CN107706293A - The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit - Google Patents

The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit Download PDF

Info

Publication number
CN107706293A
CN107706293A CN201710610932.1A CN201710610932A CN107706293A CN 107706293 A CN107706293 A CN 107706293A CN 201710610932 A CN201710610932 A CN 201710610932A CN 107706293 A CN107706293 A CN 107706293A
Authority
CN
China
Prior art keywords
chip
light
emitting diode
backlight unit
transparency carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710610932.1A
Other languages
Chinese (zh)
Inventor
冈村卓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN107706293A publication Critical patent/CN107706293A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/58Optical field-shaping elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52Encapsulations
    • H01L33/56Materials, e.g. epoxy or silicone resin
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0058Processes relating to semiconductor body packages relating to optical field-shaping elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Led Devices (AREA)
  • Dicing (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Led Device Packages (AREA)

Abstract

The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit are provided, sufficient brightness can be obtained.A kind of manufacture method of light-emitting diode chip for backlight unit, it is characterised in that there is following process:Chip preparatory process, prepare following chip:The chip has laminate layers on crystal growth transparency carrier, LED circuit is respectively formed with each region divided on the front of the laminate layers by a plurality of segmentation preset lines to cross one another, wherein, the laminate layers are formed with including multiple semiconductor layers including luminescent layer;Transparency carrier preparatory process, prepare the transparency carrier formed with multiple through holes in the region of entire surface;Integrated process, the back side of chip is pasted onto on the front of the transparency carrier and forms integrated chip;And segmentation process, the chip is cut off together with the transparency carrier along the segmentation preset lines and the integrated chip is divided into each light-emitting diode chip for backlight unit.

