CN107462544A - A kind of multi-functional THz wave imaging system and imaging method - Google Patents
A kind of multi-functional THz wave imaging system and imaging method Download PDFInfo
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Abstract
The invention provides a kind of multi-functional terahertz imaging system, including THz wave emission part, for launching THz wave, and parallel wave is diverged to；Beam splitting portion, for THz wave to be divided into orthogonal first light beam and the second light beam；Plane picture acquisition unit, it is arranged in the light path of the first light beam, for obtaining the plane THz wave image information of measuring samples；Coherent cross section image acquiring unit, it is arranged in the light path of the second light beam, for obtaining the THz wave image information in measuring samples different depth section；Imaging and display part, for handling image information, the Terahertz plane picture and coherent cross section image of measuring samples are constructed, while all coherent cross section images are synthesized, obtain the Terahertz 3-D view of measuring samples；And control unit.Wherein, plane picture acquisition unit and coherent cross section image acquiring unit carry composite coding mask plate, and the cataloged procedure to sample message is completed by the conversion of mask plate.
Description
Technical field
The invention belongs to THz wave imaging field, and in particular to a kind of to take into account the multi-functional of plane transmission and reflection tomography
THz wave imaging system.
Background technology
THz wave is between an infrared electromagnetic wave frequency range between microwave, generally will
0.1THz~10THz is defined as " THz Gap ", i.e. terahertz wave band.The electromagnetic wave of this wave band has visible ray concurrently
Directionality and microwave penetration capacity.Just because of having two big advantage of the above concurrently, THz wave is become as the optimal of lossless detection
One of selection, and turn into the parallel option of X-ray imaging in some specific areas.
At present, the research of THz wave imaging focuses primarily upon two aspects, is on the one hand THz wave planar imaging, another
Aspect THz wave coherence chromatographic imaging.THz wave planar imaging is divided into transmission-type and reflective imaging, in practical application
It is imaged with transmission-type in the majority.It can be reflected or absorbed by testee when part THz wave passes through object in imaging process, and
The subwave of transmission will carry the information of corresponding intensity and phase, and the flat of testee can be drawn out according to these data
Face THz wave transmission picture.
THz wave coherence tomography technique (also known as THz wave Coherence Tomography) can obtain sample
Two-dimensional cross sectional distributed image, and sample 3-D view can be reconstructed.The research of Terahertz coherence tomography technique is main
The raising of reconstructed image quality, the shortening of imaging time are concentrated on to realize obtaining for real time imagery and sample three-dimensional reconstruction image
Take technology etc..
, can be more comprehensive if Terahertz three-dimensional imaging can be obtained while Terahertz planar imaging is obtained
Understand the information of testee.At present, it there is no application in this respect.
The content of the invention
The present invention is carried out to solve the above problems, and is applied to for current THz wave present on imaging technique
Problem, it is proposed that a kind of multi-functional THz wave imaging system and its imaging method, while Terahertz plane picture is obtained,
" cutting type " scanning imagery is carried out to testee by the method for coherence tomography, and then obtains testee different depth
Coherent image, relevant information again pass through computer disposal with synthesis realize testee 3D coherent images structure.
Present invention employs following technical scheme：
Multi-functional terahertz imaging system provided by the invention has：THz wave emission part, including THz wave transmitting
Device and light dispersal unit, THz wave transmitter are used to launch THz wave, and light dispersal unit is used for the THz wave
It is dispersed into parallel wave；Beam splitting portion, it is arranged in THz wave light path, for THz wave to be divided into orthogonal first light beam
With the second light beam；Plane picture acquisition unit, it is arranged in the light path of the first light beam, for obtaining the plane Terahertz of measuring samples
Ripple image information；Coherent cross section image acquiring unit, it is arranged in the light path of the second light beam, for obtaining measuring samples different depth
The THz wave image information in section；Imaging and display part, for handling plane THz wave image information, construct and treat
The Terahertz plane picture of sample product, and the THz wave image information in the section for handling measuring samples different depth,
Coherent cross section image is constructed, while all coherent cross section images are synthesized, the Terahertz for obtaining measuring samples is three-dimensional
Image；And control unit, for controlling THz wave emission part, beam splitting portion, plane picture acquisition unit, coherent cross section image to obtain
Take portion and imaging and display part.
