TW201743054A - Bio-detection device and manufacturing method thereof - Google Patents

Bio-detection device and manufacturing method thereof Download PDF

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TW201743054A
TW201743054A TW105132499A TW105132499A TW201743054A TW 201743054 A TW201743054 A TW 201743054A TW 105132499 A TW105132499 A TW 105132499A TW 105132499 A TW105132499 A TW 105132499A TW 201743054 A TW201743054 A TW 201743054A
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carrier
layer
signal transmission
transmission line
testing device
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TW105132499A
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Chinese (zh)
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TWI620932B (en
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楊玉林
張峻豪
吳旼達
蘇宏德
大宏 錢
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立錡科技股份有限公司
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Priority to US15/495,136 priority Critical patent/US10591434B2/en
Publication of TW201743054A publication Critical patent/TW201743054A/en
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Priority to US16/781,988 priority patent/US11243181B2/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226Construction of measuring vessels; Electrodes therefor

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  • Health & Medical Sciences (AREA)
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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)

Abstract

A bio-detection device, including a carrier, a plurality of spacers, an electronic circuit, and a package layer. The carrier includes a test region and signal transmission wirings, wherein the test region is for locating an object under test in liquid or aqueous state. The spacers are located on the test region and electrically connected to two different voltage levels to form a capacitor for sensing a capacitance of the object. The spacers are connected to the signal transmission wirings. The electronic circuit receives and processes the capacitance sensing signal. The package layer covers a part of the carrier but does not cover the test region. Thus, an open platform is formed whereby a user can easily put in the object; the open platform has a bottom which includes the test region, and an area of the open platform is defined by the spacers and the package layer.

Description

生醫檢測裝置以及生醫檢測裝置之製造方法Biomedical testing device and method for manufacturing biomedical testing device

本發明係有關一種生醫檢測裝置,為包含一開放式平台以承載並感測一待測液之電容值、並根據電容值以計算待測液之成分濃度之生醫檢測裝置。The invention relates to a biomedical testing device, which is a biomedical detecting device comprising an open platform for carrying and sensing a capacitance value of a liquid to be tested, and calculating a component concentration of the liquid to be tested according to the capacitance value.

習知之生醫檢測裝置,例如微流道之技術,待測流體需通過一封閉之細長流道,並藉由控制壓力、溫度、表面張力等因素,以控制待測流體之前進狀態。根據不同測試方式之需求,微流道更需對應於各流體狀態需求而調整,故此技術、結構、與製造過程十分複雜。Conventional biomedical detection devices, such as microchannel technology, require a fluid to pass through a closed elongated flow path and control the forward state of the fluid to be tested by controlling pressure, temperature, surface tension and the like. According to the requirements of different test methods, the micro flow channel needs to be adjusted corresponding to each fluid state requirement, so the technology, structure, and manufacturing process are very complicated.

此外,微流道需一較大面積,除了需要容置微流道之路徑以及其中分流之需求外,而由於需控制待測流體流動,故無論設置藉由電壓或表面張力等方式進行控制之驅動元件,這些驅動元件更增加了微流道之所需面積。In addition, the microchannel requires a large area, in addition to the need to accommodate the path of the microchannel and the need for shunting therein, and because the flow of the fluid to be tested needs to be controlled, it is controlled by means of voltage or surface tension. Drive components, which add to the required area of the microchannel.

有鑑於此,本發明即針對上述先前技術之不足,提出一種檢測控制複雜度低、尺寸精巧、製程簡單之生醫檢測裝置。In view of this, the present invention is directed to the above-mentioned deficiencies of the prior art, and proposes a biomedical detection device with low detection control complexity, compact size, and simple process.

就其中一個觀點言,本發明提供了一種生醫檢測裝置,其包含:一載板,包含一載物面、以及訊號傳遞線路,該載物面用以承載一待測液;複數個金屬間隔板,位於該載物面上,且電連接於至少兩不同的電位,以構成至少一電容,用以感測該待測液之電容值,該複數個金屬間隔板分別耦接於該訊號傳遞線路; 一電子電路,耦接於該訊號傳遞線路,用以接受並處理該電容之感測訊號; 一封裝層,包覆該載板的一部份、但不包覆該載物面;以及一開放式平台,其底部區域包含該載物面、其範圍為該複數金屬間隔板以及該封裝層所定義,以便於將該待測液置於該載物面上。In one aspect, the present invention provides a biomedical testing device comprising: a carrier plate comprising a carrier surface and a signal transmission line for carrying a liquid to be tested; a plurality of metal spaces a board, located on the surface of the carrier, and electrically connected to at least two different potentials to form at least one capacitor for sensing a capacitance value of the liquid to be tested, wherein the plurality of metal spacers are respectively coupled to the signal transmission An electronic circuit coupled to the signal transmission line for receiving and processing the sensing signal of the capacitor; an encapsulation layer covering a portion of the carrier but not covering the carrier surface; An open platform having a bottom region including the carrier surface, the range being defined by the plurality of metal spacers and the encapsulation layer to facilitate placement of the test solution on the carrier surface.

一實施例中,該生醫檢測裝置更包含一親水層,設置於該載物面上。In one embodiment, the biomedical detection device further comprises a hydrophilic layer disposed on the surface of the carrier.

一實施例中,該生醫檢測裝置更於該訊號傳遞線路位於該開放式平台中的一部份之表面上、及於該複數金屬間隔板之表面上,包含一防銹層。In one embodiment, the biomedical detection device further includes a rustproof layer on a surface of the signal transmission line on a portion of the open platform and on a surface of the plurality of metal spacers.

一實施例中,該防銹層的一部份位於該開放式平台側面與頂面,且所述生醫檢測裝置更包含一親水層,該親水層設置於防銹層上以及該開放式平台中未包覆該防銹層的該載物面上、或該親水層設置在該開放式平台中未包覆該防銹層的該載物面上。In one embodiment, a portion of the rustproof layer is located on a side surface and a top surface of the open platform, and the biomedical detection device further includes a hydrophilic layer disposed on the rustproof layer and the open platform The surface of the substrate on which the rustproof layer is not coated or the hydrophilic layer is disposed on the surface of the open platform where the rustproof layer is not coated.