Description

The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
Technical field
The present invention relates to the manufacture method of light-emitting diode chip for backlight unit and light-emitting diode chip for backlight unit.
Background technology
, should formed with laminate layers on the front of the crystal growth substrate such as sapphire substrate, GaN substrate, SiC substrate Laminate layers, will be on the laminate layers by the way that n-type semiconductor layer, luminescent layer and p-type semiconductor layer laminated multi-layer are formed Formed with multiple LED (Light Emitting Diode in the region marked off by a plurality of segmentation preset lines intersected:Luminous two Pole pipe) etc. luminescent device chip along segmentation preset lines cut-out and be divided into each light-emitting device chip, split obtained hair Optical device chip is widely used in the various electronic equipments such as mobile phone, personal computer, lighting apparatus.
Due to there is isotropism from the light of the luminescent layer of light-emitting device chip injection, thus light can also be irradiated to crystal into The inside of length substrate and also projected from the back side of substrate and side.However, in the light of inside of substrate is irradiated to, due to base The incidence angle of the interface of plate and air layer occurs total reflection on interface for light more than critical angle and is held in inside substrate, Outside will not be injected to from substrate, so the problem of in the presence of the luminance-reduction for causing light-emitting device chip.
In order to solve the problem, following light emitting diode has been recorded in Japanese Unexamined Patent Publication 2014-175354 publications (LED):In order to suppress to be held in the inside of substrate from the light that luminescent layer projects, by transparent component paste on the back of the substrate and Realize the raising of brightness.
Patent document 1:Japanese Unexamined Patent Publication 2014-175354 publications
However, in the light emitting diode disclosed in patent document 1, there are the following problems:Although by by transparent component It is pasted onto the back side of substrate and slightly increases brightness, but sufficient brightness can not be obtained.
The content of the invention
The present invention be in view of such point and complete, its object is to, there is provided the luminous of sufficient brightness can be obtained The manufacture method and light-emitting diode chip for backlight unit of diode chip for backlight unit.
According to the invention described in technical scheme 1, there is provided the manufacture method of light-emitting diode chip for backlight unit, it is characterised in that the hair The manufacture method of luminous diode chip has following process:Chip preparatory process, prepare following chip:The chip is in crystal There are laminate layers on growth transparency carrier, drawn on the front of the laminate layers by a plurality of segmentation preset lines to cross one another Point each region in be respectively formed with LED circuit, wherein, the laminate layers comprising multiple including luminescent layer formed with partly leading Body layer;Transparency carrier preparatory process, prepare the transparency carrier formed with multiple through holes in the region of entire surface;Integral chemical industry Sequence, the back side of chip is pasted onto on the front of the transparency carrier and forms integrated chip;And segmentation process, along this point Preset lines are cut to cut off the chip together with the transparency carrier and the integrated chip is divided into each light-emitting diode chip for backlight unit.
It is preferred that the transparency carrier is formed by any materials in crystalline ceramics, optical glass, sapphire and transparent resin, The transparency carrier is bonded on chip by transparent adhesive in the integrated process.
According to the invention described in technical scheme 3, there is provided light-emitting diode chip for backlight unit, wherein, the light-emitting diode chip for backlight unit has: Light emitting diode, it is on front formed with LED circuit;And transparent component, it is pasted onto on the back side of the light emitting diode, Formed with multiple through holes on the transparent component.
On the present invention light-emitting diode chip for backlight unit, due on the transparent component at the back side for being pasted on LED formed with more Individual through hole, so the surface area increase of transparent component, and light intricately reflects in transparent component and makes pass in hyalomere Light in part is reduced, and the amount of the light projected from transparent component increases and improves the brightness of light-emitting diode chip for backlight unit.
Brief description of the drawings
Fig. 1 is the face side stereogram of optical device wafer.
Fig. 2 (A) is to show to paste to enter on the backside of the wafer by the front of the transparency carrier with multiple through holes The stereogram of the integrated process of row integration, Fig. 2 (B) is the stereogram of integrated chip.
Fig. 3 is to show the stereogram by supporting process of the dicing tape by integrated wafer supporting on ring-shaped frame.
Fig. 4 is the stereogram for showing integrated chip being divided into the segmentation process of light-emitting diode chip for backlight unit.
Fig. 5 is the stereogram of the integrated chip after segmentation process terminates.
Fig. 6 is the stereogram of the light-emitting diode chip for backlight unit of embodiment of the present invention.
Label declaration
10:Cutting unit;11:Optical device wafer (chip);13:Sapphire substrate;14:Cutting tool;15:Layered product Layer;17:Split preset lines;19:LED circuit;21:Transparency carrier;21A:Transparent component;25:Integrated chip;27:Cutting groove; 29:Through hole;31:Light-emitting diode chip for backlight unit.
Embodiment
Hereinafter, embodiments of the present invention are described in detail referring to the drawings.Reference picture 1, show optical device crystalline substance The face side stereogram of piece (below, sometimes referred to simply as chip) 11.