Further, the plane picture acquisition unit in multi-functional terahertz imaging system provided by the invention includes setting successively
Put：Objective table, the metal derby of square opening is carried for centre, measuring samples are placed in square opening；First spatial modulation unit, use
In the transmitance for constantly changing THz wave, so as to obtain the different THz waves containing measuring samples surface information；First
THz wave converges unit, for converging the THz wave；And first detector, for collecting the THz wave being accumulated.
Further, the coherent cross section image acquiring unit in multi-functional terahertz imaging system provided by the invention includes position
Packaged type reflector element above beam splitting portion and the second space modulating unit positioned at the lower section in beam splitting portion, the second terahertz
Hereby ripple convergence unit and the second detector.The THz wave that reflector element is used in the second light beam of reflection, second through reflection
Light beam is superimposed to be formed as reference light with the THz wave for being reflected back by measuring samples in the first light beam and reflecting through beam splitting portion again
Coherent beam, the coherent beam are converged after passing through the second space modulating unit by second THz wave convergence unit,
Then collected by second detector.
Further, the beam splitting portion in multi-functional terahertz imaging system provided by the invention is to be coated with ITO conductive layer
Quartz plate or sheet glass.
Further, in multi-functional terahertz imaging system provided by the invention, the first spatial modulation unit and second
Spatial modulation unit can be one of following five kinds of forms：(1) first spatial modulation unit and second space modulating unit are combined into
One, in the composite coding mask plate module of inverted L shape, the vertical portion of composite coding mask plate module and horizontal part respectively as
First spatial modulation unit and second space modulating unit；(2) first spatial modulation units and second space modulating unit close
It is integrated, in the composite coding mask plate module of inverted L shape, composite coding mask plate ring is by waiting big flexible composite coding mask
Version and can THz wave thoroughly the spaced composition of plastic plate；(3) first spatial modulation units and second space modulating unit
It is identical, it is Scroll composite coding mask plate module；(4) first spatial modulation units and second space modulating unit are type
The automatically controlled THz wave spatial modulator of identical；(5) first spatial modulation units and second space modulating unit are integrated, and are
Mask modular converter based on light-operated mode.Invention effect and effect
The invention provides a kind of multi-functional THz wave imaging system and imaging method, is visited using existing THz wave
Device module is surveyed to realize the collection and extraction to the terahertz wave signal entrained by measured object.Relative to prior art, the present invention
Beneficial effect be：
(1) present invention is realized and completed too using individual system by compressed sensing and Coherence Tomography technology
Hertz wave planar imaging and the relevant 3D imagings of THz wave, and then the comprehensive purpose for obtaining testee information, simultaneously
Reduce time and the cost of experiment, avoid because be imaged at different conditions and to caused by graphical analysis error；
(2) by using continuous composite coding mask plate (mask) ring, time-consuming mask plate replacing options is avoided, are entered
One step reduces the time of experiment, simultaneously because two terahertz detectors make use of same mask rings, therefore effectively reduces
The cost of system；
(3) because the time for obtaining relevant 3D rendering is longer, and the time for obtaining THz wave plane picture is shorter, can be with
Obtain more Terahertz plane picture information.The mask plate used knowable to compression sensing theory is more, and final imaging will
It is more clear, therefore, finally obtain image and also become apparent from.If the result of single imaging obtains clearly image enough,
So we can use it is excellent it is middle select excellent theory, it is wherein most clear to be obtained using computer by the method for Digital Image Processing
Terahertz plane picture as final plane image measurment result.The either method of which kind of processing data, we may be used
So that while relevant THz wave 3D rendering is obtained, clearly Terahertz is obtained in the case where not increasing experimental period additionally
Plane transmission image.
Brief description of the drawings
Fig. 1 is the structural representation of the multi-functional THz wave imaging system in the embodiment of the present invention one；Fig. 2 is the present invention
The structural representation of multi-functional THz wave imaging system in embodiment two；Fig. 3 is the Scroll in the embodiment of the present invention three
The structural representation of composite coding mask plate module；
Fig. 4 is the structural representation of the multi-functional THz wave imaging system in the embodiment of the present invention four；Fig. 5 is the present invention
The structural representation of multi-functional THz wave imaging system in embodiment five.
Embodiment
Illustrate the embodiment of the present invention below in conjunction with accompanying drawing.
