CN107720691A - Six degree of freedom is double to refer to micro-/nano operating device in parallel and its operating method - Google Patents
Six degree of freedom is double to refer to micro-/nano operating device in parallel and its operating method Download PDFInfo
- Publication number
- CN107720691A CN107720691A CN201711063106.6A CN201711063106A CN107720691A CN 107720691 A CN107720691 A CN 107720691A CN 201711063106 A CN201711063106 A CN 201711063106A CN 107720691 A CN107720691 A CN 107720691A
- Authority
- CN
- China
- Prior art keywords
- small circular
- circular plate
- large circle
- linear ultrasonic
- ultrasonic motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011017 operating method Methods 0.000 title abstract description 7
- 239000011159 matrix material Substances 0.000 claims abstract description 27
- 238000013519 translation Methods 0.000 claims description 6
- 238000004026 adhesive bonding Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 238000002604 ultrasonography Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000006073 displacement reaction Methods 0.000 abstract description 4
- 108090000623 proteins and genes Proteins 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002086 nanomaterial Substances 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
- B81C99/0025—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in B81C99/001 - B81C99/002
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Refer to micro-/nano operating device in parallel and its operating method the present invention relates to a kind of six degree of freedom is double, belong to it is micro-/receive manufacturing science and technical field, technical field of bioengineering.It include base, matrix, the linear ultrasonic motor for driving large circle, the linear ultrasonic motor for driving small circular plate, directly justify flexible ball pivot, large circle, small circular plate, center refers to, bias refers to, small circular plate end pointer and large circle end pointer.The device, which using six linear ultrasonic motors and six directly justifies flexible ball pivot and drives the center of parallel connection to refer to respectively, to be referred to bias, realizes the cooperating of two finger six degree of freedoms, have structure novel, displacement resolution is high, operating space is big, and output is steady, the advantages that reliable operation.
Description
Technical field
The present invention relates to a kind of double fingers of six degree of freedom micro-/nano operating device in parallel and its operating method, specifically should
Drive two to be operated in parallel with linear ultrasonic motor and refer to the operation device for realizing six-freedom motion, it can be applied to biological cell
Deng operations such as micrometric objects separation, gripping and upsets, belong to micro-/manufacturing science of receiving and led with technical field, biotechnology
Domain.
Background technology
With the fast development of the science and technology such as bioengineering, medical treatment, the mankind explore microcosmos step and constantly accelerated.
Micro-/operating system of receiving is macroscopical Mechatronic Systems for being operated to microscopic particles.Realized by applying power to micrometer/nanometer
The push/pull of dimensional structure and device, crawl/release, positioning, directional operation.It is mainly used in the behaviour of micro-/micro-nano structure and device
Make, encapsulate and assemble, the operation of the biologic grain such as cell, gene, protein.Therefore micro- the research of operating system/receive micro-/is received
Manufacturing science has important application value and learning value with technical field, biology manufacture with bionical manufacturing science field.It is existing
Micro-/nano operating device use piezoelectric direct drive, start is limited in scope, and operating space scope is small, it is impossible to meets across chi
The operational requirements of degree.
The content of the invention
The present invention proposes a kind of double fingers of six degree of freedom micro-/nano operating device in parallel and its operating method, specifically
Two parallel operations of applicable line Driven by Ultrasonic Motors refer to the operation device for realizing six-freedom motion, and it operates displacement resolution
Up to nanoscale, the operations such as the separation of the micrometric objects such as biological cell, gripping and upset are can be applied to, and can realize to micron extremely
Grade size objects across scale operation.
