CN107462585B - Automatic optical inspection machine and method for inspecting defect of glass substrate - Google Patents
Automatic optical inspection machine and method for inspecting defect of glass substrate Download PDFInfo
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- CN107462585B CN107462585B CN201710681449.2A CN201710681449A CN107462585B CN 107462585 B CN107462585 B CN 107462585B CN 201710681449 A CN201710681449 A CN 201710681449A CN 107462585 B CN107462585 B CN 107462585B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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Abstract
The invention discloses an automatic optical inspection machine which comprises a first camera, a second camera and a conveying mechanism, wherein the first camera and the second camera are oppositely arranged, a station to be detected is formed between the first camera and the second camera and used for placing a glass substrate to be detected, the conveying mechanism comprises a conveying wheel, the conveying wheel is positioned between the first camera and the second camera and used for conveying the glass substrate to the station to be detected, and the first camera and the second camera are used for respectively shooting a display area from two opposite sides of the glass substrate. The invention also discloses a defect inspection method of the glass substrate. The first camera and the second camera clearly shoot the defects, accuracy and efficiency of defect judgment are improved, abnormal glass substrates are intercepted in time, product yield is improved, and production cost is reduced.
Description
Technical Field
The invention relates to the technical field of display panel manufacturing, in particular to an automatic optical inspection machine and a defect inspection method of a glass substrate.
Background
In the liquid crystal panel industry, a Color Filter (CF) film mainly comprises the process procedures of coating, exposure, development and the like, different types of defects are generated in the whole process chain, the defects are basically in the micron level, and operators cannot directly perceive the defects through naked eyes. The detection unit of the automatic optical inspection machine can accurately capture the position of the defect, and the inspection unit amplifies the defect and provides a clear picture to the computer display screen for operators to check and confirm.
In the prior art, when the automatic optical inspection machine detects defects such as black and short transmitted light, due to the fact that the defects may be back dirt, wheel marks, back scratches, abnormal incoming materials and the like, a defect picture cannot be shot from one side of a glass substrate through an inspection unit, the glass substrate needs to be turned over and observed by an operator through naked eyes, accuracy of the naked eye observation is low, probability of erroneous judgment and missing judgment is high, time and labor are wasted in the process of turning over the glass substrate, the abnormal glass substrate is blocked untimely, product yield is reduced, and production cost is improved.
Disclosure of Invention
The invention aims to provide an automatic optical inspection machine and a defect inspection method of a glass substrate, which are used for solving the problems of untimely interception of an abnormal glass substrate, low product yield and high production cost in the prior art.
To solve the above-mentioned problems, the present invention provides an automatic optical inspection machine for detecting defects of a glass substrate, the glass substrate comprises display areas and gap areas positioned between the display areas, the automatic optical inspection machine comprises a first camera, a second camera and a transmission mechanism, the first camera and the second camera are oppositely arranged, and a station to be detected is formed between the first camera and the second camera and used for placing the glass substrate to be detected, the conveying mechanism comprises a conveying wheel, the conveying wheel is positioned between the first camera and the second camera and used for conveying the glass substrate to the station to be detected, when the glass substrate is positioned at the station to be detected, the conveying wheel is positioned on the surface of the gap area, the first camera and the second camera are used for shooting the display area from two opposite sides of the glass substrate respectively.
In one embodiment, the conveying mechanism further comprises edge rollers, the edge rollers are sequentially connected to form a closed pattern to surround the conveying wheel, the edge rollers are used for contacting the surface of the edge region of the glass substrate, and the edge rollers and the conveying wheel act together to convey the glass substrate to the station to be detected.
In one embodiment, the automatic optical inspection machine further comprises a first movable support slidably connected to the automatic optical inspection machine, the first movable support being configured to move relative to the glass substrate in a length direction of the glass substrate, the first camera being slidably connected to the first movable support, and the first camera being configured to move relative to the glass substrate in a width direction of the glass substrate, so that the first camera can photograph any position of the glass substrate facing a surface of the first camera.
In one embodiment, the automatic optical inspection machine further comprises a second movable support slidably connected to the automatic optical inspection machine, the second movable support being configured to move relative to the glass substrate in a longitudinal direction of the glass substrate, and the second camera being slidably connected to the second movable support and being configured to move relative to the glass substrate in a width direction of the glass substrate, so that the second camera can photograph any position of the glass substrate facing a side surface of the second camera.
