CN107631995A - A kind of three-dimensional terahertz tomographic imaging system and scanning and image rebuilding method - Google Patents
A kind of three-dimensional terahertz tomographic imaging system and scanning and image rebuilding method Download PDFInfo
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Abstract
The invention discloses a kind of three-dimensional terahertz tomographic imaging system and scanning and image rebuilding method, three-dimensional terahertz tomographic imaging system includes terahertz sources source, chopper, rotation translation sample stage, beam delivery unit, terahertz detector and lock-in amplifier；Imaging method includes the scan method and image rebuilding method for obtaining data for projection, during being scanned using the imaging system to sample, the single-frequency transmitted light intensity of each sensing point need to be only recorded, not only imaging time is relative is reduced,, being imaged to thicker object and power is larger；During carrying out image reconstruction according to data for projection, the absorption distribution of the sample under the angle is obtained by the data for projection under each angle first, itself and thz beam light distribution are deconvoluted, obtain actual sample absorption distribution；Imaging method provided by the invention and system can effectively solve the problems, such as that carrying out image caused by light approximation in existing imaging technique to thz beam obscures.
Description
Technical field
The invention belongs to THz imaging technology field, more particularly, to a kind of three-dimensional terahertz tomographic imaging system
And scanning and image rebuilding method.
Background technology
X ray computer chromatography imaging technique (CT) can carry out three to dense materials such as human body, biological tissue and steels
Dimension imaging, for detecting inside of human body disease and industrial part internal flaw, but X ray can cause harmful ionization reaction, make
Into radiation insult；The low density materials such as plastics, paper, coating are too low to the absorptivity of X ray, general X ray tomography
System can not identify the defects of these materials and crackle；These inherent shortcomings limit the popularization and popularization of X ray CT.
The electromagnetic wave of Terahertz frequency range not only has good through characteristic to dielectric material, and photon energy is very low, no
Harmful ionization reaction can be caused, available for the detection that Terahertz ray opaque article internal structure is carried out in CT.It is existing
T-ray tomography system irradiates object using terahertz pulse, can obtain the information of abundant object, including phase information, spectrum
Information；The 3-D view of sample can be reconstructed；But imaging time is oversize；And because power is relatively low, reality is difficult to thicker object
Existing transmission tomography；The method being imaged using continuous THz wave can reduce imaging time, can be achieved after increasing power
To the tomography of thicker object；But existing terahertz imaging method is that light approximation is carried out to thz beam, is not examined
Consider influence of the light distribution of thz beam to reconstruction image, the 3-D view for rebuilding acquisition is object under test and terahertz light
The convolution of beam light distribution, thz beam light distribution is uneven to cause reconstruction image to distort.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of three-dimensional terahertz tomographic imaging system
System and scanning and image rebuilding method, its object is to solve the uneven caused pattern distortion of light distribution in terahertz imaging
The problem of.
According to one aspect of the present invention, there is provided a kind of three-dimensional terahertz tomographic imaging system, including terahertz sources
Source, chopper, sample stage, beam delivery unit, terahertz detector and lock-in amplifier；
Wherein, terahertz sources source is used to provide continuous thz beam；Chopper is used for the continuous terahertz light
Beam is modulated, and obtains time domain rectangle ripple signal；Sample stage is used to place sample, realizes the translation and rotation of sample；Light beam passes
Defeated unit is used to collimate time domain rectangle ripple signal and focusing, the light beam of focusing are incident to the sample on sample stage
Product, the light come out from sample transmission pass through collimation, focusing again, form the transmitted light beam of focusing；Terahertz detector is used
In the light intensity of the detection transmitted light beam, and light intensity is converted into current signal；Lock-in amplifier is used to change the current signal
For voltage signal and amplify；Outer computer obtains the projection information of sample according to the voltage signal of amplification；
Wherein, terahertz sources source is individually fixed in the linear stepping motor of two vertical directions with terahertz detector
On, and terahertz sources source and terahertz detector are located on the same line all the time.
Preferably, above-mentioned three-dimensional terahertz tomographic imaging system, its sample stage include a linear stepping motor and one
Rotating stepper motor；
Wherein, rotating stepper motor is fixed on linear stepping motor, and linear stepping motor is used to realize rotation stepping electricity
Machine and sample synchronous translational, rotating stepper motor are used for the rotation for realizing sample.
