CN112011787A - Binding force enhanced abrasion-resistant corrosion-resistant composite coating and preparation method thereof - Google Patents
Binding force enhanced abrasion-resistant corrosion-resistant composite coating and preparation method thereof Download PDFInfo
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- CN112011787A CN112011787A CN202010830463.6A CN202010830463A CN112011787A CN 112011787 A CN112011787 A CN 112011787A CN 202010830463 A CN202010830463 A CN 202010830463A CN 112011787 A CN112011787 A CN 112011787A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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Abstract
The invention discloses a binding force enhanced wear-resistant corrosion-resistant composite coating and a preparation method thereof, aiming at meeting the requirement that a coating material has long-term and stable wear-resistant and corrosion-resistant performances under the dual environments of friction and corrosion. The invention comprises processing the surface of the base material of the part in nanometer or submicron order; subsequently, a corrosion-resistant coating is prepared by an Atomic Layer Deposition (ALD) technique; finally, the wear resistant coating preparation is carried out by Physical Vapour Deposition (PVD) techniques. The nano or submicron processing on the surface of the base material of the part aims at increasing the mechanical interlocking effect between the base material and the ALD prepared coating and between the ALD prepared coating and the PVD prepared coating, and improving the binding force; meanwhile, the wear-resistant coating prepared on the top by the PVD technology can effectively protect the corrosion-resistant coating prepared on the bottom by the ALD technology, and the corrosion-resistant coating on the bottom is prevented from being worn and damaged and losing the corrosion-resistant effect.
Description
Technical Field
The invention relates to a binding force enhanced wear-resistant corrosion-resistant composite coating and a preparation method thereof, in particular to a binding force enhanced wear-resistant corrosion-resistant composite coating based on mechanical interlocking, high compactness of an atomic layer deposition coating and high hardness of a physical vapor deposition coating and a preparation method thereof, and belongs to the technical field of surface engineering.
Background
Engineering applications are increasingly demanding coating materials that are both wear resistant and corrosion resistant. The coating prepared by the Physical Vapor Deposition (PVD) technology has high hardness, and is an effective method for improving the surface abrasion resistance of parts. However, the PVD technique produces coatings with sub-micron pores that provide flow channels for corrosive solutions to attack the substrate, resulting in coatings produced by PVD having poor corrosion resistance. The coating prepared by the Atomic Layer Deposition (ALD) technology has high density, and is an effective method for improving the corrosion resistance of the surface of the part. However, ALD techniques produce coatings with thin thicknesses and low hardness, resulting in poor abrasion resistance.
In order to obtain good wear and corrosion resistance properties at the same time, wear resistant coatings prepared by Physical Vapor Deposition (PVD) techniques and corrosion resistant coatings prepared by Atomic Layer Deposition (ALD) techniques are combined with each other. At present, composite coatings prepared by combining PVD and ALD technologies have two structures: 1) firstly, preparing an abrasion-resistant coating by using a PVD (physical vapor deposition) technology, and then preparing a corrosion-resistant coating by using an ALD (atomic layer deposition) technology; 2) firstly, preparing an abrasion-resistant coating by using a PVD (physical vapor deposition) technology, then preparing a corrosion-resistant coating by using an ALD (atomic layer deposition) technology, and then preparing the abrasion-resistant coating by using the PVD technology. While both of these configurations may improve the corrosion resistance of coatings prepared by a single PVD technique, the corrosion resistant coating in the top or middle portion of the configuration may lose its corrosion resistance properties once the ALD coating is destroyed by excessive wear during use of the coating. Furthermore, the intercoat bonding forces produced by the two different techniques of PVD and ALD cannot be guaranteed.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the bonding force enhanced abrasion-resistant corrosion-resistant composite coating and the preparation method thereof are provided, the surfaces with microstructures or different roughness of different shapes, sizes and distribution densities are processed on a base material, the ALD technology is utilized to prepare the coating with good three-dimensional conformability, the original microstructure or roughness of the surface of the base material is kept, and the bonding force between the base material and the ALD corrosion-resistant coating and the bonding force between the ALD corrosion-resistant coating and the PVD abrasion-resistant coating on the upper portion of the ALD corrosion-resistant coating are increased through the mechanical interlocking effect. Meanwhile, an ALD (atomic layer deposition) preparation coating is formed below, and a PVD (physical vapor deposition) preparation coating is arranged above, so that the long-acting corrosion resistance of the ALD coating is ensured.
