CN107400860B - High-frequency induction heating evaporation device - Google Patents
High-frequency induction heating evaporation device Download PDFInfo
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- CN107400860B CN107400860B CN201710803689.5A CN201710803689A CN107400860B CN 107400860 B CN107400860 B CN 107400860B CN 201710803689 A CN201710803689 A CN 201710803689A CN 107400860 B CN107400860 B CN 107400860B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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Abstract
The invention provides a high-frequency induction heating evaporation device, which comprises: the crucible device comprises a plurality of crucibles, crucible supports, induction coils, a moving mechanism and a sealing mechanism; a plurality of crucibles for containing a coating material; the crucible support is used for supporting a plurality of crucibles; the moving mechanism is used for driving a target crucible in the plurality of crucibles to move so that the target crucible enters the induction coil; the induction coil is used for heating and evaporating the coating material in the target crucible by introducing high-frequency current; and the sealing mechanism is used for forming a seal between the moving mechanism and the vacuum chamber. The high-frequency induction heating evaporation device provided by the invention has the advantages that: (1) the loading capacity of the coating material is large, and the loading variety is large; (2) the position of the evaporation source is fixed, so that the film thickness has good consistency; (3) the number of crucibles can be increased or decreased according to actual requirements, the layout is convenient, and the customization degree is high; (4) the number of the crucibles is increased, and meanwhile, an additional heating system is not needed, so that the cost is saved.
Description
Technical Field
The invention relates to a heating evaporation device, in particular to a high-frequency induction heating evaporation device.
Background
In order to vaporize the coating material, most of the coating materials must be evaporated under vacuum at an evaporation temperature of 1000 to 2000 ℃, and thus the coating materials must be heated to the evaporation temperature by various heating methods. The device for heating the film material in the evaporation coating apparatus is generally referred to as a heating evaporation device. The heating evaporation device is widely applied to vapor deposition processes in the industries of electronics, semiconductors, optics, buildings, packaging and the like.
Fig. 1 is a schematic cross-sectional view of an embodiment of a high-frequency induction heating evaporation apparatus in the prior art. As shown in fig. 1, the high-frequency induction heating evaporation apparatus includes an induction coil 1, a crucible, and a base 2, wherein the crucible is disposed on the base 2. Further, the crucible comprises an inner crucible 3, an outer crucible 4, a heat insulating cylinder 5 and a heat insulating layer 6. Wherein the inner crucible 3 is arranged in the outer crucible 4, the heat insulating cylinder 5 is arranged between the side wall of the inner crucible 3 and the side wall of the outer crucible 4, and the heat insulating layer 6 is arranged between the bottom surface of the inner crucible 3 and the bottom surface of the outer crucible 4.
When the high-frequency induction heating evaporation device shown in fig. 1 is used for coating, firstly, a coating material is put into the inner crucible 3; then, the whole crucible is placed in the center of an induction coil 1, so that the induction coil 1 surrounds a crucible body containing a coating material, wherein only one crucible can be placed in the induction coil 1; then, high-frequency current is introduced into the induction coil 1, the induction coil 1 generates a high-frequency electromagnetic field under the action of the high-frequency current, and the coating material generates strong eddy current under the induction of the high-frequency electromagnetic field so as to heat and evaporate the coating material; and finally, depositing the evaporated coating material on the surface of the workpiece to form a film. The heat insulation cylinder 5 and the heat insulation layer 6 are beneficial to reducing the loss of heat energy in the inner crucible 3 in the coating process, so that the effective utilization of the heat energy is ensured.
In the high-frequency induction heating evaporation apparatus, when operating, the crucible located at the center of the high-frequency induction heating evaporation apparatus is operated by one induction coil to evaporate the coating material therein, which is regarded as one evaporation source. Based on the number of evaporation sources, the coating mode of the high-frequency induction heating evaporation device can be divided into a single evaporation source mode and a plurality of evaporation source modes. In the prior art, a single evaporation source method is realized by arranging only one crucible and one induction coil in a high-frequency induction heating device. The disadvantages of this single evaporation source approach are: because the crucible volume is limited, the capacity and the type of the coating material are limited to a certain extent, so that the method cannot be applied to application scenes with large demand on the capacity of the coating material or more demands on the type of the coating material. The multiple evaporation source system is realized by arranging multiple crucibles and multiple induction coils in a high-frequency induction heating apparatus. The drawbacks of this multiple evaporation source system are: although there is no limitation on the kind of the coating material, the evaporation angle is not uniform due to the difference in the position of each evaporation source, and the film thickness distribution is not uniform. In addition, when the positions of the plurality of evaporation sources are laid out, the problem of the space between the evaporation sources needs to be considered to prevent cross contamination, and the vacuum chamber needs to be large. Moreover, each evaporation source needs to be provided with a power supply system for supplying high-frequency current, and multiple evaporation sources need to be provided with multiple power supply systems, which results in an increase in the cost of the high-frequency induction heating evaporation apparatus.
Disclosure of Invention
In order to overcome the above-mentioned drawbacks of the prior art, the present invention provides a high-frequency induction heating evaporation apparatus, comprising:
the crucible sealing device comprises a plurality of crucibles, crucible supports, induction coils, a moving mechanism and a sealing mechanism, wherein the crucibles, the crucible supports and the induction coils are arranged in a vacuum chamber, and the moving mechanism is arranged outside the vacuum chamber;
the plurality of crucibles are used for containing coating materials;
the crucible support is used for supporting the plurality of crucibles;
the moving mechanism extends into the vacuum chamber and is connected with the crucible support and used for driving a target crucible in the plurality of crucibles to move so that the target crucible enters the induction coil;
the induction coil is used for heating and evaporating the coating material in the target crucible by introducing high-frequency current;
the sealing mechanism is arranged between the moving mechanism and the vacuum chamber and is used for forming sealing between the moving mechanism and the vacuum chamber.