Preferably, above-mentioned three-dimensional terahertz tomographic imaging system, its beam delivery unit include the first collimation focusing module
With the second collimation focusing module；
The central axis of first collimation focusing module and the second collimation focusing module is on same straight line；First collimation focusing
The focal plane of module and the focal plane of the second collimation focusing module are in the same plane, and focus overlaps；
Chopper modulates the time domain rectangle ripple signal to be formed and passes sequentially through the first collimation focusing module, sample and the second collimation
Focus module；
First collimation focusing module is used to converge time domain rectangle ripple signal, reduces beam waist, the light after convergence
Beam is incided on sample, and the second collimation focusing module is used to converge the outgoing beam of sample, forms the light beam of focusing；
The emergent light of sample contains the absorption coefficient information of sample；Terahertz detector is according to the light of the emergent light of focusing
It is strong to form current signal, current signal is converted to the voltage signal of amplification by lock-in amplifier；Outer computer is according to the electricity
Signal is pressed to form sample projection.
Preferably, above-mentioned three-dimensional terahertz tomographic imaging system, its first collimation focusing module include the first collimation lens,
And the first condenser lens positioned at the first collimation lens exit direction；Second collimation focusing module includes the second collimation lens,
And the second condenser lens positioned at the second collimation lens exit direction.
To realize the object of the invention, according to another aspect of the present invention, there is provided one kind is based on above-mentioned three-dimensional Terahertz
The scan method of chromatographic imaging system, comprises the following steps：
(1) the continuous thz beam for launching terahertz sources source is modulated into time domain rectangle ripple；
(2) processing is focused to time domain rectangle ripple, the first focus on light beam is formed, sample is entered using the first focus on light beam
Row scanning；
(3) processing is focused to the emergent light of sample, forms the second focus on light beam；
(4) light intensity of the second focus on light beam is detected, and light intensity is converted into current signal；
(5) current signal is converted into voltage signal and amplified；
(6) the two-dimensional projection matrix g (θ, nx) of sample is obtained according to the voltage signal of amplification；Wherein, θ refers to the rotation of sample
Gyration；Nx refers to the points that sample translates in the horizontal direction；
(7) control sample is translated and rotated around vertical direction in the horizontal direction, and controls terahertz sources source and Terahertz
Detector in the vertical direction synchronous translational, repeat step (1)~(6), two-dimensional projection matrix of the sample in different height is obtained,
All two-dimensional projection's matrixes are vertically superimposed, obtain the tripleplane matrix g (ny, θ, nx) of sample；Ny refers to sample and existed
The points translated on vertical direction.
Preferably, above-mentioned scan method, scan frequency continuously adjustabe between 100Hz~8000Hz；The angle of rotary sample
Degree interval is adjustable from 1 degree to 45 degree, is rotated by 360 °.
To realize the object of the invention, above-mentioned three-dimensional Terahertz is based on according to it is still another aspect of the present invention to provide a kind of
The image rebuilding method of chromatographic imaging system, comprises the following steps：
(a) according to tripleplane matrix g (ny, θ, nx) first dimension ny and the 3rd dimension nx, initialization is established
Three-dimensional reconstruction image f (x, y, z)；Pixel value f (the x of any point in three-dimensional reconstruction image f (x, y, z)i,yj,zk)=0, its
In, i=1,2,3 ..., nx, j=1,2,3 ..., ny, k=1,2,3 ..., nx；
(b) to the projection matrix p under angle, θθ(x, y) is filtered, and obtains filtered projection matrix p'θ(x, y), its
In, 0 360 ° of ＜ θ ＜, the number of projection matrix is nθ；
(c) extemporaneous reconstitution image f is establishedb(x, y, z), each of which section fb(x,y,zk) with angle, θ under filtering after
Projection matrix p'θ(x, y) is equal；
(d) extemporaneous reconstitution image f will be takenbEach section f of (x, y, z)b(x,y,zk), with corresponding Gaussian beam three
Tie up matrix I (x, y, z) section I (x, y, zk) do two dimension and deconvolute, obtain the interim three-dimensional reconstruction image f of optimizationb'(x,y,
z)；
(e) by the interim three-dimensional reconstruction image f of optimizationb' (x, y, z) anglec of rotation θ, and by pixel value a little reduce
For original 1/nθAfter be added on three-dimensional reconstruction image f (x, y, z)；nθRefer to the quantity of the angle of rotary sample；
(f) projection matrix of next angle is taken, repeat step (b)~(e), angled projection is all added to until institute
On three-dimensional reconstruction image f (x, y, z), the three-dimensional reconstruction image of sample is obtained.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show
