CN106059386A - Clamping controllable disc-shaped rotary type inertia piezoelectric actuator and actuation method - Google Patents
Clamping controllable disc-shaped rotary type inertia piezoelectric actuator and actuation method Download PDFInfo
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- CN106059386A CN106059386A CN201610532462.7A CN201610532462A CN106059386A CN 106059386 A CN106059386 A CN 106059386A CN 201610532462 A CN201610532462 A CN 201610532462A CN 106059386 A CN106059386 A CN 106059386A
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- 238000000034 method Methods 0.000 title claims abstract description 9
- 230000033001 locomotion Effects 0.000 claims abstract description 67
- 230000002457 bidirectional effect Effects 0.000 claims abstract description 6
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 210000000080 chela (arthropods) Anatomy 0.000 claims description 6
- 230000036772 blood pressure Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical group Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 abstract 8
- 238000010276 construction Methods 0.000 description 2
- 241000446313 Lamella Species 0.000 description 1
- 241001083492 Trapa Species 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
- H02N2/142—Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
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Abstract
The invention discloses a clamping controllable disc-shaped rotary type inertia piezoelectric actuator and an actuation method. The actuator is composed of a base, a clamping housing, a bearing, an output ring, clamping rhombic rings, clamping piezoelectric stacks, main movement blocks, mass blocks, driving rhombic rings and driving piezoelectric stacks, and the whole actuator is structurally symmetrical; the clamping rhombic rings and the driving rhombic rings are internally respectively in interference fit with the clamping piezoelectric stacks and the driving piezoelectric stacks, the mass blocks and the aforementioned parts are not in contact with the base, and mass centers are disposed in the same plane parallel to the base; and the output ring is connected with a fixation shaft at the center of the base through the bearing, the two clamping rhombic rings whose end surfaces are fixedly connected with the outer ring surface of the output ring are radially arranged at the two sides of the same diameter, axes of the clamping rhombic rings and the driving rhombic rings are vertical to each other, the two are connected through adjacent side surfaces of the main movement blocks placed on a plane of the base, the side surfaces of the mass blocks are fixedly connected with the driving rhombic rings, and other surfaces of the mass blocks are suspended above the base. The structure is novel, clamping is reliable, and bidirectional rotation can be realized.
Description
Technical field
The invention belongs to inertial piezoelectric Actuator technique field, be specifically related to a kind of clamper rotary inertia of controllable type plate-like
Piezoelectric actuator and start method.
Background technology
Inertia-type piezoelectric actuator is that a class uses asymmetrical driving signal, asymmetrical mechanical clamping structure or non-right
Frictional force be called control mode, by inertia impact motion formed drive mechanism.
Comparing with other kinds of Piezoelectric Driving, inertial piezoelectric actuator has simple in construction, fast response time, resolution
Stroke high, big, movement velocity be fast and the major advantage such as low cost, can realize larger row journey and have nanoscale positioning accurate simultaneously
Degree.Therefore, inertial piezoelectric actuator is applicable to high-resolution, the occasion of big stroke.At present, scientific worker the most successfully will
Inertial piezoelectric actuator is applied to hi-Fix mechanism, multiple degrees of freedom driver, micromachine person joint and micro-operation hand
In field.
Usually, rotary inertia actuator usually utilizes twin lamella as driving element, and structure is complicated and intensity is low;Separately
Outward, after conventional inertia actuator assembles, the clamping state of main motion block 7 can be always maintained at, and bears bigger friction all the time
Power, this can bring extra consumption, reduces efficiency and limit the use of inertia actuator when start.
Summary of the invention
In order to solve the problem that above-mentioned prior art exists, it is an object of the invention to provide a kind of clamper controllable type plate-like
Rotary inertia piezoelectric actuator and start method, under the conditions of high-frequency drive, it is achieved the adjustable merit of main motion block clamping state
Can, it is possible to quickly respond and drive load bidirectional rotation;This actuator has novel structure, and clamper is reliable, fast response time, point
The advantage that resolution is high, it is possible to power-off locking also realizes bidirectional rotation.