The present invention is realized by following technology：
A kind of six degree of freedom is double to refer to micro-/nano operating device in parallel, it is characterised in that：It is individual big including matrix, the n being installed on matrix
Annulus driving linear ultrasonic motor, n small circular plate driving linear ultrasonic motor, in addition to large circle, small circular plate；All large circles
The mover direction of motion of driving linear ultrasonic motor and all small circular plates driving linear ultrasonic motor is parallel to each other；Large circle drives
Linear ultrasonic motor and small circular plate driving linear ultrasonic motor arranged for interval, the axis around matrix are evenly distributed for one week；It is and all
Large circle driving linear ultrasonic motor equal apart from matrix axial line distance is D, and all small circular plates drive linear ultrasonic motor distance
Equal matrix axial line distance is d, and D is more than d;The small circular plate and large circle are centrally located on the axis of matrix；N great circle
The end of the mover of ring driving linear ultrasonic motor is connected by directly justifying flexible ball pivot with large circle, and n small circular plate drives straight line
The end of the mover of ultrasound electric machine is connected by directly justifying flexible ball pivot with small circular plate；The central shaft and mover for directly justifying flexible ball pivot are transported
Dynamic direction is parallel；Above-mentioned small circular plate is fixed with center and referred to, and the end that center refers to is provided with small circular plate end pointer；It is solid on large circle
Surely bias refers to, the end that bias refers to is provided with large circle end pointer；Above-mentioned center refers to, small circular plate end pointer and base shaft
Line overlaps；Large circle end pointer and matrix diameter parallel.
Described six degree of freedom is double to refer to micro-/nano operating device in parallel, it is characterised in that：Above-mentioned n=3；Above-mentioned matrix is in six
The Cylinder Gear colyliform of tooth, the adjacent flank of tooth of each two are separated by 60 ° of angles.
Described six degree of freedom is double to refer to micro-/nano operating device in parallel, it is characterised in that：Also include base, base is in cylinder
Shape, the matrix of Cylinder Gear colyliform is in cylindric base.
Described six degree of freedom is double to refer to micro-/nano operating device in parallel, it is characterised in that：Described directly justifies flexible ball pivot one end
Hole is threaded with the fluted other end, groove ends are used to drive linear ultrasonic motor or small circular plate driving straight line to surpass with large circle
The gluing fixation in mover end of acoustic-electric machine, screw thread nose end are used to be bolted big plectane or small circular plate.
The double method of works for referring to micro-/nano operating device in parallel of described six degree of freedom, it is characterised in that：N large circle drives
Dynamic linear ultrasonic motor co-ordination, large circle deflection or translation are promoted by right circular flexure hinge, realize the eccentric space referred to
Motion；N small circular plate drives linear ultrasonic motor co-ordination, and small circular plate deflection or translation are promoted by right circular flexure hinge,
The spatial movement that the center of realization refers to；And then realize the gripping action of small circular plate end pointer and large circle end pointer.
A kind of six degree of freedom proposed by the present invention is double to refer to micro-/nano operating device in parallel and its operating method, its advantage
Be, devise it is a kind of have the compact-sized six degree of freedom of six linear ultrasonic motors driving it is double refer to it is in parallel it is micro-/receive operation
Device, the center driven by linear ultrasonic motor refers to be referred to bias, can realize that high bit moves resolution ratio and larger behaviour respectively
Make the spatial movement of stroke, center refers to and eccentric refer to can realize non-interference self-movement, and center refers to that refer to bias can be with
Coordinate the six degree of freedom operational movement for realizing larger space scope, operation is flexible, and its larger operating space can be realized across chi
Degree operation, meet the behaviour of the biologic grains such as operation, encapsulation and assembling and cell, gene, the protein of micro-/micro-nano structure and device
It is required.
Brief description of the drawings
Fig. 1 refers to micro-/nano operating device complete machine schematic diagram in parallel for a kind of six degree of freedom of the present invention is double；
Fig. 2 is six linear ultrasonic motor installation site distribution schematic diagrams on matrix in Fig. 1；
Fig. 3 is the basal body structure schematic diagram shown in Fig. 1；
Label title in figure：1- directly justifies flexible ball pivot；2- bases；3- drives the linear ultrasonic motor of big plectane；4- drives roundlet
The linear ultrasonic motor of plate；5- matrixes；The big plectanes of 6-；7- small circular plates；8- bias refers to；9- centers refer to；10- small circular plates end refers to
Pin；11- large circles end pointer.