According to an aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the moving mechanism includes an elevating mechanism and a rotating mechanism; the rotating mechanism extends into the vacuum chamber and is connected with the crucible support and used for driving the crucible support to rotate so as to drive the target crucible to rotate; the lifting mechanism is connected with the rotating mechanism and used for driving the rotating mechanism to lift so as to drive the crucible support to lift and further drive the target crucible to lift, or the lifting mechanism extends into the vacuum chamber and is used for driving the target crucible to lift; the rotating mechanism and the lifting mechanism work in a matched mode to enable the target crucible to enter the induction coil.
According to another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the crucible support is horizontally disposed in the vacuum chamber; the plurality of crucibles are circumferentially distributed on the crucible support; the induction coil is arranged at a position right below the circumference; the lifting mechanism is connected with the rotating mechanism and used for driving the rotating mechanism to ascend so as to drive the crucible support to ascend, and the bottom of the target crucible is higher than the top of the induction coil; the rotating mechanism is used for driving the crucible support to rotate so that the target crucible rotates to a position right above the induction coil along the circumference; the lifting mechanism is also used for driving the rotating mechanism to descend so as to drive the crucible support to descend, so that the target crucible enters the induction coil.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the rotation mechanism includes a rotating motor and a rotating shaft; the rotary motor is arranged below the vacuum chamber, one end of the rotary shaft is connected with the rotary motor, the other end of the rotary shaft penetrates through a bottom plate of the vacuum chamber to extend into the vacuum chamber and be connected with the crucible support, and when the rotary motor works, the rotary shaft is driven to rotate so as to drive the crucible support to rotate.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the elevating mechanism includes an elevating shaft, a base plate, an elevating plate, and an elevating cylinder; the lifting plate is connected with the rotating motor; the lifting shaft is coaxially arranged outside the rotating shaft, one end of the lifting shaft is fixedly connected with the lifting plate in a sealing way, and the other end of the lifting shaft forms a seal with the vacuum chamber bottom plate through the sealing mechanism; the substrate is connected with the sealing mechanism; the cylinder body of the lifting cylinder is fixed on the base plate, and the piston rod of the lifting cylinder is connected with the lifting plate; when the lifting mechanism works, the lifting cylinder drives the lifting plate and the lifting shaft to ascend and descend through the piston rod, and further drives the rotating motor and the crucible support to ascend and descend.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the lifting mechanism further includes an adjusting screw and a nut used in cooperation with the adjusting screw, wherein one end of the adjusting screw is connected to the piston rod, the other end of the adjusting screw is connected to the lifting plate through the nut, and the lifting distance of the lifting plate is adjusted by adjusting the position of the nut.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the lifting mechanism further includes a first guide rod, the first guide rod is disposed between the base plate and the lifting plate, one end of the first guide rod is fixed to the base plate, the other end of the first guide rod passes through the lifting plate, and the lifting plate is driven by the piston rod to ascend and descend along the first guide rod.
According to still another aspect of the present invention, the high-frequency induction heating evaporation apparatus further comprises a first positioning mechanism connected to the rotating mechanism for triggering the rotating mechanism to stop operating when the target crucible is detected to rotate to a position directly above the induction coil.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the first positioning mechanism includes a plurality of first photoelectric positioning switches equal in number to the number of crucibles and a first positioning piece; the first positioning piece is arranged on the rotating shaft, and the rotating shaft rotates to drive the first positioning piece to rotate; the first photoelectric positioning switches correspond to the crucibles in a one-to-one manner, and the positions of the first photoelectric positioning switches are configured such that when the target crucible rotates to a position right above the induction coil, the first positioning sheet just rotates to a position where the first photoelectric positioning switch corresponding to the target crucible is located, the first photoelectric positioning switch is triggered to generate a control signal for controlling the rotating motor to stop working, and the control signal is sent to the rotating motor.
According to still another aspect of the present invention, the high-frequency induction heating evaporation apparatus further comprises an antifouling plate and a second guide bar, both of which are provided in the vacuum chamber; the anti-fouling plate is arranged above the plurality of crucibles and is movably connected with the crucible support, wherein an opening is formed in the position, corresponding to the induction coil, of the anti-fouling plate; one end of the second guide rod is fixed on the bottom plate of the vacuum chamber, the other end of the second guide rod penetrates through the anti-fouling plate, and the anti-fouling plate is driven by the crucible support to ascend and descend along the second guide rod.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the crucible support is horizontally disposed in the vacuum chamber; the plurality of crucibles are circumferentially distributed on the crucible support; the induction coil is arranged at a position right above the circumference; the rotating mechanism is used for driving the crucible support to rotate so that the target crucible rotates to a position right below the induction coil along the circumference; the lifting mechanism extends into the vacuum chamber from a position directly below the induction coil and is used for driving the target crucible to leave the crucible support and ascend into the induction coil and driving the target crucible to descend to leave the induction coil and return to the crucible support.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the rotation mechanism includes a rotating motor and a rotating shaft; the rotary motor is arranged outside the vacuum chamber, one end of the rotary shaft is connected with the rotary motor, the other end of the rotary shaft extends into the vacuum chamber and is connected with the crucible support, and when the rotary motor works, the rotary shaft is driven to rotate so as to drive the crucible support to rotate.