In order to achieve the above object, the present invention adopts the following technical scheme that
A kind of clamper controllable type plate-like rotary inertia piezoelectric actuator, including base 1, clamper shell 2, bearing 3, output
Ring 4, clamping mechanism clockwise 11, clamping mechanism counterclockwise 12, drive mechanism clockwise 13 and drive mechanism 14 counterclockwise, whole
Actuator configurations is symmetrical;Described clamper shell 2 is formed circle by having certain thickness " M " shape section body of revolution excision core
Hole and obtain, clamper shell 2 is connected with the external screw thread of base 1 circumference side by female thread;Clamping mechanism 11 and the inverse time clockwise
Pin clamping mechanism 12 all includes clamper rhombus ring 5 and clamper piezoelectric pile 6, drive mechanism 13 clockwise and drive mechanism counterclockwise 14
All include main motion block 7, mass 10, drive rhombus ring 8 and driving pressure pile 9;In clamper rhombus ring 5 and driving rhombus ring 8
Portion's interference fit respectively has clamper piezoelectric pile 6 and a driving pressure pile 9, clamper rhombus ring 5, clamper piezoelectric pile 6, drive rhombus ring 8,
Driving pressure pile 9 and mass 10 do not contact with base 1, and barycenter is all in the same plane being parallel to base 1;Base 1
Center has integrated fixing axle, output ring 4 to be connected with fixing axle by bearing 3, and output ring 4 can pass in clamper shell 2
The heart circular hole output rotary motion, two clamper rhombus ring 5 radial arrangement in the two ends of the same diameter of output ring 4, two clamper Pedicellus et Pericarpium Trapaes
Shape ring 5 is all affixed with output ring 4 outer ring surface by end face that the off-axis heart is nearer, clamper rhombus ring 5 other end and main motion block 7 side
Face is affixed;Described main motion block 7 is positioned in base 1 plane, identical with clamper shell 2 angle of inclination trapezoidal revolve around axle center
Again bottom surface is cut into rectangle after turning certain angle and obtains, drive rhombus ring 8 to be mutually perpendicular to the axis of clamper rhombus ring 5, two
Person is connected by the adjacent side of main motion block 7, i.e. drives rhombus ring 8 along the tangential direction layout of its place circumference, drives Pedicellus et Pericarpium Trapae
The other end of shape ring 8 is affixed with mass 10 side of small volume, and it is flat that mass 10 remaining surface is freely i.e. suspended on base 1
Above face;In general, clamping mechanism and drive mechanism are overlooked L-shaped;By controlling clamper piezoelectric pile 6 and driving pressure pile
The voltage sequential of 9 and amplitude, it is possible to make actuator band dynamic load bidirectional rotation.
Described clamper shell 2 is the parts of last assembling, slowly rotates clamper shell 2 and makes it be connected with base 1, has assembled
Cheng Hou, is just in close contact with main motion block 7 inclined upper surface inside the inclined surface of clamper shell 2, and now main motion block 7 compresses
Between clamper shell 2 and base 1 plane, between contact surface, there is stiction, it is achieved that power-off clamper;When to clamper piezoelectricity
When heap 6 is energized, clamper piezoelectric pile 6 extends, so radially promote main motion block 7 away from axle center, now main motion block 7 upper surface
Separating with clamper shell 2 inclined surface, the stiction between contact surface significantly reduces, it is achieved that energising is unclamped.
Described clamper rhombus ring 5, along the radial arrangement in axle center excessively, drives rhombus ring 8 and clamper rhombus ring 5 in base 1 plane
Inside it is mutually perpendicular to, is connected by main motion block 7 between the two;Main motion block 7 piezoelectric pile driven 9 effect can produce its place circle
Tangential displacement on week, this is displaced through the corner displacement that transmitting and converting is output ring 4 of clamper rhombus ring 5.
