CN107478689A - The manufacture method of biomedical detection device and biomedical detection device - Google Patents
The manufacture method of biomedical detection device and biomedical detection device Download PDFInfo
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- CN107478689A CN107478689A CN201610905613.9A CN201610905613A CN107478689A CN 107478689 A CN107478689 A CN 107478689A CN 201610905613 A CN201610905613 A CN 201610905613A CN 107478689 A CN107478689 A CN 107478689A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/226—Construction of measuring vessels; Electrodes therefor
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Abstract
A kind of biomedical detection device, comprising:One support plate, circuit is transmitted comprising a loading surface and signal, the loading surface is carrying a prepare liquid;Multiple space bars, on the loading surface, and at least two different current potentials are electrically connected to, to form an at least electric capacity, to sense the capacitance of the prepare liquid, the plurality of space bar is respectively coupled to the signal and transmits circuit;One electronic circuit, it is coupled to the signal and transmits circuit, to receive and handle the sensing signal of the electric capacity;One encapsulated layer, coat a part for the support plate but do not coat the loading surface;And an open platform, its bottom section includes the loading surface, defined in the range of the plurality of space bar and the encapsulated layer, in order to which the prepare liquid is placed on the loading surface.In addition, the present invention also proposes a kind of manufacture method of biomedical detection device.
Description
Technical field
The present invention relates to a kind of biomedical detection device, to carry and sensing the electricity of a prepare liquid comprising an open platform
Capacitance and according to capacitance to calculate the biomedical detection device of the constituent concentration of prepare liquid.
Background technology
Existing biomedical detection device, such as the technology of fluid channel, treat fluid measured need to by one closing elongated runner, and
By factors such as control pressure, temperature, surface tension, to control the forward travel state for treating fluid measured.According to different test modes
Demand, fluid channel also need to correspond to each fluid state demand and adjust, so technology, structure, sufficiently complex with manufacturing process.
In addition, fluid channel needs a larger area, in addition to the demand for needing the path of accommodating fluid channel and wherein shunting,
And due to flow of fluid to be measured need to be controlled, therefore no matter the driving member being controlled by modes such as voltage or surface tension is set
Part, these driving elements further increase the required area of fluid channel.
In view of this, the present invention is directed to above-mentioned the deficiencies in the prior art, and a kind of detection control complexity of proposition is low, size
Exquisite, the simple biomedical detection device of technique.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art and defect, proposes a kind of biomedical detection device and raw doctor
The manufacture method of detection means, to reach, detection control complexity is low, size is exquisite, the simple purpose of technique.
For the above-mentioned purpose, one of viewpoint is sayed that the invention provides a kind of biomedical detection device, and it is included:One
Support plate, circuit is transmitted comprising a loading surface and signal, the loading surface is carrying a prepare liquid;Multiple metal space bars, position
In on the loading surface, and at least two different current potentials are electrically connected to, to form an at least electric capacity, to sense the electricity of the prepare liquid
Capacitance, the plurality of metal space bar are respectively coupled to the signal and transmit circuit;One electronic circuit, it is coupled to the signal transfer line
Road, to receive and handle the sensing signal of the electric capacity;One encapsulated layer, coat a part for the support plate but do not coat the loading
Face;And an open platform, its bottom section include the loading surface, in the range of the plurality of metal space bar and the encapsulation
Layer is defined, in order to which the prepare liquid is placed on the loading surface.
In one embodiment, the biomedical detection device also includes a hydrophilic layer, is arranged on the loading surface.
In one embodiment, the biomedical detection device is also located at the part in the open platform in signal transmission circuit
Surface on and on the surface of the plurality of metal space bar, include an antirust coat.
In one embodiment, a part for the antirust coat is located at the open platform side and top surface, and raw doctor's detection
Device also includes a hydrophilic layer, the hydrophilic layer be arranged on antirust coat and in the open platform the uncoated antirust coat should
On loading surface or the hydrophilic layer is arranged in the open platform on the loading surface of the uncoated antirust coat.
In one embodiment, the material of the plurality of metal space bar includes copper, nickel, gold, palladium, copper-bearing alloy, nickel-containing alloys, contained
Billon, containing palldium alloy, or more combination, and/or the signal transmit circuit material include copper, nickel, gold, copper-bearing alloy,
Nickel-containing alloys, gold alloy, or more combination.In one embodiment, the material of antirust coat includes organic guarantor and welds film (ORGANIC
SOLDERABILITY PRESERVATIVES, OSP), with coating metal space bar.