一實施例中,該複數金屬間隔板之材料包含銅、鎳、金、鈀、含銅合金、含鎳合金、含金合金、含鈀合金、或以上之組合,及/或該訊號傳遞線路之材料包含銅、鎳、金、含銅合金、含鎳合金、含金合金、或以上之組合。一實施例中,防鏽層之材料包含有機保焊膜(ORGANIC SOLDERABILITY PRESERVATIVES, OSP),以披覆金屬間隔板。In one embodiment, the material of the plurality of metal spacers comprises copper, nickel, gold, palladium, a copper-containing alloy, a nickel-containing alloy, a gold-containing alloy, a palladium-containing alloy, or a combination thereof, and/or the signal transmission line. The material comprises copper, nickel, gold, a copper-containing alloy, a nickel-containing alloy, a gold-containing alloy, or a combination thereof. In one embodiment, the material of the rustproof layer comprises an ORGANIC SOLDERABILITY PRESERVATIVES (OSP) to coat the metal spacer.

一實施例中,該電子電路位於該載板上,該封裝層包覆該電子電路。In one embodiment, the electronic circuit is located on the carrier, and the encapsulation layer encapsulates the electronic circuit.

一實施例中,該封裝層係藉由開放式模腔成型(Open Cavity Molding)之製作方式所形成,包覆該載物面上最外側的金屬間隔板以外之該載板。In one embodiment, the encapsulation layer is formed by an Open Cavity Molding method to cover the carrier other than the outermost metal spacer on the carrier surface.

如申請專利範圍第1項所述之生醫檢測裝置,其中該載板是藉由模塑互連元件(Molded Interconnect System)之製作方式所形成。The biomedical testing device according to claim 1, wherein the carrier is formed by a molded interconnecting device.

就又一個觀點言,本發明提供了一種生醫檢測裝置之製造方法,包含:提供一載板,該載板包含一載物面以及一訊號傳遞線路;設置複數個金屬間隔板於該載板上並耦接於該訊號傳遞線路,該複數個金屬間隔板用以感測一待測液之電容值;以及藉由開放式模腔成型之方式形成一封裝層,以包覆該載板的一部份、但不包覆該載物面,藉此形成一開放式平台,以便於將該待測液置於該載物面上。In another aspect, the present invention provides a method for manufacturing a biomedical testing device, comprising: providing a carrier plate comprising a carrier surface and a signal transmission line; and providing a plurality of metal spacers on the carrier The plurality of metal spacers are coupled to the signal transmission line, and the plurality of metal spacers are used to sense a capacitance value of the liquid to be tested; and an encapsulation layer is formed by an open cavity molding to cover the carrier layer. A portion, but not covering the surface, thereby forming an open platform to facilitate placement of the test solution on the surface.

一實施例中,該生醫檢測裝置之製造方法更包含:設置一電子電路於載板上並耦接於訊號傳遞線路,電子電路用以接受及處理該複數間隔柱感測該電容值所產生之感測訊號。In one embodiment, the method for manufacturing the biomedical detection device further includes: disposing an electronic circuit on the carrier board and coupling the signal transmission line, wherein the electronic circuit is configured to receive and process the plurality of spacers to sense the capacitance value. Sensing signal.

一實施例中,該載板之製作方式包含:提供一基板;於該基板上形成該訊號傳遞線路;藉由一填充層,包覆該基板以及其上之該訊號傳遞線路;以及移除該基板,以使該訊號傳遞線路露出於該填充層之第一表面。In one embodiment, the carrier is formed by: providing a substrate; forming the signal transmission line on the substrate; wrapping the substrate and the signal transmission line thereon by a filling layer; and removing the substrate The substrate is such that the signal transmission line is exposed on the first surface of the filling layer.

一實施例中,該生醫檢測裝置之製造方法更包含:研磨該填充層,以使該訊號傳遞線路之一部份露出於該填充層之第二表面,此第二表面相對於前述第一表面。In an embodiment, the method for manufacturing the biomedical detection device further comprises: grinding the filling layer to expose a portion of the signal transmission line to the second surface of the filling layer, the second surface being opposite to the first surface surface.

一實施例中,該封裝層之製作方式包含:設置一模板抵接於該載板之上;填入一充填熔流,其中該模板之構形阻擋該充填熔流不流入該載物面;固化該充填熔流而形成該封裝層;以及移除該模板。In one embodiment, the encapsulation layer is formed by: providing a template to abut the carrier; filling a filling melt stream, wherein the template is configured to block the filling melt from flowing into the loading surface; Curing the fill stream to form the encapsulation layer; and removing the template.

一實施例中,該模板包含一突出部,而當設置該模板抵接於該載板之上時,該突出部抵接於該複數金屬間隔板中最外側金屬間隔板,以隔離該充填熔流,使該充填熔流不流入該載物面。In one embodiment, the template includes a protrusion, and when the template is placed on the carrier, the protrusion abuts the outermost metal spacer in the plurality of metal spacers to isolate the filling and melting The flow is such that the filling melt does not flow into the carrier surface.

底下藉由具體實施例詳加說明,當更容易瞭解本發明之目的、技術內容、特點及其所達成之功效。The purpose, technical content, features and effects achieved by the present invention will be more readily understood by the detailed description of the embodiments.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一較佳實施例的詳細說明中,將可清楚的呈現。以下實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。本發明中的圖式均屬示意,主要意在表示各裝置以及各元件之間之功能作用關係,至於形狀、厚度與寬度則並未依照比例繪製。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. The drawings in the present invention are intended to be illustrative, and are intended to represent the functional relationship between the various components and the components. The shapes, thicknesses, and widths are not drawn to scale.