The start method of described clamper controllable type plate-like rotary inertia piezoelectric actuator, when being not powered on, at output ring 4
In clamping state;For making output ring 4 turn clockwise, the first step, the clamper piezoelectric pile 6 in clamping mechanism 12 counterclockwise is led to
Electricity, the main motion block 7 in drive mechanism 14 counterclockwise pushed away from axle center, is in energising releasing orientation;Second step, is driving clockwise
In motivation structure 13, apply step voltage, driving pressure pile 9 rapid elongation promptly to driving pressure pile 9, main motion block 7 is produced
The raw driving force more than frictional force so that it is by inertia impact and obtain tangential displacement clockwise, now output ring 4 turns clockwise
One minute angle;3rd step, in drive mechanism 13 clockwise, lentamente to driving pressure pile 9 blood pressure lowering until power-off, drives
Piezoelectric pile 9 is slowly shunk, and mass 10 moves to main motion block 7 at a slow speed, and the now suffered driving force of main motion block 7 is less than friction
Power, main motion block 7 remains stationary as, and now output ring 4 retains a rotation step pitch;Repeat second and third step, it is possible to make output ring 4
Load is driven to turn clockwise continuously, after driving completes, to clamper piezoelectric pile 6 power-off in clamping mechanism 12 counterclockwise,
Output ring 4 recovers initial clamping state;Similarly, clamper in clamping mechanism 11 clockwise and clamping mechanism counterclockwise 12 is exchanged
The step mode of piezoelectric pile 6, and exchange driving pressure pile 9 in drive mechanism 13 clockwise and drive mechanism counterclockwise 14 simultaneously
Step mode, will realize output ring 4 and drive load to rotate counterclockwise continuously.
Compared to the prior art, present invention have the advantage that
1) output ring 4 of the present invention has the feature of power-off locking, when clamper piezoelectric pile 6 is in off-position, main fortune
Motion block 7 is all by bigger stiction and keep static, and now output ring 4 is in lockup state and can bear certain negative
Carry.
2) present invention has the function of regulation main motion block 7 clamping state, and described clamper shell 2 is the portion of last assembling
Part, slowly rotates clamper shell 2 and makes it be connected with base 1, after having assembled, just with main inside the inclined surface of clamper shell 2
Moving mass 7 inclined upper surface is in close contact, and now main motion block 7 is pressed between clamper shell 2 and base 1 plane, contacts table
Stiction is there is, it is achieved that power-off clamper between face;Clamper piezoelectricity when clamper piezoelectric pile 6 is energized, in clamper rhombus ring 5
Heap 6 extends, so radially promote main motion block 7 away from axle center, now main motion block 7 upper surface and clamper shell 2 nauropemeter
Face separates, and the stiction between contact surface significantly reduces, it is achieved that energising is unclamped.During start, the main fortune of reasonable adjusting
The clamping state of motion block 7, it is possible to avoiding rubs brings unnecessary loss, improves and makees efficiency of movement and response speed.
3) present invention can contain mismachining tolerance, assembling during adjustment clamping state initial to actuator range request not
Height, greatly reduces processing and the difficulty of assembling;Inside configuration space utilization is reasonable, and volume is little, light weight, and simple in construction is tight
Gather.
Accompanying drawing explanation
Fig. 1 is present configuration axonometric chart.
Fig. 2 is profile of the present invention.
Fig. 3 is that the present invention removes clamper shell top view.
Fig. 4 is that the present invention removes clamper shell left view.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As shown in Figures 1 to 4, clamper controllable type plate-like of the present invention rotary inertia piezoelectric actuator, including base 1, pincers
Position shell 2, bearing 3, output ring 4, clamping mechanism clockwise 11, clamping mechanism counterclockwise 12, drive mechanism clockwise 13 and inverse
Time needle drive mechanism 14, whole actuator configurations is symmetrical;Wherein clamper shell 2 is revolved into by having certain thickness " M " shape section
Body excision core forms circular hole and obtains, and clamper shell 2 is connected with the external screw thread of base 1 circumference side by female thread;Suitable
Hour hands clamping mechanism 11 and clamping mechanism counterclockwise 12 all include clamper rhombus ring 5 and clamper piezoelectric pile 6, drive mechanism clockwise
13 and drive mechanism counterclockwise 14 all include main motion block 7, mass 10, drive rhombus ring 8 and driving pressure pile 9;Clamper Pedicellus et Pericarpium Trapae
Shape ring 5 and the internal interference fit respectively of driving rhombus ring 8 have clamper piezoelectric pile 6 and driving pressure pile 9, clamper rhombus ring 5, clamper
Piezoelectric pile 6, driving rhombus ring 8, driving pressure pile 9 and mass 10 do not contact with base 1, and barycenter is all being parallel to base
In the same plane of 1;Base 1 center has integrated fixing axle, output ring 4 to be connected with fixing axle by bearing 3, and it can be worn
Crossing the output rotary motion of clamper shell 2 center hole, two clamper rhombus ring 5 radial arrangement are in the two of the same diameter of output ring 4
End, both of which is affixed with output ring 4 outer ring surface by the end face that the off-axis heart is nearer, clamper rhombus ring 5 other end and main motion block 7
Side is affixed, and wherein main motion block 7 is positioned in base 1 plane, and it is by identical with clamper shell 2 angle of inclination trapezoidal around axle
Bottom surface is cut into rectangle after rotating to an angle and obtains by the heart again, drives rhombus ring 8 the most vertical with the axis of clamper rhombus ring 5
Directly, both are connected by the adjacent side of main motion block 7, i.e. drive rhombus ring 8 along the tangential direction layout of its place circumference, drive
The other end of dynamic rhombus ring 8 is affixed with mass 10 side of small volume, and mass 10 remaining surface is freely i.e. suspended on the end
Above seat 1 plane, in general, clamping mechanism and drive mechanism are overlooked L-shaped;By controlling clamper piezoelectric pile 6 and driving
The voltage sequential of piezoelectric pile 9 and amplitude, it is possible to make actuator band dynamic load bidirectional rotation;Present configuration is novel, and clamper is reliable,
Response is rapidly and start is accurate.