In one embodiment, the first movable support and the second movable support are fixedly connected to enable the first movable support and the second movable support to move synchronously relative to the glass substrate.
In one embodiment, the number of the transfer wheels is plural, and the rotation axis of each transfer wheel is aligned so that the direction of the frictional force applied by the transfer wheels to the surface of the glass substrate is the same.
In one embodiment, the transfer wheel includes a first transfer wheel and a second transfer wheel, the first transfer wheel is located between the first camera and the second transfer wheel, the first transfer wheel is used for contacting a side surface of the glass substrate facing the first camera, the second transfer wheel is located between the second camera and the first transfer wheel, the second transfer wheel is used for contacting a side surface of the glass substrate facing the second camera, and the first transfer wheel and the second transfer wheel rotate in opposite directions.
The invention also provides a method for inspecting the defects of the glass substrate, which comprises the following steps:
providing an automated optical inspection machine comprising a detection unit and an inspection unit, the inspection unit comprising a first camera, a second camera and a transport mechanism, the transport mechanism comprising a transport wheel,
the conveying mechanism contacts the glass substrate through the conveying wheel and conveys the glass substrate to a station to be detected;
the detection unit captures the defect position of the glass substrate;
the glass substrate comprises a first surface and a second surface which are oppositely arranged, the first camera moves to correspond to the defect position and shoots the defect position from the first surface, and the second camera moves to correspond to the defect position and shoots the defect position from the second surface;
the first camera and the second camera transmit the shot pictures to display equipment for operators to check.
In one embodiment, the glass substrate includes display areas and gap areas located between the display areas, the first camera shoots the display area of the first surface, the second camera shoots the display area of the second surface, and when the glass substrate is located at the station to be detected, the transfer wheel is located on the surface of the gap area.
In one embodiment, the glass substrate further comprises an edge region located at the edge of the glass substrate, the conveying mechanism further comprises edge rollers, the edge rollers are sequentially connected to form a closed pattern to surround the conveying wheel, and when the glass substrate is located at the station to be detected, the edge rollers are located on the surface of the edge region.
The invention has the following beneficial effects: the first camera and the second camera shoot images of the defect positions from two opposite surfaces of the glass substrate respectively, the images are transmitted to an operator for inspection, the defect images cannot be shot clearly on one side, accuracy of defect judgment is improved, time for judging the defects is shortened, when the glass substrate is located at a station to be detected, the transmission wheel is located on the surface of the clearance area, shielding of the transmission wheel on the display area is avoided, the defects are shot clearly by the first camera and the second camera, accuracy and efficiency of defect judgment are improved, abnormal glass substrates are intercepted in time, product yield is improved, and production cost is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other obvious modifications can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural diagram of an automatic optical inspection machine according to an embodiment of the present invention.
Fig. 2 is a side view of an automatic optical inspection machine according to an embodiment of the present invention.
Fig. 3 is a schematic view illustrating a first surface orientation of an automatic optical inspection machine according to an embodiment of the present invention.
Fig. 4 is a schematic diagram of a second surface orientation of an automatic optical inspection machine according to an embodiment of the present invention.
Fig. 5 is a side view of an automatic optical inspection machine according to a second embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 and 2, an automatic optical inspection machine according to an embodiment of the present invention is used to detect a defect of a glass substrate 10, and in one embodiment, the automatic optical inspection machine is used to detect a defect of a color filter substrate, where the defect includes back contamination, wheel mark, back scratch, and abnormal incoming material. In this embodiment, the automatic optical inspection machine includes a detection unit for capturing and finding the position of the defect of the glass substrate 10, and an inspection unit for capturing the surface topography of the defect position and displaying the image of the surface topography of the defect position to an operator through a display device. In one embodiment, the surface of the glass substrate 10 is a flat surface, and the defect locations may be recorded in the form of coordinates to facilitate the review unit to find and photograph the corresponding defect locations. In this embodiment, the review unit of the automatic optical inspection machine includes a first camera 32, a second camera 34 and a transmission mechanism, the first camera 32 and the second camera 34 are respectively located at two opposite sides of the glass substrate 10, specifically, the first camera 32 and the second camera 34 are arranged oppositely, and a to-be-detected station for placing the glass substrate 10 to be detected is formed between the first camera 32 and the second camera 34. In one embodiment, the first camera 32 and the second camera 34 are cameras of the same model, and the first camera 32 and the second camera 34 respectively capture the surface topography of the glass substrate 10 from two opposite sides of the glass substrate 10, and send both the defect image captured by the first camera 32 and the defect image captured by the second camera 34 to the display device for enlarged display. Specifically, the glass substrate 10 includes a first surface 102 and a second surface 104 disposed opposite to each other, and in one embodiment, the first surface 102 is a front surface of the glass substrate 10, and the second surface 104 is a back surface of the glass substrate 10. The first camera 32 is used to capture the surface topography of the defect locations of the first surface 102 and the second camera 34 is used to capture the surface topography of the defect locations of the second surface 104.