就其中一個觀點言,參照第1A圖之剖面圖,本發明提供了一種生醫檢測裝置10,其包含一載板11、複數個金屬間隔板12A與12B、一電子電路13、以及一封裝層14。其中,金屬間隔板12A與12B分別連接於不同的電位,以構成電容。金屬間隔板12A與12B的頂視佈局可以視需要來設計,本發明並不侷限於任何一種佈局形狀,第1C圖舉例顯示一種可能的佈局方式(第1A圖之剖面圖為沿第1C圖中A-A線所得的剖面)。視需要而定,生醫檢測裝置10也可以包含更多金屬間隔板、連接於與金屬間隔板12A與12B相同或不同的電位。載板11包含一載物面111、以及訊號傳遞線路112(為簡化圖面,其連接於金屬間隔板12A的部分未示出)。金屬間隔板12A與12B位於載物面111上;載物面111用以承載一待測液(第1B圖),而金屬間隔板12A與12B根據待測液而產生相對應之電容值。待測液例如但不限於可以為生物體液、或是其他待檢測的生物組織液體或水溶液,其中,視需要而定,這些生物體液或生物組織可以摻有協助檢測用的添加劑。訊號傳遞線路112將根據電容值所產生之感測訊號Ss,傳遞給電子電路13。電子電路13耦接於訊號傳遞線路112,用以接受感測訊號Ss,並為相對應之處理,舉例而言,可以根據感測訊號Ss以計算待測液之某些成分的濃度、或是產生其他讀值。封裝層14用以包覆電子電路13,但不包覆載物面111,可依需要而決定封裝層14在載物面111以外所包覆之區域範圍。參照第1B圖,載物面111、金屬間隔板12B以及封裝層14所圍繞之範圍定義出一開放式平台15,以便於將待測液置於載物面111上,而不需要透過微流道。In one aspect, referring to the cross-sectional view of FIG. 1A, the present invention provides a biomedical testing device 10 comprising a carrier 11, a plurality of metal spacers 12A and 12B, an electronic circuit 13, and an encapsulation layer. 14. The metal spacers 12A and 12B are respectively connected to different potentials to constitute a capacitor. The top view layout of the metal spacers 12A and 12B can be designed as needed, and the present invention is not limited to any one of the layout shapes, and FIG. 1C shows an example of a possible layout (the cross-sectional view of FIG. 1A is along the 1C chart). The profile obtained from the AA line). The biomedical detection device 10 may also include more metal spacers, connected to the same or different potentials as the metal spacers 12A and 12B, as needed. The carrier 11 includes a carrier surface 111 and a signal transmission line 112 (not shown for the simplified drawing, which is connected to the metal spacer 12A). The metal spacers 12A and 12B are located on the carrier surface 111; the carrier surface 111 is used to carry a liquid to be tested (Fig. 1B), and the metal spacers 12A and 12B generate corresponding capacitance values according to the liquid to be tested. The liquid to be tested is, for example but not limited to, a biological fluid, or other biological tissue liquid or aqueous solution to be detected, wherein the biological fluid or biological tissue may be doped with an additive for assisting detection, as needed. The signal transmission line 112 transmits the sensing signal Ss generated according to the capacitance value to the electronic circuit 13. The electronic circuit 13 is coupled to the signal transmission line 112 for receiving the sensing signal Ss and corresponding processing. For example, the sensing signal Ss can be used to calculate the concentration of certain components of the liquid to be tested, or Generate other readings. The encapsulation layer 14 is used to cover the electronic circuit 13, but does not cover the carrier surface 111, and the area of the encapsulation layer 14 covered by the carrier surface 111 can be determined as needed. Referring to FIG. 1B, an open platform 15 is defined by the range surrounded by the object surface 111, the metal spacer 12B, and the encapsulation layer 14 so as to place the liquid to be tested on the carrier surface 111 without passing through the microfluid. Road.

本案之生醫檢測裝置10提供一檢測平台,且此檢測平台為一開放式平台15,具有習知技術之微流道所無之效果。例如,開放式平台15不需要如微流道般需要大範圍之面積,以容置微流道之路徑以及其中分流之設置需求,也不需要微流道中控制待測流體流動之驅動元件。與習知技術相較,開放式平台15無論是檢測控制、相關之製作過程、以及品質控制,都容易於微流道之設計,且製造成本也較低。The biomedical testing device 10 of the present invention provides a detecting platform, and the detecting platform is an open platform 15 having the effect of the microfluidic channel of the prior art. For example, the open platform 15 does not require a large area like a microfluidic channel to accommodate the path of the microchannel and the need for shunting therein, nor the drive elements in the microchannel that control the flow of the fluid to be tested. Compared with the prior art, the open platform 15 is easy to design the micro flow channel regardless of the detection control, the related manufacturing process, and the quality control, and the manufacturing cost is also low.

參照第2、3圖,使用者可依需要而調整生醫檢測裝置中之元件。例如,第2圖之生醫檢測裝置20,可更包含一防銹層114,位於開放式平台15中的金屬間隔板12A與12B上,以增加金屬防銹等效果,防銹層114例如但不限於可為鍍金層。又例如,第3圖之生醫檢測裝置30,其中載物面111上包覆一親水層115,即載物面111欲與待測液接觸的部分上包覆了親水層115,其中親水層115設置在開放式平台15中未包覆防銹層114的載物面111。當載物面111上承載待測液之液滴,待測液之液滴受親水層115之表面張力之影響,覆蓋於親水層115上,以使待測液可以充分分佈於載物面111之頂視區域內。前述之兩實施例中防銹層114與親水層115亦可同時設置,如第4圖之實施例,其中親水層115設置在開放式平台15中的防銹層114上、以及設置在開放式平台15中未包覆防銹層114的載物面111上。Referring to Figures 2 and 3, the user can adjust the components in the biomedical detection device as needed. For example, the biomedical testing device 20 of FIG. 2 may further include a rustproof layer 114 on the metal spacers 12A and 12B in the open platform 15 to increase the effect of metal rust prevention, such as the rustproof layer 114. It is not limited to being a gold plating layer. For example, in the biomedical detection device 30 of FIG. 3, the carrier surface 111 is coated with a hydrophilic layer 115, that is, a portion of the substrate surface 111 to be in contact with the liquid to be tested is coated with a hydrophilic layer 115, wherein the hydrophilic layer The loading surface 111 of the rustproof layer 114 is not covered in the open platform 15 . When the liquid droplets of the liquid to be tested are carried on the loading surface 111, the liquid droplets of the liquid to be tested are affected by the surface tension of the hydrophilic layer 115, and are covered on the hydrophilic layer 115, so that the liquid to be tested can be sufficiently distributed on the loading surface 111. Within the top view area. In the foregoing two embodiments, the anti-rust layer 114 and the hydrophilic layer 115 may also be disposed at the same time, as in the embodiment of FIG. 4, wherein the hydrophilic layer 115 is disposed on the anti-rust layer 114 in the open platform 15 and is disposed in the open type. The platform 15 is not covered with the loading surface 111 of the rustproof layer 114.

