CN106435584A - Heat spraying-PVD composite coating and preparing method thereof - Google Patents
Heat spraying-PVD composite coating and preparing method thereof Download PDFInfo
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- CN106435584A CN106435584A CN201610907088.4A CN201610907088A CN106435584A CN 106435584 A CN106435584 A CN 106435584A CN 201610907088 A CN201610907088 A CN 201610907088A CN 106435584 A CN106435584 A CN 106435584A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/324—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal matrix material layer comprising a mixture of at least two metals or metal phases or a metal-matrix material with hard embedded particles, e.g. WC-Me
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
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Abstract
The invention discloses a heat spraying-PVD composite coating and a preparing method thereof, and belongs to the technical field of surface coatings. The composite coating sequentially comprises a base body, a heat spraying coating and a PVD hard film from interior to exterior. The base body is a metal material base body and comprises an aluminum alloy, a titanium alloy and steel. The heat spraying coating is a heat spraying ceramic coating and comprises a WC-Co base ceramic coating, an NiCr-Cr3C2 base ceramic coating, an Al2O3 base ceramic coating and a ZrO2 base ceramic coating. The PVD hard film is made of metal nitride ceramics and comprises a CrN ceramic coating, a TiN ceramic coating, an AlCrN ceramic coating and an AlTiN ceramic coating. The heat spraying coating has high hardness, a powerful supporting function can be provided for the PVD coating, and the binding force of the composite coating film-base is improved. The PVD coating is high in hardness and is very dense, the PVD coating is deposited on the surface of the heat spraying coating, and gaps of the heat spraying coating are subjected to effective hole sealing. Thus, compared with the heat spraying coating or the PVD coating, the heat spraying-PVD composite coating has high coating bearing capability and abrasion resisting and corrosion resisting performance at the same time.
Description
Technical field
The invention belongs to technical field of surface coating is and in particular to a kind of high-performance abrasion-proof, corrosion-resistant thermal spraying-physics gas
Mutually deposition (PVD) composite coating and preparation method thereof.
Background technology
Plasma spray technology is to develop very rapid a special kind of skill in Surface Engineering in recent years, accounts in the field of Surface Engineering
There is very important status, it is improving piece surface performance, extends part service life and reduces maintenance cost and save money
The aspects such as source play the role of important.Thermal spraying is that a kind of heating certain solid material particle or powder using special device is melted
Become molten drop or semi-molten state, and accelerating jetting, on surface of the work, form special thin layer, with improve matrix material anti-corrosion,
The new material Surface Science technology of the performance such as wear-resisting, high temperature resistant.Even so, hot-spraying coating porosity is higher, therefore, exist
Under some heavily loaded wear-resisting environment, the soft Binder Phase in hot-spraying coating is deformed, and leads to part ceramic particle to come off, causes
Abrasive wear, accelerates coating abrasion to lose efficacy；In addition, under corrosive environment, coat inside is spread by corrosive medium along space, accelerate
Coating corrosion lost efficacy.Although some researchers carry out sealing pores to coating, improve the corrosion resistance of hot-spraying coating,
After sealing of hole, coating yet suffers from a certain amount of defect, for example：Space, crackle, exposed coated substrate.
PVD coating hardness is high, compactness is good, wearability and corrosion-resistant good, therefore, is widely used in cutter, die surface
Process.Even so, under the conditions of facing some heavily loaded fretting wears, single PVD coating can not meet its requirement, mainly former
Because being to there is big difference of hardness between matrix and ceramic coating it is easy to cause film-base interfacial stress to concentrate, affect PVD coating
Film-base junction is made a concerted effort, and is inadequate only by optimizing PVD coating composition and structure, also need to come from the whole system of hard films and matrix
Consider, and then introduce wear-resisting composite coating concept, that is,：Strengthening in the middle of certain thickness is prepared between hard films and matrix
Layer.Hot-spraying coating is exactly one of very promising middle strengthening layer.