The first camera 32 and the second camera 34 respectively shoot images of the defect positions from two opposite surfaces of the glass substrate 10 and transmit the images to an operator for inspection, the defect images shot on one side are prevented from being shot clearly, accuracy of defect judgment is improved, time for judging the defects is shortened, the operator can clearly see surface appearance of the defect positions through a display device, the glass substrate 10 does not need to be turned over or moved, defect judgment is rapid, the abnormal glass substrate 10 is intercepted timely, product yield is improved, and production cost is reduced.
In this embodiment, the glass substrate 10 includes the display regions 12 and the gap regions 14 located between the display regions 12, the conveying mechanism includes a conveying wheel 40, the conveying wheel 40 is located between the first camera 32 and the second camera 34, the conveying wheel 40 is used for rolling on the surface of the glass substrate 10 to convey the glass substrate 10 to the station to be detected, and when the glass substrate 10 is located at the station to be detected, the conveying wheel 40 is located on the surface of the gap region 14. In one embodiment, the transfer wheel 40 is a disk-shaped roller rotating along one rotation axis, the edge surface of the transfer wheel 40 contacts the glass substrate 10, and the glass substrate 10 is driven to move by the friction force between the edge surface of the transfer wheel 40 and the surface of the glass substrate 10, thereby moving the glass substrate 10 to the station to be inspected. In one embodiment, the glass substrate 10 includes a plurality of display regions 12, each display region 12 corresponds to a color filter substrate of a liquid crystal display during a manufacturing process of the glass substrate 10, and the glass substrate 10 is divided into a plurality of independent color filter substrates for later use by cutting the spacer regions. The spacer region forms the edge of the color film substrate after cutting, and is used for frame gluing during subsequent assembly of the liquid crystal box. In the embodiment, in the process that the glass substrate 10 moves to the station to be detected, the transmission wheel 40 is in contact with the display area 12 and the gap area 14, when the glass substrate 10 moves to the station to be detected and stops moving, the transmission wheel 40 is only in contact with the gap area 14, the shielding of the transmission wheel 40 on the display area 12 is avoided, the clear shooting defects of the first camera 32 and the second camera 34 are facilitated, the accuracy and the efficiency of defect judgment are improved, the abnormal glass substrate 10 is intercepted in time, the product yield is improved, and the production cost is reduced.
In this embodiment, the glass substrate 10 further includes an edge region 16 located at an edge of the glass substrate 10, the conveying mechanism further includes an edge roller 400, the edge rollers 400 are sequentially connected to form a closed figure to surround the conveying wheel 40, and the edge roller 400 is configured to roll on a surface of the edge region 16 to convey the glass substrate 10 to the station to be detected. When the glass substrate 10 is at the inspection station, the edge roller 400 is located on the surface of the edge region 16. In one embodiment, the width dimension of the edge region 16 is the same as the width dimension of the gap region 14. In this embodiment, the conveying wheel 40 and the edge roller 400 are the same roller, and in the process of moving the glass substrate 10 to the station to be detected, the conveying wheel 40 and the edge roller 400 are in contact with both the display area 12 and the gap area 14 and the edge area 16, and when the glass substrate 10 moves to the station to be detected and stops moving, the conveying wheel 40 and the edge roller 400 are only in contact with the gap area 14 and the edge area 16, so that the shielding of the conveying wheel 40 and the edge roller 400 on the display area 12 is avoided, the first camera 32 and the second camera are beneficial to clearly shooting defects, the accuracy and the efficiency of defect judgment are improved, the abnormal glass substrate 10 is intercepted in time, the product yield is improved, and the production cost is reduced.