參照第2圖,本發明之防銹層114,其可藉由無電電鍍(Electroless Plating)之方式鍍於電極112與金屬間隔板12A與12B之側面12A1、12B1與頂面12A2、12B2上。因無電電鍍為一習知技術,其過程不詳述於此。Referring to Fig. 2, the rustproof layer 114 of the present invention can be plated on the side faces 12A1, 12B1 and the top faces 12A2, 12B2 of the electrode 112 and the metal spacers 12A and 12B by electroless plating. Since electroless plating is a conventional technique, the process is not detailed here.

金屬間隔板12A與12B和位於載板11中的訊號傳遞線路112可使用導電材料來製作,例如金屬;一實施例中, 金屬間隔板12A與12B例如但不限於為銅、鎳、金、鈀、含銅合金、含鎳合金、含金合金、含鈀合金、或以上之組合,而位於載板11中的訊號傳遞線路112亦然。The metal spacers 12A and 12B and the signal transmission line 112 in the carrier 11 can be fabricated using a conductive material, such as a metal; in one embodiment, the metal spacers 12A and 12B are, for example but not limited to, copper, nickel, gold, palladium. A copper-containing alloy, a nickel-containing alloy, a gold-containing alloy, a palladium-containing alloy, or a combination thereof, and the signal transmission line 112 located in the carrier 11 is also the same.

雖第1A圖之電子電路13位於載板11內,然根據需要,電子電路13可位於載板11之外,並藉由其他線路(未顯示)以連接於載板11。例如,為節省電子電路13之成本,可使用單一電子電路13接收來自複數載板11的感測訊號。Although the electronic circuit 13 of FIG. 1A is located in the carrier board 11, the electronic circuit 13 may be located outside the carrier board 11 as needed, and connected to the carrier board 11 by other lines (not shown). For example, to save the cost of the electronic circuit 13, a single electronic circuit 13 can be used to receive the sensed signals from the plurality of carriers 11.

一實施例中,電子電路13可包含控制IC、特殊應用積體電路(ASIC:Application-Specific Integrated Circuit)、 或其他種類之電子電路。其選擇端視需要而定。In one embodiment, the electronic circuit 13 may include a control IC, an Application-Specific Integrated Circuit (ASIC), or other types of electronic circuits. Its choice depends on the needs.

除了位於載板11中的訊號傳遞線路112,以供在金屬間隔板12A與12B所構成的電容和電子電路13之間傳遞感測訊號Ss之外,電子電路13的本身、或是其與其他電性元件之間,還可以設置其他的訊號傳遞線路,此部分並未示出。此外,由於金屬間隔板12A與12B分別電連接於不同電位,因此訊號傳遞線路應包含複數走線,以與金屬間隔板12A與12B分別電連接;亦即,本說明書中所述之「訊號傳遞線路」,是一個集合名詞,表示複數走線之集合。In addition to the signal transmission line 112 in the carrier 11 for transmitting the sensing signal Ss between the capacitors and the electronic circuit 13 formed by the metal spacers 12A and 12B, the electronic circuit 13 itself or the other Other signal transmission lines can also be provided between the electrical components, which are not shown. In addition, since the metal spacers 12A and 12B are electrically connected to different potentials, respectively, the signal transmission line should include a plurality of wires to be electrically connected to the metal spacers 12A and 12B, respectively; that is, the signal transmission described in this specification. A line is a collection of nouns that represent a collection of complex lines.