According to still another aspect of the present invention, the high-frequency induction heating evaporation apparatus further comprises a second positioning mechanism connected to the rotation mechanism for triggering the rotation mechanism to stop operating when the target crucible is detected to rotate to a position directly below the induction coil.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the second positioning mechanism includes a plurality of second photoelectric positioning switches equal in number to the number of crucibles and a second positioning piece; the second positioning piece is arranged on the rotating shaft, and the rotating shaft rotates to drive the positioning piece to rotate; the second photoelectric positioning switches correspond to the crucibles in a one-to-one manner, and the positions of the second photoelectric positioning switches are configured such that when the target crucible rotates to a position right below the induction coil, the second positioning piece just rotates to a position where the second photoelectric positioning switch corresponding to the target crucible is located, the second photoelectric positioning switch is triggered to generate a control signal for controlling the rotating motor to stop working, and the control signal is sent to the rotating motor.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the elevating mechanism includes an elevating motor, an elevating rod, and a crucible base; the lifting motor is arranged below the vacuum chamber, one end of the lifting rod is connected with the lifting motor, the other end of the lifting rod extends into the vacuum chamber, and the crucible base is arranged at one end of the lifting rod in the vacuum chamber; when the lifting mechanism works, the lifting motor drives the lifting rod to ascend so that the crucible base lifts the target crucible to leave the crucible support and enter the induction coil, and drives the lifting rod to descend so that the crucible base drives the target crucible to leave the induction coil and return to the crucible support.
According to still another aspect of the present invention, the high-frequency induction heating evaporation apparatus further comprises a third positioning mechanism connected to the elevating mechanism for triggering the elevating mechanism to stop operating when the target crucible is detected to enter the induction coil, and for triggering the elevating mechanism to stop operating when the target crucible is detected to leave the induction coil and return to the crucible support.
According to still another aspect of the present invention, in the high-frequency induction heating evaporation apparatus, the third positioning mechanism includes a third positioning piece, a third photoelectric positioning switch, and a fourth photoelectric positioning switch; the third positioning piece is arranged on the lifting rod, and the lifting rod rises and falls to drive the positioning piece to rise and fall; the positions of the third photoelectric positioning switch and the fourth photoelectric positioning switch are configured in such a way that when the target crucible enters the induction coil, the third positioning sheet moves right to the position of the third photoelectric positioning switch, the third photoelectric positioning switch is triggered to generate a control signal for controlling the lifting motor to stop working and send the control signal to the lifting motor, and when the target crucible returns to the crucible support, the third positioning sheet moves right to the position of the fourth photoelectric positioning switch, the fourth photoelectric positioning switch is triggered to generate a control signal for controlling the lifting motor to stop working and send the control signal to the lifting motor.
According to still another aspect of the present invention, the high-frequency induction heating evaporation apparatus further comprises an antifouling plate fixedly provided in a position above the plurality of crucibles in the vacuum chamber, and an opening is provided in a position corresponding to the induction coil.
The high-frequency induction heating evaporation device provided by the invention drives a target crucible in a plurality of crucibles on the crucible support to enter the induction coil arranged on the fixed position through the moving mechanism, and heats and evaporates the coating material in the target crucible by introducing high-frequency current into the induction coil so as to realize the coating process. Compared with the prior art, the high-frequency induction heating device provided by the invention has the advantages that: (1) the high-frequency induction heating evaporation device provided by the invention can be suitable for various application scenes with different requirements on the capacity and the type of the coating material; (2) the number of the crucibles can be increased or decreased arbitrarily according to specific requirements within the allowable space range, the layout is convenient, and the customization degree is high; (3) because only one evaporation source is provided, only one set of power supply system for providing high-frequency current is needed, namely, the number of crucibles is increased, and the number of power supply systems is not needed to be additionally increased, so that the cost of the high-frequency induction heating evaporation device is effectively saved.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
FIG. 1 is a schematic cross-sectional view of one embodiment of a prior art high frequency induction heating evaporation apparatus;
FIG. 2 is a schematic configuration diagram of one embodiment of a high-frequency induction heating evaporation apparatus according to the present invention;
FIG. 3 is a schematic top view of the antifouling plate in the high-frequency induction heating evaporation apparatus shown in FIG. 2;
fig. 4 to 6 are schematic views illustrating an operation of the high-frequency induction heating vaporizing device shown in fig. 2;
FIG. 7 is a schematic configuration diagram of another embodiment of the high-frequency induction heating evaporation apparatus according to the present invention;
FIG. 8 is a schematic view showing the target crucible of the high-frequency induction heating evaporation apparatus shown in FIG. 7 being introduced into an induction coil.
The same or similar reference numbers in the drawings identify the same or similar elements.
Detailed Description
For a better understanding and explanation of the present invention, reference will now be made in detail to the present invention as illustrated in the accompanying drawings.
The present invention provides a high-frequency induction heating evaporation apparatus, including:
the crucible sealing device comprises a plurality of crucibles, crucible supports, induction coils, a moving mechanism and a sealing mechanism, wherein the crucibles, the crucible supports and the induction coils are arranged in a vacuum chamber, and the moving mechanism is arranged outside the vacuum chamber;
the plurality of crucibles are used for containing coating materials;
the crucible support is used for supporting the plurality of crucibles;
the moving mechanism extends into the vacuum chamber and is connected with the crucible support and used for driving a target crucible in the plurality of crucibles to move so that the target crucible enters the induction coil;
the induction coil is used for heating and evaporating the coating material in the target crucible by introducing high-frequency current;
the sealing mechanism is arranged between the moving mechanism and the vacuum chamber and is used for forming sealing between the moving mechanism and the vacuum chamber.