Referring to fig. 3, in the present embodiment, the automatic optical inspection machine further includes a first movable bracket 202, the first movable bracket 202 is slidably connected to the automatic optical inspection machine, the first movable bracket 202 is configured to move relative to the glass substrate 10 in a length direction of the glass substrate 10, the first camera 32 is slidably connected to the first movable bracket 202, and the first camera 32 is configured to move relative to the glass substrate 10 in a width direction of the glass substrate 10, so that the first camera 32 photographs an arbitrary position of a side surface of the glass substrate 10 facing the first camera 32. Specifically, the first movable support 202 includes two vertical posts 22 and a cross beam 24 that is erected between the two vertical posts 22, and the vertical posts 22 are slidably connected to the automatic optical inspection machine, so that the vertical posts 22 can slide relative to the glass substrate 10. In one embodiment, the glass substrate 10 is rectangular, and the glass substrate 10 includes a length direction and a width direction. The pillars 22 are slidable in the longitudinal direction of the glass substrate 10. The cross member 24 is disposed along the width direction of the glass substrate 10, and the first camera 32 is slidably coupled to the cross member 24 so that the camera can slide on the cross member 24 with respect to the width direction of the glass substrate 10. The sum of the moving directions in the length direction and the width direction enables the camera to move and shoot any position on the surface of the glass substrate 10, specifically, a planar rectangular coordinate system is established by taking the length direction as an X axis and the width direction as a Y axis, so that the camera can move and shoot the surface appearance of any (X, Y) coordinate position of the glass substrate 10, and the defect image is displayed to an operator through a display device. The first movable support 202 is designed to realize the movement of the first camera 32 to any position, so that the first camera 32 can shoot the defect image of any position of the first surface 102, the operator can observe and judge the defect conveniently, the abnormal glass substrate 10 can be intercepted in time, the product yield is improved, and the production cost is reduced.
Referring to fig. 4, in the present embodiment, the automatic optical inspection machine further includes a second movable bracket 204, the second movable bracket 204 is slidably connected to the automatic optical inspection machine, the second movable bracket 204 is configured to move relative to the glass substrate 10 in the length direction of the glass substrate 10, the second camera 34 is slidably connected to the second movable bracket 204, and the second camera 34 is configured to move relative to the glass substrate 10 in the width direction of the glass substrate 10, so that the second camera 34 can photograph any position of the surface of the glass substrate 10 facing the second camera 34. Specifically, the second movable support 204 includes two vertical posts 22 and a cross beam 24 erected between the two vertical posts 22, and the vertical posts 22 are slidably connected to the automatic optical inspection machine, so that the vertical posts 22 can slide relative to the glass substrate 10. In one embodiment, the glass substrate 10 is rectangular, and the glass substrate 10 includes a length direction and a width direction. The pillars 22 are slidable in the longitudinal direction of the glass substrate 10. The cross member 24 is disposed along the width direction of the glass substrate 10, and the second camera 34 is slidably coupled to the cross member 24 so that the camera can slide on the cross member 24 with respect to the width direction of the glass substrate 10. The sum of the moving directions in the length direction and the width direction enables the camera to move and shoot any position on the surface of the glass substrate 10, specifically, a planar rectangular coordinate system is established by taking the length direction as an X axis and the width direction as a Y axis, so that the camera can move and shoot the surface appearance of any (X, Y) coordinate position of the glass substrate 10, and the defect image is displayed to an operator through a display device. The second movable support 204 is designed to realize the movement of the second camera 34 to any position, so that the second camera 34 can shoot the defect image of any position of the second surface 104, thereby facilitating the observation and judgment of the defects by the operator, intercepting the abnormal glass substrate 10 in time, improving the yield of the product and reducing the production cost.
In the present embodiment, the number of the transfer wheels 40 is plural, and the rotation axis of each transfer wheel 40 coincides. Specifically, the conveying mechanism conveys the glass substrate 10 in one direction, and the rotating shaft of each conveying wheel 40 is perpendicular to the conveying direction, so that when the conveying wheels 40 rotate, the friction force of the conveying wheels 40 on the glass substrate 10 points to the conveying direction of the glass substrate 10, and the glass substrate 10 is conveyed to a station to be detected most quickly.