Embodiment one
Fig. 1 is the structural representation of the multi-functional THz wave imaging system in the present embodiment one.
As shown in figure 1, multi-functional THz wave imaging system 100 is obtained by THz wave emission part, beam splitting portion, plane picture
Portion, coherent cross section image acquiring unit, imaging and display part and control unit is taken to form.
THz wave emission part includes THz wave transmitter 1 and light dispersal unit 2-1, THz wave transmitter 1 are used
In transmitting THz wave, light dispersal unit 2-1 is used to THz wave being dispersed into parallel wave.
Beam splitting portion 3 is to be coated with the quartz plate or sheet glass of ITO conductive layer, is arranged in THz wave light path, for will too
Hertz wave is divided into orthogonal first light beam and the second light beam.According to requirement of the detector to THz wave intensity, in quartz
The ITO conducting films of specific conductivity are plated on piece or sheet glass, to realize the balance to two beam THz waves, i.e. if plane
Imaging beam is weaker then from the relatively low ito film of conductance, so as to reduce reflectivity, increases the intensity of planar imaging light beam.
Plane picture acquisition unit, it is arranged in the light path of the first light beam, for obtaining the plane THz wave of measuring samples
Image information；Coherent cross section image acquiring unit, it is arranged in the light path of second light beam, it is different deep for obtaining measuring samples
Spend the THz wave image information in section.
Plane picture acquisition unit includes objective table 6, the first spatial modulation unit, the first THz wave convergence set gradually
Unit 2-2 and the first detector 10-1.Coherent cross section image acquiring unit includes the packaged type reflection positioned at the top of beam splitting portion 3
Unit and second space modulating unit positioned at the lower section in beam splitting portion 3, the second THz wave convergence unit 2-3 and second are visited
Survey device 10-2.
Objective table 6 is the middle metal derby for carrying square opening, and measuring samples are placed in square opening.First spatial modulation
Unit is integrated with second space modulating unit, in the composite coding mask plate module of inverted L shape, the composite coding mask plate
The vertical portion of module and horizontal part are respectively as the first spatial modulation unit and second space modulating unit.Composite coding mask
Version module includes：Base 8 is transmitted, also in inverted L shape, is internally provided with motor；Movable pulley group 9, include six movable pulley 9-1~9-
6, six movable pulleies are respectively arranged at six angles of transmission base, and motor connection, can be rotated under the drive of motor；
Composite coding mask plate ring (composite coding mask rings) 7a, is enclosed on six movable pulleies, and is driven by movable pulley, realizes
The replacing of composite coding mask plate before imaging window.Composite coding mask plate ring 7a is made up of flexible PCB, flexible PCB
It is the 2D planes formed by metallic region and non-metallic regions braiding.
It is convex lens that first THz wave, which converges unit 2-2 and the second THz wave convergence unit 2-3, for converging
Through the THz wave of composite coding mask plate ring；First detector 10-1 and the second detector 10-2, which is used to collect, to be converged
Poly- THz wave, and terahertz wave signal is passed into imaging and display part.
Reflector element in coherent cross section image acquiring unit is used for the THz wave reflected in the second light beam, and the through reflection
Two light beams are superimposed shape as reference light with the THz wave for being reflected back by measuring samples in the first light beam and being reflected through beam splitting portion again
Into coherent beam, coherent beam passes through and converges unit 2-3 convergences by the second THz wave after composite coding mask plate ring, then by
Second detector 10-2 is collected.
Packaged type reflector element, including mobile platform 5, the speculum 4 on mobile platform and drive are mobile flat
The stepper motor of platform, mobile platform 5 is used for the front and back position for changing speculum under the drive of stepper motor, and then changes reference
The optical path length of light, so as to be scanned to the section of sample different depth.
Imaging and display part, for handling plane THz wave image information, construct the Terahertz of measuring samples
Plane picture；And the THz wave image information in the section for handling measuring samples different depth, constructs coherent cross section
Image, while all coherent cross section images are synthesized, obtain the Terahertz 3-D view of the measuring samples.Control
Portion processed, for controlling THz wave emission part, beam splitting portion, plane picture acquisition unit, coherent cross section image acquiring unit and imaging
Processing and display part.Control unit and imaging and display part in the present embodiment are to be arranged at the meter outside system and device box
Calculation machine, the image-processing software and display being arranged in computer.
