CN107520977A - 一种硅棒切割装置 - Google Patents

一种硅棒切割装置 Download PDF

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CN107520977A
CN107520977A CN201710949963.XA CN201710949963A CN107520977A CN 107520977 A CN107520977 A CN 107520977A CN 201710949963 A CN201710949963 A CN 201710949963A CN 107520977 A CN107520977 A CN 107520977A
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support
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CN107520977B (zh
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吕伟南
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Inner Mongolia Heguang New Energy Co ltd
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Jiangsu Master Technology Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Silicon Compounds (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

本发明公开了一种硅棒切割装置,包括底板,所述底板一端安装有挡板,所述挡板一侧安装有支撑板,所述支撑板一侧安装有第一液压伸缩柱,所述底板两侧设有滑动槽,所述滑动槽内安装有滑动块,所述滑动块上安装有切割座,所述切割座一侧安装有支架,所述支架上安装有水管,所述水管上连接有伸缩水管,所述伸缩水管上连接有喷嘴,所述支架一端连接有液压伸缩杆,所述液压伸缩杆底端连接有连接架,所述连接架底端连接有压片,所述切割座另一侧安装有第二液压伸缩柱,所述第二液压伸缩柱上安装有电机,所述底板的表面安装有支撑腿,所述支撑腿上安装有支撑架,所述支撑架上安装有支撑座。本发明,支撑稳定,便于废料回收,使用更加方便。