In one embodiment, the electronic circuit is located on the support plate, and the encapsulated layer coats the electronic circuit.
In one embodiment, production method that the encapsulated layer passes through open cavity forming (Open Cavity Molding)
Formed, coat support plate beyond outermost metal space bar on the loading surface.
In an embodiment described in claim, the support plate is by mold interconnecting element (Molded Interconnect
System production method) is formed.
For the above-mentioned purpose, another viewpoint is sayed, the invention provides a kind of manufacture method of biomedical detection device, bag
Contain:A support plate is provided, the support plate includes a loading surface and a signal transmits circuit;Multiple metal space bars are set in the support plate
Go up and be coupled to the signal and transmit circuit, the plurality of metal space bar is sensing the capacitance of a prepare liquid;And by opening
The mode for putting formula cavity forming forms an encapsulated layer, to coat a part for the support plate but not coat the loading surface, is consequently formed
One open platform, in order to which the prepare liquid is placed on the loading surface.
In one embodiment, the manufacture method of the biomedical detection device also includes:One electronic circuit is set on support plate and coupling
It is connected to signal and transmits circuit, electronic circuit senses sensing news caused by the capacitance to receive and handle the plurality of space bar
Number.
In one embodiment, the production method of the support plate includes:One substrate is provided;In forming the signal transfer line on the substrate
Road;By a packed layer, coat the substrate and the signal thereon transmits circuit;And the substrate is removed, so that the signal
Transmit the first surface that circuit is exposed to the packed layer.
In one embodiment, the manufacture method of the biomedical detection device also includes:The packed layer is ground, so that the signal transmission
A part for circuit is exposed to the second surface of the packed layer, and this second surface is relative to said first surface.
In one embodiment, the production method of the encapsulated layer includes:A template is set to be connected on the support plate;One is inserted to fill
Melt flow is filled out, the configuration of the wherein template stops that the filling melt flow does not flow into the loading surface;Solidify the filling melt flow and form the envelope
Fill layer;And remove the template.
In one embodiment, the template includes a protuberance, and when setting the template to be connected on the support plate, the protrusion
Portion is connected to outermost metal space bar in the plurality of metal space bar, to isolate the filling melt flow, the filling melt flow is not flowed
Enter the loading surface.
Below by way of specific embodiment elaborate, when be easier to understand the purpose of the present invention, technology contents, feature and its
The effect of reached.
Brief description of the drawings
Figure 1A, 1B, 1C show the schematic diagram of biomedical detection device according to an embodiment of the invention;
Fig. 2 to 4 shows the schematic diagram of the biomedical detection device according to three embodiments of the invention;
Fig. 5 A to 5D show the schematic diagram of the manufacturing process of encapsulated layer cladding support plate according to an embodiment of the invention;
Fig. 6 A to 6H show the schematic diagram of the manufacturing process of support plate according to an embodiment of the invention;
Fig. 7 A show the Making programme figure of biomedical detection device according to an embodiment of the invention;
Fig. 7 B show the Making programme figure of biomedical detection device according to another embodiment of the present invention.
Symbol description in figure
10、20、30、40:Biomedical detection device
11:Support plate
111:Loading surface
112:Signal transmits circuit
114:Antirust coat
115:Hydrophilic layer
12A、12B:Metal space bar
12A1、12B1:Side
12A2、12B2:Top surface
13:Electronic circuit
14:Encapsulated layer
15:Open platform
200:Template
201:Protuberance
300:Substrate
310:Packed layer
S1、S2、S3、S4、S5:Step
Ss:Sense signal
Embodiment
For the present invention foregoing and other technology contents, feature and effect, coordinate following with reference to the one preferable of schema
In the detailed description of embodiment, can clearly it present.The direction term being previously mentioned in following examples, such as:Upper and lower, left,
It is right, front or rear etc., only it is the direction with reference to annexed drawings.Schema in the present invention belongs to signal, is mostly intended to represent each device
And the function relation between each element, as shape, thickness and width then and not according to ratio drafting.