Content of the invention
Present invention aim at being directed to the deficiencies in the prior art, provide a kind of thermal spraying-PVD composite coating and its preparation side
Method, has higher film-film-substrate binding strength, hardness, fracture toughness and wear resistance and resistance to this composite coating
Rotten performance.
To achieve these goals, the present invention is achieved by the following technical programs.
A kind of present invention thermal spraying-PVD composite coating, includes matrix, hot-spraying coating, PVD hard from the inside to the outside successively
Film layer；Described matrix is metal material matrix, including aluminium alloy, titanium alloy, iron and steel；Described hot-spraying coating is thermal spraying ceramic
Coating, including：WC-Co base, NiCr-Cr3C2Base, Al2O3Base, ZrO2Base ceramic coating；Described PVD hard film layer is nitride metal
Thing pottery, including CrN, TiN, AlCrN, AlTiN ceramic coating.
Preferably, the thickness of described hot-spraying coating is 0.1～0.5mm.
Preferably, the thickness of described PVD hard film layer is 2～10 μm.
Invention also provides the preparation method of above-mentioned thermal spraying-PVD composite coating is it is characterised in that include following
Step：
(1) metal material matrix is added row sandblast texturing to process, to 1～6 μm of its surface roughness, then carry out Ar gas
Cleaning；
(2) metal material matrix of step (1) frosting treatment is carried out thermal spraying treatment, prepare hot-spraying coating；
(3) hot-spraying coating preparing step (2) carries out mechanical polishing process, to surface roughness≤0.1 μm, then
Carry out ultrasound wave cleaning, dry up；
(4) coating sample drying up step (3) cleaning is put in PVD stove, carries out aura cleaning, then opens metallic target
Material, deposits PVD hard film layer.
Preferably, in described step (2), thermal spraying treatment is HVAF；The bar of this HVAF
Part is：Oxygen flow 750～950NLPM；Fuel flow rate is 15～25L/h；Combustion pressure is 9.0～12bar；Powder feeding rate is 30
～50g/min × 2；Spray distance 200～500mm；Carrier gas flux is 5～15NLPM, and spray angle is 45 °～90 °.
Preferably, in described step (4), aura cleaning condition is：When the background vacuum of the vacuum chamber of PVD stove be less than
1×10-2During Pa, it is passed through argon and controls flow in 50～250sccm, air pressure is less than 0.2Pa, 300～500 DEG C of sample temperature,
Back bias voltage 900V, bombardment time 30～60min；Deposition PVD hard film layer condition be：After aura cleaning, vacuum conditions are 0.1
～5Pa, opens pivoted frame, metal targets, keeps sample bias -30～-200V, is passed through nitrogen, controls air pressure in 0～5Pa, keeps
300～500 DEG C of sample temperature, target current 50～100A, deposit 1～5h, prepared PVD hard film layer.
The mentality of designing of the present invention is：Hot-spraying coating has more preferable hardness compared with matrix, and it supports as PVD coating
Layer, can improve the distribution of coating-substrate interface hardness, improve stress concentration, and reduction matrix is led to PVD coating stress concentration
Harm.Meanwhile, hot-spraying coating has strong bearing capacity, provides strong supporting role to top layer PVD coating, improves PVD
Coating bearing capacity, and then improve its heavily loaded friction and wear behavior；Additionally, hot-spraying coating has a certain amount of porosity, rotten
Erosion medium spreads along space to matrix, accelerates coating corrosion.And PVD coating is fine and close, and corrosive nature is good, therefore, PVD coating
It is deposited on hot-spraying coating surface, thermal spraying product surface quality can be effectively improved.
Compared with prior art, the invention has the beneficial effects as follows：By optimizing spraying coating process, PVD deposition technique, to metal
Matrix carries out thermal spraying and PVD process, prepares thermal spraying-PVD composite coating.Hot-spraying coating has high hard and holds
Loading capability, its as PVD coating supporting layer, can be effectively improved PVD coated film-base junction make a concerted effort, bearing capacity and fracture toughness, carry
High PVD coating heavy duty friction and wear behavior.Meanwhile, PVD coating hardness is high, fine and close and decay resistance is superior, and it is as thermal jet
Coating layer surface coating, can effectively block the hole on sprayed product surface, improve thermal spraying product surface anti-wear performance and resistance to
Corrosive nature.Thermal spraying-PVD composite coating of the present invention is provided simultaneously with thermal spraying product high bearing capacity, also possesses PVD coating resistance to
The characteristic such as friction and wear behavior and decay resistance, thus before the fields such as ocean engineering, petrochemical industry have wide application
Scape.