THz wave planar imaging and too is completed simultaneously using the multi-functional THz wave imaging system in the present embodiment
The method of the relevant 3D imagings of Hertz wave, comprises the following steps：
Step 1, the terahertz transmitter transmitting THz wave in terahertz sources portion, the THz wave is by as light point
The convex lens 2-1 of throwaway member is dispersed into parallel light wave；
Step 2, beam splitting portion are split to THz wave, are divided into mutually perpendicular first light beam and the second light
Beam；
Step 3, the part THz wave of the first light beam pass through measuring samples and composite coding mask on objective table 6
Converged after version ring 7a vertical portion by convex lens 2-2, then collected by the first detector 10-1, obtain the plane of examining object
THz wave image information；
Step 4, at the same time, speculum 4 are reflected the THz wave in the second light beam, the second light through reflection
THz wave in beam is as the Terahertz for being reflected back and reflected through beam splitting portion 3 by measuring samples in reference light and the first light beam again
Ripple is superimposed to form coherent beam, and the coherent beam is converged after passing through composite coding mask plate ring 7a horizontal component by convex lens 2-3
It is poly-, then collected by the second detector 10-2, obtain the THz wave image information in the section of measuring samples；
Step 5, according to the requirement of system imaging speed, the rotating speed that motor is transmitted in composite coding mask plate module is controlled,
Six movable pulleies of motor driven are rotated simultaneously with certain speed, and then drive composite coding mask rings to rotate, and realize imaging window
Composite coding mask rings replacing.Meanwhile using the image-processing software being arranged in the computer of its exterior to be checked
The plane picture information of the different mask plates of object and the THz wave image information in section are handled to construct respectively and treated
The Terahertz plane picture and coherent cross section image of sample product；
Step 6, after the cross-section data collection of first depth finishes, the stepping electricity in computer starting mobile platform 5
Machine, speculum are moved forward or rearward a unit distance with mobile platform, change the length of the reference path so that surface sweeping
Then section rotates composite coding mask rings, computer obtains again and processing information, until completing to be checked to another depth
The scanning in the section of sample different depth, obtain the coherent cross section image of the different depth of measuring samples；
Step 7, hereafter computer all sectional view is synthesized into 3D Terahertz coherent images, while to all collections
Data merge processing and draw out clearly plane picture, or the figure drawn out of method screening single using data processing
As last result.
Terahertz wave detector 10-1 and 10-2 in the present embodiment are by AlGaN/GaN HEMTs
(HEMT) (0.8~1.1THz), or Golay Cell (0.02~20THz), or Bolometer (0.06~30THz) are realized.
Objective table 6 is made of metal (such as aluminium or iron), to stop unnecessary THz wave and limit size and the imaging institute of Terahertz hot spot
The single composite coding mask needed is in the same size.
Following auxiliary equipment is also included in the multi-functional THz wave imaging system that the present embodiment provides：Terahertz wave signal
Modulator, such as chopper, are arranged between convex lens 2-2 and the first detector 10-1 and convex lens 2-3 and the first detector
Between 10-2；The real-time monitoring modular 11-1 of the lock-in amplifier of Detection of Weak Signals, temperature humidity, flows of dry gases control mould
Block, for controlling hand-hole 11-2,11-3 and steam vent 11-4 united openings or closing etc..
Multifunctional imaging system in the present embodiment relies on THz wave compressed sensing imaging technique and realized, understands
THz wave energy information measured by present encoding mask encoding state information and corresponding terahertz wave detector (is pressed
Data sequence corresponding to measuring sequence filing).The principle of specific compressed sensing (CS) imaging technique, which can be sketched, is：
CS imagings will pass through three sparse signal representation, encoding measurement and algorithm for reconstructing processes.
If it is non-zero there was only a small number of elements in a signal, it is sparse that can claim the signal.In usual time domain
Natural sign is all non-sparse, but is probably sparse in some transform domains.
First, it is φ to make an orthogonal basic matrix, φ can by original image signal f (need the original image obtained, Schilling it
It is expressed as f) (common N=n × n pixel) with the signal x of rarefaction：F=φ x.