第5A至5D圖顯示根據本發明一實施例之載板內封裝層包覆之製作過程,其中藉由開放式模腔成型(Open Cavity Molding)之方式,包覆電子電路,以及包覆載物面以外與金屬間隔板12B以外之載板。第5A圖顯示載板未包覆封裝層之狀態,載板上已製作完成電子電路13及金屬間隔板12A與12B。第5B圖顯示未包覆封裝層之載板,可較佳(但非必須地)經過電漿清潔與浸潤(Wetting)之步驟,以加強表面清潔、以及封裝層材料與金屬之接著效果。第5C圖顯示一模板200與未包覆封裝層之載板間,形成一間隙。模板200之突出部201抵接於最外側的金屬間隔板12B(亦可但非必須抵接於金屬間隔板12A),以隔離封裝層14之充填熔流,使充填熔流的流動範圍被阻擋,不致通過突出部201與載物面之間;因此,充填熔流僅得以充填於模板下方、突出部與最外側的金屬間隔板12B以外的部分。第5D圖顯示當充填熔流固化為封裝層後,移除模板200。本實施例是利用突出部201抵接於最外側的金屬間隔板12B來定義封裝層的範圍,但顯然,亦可變更模板200的構形,設置阻隔牆,同樣可以定義封裝層的範圍,而不必須以最外側的金屬間隔板12B來定義封裝層的範圍。此外,本實施例之載板以不包含防銹層與親水層為例,包含防銹層或親水層之載板可在第5D圖後再進行其他製程步驟,例如無電電鍍或包覆(coating)製程,以形成所欲的結構。5A to 5D are views showing a process of fabricating an encapsulation layer in a carrier according to an embodiment of the present invention, in which an electronic circuit is coated and coated by means of Open Cavity Molding. A carrier other than the surface and the metal spacer 12B. Fig. 5A shows a state in which the carrier board is not covered with the encapsulation layer, and the electronic circuit 13 and the metal spacers 12A and 12B have been fabricated on the carrier. Figure 5B shows the carrier plate without the encapsulation layer, preferably, but not necessarily, subjected to a plasma cleaning and wetting step to enhance surface cleaning and the encapsulation effect of the encapsulating layer material and the metal. Figure 5C shows a gap between a template 200 and a carrier plate that is not coated with an encapsulation layer. The protruding portion 201 of the template 200 abuts on the outermost metal spacer 12B (may not but need to abut against the metal spacer 12A) to isolate the filling flow of the encapsulation layer 14 so that the flow range of the filling melt is blocked. Therefore, it does not pass between the protruding portion 201 and the carrying surface; therefore, the filling melt flow can only be filled under the template, the portion of the protruding portion and the outermost metal spacer 12B. Figure 5D shows the removal of the template 200 after the filling melt is cured into an encapsulation layer. In this embodiment, the extent of the encapsulation layer is defined by the protrusion 201 contacting the outermost metal spacer 12B. However, it is obvious that the configuration of the template 200 can be changed, and the barrier wall can be provided, and the range of the encapsulation layer can also be defined. It is not necessary to define the range of the encapsulation layer with the outermost metal spacer 12B. In addition, the carrier plate of the embodiment is exemplified by the fact that the rust-preventing layer and the hydrophilic layer are not included, and the carrier plate containing the rust-proof layer or the hydrophilic layer can be subjected to other process steps after the 5D drawing, such as electroless plating or coating. Process to form the desired structure.

如前所述,電子電路13可依需要而決定是否位於載板11上。第5A至5D圖所顯示為當電子電路13位於載板11上時之封裝層充填過程。若電子電路13不在載板11上,其封裝層充填過程仍可由第5A至5D圖以及其相關說明類推,藉由開放式模腔成型(Open Cavity Molding)之方式,封裝層14包覆載物面上最外側的金屬間隔板以外之一部分載板。所以,依據本發明,封裝層14可包覆電子電路13,也可不包覆電子電路13。As previously mentioned, the electronic circuit 13 can determine whether it is located on the carrier board 11 as needed. The 5A to 5D drawings show the encapsulation layer filling process when the electronic circuit 13 is placed on the carrier board 11. If the electronic circuit 13 is not on the carrier board 11, the encapsulation layer filling process can still be analogized by the 5A to 5D drawings and the related description, and the encapsulation layer 14 is coated with the package by means of Open Cavity Molding. One of the outermost metal spacers on the face of the carrier. Therefore, according to the present invention, the encapsulation layer 14 may or may not cover the electronic circuit 13.

第6A至6H圖顯示根據本發明一實施例之載板之製作過程,其中載板係藉由模塑互連元件(Molded Interconnect System)之方式製作。參照第6A、6B、6C圖,其中提供一基板300,藉由電鍍方式,在基板300上形成訊號傳遞線路112。第6A圖顯示藉由電鍍,在基板上形成訊號傳遞線路112之第一層結構,第6B圖顯示藉由電鍍,在基板上形成訊號傳遞線路112之第二層結構。如有必要,可再形成更多層結構,例如第6C圖。第6A、6B、6C圖僅為訊號傳遞線路112製作過程之舉例,使用者可依需要而改變其中訊號傳遞線路112之設計與相關製作過程。第6D圖顯示移除基板上非電鍍之部份(第6C圖)。第6E圖顯示藉由一填充層310,以包覆基板300以及其上之訊號傳遞線路112。第6F圖顯示降低填充層310的高度,以使訊號傳遞線路112外露,這是為了從載板11的背面傳遞訊號(參閱第1A、1B、2至4圖),如不需要從載板11的背面傳遞訊號則可以省略此步驟。降低填充層310的高度,例如但不限於可藉由研磨填充層或對填充層進行全面蝕刻來達成。第6G圖顯示移除基板300,以使訊號傳遞線路112外露於另一表面,這是第1A、1B、2至4圖所示載板11的上表面。第6H圖顯示將第6G圖翻轉,並於訊號傳遞線路112上製作金屬間隔板12A與12B 以及設置電子電路13與訊號傳遞線路112電連接。如前所述,如果不需要將電子電路13設置在載板11上,則可省略設置電子電路13。6A to 6H are views showing a process of fabricating a carrier according to an embodiment of the present invention, wherein the carrier is fabricated by molding a interconnected component. Referring to FIGS. 6A, 6B, and 6C, a substrate 300 is provided, and a signal transmission line 112 is formed on the substrate 300 by electroplating. Fig. 6A shows the first layer structure of the signal transmission line 112 formed on the substrate by electroplating, and Fig. 6B shows the second layer structure of the signal transmission line 112 formed on the substrate by electroplating. If necessary, more layer structures can be formed, such as Figure 6C. The 6A, 6B, and 6C diagrams are only examples of the process of the signal transmission line 112. The user can change the design of the signal transmission line 112 and the related manufacturing process as needed. Figure 6D shows the removal of the non-electroplated portion of the substrate (Fig. 6C). FIG. 6E shows a substrate layer 300 and a signal transmission line 112 thereon by a filling layer 310. FIG. 6F shows the height of the filling layer 310 being lowered to expose the signal transmission line 112 for transmitting signals from the back side of the carrier board 11 (see FIGS. 1A, 1B, 2 to 4), such as without the carrier board 11 being required. You can omit this step by passing the signal on the back. Reducing the height of the fill layer 310 can be achieved, for example, but not limited to, by grinding the fill layer or by etching the fill layer. Fig. 6G shows the removal of the substrate 300 to expose the signal transmission line 112 to the other surface, which is the upper surface of the carrier 11 shown in Figs. 1A, 1B, 2 to 4. Fig. 6H shows that the 6G image is inverted, and the metal spacers 12A and 12B are formed on the signal transmission line 112, and the electronic circuit 13 is electrically connected to the signal transmission line 112. As described above, if it is not necessary to dispose the electronic circuit 13 on the carrier 11, the electronic circuit 13 can be omitted.

