CN107689783B - 高频模块以及弹性波滤波器的制造方法 - Google Patents

高频模块以及弹性波滤波器的制造方法 Download PDF

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Publication number
CN107689783B
CN107689783B CN201710604182.7A CN201710604182A CN107689783B CN 107689783 B CN107689783 B CN 107689783B CN 201710604182 A CN201710604182 A CN 201710604182A CN 107689783 B CN107689783 B CN 107689783B
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elastic wave
wave filter
impedance
gain
noise
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CN107689783A (zh
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照田千寻
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
    • H03F1/56—Modifications of input or output impedances, not otherwise provided for
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/52—Electric coupling means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
    • H03F1/26—Modifications of amplifiers to reduce influence of noise generated by amplifying elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/189—High-frequency amplifiers, e.g. radio frequency amplifiers
    • H03F3/19—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/189—High-frequency amplifiers, e.g. radio frequency amplifiers
    • H03F3/19—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
    • H03F3/195—High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only in integrated circuits
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03G—CONTROL OF AMPLIFICATION
    • H03G3/00—Gain control in amplifiers or frequency changers
    • H03G3/20—Automatic control
    • H03G3/30—Automatic control in amplifiers having semiconductor devices
    • H03G3/3036—Automatic control in amplifiers having semiconductor devices in high-frequency amplifiers or in frequency-changers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H11/00—Networks using active elements
    • H03H11/02—Multiple-port networks
    • H03H11/28—Impedance matching networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0004—Impedance-matching networks
    • H03H9/0009—Impedance-matching networks using surface acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/222—A circuit being added at the input of an amplifier to adapt the input impedance of the amplifier
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/294—Indexing scheme relating to amplifiers the amplifier being a low noise amplifier [LNA]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/451—Indexing scheme relating to amplifiers the amplifier being a radio frequency amplifier

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
CN201710604182.7A 2016-08-05 2017-07-21 高频模块以及弹性波滤波器的制造方法 Active CN107689783B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-155024 2016-08-05
JP2016155024A JP6520857B2 (ja) 2016-08-05 2016-08-05 高周波モジュール及び弾性波フィルタの製造方法

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CN107689783A CN107689783A (zh) 2018-02-13
CN107689783B true CN107689783B (zh) 2020-12-15

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US (1) US10673410B2 (enExample)
JP (1) JP6520857B2 (enExample)
KR (1) KR101944625B1 (enExample)
CN (1) CN107689783B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10320363B2 (en) * 2016-08-05 2019-06-11 Murata Manufacturing Co., Ltd. High-frequency module
US11870421B2 (en) * 2019-10-23 2024-01-09 Skyworks Solutions, Inc. Surface acoustic wave resonator with suppressed transverse modes using second bus bar
US11616485B2 (en) * 2019-11-08 2023-03-28 Skyworks Solutions, Inc. Out-of-band rejection using saw-based integrated balun and a differential low noise amplifier
CN116157999B (zh) * 2020-07-31 2026-01-23 株式会社村田制作所 弹性波滤波器及多工器
US12294351B2 (en) 2021-12-22 2025-05-06 Skyworks Solutions, Inc. Acoustic wave device with mini bus bars
CN115664456B (zh) * 2022-12-08 2023-05-02 荣耀终端有限公司 一种射频传输电路及电子设备

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JPH077451A (ja) * 1993-06-15 1995-01-10 Hitachi Ltd 受信回路
EP1246358A2 (en) * 2001-03-30 2002-10-02 Hitachi Media Electronics Co., Ltd. Radio frequency filter, radio frequency circuit, antenna duplexer and radio terminal
CN1394391A (zh) * 2000-11-01 2003-01-29 日立金属株式会社 高频开关模块
CN1445926A (zh) * 2002-03-15 2003-10-01 松下电器产业株式会社 平衡高频器件,平衡特性的改进方法和采用此类器件的平衡高频电路
CN1708899A (zh) * 2002-10-25 2005-12-14 日立金属株式会社 平衡-不平衡型多频带滤波模块
CN101128977A (zh) * 2005-02-28 2008-02-20 松下电器产业株式会社 压电滤波器以及使用该压电滤波器的双工器和通信装置
CN103001687A (zh) * 2012-12-21 2013-03-27 北京工业大学 一种用于接收gsm-r信号的接收装置

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JPS63153902A (ja) * 1986-09-19 1988-06-27 Nec Corp 低雑音増幅器
JP3454239B2 (ja) * 2000-08-31 2003-10-06 株式会社村田製作所 弾性表面波フィルタ
JP2008532334A (ja) * 2005-02-28 2008-08-14 松下電器産業株式会社 圧電フィルタならびにそれを用いた共用器および通信機器
JP2006333390A (ja) * 2005-05-30 2006-12-07 Furukawa Electric Co Ltd:The 低雑音増幅回路
CN101573881B (zh) 2006-12-21 2013-04-17 株式会社村田制作所 高频开关电路
JP2009060511A (ja) 2007-09-03 2009-03-19 Murata Mfg Co Ltd 通信装置
JP4816710B2 (ja) * 2008-10-30 2011-11-16 株式会社村田製作所 分波器
JP5001980B2 (ja) * 2009-06-18 2012-08-15 サイトウ共聴特殊機器株式会社 地上波デジタルテレビ用アンテナブースタユニット
WO2012114593A1 (ja) * 2011-02-24 2012-08-30 株式会社村田製作所 弾性波分波器
JP6017868B2 (ja) * 2011-11-04 2016-11-02 太陽誘電株式会社 分波器、フィルタ及び通信モジュール
US20140015614A1 (en) * 2012-07-10 2014-01-16 Infineon Technologies Ag System and Method for a Low Noise Amplifier
WO2015040921A1 (ja) 2013-09-17 2015-03-26 株式会社村田製作所 デュプレクサ
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JPH077451A (ja) * 1993-06-15 1995-01-10 Hitachi Ltd 受信回路
CN1394391A (zh) * 2000-11-01 2003-01-29 日立金属株式会社 高频开关模块
EP1246358A2 (en) * 2001-03-30 2002-10-02 Hitachi Media Electronics Co., Ltd. Radio frequency filter, radio frequency circuit, antenna duplexer and radio terminal
CN1445926A (zh) * 2002-03-15 2003-10-01 松下电器产业株式会社 平衡高频器件,平衡特性的改进方法和采用此类器件的平衡高频电路
CN1708899A (zh) * 2002-10-25 2005-12-14 日立金属株式会社 平衡-不平衡型多频带滤波模块
CN101128977A (zh) * 2005-02-28 2008-02-20 松下电器产业株式会社 压电滤波器以及使用该压电滤波器的双工器和通信装置
CN103001687A (zh) * 2012-12-21 2013-03-27 北京工业大学 一种用于接收gsm-r信号的接收装置

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Publication number Publication date
US10673410B2 (en) 2020-06-02
US20180041192A1 (en) 2018-02-08
KR101944625B1 (ko) 2019-01-31
JP2018023074A (ja) 2018-02-08
CN107689783A (zh) 2018-02-13
KR20180016298A (ko) 2018-02-14
JP6520857B2 (ja) 2019-05-29

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