Encoding measurement is then that (M is according to figure in order to reconstruct f from M observation (M measured value of measurement of detector order)
It is that can reconstruct the minimum value and M≤N that are satisfied with image depending on the complexity and device performance of shape), that is, utilize M × N 0-
1 random matrix Ψ and image f inner product, M observation y (y=ψ f=ψ φ x) is obtained, for simplification, y is also denoted as y sometimes
=η x (η=ψ φ).
As known η=ψ φ and linear measurement y, x is solved equation to obtain by minimum norm method0, subsequently again by f0=φ
x0Recover and rebuild subject image f.
After encoding mask (i.e. M times observation) in M rotation, corresponding measured object is gone out by computer restructural and taken
The 2D image informations of the THz wave of band.
Embodiment two
In the present embodiment two, and the identical structure of embodiment one gives identical symbol, and omits identical explanation.
Fig. 2 is the structural representation of the multi-functional THz wave imaging system in the present embodiment two.
As shown in Fig. 2 composite coding mask rings 7b in multi-functional THz wave imaging system 200 by etc. big mask side
Block and can the spaced composition of THz wave square thoroughly, wherein, mask squares are flexible PCB, can THz wave square thoroughly
For can THz wave flexible plastic sheet thoroughly.In composite coding mask rings, relative with mask squares be can THz wave side thoroughly
Block, therefore, the two beam THz waves for imaging pass twice through the mask rings, when passing through the mask rings per a branch of THz wave
Have and only once pass through mask squares, i.e. when a branch of THz wave passes through mask blockages on mask rings in imaging process
When then the light beam again passes through mask rings when being imaged must by ring can THz wave square thoroughly, vice versa.
Composite coding mask rings 7b compares with the composite coding mask rings 7a in embodiment one, total mask units it is less and
Picture can not be continuously rotated into, its motion is in units of mask size.But this module still can meet
Operated simultaneously between two detectors, reduce the making amount of total mask modules, at the same with the composite coding mask ring phases in Fig. 1
Than the mask ring floor spaces are smaller, so as to have compressed the size of system.Therefore, the composite coding mask moulds in the present embodiment
Block is relatively adapted to more easy testee, while is not very high to image taking speed requirement but has strictly to Experimental Area size
The experiment of control.
Embodiment three
In the present embodiment three, and the identical structure of embodiment one gives identical symbol, and omits identical explanation.
Fig. 3 is the structural representation of the Scroll composite coding mask plate module in the present embodiment three.
As shown in figure 3, the first spatial modulation unit is identical with second space modulating unit, it is that Scroll composite coding is covered
Diaphragm plate module.The Scroll composite coding mask plate module, including two horizontally disposed and movable pulley groups spaced apart,
Two movable pulley groups include two movable pulley 9-7~9-10 being vertically arranged, wherein movable pulley 9-8 and movable pulley 9-10 work respectively
It is spool around flexible composite coding mask.When test start when, four movable pulleies (or inverse time all in clockwise direction
The direction of pin) rotate, the composite coding mask rings on movable pulley 9-8, which are transmitted, passes sequentially through 9-7,9-9 and 9-10, final synthesis
Coding mask rings can be all gone on 9-10；Composite coding mask rings can (or up time counterclockwise when test next time
Pin direction) turn on 9-8.
Why 4 movable pulleies rather than be to prevent on some movable pulley directly with 9-7 and 9-9 are set on that module
The inclination of very few caused imaging upper mask planes of the mask excessively and on another.
The method requirement of the present embodiment will install an independent composite coding mask module before each detector, by
In the mask modules of such a method take up an area it is smaller therefore can further compressibility size, while can as requested more
The size of mask spools is changed, operation is more flexible.It is necessary in a system but this method can not make full use of mask modules
Two mask spools are made in repetition, so as to add cost.Even making two different mask spools, handed over before two detectors
Change the unstability and increase imaging time using the system that will also result in.
Example IV
In the present embodiment four, and the identical structure of embodiment one gives identical symbol, and omits identical explanation.
Fig. 4 is the structural representation of the multi-functional THz wave imaging system in the present embodiment four.
As shown in figure 4, the first spatial modulation unit and second space in multi-functional THz wave imaging system 300 are adjusted
Unit processed is a kind of mask modular converters based on automatically controlled THz wave spatial modulator, the upgrade version composite coding mask moulds
Block is made up of the automatically controlled THz wave spatial modulator 12-1 and THz wave spatial modulator 12-2 of two same types.