Next, the structure of the high-frequency induction heating evaporation apparatus provided by the present invention will be explained.
Specifically, in the present invention, the plurality of crucibles means crucibles whose number is two or more. The plurality of crucibles are arranged in a vacuum chamber of the coating machine and used for containing coating materials. The specific number of crucibles depends on the actual requirements of the coating process and the size of the vacuum chamber of the coater. The specific coating material contained in each crucible depends on the actual requirements of the coating process. That is, in some applications the same coating material is contained in the plurality of crucibles, while in other applications a different coating material is contained in the plurality of crucibles. The specific shape and capacity of the crucible is not limited in any way herein. The crucible may be made of a material having a specific resistivity (ρ/n Ω · m), a high temperature resistance, and no reaction with the coating material, and the specific resistivity is preferably 50 to 100, for example, a graphite crucible, a tungsten crucible, or a molybdenum crucible. In some application scenarios, the same crucible may be used for evaporation; in other application scenarios, different crucibles may be required for evaporating different coating materials. Therefore, the present invention is not limited to whether or not the plurality of crucibles used in the high-frequency induction evaporation apparatus are the same.
The crucible support is arranged in a vacuum chamber of the film coating machine and is used for supporting a plurality of crucibles. The crucible support is made of insulating materials. In this embodiment, the material of the crucible holder is quartz. It will be understood by those skilled in the art that in other embodiments, the material of the crucible support is not limited to quartz, and any material that has high temperature resistance and can support multiple crucibles falls within the scope of the present invention, and for the sake of brevity, all possible materials for the crucible support will not be listed. The invention does not limit the specific shape of the crucible support, and the crucible support which can support the crucible and ensure that the crucible body can enter the induction coil to heat and evaporate the coating material in the induction coil is included in the protection scope of the invention.
The moving mechanism is arranged outside a vacuum chamber of the coating machine, extends into the vacuum chamber, is connected with the crucible support, and is used for driving a crucible (hereinafter referred to as a target crucible) where a coating material to be evaporated is located to move so as to enable the target crucible to enter the induction coil. The moving mechanism can be, for example, a lifting mechanism, a rotating mechanism, a conveying mechanism, etc., and accordingly, the manner in which the moving mechanism drives the crucible support to move includes ascending, descending, translating, rotating, etc. The moving mechanism can drive the target crucible to move only by driving the crucible support to move so as to enable the target crucible to enter the induction coil, and can also combine driving the crucible support to move and directly driving the target crucible to move so as to enable the target crucible to enter the induction coil. The specific form of the moving mechanism is not limited, and all moving mechanisms which can drive the crucible support to move to drive the target crucible to enter the induction coil or moving mechanisms which can drive the crucible support to move and directly drive the target crucible to move to enable the target crucible to enter the induction coil are included in the protection scope of the invention.
The induction coil is arranged in a vacuum chamber of the film coating machine and used for heating and evaporating the coating material in the crucible in the induction coil by introducing high-frequency current. In the present invention, the induction coil is disposed at a fixed position in the vacuum chamber. Before the coating material in any crucible is heated and evaporated, the crucible needs to enter the induction coil, and the induction coil is arranged at a fixed position, so that the coating material in all crucibles is heated and evaporated at the same position, namely, the high-frequency induction heating and evaporating device provided by the invention only has one evaporation source and the position of the evaporation source is fixed, and thus, the consistency of evaporation angles and the consistency of film thickness distribution can be effectively ensured. The induction coil generates heat after being introduced with high-frequency current, and is preferably formed by winding a hollow copper pipe in order to prevent the induction coil from being burnt out, and the induction coil is cooled by introducing cooling liquid (such as water) into the induction coil. In addition, because a certain gap must be left between the induction coil and the crucible, when the induction coil is wound to set the diameter of the coil, the crucible is required to be ensured not to contact with the induction coil after entering the induction coil.
The sealing mechanism is arranged between the moving mechanism and the vacuum chamber and is used for forming a seal between the moving mechanism and the vacuum chamber so as to prevent external air from entering the vacuum chamber along with the moving mechanism to damage a vacuum environment required by coating. According to whether relative motion exists between the moving mechanism and the vacuum chamber, the sealing mechanism adopts a static sealing mode or a dynamic sealing mode correspondingly.
When the high-frequency induction heating evaporation device is operated, after the target crucible is determined, the moving mechanism moves the target crucible into the induction coil located at a fixed position by means of, for example, ascending, descending, rotating, translating, and the like, that is, the induction coil is wound around the body of the target crucible. And after the target crucible enters the induction coil, the moving mechanism stops working. And then, introducing high-frequency current into the induction coil, and heating and evaporating the coating material in the target crucible. And after the evaporation of the coating material in the target crucible is finished, determining the next crucible to be heated and evaporated as a new target crucible. After the new target crucible is determined, the moving mechanism needs to firstly move the target crucible which is positioned in the induction coil and has completed evaporation out of the induction coil, and then continuously move the new target crucible into the induction coil by means of lifting, descending, rotating, translating and the like, so as to heat and evaporate the coating material in the new target crucible. And repeating the steps until the coating materials in the plurality of crucibles are completely heated and evaporated, and finishing the coating process.