Beneficial effect：
(1) three-dimensional terahertz tomographic imaging system provided by the invention and imaging method, pass through the continuous Terahertz of single-frequency
Light beam is scanned to sample；Scanning process need to only record the single-frequency transmitted light intensity of each sensing point, reduce imaging time；And
And because light beam power increases, it is possible to achieve to the tomography of thicker object；Correspondingly, existing Terahertz arteries and veins
Rushing chromatographic imaging system needs to record the whole time waveform of each sensing point, and gathered data required time is long；And due to
Power is relatively low, it is difficult to realizes transmission tomography to thicker object；
(2) three-dimensional terahertz tomographic imaging system provided by the invention, there is transmission well special using in Terahertz frequency range
Property optical lens, its collimation lens and condenser lens use HDPE materials, and the light intensity value for gathering detection device is as big as possible,
Because terahertz detector can only detect the light intensity more than a certain threshold value, the invention enables the light intensity value for reaching detection device to the greatest extent may be used
Can be big, improve the degree of accuracy to light intensity detection；
(3) image rebuilding method provided by the invention, by the sample absorption distribution detected under each anglec of rotation and too
Hertz light beam deconvolutes；In existing terahertz tomographic imaging method, light approximate processing is carried out to Terahertz light, not examined
Consider influence of the light distribution of thz beam to reconstruction image, pattern distortion can be caused；And the present invention is due to each direction
On the obtained three-dimensional extemporaneous reconstitution image of projection matrix direct back projection carried out deconvolution processing, eliminate light beam light intensity point
The uneven influence to reconstruction image of cloth, therefore rebuild the image obtained and do not distort, improve terahertz tomographic imaging system
Imaging resolution, solve light distribution it is uneven caused by problem of image blurring.
Brief description of the drawings
Fig. 1 is the structural representation for the three-dimensional terahertz tomographic imaging system that embodiment provides；
Fig. 2 is the scan method flow chart based on three-dimensional terahertz tomographic imaging system；
Fig. 3 is the image rebuilding method flow chart based on three-dimensional terahertz tomographic imaging system；
Fig. 4 is the emulation of the sinogram that cylindrical metal pole cross section is obtained by existing imaging method and reconstruction image
As a result；Wherein, figure (a) is the emulating image of cylindrical metal pole cross section；Figure (b) is that the emulating image of figure (a) is projecting
In sinogram；It is the reconstruction image obtained using filtered back-projection to scheme (c)；It is to make to be obtained by the present invention to scheme (d)
Reconstruction image；
In all of the figs, identical reference is used for representing identical element or structure, wherein：1- terahertz sources
Source, 2- choppers, the collimation lenses of 3- first, the condenser lenses of 4- first, 5- sample stages, the collimation lenses of 6- second, 7- second are focused on
Lens, 8- terahertz detectors, the stepper motors of 9- first, the stepper motors of 10- second, 11- controllor for step-by-step motor, 12- lock phases
Amplifier, 13- outer computers.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Conflict can is not formed each other to be mutually combined.
Embodiment provide three-dimensional terahertz tomographic imaging system structure as shown in Fig. 2 including terahertz sources source 1,
Chopper 2, beam delivery unit, sample stage 5, terahertz detector 8 and lock-in amplifier 12；Wherein, beam delivery unit
Including the first collimation lens 3, the first condenser lens 4, the second collimation lens 6 and the second condenser lens 7；
In embodiment, terahertz sources source 1 is fixed on the first stepper motor 9 of vertical direction, and terahertz detector 8 is solid
Due on the second stepper motor 10 of vertical direction, terahertz sources source is on same straight line all the time with terahertz detector,
Spacing keeps constant.
In embodiment, the interval 2mm in chopper 2 and terahertz sources source 1, the first collimation lens 3 and terahertz sources source 1
Distance be 45mm；The spacing of first condenser lens 4 and the first collimation lens 3 is 50mm；Second collimation lens 6 and first focuses on
The spacing of lens 4 is 200mm；The spacing of second condenser lens 7 and the second collimation lens 6 is 50mm；Terahertz detector and
The spacing of two condenser lenses 7 is 50mm；
In the imaging system that embodiment provides, institute lensed center, emission source center and detector center are same
On straight line.Wherein, the focal plane of the first condenser lens 4 and the second collimation lens 6 at grade, and focus weight
Close；Sample stage 5 is located at the underface of the focus；Sample stage 5, the first stepper motor 9 and the second stepper motor 10 are electric with stepping
Machine controller 11 is connected.
