CN107688403A - Application of a surface device and applying method - Google Patents
Application of a surface device and applying method Download PDFInfo
- Publication number
- CN107688403A CN107688403A CN201610623508.6A CN201610623508A CN107688403A CN 107688403 A CN107688403 A CN 107688403A CN 201610623508 A CN201610623508 A CN 201610623508A CN 107688403 A CN107688403 A CN 107688403A
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- substrate
- electrostatic chuck
- mould
- vacuum chamber
- push rod
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Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04102—Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Press Drives And Press Lines (AREA)
Abstract
The present invention proposes a kind of application of a surface device, and it includes the upper vacuum chamber being oppositely arranged and lower vacuum chamber, upper mould and lower mould.Upper mould includes the first noumenon, the first electrostatic chuck and the first push rod, the first noumenon is contained on this in mould, first electrostatic chuck is located at the first noumenon towards on the first surface of lower mould, first electrostatic chuck is bending and is movably arranged on mould and is connected with the first noumenon for one first substrate of absorption, the first push rod.Lower mould includes the second body and the second electrostatic chuck, and for the second electrostatic chuck located at the second body towards on the second surface of upper mould, the second electrostatic chuck is bending and for adsorbing second substrate.First push rod can drive the first electrostatic chuck and first substrate to be moved towards lower mould, first substrate is fitted with second substrate.The present invention also provides a kind of applying method.
Description
Technical field
The present invention relates to a kind of laminating apparatus, more particularly to a kind of application of a surface device and applying method.
Background technology
Display is divided into flat-panel screens and flexible displays.As intelligent watch, mobile phone and larger display panels etc. are more
The listing successively of kind flexible displays, the coating technique of accurate highly effective curved face display are more aobvious important.
Flexible displays include flexible base board and the assembly that is bonded of curved surface 3D protective glass, and flexible base board is usually touch-screen
Sensor or flexible OLED display.One of Making programme of flexible displays is to be affixed flexible base board and bend glass substrate
Close.
During touch-screen production operation, generally first optical cement is fitted between glass substrate and flexible base board, then uses roller
Rolling, by flexible base board pressure on the glass substrate.When being bonded flexible displays in this way, generally require flexible base first
Plate support is flat, then flexible base board is pressed on bend glass substrate with roller.However, easily produced during the overtension of flexible base board
Raw circuit defect, if the curvature of glass substrate is smaller, flexible base board easily produces interference with bend glass substrate and increased
The degree of difficulty of fitting, and bubble is easily produced between flexible base board and bend glass substrate, cause the quality of flexible displays not
Good, fine ratio of product is relatively low.
The content of the invention
In view of above-mentioned condition, it is necessary to a kind of application of a surface device is provided, solves flexible base board and bend glass substrate not
The problem of quality of flexible displays after the problem of easy to attach, and fitting is bad.
In view of above-mentioned condition, it there is a need to and a kind of applying method is provided, solve flexible base board and be not easy with bend glass substrate
The problem of quality of flexible displays after the problem of fitting, and fitting is bad.
The present invention provides a kind of application of a surface device, and it includes vacuum chamber and lower vacuum chamber, on this under vacuum chamber and this
Vacuum chamber is oppositely arranged and can relatively moved, should to form an airtight cavity when vacuum chamber closes with the lower vacuum chamber on this
At least one upper vacuum chamber and the lower vacuum chamber are provided with the vacuum pumping hole communicated with the airtight cavity.The application of a surface device is also
Including the upper mould being oppositely arranged and lower mould, mould includes the first noumenon, the first electrostatic chuck and the first push rod, the first noumenon on this
It is contained on this in vacuum chamber, first electrostatic chuck is located at the first noumenon towards on the first surface of the lower mould, and this first
Electrostatic chuck is bending and for adsorbing a first substrate, first push rod be movably arranged on this on mould and with this
One body is connected, to promote the first noumenon and first electrostatic chuck to be moved towards the direction closer or far from the lower mould；
The lower mould includes the second body and the second electrostatic chuck, and second body is contained in the lower vacuum chamber, second electrostatic chuck
Located at second body towards on the second surface of mould on this, second electrostatic chuck is bending and for adsorbing one second base
Plate, after vacuum chamber forms the airtight cavity with the lower vacuum chamber on this, first push rod drives first electrostatic chuck and should
First substrate moves towards the lower mould, so that the first substrate on first electrostatic chuck and being somebody's turn to do on second electrostatic chuck
Second substrate fits.