Preferably, the moving mechanism comprises a lifting mechanism and a rotating mechanism, wherein the rotating mechanism extends into the vacuum chamber and is connected with the crucible support and used for driving the crucible support to rotate so as to drive the target crucible to rotate; the lifting mechanism is connected with the rotating mechanism and used for driving the rotating mechanism to lift so as to drive the crucible support to lift and further drive the target crucible to lift, or the lifting mechanism extends into the vacuum chamber and is used for driving the target crucible to lift. The rotating mechanism and the lifting mechanism work together to enable the target crucible to enter the induction coil. Specifically, for the mode that the lifting mechanism is connected with the rotating mechanism, the rotating mechanism drives the crucible support to rotate so as to drive the target crucible to rotate, the lifting mechanism drives the rotating mechanism to lift so as to drive the crucible support to lift and further drive the target crucible to lift, and the target crucible can enter the induction coil by reasonably designing the positions of the crucible support, the induction coil, the lifting mechanism and the rotating mechanism; for the mode that the lifting mechanism extends into the vacuum chamber, the rotating mechanism drives the crucible support to rotate so as to drive the target crucible to rotate, the lifting mechanism drives the target crucible to lift, and the target crucible can enter the induction coil by reasonably designing the positions of the crucible support, the induction coil, the lifting mechanism and the rotating mechanism. The two modes are described below in two specific examples.
Referring to fig. 2, fig. 2 is a schematic structural diagram of an embodiment of a high-frequency induction heating evaporation apparatus according to the present invention. In the high-frequency induction heating apparatus shown in fig. 2, the rotating mechanism and the lifting mechanism work in a matching manner, and the crucible support is driven to drive the target crucible to enter the induction coil for heating and evaporation.
Specifically, as shown in the drawing, in the present embodiment, two identical crucibles, hereinafter referred to as a crucible 10a and a crucible 10b, respectively, are used to contain the plating material. It will be understood by those skilled in the art that the number of crucibles equal to 2 is only an illustrative example, and in other embodiments, the number of crucibles may be more than 2, such as 3, 4, 5, 6, etc., and the number of crucibles may be increased or decreased according to the actual requirement of the coating process, as the size of the vacuum chamber space of the coater allows. Furthermore, it will be understood by those skilled in the art that the same crucible is used for coating, and that in other embodiments, a different crucible may be used to contain the coating material.
The crucible support 20 is horizontally arranged in a vacuum chamber of the film plating machine. In this embodiment, the crucible holder 20 is designed in a disk shape, and holes having the same number as that of crucibles are formed thereon. Wherein, the shape of hole and the cross section (being on a parallel with the cross section of crucible bottom surface) phase-match, but the size of hole slightly is lighter than the size at crucible opening position to after making put the crucible into the hole, the crucible body part can pass through this hole but crucible opening position can't pass through this hole, that is to say, the crucible is suspended on the crucible support, and so, on the one hand the crucible support removes and can drive the crucible and remove, on the other hand because the crucible body is not sheltered from so follow-up convenient for the crucible enter induction coil 30. The holes in the crucible holder 20 are distributed along a circumference centered on the center of the disk. Preferably, the holes in the crucible support 20 are evenly distributed along a circumference centered on the center of the disk. In this embodiment, the two holes of the crucible holder 20 are located at both ends of one diameter of the circumference, respectively. Since the holes in the crucible support 20 are circumferentially distributed, the placement of crucibles on the crucible support 20 also appears circumferentially distributed. Further, in the present embodiment, the material of the crucible holder 20 is quartz.
Preferably, the high-frequency induction heating evaporation device provided by the invention further comprises a heat insulation seat 11, wherein the heat insulation seat 11 is arranged between the crucible support 20 and the crucible, and the melting point of the heat insulation seat 11 is higher than the evaporation temperature of the coating material. The purpose of setting up thermal-insulated seat 11 lies in: most of the coating materials must be evaporated at an evaporation temperature of 1000 to 2000 c, and when the evaporation temperature of the coating material is higher than the melting point of the crucible support 20, the crucible support 20 is melted at a place where the coating material contacts the crucible, thereby causing the crucible support 20 to be not normally used, and therefore, by providing the heat insulation seat 11 having a high melting point between the crucible and the crucible support 20, a heat insulation effect can be achieved to effectively prevent the crucible support 20 from being melted. In this embodiment, the material of the thermal insulation seat 11 may be selected from ceramic or graphite. It will be understood by those skilled in the art that the material of the thermal insulating base 11 is not limited to ceramics and graphite, and any material having a melting point higher than the evaporation temperature of the coating material is suitable for the present invention. In this embodiment, the shape of the heat shield 11 matches the shape of the crucible, and its size is slightly larger than the size of the crucible, so that the crucible can be just placed in the heat shield 11. When the crucible insulation device is used, a crucible sleeved with the insulation seat 11 is placed on the crucible support 20, and the crucible support 20 can be effectively isolated from the crucible.
The number of the induction coils 30 is one, and the induction coils are arranged at a position right below the circumference of the crucible support 20 where the holes are formed. That is, when the crucible holder 20 is rotated along its central axis (i.e., an axis perpendicular to and passing through the center of the disk), the holes of the crucible holder 20 pass right above the induction coil 30. In this embodiment, the induction coil 30 is fixed to the bottom plate 40 of the coater vacuum chamber. The induction coil 30 is formed by winding a hollow copper pipe, two ports of the hollow copper pipe extend out of a vacuum chamber of the coating machine, and the two ports are respectively used as an input port and an output port of cooling liquid and used for introducing the cooling liquid to cool the induction coil 30 in work. In addition, the port of the hollow copper tube located outside the vacuum chamber is also connected to a power supply for supplying high frequency current to the induction coil 30.