Based on above-mentioned three-dimensional terahertz tomographic imaging system, embodiment additionally provides a kind of scan method, its flow such as Fig. 2
It is shown, comprise the following steps：
(1) the continuous thz beam for launching terahertz sources source is modulated into time domain rectangle ripple；
(2) processing is focused to time domain rectangle ripple, the first focus on light beam is formed, sample is entered using the first focus on light beam
Row scanning；
(3) processing is focused to the emergent light of sample, forms the second focus on light beam；
(4) light intensity of the second focus on light beam is detected, and light intensity is converted into current signal；
(5) current signal is converted into voltage signal and amplified；
(6) the two-dimensional projection matrix g (θ, nx) of sample is obtained according to the voltage signal of amplification；Wherein, θ refers to rotary sample
Angle；Nx refers to the points that sample translates in the horizontal direction；
(7) control sample is translated and rotated around vertical direction in the horizontal direction, and controls terahertz sources source and Terahertz
Detector in the vertical direction synchronous translational, repeat step (1)~(6), two-dimensional projection matrix of the sample in different height is obtained,
All two-dimensional projection's matrixes are vertically superimposed, obtain the tripleplane matrix g (ny, θ, nx) of sample；Ny refers to sample and existed
The points translated on vertical direction；
In embodiment, the degree interval of rotary sample is adjustable from 1 degree to 45 degree, is rotated by 360 °；Translation scan frequency exists
Continuously adjustabe between 100Hz~8000Hz, frequency is lower, and corresponding translational scan rate is slower, and sampling number is more, and sweep time gets over
It is long.
Based on above-mentioned three-dimensional terahertz tomographic imaging system, the flow of the image rebuilding method of example offer is provided as shown in figure 3,
Specifically include following steps：
(a) according to tripleplane matrix g (ny, θ, nx) first dimension ny and the 3rd dimension nx, initialization is established
Three-dimensional reconstruction image f (x, y, z)；Pixel value f (the x of any point in three-dimensional reconstruction image f (x, y, z)i,yj,zk)=0, its
In, i=1,2,3 ..., nx, j=1,2,3 ..., ny, k=1,2,3 ..., nx；
(b) to the projection matrix p under angle, θθ(x, y) is filtered, and obtains filtered projection matrix p'θ(x, y), its
In, 0 360 ° of ＜ θ ＜, the number of projection matrix is nθ；
(c) extemporaneous reconstitution image f is establishedb(x, y, z), each of which section fb(x,y,zk) with angle, θ under filtering after
Projection matrix p'θ(x, y) is equal；
(d) extemporaneous reconstitution image f will be takenbEach section f of (x, y, z)b(x,y,zk), with corresponding Gaussian beam three
Tie up matrix I (x, y, z) section I (x, y, zk) do two dimension and deconvolute, obtain the interim three-dimensional reconstruction image f of optimizationb'(x,y,
z)；
(e) by the interim three-dimensional reconstruction image f of optimizationb' (x, y, z) anglec of rotation θ, and by pixel value a little reduce
For original 1/nθAfter be added on three-dimensional reconstruction image f (x, y, z)；nθRefer to the quantity of the angle of rotary sample；
(f) projection matrix of next angle is taken, repeat step (b)~(e), angled projection is all added to until institute
On three-dimensional reconstruction image f (x, y, z), the three-dimensional reconstruction image of sample is obtained.
Existing imaging method carries out light approximation to thz beam, does not account for the light distribution pair of thz beam
The influence of reconstruction image, the 3-D view actually rebuild are the convolution of object under test and thz beam light distribution, terahertz
Hereby light beam light intensity skewness can cause reconstruction image to distort；Fig. 4 (a) is the analogous diagram of cylindrical metal pole cross section
Picture, emulate shown in sinogram such as Fig. 4 (b) that the projection process of the figure obtains；The reconstruction obtained using existing filtered back-projection
Shown in image such as Fig. 4 (c), the circular cross-section of metallic struts produces distortion in the figure, turns into fuzzy elliptical shape.Fig. 4 (d) is
Make the reconstruction image being obtained by the present invention, from this figure, it can be seen that the method for reconstructing of the present invention can not only effectively disappear
Except distortion, and the blooming of image border is effectively eliminated, image outline becomes apparent from.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (6)
1. a kind of three-dimensional terahertz tomographic imaging system, it is characterised in that including terahertz sources source, chopper, sample stage, light
Beam transmission unit, terahertz detector and lock-in amplifier；
The terahertz sources source and terahertz detector are individually fixed on two stepper motors, and terahertz sources source and too
Hertz detector is all the time on same straight line；
The terahertz sources source is used to provide continuous thz beam；Chopper is used to enter the continuous thz beam
Row modulation, obtains time domain rectangle ripple signal；The sample stage is used to place sample, and realizes the translation and rotation of sample；It is described
Beam delivery unit is used to collimate time domain rectangle ripple signal and focusing, the light beam of focusing are incident to positioned at sample stage
On sample, from the light that sample transmission comes out by the collimation again of beam delivery unit, focusing, form the transmission of focusing
Light beam；Terahertz detector is used for the light intensity for detecting the transmitted light beam, and light intensity is converted into current signal；Lock-in amplifier
For the current signal to be converted into voltage signal and amplified；Outer computer obtains sample according to the voltage signal of amplification
Projection information.