The invention adopts the following technical scheme for solving the technical problems:
a preparation method of a binding force enhanced abrasion-resistant corrosion-resistant composite coating comprises the following steps:
step 1, processing a substrate needing to prepare a coating on the surface of the substrate to enable the surface of the substrate to have a plurality of bulges or pits; or, processing the surface of the substrate needing to prepare the coating to ensure that the surface of the substrate has certain roughness;
and 3, preparing the wear-resistant coating on the prepared corrosion-resistant coating by adopting a physical vapor deposition technology to obtain the final binding force enhanced wear-resistant corrosion-resistant composite coating.
In a preferred embodiment of the present invention, the substrate in step 1 is a metal material, a non-metal material or a composite material.
As a preferable scheme of the invention, the shape of the protrusions in step 1 is stripe, circle, square or diamond, the height of the protrusions is 50 nm to 400 nm, and the surface distribution density of the protrusions is 10% to 80%; the pits are in the shape of stripes, circles, squares or diamonds, the depth of the pits is 50 to 400 nanometers, and the surface distribution density of the pits is 10 to 80 percent.
In a preferred embodiment of the present invention, the roughness of step 1 is 20nm to 400 nm.
In a preferred embodiment of the present invention, the corrosion-resistant coating in step 2 is an oxide, a nitride or a carbide.
As a preferable scheme of the invention, the thickness of the corrosion-resistant coating in the step 2 is 20 nanometers to 200 nanometers.
In a preferred embodiment of the present invention, the wear-resistant coating in step 3 is a nitride, carbide or boride.
As a preferable mode of the present invention, the thickness of the abrasion resistant coating in step 3 is 500 nm to 4 μm.
As a preferable mode of the present invention, the wear-resistant coating in step 3 is a two-element or multi-element coating.
The bonding force enhanced abrasion-resistant corrosion-resistant composite coating prepared by any one of the preparation methods.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects:
1. the invention combines the advantages of high hardness, good abrasion resistance, high density of ALD coating and strong corrosion resistance of PVD coating. In addition, the corrosion-resistant coating is firstly prepared on the surface of the substrate with the microstructure or different roughness by the ALD technology, and the good three-dimensional conformability of the coating prepared by the ALD technology is utilized to reserve different microstructures or different roughness on the surface of the substrate, so that the binding force between the substrate and the ALD corrosion-resistant coating and the binding force between the ALD corrosion-resistant coating and the PVD wear-resistant coating are increased by mechanical interlocking.
2. The invention makes up for the defects of the wear-resistant coating prepared by the PVD technology and the corrosion-resistant coating prepared by the ALD technology. Meanwhile, the composite coating structure is optimized, the corrosion-resistant coating prepared by the ALD technology is placed at the bottommost part, and the wear-resistant coating prepared by the PVD technology is placed at the top part, so that the corrosion-resistant coating at the bottom part is ensured to continuously provide corrosion resistance under the condition that the wear-resistant coating at the top part does not fail.
Drawings
FIG. 1 is a schematic diagram of a process for preparing a binding force enhanced abrasion-resistant corrosion-resistant composite coating by adopting the process disclosed by the invention.
Fig. 2(a) -2 (c) are schematic diagrams comparing the advantages and disadvantages of the composite coating structure prepared by the process of the present invention with the existing composite coating structure, wherein fig. 2(a) is the structure of the ALD corrosion-resistant coating on the top, fig. 2(b) is the structure of the ALD corrosion-resistant coating in the middle, and fig. 2(c) is the structure of the ALD corrosion-resistant coating on the bottom.
FIG. 3 shows the surface morphology and the corresponding surface roughness Sa of example 1 of the present invention, wherein (a) is a 316L stainless steel substrate and (b) is TiO prepared on the 316L stainless steel substrate by ALD technique2A corrosion-resistant coating, and (c) TiO prepared on a 316L stainless steel substrate by an ALD technology2And preparing the TiN anti-wear coating by a PVD (physical vapor deposition) technology.