Embodiment
A kind of six degree of freedom is double to refer to micro-/nano operating device in parallel and its operating method, the operation device complete machine structure such as Fig. 1
It is shown.
The mover motion side of all large circle driving linear ultrasonic motors 3 and all small circular plates driving linear ultrasonic motor 4
To being parallel to each other；Large circle drives linear ultrasonic motor 3 and small circular plate driving linear ultrasonic motor 4 arranged for interval, around matrix 5
Axis is evenly distributed for one week；And it is D, Suo You little that all large circles, which drive linear ultrasonic motor 3 equal apart from the axial line distance of matrix 5,
Plectane driving linear ultrasonic motor 4 equal apart from the axial line distance of matrix 5 is d, and D is more than d;The small circular plate 7 and large circle 6
It is centrally located on the axis of matrix 5；The end of the mover of n large circle driving linear ultrasonic motor 3 is by directly justifying flexible ball pivot 1
It is connected with large circle 6, the end of the mover of n small circular plate driving linear ultrasonic motor 4 is by directly justifying flexible ball pivot 1 and small circular plate
7 are connected；The central shaft for directly justifying flexible ball pivot 1 is parallel with the mover direction of motion；
Above-mentioned small circular plate 7 is fixed with center and refers to 9, and the end that center refers to is provided with small circular plate end pointer 10；It is fixed on large circle 6
There is bias to refer to 8, the end that bias refers to is provided with large circle end pointer 11；Above-mentioned center refers to 9, small circular plate end pointer 10 and base
The axis of body 5 overlaps；Large circle end pointer 11 and the diameter parallel of matrix 5.
N can be according to actual conditions value, such as 2-10.When above-mentioned n=3；Above-mentioned matrix 5 is in the roller gear of six teeth
Shape, the adjacent flank of tooth of each two are separated by 60 ° of angles.
Also include base 2, base is cylindrical, and the matrix 5 of Cylinder Gear colyliform is in cylindric base.
The described flexible fluted other end of one end band of ball pivot 1 of directly justifying is threaded hole, and groove ends are used to drive with large circle
The gluing fixation in mover end of dynamic linear ultrasonic motor 3 or small circular plate driving linear ultrasonic motor 4, screw thread nose end are used to pass through spiral shell
Tether and connect big plectane 6 or small circular plate 7.
N large circle drives the co-ordination of linear ultrasonic motor 3, by right circular flexure hinge 1 promote large circle 6 deflect or
Translation, realize that bias refers to 8 spatial movement；
N small circular plate drives the co-ordination of linear ultrasonic motor 4, promotes small circular plate 7 to deflect or put down by right circular flexure hinge 1
Move, the center of realization refers to 9 spatial movement；
And then realize that gripping and release of small circular plate end pointer 10 and large circle end pointer 11 etc. act.
The operation device, the displacement of two fingers or deflection are controlled by the step-length for controlling linear ultrasonic motor to move
Angle, the spatial operation precision of further control operation device.Nano level displacement resolution can be achieved, and can realize to micron
To grade size objects across scale operation.
The operation device, by each having two two fingers rotated with a translation respectively, realize picked up object
Six-freedom motion.
Claims (5)
1. a kind of six degree of freedom is double to refer to micro-/nano operating device in parallel, it is characterised in that：
Including matrix（5）, be installed on matrix n large circle driving linear ultrasonic motor（3）, n small circular plate driving straight line
Ultrasound electric machine（4）, in addition to large circle（6）, small circular plate（7）；
All large circles drive linear ultrasonic motor（3）Linear ultrasonic motor is driven with all small circular plates（4）Mover motion side
To being parallel to each other；Large circle drives linear ultrasonic motor（3）Linear ultrasonic motor is driven with small circular plate（4）Arranged for interval, around base
Body（5）Axis be evenly distributed within one week；And all large circle driving linear ultrasonic motors（3）Apart from matrix（5）Axial line distance phase
Linear ultrasonic motor is driven Deng for D, all small circular plates（4）Apart from matrix（5）Equal axial line distance is d, and D is more than d;It is described
Small circular plate（7）And large circle（6）It is centrally located at matrix（5）Axis on；N large circle drives linear ultrasonic motor（3）It is dynamic
The end of son is by directly justifying flexible ball pivot（1）With large circle（6）It is connected, n small circular plate drives linear ultrasonic motor（4）Mover
End pass through directly justify flexible ball pivot（1）With small circular plate（7）It is connected；Directly justify flexible ball pivot（1）Central shaft and mover motion side
To parallel；
Above-mentioned small circular plate（7）The center of being fixed with refers to（9）, the end that center refers to is provided with small circular plate end pointer（10）；Large circle
（6）On be fixed with bias and refer to（8）, the end that bias refers to is provided with large circle end pointer（11）；Above-mentioned center refers to（9）, roundlet
Plate end pointer（10）With matrix（5）Axis overlaps；Large circle end pointer（11）With matrix（5）Diameter parallel.
