition layer is deposited: bias voltage is down to 150V, and Cr target current is adjusted to 65A, electric arc plating Cr 5min;
(6) Mo-S-N-Cr gradient layer is deposited: close Cr target, adjustment operating air pressure is 0.6 ~ 0.7Pa, passes into N
2, adjustment N
2initial flow is 5sccm, N
2flow-time change interval is 10min, 20min, 30min, 40min, 50min, each timed interval N
2flow increases 5sccm, N
2flow is finally increased to 25sccm; Adjustment Ar airshed is 65sccm; Bias voltage is down to 100V, and open 2 Mo-S-Cr composition targets, Mo-S-Cr composition target target current is 1.0A, and adjusting bias voltage successively every 30min is 100V, 75V, 50V, 75V, 100V, deposition Mo-S-N-Cr gradient layer 150min;
(7) aftertreatment: close 2 Mo-S-Cr composition targets, closes ion source and gas source, and close pulsed bias, deposited coatings terminates.
Through the Mo-S-N-Cr gradient layer of deposited coatings, wherein 1 is Mo-S-N-Cr gradient layer 1 sublayer, and 2 is Mo-S-N-Cr gradient layer 2 sublayer, and 3 is Mo-S-N-Cr gradient layer 3 sublayer, and 4 is Mo-S-N-Cr gradient layer 4 sublayer, and 5 is Mo-S-N-Cr gradient layer 5 sublayer,
By MoS in adjustment Mo-S-Cr composition target
2quantity and the adjustment of disk pass into N
2flow adjusts Cr constituent content atomic percent in Mo-S-N-Cr gradient cladding, N element content atomic percent, make the best atomic percent of Cr constituent content in Mo-S-N-Cr gradient cladding between 5 ~ 15%, the best atomic percent of N element content is between 5 ~ 40%.
Embodiment two:
Mo-S-N-Cr self-lubricating gradient cladding cutter and preparation technology thereof, tool matrix 7 is YW1 carbide-tipped milling cutter, and tool surface is Mo-S-N-Cr gradient layer, is Cr layer 6 between Mo-S-N-Cr gradient layer and tool matrix.Depositional mode is electric arc ion-plating deposition Cr transition layer+medium frequency magnetron sputtering deposition Mo-S-N-Cr gradient layer.Its step of preparation process is as follows:
(1) Mo-S-Cr composition target is prepared: be diametrically the uniform processing in sputter area central position 10 ~ 15 circumferential blind holes that 101.6mm, thickness are the Cr target 9 of 4.7mm with numerical-control processing method, the diameter of blind hole is 17mm, the degree of depth of blind hole is 3mm, and in blind hole, Cr disk 10, the MoS that diameter is 17mm, thickness is 5mm is put at interval respectively
2disk 8;
(2) Mo-S-Cr composition target is installed: in vacuum chamber of film coating machine medium frequency magnetron sputtering target installation site, 2 Mo-S-Cr composition targets are installed;
(3) pre-treatment: YW1 carbide-tipped milling cutter matrix surface is polished to minute surface, remove surface contamination layer, put into alcohol and acetone respectively successively, the each 15min of ultrasonic cleaning, remove tool surface greasy dirt and other pollutents, put into vacuum chamber of film coating machine rapidly after hair dryer drying fully, be evacuated to 7.0 × 10
-3pa, is heated to 200 DEG C, insulation 40min;
(4) Ion Cleaning: pass into Ar gas, air pressure is 1.5Pa, and open grid bias power supply, voltage is 800V, and dutycycle is 0.2, aura cleaning 15min; Reduce and be biased into 400V, air pressure is down to 0.5Pa, opens ion source, and open arc source Cr target, target current is adjusted to 65A, Ion Cleaning 3min;
(5) Cr transition layer is deposited: bias voltage is down to 200V, and Cr target current is adjusted to 75A, electric arc plating Cr 7min;
(6) Mo-S-N-Cr gradient layer is deposited: close Cr target, adjustment operating air pressure is 0.7Pa, passes into N
2, adjustment N
2initial flow is 7sccm, N
2flow-time change interval is 10min, 20min, 30min, 40min, 50min, each timed interval N
2flow increases 7sccm, N
2flow is finally increased to 35sccm; Adjustment Ar airshed is 70sccm; Bias voltage is down to 100V, and open 2 Mo-S-Cr composition targets, Mo-S-Cr composition target target current is 1.0 ~ 2.0A, and adjusting bias voltage successively every 30min is 100V, 75V, 50V, 75V, 100V, deposition Mo-S-N-Cr gradient layer 150min;
(7) aftertreatment: close 2 Mo-S-Cr composition targets, closes ion source and gas source, and close pulsed bias, deposited coatings terminates.