Optical device wafer 11 is configured to be laminated with gallium nitride (GaN) homepitaxy layer (laminate layers) on sapphire substrate 13 15.Optical device wafer 11, which has, is laminated with the back side 11b that the positive 11a and sapphire substrate 13 of epitaxial layer 15 are exposed.
Here, in the optical device wafer 11 of present embodiment, crystal growth base is used as using sapphire substrate 13 Plate, but sapphire substrate 13 can also be replaced and use GaN substrate or SiC substrate etc..
Laminate layers (epitaxial layer) 15 be by make electronics be majority carrier n-type semiconductor layer (for example, n-type GaN Layer), the semiconductor layer (for example, InGaN layer) as luminescent layer, hole for majority carrier p-type semiconductor layer (for example, p-type GaN layer) in order epitaxial growth and formed.
Sapphire substrate 13 is for example with 100 μm of thickness, and laminate layers 15 are for example with 5 μm of thickness.In layered product Divided on layer 15 by being formed as a plurality of segmentation preset lines 17 of clathrate and formed with multiple LED circuits 19.Chip 11 has The back side 11b that positive 11a and sapphire substrate 13 formed with LED circuit 19 are exposed.
According to the manufacture method of the light-emitting diode chip for backlight unit of embodiment of the present invention, first, implement chip preparatory process, it is accurate Optical device wafer 11 shown in standby Fig. 1.And then implement transparency carrier preparatory process, prepare in the region of entire surface with more The transparency carrier of individual through hole.
After transparency carrier preparatory process is implemented, as shown in Fig. 2 (A), implement integrated process, by transparency carrier 21 positive 21a is pasted onto on the back side 11b of chip 11.Fig. 2 (B) is the stereogram of integrated chip.
Transparency carrier 21 is formed by any materials in transparent resin, optical glass, sapphire and crystalline ceramics.In this reality Apply in mode, by having the transparent resins such as the makrolon of durability, allyl resin to form transparency carrier than optical glass.
After integrated process is implemented, as shown in figure 3, implementing supporting process, by the transparent base of integrated chip 25 Plate 21 is pasted onto peripheral part and is glued on ring-shaped frame F dicing tape T and forms frame unit, is utilized by dicing tape T Ring-shaped frame F supports to integrated chip 25.
After supporting process is implemented, implement segmentation step, frame unit is put into topping machanism, utilizes cutting Device is cut integrated chip 25 and is divided into each light-emitting diode chip for backlight unit.Reference picture 4 is carried out to the segmentation process Explanation.
For example, implement the segmentation process using well known topping machanism.As shown in figure 4, the cutting unit of topping machanism 10 include:Main shaft shell 12;Main shaft (not shown), it is inserted into a manner of it can rotate in main shaft shell 12;And cutting Cutter 14, it is arranged on the front end of main shaft.
The electroforming grinding tool that the cutting edge of cutting tool 14 secures diamond abrasive grain for example by nickel plating is formed, before it End is shaped as triangle, quadrangle or semicircle.
The generally part of cutting tool 14 is covered by cutter hood (wheel cover) 16, is equipped with cutter hood 16 in bite The inboard of tool 14 and nearby a pair of (illustrate only 1) cooling nozzles 18 of side horizontal extension.
In segmentation process, by integrated chip 25 across frame unit dicing tape T attracting holdings in topping machanism On chuck table 20, ring-shaped frame F is clamped and fixed by fixture (not shown).
Then, cutting tool 14 is made to be rotated according to arrow R directions while cutting the front end of cutting tool 14 at a high speed The segmentation preset lines 17 of chip 11 are until reaching dicing tape T, and while from cooling nozzles 18 towards cutting tool 14 and chip 11 processing stand provides cutting fluid, while feeding is processed on arrow X1 directions to integrated chip 25, thus, along crystalline substance The segmentation preset lines 17 of piece 11 form the cutting groove 27 for cutting off chip 11 and transparency carrier 21.
While carry out index feed in the Y-axis direction to cutting unit 10, while along the segmentation extended on the 1st direction Preset lines 17 sequentially form same cutting groove 27.Then, after chuck table 20 is rotated by 90 °, along with the 1st side The whole segmentation preset lines 17 extended on to the 2nd vertical direction form same cutting groove 27 and turn into the shape shown in Fig. 5 State, so as to which integrated chip 25 to be divided into the light-emitting diode chip for backlight unit 31 shown in Fig. 6.
In the above-described embodiment, although integrated chip 25 is divided into each light emitting diode using topping machanism Chip 31, but chip 11 can also be irradiated along segmentation preset lines 13 there is permeability for chip 11 and transparency carrier 21 The laser beam of wavelength and the inside through-thickness in chip 11 and transparency carrier 21 forms multilayer modification layer, then, to one Change chip 25 to apply external force and integrated chip 25 is divided into each light-emitting diode chip for backlight unit 31 as segmentation starting point to modify layer.
In the light-emitting diode chip for backlight unit 31 shown in Fig. 6, there is the LED 13A of LED circuit 19 on the back side on front It is pasted with transparent component 21A.Also, formed with multiple through holes 29 on transparent component 21A whole face.
Therefore, in the light-emitting diode chip for backlight unit 31 shown in Fig. 6, the surface area increase of transparent component, and light is transparent The light for intricately being reflected in part and making pass in transparent component is reduced, and the amount increase of the light projected from transparent component 21A, is lighted The brightness of diode chip for backlight unit 31 improves.