One of viewpoint is sayed, reference picture 1A profile, the invention provides a kind of biomedical detection device 10, and it is wrapped
Containing a support plate 11, multiple metal space bar 12A and 12B, an electronic circuit 13 and an encapsulated layer 14.Wherein, metal space bar
12A is connected to different current potentials from 12B, to form electric capacity.Metal space bar 12A and 12B vertical view layout can be regarded and needed
To design, the invention is not limited in any topological shape, Fig. 1 C citings show a kind of possible layout type (Figure 1A
Profile be section along Fig. 1 C obtained by line A-A).Depend on the needs, biomedical detection device 10 can also include more gold
Category space bar, it is connected to and metal space bar 12A and current potential identical or different 12B.Support plate 11 include a loading surface 111, with
And signal transmits circuit 112 (to simplify drawing, it is connected to metal space bar 12A part and is not shown).Metal space bar 12A
It is located at 12B on loading surface 111;Loading surface 111 to carry a prepare liquid (Figure 1B), and metal space bar 12A and 12B according to
Prepare liquid and produce corresponding capacitance.It can be biological fluid that prepare liquid, which is such as, but not limited to, or other are to be detected
Biological tissue's liquid or the aqueous solution, wherein, depend on the needs, these biological fluids or biological tissue can use mixed with assisting to detect
Additive.Signal transmits circuit 112 will sense signal Ss according to caused by capacitance, pass to electronic circuit 13.Electronics
Circuit 13 is coupled to signal and transmits circuit 112, and is corresponding processing to receive to sense signal Ss, for example, can be with
According to sensing signal Ss to calculate the concentration of some compositions of prepare liquid or produce other readings.Encapsulated layer 14 is coating
Electronic circuit 13, but loading surface 111 is not coated, the area that encapsulated layer 14 is coated beyond loading surface 111 can be determined according to need
Domain scope.Reference picture 1B, it is open that the scope that loading surface 111, metal space bar 12B and encapsulated layer 14 are surrounded defines one
Platform 15, in order to which prepare liquid is placed on loading surface 111, without through fluid channel.
The biomedical detection device 10 of this case provides a detection platform, and this detection platform is an open platform 15, is had
The effect of the fluid channel institute nothing of prior art.For example, open platform 15 need not need large-scale area such as fluid channel,
With the setting demand for housing the path of fluid channel and wherein shunting, it is not required that control the drive of flow of fluid to be measured in fluid channel
Dynamic element.To be compared with prior art, open platform 15 either detects control, related manufacturing process and quality control,
All easily in the design of fluid channel, and manufacturing cost is relatively low.
Reference picture 2,3, user can adjust the element in biomedical detection device according to need.For example, Fig. 2 raw doctor's detection
Device 20, an antirust coat 114 can be also included, on the metal space bar 12A in open platform 15 and 12B, to increase gold
Belong to antirust and other effects, it can be Gold plated Layer that antirust coat 114, which is such as, but not limited to,.In another example Fig. 3 biomedical detection device 30, wherein
A hydrophilic layer 115 is coated on loading surface 111, i.e., has coated hydrophilic layer 115 on the part that loading surface 111 is intended to contact with prepare liquid,
Wherein hydrophilic layer 115 is arranged on the loading surface 111 of uncoated antirust coat 114 in open platform 15.Carried when on loading surface 111
The drop of prepare liquid, the drop of prepare liquid is influenceed by the surface tension of hydrophilic layer 115, is covered on hydrophilic layer 115, so as to treat
Surveying liquid can fully be distributed in the vertical view region of loading surface 111.Antirust coat 114 and hydrophilic layer 115 in two foregoing embodiments
Also can set simultaneously, such as Fig. 4 embodiment, wherein hydrophilic layer 115 be arranged on the antirust coat 114 in open platform 15, with
And it is arranged in open platform 15 on the loading surface 111 of uncoated antirust coat 114.
Reference picture 2, antirust coat 114 of the invention, it can be by way of electroless-plating (Electroless Plating)
It is plated on metal space bar 12A and 12B side 12A1,12B1 and top surface 12A2,12B2.Because electroless-plating is an existing skill
Art, its process are not specified in this.
Signals of the metal space bar 12A with 12B and in support plate 11 transmits circuit 112 and conductive material can be used to make
Make, such as metal;In one embodiment, metal space bar 12A and 12B be such as, but not limited to copper, nickel, gold, palladium, copper-bearing alloy,
Nickel-containing alloys, gold alloy, containing palldium alloy, or more combination, and to transmit circuit 112 as the same for the signal in the support plate 11.
Though Figure 1A electronic circuit 13 is located in support plate 11, so as needed, electronic circuit 13 can be located at outside support plate 11,
And by All other routes (not shown) to be connected to support plate 11.For example, to save the cost of electronic circuit 13, single electricity can be used
Sub-circuit 13 receives the sensing signal from multiple support plates 11.
In one embodiment, electronic circuit 13 can include control IC, ASIC (ASIC:Application-
Specific Integrated Circuit) or other kinds of electronic circuit.It selects end to depend on the needs.