In this embodiment, the transfer wheel 40 includes a first transfer wheel 42 and a second transfer wheel 44, the first transfer wheel 42 is located between the first camera head 32 and the glass substrate 10, the first transfer wheel 42 is used for contacting one side surface of the glass substrate 10 facing the first camera head 32, the second transfer wheel 44 is located between the second camera head 34 and the glass substrate 10, the second transfer wheel 44 is used for contacting one side surface of the glass substrate 10 facing the second camera head 34, and the first transfer wheel 42 and the second transfer wheel 44 rotate in opposite directions. Specifically, the first conveying wheel 42 contacts the first surface 102, the second conveying wheel 44 contacts the second surface 104, the glass substrate 10 is clamped between the first conveying wheel 42 and the second conveying wheel 44, and the glass substrate 10 is conveyed to the station to be detected through the friction force of the first conveying wheel 42 and the second conveying wheel 44 on the glass substrate 10. In one embodiment, the first transfer wheel 42 rotates clockwise and the second transfer wheel 44 rotates counterclockwise to transfer the glass substrate 10 from right to left. The cooperation of the first transmission wheel 42 and the second transmission wheel 44 can quickly and accurately transmit the glass substrate 10 to the station to be detected, so that the automation and detection efficiency of the glass substrate 10 are improved, and the production cost is reduced.
Referring to fig. 5, a difference between the second embodiment of the present invention and the first embodiment of the present invention is that the first movable frame 202 and the second movable frame 204 of the automatic optical inspection machine are fixedly connected to each other, so that the first movable frame 202 and the second movable frame 204 move synchronously relative to the glass substrate 10. Specifically, the upright post 22 of the first movable bracket 202 is fixedly connected with the upright post 22 of the second movable bracket 204, so that the first movable bracket 202 is fixedly connected with the second movable bracket 204, and the movement of the first movable bracket 202 and the second movable bracket 204 in the length direction of the glass substrate 10 is synchronous, thereby saving the separate movement time of the two movable brackets. In this embodiment, when the position of the defect is captured by the detection unit, the first camera 32 and the second camera 34 both need to move to the position corresponding to the defect position, and take the surface topography of the defect position, that is, the images taken by the first camera 32 and the second camera 34 respectively are the images of the same position of the glass substrate 10 on the first surface 102 and the second surface 104, so that the positions where the first movable support 202 and the second movable support 204 need to stop are the same when the first camera 32 and the second camera 34 move and take the images. When the first movable support 202 and the second movable support 204 move synchronously, the moving speed of the first movable support 202 and the second movable support 204 is increased, the time for independently moving the first movable support 202 and the second movable support 204 is saved, the time for identifying defects is increased, the abnormal glass substrate 10 is intercepted in time, the product yield is increased, and the production cost is reduced.
The embodiment of the invention also provides a defect inspection method of the glass substrate 10, which is realized by using the automatic optical inspection machine provided by the embodiment of the invention. Specifically, the method for inspecting defects of the glass substrate 10 according to the embodiment of the present invention includes:
s101, the conveying mechanism contacts the glass substrate 10 through the conveying wheel 40 and conveys the glass substrate 10 to a station to be detected.
Specifically, the station to be detected is a position where the glass substrate 10 is used for defect detection. The transfer wheel 40 transfers the glass substrate 10 to the inspection station by using a frictional force for inspection.