Quick mask switchings can be realized using such automatically controlled spatial modulator.For replacing Fig. 2 composite coding
During the mask modules of mask rings and the Scroll in Fig. 3, imaging rate can be further lifted.Different from mechanical control above
Method processed, it can increased in the method cost, particularly need to use the automatically controlled THz wave spatial modulator feelings of large area
Under condition.
Embodiment five
In the present embodiment five, and the identical structure of embodiment one gives identical symbol, and omits identical explanation.
Fig. 5 is the structural representation of the multi-functional THz wave imaging system in the present embodiment five.
As shown in figure 5, in multi-functional THz wave imaging system 400, the first spatial modulation unit and second space modulation
Unit is integrated, for the mask modular converter based on light-operated mode.The mask modular converter based on light-operated mode includes：It is high
Power projection instrument 13, for being emitted projected light beam, the black for allowing THz wave to pass through is included in the projection pattern in projecting apparatus
Pixel and the white pixel for not allowing THz wave to pass through, projecting apparatus form imaging coding by converting projection pattern；Collimation
Lens 14, are arranged in the light path of projected light beam, for collimating projected light beam；Beam splitter 15, for by by the projection of collimation
Light beam is divided into transmitted light beam and the reflected beams；Speculum group 16, comprising the first speculum 16-1 and the second speculum 16-2,
One speculum 16-1 is located at the rear of objective table 6, and the second speculum 16-2 is located at the lower section in beam splitting portion 3, the first speculum 16-1
For the reflected beams, the second speculum 16-2 is used for reflection and transmission light beam；High Resistivity Si component 17, including to be respectively arranged at first anti-
The the first High Resistivity Si 17-1 and the second High Resistivity Si 17-2 of mirror 16-1 rear and the second speculum 16-2 lower section are penetrated, is used for
The light beam reflected through the first speculum 16-1 and the second speculum 16-2 is absorbed, produces photo-generated carrier, and then change conductance
Characteristic, finally light area to by way of THz wave shield.
In use, the projected light beam that projecting apparatus 13 is emitted is divided into two beams after the collimation of collimation lens 14 by beam splitter 15,
A branch of transmission, a branch of reflection, it is high to be irradiated to first after the first speculum 16-1 and the second speculum 16-2 reflections respectively
Hinder in silicon 17-1 and the second High Resistivity Si 17-2, because the first High Resistivity Si 17-1 and the second High Resistivity Si 17-2 absorbs incident control
Light processed and produce photo-generated carrier, and then change conductance property, finally light area to by way of THz wave shield.
The black picture element for allowing the THz wave to pass through is included in projection pattern in projecting apparatus 13 and does not allow THz wave saturating
The white pixel crossed, projecting apparatus form imaging coding by converting projection pattern.
The imaging rate of light-operated scheme be higher than it is automatically controlled and mechanical, it is insufficient then be that cost and volume will exceed
Above several schemes.
The effect of one~embodiment of embodiment five and effect
Embodiment provides a kind of multi-functional THz wave imaging system and imaging method, is visited using existing THz wave
Device module is surveyed to realize the collection and extraction to the terahertz wave signal entrained by measured object.Relative to prior art, five realities
The beneficial effect for applying example is：
(1) by compressed sensing and Coherence Tomography technology, realize and complete THz wave using individual system
Planar imaging and the relevant 3D imagings of THz wave, and then the comprehensive purpose for obtaining testee information, reduce simultaneously
The time of experiment and cost, avoid because be imaged at different conditions and to caused by graphical analysis error；
(2) by using continuous composite coding mask plate (mask) ring, time-consuming mask plate replacing options is avoided, are entered
One step reduces the time of experiment, simultaneously because two terahertz detectors make use of same mask rings, therefore effectively reduces
The cost of system；
(3) because the time for obtaining relevant 3D rendering is longer, and the time for obtaining THz wave plane picture is shorter, can be with
Obtain more Terahertz plane picture information.The mask plate used knowable to compression sensing theory is more, and final imaging will
It is more clear, therefore, finally obtain image and also become apparent from.If the result of single imaging obtains clearly image enough,
So we can use it is excellent it is middle select excellent theory, it is wherein most clear to be obtained using computer by the method for Digital Image Processing
Terahertz plane picture as final plane image measurment result.The either method of which kind of processing data, we may be used
So that while relevant THz wave 3D rendering is obtained, clearly Terahertz is obtained in the case where not increasing experimental period additionally
Plane transmission image.