Except the signal in support plate 11 transmits circuit 112, for the electricity formed in metal space bar 12A and 12B
Hold and transmitted between electronic circuit 13 outside sensing signal Ss, itself or itself and other electrical components of electronic circuit 13 it
Between, other signals can also be set to transmit circuit, this part does not show that.Further, since metal space bar 12A and 12B points
Different potentials are not electrically connected to, therefore signal transmission circuit should include multiple cablings, to distinguish with metal space bar 12A and 12B
Electrical connection;That is, " signal transmission circuit " described in this specification, it is a collective noun, represents the set of multiple cablings.
Fig. 5 A to 5D show the manufacturing process that encapsulated layer coats in support plate according to an embodiment of the invention, wherein by opening
Put formula cavity forming (Open Cavity Molding) mode, coat beyond electronic circuit, and cladding loading surface and metal
Support plate beyond space bar 12B.Fig. 5 A show the state of the uncoated encapsulated layer of support plate, and completed electronic circuit 13 on support plate
And metal space bar 12A and 12B.Fig. 5 B show the support plate of uncoated encapsulated layer, can preferably (but not necessarily) it is clear by plasma-based
The step of clean and infiltration (Wetting), with the then effect strengthened surface cleaning and encapsulate layer material and metal.Fig. 5 C show
Between the support plate for showing a template 200 and uncoated encapsulated layer, a gap is formed.The protuberance 201 of template 200 is connected to outermost
Metal space bar 12B (also can but nonessential be connected to metal space bar 12A), with the filling melt flow of insulation package layer 14, makes to fill
The flow range for filling out melt flow is blocked, will not be by between protuberance 201 and loading surface;Therefore, filling melt flow is only filled
Part below template, beyond protuberance and outermost metal space bar 12B.Fig. 5 D are shown when filling melt flow is cured as sealing
After filling layer, template 200 is removed.The present embodiment is to be connected to outermost metal space bar 12B using protuberance 201 to define envelope
The scope of layer is filled, it will be clear that also changing the configuration of template 200, barrier wall is set, can equally define the scope of encapsulated layer,
Without defining the scope of encapsulated layer with outermost metal space bar 12B.In addition, the support plate of the present embodiment with not comprising
Exemplified by antirust coat and hydrophilic layer, the support plate comprising antirust coat or hydrophilic layer can carry out other processing steps again after Fig. 5 D, such as
Electroless-plating or cladding (coating) technique, to form desired structure.
As it was previously stated, electronic circuit 13 can decide whether on support plate 11 according to need.It is to work as shown by Fig. 5 A to 5D
Electronic circuit 13 is located at encapsulated layer stowing operation when on support plate 11.Not on support plate 11, if its encapsulated layer fills electronic circuit 13
Filling out process can still be analogized by Fig. 5 A to 5D and its related description, pass through open cavity forming (Open Cavity
Molding mode), encapsulated layer 14 coat a part of support plate beyond outermost metal space bar on loading surface.So according to
According to the present invention, encapsulated layer 14 can coat electronic circuit 13, can not also coat electronic circuit 13.
Fig. 6 A to 6H show the manufacturing process of support plate according to an embodiment of the invention, and wherein support plate passes through mold interconnecting member
The mode of part (Molded Interconnect System) makes.Reference picture 6A, 6B, 6C, wherein providing a substrate 300, lead to
Plating mode is crossed, signal is formed on the substrate 300 and transmits circuit 112.Fig. 6 A are shown by plating, and signal biography is formed on substrate
The first Rotating fields of circuit 112 are passed, Fig. 6 B are shown by plating, and the second layer knot that signal transmits circuit 112 is formed on substrate
Structure.If it is necessary, more Rotating fields can be re-formed, such as Fig. 6 C.Fig. 6 A, 6B, 6C are only that signal transmits the manufacturing process of circuit 112
Citing, user can change design and relative production process that wherein signal transmits circuit 112 according to need.Fig. 6 D displays move
Except the part (Fig. 6 C) of electroless coating on substrate.Fig. 6 E, which are shown, passes through a packed layer 310, to coat substrate 300 and news thereon
Number transmit circuit 112.Fig. 6 F display reduce packed layer 310 height so that signal transmit circuit 112 it is exposed, this be in order to from
The back side transmitting signals (refering to Figure 1A, 1B, 2 to 4) of support plate 11, as that need not can be saved if the back side transmitting signals of support plate 11
Slightly this step.The height of packed layer 310 is reduced, by grinding packed layer or packed layer can such as, but not limited to be lost comprehensively
Carve to reach.Fig. 6 G displays remove substrate 300, so that signal transmits circuit 112 and exposes to another surface, this is Figure 1A, 1B, 2
To the upper surface of support plate 11 shown in 4.Fig. 6 H, which are shown, overturns Fig. 6 G, and is transmitted in signal and metal space bar is made on circuit 112
12A transmits circuit 112 with signal with 12B and setting electronic circuit 13 and electrically connected.If as it was previously stated, need not be by electronics electricity
Road 13 is arranged on support plate 11, then can omit and set electronic circuit 13.
