CN107673359B - 一种四氯化硅的制备方法及反应温度控制方法 - Google Patents
一种四氯化硅的制备方法及反应温度控制方法 Download PDFInfo
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- CN107673359B CN107673359B CN201711066944.9A CN201711066944A CN107673359B CN 107673359 B CN107673359 B CN 107673359B CN 201711066944 A CN201711066944 A CN 201711066944A CN 107673359 B CN107673359 B CN 107673359B
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- chlorine
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 83
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 title claims abstract description 55
- 239000005049 silicon tetrachloride Substances 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- 239000000460 chlorine Substances 0.000 claims abstract description 96
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 93
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 91
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims abstract description 88
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 69
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 34
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 34
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims abstract description 31
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 30
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 29
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 25
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 claims abstract description 19
- 239000007789 gas Substances 0.000 claims abstract description 18
- 239000000203 mixture Substances 0.000 claims abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 44
- 229910052710 silicon Inorganic materials 0.000 claims description 44
- 239000010703 silicon Substances 0.000 claims description 44
- 239000002994 raw material Substances 0.000 claims description 19
- 238000002347 injection Methods 0.000 claims description 11
- 239000007924 injection Substances 0.000 claims description 11
- 125000001309 chloro group Chemical group Cl* 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 abstract description 16
- 230000008569 process Effects 0.000 abstract description 9
- 239000013064 chemical raw material Substances 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 3
- 230000002194 synthesizing effect Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 238000001035 drying Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 229910052906 cristobalite Inorganic materials 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 238000002156 mixing Methods 0.000 description 6
- 229910052905 tridymite Inorganic materials 0.000 description 6
- 229910021418 black silicon Inorganic materials 0.000 description 5
- 229910052681 coesite Inorganic materials 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 229910052682 stishovite Inorganic materials 0.000 description 5
- 238000003723 Smelting Methods 0.000 description 4
- 230000007613 environmental effect Effects 0.000 description 4
- 239000007858 starting material Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 239000006004 Quartz sand Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 238000005660 chlorination reaction Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 208000005156 Dehydration Diseases 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000002893 slag Substances 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- XWHPIFXRKKHEKR-UHFFFAOYSA-N iron silicon Chemical compound [Si].[Fe] XWHPIFXRKKHEKR-UHFFFAOYSA-N 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052990 silicon hydride Inorganic materials 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10715—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material
- C01B33/10721—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of tetrachloride
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (10)
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CN201711066944.9A CN107673359B (zh) | 2017-11-02 | 2017-11-02 | 一种四氯化硅的制备方法及反应温度控制方法 |
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CN201711066944.9A CN107673359B (zh) | 2017-11-02 | 2017-11-02 | 一种四氯化硅的制备方法及反应温度控制方法 |
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Publication Number | Publication Date |
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CN107673359A CN107673359A (zh) | 2018-02-09 |
CN107673359B true CN107673359B (zh) | 2020-03-31 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6217012A (ja) * | 1985-07-12 | 1987-01-26 | Agency Of Ind Science & Technol | 四塩化ケイ素の製造方法 |
CN102686514A (zh) * | 2009-12-22 | 2012-09-19 | Jnc株式会社 | 多晶硅的制造方法及四氯化硅的制造方法 |
CN203568858U (zh) * | 2013-08-19 | 2014-04-30 | 浙江富士特集团有限公司 | 一种四氯化硅合成的生产系统 |
CN106185950A (zh) * | 2016-07-06 | 2016-12-07 | 成都蜀菱科技发展有限公司 | 生产四氯化硅的方法 |
CN106379901A (zh) * | 2016-09-13 | 2017-02-08 | 中国恩菲工程技术有限公司 | 一种制备四氯化硅的方法 |
-
2017
- 2017-11-02 CN CN201711066944.9A patent/CN107673359B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6217012A (ja) * | 1985-07-12 | 1987-01-26 | Agency Of Ind Science & Technol | 四塩化ケイ素の製造方法 |
CN102686514A (zh) * | 2009-12-22 | 2012-09-19 | Jnc株式会社 | 多晶硅的制造方法及四氯化硅的制造方法 |
CN203568858U (zh) * | 2013-08-19 | 2014-04-30 | 浙江富士特集团有限公司 | 一种四氯化硅合成的生产系统 |
CN106185950A (zh) * | 2016-07-06 | 2016-12-07 | 成都蜀菱科技发展有限公司 | 生产四氯化硅的方法 |
CN106379901A (zh) * | 2016-09-13 | 2017-02-08 | 中国恩菲工程技术有限公司 | 一种制备四氯化硅的方法 |
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Effective date of registration: 20220210 Address after: 611400 No. 445, Qingyun South Road, Puxing street, Xinjin District, Xinjin County, Chengdu, Sichuan Patentee after: Sichuan mintian Technology Development Co.,Ltd. Address before: 610000 Xincai 18th Road, new material industrial functional zone, Xinjin Industrial Park, Xinjin County, Chengdu City, Sichuan Province Patentee before: CHENGDU SHULING TECHNOLOGY DEVELOPMENT Co.,Ltd. |
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Effective date of registration: 20240318 Address after: 610000 Xincai 18th Road, new material industrial functional zone, Xinjin Industrial Park, Xinjin County, Chengdu City, Sichuan Province Patentee after: CHENGDU SHULING TECHNOLOGY DEVELOPMENT Co.,Ltd. Country or region after: China Address before: 611400 No. 445, Qingyun South Road, Puxing street, Xinjin District, Xinjin County, Chengdu, Sichuan Patentee before: Sichuan mintian Technology Development Co.,Ltd. Country or region before: China |