The present invention also provides a kind of applying method, and the applying method comprises the following steps：Application of a surface device is provided；By
Two substrates are placed on second electrostatic chuck of the lower mould；Vacuum chamber is mutually closed to form closed chamber with the lower vacuum chamber on this
Body, first push rod drive mould on this to be moved towards the lower mould, and the second substrate is pressed into curved surface, the absorption of the second electrostatic chuck
The second substrate simultaneously makes the second substrate keep curved surface；Vacuum chamber is separated with the lower vacuum chamber on this, and first push rod drives
Mould is directed away from the direction motion of the lower mould on this；First substrate is positioned on the first electrostatic chuck, and first electrostatic is inhaled
Disk adsorbs the first substrate；Vacuum chamber is mutually closed to form airtight cavity with the lower vacuum chamber on this, and the airtight cavity is carried out
It is evacuated to form vacuum in airtight cavity；First push rod drives on this mould to be moved towards the lower mould, make the first substrate with
The second substrate fits.
Above-mentioned application of a surface device includes the first electrostatic chuck and the second electrostatic chuck, can adsorb respectively first substrate with
Second substrate, and first substrate will not be made to produce the defects of annular with second substrate.Formed using upper vacuum chamber and lower vacuum chamber
Airtight cavity, and vacuum environment is formed by vacuum suction, it can avoid being bonded first substrate with producing gas during second substrate
Bubble.Therefore, above-mentioned application of a surface device and applying method can be used for fitting bend glass and flexible base board, solve bend glass
With flexible base board it is not easy to attach the problem of, and be bonded after display quality be unaffected, so as to display quality it is preferable.
Brief description of the drawings
Fig. 1 is the structural representation of the application of a surface device of embodiment of the present invention.
Fig. 2 to Fig. 9 is respectively structural representation of the application of a surface device shown in Fig. 1 in different fit-states.
Figure 10 is the flow chart of the applying method of embodiment of the present invention.
Main element symbol description
| Application of a surface device | 100 |
| Bend glass | 210 |
| Flexible base board | 220 |
| Upper vacuum chamber | 10 |
| First groove | 11 |
| First through hole | 12 |
| Lower vacuum chamber | 20 |
| Second groove | 21 |
| Second through hole | 22 |
| Vacuum pumping hole | 23 |
| Sealing gasket resettlement section | 24 |
| Sealing gasket | 25 |
| Upper mould | 30 |
| The first noumenon | 31 |
| First surface | 311 |
| Heating member | 312,412 |
| Vacuum suction component | 313 |
| First sorption channel | 3131 |
| Second sorption channel | 3132 |
| Bleeding point | 3133 |
| First push rod | 32 |
| First bar portion | 321 |
| First support division | 322 |
| First seal sleeve | 323 |
| First electrostatic chuck | 33 |
| Lower mould | 40 |
| Second body | 41 |
| Second surface | 411 |
| Cushion pad | 42 |
| Second electrostatic chuck | 43 |
| Second push rod | 44 |
| Second bar portion | 441 |
| Second support division | 442 |
| Second seal sleeve | 443 |
| Airtight cavity | 50 |
| Shang Mo vision-based detections mechanism | 61 |
| Xia Mo vision-based detections mechanism | 62 |
Following embodiment will combine above-mentioned accompanying drawing and further illustrate the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on this
Embodiment in invention, the every other reality that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example is applied, belongs to the scope of protection of the invention.