The material of foregoing packed layer, it can decide whether identical with the material of encapsulated layer according to need.A for example, embodiment
In, the then effect of packed layer and encapsulation interlayer is Consideration, then the material of packed layer and the material of encapsulated layer are identical.Example again
Such as, in another embodiment, the filling melt flow of encapsulated layer can not influence the size and structure of packed layer, then the material of packed layer is molten
Point need to be higher than the material of encapsulated layer, in case the filling melt flow of encapsulated layer causes the local thermal deformation of packed layer.Therefore, packed layer
Material selects to select with the material of encapsulated layer, determines according to need.
Reference picture 7A, another viewpoint is sayed, it is therein the invention provides a kind of manufacture method of biomedical detection device
Step includes:A support plate is provided, the support plate is such as, but not limited to the mold interconnecting element (Molded as shown in Fig. 6 A to 6G
Interconnect System) mode makes, and support plate includes a loading surface and signal transmits circuit (S1);Multiple gold are set
Category space bar is on support plate and being coupled to signal and transmitting circuit, and multiple metal space bars are sensing the capacitance of a prepare liquid
(S2);Setting an electronic circuit, electronic circuit is the plurality of to receive and handle on support plate and being coupled to signal and transmitting circuit
Space bar senses sensing signal caused by the capacitance, such as, but not limited to be measured to calculate according to the sensing signal of capacitance
The constituent concentration (S3) of liquid;And form an encapsulation by way of open cavity forming (Open Cavity Molding)
Layer, to coat electronic circuit, but does not coat loading surface, is consequently formed an open platform, in order to which prepare liquid is placed in into loading
On face (S4).
Reference picture 7B, if electronic circuit need not be arranged on support plate, step S5 can be carried out after step S2:
An encapsulated layer is formed by way of open cavity forming, to coat a part for support plate but not coat loading surface, thus shape
Into an open platform, in order to which prepare liquid is placed on loading surface.
Illustrate the present invention for preferred embodiment above, it is described above, only it is easy to those skilled in the art
Present disclosure is solved, is not used for limiting the interest field of the present invention.Under the same spirit of the present invention, people in the art
Member can think and various equivalence changes.For example, foregoing metal space bar, or nonmetallic but tool electric conductivity material are made
Make, and antirust coat can be not provided with this nonmetallic materials.Two circuits or interelement that icon is directly connected in each embodiment, can be inserted
Putting does not influence other circuits or element of major function, it is only necessary to the meaning of corresponding modification interlock circuit or signal.It is all this
It is a variety of, it can all be analogized according to teachings of the present invention and obtained, therefore, the scope of the present invention should cover above-mentioned and other all equivalent changes
Change.Foregoing each embodiment, however it is not limited to be used alone, can also combination application, such as, but not limited to by two embodiments simultaneously
With, or the corresponding circuits with another embodiment of local circuit replacement of one of embodiment.
Claims (17)
1. a kind of biomedical detection device, it is characterised in that include:
One support plate, circuit is transmitted comprising a loading surface and signal, the loading surface is carrying a prepare liquid;
Multiple space bars, on the loading surface, and at least two different current potentials are electrically connected to, to form an at least electric capacity, used
To sense the capacitance of the prepare liquid, the plurality of space bar is respectively coupled to the signal and transmits circuit;
One electronic circuit, it is coupled to the signal and transmits circuit, to receive and handle the sensing signal of the electric capacity;
One encapsulated layer, coat a part for the support plate but do not coat the loading surface;And
One open platform, its bottom section include the loading surface, determined in the range of the plurality of space bar and the encapsulated layer
Justice, in order to which the prepare liquid is placed on the loading surface.
2. biomedical detection device as claimed in claim 1, wherein, also comprising a hydrophilic layer, it is arranged on the loading surface.