Brief description
Fig. 1 is embodiment 1, (hot-spraying coating external coating aluminum phosphate chromium hole sealing agent, room temperature applies embodiment 3 with comparative example
Brush 2 times, 250 DEG C are dried 2.5h) the surface topography comparison diagram of prepares coating.
Fig. 2 be embodiment 1～3 preparation coating under different loads hardness balance figure.
Fig. 3 is coated film-base junction test comparison figure with joint efforts of embodiment 2 and embodiment 3 preparation.
Fig. 4 is embodiment 1 and the coating PVvalue testing comparison diagram of embodiment 3 preparation.
Fig. 5 is embodiment 1, (hot-spraying coating external coating aluminum phosphate chromium hole sealing agent, room temperature applies embodiment 3 with comparative example
Brush 2 times, 250 DEG C are dried 2.5h) coating prepared Tafel curve comparison figure in sodium chloride solution.
Specific embodiment
Below by the drawings and specific embodiments, technical solution of the present invention is described in detail, but the protection of the present invention
Scope is not limited to following embodiments.
Embodiment 1
45 steel samples that market is bought carry out machining and are about 0.8 μm to surface roughness, then carry out acetone, no
Water-ethanol is cleaned by ultrasonic, dries up, and then carries out sandblast texturing process so as to surface roughness increases to 4.5 μm, then anhydrous second
Alcohol is cleaned by ultrasonic, dries up.On sample exotherms spraying frock after drying up, carry out hot blow process using flame gun, make workpiece table
Face temperature rises to 150 DEG C, subsequently carries out spraying the preparation of NiCr-Cr3C2 coating.Hot-spraying technique parameter is as follows：Oxygen flow
880NLPM；Fuel flow rate is 23.1L/h；Combustion pressure is 10.0bar；Powder feeding rate is 45g/min × 2；Spray distance 320mm；
Carrier gas flux is 10NLPM, and spray angle is 90 °.Spray-on coating thickness is 0.5mm, Coating Surface Roughness≤4 μm.
Embodiment 2
45 steel are carried out machining, mechanical polishing is processed, cause its surface roughness≤0.1 μm, then carry out anhydrous
EtOH Sonicate cleans, dries up.It is placed in the substrate frame in furnace chamber body after subsequently the sample after cleaning being dried up.Open mechanical pump and
The base vacuum of vacuum chamber is extracted into less than 1 × 10 molecular pump-2Pa, is passed through Ar gas and controls flow in 100sccm, air pressure is little
In 0.2Pa, 450 DEG C of sample temperature, back bias voltage 900V, bombardment time 30min.After aura cleaning, vacuum conditions are 0.3Pa, beat
Open pivoted frame, Cr target and AlCr target, keep sample bias -120V, be passed through N2, control air pressure in 3.0Pa, keep sample temperature 450
DEG C, target current 75A, deposit 3h, prepared thickness is 3 μm of PVD hard film layer.