It should be noted that when a component is considered as " connection " another component, it can be directly to separately
One component may be simultaneously present the component being centrally located.When a component is considered as " being arranged on " another component,
It can be set directly on another component or may be simultaneously present the component being centrally located.
Unless otherwise defined, all of technologies and scientific terms used here by the article is with belonging to technical field of the invention
The implication that technical staff is generally understood that is identical.Term used in the description of the invention herein is intended merely to description tool
The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term as used herein " and/or " include one or more phases
The arbitrary and all combination of the Listed Items of pass.
The present invention provides a kind of application of a surface device suitable for flexible displays, for being bonded bend glass and flexible base
Plate.In the present embodiment, bend glass is the glass cover-plate of flexible displays, has certain radian, flexible base board is tactile
Touch screen sensor, but not limited to this.
Fig. 1 is refer to, application of a surface device 100 includes the upper vacuum chamber 10 being oppositely arranged and lower vacuum chamber 20, is contained in
Upper mould 30 in upper vacuum chamber 10, and the lower mould 40 being contained in lower vacuum chamber 20.
Upper vacuum chamber 10 offers the first groove 11, and upper mould 30 is movably contained in the first groove 11, upper vacuum chamber
Two first through hole being parallel to each other 12 are offered on 10 middle part.
Lower vacuum chamber 20 offers the second groove 21, and lower mould 40 is fixed and is contained in the second groove 21, on lower vacuum chamber 20
2 second through holes 22 and a vacuum pumping hole 23 are offered, 2 second through holes 22 are parallel to each other, and vacuum pumping hole 23 is close to second
The edge of groove 21.After upper vacuum chamber 10 closes with the lower phase of vacuum chamber 20, it is evacuated by vacuum pumping hole 23, upper vacuum chamber
Vacuum environment can be formed between 10 and lower vacuum chamber 20.
Lower vacuum chamber 20 is provided with sealing gasket resettlement section 24 and sealing gasket 25, sealing gasket 25 towards the end face of upper vacuum chamber 10
It is at least partially housed in sealing gasket resettlement section 24.In the present embodiment, sealing gasket resettlement section 24 is the groove of ring-type, is sealed
Pad 25 is the flexible gaskets of annular.
Upper vacuum chamber 10 can be in console with lower vacuum chamber 20（It is not shown）Control under relatively move, to be formed with fitting
One airtight cavity.In the present embodiment, lower vacuum chamber 20 is fixed on console, and upper vacuum chamber 10 can be under console effect
Moved towards the direction closer or far from lower vacuum chamber 20, but not limited to this, upper vacuum chamber 10 can be also fixed on console,
Lower vacuum chamber 20 can move under console effect towards the direction closer or far from upper vacuum chamber 10, or upper vacuum chamber 10,
Lower vacuum chamber 20 is movable.
Upper mould 30 includes the first noumenon 31, the first push rod 32 located at the side of the first noumenon 31, and located at the first noumenon
First electrostatic chuck of 31 opposite sides（Electrostatic chuck, ESC）33.
Towards the surface of lower mould 40 be first surface 311 on the first noumenon 31, be provided with the first noumenon 31 heating member 312 with
Vacuum suction component 313.Heating member 312 is used to heat upper mould 30, and the workpiece for making subsequently to be connected on mould 30 softens,
In order to be bonded.In the present embodiment, heating member 312 is heating tube in the first noumenon 31, but not limited to this.
Vacuum suction component 313 includes the first sorption channel 3131 being located in the first noumenon 31 and multiple second absorption are logical
Road 3132.First sorption channel 3131 includes the bleeding point 3133 located at the edge of the first noumenon 31, and the first sorption channel 3131
Extend along the direction vertical with the first push rod 32.Multiple second sorption channels 3132 are vertical with the first sorption channel 3131 respectively
And be connected, but not limited to this.