前述之填充層之材料,可依需要而決定是否與封裝層之材料相同。例如,一實施例中,填充層與封裝層間之接著效果為考量因素,則填充層之材料與封裝層之材料相同。又例如,另一實施例中,封裝層之充填熔流不可影響填充層之尺寸與結構,則填充層之材料之熔點需高於封裝層之材料,以免封裝層之充填熔流造成填充層之局部熱變形。因此,填充層之材料選擇與封裝層之材料選擇,依需要而決定。The material of the above-mentioned filling layer can be determined whether it is the same as the material of the encapsulating layer as needed. For example, in an embodiment, the adhesion between the filling layer and the encapsulation layer is a factor, and the material of the filling layer is the same as the material of the encapsulation layer. For another example, in another embodiment, the filling flow of the encapsulating layer does not affect the size and structure of the filling layer, and the melting point of the material of the filling layer is higher than the material of the encapsulating layer, so as to prevent the filling layer of the encapsulating layer from forming a filling layer. Local thermal deformation. Therefore, the material selection of the filling layer and the material selection of the encapsulation layer are determined as needed.

參照第7A圖,就又一個觀點言,本發明提供了一種生醫檢測裝置之製造方法,其中之步驟包含:提供一載板,該載板例如但不限於以如第6A至6G圖所示的模塑互連元件(Molded Interconnect System)方式製作,載板包含一載物面以及訊號傳遞線路(S1);設置複數個金屬間隔板於載板上並耦接於訊號傳遞線路,複數個金屬間隔板用以感測一待測液之電容值(S2);設置一電子電路於載板上並耦接於訊號傳遞線路,電子電路用以接受及處理該複數間隔柱感測該電容值所產生之感測訊號,例如但不限於根據電容值之感測訊號以計算待測液之成分濃度(S3);以及藉由開放式模腔成型(Open Cavity Molding)之方式形成一封裝層,以包覆電子電路,但不包覆載物面,藉此形成一開放式平台,以便於將待測液置於載物面上(S4)。Referring to FIG. 7A, in another aspect, the present invention provides a method of manufacturing a biomedical testing device, the method comprising: providing a carrier plate, such as but not limited to, as shown in FIGS. 6A-6G Molded Interconnect System (Molded Interconnect System), the carrier board includes a carrier surface and a signal transmission line (S1); a plurality of metal spacers are disposed on the carrier board and coupled to the signal transmission line, and the plurality of metals The spacer board is configured to sense a capacitance value of the liquid to be tested (S2); an electronic circuit is disposed on the carrier board and coupled to the signal transmission line, and the electronic circuit is configured to receive and process the plurality of spacers to sense the capacitance value. Generating a sensing signal, such as but not limited to a sensing signal based on the capacitance value to calculate a component concentration of the liquid to be tested (S3); and forming an encapsulation layer by means of Open Cavity Molding to The electronic circuit is covered, but the carrier surface is not coated, thereby forming an open platform for placing the liquid to be tested on the load surface (S4).

參照第7B圖,如果不需要將電子電路設置於載板上,則在步驟 S2之後可進行步驟S5:藉由開放式模腔成型之方式形成一封裝層,以包覆載板的一部份、但不包覆載物面,藉此形成一開放式平台,以便於將待測液置於載物面上。Referring to FIG. 7B, if it is not necessary to dispose the electronic circuit on the carrier, step S5 may be performed after step S2: forming an encapsulation layer by means of open cavity molding to cover a part of the carrier. However, the coating surface is not coated, thereby forming an open platform for placing the liquid to be tested on the loading surface.

以上已針對較佳實施例來說明本發明,唯以上所述者,僅係為使熟悉本技術者易於了解本發明的內容而已,並非用來限定本發明之權利範圍。在本發明之相同精神下,熟悉本技術者可以思及各種等效變化。例如,前述之金屬間隔板,也可為非金屬但具導電性之材料所製作,而此非金屬材料上可不設置防銹層。各實施例中圖示直接連接的兩電路或元件間,可插置不影響主要功能的其他電路或元件,僅需對應修改相關電路或是訊號的意義即可。凡此種種,皆可根據本發明的教示類推而得,因此,本發明的範圍應涵蓋上述及其他所有等效變化。前述之各個實施例,並不限於單獨應用,亦可以組合應用,例如但不限於將兩實施例併用,或是以其中一個實施例的局部電路代換另一實施例的對應電路。The present invention has been described with reference to the preferred embodiments thereof, and the present invention is not intended to limit the scope of the present invention. In the same spirit of the invention, various equivalent changes can be conceived by those skilled in the art. For example, the aforementioned metal spacer may be made of a non-metallic material having conductivity, and the non-metal material may not be provided with a rustproof layer. In the embodiments, the two circuits or components directly connected may be inserted into other circuits or components that do not affect the main functions, and only need to modify the meaning of the related circuits or signals. All such modifications may be made in accordance with the teachings of the present invention, and the scope of the present invention should be construed to cover the above and other equivalents. The foregoing various embodiments are not limited to the single application, and may be combined applications, such as but not limited to, the two embodiments are used in combination, or the partial circuit of one embodiment is substituted for the corresponding circuit of another embodiment.