The invention is not restricted to the scope of embodiment, for those skilled in the art, as long as respectively
Kind of change in the spirit and scope of the present invention that described claim limits and determines, these changes be it will be apparent that
All are using the innovation and creation of present inventive concept in the row of protection.
Claims (2)
- A kind of 1. multi-functional THz wave imaging system, for obtaining the Terahertz plane picture and terahertz of measuring samples simultaneously Hereby 3-D view, it is characterised in that including：THz wave emission part, including THz wave transmitter and light dispersal unit, the THz wave transmitter are used to send out THz wave is penetrated, the smooth dispersal unit is used to the THz wave being dispersed into parallel wave；Beam splitting portion, it is arranged in the THz wave light path, for the THz wave to be divided into orthogonal first light beam With the second light beam；Plane picture acquisition unit, it is arranged in the light path of first light beam, for obtaining the plane terahertz of the measuring samples Hereby ripple image information；Coherent cross section image acquiring unit, it is arranged in the light path of second light beam, it is different deep for obtaining the measuring samples Spend the THz wave image information in section；Imaging and display part, for handling the plane THz wave image information, construct the measuring samples too Hertz plane picture；And the THz wave image information in the section for handling the measuring samples different depth, is constructed Coherent cross section image, while all coherent cross section images are synthesized, obtain the Terahertz three of the measuring samples Tie up image；AndControl unit, for controlling the THz wave emission part, the beam splitting portion, the plane picture acquisition unit, described relevant Cross-sectional image acquisition unit and the imaging and display part, wherein, the plane picture acquisition unit includes what is set gradually：Objective table, for the middle metal derby for carrying square opening, the square opening is used to carry the measuring samples；First spatial modulation unit, it is different containing described so as to obtain for constantly changing the transmitance of the THz wave The THz wave of measuring samples surface information；First THz wave converges unit, for converging the THz wave；AndFirst detector, for collecting the THz wave being accumulated,The coherent cross section image acquiring unit is including the packaged type reflector element above the beam splitting portion and positioned at institute The second space modulating unit, the second THz wave convergence unit and the second detector of the lower section in beam splitting portion are stated,The reflector element is used for the THz wave reflected in second light beam, and second light beam through reflection is as reference The THz wave that light is reflected back by the measuring samples with first light beam and reflected again through the beam splitting portion is superimposed to be formed Coherent beam, the coherent beam are converged after passing through the second space modulating unit by second THz wave convergence unit It is poly-, then collected by second detector,The packaged type reflector element, including described in mobile platform, the speculum on the mobile platform and drive The stepper motor of mobile platform, the mobile platform are used under the drive of the stepper motor before and after changing the speculum Position, and then change the optical path length of the reference light, so as to be scanned to the section of the measuring samples different depth,The first spatial modulation unit and the second space modulating unit are integrated, and turn for the mask based on light-operated mode Block is changed the mold, the mask modular converter based on light-operated mode includes：Projecting apparatus, for being emitted projected light beam；Collimation lens, it is arranged in the light path of the projected light beam, for collimating the projected light beam；Beam splitter, for the projected light beam by collimation to be divided into transmitted light beam and the reflected beams；Speculum group, comprising the first speculum and the second speculum, first speculum is located at the rear of the objective table, Second speculum is located at the lower section in the beam splitting portion, and first speculum is used to reflecting the reflected beams, and described the Two-mirror is used to reflect the transmitted light beam；High Resistivity Si component, including it is respectively arranged at the of the rear of first speculum and the lower section of second speculum One High Resistivity Si and the second High Resistivity Si, for absorbing the light beam reflected through first speculum and second speculum, Produce photo-generated carrier,The black picture element for allowing the THz wave to pass through is included in projection pattern in the projecting apparatus and is not allowed described The white pixel that THz wave passes through, the projecting apparatus form imaging coding, realized to described by converting the projection pattern The spatial modulation of THz wave.
- 2. multi-functional THz wave imaging system according to claim 1, it is characterised in that：Wherein, the beam splitting portion is the quartz plate or sheet glass for being coated with ITO conductive layer.
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| CN105044018B (en) | 2017-09-12 |
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