First electrostatic chuck 33 is fixed on the first surface 311 of the first noumenon 31 and the first electrostatic chuck 33 is in bending
Shape.First electrostatic chuck 33 includes dielectric layer and one or more electrodes（It is not shown）, it is located at dielectric layer by applying the voltage to
One or more electrodes of lower section, by caused electrostatic attraction between workpiece and the first electrostatic chuck 33, by absorption of workpieces to
The surface of one electrostatic chuck 33.First electrostatic chuck 33 is used to adsorb first substrate.In the present embodiment, the first substrate is
Bend glass 210（Join Fig. 8）.
In the present embodiment, the first electrostatic chuck 33 is provided with multiple air-vents（It is not shown）, multiple air-vent difference
It is connected with correspondingly the second sorption channel 3132.When bend glass 210 is placed on upper mould 30, vacuum suction component is first passed through
313 adsorption curve glass 210, then by the adsorption curve glass 210 of the first electrostatic chuck 33, bend glass 210 is fixed on upper mould
On 30.
In the present embodiment, the quantity of the first push rod 32 is two, and 2 first push rods 32 are movably arranged in respectively
In the corresponding first through hole 12 of vacuum chamber 10, and it is fixedly connected with the first noumenon 31.First push rod 32 and an actuator（Figure is not
Show）Connection, under the driving of actuator, the first push rod 32 can drive mould 30 towards the direction fortune closer or far from lower mould 40
It is dynamic.It is appreciated that in other embodiments, the quantity of the first push rod 32 can be one or more than two.
Lower mould 40 includes the second body 41, cushion pad 42, the second electrostatic chuck 43 and the second push rod 44.
Second body 41 is second surface 411 towards the surface of upper mould 30, and the electrostatic chuck 43 of cushion pad 42 and second is successively
On second surface 411.Heating member 412 is provided with second body 41, heating member 412 is used to heat the second body 41 and second
The workpiece that body 41 carries.
Cushion pad 42 is located between the second body 41 and the second electrostatic chuck 43, and cushion pad 42 is used to carry when being bonded workpiece
For buffering.In the present embodiment, the electrostatic chuck 43 of cushion pad 42 and second is bending, and top surface is curved surface.
The structure of second electrostatic chuck 43 is roughly the same with the first electrostatic chuck 33, and the second electrostatic chuck is used to adsorb second
Substrate, in the present embodiment, the second substrate are flexible base board 220（Join Fig. 8）.It is appreciated that in order that flexible base board 220
Be bonded completely with bend glass 210, the first electrostatic chuck 33, the second electrostatic chuck 43 can have it is same or like as curvature half
Footpath.It is preferred that first surface 311, second surface 411, the first electrostatic chuck 33, the second electrostatic chuck 43 are respectively provided with identical song
Rate radius.
In the present embodiment, the second body 41, the electrostatic chuck 43 of cushion pad 42 and second are in the position of corresponding second through hole
Put and offer through hole（It is not shown）.The quantity of second push rod 44 is two, and 2 second push rods 44 are movably arranged in down respectively
In vacuum chamber 20, the second body 41, the electrostatic chuck 43 of cushion pad 42 and second, one end of the second push rod 44 is located at lower vacuum chamber 20
Side away from upper vacuum chamber 10.2 second push rods 44 and an actuator（It is not shown）Connection.Under the driving of actuator, 2
Two push rods 44 can be towards the direction movement closer or far from upper mould 30.It is appreciated that in other embodiments, the second push rod
44 quantity can also be one or more than two.
Fig. 2 is refer to, the first push rod 32 includes the first bar portion 321, the first support division 322 and the first seal sleeve 323,
First bar portion 321 is connected with the first noumenon 31, and the first support division 322 is located at one of the first bar portion 321 away from lower vacuum chamber 20
End, the first seal sleeve 323 is set in the first bar portion 321, and both ends respectively with the first support division 322 and the phase of upper vacuum chamber 10
Support.First seal sleeve 323 has preferably elasticity, can prevent the motion of the first push rod 32 from destroying upper vacuum chamber 10 with
Vacuum environment between vacuum chamber 20.