2. three-dimensional terahertz tomographic imaging system as claimed in claim 1, it is characterised in that the sample stage includes one directly
Line stepper motor and a rotating stepper motor；
The rotating stepper motor is fixed on linear stepping motor, and the linear stepping motor is used to realize rotating stepper motor
With sample synchronous translational, the rotating stepper motor is used for the rotation for realizing sample.
3. three-dimensional terahertz tomographic imaging system as claimed in claim 1 or 2, it is characterised in that the beam delivery unit
Including the first collimation focusing module and the second collimation focusing module；
The central axis of the central shaft of the first collimation focusing module and the second collimation focusing module is on same straight line, and first
The focal plane of collimation focusing module and the focal plane of the second collimation focusing module are in the same plane, and focus overlaps；
The first collimation focusing module is used to converge time domain rectangle ripple signal, reduces beam waist；Described second is accurate
Straight focus module is used to converge the outgoing beam of sample, forms the transmitted light beam of focusing.
4. three-dimensional terahertz tomographic imaging system as claimed in claim 3, it is characterised in that the first collimation focusing module
Including the first collimation lens, and the first condenser lens positioned at the first collimation lens exit direction；Second collimation
Focus module includes the second collimation lens, and the second condenser lens positioned at the second collimation lens exit direction.
5. a kind of scan method of the three-dimensional terahertz tomographic imaging system based on described in any one of Claims 1 to 4, its feature
It is, comprises the following steps：
(1) the continuous thz beam for launching terahertz sources source is modulated into time domain rectangle ripple；
(2) processing is focused to time domain rectangle ripple, the first focus on light beam is formed, sample is swept using the first focus on light beam
Retouch；
(3) processing is focused to the emergent light of sample, forms the second focus on light beam；
(4) light intensity of the second focus on light beam is detected, and light intensity is converted into current signal；
(5) current signal is converted into voltage signal and amplified；
(6) the two-dimensional projection matrix g (θ, nx) of sample is obtained according to the voltage signal of amplification；Wherein, θ refers to the anglec of rotation of sample
Degree；Nx refers to the points that sample translates in the horizontal direction；
(7) control sample is translated and rotated around vertical direction in the horizontal direction, and controls terahertz sources source and terahertz detection
Device in the vertical direction synchronous translational, repeat step (1)~(6), two-dimensional projection matrix of the sample in different height is obtained, by institute
There is two-dimensional projection's matrix to be vertically superimposed, obtain the tripleplane matrix g (ny, θ, nx) of sample；Ny refers to sample vertical
The points just translated up.
6. a kind of image rebuilding method of the three-dimensional terahertz tomographic imaging system based on described in any one of Claims 1 to 4, its
It is characterised by comprising the following steps：
(a) according to tripleplane matrix g (ny, θ, nx) first dimension ny and the 3rd dimension nx, the three of initialization is established
Tie up reconstruction image f (x, y, z)；Pixel value f (the x of any point in three-dimensional reconstruction image f (x, y, z)i,yj,zk)=0, wherein, i=
1,2,3 ..., nx, j=1,2,3 ..., ny, k=1,2,3 ..., nx；
(b) to the projection matrix p under angle, θθ(x, y) is filtered, and obtains filtered projection matrix p'θ(x, y), wherein, 0
360 ° of ＜ θ ＜, the number of projection matrix is nθ；
(c) extemporaneous reconstitution image f is establishedb(x, y, z), each of which section fb(x,y,zk) with angle, θ under filtered throwing
Shadow matrix p'θ(x, y) is equal；
(d) extemporaneous reconstitution image f will be takenbEach section f of (x, y, z)b(x,y,zk), with corresponding Gaussian beam three-dimensional square
Battle array I (x, y, z) section I (x, y, zk) do two dimension and deconvolute, obtain the interim three-dimensional reconstruction image f' of optimizationb(x,y,z)；
(e) by the interim three-dimensional reconstruction image f' of optimizationb(x, y, z) anglec of rotation θ, and by pixel value a little be reduced into original
The 1/n comeθAfter be added on three-dimensional reconstruction image f (x, y, z)；nθRefer to the quantity of the angle of rotary sample；
(f) projection matrix of next angle is taken, repeat step (b)~(e), the three-dimensional that is all added to is projected until institute is angled
On reconstruction image f (x, y, z), the three-dimensional reconstruction image of sample is obtained.
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