Through the Mo-S-N-Cr gradient layer of deposited coatings, wherein 1 is Mo-S-N-Cr gradient layer 1 sublayer, and 2 is Mo-S-N-Cr gradient layer 2 sublayer, and 3 is Mo-S-N-Cr gradient layer 3 sublayer, and 4 is Mo-S-N-Cr gradient layer 4 sublayer, and 5 is Mo-S-N-Cr gradient layer 5 sublayer,
By MoS in adjustment Mo-S-Cr composition target
2quantity and the adjustment of disk pass into N
2flow adjusts Cr constituent content atomic percent in Mo-S-N-Cr gradient cladding, N element content atomic percent, make the best atomic percent of Cr constituent content in Mo-S-N-Cr gradient cladding between 5 ~ 15%, the best atomic percent of N element content is between 5 ~ 40%.
Claims (4)
1. a Mo-S-N-Cr self-lubricating gradient cladding cutter, tool matrix material is rapid steel or Wimet, it is characterized in that: tool surface is Mo-S-N-Cr gradient layer, is Cr transition layer between Mo-S-N-Cr gradient layer and tool matrix.
2. a Mo-S-N-Cr self-lubricating gradient cladding cutter preparation technology, it is characterized in that: depositional mode is electric arc ion-plating deposition Cr transition layer+medium frequency magnetron sputtering deposition Mo-S-N-Cr gradient layer, use 1 Cr electric arc target, 2 Mo-S-Cr composition targets during deposition, its step of preparation process is:
(1) Mo-S-Cr composition target is prepared: be diametrically the uniform processing in sputter area central position 10 ~ 15 circumferential blind holes that 101.6mm, thickness are the Cr target of 4.7mm with numerical-control processing method, the diameter of blind hole is less than the width of sputter area, the degree of depth of blind hole is 3mm, and in blind hole, identical with blind hole diameter, that thickness is 5mm Cr disk, MoS are put in interval respectively
2disk;
(2) Mo-S-Cr composition target is installed: in vacuum chamber of film coating machine medium frequency magnetron sputtering target installation site, 2 Mo-S-Cr composition targets are installed;
(3) pre-treatment: by tool matrix surface finish to minute surface, removes surface contamination layer, puts into alcohol and acetone respectively successively, the each 15min of ultrasonic cleaning, remove tool surface greasy dirt and other pollutents, put into vacuum chamber of film coating machine rapidly after hair dryer drying fully, be evacuated to 7.0 × 10
-3pa, is heated to 100 ~ 250 DEG C, insulation 30 ~ 40min;
(4) Ion Cleaning: pass into Ar gas, air pressure is 1.5Pa, and open grid bias power supply, voltage is 800V, and dutycycle is 0.2, aura cleaning 15min; Reduce and be biased into 300 ~ 400V, air pressure is down to 0.5Pa, opens ion source, and open arc source Cr target, target current is adjusted to 55 ~ 65A, Ion Cleaning 2 ~ 3min;
(5) Cr transition layer is deposited: bias voltage is down to 150 ~ 200V, and Cr target current is adjusted to 65 ~ 100A, electric arc plating Cr 5 ~ 7min;
(6) Mo-S-N-Cr gradient layer is deposited: close Cr target, adjustment operating air pressure is 0.6 ~ 0.7Pa, passes into N
2, adjustment N
2initial flow is 2 ~ 12sccm, N
2flow-time change interval is 10min, 20min, 30min, 40min, 50min, each timed interval N
2flow increases by 2 ~ 12sccm, N
2flow is finally increased to 10 ~ 60sccm; Adjustment Ar airshed is 60 ~ 70sccm; Bias voltage is down to 100V, and open 2 Mo-S-Cr composition targets, Mo-S-Cr composition target target current is 1.0 ~ 2.0A, and adjusting bias voltage successively every 30min is 100V, 75V, 50V, 75V, 100V, deposition Mo-S-N-Cr gradient layer 150min;
(7) aftertreatment: close 2 Mo-S-Cr composition targets, closes ion source and gas source, and close pulsed bias, deposited coatings terminates.