Second push rod 44 includes the second bar portion 441, the second support division 442 and the second seal sleeve 443, the second bar portion 441
One end be located between upper vacuum chamber 10 and lower vacuum chamber 20, the other end is located at one of lower vacuum chamber 20 away from upper vacuum chamber 10
Side.Second bar portion 441 can move up and down relative to lower vacuum chamber 20.Second support division 442 is located at the second bar portion away from upper true
One end of cavity 10, the second seal sleeve 443 are set in the second bar portion 441, and both ends are held in the second support division 442 respectively
And lower vacuum chamber 20.Second seal sleeve 443 has preferably elasticity, can prevent the motion of the second push rod 44 from destroying upper vacuum
Vacuum environment between chamber 10 and lower vacuum chamber 20.
Referring to Fig. 1, Fig. 2 and Fig. 8, in above-mentioned application of a surface device 100, the second push rod 44 can towards close or
Direction away from upper vacuum chamber 10 is moved, and to accept flexible base board 220, and flexible base board 220 is positioned over into the second electrostatic chuck
On 43.Upper mould 30 can mould 40 moves under under the driving of the first push rod 32, and it is quiet that flexible base board 220 is pressed together on into second
On electric sucker 43, it is in bending to make flexible base board 220.First electrostatic chuck 33 can be distinguished after being powered with the second electrostatic chuck 43
Adsorption curve glass 210 and flexible base board 220, upper vacuum chamber 10 can fit to form vacuum cavity with lower vacuum chamber 20, this
When, the first push rod 32 drives mould 30 to be moved towards lower mould 40 again, makes bend glass 210 with flexible base board 220 certain
Fitted under pressure.
Figure 10 is a kind of flow chart of application of a surface method provided by the invention.The application of a surface method includes following step
Suddenly.
S101：Fig. 2 is refer to, in original state, upper vacuum chamber 10 is separated with lower vacuum chamber 20, heating member 312,412
Upper mould 30 and lower mould 40 are heated respectively, mould 30 is kept being bonded the temperature of demand with lower mould 40.
S102：Second push rod 44 is moved to protrude from the surface of the second electrostatic chuck 43 towards the direction of upper mould 30, then, soft
Property substrate 220 be placed on the top of the second push rod 44.Now, flexible base board 220 is substantially planar.
S103：Fig. 3 is refer to, the second push rod 44 drives flexible base board 220 to be directed away from the direction motion of mould 30, made soft
Property substrate 220 is placed on the second electrostatic chuck 43.
S104：Fig. 4 is refer to, upper vacuum chamber 10 is closed with the lower phase of vacuum chamber 20 to form airtight cavity 50, the first push rod
32 driving the first noumenons 31 are moved towards lower mould 40, and flexible base board 220 is pressed into the curved surface of fitting demand, inhaled to the second electrostatic
Disk 43 applies voltage, makes the second electrostatic chuck adsorption flexible substrate 220 and flexible base board 220 is kept curved surface.
When pressing flexible base board 220, flexible base board 220 be located at the first electrostatic chuck 33 and the second electrostatic chuck 43 it
Between, so flexible base board 220 can be pressed into curved surface, and the curvature of flexible base board 220 and the first electrostatic chuck 33, second are quiet
The electric curvature of sucker 43 is roughly the same.
S105：Fig. 5 is refer to, upper vacuum chamber 10 is separated with lower vacuum chamber 20, and the first push rod 32 drives the upper direction of mould 30
Move in direction away from lower mould 40.Now, the shape that the flexible base board 220 on the second electrostatic chuck 43 still keeps curved surface is adsorbed
State.
S106：Bend glass 210 is positioned over to the surface of the first electrostatic chuck 33, and the adsorption curve of the first electrostatic chuck 33
Glass 210.Refer to Fig. 6, in the present embodiment, bend glass 210 be positioned over to the surface of the first electrostatic chuck 33, first by
The adsorption curve glass 210 of vacuum suction component 313, then, voltage is applied to the first electrostatic chuck 33, makes the first electrostatic chuck 33
Electrostatic attraction is produced between bend glass 210, so as to which bend glass 210 is adsorbed on the first electrostatic chuck 33.In addition,
Tear the diaphragm on flexible base board 220（It is not shown）.