Preferably, the high-frequency induction heating vaporizing apparatus provided by the present invention further comprises a heat insulating cylinder 12, wherein the induction coil 30 is wound around the outer surface of the sidewall of the heat insulating cylinder 12. The heat insulating cylinder 12 is made of an insulating material such as ceramics or quartz glass. The size of the heat insulating cylinder 12 is larger than that of the crucible, thereby ensuring that the crucible can enter the heat insulating cylinder 12. When the induction coil 30 is energized with high-frequency current, a high-frequency electromagnetic field is generated, the coating material in the crucible generates strong eddy current under the induction of the high-frequency electromagnetic field, so that the coating material is heated and evaporated, and the heat insulation cylinder 12 surrounds the crucible, so that the heat in the crucible can be effectively prevented from being dissipated, and the heating and evaporation of the coating material are facilitated.
The moving mechanism further comprises a lifting mechanism and a rotating structure, wherein the lifting mechanism is connected with the rotating structure, and the rotating structure extends into the vacuum chamber and is connected with the crucible support 20. The lifting mechanism is used for driving the crucible support 20 to ascend through driving the rotating mechanism to ascend, and then driving the bottom of the target crucible located on the crucible support 20 to be higher than the top of the induction coil 30, the rotating mechanism is used for driving the crucible support 20 to rotate so that the target crucible rotates to the position right above the induction coil 30 along the circumference where the target crucible is located, and the lifting mechanism is further used for driving the rotating mechanism to descend so as to drive the crucible support 20 to descend, and then driving the target crucible to descend to enter the induction coil 30.
As shown in fig. 2, the rotation mechanism further includes a rotation motor 60 and a rotation shaft 61. The rotating motor 60 is disposed below the vacuum chamber, one end of the rotating shaft 61 is connected to the rotating motor 60, and the other end of the rotating shaft 61 extends into the vacuum chamber through the bottom plate 40 of the vacuum chamber and is connected to the crucible support 20, so that the rotating shaft 61 is driven to rotate and the crucible support 20 is driven to rotate when the rotating motor 60 is operated. In this embodiment, the crucible support 20 is designed to be a disk shape, the rotating shaft 61 is connected with the center of the crucible support 20, and the rotating shaft 61 drives the crucible support 20 to rotate along the central axis thereof when rotating, so that the crucible on the crucible support 20 moves along the circumference of the distribution of the crucible. In the present embodiment, the rotary electric machine 60 can be realized by a high-precision rotary electric machine such as a servo motor.
As shown in fig. 2, the elevating mechanism further includes an elevating shaft 70, a base plate 71, an elevating plate 72, and an elevating cylinder 73. Specifically, in the present embodiment, the elevating shaft 70 is coaxially disposed outside the rotating shaft 61, wherein a sealing mechanism 50 (hereinafter referred to as a first sealing mechanism 50) is disposed between the upper end of the elevating shaft 70 and the vacuum chamber bottom plate 40, the first sealing mechanism 50 adopts a dynamic sealing manner, specifically, a reciprocating linear motion sealing manner, and the lower end of the elevating shaft 70 is fixedly connected with the elevating plate 72. The rotating shaft 61 passes through the lifting shaft 70, wherein a sealing mechanism (not shown in the figure, hereinafter referred to as a second sealing mechanism) is arranged between the rotating shaft 61 and the lifting shaft 70, and the second sealing mechanism adopts a dynamic sealing mode, in particular a rotary sealing mode. Due to the existence of the first sealing mechanism 50 and the second sealing mechanism, air cannot enter the vacuum chamber during the lifting process of the lifting shaft 70 and the rotating process of the rotating shaft 61, so that the coating can be carried out in a vacuum environment. The rotating motor 60 is fixed to the lifting plate 72 by a fixing structure such as a bracket. The base plate 71 is fixed to the first sealing mechanism 50 and is positioned above the elevating plate 72. The cylinder body of the elevating cylinder 73 is fixed to the base plate 71, and the piston rod 74 of the elevating cylinder 73 is connected to the elevating plate 72. In the present embodiment, the bottom of the lifting cylinder 73 is fixed on the base plate 71, and the piston rod 74 of the lifting cylinder 73 passes through the base plate 71 and is connected with the lifting plate 72. In other embodiments, the lifting cylinder 73 may also be disposed between the base plate 71 and the lifting plate 72, wherein the top of the lifting cylinder 73 is fixed to the base plate 71, and the piston rod 74 of the lifting cylinder 73 is connected to the lifting plate 72. When the lifting mechanism works, the lifting cylinder 73 drives the lifting plate 72 and the lifting shaft 70 to ascend and descend through the piston rod 74, the ascending and descending of the lifting plate 72 and the lifting shaft 70 drive the rotating motor 60 to ascend and descend, the ascending and descending of the rotating motor 60 drive the rotating bracket 20 to ascend and descend, and the ascending and descending of the rotating bracket 20 drive the crucible to ascend and descend. Specifically, when the lifting cylinder 73 extends out of the piston rod 74, the piston rod 74 pushes the lifting plate 72 to perform a descending motion, at this time, the lifting plate 72 moves towards a direction away from the base plate 71, the rotating motor 60 correspondingly descends along with the descending of the lifting plate 72, and the descending of the rotating motor 60 drives the crucible support 20 and the crucible located thereon to perform a descending motion; when the lifting cylinder 73 retracts the piston rod 74 inwards, the piston rod 74 pulls the lifting plate 72 to move upwards, at this time, the lifting plate 72 moves towards the direction close to the base plate 71, the rotating motor 60 correspondingly rises along with the lifting of the lifting plate 72, and the rising of the rotating motor 60 drives the crucible support 20 and the crucible positioned on the crucible support to move upwards. When the piston rod 74 of the lifting cylinder 73 is fully extended, the lifting plate 72 stops descending, and the rotary motor 60, the crucible support 20 and the crucible also stop descending; when the piston rod 74 pulls the elevating plate 72 to be raised to contact with the bottom of the elevating cylinder 73 (in this embodiment, the elevating plate 72 stops being raised after contacting with the base plate 71, and the bottom of the elevating cylinder 73 is fixed to the base plate 71, which corresponds to the elevating plate 72 contacting with the bottom of the elevating cylinder 73), the elevating plate 72 stops being raised, and the rotary motor 60, the crucible support 20, and the crucible also stop being raised. In the present embodiment, the lifting distance of the lifting plate 72 is defined as the distance between the position of the lifting plate 72 when it stops descending and the position of the lifting plate when it stops ascending, and since the position of the bottom of the lifting cylinder 73 is the position of the lifting plate 72 when it stops ascending, the lifting distance of the lifting plate 72 is equal to the distance between the lifting plate 72 and the bottom of the lifting cylinder 73 when the piston rod 74 is fully extended.