FIG. 4 is an X-ray diffraction pattern of example 1 of the present invention wherein (a) is TiO prepared by ALD technique on a 316L stainless steel substrate2A corrosion-resistant coating, and (b) TiO prepared on a 316L stainless steel substrate by an ALD technology2And preparing the TiN anti-wear coating by a PVD (physical vapor deposition) technology.
FIG. 5 shows TiO on substrates of different roughness according to example 2 of the present invention2Scratch loading-friction curve of the/TiN bilayer, wherein (a) is 100nm, (b) is 200nm and (c) is 300 nm.
FIG. 6 is a surface topography of the etched substrate of example 3 of the present invention, wherein (a) is a single layer of TiN and (b) is TiO2a/TiN bilayer coating, (c) abraded TiO2a/TiN bilayer coating.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
As shown in FIG. 1, the invention provides a preparation method of a bonding force enhanced abrasion-resistant corrosion-resistant composite coating, which comprises the following steps:
(1) processing the surface of the base material: carrying out surface processing on the surface of the base material with different forms of microstructures or different roughness;
(2) preparing a corrosion-resistant coating: preparing a corrosion-resistant coating on the surface-processed substrate by an Atomic Layer Deposition (ALD) technique; because the ALD technology is used for preparing the coating with good three-dimensional conformability, the original processing surface of the base material can be still kept after the preparation of the corrosion-resistant coating is finished;
(3) preparing an abrasion-resistant coating: preparing an abrasion resistant coating on the prepared corrosion resistant coating by a Physical Vapor Deposition (PVD) technique; mechanical interlocking with microstructure or roughness is used to improve the bonding force between the corrosion-resistant coating and the wear-resistant coating.
The base material in the step (1) can be metal, nonmetal or composite material, and the processing microstructure and the roughness are in a nanometer or submicron level; the corrosion-resistant coating prepared by the Atomic Layer Deposition (ALD) technology in the step (2) can be an oxide, a nitride or a carbide, and the thickness is nano or submicron; the wear-resistant coating prepared by the Physical Vapor Deposition (PVD) technology in the step (3) can be binary or multi-element nitride, carbide or boride, and the thickness is submicron or micron.
The existing PVD/ALD composite coating structure is shown in FIG. 2(a) and FIG. 2(b), when the coating is worn to a depth exceeding the ALD coating position, the ALD coating is damaged, and the original corrosion resistance is lost. Whereas the composite structure of the present invention, the ALD corrosion-resistant coating of the lower layer may continue to provide corrosion resistance as long as the PVD wear-resistant coating of the upper layer is not completely worn through, as shown in fig. 2 (c).
Example 1
A binding force enhanced abrasion-resistant corrosion-resistant composite coating and a preparation method thereof comprise the following steps:
(1) processing the surface of the base material: processing the surface with the surface roughness Sa of about 27.2nm on the surface of 316L by manual grinding and machine precision polishing;
(2) preparing a corrosion-resistant coating: depositing a layer of TiO with the thickness of 20nm on the surface with the surface roughness Sa of 27.2nm by an Atomic Layer Deposition (ALD) technology2A corrosion-resistant coating;
(3) preparing an abrasion-resistant coating: on TiO by magnetron sputtering technique2And preparing a TiN anti-wear coating with the thickness of 0.4 mu m on the anti-corrosion coating.
And (3) testing the appearance, the roughness and the crystalline phase structure of the surface subjected to the surface processing of the base material, the preparation of the corrosion-resistant coating and the preparation of the wear-resistant coating:
surface appearance and roughness: the polished 316L surface profile is shown in fig. 3 (a), and the roughness Sa is about 27.2 nm. The surface morphology of the prepared corrosion-resistant coating is shown in fig. 3 (b), and the roughness Sa is about 28.2nm, which indicates that the corrosion-resistant coating prepared by the ALD technology can maintain the original morphology and roughness of the substrate. The surface morphology after the wear-resistant coating preparation is shown in fig. 3 (c), and the roughness Sa is increased to 75.3 nm.