S107：Fig. 8 is refer to, upper vacuum chamber 10 is closed with the lower phase of vacuum chamber 20 to form airtight cavity 50, utilizes vacuum
Aspirating hole 23 is evacuated to airtight cavity 50, to form vacuum in airtight cavity 50.Now, bend glass 210 and flexibility
Still there is a certain distance between substrate 220.
S 108：Fig. 9 is refer to, the first push rod 32 drives upper mould 30 to move a certain distance towards lower mould 40, makes curved surface glass
Glass 210 fits under pressure with flexible base board 220.
After the completion of fitting, the first push rod 32 drives upper mould 30 to be directed away from the direction of lower mould 40 and moved, and lower vacuum chamber
20 with the upper phase of vacuum chamber 10 from motion.
In another embodiment, only upper mould 30 can be heated in step S 101, or can be with cancellation step
101, you can not heated to upper mould 30 and lower mould 40, or only upper mould 30 is heated.
In another embodiment, step S102 and S103 can cancel, now, directly will be soft after step S 101
Property substrate 220 is positioned on the second electrostatic chuck 43.
In another embodiment, above-mentioned application of a surface method be additionally included in before fitting respectively to the bend glass 210 and
Flexible base board 220 carries out capture, so that bend glass 210 aligns with flexible base board 220.Refer to Fig. 7, step S106 it
Afterwards, by a Shang Mo vision-based detections mechanism 61 and once mould vision-based detection mechanism 62 is moved between upper mould 30 and lower mould 40, use
Shang Mo vision-based detections mechanism 61, Xia Mo vision-based detections mechanism 62 carry out capture to bend glass 210 and flexible base board 220 respectively,
To detect whether bend glass 210 aligns accurately with flexible base board 220.If contraposition is accurate, step 107 is directly entered.It is if right
Position is inaccurate, then moves the position of bend glass 210 or flexible base board 220, makes bend glass 210 and flexible base board 220 again
Contraposition, step 107 is entered back into after contraposition is accurate.
Above-mentioned application of a surface device 100 can be bonded bend glass 210 and flexible base board 220 under vacuum conditions, avoid
Produce fitting bubble；First electrostatic chuck 33 and the second electrostatic chuck 43 difference adsorption curve glass 210 and flexible base board 220,
The defects of workpiece can be avoided to produce ring-type.Therefore, above-mentioned application of a surface device 100 solves bend glass 210 and flexible base
The problem of plate 220 is not easy to attach, and the display quality after fitting is unaffected.
It is appreciated that in other embodiments, the first electrostatic chuck 33 can be used for adsorption flexible substrate 220, and second is quiet
Electric sucker 43 can be used for adsorption curve glass 210.During fitting, after the adsorption flexible substrate 220 of the first electrostatic chuck 33, first pushes away
Bar 32 drives upper mould 30 to be moved towards lower mould 40, and flexible base board 220 is pressed into curved surface.
It is appreciated that in other embodiments, the second push rod 44 is movably located on lower vacuum chamber 20 and with
Mould 40 is fixedly connected, and now, the second push rod 44 can promote lower mould 40 to be moved towards upper mould 30.
In the present embodiment, upper mould includes vacuum suction component 313, in other embodiments, vacuum suction component
313 can cancel, and directly use the adsorption curve glass of the first electrostatic chuck 33.
It is appreciated that in other embodiments, the heating member of the heating member 312 of upper vacuum chamber 10 and lower vacuum chamber 20
412 can cancel, and now, upper vacuum chamber 10, lower vacuum chamber 20 can be put into a heater（It is not shown）Inside heated, should
Heater is, for example, electric drying oven with forced convection, but not limited to this.