Preferably, in order to enable the lifting distance of the lifting plate 72 to be flexibly adjusted to adapt to various application scenarios, the lifting mechanism further includes an adjusting screw 75 and a nut 76, and the adjusting screw 75 and the nut 76 are cooperatively used to achieve adjustment of the lifting distance of the lifting plate 72. Specifically, one end of the adjusting screw 75 is connected with the piston rod 74, the other end of the adjusting screw is connected with the lifting plate 72 through the nut 76, and the connecting position between the lifting plate 72 and the adjusting screw 75 can be changed through the adjusting nut 76, so that the distance between the lifting plate 72 and the bottom of the lifting cylinder 73 when the piston rod 74 is completely extended is changed, and the lifting distance of the lifting plate 72 is further changed. In practical applications, the length of the piston rod 74 and the length of the adjusting screw 75 in the lifting cylinder 73 can be set according to the specific requirements of the lifting distance range of the lifting plate 72.
Preferably, the lifting mechanism further includes a guide rod 77 (hereinafter, referred to as a first guide rod 77), the first guide rod 77 is disposed between the base plate 71 and the lifting plate 72, one end of the first guide rod 77 is fixed to the base plate 71, and the other end passes through the lifting plate 72, and the lifting plate 72 is driven by the piston rod 74 to ascend and descend along the first guide rod 77. Specifically, in the present embodiment, the number of the first guide rods 77 is one. The present invention is not limited in any way as to the position where the first guide rod 77 is disposed, and in the present embodiment, the first guide rod 77 and the elevating shaft 70 are distributed on both sides of the piston rod 74. When the lifting mechanism works, the lifting plate 72 moves along the first guide rod 77 while moving along the piston rod 74, the first guide rod 77 plays a good role in guiding the lifting plate 73, and the vertical lifting of the lifting plate 72 is effectively ensured, so that the vertical lifting of the lifting shaft 70 is ensured, and further the vertical lifting of the crucible support 20 and the crucible is ensured.
Preferably, the high-frequency induction heating evaporation device provided by the invention further comprises a first positioning mechanism, wherein the first positioning mechanism is connected with the rotating mechanism and is used for triggering the rotating mechanism to stop working when the target crucible is detected to rotate to be right above the induction coil 30. Specifically, in the present embodiment, the first positioning mechanism includes a first positioning sheet and a plurality of first photoelectric positioning switches, wherein the number of the first photoelectric positioning switches is equal to the number of crucibles (in the present embodiment, the number of the crucibles is equal to 2, and the number of the first photoelectric positioning switches is also equal to 2, which are respectively denoted by reference numerals 81a and 81b in fig. 2). In the present embodiment, the first positioning piece is implemented with a positioning pointer 80. The positioning pointer 80 is fixed on the rotating shaft 61, and the rotating shaft 61 drives the positioning pointer 80 to rotate synchronously when rotating; a plurality of first photoelectric positioning switches are arranged around the rotating shaft 61 in a one-to-one correspondence with the plurality of crucibles, wherein the positions of the plurality of first photoelectric positioning switches are configured to: when the target crucible rotates to the position right above the induction coil 30, the positioning pointer 80 just rotates to the position of the first photoelectric positioning switch corresponding to the target crucible, the first photoelectric positioning switch is triggered to generate a control signal for controlling the rotating motor 60 to stop working, the control signal is sent to the rotating motor 60, and the rotating motor 60 stops working after receiving the control signal, so that the target crucible stops being right above the induction coil 30. In one arrangement, the angle formed between the positioning pointer 80 and any one of the plurality of crucibles is equal to the angle formed between the first photoelectric positioning switch corresponding to the crucible and the induction coil 30, so that when the positioning pointer 80 rotates to the position of the first photoelectric positioning switch, the crucible corresponding to the first photoelectric positioning switch rotates to the position right above the induction coil 30. That is, once the positioning pointer 80 blocks the optical path between the transmitter and the receiver of a first photoelectric positioning switch, it indicates that the crucible corresponding to the first photoelectric positioning switch is rotated to the position right above the induction coil 30. It will be understood by those skilled in the art that the first positioning sheet is not limited to the form of positioning pointer, and in another embodiment, the first positioning sheet can be implemented by a baffle plate with an opening, wherein an angle formed between the opening in the baffle plate and any one of the plurality of crucibles is equal to an angle formed between the first photoelectric positioning switch corresponding to the any one of the crucibles and the induction coil 30, so that when the opening in the baffle plate is rotated to a position where the first photoelectric positioning switch is located, the crucible corresponding to the first photoelectric positioning switch is rotated to a position just above the induction coil 30. That is, once an optical path is established between the transmitter and the receiver of one of the first