In the embodiment, the glass substrate 10 includes display regions 12 and gap regions 14 located between the display regions 12, and when the glass substrate 10 is located at the station to be detected, the transfer wheel 40 is located on the surface of the gap region 14. In one embodiment, the transfer wheel 40 is a disk-shaped roller rotating along one rotation axis, the edge surface of the transfer wheel 40 contacts the glass substrate 10, and the glass substrate 10 is driven to move by the friction force between the edge surface of the transfer wheel 40 and the surface of the glass substrate 10, thereby moving the glass substrate 10 to the station to be inspected. In one embodiment, the glass substrate 10 includes a plurality of display regions 12, each display region 12 corresponds to a color filter substrate of a liquid crystal display during a manufacturing process of the glass substrate 10, and the glass substrate 10 is divided into a plurality of independent color filter substrates for later use by cutting the spacer regions. The spacer region forms the edge of the color film substrate after cutting, and is used for frame gluing during subsequent assembly of the liquid crystal box. In the embodiment, in the process that the glass substrate 10 moves to the station to be detected, the transmission wheel 40 is in contact with the display area 12 and the gap area 14, when the glass substrate 10 moves to the station to be detected and stops moving, the transmission wheel 40 is only in contact with the gap area 14, the shielding of the transmission wheel 40 on the display area 12 is avoided, the first camera 32 and the second camera can clearly shoot defects, the accuracy and the efficiency of defect judgment are improved, the abnormal glass substrate 10 is intercepted in time, the product yield is improved, and the production cost is reduced.
In the embodiment, the glass substrate 10 further includes an edge region 16 located at an edge of the glass substrate 10, and the transfer wheel 40 is located on a surface of the edge region 16 when the glass substrate 10 is located at the station to be detected. In one embodiment, the width dimension of the edge region 16 is the same as the width dimension of the gap region 14. In the embodiment, in the process that the glass substrate 10 moves to the station to be detected, the conveying wheel 40 is in contact with the display area 12, the gap area 14 and the marginal area 16, when the glass substrate 10 moves to the station to be detected and stops moving, the conveying wheel 40 is only in contact with the gap area 14 and the marginal area 16, the shielding of the conveying wheel 40 on the display area 12 is avoided, the first camera 32 and the second camera can clearly shoot defects, the accuracy and the efficiency of defect judgment are improved, the abnormal glass substrate 10 is intercepted in time, the product yield is improved, and the production cost is reduced.
S102, the detection unit captures the defect position of the glass substrate 10.
S103, the glass substrate 10 comprises a first surface 102 and a second surface 104 which are oppositely arranged, the first camera 32 moves to the corresponding defect position and shoots the defect position from the first surface 102, and the second camera 34 moves to the corresponding defect position and shoots the defect position from the second surface 104.
The first camera 32 and the second camera 34 respectively shoot images of the defect positions from two opposite surfaces of the glass substrate 10 and transmit the images to an operator for inspection, the defect images shot on one side are prevented from being shot clearly, accuracy of defect judgment is improved, time for judging the defects is shortened, the operator can clearly see surface appearance of the defect positions through a display device, the glass substrate 10 does not need to be turned over or moved, defect judgment is rapid, the abnormal glass substrate 10 is intercepted timely, product yield is improved, and production cost is reduced.
And S104, the first camera 32 and the second camera 34 transmit the shot pictures to the display equipment for operators to view.
The operator observes the appearance of the surface of the defect position according to the shot picture so as to judge the defect and prevent the glass substrate 10 with abnormal surface from entering the next process in time to cause material waste.
While the invention has been described with reference to a number of illustrative embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (7)
1. An automatic optical inspection machine for detecting defects of a glass substrate, the glass substrate including display regions and gap regions between the display regions, it is characterized in that the automatic optical inspection machine comprises a first camera, a second camera and a transmission mechanism, the first camera and the second camera are arranged oppositely, and a station to be detected is formed between the first camera and the second camera and used for placing the glass substrate to be detected, the conveying mechanism comprises a conveying wheel, the conveying wheel is positioned between the first camera and the second camera and used for conveying the glass substrate to the station to be detected, when the glass substrate is positioned at the station to be detected, the conveying wheels are positioned on two opposite surfaces of the gap area, the first camera and the second camera are used for shooting the display area from two opposite sides of the glass substrate respectively;
the conveying mechanism further comprises edge rollers which are sequentially connected to form a closed graph to surround the conveying wheel, the edge rollers are used for contacting the surface of the edge area of the glass substrate, and the edge rollers and the conveying wheel act together to convey the glass substrate to the station to be detected.
2. The automated optical inspection machine of claim 1, further comprising a first movable carriage slidably coupled to the automated optical inspection machine for movement relative to the glass substrate in a lengthwise direction of the glass substrate, the first camera slidably coupled to the first movable carriage for movement relative to the glass substrate in a widthwise direction of the glass substrate such that the first camera captures an arbitrary position of the glass substrate facing a side surface of the first camera.