3. prepare the preparation technology of Mo-S-N-Cr self-lubricating gradient cladding cutter according to claim 2 for one kind, it is characterized in that: the N element content in Mo-S-N-Cr gradient cladding is along the change of coat-thickness dimension linear, and in Mo-S-N-Cr gradient cladding outermost sublayer, N element content reaches maximum value.
4. prepare a preparation technology for Mo-S-N-Cr self-lubricating gradient cladding cutter according to claim 2, it is characterized in that: by MoS in adjustment Mo-S-Cr composition target
2quantity and the adjustment of disk pass into N
2flow adjusts Cr constituent content atomic percent in Mo-S-N-Cr gradient cladding, N element content atomic percent, make the best atomic percent of Cr constituent content in Mo-S-N-Cr gradient cladding between 5 ~ 15%, the best atomic percent of N element content is between 5 ~ 40%.
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| CN201510290433.XA CN104846340B (en) | 2015-05-29 | 2015-05-29 | Mo S N Cr self-lubricating gradient coating cutters and its preparation technology |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105861996A (en) * | 2016-06-15 | 2016-08-17 | 济宁学院 | Ti-Al-Cr-N-Mo-S multi-element compounded reinforced coating tool and preparation process thereof |
| CN112725731A (en) * | 2020-12-02 | 2021-04-30 | 东南大学 | Wide-temperature-range self-lubricating gear and preparation method thereof |
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| CN103009697A (en) * | 2012-12-18 | 2013-04-03 | 安徽天一重工股份有限公司 | Self-lubricating gradient composite superhard film and preparation method thereof |
| CN103273687A (en) * | 2013-05-13 | 2013-09-04 | 山东大学 | TiSiN+ZrSiN composite nanometer coated cutting tool and preparation method thereof |
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| EP1245699B1 (en) * | 2001-03-30 | 2011-05-11 | Hitachi Metals, Ltd. | Coated tool for warm and/or hot working |
| CN1727520A (en) * | 2005-07-07 | 2006-02-01 | 浙江大学 | Self-lubricated composite plating in multiple layers and preparation method |
| CN101921984A (en) * | 2010-09-15 | 2010-12-22 | 上海交通大学 | Self-lubricating antifriction composite thin film based on MoS2-TiC-C and preparation method thereof |
| CN103009697A (en) * | 2012-12-18 | 2013-04-03 | 安徽天一重工股份有限公司 | Self-lubricating gradient composite superhard film and preparation method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105861996A (en) * | 2016-06-15 | 2016-08-17 | 济宁学院 | Ti-Al-Cr-N-Mo-S multi-element compounded reinforced coating tool and preparation process thereof |
| CN105861996B (en) * | 2016-06-15 | 2018-05-08 | 济宁学院 | Ti-Al-Cr-N-Mo-S multiple elements designs strengthen coated cutting tool and its preparation process |
| CN112725731A (en) * | 2020-12-02 | 2021-04-30 | 东南大学 | Wide-temperature-range self-lubricating gear and preparation method thereof |
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| CN104846340B (en) | 2017-06-16 |
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