Crystal phase structure: analysis of TiO by X-ray diffraction Spectroscopy2The corrosion-resistant coating and the TiN wear-resistant coating are in a crystal phase structure as shown in fig. 4 (a) and fig. 4 (b). Illustrating, the preparation of TiO by ALD2The corrosion-resistant coating is of an amorphous structure, and the TiN wear-resistant coating prepared by the PVD technique is of a TiN crystalline phase structure.
Example 2
A binding force enhanced abrasion-resistant corrosion-resistant composite coating and a preparation method thereof comprise the following steps:
(1) processing the surface of the base material: processing the surface of 316L by manual grinding and machine precision polishing to obtain the surface with the surface roughness Sa of about 100nm, 200nm and 300 nm;
(2) preparing a corrosion-resistant coating: depositing a layer of TiO with the thickness of 20nm on the surface with the surface roughness Sa of 100nm, 200nm and 300nm by an Atomic Layer Deposition (ALD) technology2A corrosion-resistant coating;
(3) preparing an abrasion-resistant coating: on TiO by magnetron sputtering technique2And preparing a TiN anti-wear coating with the thickness of 0.4 mu m on the anti-corrosion coating.
TiO prepared on different substrate roughness2The bonding force of the TiN double-layer coating is tested:
fig. 5 is a graph showing scratch loading force vs. friction of the coating. Wherein (a) of FIG. 5 is TiO prepared on a roughness of 100nm2The bonding force of the/TiN double-layer coating is 10N; FIG. 5 (b) is TiO prepared at 200nm roughness2The bonding force of the/TiN double-layer coating is 12N; FIG. 5 (c) is TiO prepared at 300nm roughness2The bonding force of the/TiN double-layer coating is 16N. Indicating that as the roughness increases, the mechanical interlocking increases and the film-substrate bonding force increases.
Example 3
A binding force enhanced abrasion-resistant corrosion-resistant composite coating and a preparation method thereof comprise the following steps:
(1) processing the surface of the base material: processing the surface with the surface roughness Sa of about 100nm on the surface of 316L by manual grinding and machine precision polishing;
(2) preparing a corrosion-resistant coating: depositing a layer of TiO with the thickness of 20nm on the surface with the surface roughness Sa of 100nm by an Atomic Layer Deposition (ALD) technology2A corrosion-resistant coating;
(3) preparing an abrasion-resistant coating: on TiO by magnetron sputtering technique2And preparing a TiN anti-wear coating with the thickness of 0.4 mu m on the anti-corrosion coating.
For reference comparison, a TiN abrasion-resistant coating layer having a thickness of 0.4 μm was deposited directly on the surface of the substrate having a surface roughness Sa of 100nm by a magnetron sputtering technique. Subsequently, for a single layer of TiN coating, TiO prepared at 100nm roughness2TiN bilayer coating and abraded TiO2the/TiN bilayer coating was subjected to a polarization test:
as shown in fig. 6 (a), after etching, the single-layer TiN coating had large etched holes on the surface. And TiO prepared at a roughness of 100nm as shown in FIG. 6 (b)2the/TiN double-layer coating does not have large corrosion holes, which indicates the TiO of the bottom layer2The coating plays a good role in corrosion resistance. Adding TiO into the mixture2the/TiN bilayer coating is subjected to a polarization corrosion test after certain abrasion, the surface appearance is shown as (c) of figure 6, and the surface appearance is similar to that of the unworn TiO2the/TiN bilayer etched features were similar ((b) of FIG. 6), thus demonstrating that the underlying TiO was not destroyed despite the wear of the upper TiN coating2Coating, underlayer TiO2The coating still has good corrosion resistance.
The above embodiments are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modifications made on the basis of the technical scheme according to the technical idea of the present invention fall within the protection scope of the present invention.
Claims (10)
1. The preparation method of the binding force enhanced abrasion-resistant corrosion-resistant composite coating is characterized by comprising the following steps of:
step 1, processing a substrate needing to prepare a coating on the surface of the substrate to enable the surface of the substrate to have a plurality of bulges or pits; or, processing the surface of the substrate needing to prepare the coating to ensure that the surface of the substrate has certain roughness;
step 2, preparing the corrosion-resistant coating on the surface of the base material processed in the step 1 by adopting an atomic layer deposition technology;
and 3, preparing the wear-resistant coating on the prepared corrosion-resistant coating by adopting a physical vapor deposition technology to obtain the final binding force enhanced wear-resistant corrosion-resistant composite coating.