Description

一种硅棒切割装置
技术领域
本发明涉及单晶硅加工技术领域,具体是一种硅棒切割装置。
背景技术
单晶硅的制法通常是先制得多晶硅或无定形硅,然后用直拉法或悬浮区熔法从熔体中生长出棒状单晶硅,再经过切割装置切割成硅片。
现有的硅棒切割装置,多通过移动硅棒进行调节切割的长度,时常会出现硅棒由于固定不住而产生切割误差,使用水冷却时水中夹带原料残渣直接流走,造成浪费。
发明内容
本发明的目的在于提供一种硅棒切割装置,以解决现有技术中多通过移动硅棒进行调节切割的长度,时常会出现硅棒由于固定不住而产生切割误差,使用水冷却时水中夹带原料残渣直接流走,造成浪费等问题。
为实现上述目的,本发明提供如下技术方案:一种硅棒切割装置,包括底板,所述底板一端安装有挡板,所述挡板一侧安装有支撑板,所述支撑板一侧安装有第一液压伸缩柱,所述底板两侧设有滑动槽,所述底板内设有过滤槽,所述过滤槽位于滑动槽之间,所述过滤槽靠近挡板的一端连接有排水管,所述滑动槽内安装有滑动块,所述滑动块上安装有切割座,所述切割座通过第一液压伸缩柱与支撑板相连,所述切割座内设有导流槽,所述切割座一侧安装有支架,所述支架上安装有水管,所述水管上连接有伸缩水管,所述伸缩水管上连接有喷嘴,所述支架一端连接有液压伸缩杆,所述液压伸缩杆底端连接有连接架,所述连接架底端连接有压片,所述喷嘴延伸至连接架的内部,所述切割座另一侧安装有第二液压伸缩柱,所述第二液压伸缩柱上安装有电机,所述电机的转动主轴上连接有联轴器,所述联轴器上连接有转动轴,所述转动轴上安装有切割片,所述底板的另一端安装有传输箱,所述传输箱上设有传输孔,所述底板的表面安装有支撑腿,所述支撑腿上安装有支撑架,所述支撑架与传输箱相连,所述支撑架上安装有支撑座。
优选的,所述支撑板上设有支撑槽。
优选的,所述排水管连接至过滤槽的一端安装有过滤网。
优选的,所述连接架的形状为U形。
优选的,所述导流槽内安装有导流片。
优选的,所述滑动槽的形状为倒T字形。
与现有技术相比,本发明的有益效果是:本发明底板一端安装有挡板,挡板一侧安装有支撑板,支撑板上设有支撑槽,底板的表面安装有支撑腿,支撑腿上安装有支撑架支撑架上安装有支撑座,支撑座与支撑槽将硅棒托住,切割座一侧安装有支架,支架一端连接有液压伸缩杆,液压伸缩杆底端连接有连接架,连接架底端连接有压片,压片将硅棒向下压,硅棒支撑稳定;切割座另一侧安装有第二液压伸缩柱,第二液压伸缩柱上安装有电机,电机的转动主轴上连接有联轴器,联轴器上连接有转动轴,转动轴上安装有切割片,切割片在两个压片中间将硅棒切割,连接架内的喷嘴正对着切割部位,降温并将切割产生的残渣带到过滤槽中,在流出之前通过过滤网过滤掉水中的原料残渣;切割座通过第一液压伸缩柱与支撑板相连,底板两侧设有滑动槽,切割座底部安装有滑动块,第一液压伸缩柱带动滑动块在滑动槽中滑动,测量切割长度,硅棒固定不运动,结构更加稳定。
附图说明
图1为本发明的结构示意图;
图2为本发明切割座的结构示意图;
图3为本发明A区的放大图;
图4为本发明喷嘴的安装示意图;
图5为本发明切割片的安装示意图;
图6为本发明过滤槽的结构示意图。
图中:1-挡板;2-支撑槽;3-支撑板;4-支撑座;5-传输箱;6-传输孔;7-滑动槽;8-底板;9-支撑架;10-支撑腿;11-滑动块;12-第一液压伸缩柱;13-切割座;14-支架;15-切割片;16-电机;17-第二液压伸缩柱;18-导流槽;19-导流片;20-水管;21-伸缩水管;22-喷嘴;23-液压伸缩杆;24-连接架;25-压片;26-联轴器;27-转动轴;28-排水管;29-过滤网;30-过滤槽。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
请参阅图1-6,本发明实施例中,一种硅棒切割装置,包括底板8,底板8一端安装有挡板1,挡板1一侧安装有支撑板3,支撑板3一侧安装有第一液压伸缩柱12,底板8两侧设有滑动槽7,底板8内设有过滤槽30,过滤槽30位于滑动槽7之间,过滤槽30靠近挡板1的一端连接有排水管28,滑动槽7内安装有滑动块11,滑动块11上安装有切割座13,切割座13通过第一液压伸缩柱12与支撑板3相连,切割座13内设有导流槽18,切割座13一侧安装有支架14,支架14上安装有水管20,水管20上连接有伸缩水管21,伸缩水管21可以随着液压伸缩杆23的伸缩而伸缩,伸缩水管21上连接有喷嘴22,喷嘴22对着切割处进行喷水冷却,支架14一端连接有液压伸缩杆23,液压伸缩杆23底端连接有连接架24,连接架24底端连接有压片25,喷嘴22延伸至连接架24的内部,切割座13另一侧安装有第二液压伸缩柱17,第二液压伸缩柱17上安装有电机16,电机16的转动主轴上连接有联轴器26,联轴器26上连接有转动轴27,转动轴27上安装有切割片15,切割片15用于切割硅棒,底板8的另一端安装有传输箱5,传输箱5上设有传输孔6,底板8的表面安装有支撑腿10,支撑腿10上安装有支撑架9,支撑架9与传输箱5相连,支撑架9上安装有支撑座4,支撑板3上设有支撑槽2,排水管28连接至过滤槽30的一端安装有过滤网29,过滤网29过滤水中的原料残渣,连接架24的形状为U形,导流槽18内安装有导流片19,滑动槽7的形状为倒T字形。
本发明的工作原理是:传输箱5输送硅棒,底板8一端安装有挡板1,挡板1一侧安装有支撑板3,支撑板3上设有支撑槽2,底板8的表面安装有支撑腿10,支撑腿10上安装有支撑架9,支撑架9上安装有支撑座4,硅棒支撑在支撑座4与支撑槽2上,切割座13一侧安装有支架14,支架14一端连接有液压伸缩杆23,液压伸缩杆23底端连接有连接架24,连接架24底端连接有压片25,压片25下压,固定住硅棒,切割座13通过第一液压伸缩柱12与支撑板3相连,第一液压伸缩柱12带动切割座13运动,确定切割长度,切割座13另一侧安装有第二液压伸缩柱17,第二液压伸缩柱17上安装有电机16,电机16的转动主轴上连接有联轴器26,联轴器26上连接有转动轴27,转动轴27上安装有切割片15,切割片15切割硅棒,切割完成的硅棒落到过滤槽30中,支架14上安装有水管20,水管20上连接有伸缩水管21,水管21上连接有喷嘴22,喷嘴22对切割部位喷水冷却,水带着原料残渣落到过滤槽30中,原料残渣被过滤网29拦住,方便回收。