Embodiment 3
45 steel samples that market is bought carry out machining and are about 0.8 μm to surface roughness, then carry out acetone, no
Water-ethanol is cleaned by ultrasonic, dries up, and then carries out sandblast texturing process so as to surface roughness increases to 2～6 μm, then anhydrous
EtOH Sonicate cleans, dries up.On sample exotherms spraying frock after drying up, carry out hot blow process using flame gun, make workpiece
Surface temperature rises to 150 DEG C, subsequently carries out spraying the preparation of NiCr-Cr3C2 coating.Hot-spraying technique parameter is as follows：Oxygen flow
880NLPM；Fuel flow rate is 23.1L/h；Combustion pressure is 10.0bar；Powder feeding rate is 45g/min × 2；Spray distance 320mm；
Carrier gas flux is 10NLPM, and spray angle is 90 °.Spray-on coating thickness is 0.5mm, Coating Surface Roughness≤4 μm.To spray
Product afterwards carries out machining, mechanical polishing is processed so as to surface roughness≤0.1 μm, subsequently carries out dehydrated alcohol ultrasonic
Clean, dry up.It is placed in the substrate frame in furnace chamber body after sample after cleaning is dried up.Open mechanical pump and molecular pump by vacuum
The base vacuum of room is extracted into less than 1 × 10-2Pa, is passed through Ar gas and controls flow in 100sccm, air pressure is less than 0.2Pa, sample
450 DEG C of temperature, back bias voltage 900V, bombardment time 30min.Aura cleaning after, vacuum conditions be 0.3Pa, open pivoted frame, Cr target and
AlCr target, keeps sample bias -120V, is passed through N2, control air pressure in 3.0Pa, keep 450 DEG C of sample temperature, target current
75A, deposits 3h, prepared thickness is 3 μm of PVD hard film layer.
As shown in figure 1, Fig. 1 a is the sample of embodiment 1 preparation, thermal spraying treatment is only done to 45 steel；Fig. 1 b is phosphoric acid
The sample of aluminum chromium hole sealing agent sealing pores, i.e. comparative example；Fig. 1 c is the sample of embodiment 3 preparation, and that is, thermal spraying-PVD is multiple
Close coating.
It can be seen that from FIG. 1 a that hot-spraying coating surface has substantial amounts of hole, and surface is very coarse；From Fig. 1 b
As can be seen that the most of hole in hot-spraying coating surface is blocked by hole sealing agent, surface polishes；Can from Fig. 1 c
Go out, thermal spraying surface of the work is covered by PVD coating completely, coating surface has many tiny granule phases, this illustrates thermal jet
Apply-PVD composite coating, compared with hot-spraying coating, there is finer and close surface.
Fig. 2 represents hardness number under different loads for the various coatings.It can be seen that with the increase of load, each painting
Layer surface hardness is gradually lowered.Under 50g power, hot-spraying coating (i.e. the coating of embodiment 1 preparation) case hardness is about
1000HV, PVD coating (i.e. the coating of embodiment 2 preparation) case hardness is about 1300HV, and thermal spraying-PVD composite coating is (i.e. real
Apply the coating of example 3 preparation) case hardness is about 1800HV；Increase with load, hot-spraying coating case hardness slowly reduces, and
The case hardness of PVD coating drastically declines, and the case hardness of thermal spraying-PVD composite coating is gradually lowered.In same load condition
Under (especially big load, >=300g), thermal spraying-PVD composite coating hardness number is always above PVD coating or hot-spraying coating,
This explanation hot-spraying coating provides strong supporting role to top layer PVD coating.
Fig. 3 a is steel matrix Direct precipitation PVD coating (i.e. the coating of embodiment 2 preparation), Fig. 3 b is that thermal spraying-PVD is combined
Film-the base junction of the coating coating of preparation (i.e. embodiment 3) is made a concerted effort test result.It can be seen that PVD coated film-base junction
Make a concerted effort to be about 20N, thermal spraying-PVD composite coating film-base junction makes a concerted effort to be about 55N.It is transversal that hot-spraying coating improves composite coating
Hardness distribution on face, improves composite coating film-base interfacial stress distribution, it is to avoid composite coating film-base interfacial stress is concentrated, and changes
Kind composite coating film-base junction is made a concerted effort.
Fig. 4 is hot-spraying coating (i.e. the coating of embodiment 1 preparation), (i.e. prepared by embodiment 3 for thermal spraying-PVD composite coating
Coating) fretting wear curve under 10N load.It can be seen that hot-spraying coating coefficient of friction between 0.6～
Between 0.75, and thermal spraying-PVD composite coating coefficient of friction is about 0.45.Wear rate test shows, hot-spraying coating wear rate
For 2.57 × 10-14m3/ Nm, thermal spraying-PVD composite coating wear rate is 4.67 × 10-15m3/Nm.It can be seen that, thermal spraying-PVD is multiple
Close coating, compared with hot-spraying coating, there is higher wearability.