Described clamper shell 2 is the parts of last assembling, slowly rotates clamper shell 2 and makes it be connected with base 1, has assembled
Cheng Hou, is just in close contact with main motion block 7 inclined upper surface inside the inclined surface of clamper shell 2, and now main motion block 7 compresses
Between clamper shell 2 and base 1 plane, between contact surface, there is stiction, it is achieved that power-off clamper;When to clamper piezoelectricity
When heap 6 is energized, the clamper piezoelectric pile 6 in clamper rhombus ring 5 extends, and then radially promotion main motion block 7 is away from axle center, now
Main motion block 7 upper surface separates with clamper shell 2 inclined surface, and the stiction between contact surface significantly reduces, it is achieved that logical
Electricity unclamps.
Described clamper rhombus ring 5, along the radial arrangement in axle center excessively, drives rhombus ring 8 and clamper rhombus ring 5 in base 1 plane
Inside it is mutually perpendicular to, is connected by main motion block 7 between the two;Main motion block 7 piezoelectric pile driven 9 effect can produce its place circle
Tangential displacement on week, this is displaced through the corner displacement that transmitting and converting is output ring 4 of clamper rhombus ring 5.
Below the start method of the present invention is described in detail:
When being not powered on, output ring 4 is in clamping state;For making output ring 4 turn clockwise, the first step, to inverse time needle pliering
Clamper piezoelectric pile 6 in the mechanism 12 of position is energized, and the main motion block 7 in drive mechanism 14 counterclockwise pushed away from axle center, is in energising
Releasing orientation;Second step, in drive mechanism 13 clockwise, applies step voltage promptly to driving pressure pile 9, drives piezoelectricity
Heap 9 rapid elongation, produces the driving force more than frictional force to main motion block 7 so that it is the most tangential by inertia impact acquisition
Displacement, now output ring 4 turns clockwise a minute angle;3rd step, in drive mechanism 13 clockwise, lentamente to driving
Dynamic pressure pile 9 blood pressure lowering is until power-off, and driving pressure pile 9 slowly shrinks, and mass 10 moves to main motion block 7 at a slow speed, main motion
The now suffered driving force of block 7 is less than frictional force, and main motion block 7 remains stationary as, and now output ring 4 retains one and rotates step pitch;
Repeat second and third step, it is possible to make output ring 4 drive load to turn clockwise, after driving completes, to clamper counterclockwise continuously
Clamper piezoelectric pile 6 power-off in mechanism 12, output ring 4 recovers initial clamping state;Similarly, for making output ring 4 counterclockwise
Rotate, the first step, the clamper piezoelectric pile 6 in clamping mechanism 11 clockwise is energized, the main motion in drive mechanism 13 clockwise
Block 7 pushed away from axle center, is in energising releasing orientation;Second step, in drive mechanism 14 counterclockwise, promptly gives driving pressure pile
9 apply step voltage, driving pressure pile 9 rapid elongation, and main motion block 7 is produced the driving force more than frictional force so that it is by used
Tangential displacement counterclockwise is impacted and obtained to property, and now output ring 4 rotates a minute angle counterclockwise;3rd step, counterclockwise
In drive mechanism 14, lentamente to driving pressure pile 9 blood pressure lowering until power-off, driving pressure pile 9 slowly shrinks, and mass 10 is at a slow speed
Moving to main motion block 7, the now suffered driving force of main motion block 7 is less than frictional force, and main motion block 7 remains stationary as, the most defeated
Go out ring 4 and retain a rotation step pitch;Repeat second and third step, it is possible to make output ring 4 drive load to rotate counterclockwise continuously, when
After driving completes, to clamper piezoelectric pile 6 power-off in clamping mechanism 11 clockwise, output ring 4 recovers initial clamping state;This
Sample just achieves the shake double-direction turning movement of output ring 4.