Claims (3)

1. a kind of manufacture method of light-emitting diode chip for backlight unit, it is characterised in that the manufacture method of the light-emitting diode chip for backlight unit has Following process:
Chip preparatory process, prepare following chip:The chip has laminate layers on crystal growth transparency carrier, at this LED circuit is respectively formed with each region divided on the front of laminate layers by a plurality of segmentation preset lines to cross one another, its In, the laminate layers are formed with including multiple semiconductor layers including luminescent layer;
Transparency carrier preparatory process, prepare the transparency carrier formed with multiple through holes in the region of entire surface;
Integrated process, the back side of chip is pasted onto on the front of the transparency carrier and forms integrated chip;And
Segmentation process, the chip is cut off together with the transparency carrier along the segmentation preset lines and splits the integrated chip Into each light-emitting diode chip for backlight unit.
2. the manufacture method of light-emitting diode chip for backlight unit according to claim 1, wherein,
The transparency carrier is formed by any materials in crystalline ceramics, optical glass, sapphire and transparent resin, in the one The transparency carrier is pasted on this wafer using transparent adhesive in chemical industry sequence.
3. a kind of light-emitting diode chip for backlight unit, wherein,
The light-emitting diode chip for backlight unit has:
Light emitting diode, it is on front formed with LED circuit;And
Transparent component, it is pasted onto on the back side of the light emitting diode,
Formed with multiple through holes on the transparent component.
CN201710610932.1A 2016-08-08 2017-07-25 The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit Pending CN107706293A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-155412 2016-08-08
JP2016155412A JP2018026382A (en) 2016-08-08 2016-08-08 Manufacturing method of light-emitting diode chip and light-emitting diode chip

Publications (1)

Publication Number Publication Date
CN107706293A true CN107706293A (en) 2018-02-16

Family

ID=61170545

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710610932.1A Pending CN107706293A (en) 2016-08-08 2017-07-25 The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit

Country Status (4)

Country Link
JP (1) JP2018026382A (en)
KR (1) KR20180016943A (en)
CN (1) CN107706293A (en)
TW (1) TW201817030A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012038889A (en) * 2010-08-06 2012-02-23 Koito Mfg Co Ltd Fluorescent member and light-emitting module
JP2013197279A (en) * 2012-03-19 2013-09-30 Stanley Electric Co Ltd Light-emitting device and manufacturing method therefor
CN104037313A (en) * 2013-03-06 2014-09-10 株式会社迪思科 Light emitting diode
JP2014239123A (en) * 2013-06-06 2014-12-18 株式会社ディスコ Processing method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012038889A (en) * 2010-08-06 2012-02-23 Koito Mfg Co Ltd Fluorescent member and light-emitting module
JP2013197279A (en) * 2012-03-19 2013-09-30 Stanley Electric Co Ltd Light-emitting device and manufacturing method therefor
CN104037313A (en) * 2013-03-06 2014-09-10 株式会社迪思科 Light emitting diode
JP2014239123A (en) * 2013-06-06 2014-12-18 株式会社ディスコ Processing method

Also Published As

Publication number Publication date
TW201817030A (en) 2018-05-01
JP2018026382A (en) 2018-02-15
KR20180016943A (en) 2018-02-20

Similar Documents

Publication Publication Date Title
CN107919432A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107706291A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107706292A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108400226A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107611237A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108023005A (en) The manufacture method of light-emitting diode chip for backlight unit
CN107768486A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108538994A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107706293A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107895714A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107464872A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107464860A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107799630A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108400225A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108305931A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108022999A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108400111A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108400112A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108400204A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108023012A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107527986A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
JP2018182165A (en) Method for manufacturing light-emitting diode chip and light-emitting diode chip
CN107611086A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN107527985A (en) The manufacture method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit
CN108538995A (en) The manufacturing method and light-emitting diode chip for backlight unit of light-emitting diode chip for backlight unit

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20180216

WD01 Invention patent application deemed withdrawn after publication