2. The method for preparing the composite coating with enhanced binding force, wear resistance and corrosion resistance according to claim 1, wherein the substrate in step 1 is a metal material, a non-metal material or a composite material.
3. The method for preparing the composite coating with enhanced binding force, abrasion resistance and corrosion resistance according to claim 1, wherein the protrusions of step 1 are in the shape of stripes, circles, squares or diamonds, the height of the protrusions is 50 nm to 400 nm, and the surface distribution density of the protrusions is 10% to 80%; the pits are in the shape of stripes, circles, squares or diamonds, the depth of the pits is 50 to 400 nanometers, and the surface distribution density of the pits is 10 to 80 percent.
4. The method for preparing the adhesion-enhanced abrasion-resistant and corrosion-resistant composite coating according to claim 1, wherein the roughness of the step 1 is 20nm to 400 nm.
5. The method for preparing the cohesion-enhanced abrasion-resistant and corrosion-resistant composite coating according to claim 1, wherein the corrosion-resistant coating of step 2 is an oxide, nitride or carbide.
6. The method for preparing the adhesion-enhanced abrasion-resistant and corrosion-resistant composite coating according to claim 1, wherein the thickness of the corrosion-resistant coating in the step 2 is 20nm to 200 nm.
7. The method for preparing the adhesion-enhanced wear-resistant and corrosion-resistant composite coating according to claim 1, wherein the wear-resistant coating in step 3 is a nitride, carbide or boride.
8. The method for preparing the adhesion-enhanced abrasion-resistant and corrosion-resistant composite coating according to claim 1, wherein the abrasion-resistant coating of step 3 has a thickness of 500 nm to 4 μm.
9. The method for preparing the composite coating with enhanced binding force, abrasion resistance and corrosion resistance according to claim 1, wherein the abrasion resistant coating in the step 3 is a two-element or multi-element coating.
10. The bonding force enhanced abrasion-resistant corrosion-resistant composite coating prepared by the preparation method of any one of claims 1 to 9.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015145538A (en) * | 2015-04-28 | 2015-08-13 | 日本発條株式会社 | Manufacturing method of laminate |
| CN106521495A (en) * | 2016-11-23 | 2017-03-22 | 虞海盈 | Wear and corrosion resisting composite coating layer |
| CN107761072A (en) * | 2017-10-09 | 2018-03-06 | 江苏大学 | A kind of matrix and preparation method of the enhancing of face coat bond strength |
| CN108611601A (en) * | 2018-04-23 | 2018-10-02 | 南方科技大学 | Interface-reinforced composite material and application thereof |
| CN208293083U (en) * | 2018-03-30 | 2018-12-28 | 镇江东艺机械有限公司 | A kind of high speed cutting tool based on PVD technique |
| CN110524013A (en) * | 2019-09-09 | 2019-12-03 | 湖南科技大学 | A kind of micro- texture cutter and preparation method thereof with nano coating |
-
2020
- 2020-08-18 CN CN202010830463.6A patent/CN112011787A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015145538A (en) * | 2015-04-28 | 2015-08-13 | 日本発條株式会社 | Manufacturing method of laminate |
| CN106521495A (en) * | 2016-11-23 | 2017-03-22 | 虞海盈 | Wear and corrosion resisting composite coating layer |
| CN107761072A (en) * | 2017-10-09 | 2018-03-06 | 江苏大学 | A kind of matrix and preparation method of the enhancing of face coat bond strength |
| CN208293083U (en) * | 2018-03-30 | 2018-12-28 | 镇江东艺机械有限公司 | A kind of high speed cutting tool based on PVD technique |
| CN108611601A (en) * | 2018-04-23 | 2018-10-02 | 南方科技大学 | Interface-reinforced composite material and application thereof |
| CN110524013A (en) * | 2019-09-09 | 2019-12-03 | 湖南科技大学 | A kind of micro- texture cutter and preparation method thereof with nano coating |
Non-Patent Citations (1)
| Title |
|---|
| 冯丽萍等: "《薄膜技术与应用》", 29 February 2016, 西北工业大学出版社 * |
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