In the present embodiment, vacuum pumping hole 23 is opened on lower vacuum chamber 20, it will be understood that in other embodiment
In, vacuum pumping hole 23 can be opened on vacuum chamber 10, or is opened in simultaneously on vacuum chamber 10 and lower vacuum chamber 20.
It is appreciated that in other embodiments, the sealing gasket 25 of lower vacuum chamber 20 and sealing gasket resettlement section 24 can take
Disappear, as long as sealing can be realized between upper vacuum chamber 10 and lower vacuum chamber 20；The cushion pad 42 of lower mould 40 can also be cancelled.
It is appreciated that the first seal sleeve 323 can recover elastic deformation to drive the first push rod 32 to reset, or first
Push rod 32 resets under the driving of actuator.Similarly, the second seal sleeve 443 can recover elastic deformation to drive second to push away
Bar 44 resets, or the second push rod 44 resets under the driving of actuator.
In addition, those skilled in the art can also do other changes in spirit of the invention, certainly, these are according to present invention essence
The change that god is done, it should all be included in scope of the present invention.
Claims (14)
1. a kind of application of a surface device, it includes vacuum chamber and lower vacuum chamber, and lower vacuum chamber is relative sets with this for vacuum chamber on this
Put and can relatively move, to form an airtight cavity when vacuum chamber closes with the lower vacuum chamber on this, vacuum chamber and should on this
At least one lower vacuum chamber is provided with the vacuum pumping hole communicated with the airtight cavity, it is characterised in that：The application of a surface device is also
Including the upper mould being oppositely arranged and lower mould, mould includes the first noumenon, the first electrostatic chuck and the first push rod, the first noumenon on this
Be contained on this in mould, first electrostatic chuck located at the first noumenon towards on the first surface of the lower mould, first electrostatic
Sucker be bending and for adsorb a first substrate, first push rod be movably arranged on this on mould and with the first
Body phase connects, to promote the first noumenon and first electrostatic chuck to be moved towards the direction closer or far from the lower mould；Under this
Mould includes the second body and the second electrostatic chuck, and second body is contained in the lower vacuum chamber, and second electrostatic chuck is located at
For second body towards on the second surface of mould on this, second electrostatic chuck is bending and for adsorbing a second substrate,
After vacuum chamber and the lower vacuum chamber form the airtight cavity on this, first push rod drive first electrostatic chuck and this first
Substrate moves towards the lower mould so that the first substrate on first electrostatic chuck with second electrostatic chuck this second
Substrate fits.
2. application of a surface device as claimed in claim 1, it is characterised in that：One of the first substrate and the second substrate are song
Surface glass, another is flexible base board.
3. application of a surface device as claimed in claim 1, it is characterised in that：The first surface of the first noumenon and this second
The second surface of body is curved surface, and the first surface, the second surface, first electrostatic chuck and second electrostatic chuck are equal
With identical radius of curvature.
4. application of a surface device as claimed in claim 1, it is characterised in that：Vacuum chamber offers first through hole on this, and this
One push rod is movably arranged in the first through hole, and first push rod includes the first bar portion, the first support division and the first sealing
Sleeve, first support division are located at the one end of first bar portion away from the lower mould, and first seal sleeve is set in the first bar portion
On, the both ends of first seal sleeve offset with vacuum chamber on this and first support division respectively.
5. application of a surface device as claimed in claim 1, it is characterised in that：The lower mould also includes being actively located in the lower vacuum
The second push rod in chamber, second body and second electrostatic chuck, second push rod are used to carrying the second substrate and should
Second substrate is positioned on second electrostatic chuck, and second push rod includes the second bar portion, the second support division and the second sealing shroud
Cylinder, second support division are located at the one end of second bar portion away from mould on this, and second seal sleeve is set in second bar portion
On, the both ends of second seal sleeve offset with second support division and the lower vacuum chamber respectively.