Claims (4)
1. a clamper controllable type plate-like rotary inertia piezoelectric actuator, it is characterised in that: include base (1), clamper shell
(2), bearing (3), output ring (4), clamping mechanism clockwise (11), clamping mechanism counterclockwise (12), drive mechanism clockwise
(13) and drive mechanism counterclockwise (14), whole actuator configurations is symmetrical;Described clamper shell (2) is certain thickness by having
" M " shape section body of revolution excision core forms circular hole and obtains, and clamper shell (2) is by female thread and base (1) circumference
The external screw thread in face connects;Clamping mechanism (11) and clamping mechanism counterclockwise (12) all include clamper rhombus ring (5) and pincers clockwise
Position piezoelectric pile (6), drive mechanism clockwise (13) and drive mechanism counterclockwise (14) all include main motion block (7), mass
(10), rhombus ring (8) and driving pressure pile (9) are driven;Clamper rhombus ring (5) and the internal interference respectively of driving rhombus ring (8) are joined
Conjunction has clamper piezoelectric pile (6) and a driving pressure pile (9), clamper rhombus ring (5), clamper piezoelectric pile (6), drives rhombus ring (8), drives
Dynamic pressure pile (9) and mass (10) do not contact with base (1), and barycenter is all in the same plane being parallel to base (1);
There is integrated fixing axle at base (1) center, and output ring (4) is connected with fixing axle by bearing (3), and output ring (4) can be worn
Crossing the output rotary motion of clamper shell (2) center hole, two clamper rhombus ring (5) radial arrangement are same always in output ring (4)
The two ends in footpath, two clampers rhombus ring (5) are all affixed with output ring (4) outer ring surface by end face that the off-axis heart is nearer, clamper Pedicellus et Pericarpium Trapae
Shape ring (5) other end is affixed with main motion block (7) side;Described main motion block (7) is positioned in base (1) plane, by with pincers
Bottom surface is cut into rectangle after axle center rotates to an angle and obtain by shell (2) angle of inclination, position identical trapezoidal again, driving Pedicellus et Pericarpium Trapae
Shape ring (8) is mutually perpendicular to the axis of clamper rhombus ring (5), and both are connected by the adjacent side of main motion block (7), i.e. drive
Rhombus ring (8) is arranged along the tangential direction of its place circumference, drives the other end of rhombus ring (8) and the mass of small volume
(10) side is affixed, and mass (10) remaining surface is freely i.e. suspended on above base (1) plane;In general, clamping mechanism
Overlook L-shaped with drive mechanism;By controlling clamper piezoelectric pile (6) and the voltage sequential of driving pressure pile (9) and amplitude, energy
Enough make actuator band dynamic load bidirectional rotation.
Clamper controllable type plate-like the most according to claim 1 rotary inertia piezoelectric actuator, it is characterised in that: described pincers
Position shell (2) is the parts of last assembling, slowly rotates clamper shell (2) and makes it be connected with base (1), after having assembled, and pincers
Just being in close contact with main motion block (7) inclined upper surface inside the inclined surface of position shell (2), now main motion block (7) compresses
Between clamper shell (2) and base (1) plane, between contact surface, there is stiction, it is achieved that power-off clamper;When to clamper
Piezoelectric pile (6) energising time, clamper piezoelectric pile (6) extend, and then radially promote main motion block (7) away from axle center, the most main fortune
Motion block (7) upper surface separates with clamper shell (2) inclined surface, and the stiction between contact surface significantly reduces, it is achieved that logical
Electricity unclamps.