10、20、30、40‧‧‧生醫檢測裝置
11‧‧‧載板
111‧‧‧載物面
112‧‧‧電極
112‧‧‧訊號傳遞線路
114‧‧‧防銹層
115‧‧‧親水層
12A、12B‧‧‧金屬間隔板
12A1、12B1‧‧‧側面
12A2、12B2‧‧‧頂面
13‧‧‧電子電路
14‧‧‧封裝層
15‧‧‧開放式平台
200‧‧‧模板
201‧‧‧突出部
300‧‧‧基板
310‧‧‧填充層
S1、S2、S3、S4、S5‧‧‧步驟
Ss‧‧‧感測訊號
10, 20, 30, 40‧‧‧ biomedical testing devices
11‧‧‧ Carrier Board
111‧‧‧Loading surface
112‧‧‧ electrodes
112‧‧‧Signal transmission line
114‧‧‧Anti-rust layer
115‧‧‧Hydrophilic layer
12A, 12B‧‧‧Metal spacer
12A1, 12B1‧‧‧ side
12A2, 12B2‧‧‧ top surface
13‧‧‧Electronic circuits
14‧‧‧Encapsulation layer
15‧‧‧Open platform
200‧‧‧ template
201‧‧‧Protruding
300‧‧‧Substrate
310‧‧‧ fill layer
S1, S2, S3, S4, S5‧‧ steps
Ss‧‧ Sensing signal

[第1A、1B、1C圖]顯示根據本發明一實施例之生醫檢測裝置之示意圖; [第2至4圖]顯示根據本發明三實施例之生醫檢測裝置之示意圖; [第5A至5D圖]顯示根據本發明一實施例之封裝層包覆載板之製作過程之示意圖; [第6A至6H圖]顯示根據本發明一實施例之載板之製作過程之示意圖; [第7A圖]顯示根據本發明一實施例之生醫檢測裝置之製作流程圖; [第7B圖]顯示根據本發明另一實施例之生醫檢測裝置之製作流程圖。[Fig. 1A, 1B, 1C] showing a schematic diagram of a biomedical detection device according to an embodiment of the present invention; [Figs. 2 to 4] showing a schematic diagram of a biomedical detection device according to a third embodiment of the present invention; [5A to 5D] FIG. 6 is a schematic view showing a process of fabricating a package-coated carrier according to an embodiment of the present invention; [FIG. 6A to 6H] is a schematic view showing a process of fabricating a carrier according to an embodiment of the present invention; [FIG. 7A] A flowchart showing the manufacture of the biomedical detection device according to an embodiment of the present invention; [Fig. 7B] is a flow chart showing the manufacture of the biomedical detection device according to another embodiment of the present invention.

10‧‧‧生醫檢測裝置 10‧‧‧Biomedical testing device

11‧‧‧載板 11‧‧‧ Carrier Board

111‧‧‧載物面 111‧‧‧Loading surface

112‧‧‧訊號傳遞線路 112‧‧‧Signal transmission line

12A、12B‧‧‧金屬間隔板 12A, 12B‧‧‧Metal spacer

13‧‧‧電子電路 13‧‧‧Electronic circuits

14‧‧‧封裝層 14‧‧‧Encapsulation layer

Claims (17)