Fig. 5 is the hot-spraying coating coating of preparation (i.e. embodiment 1), the hot-spraying coating of aluminum phosphate chromium sealing pores (i.e.
Comparative example coating) and the thermal spraying-PVD composite coating coating of preparation (i.e. embodiment 3) in 3.5wt.% sodium chloride solution
Tafel curve.It can be seen that because hot-spraying coating has substantial amounts of hole, therefore, it has low corrosion potential
(- 0.78V), after aluminum phosphate chromium sealing pores, its corrosion potential increases to (- 0.67V), and thermal spraying-PVD composite coating tool
There is higher corrosion potential (- 0.48V).In commercial production, corrosion-resistant in order to improve hot-spraying coating, frequently with sealing pores,
Found according to this patent experimental result, thermal spraying-PVD composite coating has higher corrosion potential compared with the coating of sealing pores.
Claims (6)
1. a kind of thermal spraying-PVD composite coating is it is characterised in that described composite coating includes matrix, thermal jet from the inside to the outside successively
Coating layer, PVD hard film layer；Described matrix is metal material matrix, including aluminium alloy, titanium alloy, iron and steel；Described thermal spraying applies
Layer is thermal Sperayed Ceramic Coatings, including：WC-Co base, NiCr-Cr3C2Base, Al2O3Base, ZrO2Base ceramic coating；Described PVD hard
Film layer is metal nitride pottery, including CrN, TiN, AlCrN, AlTiN ceramic coating.
2. as claimed in claim 1 a kind of thermal spraying-PVD composite coating it is characterised in that the thickness of described hot-spraying coating
For 0.1～0.5mm.
3. as claimed in claim 1 a kind of thermal spraying-PVD composite coating it is characterised in that the thickness of described PVD hard film layer
Spend for 2～10 μm.
4. a kind of preparation method of the thermal spraying-PVD composite coating as any one of claims 1 to 3, its feature exists
In comprising the following steps：
(1) metal material matrix is added row sandblast texturing to process, to 1～6 μm of its surface roughness, then carry out Ar gas clear
Wash；
(2) metal material matrix of step (1) frosting treatment is carried out thermal spraying treatment, prepare hot-spraying coating；
(3) hot-spraying coating preparing step (2) carries out mechanical polishing process, to surface roughness≤0.1 μm, then carries out
Ultrasound wave cleans, and dries up；
(4) coating sample drying up step (3) cleaning is put in PVD stove, carries out aura cleaning, then opens metal targets,
Deposition PVD hard film layer.
5. as claimed in claim 4 a kind of preparation method of thermal spraying-PVD composite coating it is characterised in that described step
(2), in, thermal spraying treatment is HVAF；The condition of this HVAF is：Oxygen flow 750～
950NLPM；Fuel flow rate is 15～25L/h；Combustion pressure is 9.0～12bar；Powder feeding rate is 30～50g/min × 2；Spraying
Distance 200～500mm；Carrier gas flux is 5～15NLPM, and spray angle is 45 °～90 °.
6. as claimed in claim 4 a kind of preparation method of thermal spraying-PVD composite coating it is characterised in that described step
(4), in, aura cleaning condition is：When the background vacuum of the vacuum chamber of PVD stove is less than 1 × 10-2During Pa, it is passed through argon and controls
In 50～250sccm, air pressure is less than 0.2Pa to flow processed, 300～500 DEG C of sample temperature, back bias voltage 900V, and bombardment time 30～
60min；Deposition PVD hard film layer condition be：After aura cleaning, vacuum conditions are 0.1～5Pa, open pivoted frame, metallic target
Material, keeps sample bias -30～-200V, is passed through nitrogen, controls air pressure in 0～5Pa, keeps 300～500 DEG C of sample temperature, target
Material electric current 50～100A, deposits 1～5h, prepared PVD hard film layer.
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