Clamper controllable type plate-like the most according to claim 1 rotary inertia piezoelectric actuator, it is characterised in that: described pincers
Position rhombus ring (5) along crossing the radial arrangement in axle center, drive rhombus ring (8) and clamper rhombus ring (5) in base (1) plane mutually
Vertically, connected by main motion block (7) between the two;Main motion block (7) piezoelectric pile driven (9) effect can produce its place circle
Tangential displacement on week, this is displaced through the corner displacement that transmitting and converting is output ring (4) of clamper rhombus ring (5).
4. the start method of the clamper controllable type plate-like rotary inertia piezoelectric actuator described in claim 1, it is characterised in that:
When being not powered on, output ring (4) is in clamping state;For making output ring (4) turn clockwise, the first step, to clamper machine counterclockwise
Clamper piezoelectric pile (6) energising in structure (12), the main motion block (7) in drive mechanism counterclockwise (14) pushed away from axle center, is in
Energising releasing orientation;Second step, in drive mechanism clockwise (13), applies step voltage promptly to driving pressure pile (9),
Driving pressure pile (9) rapid elongation, produces main motion block (7) more than the driving force of frictional force so that it is by inertia impact and obtain
Tangential displacement clockwise, now output ring (4) turns clockwise a minute angle;3rd step, in drive mechanism clockwise
(13), in, lentamente to (9) blood pressure lowering of driving pressure pile until power-off, driving pressure pile (9) slowly shrinks, and mass (10) is at a slow speed
Moving to main motion block (7), the now suffered driving force of main motion block (7) is less than frictional force, and main motion block (7) remains stationary as,
Now output ring (4) retains a rotation step pitch;Repeat second and third step, it is possible to make output ring (4) drive load up time continuously
Pin rotates, after driving completes, to clamper piezoelectric pile (6) power-off in clamping mechanism counterclockwise (12), at the beginning of output ring (4) recovers
The clamping state begun;Similarly, clamper piezoelectric pile (6) in clamping mechanism clockwise (11) and clamping mechanism counterclockwise (12) is exchanged
Step mode, and exchange driving pressure pile (9) in drive mechanism clockwise (13) and drive mechanism counterclockwise (14) simultaneously
Step mode, will realize output ring (4) and drive load to rotate counterclockwise continuously.
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CN107222126A (en) * | 2017-05-18 | 2017-09-29 | 西安交通大学 | Antisymmetry arranges the driving bidirectional rotation inertia actuator of formula list piezoelectric pile |
CN111181436A (en) * | 2020-01-13 | 2020-05-19 | 吉林大学 | Secondary excitation friction piezoelectric rotary driver |
CN112564542A (en) * | 2020-11-12 | 2021-03-26 | 东南大学 | Low-speed high-precision rotation driving device based on piezoelectric actuation principle |
CN112713804A (en) * | 2020-12-11 | 2021-04-27 | 南京航空航天大学 | Piezoelectric driving rotary motor and working method thereof |
CN114670083A (en) * | 2022-04-24 | 2022-06-28 | 西安交通大学 | Bearing platform for non-contact driving three-rotational-freedom-degree displacement output |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107222126A (en) * | 2017-05-18 | 2017-09-29 | 西安交通大学 | Antisymmetry arranges the driving bidirectional rotation inertia actuator of formula list piezoelectric pile |
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CN111181436A (en) * | 2020-01-13 | 2020-05-19 | 吉林大学 | Secondary excitation friction piezoelectric rotary driver |
CN112564542A (en) * | 2020-11-12 | 2021-03-26 | 东南大学 | Low-speed high-precision rotation driving device based on piezoelectric actuation principle |
CN112713804A (en) * | 2020-12-11 | 2021-04-27 | 南京航空航天大学 | Piezoelectric driving rotary motor and working method thereof |
CN112713804B (en) * | 2020-12-11 | 2021-11-05 | 南京航空航天大学 | Piezoelectric driving rotary motor and working method thereof |
CN114670083A (en) * | 2022-04-24 | 2022-06-28 | 西安交通大学 | Bearing platform for non-contact driving three-rotational-freedom-degree displacement output |
CN114670083B (en) * | 2022-04-24 | 2023-03-10 | 西安交通大学 | Bearing platform for non-contact driving three-rotational-freedom-degree displacement output |
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