3. The automated optical inspection machine of claim 2, further comprising a second movable carriage slidably coupled to the automated optical inspection machine for movement relative to the glass substrate in a lengthwise direction of the glass substrate, and a second camera slidably coupled to the second movable carriage for movement relative to the glass substrate in a widthwise direction of the glass substrate such that the second camera captures an arbitrary position of the glass substrate facing a side surface of the second camera.
4. The automated optical inspection machine of claim 3, wherein the first movable carriage is fixedly coupled to the second movable carriage such that the first movable carriage and the second movable carriage move synchronously relative to the glass substrate.
5. The automated optical inspection machine of any of claims 1 to 4, wherein the number of the transfer wheels is plural, and the rotation axis of each transfer wheel is coincident so that the direction of the frictional force applied by the transfer wheels to the surface of the glass substrate is the same.
6. The automated optical inspection machine of claim 5, wherein the transfer wheels include first and second oppositely disposed transfer wheels, the first transfer wheel being positioned between the first camera and the second transfer wheel, the first transfer wheel being configured to contact a side surface of the glass substrate facing the first camera, the second transfer wheel being positioned between the second camera and the first transfer wheel, the second transfer wheel being configured to contact a side surface of the glass substrate facing the second camera, the first transfer wheel and the second transfer wheel rotating in opposite directions.
7. A method for inspecting defects of a glass substrate, comprising:
providing an automatic optical inspection machine, wherein the automatic optical inspection machine comprises a detection unit and an inspection unit, the inspection unit comprises a first camera, a second camera and a transmission mechanism, the transmission mechanism comprises a transmission wheel, the glass substrate comprises display areas and gap areas positioned between the display areas, the first camera shoots the display areas on the first surface, and the second camera shoots the display areas on the second surface;
the conveying mechanism is in contact with the glass substrate through the conveying wheel and conveys the glass substrate to a station to be detected, and when the glass substrate is positioned at the station to be detected, the conveying wheel is positioned on two opposite surfaces of the gap area;
the detection unit captures the defect position of the glass substrate;
the glass substrate comprises a first surface and a second surface which are oppositely arranged, the first camera moves to correspond to the defect position and shoots the defect position from the first surface, and the second camera moves to correspond to the defect position and shoots the defect position from the second surface;
the first camera and the second camera transmit the shot pictures to display equipment for operators to check;
the glass substrate further comprises an edge area located at the edge of the glass substrate, the conveying mechanism further comprises edge rollers, the edge rollers are sequentially connected to form a closed graph to surround the conveying wheel, and when the glass substrate is located at the position to be detected, the edge rollers are located on the surface of the edge area.
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| CN108734700B (en) * | 2018-04-24 | 2021-06-11 | 信利（惠州）智能显示有限公司 | Method and device for detecting defects of blind area of substrate, computer and storage medium |
| CN113345328B (en) * | 2021-05-28 | 2022-08-02 | Tcl华星光电技术有限公司 | Mura repairing method for display panel |
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| JPH10148619A (en) * | 1996-11-15 | 1998-06-02 | Mitsubishi Chem Corp | Method and device for inspecting face defect of substrate under inspection |
| CN2615098Y (en) * | 2003-05-07 | 2004-05-12 | 郭明宏 | Conveying device for vertical thin plate etching machine |
| EP2166344A1 (en) * | 2004-11-24 | 2010-03-24 | Asahi Glass Company, Limited | Defect inspection method and apparatus for transparent plate materials |
| CN101887030A (en) * | 2009-05-15 | 2010-11-17 | 圣戈本玻璃法国公司 | Method and system for detecting defects of surface and/or interior of transparent substrate |
| CN104655646A (en) * | 2014-04-24 | 2015-05-27 | 东旭集团有限公司 | Glass substrate internal defect checking system and checking method for height position of internal defect |
| CN204197806U (en) * | 2014-09-25 | 2015-03-11 | 轻工业自动化研究所 | The conveying supporting device that ultra-thin, large-size glass is located |
| CN204215118U (en) * | 2014-12-02 | 2015-03-18 | 北京兆维电子(集团)有限责任公司 | Liquid crystal display appearance delection device |
| CN106597708B (en) * | 2016-12-28 | 2019-11-22 | 武汉华星光电技术有限公司 | A kind of substrate detection apparatus |
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