CN107475681B - 用于均匀控制大面积柔性衬底温度的方法 - Google Patents
用于均匀控制大面积柔性衬底温度的方法 Download PDFInfo
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- CN107475681B CN107475681B CN201710676708.2A CN201710676708A CN107475681B CN 107475681 B CN107475681 B CN 107475681B CN 201710676708 A CN201710676708 A CN 201710676708A CN 107475681 B CN107475681 B CN 107475681B
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- flexible substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN201710676708.2A CN107475681B (zh) | 2017-08-09 | 2017-08-09 | 用于均匀控制大面积柔性衬底温度的方法 |
PCT/CN2017/119660 WO2019029112A1 (zh) | 2017-08-09 | 2017-12-29 | 用于均匀控制大面积柔性衬底温度的方法 |
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CN201710676708.2A CN107475681B (zh) | 2017-08-09 | 2017-08-09 | 用于均匀控制大面积柔性衬底温度的方法 |
Publications (2)
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CN107475681A CN107475681A (zh) | 2017-12-15 |
CN107475681B true CN107475681B (zh) | 2020-01-31 |
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CN201710676708.2A Active CN107475681B (zh) | 2017-08-09 | 2017-08-09 | 用于均匀控制大面积柔性衬底温度的方法 |
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CN (1) | CN107475681B (zh) |
WO (1) | WO2019029112A1 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107475681B (zh) * | 2017-08-09 | 2020-01-31 | 领凡新能源科技(北京)有限公司 | 用于均匀控制大面积柔性衬底温度的方法 |
CN110791745B (zh) * | 2019-12-12 | 2024-02-13 | 上海超导科技股份有限公司 | 适用于卷对卷连续化带材的正交式辐射辅助传导加热设备 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7429718B2 (en) * | 2005-08-02 | 2008-09-30 | Applied Materials, Inc. | Heating and cooling of substrate support |
JP5218702B2 (ja) * | 2010-06-17 | 2013-06-26 | 富士電機株式会社 | 光電変換素子の製造装置 |
TWI528003B (zh) * | 2011-12-13 | 2016-04-01 | 昆山巨仲電子有限公司 | 多段式熱管型太陽能集熱器 |
US9750091B2 (en) * | 2012-10-15 | 2017-08-29 | Applied Materials, Inc. | Apparatus and method for heat treatment of coatings on substrates |
CN103014624B (zh) * | 2012-12-18 | 2015-01-07 | 合肥工业大学 | 一种太阳能电池光吸收层薄膜的制备方法 |
CN203007382U (zh) * | 2012-12-27 | 2013-06-19 | 汉能科技有限公司 | 一种铜铟镓硒薄膜电池控制系统 |
CN103911603A (zh) * | 2013-01-05 | 2014-07-09 | 光达光电设备科技(嘉兴)有限公司 | 监控装置、监控方法及气相沉积设备 |
CN104213104B (zh) * | 2013-05-31 | 2016-07-13 | 理想晶延半导体设备(上海)有限公司 | 化学气相沉积中衬底温度的控制方法 |
CN204570026U (zh) * | 2015-04-15 | 2015-08-19 | 赫得纳米科技(昆山)有限公司 | 水平连续式磁控溅射镀膜机在线面板恒温加热装置 |
CN104846346B (zh) * | 2015-05-20 | 2017-11-24 | 中国科学院宁波材料技术与工程研究所 | 衬底温度的控制方法、装置及薄膜沉积设备 |
CN105624636B (zh) * | 2016-03-11 | 2019-07-05 | 京东方科技集团股份有限公司 | 一种溅射成膜的参数调节方法及系统 |
WO2018001523A1 (en) * | 2016-07-01 | 2018-01-04 | Applied Materials, Inc. | Deposition apparatus for coating a flexible substrate and method of coating a flexible substrate |
CN107475681B (zh) * | 2017-08-09 | 2020-01-31 | 领凡新能源科技(北京)有限公司 | 用于均匀控制大面积柔性衬底温度的方法 |
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2017
- 2017-08-09 CN CN201710676708.2A patent/CN107475681B/zh active Active
- 2017-12-29 WO PCT/CN2017/119660 patent/WO2019029112A1/zh active Application Filing
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CN107475681A (zh) | 2017-12-15 |
WO2019029112A1 (zh) | 2019-02-14 |
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Effective date of registration: 20191204 Address after: 101407 Beijing city Huairou District Yanqi Park Economic Development Zone No. 38 Street Applicant after: Lingfan new energy technology (Beijing) Co., Ltd Address before: 362000 42 Purple Mountain Road, Gaoxin District, Licheng District, Fujian, Quanzhou Applicant before: Mia Alfonso Lo equipment integration (Fujian) Co., Ltd. |
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Effective date of registration: 20211110 Address after: 101499 No. 31, Yanqi street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee after: Dongjun new energy Co., Ltd Address before: 101407 38 Paradise Street, Yanqi Economic Development Zone, Huairou District, Beijing Patentee before: Lingfan new energy technology (Beijing) Co., Ltd |