2. six degree of freedom according to claim 1 is double to refer to micro-/nano operating device in parallel, it is characterised in that：Above-mentioned n=3；
Above-mentioned matrix（5）In the Cylinder Gear colyliform of six teeth, the adjacent flank of tooth of each two is separated by 60 ° of angles.
3. six degree of freedom according to claim 2 is double to refer to micro-/nano operating device in parallel, it is characterised in that：
Also include base（2）, base is cylindrical, the matrix of Cylinder Gear colyliform（5）In the base of cylindrical shape.
4. six degree of freedom according to any one of claims 1 to 3 is double to refer to micro-/nano operating device in parallel, it is characterised in that：
Described directly justifies flexible ball pivot（1）Band fluted other end in one end is threaded hole, and groove ends are used to drive with large circle
Linear ultrasonic motor（3）Or small circular plate driving linear ultrasonic motor（4）The gluing fixation in mover end, screw thread nose end be used for pass through
The big plectane of bolt connection（6）Or small circular plate（7）.
5. the double method of works for referring to micro-/nano operating device in parallel of six degree of freedom according to claim 1, it is characterised in that：
N large circle drives linear ultrasonic motor（3）Co-ordination, pass through right circular flexure hinge（1）Promote large circle（6）Deflection
Or translation, realize that bias refers to（8）Spatial movement；
N small circular plate drives linear ultrasonic motor（4）Co-ordination, pass through right circular flexure hinge（1）Promote small circular plate（7）Deflection
Or translation, the center of realization refers to（9）Spatial movement；
And then realize small circular plate end pointer（10）With large circle end pointer（11）Gripping action.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711063106.6A CN107720691A (en) | 2017-11-02 | 2017-11-02 | Six degree of freedom is double to refer to micro-/nano operating device in parallel and its operating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711063106.6A CN107720691A (en) | 2017-11-02 | 2017-11-02 | Six degree of freedom is double to refer to micro-/nano operating device in parallel and its operating method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107720691A true CN107720691A (en) | 2018-02-23 |
Family
ID=61221303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711063106.6A Pending CN107720691A (en) | 2017-11-02 | 2017-11-02 | Six degree of freedom is double to refer to micro-/nano operating device in parallel and its operating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107720691A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08132363A (en) * | 1994-11-09 | 1996-05-28 | Agency Of Ind Science & Technol | Two finger micro hand mechanism |
| US6330837B1 (en) * | 1997-08-28 | 2001-12-18 | Microdexterity Systems, Inc. | Parallel mechanism |
| JP2004025360A (en) * | 2002-06-25 | 2004-01-29 | Nakamura Tome Precision Ind Co Ltd | Three-dimensional operation mechanism for minute work |
| CN2640708Y (en) * | 2003-06-27 | 2004-09-15 | 北京工业大学 | Co-parallel operated mechanical structure of parallel robot |
| US20100137680A1 (en) * | 2007-03-30 | 2010-06-03 | Osaka University | Medical manipulator device and actuator suitable therefor |
| CN103227584A (en) * | 2013-05-08 | 2013-07-31 | 苏州科技学院 | Bidirectional driving linear ultrasonic motor |
| CN103950027A (en) * | 2014-04-24 | 2014-07-30 | 南京航空航天大学 | Linear supersonic motor-based two-finger parallel connection micro operation hand and operation method |