一種生醫檢測裝置,包含: 一載板,包含一載物面、以及訊號傳遞線路,該載物面用以承載一待測液; 複數個間隔板,位於該載物面上,且電連接於至少兩不同的電位,以構成至少一電容,用以感測該待測液之電容值,該複數個間隔板分別耦接於該訊號傳遞線路; 一電子電路,耦接於該訊號傳遞線路,用以接受並處理該電容之感測訊號; 一封裝層,包覆該載板的一部份、但不包覆該載物面;以及 一開放式平台,其底部區域包含該載物面、其範圍為該複數間隔板以及該封裝層所定義,以便於將該待測液置於該載物面上。A biomedical testing device comprises: a carrier plate comprising a loading surface and a signal transmission line for carrying a liquid to be tested; a plurality of spacer plates on the loading surface and electrically connected And at least two different potentials to form at least one capacitor for sensing a capacitance value of the liquid to be tested, wherein the plurality of spacers are respectively coupled to the signal transmission line; and an electronic circuit coupled to the signal transmission line a sensing signal for receiving and processing the capacitor; an encapsulation layer covering a portion of the carrier board but not covering the carrier surface; and an open platform having a bottom surface region including the carrier surface The range is defined by the plurality of spacers and the encapsulation layer, so as to place the liquid to be tested on the carrier surface. 如申請專利範圍第1項所述之生醫檢測裝置,更包含一親水層,設置於該載物面上。The biomedical testing device according to claim 1, further comprising a hydrophilic layer disposed on the loading surface. 如申請專利範圍第1項所述之生醫檢測裝置,其中於該訊號傳遞線路位於該開放式平台中的一部份之表面上、及於該複數間隔板之表面上,更包含一防銹層。The biomedical testing device of claim 1, wherein the signal transmission line is located on a surface of a portion of the open platform and on a surface of the plurality of spacers, further comprising a rust preventive Floor. 如申請專利範圍第3項所述之生醫檢測裝置,其中該防銹層的一部份位於該開放式平台之側面與頂部,且所述生醫檢測裝置更包含一親水層,該親水層設置在該位於防銹層部份上以及該開放式平台中未包覆該防銹層的該載物面上、或該親水層設置在該開放式平台中未包覆該防銹層的該載物面上。The biomedical testing device of claim 3, wherein a part of the anti-rust layer is located at a side and a top of the open platform, and the biomedical detecting device further comprises a hydrophilic layer, the hydrophilic layer Provided on the surface of the rustproof layer and the surface of the open platform that is not covered with the rustproof layer, or the hydrophilic layer is disposed in the open platform without covering the rustproof layer On the carrying surface. 如申請專利範圍第1項所述之生醫檢測裝置,其中該複數間隔板之材料包含銅、鎳、金、鈀、含銅合金、含鎳合金、含金合金、含鈀合金、或以上之組合,及/或該訊號傳遞線路之材料包含銅、鎳、金、鈀、含銅合金、含鎳合金、含金合金、含鈀合金、或以上之組合。The biomedical testing device according to claim 1, wherein the material of the plurality of spacers comprises copper, nickel, gold, palladium, a copper-containing alloy, a nickel-containing alloy, a gold-containing alloy, a palladium-containing alloy, or the like. The material of the combination, and/or the signal transmission line, comprises copper, nickel, gold, palladium, a copper-containing alloy, a nickel-containing alloy, a gold-containing alloy, a palladium-containing alloy, or a combination thereof. 如申請專利範圍第1項所述之生醫檢測裝置,其中該電子電路位於該載板上,該封裝層包覆該電子電路。The biomedical testing device of claim 1, wherein the electronic circuit is located on the carrier, and the encapsulating layer covers the electronic circuit. 如申請專利範圍第1項所述之生醫檢測裝置,其中該封裝層係藉由開放式模腔成型(Open Cavity Molding)之製作方式所形成,包覆該載物面上最外側的間隔板以外之該載板。The biomedical testing device according to claim 1, wherein the encapsulating layer is formed by an Open Cavity Molding method, and covers an outermost partitioning plate on the loading surface. The carrier board is not included. 如申請專利範圍第1項所述之生醫檢測裝置,其中該載板是藉由模塑互連元件(Molded Interconnect System)之製作方式所形成。The biomedical testing device according to claim 1, wherein the carrier is formed by a molded interconnecting device. 如申請專利範圍第8項所述之生醫檢測裝置,其中該載板之製作方式,包含: 提供一基板; 於該基板上形成該訊號傳遞線路; 藉由一填充層,包覆該基板以及其上之該訊號傳遞線路;以及 移除該基板,以使該訊號傳遞線路露出於該填充層之一表面。The biomedical testing device of claim 8, wherein the carrier is formed by: providing a substrate; forming the signal transmission line on the substrate; coating the substrate by a filling layer; The signal transmission line is disposed thereon; and the substrate is removed to expose the signal transmission line to a surface of the filling layer. 如申請專利範圍第1項所述之生醫檢測裝置,其中該封裝層之製作方式,包含: 設置一模板抵接於該載板之上; 填入一充填熔流,其中該模板之構形阻擋該充填熔流不流入該載物面; 固化該充填熔流而形成該封裝層;以及 移除該模板。The biomedical testing device of claim 1, wherein the encapsulating layer is formed by: providing a template to abut the carrier; filling a filling melt, wherein the template is configured Blocking the filling melt from flowing into the carrier surface; curing the filling melt to form the encapsulation layer; and removing the template. 一種生醫檢測裝置之製造方法,包含: 提供一載板,該載板包含一載物面以及一訊號傳遞線路; 設置複數個間隔板於該載板上並耦接於該訊號傳遞線路,該複數個間隔板用以感測一待測液之電容值;以及 藉由開放式模腔成型之方式形成一封裝層,以包覆該載板的一部份、但不包覆該載物面,藉此形成一開放式平台,以便於將該待測液置於該載物面上。A method for manufacturing a biomedical testing device, comprising: providing a carrier board, wherein the carrier board comprises a carrier surface and a signal transmission line; and a plurality of spacer boards are disposed on the carrier board and coupled to the signal transmission line, a plurality of spacers for sensing a capacitance value of a liquid to be tested; and forming an encapsulation layer by an open cavity molding to cover a part of the carrier but not covering the carrier surface Thereby, an open platform is formed to facilitate placing the test solution on the load surface. 如申請專利範圍第11項所述之生醫檢測裝置之製造方法,更包含:設置一電子電路於載板上並耦接於訊號傳遞線路,電子電路用以接受及處理該複數間隔柱感測該電容值所產生之感測訊號。The manufacturing method of the biomedical testing device of claim 11, further comprising: disposing an electronic circuit on the carrier board and coupling the signal transmission line, the electronic circuit receiving and processing the plurality of spacer column sensing The sensing signal generated by the capacitance value. 如申請專利範圍第11項所述之生醫檢測裝置之製造方法,其中該封裝層包覆該電子電路。The method of manufacturing a biomedical testing device according to claim 11, wherein the encapsulating layer covers the electronic circuit. 如申請專利範圍第11項所述之生醫檢測裝置之製造方法,其中該載板之製作方式,包含: 提供一基板; 於該基板上形成該訊號傳遞線路; 藉由一填充層,包覆該基板以及其上之該訊號傳遞線路;以及 移除該基板,以使該訊號傳遞線路露出於該填充層之第一表面。The manufacturing method of the biomedical testing device according to claim 11, wherein the carrier is manufactured by: providing a substrate; forming the signal transmission line on the substrate; coating by a filling layer The substrate and the signal transmission line thereon; and removing the substrate to expose the signal transmission line to the first surface of the filling layer. 如申請專利範圍第14項所述之生醫檢測裝置之製造方法,更包含:研磨該填充層,以使該訊號傳遞線路之一部份露出於該填充層之第二表面,此第二表面相對於前述第一表面。The manufacturing method of the biomedical testing device of claim 14, further comprising: grinding the filling layer to expose a portion of the signal transmission line to the second surface of the filling layer, the second surface Relative to the aforementioned first surface. 如申請專利範圍第11項所述之生醫檢測裝置之製造方法,其中該藉由開放式模腔成型之方式形成封裝層的步驟包含: 設置一模板抵接於該載板之上; 填入一充填熔流,其中該模板之構形阻擋該充填熔流不流入該載物面; 固化該充填熔流而形成該封裝層;以及 移除該模板。The method for manufacturing a biomedical testing device according to claim 11, wherein the step of forming an encapsulating layer by means of open cavity molding comprises: providing a template to abut on the carrier; filling in a filling melt flow, wherein the template is configured to block the filling melt from flowing into the carrier surface; curing the filling melt to form the encapsulation layer; and removing the template. 如申請專利範圍第16項所述之生醫檢測裝置之製造方法,其中該模板包含一突出部,而當設置該模板抵接於該載板之上時,該突出部抵接於該複數間隔板中最外側間隔板,以隔離該充填熔流,使該充填熔流不流入該載物面。The method of manufacturing a biomedical testing device according to claim 16, wherein the template comprises a protrusion, and when the template is placed on the carrier, the protrusion abuts the plurality of intervals The outermost partitioning plate of the plate isolates the filling melt flow so that the filling melt flow does not flow into the loading surface.
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