Claims (6)

1.一种硅棒切割装置,包括底板(8),其特征在于:所述底板(8)一端安装有挡板(1),所述挡板(1)一侧安装有支撑板(3),所述支撑板(3)一侧安装有第一液压伸缩柱(12),所述底板(8)两侧设有滑动槽(7),所述底板(8)内设有过滤槽(30),所述过滤槽(30)位于滑动槽(7)之间,所述过滤槽(30)靠近挡板(1)的一端连接有排水管(28),所述滑动槽(7)内安装有滑动块(11),所述滑动块(11)上安装有切割座(13),所述切割座(13)通过第一液压伸缩柱(12)与支撑板(3)相连,所述切割座(13)内设有导流槽(18),所述切割座(13)一侧安装有支架(14),所述支架(14)上安装有水管(20),所述水管(20)上连接有伸缩水管(21),所述伸缩水管(21)上连接有喷嘴(22),所述支架(14)一端连接有液压伸缩杆(23),所述液压伸缩杆(23)底端连接有连接架(24),所述连接架(24)底端连接有压片(25),所述喷嘴(22)延伸至连接架(24)的内部,所述切割座(13)另一侧安装有第二液压伸缩柱(17),所述第二液压伸缩柱(17)上安装有电机(16),所述电机(16)的转动主轴上连接有联轴器(26),所述联轴器(26)上连接有转动轴(27),所述转动轴(27)上安装有切割片(15),所述底板(8)的另一端安装有传输箱(5),所述传输箱(5)上设有传输孔(6),所述底板(8)的表面安装有支撑腿(10),所述支撑腿(10)上安装有支撑架(9),所述支撑架(9)与传输箱(5)相连,所述支撑架(9)上安装有支撑座(4)。
2.根据权利要求1所述的一种硅棒切割装置,其特征在于:所述支撑板(3)上设有支撑槽(2)。
3.根据权利要求1所述的一种硅棒切割装置,其特征在于:所述排水管(28)连接至过滤槽(30)的一端安装有过滤网(29)。
4.根据权利要求1所述的一种硅棒切割装置,其特征在于:所述连接架(24)的形状为U形。
5.根据权利要求1所述的一种硅棒切割装置,其特征在于:所述导流槽(18)内安装有导流片(19)。
6.根据权利要求1所述的一种硅棒切割装置,其特征在于:所述滑动槽(7)的形状为倒T字形。
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112440399A (zh) * 2019-08-29 2021-03-05 环球晶圆股份有限公司 晶棒固定治具
CN113719462A (zh) * 2021-09-13 2021-11-30 珠海格力电器股份有限公司 风扇
CN114105147A (zh) * 2021-12-17 2022-03-01 亚洲硅业(青海)股份有限公司 一种多晶硅还原炉

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Publication number Priority date Publication date Assignee Title
CN206436392U (zh) * 2016-11-28 2017-08-25 扬州金辉光电科技有限公司 一种多晶硅切割装置

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
CN206436392U (zh) * 2016-11-28 2017-08-25 扬州金辉光电科技有限公司 一种多晶硅切割装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112440399A (zh) * 2019-08-29 2021-03-05 环球晶圆股份有限公司 晶棒固定治具
CN112440399B (zh) * 2019-08-29 2023-04-18 环球晶圆股份有限公司 晶棒固定治具
CN113719462A (zh) * 2021-09-13 2021-11-30 珠海格力电器股份有限公司 风扇
CN114105147A (zh) * 2021-12-17 2022-03-01 亚洲硅业(青海)股份有限公司 一种多晶硅还原炉

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