| CN207748848U (en) * | 2017-11-02 | 2018-08-21 | 南京航空航天大学 | Six degree of freedom two fingers parallel connection is micro-/nano operating device |
-
2017
- 2017-11-02 CN CN201711063106.6A patent/CN107720691A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08132363A (en) * | 1994-11-09 | 1996-05-28 | Agency Of Ind Science & Technol | Two finger micro hand mechanism |
| US6330837B1 (en) * | 1997-08-28 | 2001-12-18 | Microdexterity Systems, Inc. | Parallel mechanism |
| JP2004025360A (en) * | 2002-06-25 | 2004-01-29 | Nakamura Tome Precision Ind Co Ltd | Three-dimensional operation mechanism for minute work |
| CN2640708Y (en) * | 2003-06-27 | 2004-09-15 | 北京工业大学 | Co-parallel operated mechanical structure of parallel robot |
| US20100137680A1 (en) * | 2007-03-30 | 2010-06-03 | Osaka University | Medical manipulator device and actuator suitable therefor |
| CN103227584A (en) * | 2013-05-08 | 2013-07-31 | 苏州科技学院 | Bidirectional driving linear ultrasonic motor |
| CN103950027A (en) * | 2014-04-24 | 2014-07-30 | 南京航空航天大学 | Linear supersonic motor-based two-finger parallel connection micro operation hand and operation method |
| CN207748848U (en) * | 2017-11-02 | 2018-08-21 | 南京航空航天大学 | Six degree of freedom two fingers parallel connection is micro-/nano operating device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102892559B (en) | Link actuation device | |
| CN102291040B (en) | Multi-degree-of-freedom micronano-level bionic precision rotary driver | |
| CN103916045B (en) | Stepping type rotation driving device and method on basis of piezoelectric ceramics | |
| CN103501129B (en) | A kind of Bionic inchworm type piezoelectric rotary driver | |
| CN107834894B (en) | A kind of piezoelectricity looper linear motor | |
| CN108233764A (en) | Using the piezoelectric driven precision rotation driving device of special-shaped hinge transmission mechanism | |
| CN207748848U (en) | Six degree of freedom two fingers parallel connection is micro-/nano operating device | |
| CN112276920A (en) | Continuum snake-shaped robot | |
| CN103904937B (en) | Rotation type driving device and method based on three piezoelectric stacks | |
| US10119601B2 (en) | Motor with linear actuators | |
| CN107623461B (en) | A kind of shearing-type inertial piezoelectric rotary actuator and actuation method | |
| CN106059386A (en) | Clamping controllable disc-shaped rotary type inertia piezoelectric actuator and actuation method | |
| CN107720691A (en) | Six degree of freedom is double to refer to micro-/nano operating device in parallel and its operating method | |
| CN109889086B (en) | Three-degree-of-freedom piezoelectric driving micro-nano control mechanical arm and excitation method thereof | |
| CN208571954U (en) | A kind of two-way high thrust piezoelectric straight line actuator | |
| CN115194737A (en) | Differential type six-freedom-degree parallel micro-motion platform | |
| CN103056867B (en) | Flexible micro-moving manipulator | |
| CN104320015A (en) | Bionic multi-degree of freedom precise piezoelectric driving device | |
| CN109872767B (en) | Multi-source driven flexible parallel micromanipulator | |
| CN111193435A (en) | Rotary actuator | |
| CN203689921U (en) | Large-stroke two-translation and one-rotation precision positioning platform | |
| CN202135077U (en) | Multiple-degree-of-freedom micro-nano bionic precision rotation driving device | |
| CN102751899A (en) | Micro nano bionic multi-degree of freedom driving device | |
| CN105305878A (en) | Memory alloy driven multi-shaft steering engine | |
| CN104967358A (en) | Piezoelectric impact type linear rotation motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180223 |