6. application of a surface device as claimed in claim 1, it is characterised in that：The first substrate is adsorbed in first electrostatic chuck
Before, first push rod is additionally operable to drive the first noumenon and first electrostatic chuck to move towards the lower mould, to be placed on this
The second substrate on second electrostatic chuck is pressed into curved surface.
7. application of a surface device as claimed in claim 1, it is characterised in that：Mould also includes being located in the first noumenon on this
Vacuum suction component, the vacuum suction component include the first absorption channel and multiple second sorption channels, first sorption channel
Including the bleeding point located at the first noumenon edge, the first sorption channel is vertical connects with this respectively for the plurality of second sorption channel
It is logical, multiple air-vents are additionally provided with first electrostatic chuck, the plurality of air-vent is connected with the plurality of second sorption channel respectively
It is logical.
8. application of a surface device as claimed in claim 1, it is characterised in that：At least one mould and the lower mould also include adding on this
Warmware, the heating member are located in the first noumenon or in second body, and the lower mould also includes cushion pad, and the cushion pad is located at should
Between second body and second electrostatic chuck.
9. application of a surface device as claimed in claim 1, it is characterised in that：The lower vacuum chamber is at the end towards vacuum chamber on this
Face is provided with sealing gasket resettlement section and sealing gasket, and the sealing gasket is at least partially housed in the sealing gasket resettlement section.
10. a kind of applying method, it comprises the following steps：
Application of a surface device as claimed in claim 1 is provided；
Second substrate is placed on second electrostatic chuck of the lower mould；
Vacuum chamber is mutually closed to form airtight cavity with the lower vacuum chamber on this, and first push rod drives on this mould towards the lower mould
Motion, the second substrate is pressed into curved surface, the second electrostatic chuck adsorbs the second substrate and the second substrate is kept curved surface；
Vacuum chamber is separated with the lower vacuum chamber on this, and first push rod drives mould on this to be directed away from the direction fortune of the lower mould
It is dynamic；
First substrate is positioned on first electrostatic chuck, and first electrostatic chuck adsorbs the first substrate；
Vacuum chamber is mutually closed to form airtight cavity with the lower vacuum chamber on this, and the airtight cavity is evacuated with closed chamber
Vacuum is formed in body；
First push rod drives mould on this to be moved towards the lower mould, the first substrate is fitted with the second substrate.
11. applying method as claimed in claim 10, it is characterised in that：The lower mould also includes being actively located in the lower vacuum chamber
With the second push rod in second electrostatic chuck, before second substrate is placed on second electrostatic chuck of the lower mould, second
Push rod is moved to protrude from the second electrostatic chuck surface towards the direction of upper mould, and the second substrate is placed on the second push rod
Side, then the second push rod drive the second substrate to be directed away from the direction motion of mould, the second substrate is placed on the
On two electrostatic chucks.
12. applying method as claimed in claim 10, it is characterised in that：By the second substrate be placed in the lower mould this is second quiet
Before on electric sucker, first mould on this and the lower mould are heated.
13. applying method as claimed in claim 10, it is characterised in that：The applying method is additionally included in first electrostatic chuck
After adsorbing the first substrate, capture contraposition is carried out to the first substrate, the second substrate respectively, so that the first substrate is with being somebody's turn to do
Second substrate aligns.
14. applying method as claimed in claim 10, it is characterised in that：Mould also includes true in the first noumenon on this
Empty absorbent module, before first electrostatic chuck adsorbs the first substrate, first base is first adsorbed by the vacuum suction component
Plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610623508.6A CN107688403A (en) | 2016-08-03 | 2016-08-03 | Application of a surface device and applying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610623508.6A CN107688403A (en) | 2016-08-03 | 2016-08-03 | Application of a surface device and applying method |
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| Publication Number | Publication Date |
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| CN107688403A true CN107688403A (en) | 2018-02-13 |
Family
ID=61150761
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610623508.6A Pending CN107688403A (en) | 2016-08-03 | 2016-08-03 | Application of a surface device and applying method |
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| CN (1) | CN107688403A (en) |
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