3. biomedical detection device as claimed in claim 1, wherein, transmit circuit in the signal and be located in the open platform
On the surface of a part and on the surface of the plurality of space bar, also comprising an antirust coat.
4. biomedical detection device as claimed in claim 3, wherein, a part for the antirust coat is located at the side of the open platform
Face and top, and the biomedical detection device also includes a hydrophilic layer, the hydrophilic layer be arranged on this be located on antirust layer segment with
And in the open platform on the loading surface of the uncoated antirust coat or the hydrophilic layer is arranged in the open platform and do not wrapped
Cover on the loading surface of the antirust coat.
5. biomedical detection device as claimed in claim 1, wherein, the material of the plurality of space bar includes copper, nickel, gold, palladium, contained
Copper alloy, nickel-containing alloys, gold alloy, containing palldium alloy, or more combination, and/or the signal transmit circuit material include
Copper, nickel, gold, palladium, copper-bearing alloy, nickel-containing alloys, gold alloy, containing palldium alloy, or more combination.
6. biomedical detection device as claimed in claim 1, wherein, the electronic circuit is located on the support plate, encapsulated layer cladding
The electronic circuit.
7. biomedical detection device as claimed in claim 1, wherein, the production method that the encapsulated layer passes through open cavity forming
Formed, coat support plate beyond outermost space bar on the loading surface.
8. biomedical detection device as claimed in claim 1, wherein, the support plate is the production method institute by mold interconnecting element
Formed.
9. biomedical detection device as claimed in claim 8, wherein, the production method of the support plate, comprising:
One substrate is provided;
Circuit is transmitted in forming the signal on the substrate;
By a packed layer, coat the substrate and the signal thereon transmits circuit;And
The substrate is removed, so that the signal transmits the surface that circuit is exposed to the packed layer.
10. biomedical detection device as claimed in claim 1, wherein, the production method of the encapsulated layer, comprising:
A template is set to be connected on the support plate;
A filling melt flow is inserted, the configuration of the wherein template stops that the filling melt flow does not flow into the loading surface;
Solidify the filling melt flow and form the encapsulated layer;And
Remove the template.
11. a kind of manufacture method of biomedical detection device, it is characterised in that include:
A support plate is provided, the support plate includes a loading surface and a signal transmits circuit;
Setting multiple space bars, the plurality of space bar is to be measured to sense one on the support plate and being coupled to the signal and transmitting circuit
The capacitance of liquid;And
An encapsulated layer is formed by way of open cavity forming, to coat a part for the support plate but not coat the loading
Face, an open platform is consequently formed, in order to which the prepare liquid is placed on the loading surface.
12. the manufacture method of biomedical detection device as claimed in claim 11, wherein, also include:Set an electronic circuit in
On support plate and it is coupled to signal and transmits circuit, electronic circuit senses the capacitance receiving and handle the plurality of space bar and produced
Raw sensing signal.
13. the manufacture method of biomedical detection device as claimed in claim 11, wherein, the encapsulated layer coats the electronic circuit.
14. the manufacture method of biomedical detection device as claimed in claim 11, wherein, the production method of the support plate, comprising:
One substrate is provided;
Circuit is transmitted in forming the signal on the substrate;
By a packed layer, coat the substrate and the signal thereon transmits circuit;And
The substrate is removed, so that the signal transmits the first surface that circuit is exposed to the packed layer.
15. the manufacture method of biomedical detection device as claimed in claim 14, wherein, also include:The packed layer is ground, so that
A part for signal transmission circuit is exposed to the second surface of the packed layer, and this second surface is relative to said first surface.
16. the manufacture method of biomedical detection device as claimed in claim 11, wherein, the side of open cavity forming should be passed through
The step of formula formation encapsulated layer, includes:
A template is set to be connected on the support plate;
A filling melt flow is inserted, the configuration of the wherein template stops that the filling melt flow does not flow into the loading surface;
Solidify the filling melt flow and form the encapsulated layer;And
Remove the template.
17. the manufacture method of biomedical detection device as claimed in claim 16, wherein, the template includes a protuberance, and works as
When setting the template to be connected on the support plate, the protuberance is connected to outermost space bar in the plurality of space bar, with isolation
The filling melt flow, the filling melt flow is set not flow into the loading surface.
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Cited By (1)
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US20230095185A1 (en) * | 2021-09-30 | 2023-03-30 | Texas Instruments Incorporated | Plated walls defining mold compound cavities |
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CN107478689B (en) | 2020-05-01 |
TWI620932B (en) | 2018-04-11 |
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