photoelectric positioning switches, it is described that the crucible corresponding to the first photoelectric positioning switch is rotated right above the induction coil 30, and at this time, the first photoelectric positioning switch generates a control signal for controlling the rotation motor 60 to stop operating and transmits the control signal to the rotation motor 60, and the rotation motor 60 stops operating upon receiving the control signal, so that the target crucible stops right above the induction coil 30. The first positioning sheet and the first photoelectric positioning switch are used for positioning the target crucible, and the advantages are that: high accuracy rotating electrical machines (for example servo motor) can guarantee that the target crucible accurately rotates to induction coil 30 directly over, but high accuracy rotating electrical machines often is expensive, can directly lead to the improvement of high frequency induction heating evaporation plant overall cost, and use first spacer and first photoelectric positioning switch also can accurately fix a position the target crucible, use with ordinary rotating electrical machines cooperation and can reach the effect the same with high accuracy rotating electrical machines, but be less than high accuracy rotating electrical machines far away in the cost, consequently greatly reduced high frequency induction heating evaporation plant's overall cost. It will be further understood by those skilled in the art that the above-mentioned first positioning sheet and the plurality of first photoelectric positioning switches are only preferred embodiments, and in other embodiments, all positioning mechanisms capable of accurately positioning the target crucible are included in the scope of the present invention, and are not listed here for the sake of brevity.
Preferably, the high-frequency induction heating evaporation device provided by the invention further comprises an anti-fouling plate 90 and a guide rod 91 (hereinafter, referred to as a second guide rod 91) for preventing the coating material in the target crucible from polluting the coating material in other crucibles when the coating material is heated and evaporated. Specifically, the antifouling plate 90 and the second guide bar 91 are both provided in the vacuum chamber. The anti-fouling plate 90 is disposed above the plurality of crucibles and is movably connected to the crucible support 20 by, for example, a bearing 92. One end of the second guide bar 91 is fixed to the vacuum chamber bottom plate 40, and the other end passes through the contamination prevention plate 90. The number of the second guide bars 91 is not limited, and may be one or more. In the present embodiment, the number of the second guide bars is 2. On one hand, because the anti-fouling plate 90 is movably connected with the crucible support 20 through the bearing 92, the anti-fouling plate 90 only ascends and descends along with the crucible support 20, but cannot rotate along with the crucible support 20; on the other hand, the presence of the second guide bar 91 further restricts the rotation of the dirt preventing plate 90, and at the same time, the vertical lifting and lowering of the dirt preventing plate 90 can be ensured. The position of the anti-fouling plate 90 corresponding to the induction coil 30 is provided with an opening (please refer to fig. 3), so that the coating material in the target crucible is exposed in the vacuum chamber during the operation of the high-frequency induction heating evaporation device, and other crucibles outside the target crucible are shielded by the anti-fouling plate 90, thereby effectively preventing the coating material in the target crucible from being polluted when being heated and evaporated.
Next, the operation of the high-frequency induction heating evaporation apparatus shown in fig. 2 will be described with reference to fig. 4 to 6.
Specifically, the high-frequency induction heating evaporation apparatus shown in fig. 2 includes a crucible 10a and a crucible 10b, and the crucibles 10a and 10b are circumferentially distributed on a crucible support 20, specifically, at both ends of the circumferential diameter. In fig. 2 the crucible 10a is located within the induction coil 30, that is, the current target crucible is the crucible 10 a. It is assumed here that the evaporation of the coating material in the crucible 10a is complete and that the evaporation of the coating material in the crucible 10b is to take place next, i.e. the crucible 10b will be the new target crucible. The first photoelectric positioning switch 81a and the first photoelectric positioning switch 81b correspond to the crucible 10a and the crucible 10b, respectively, and the positioning pointer 80 is located right between the transmitter and the receiver of the first photoelectric positioning switch 81 a. In the present embodiment, the positions between the positioning pointer 80, the first photoelectric positioning switch 81a, the first photoelectric positioning switch 81b, the crucible 10a, the crucible 10b, and the induction coil 30 are configured to: the angle formed by the positioning pointer 80 and the crucible 10a is equal to 180 °, and the angle formed between the first photoelectric positioning switch 81a and the induction coil 30 is equal to 180 °; the angle formed by the positioning finger 80 and the crucible 10b is equal to 0 °, and the angle formed between the first photoelectric positioning switch 81b and the induction coil 30 is equal to 0 °. Further, when the crucible 10a is positioned in the induction coil 30, the piston rod 74 of the elevation cylinder 73 is fully extended, and the elevation plate 72 is lowered to the lowermost position.
Referring to FIG. 4, after determining that the new target crucible is the crucible 10b, the crucible 10a needs to be removed from the induction coil 30. As shown in fig. 4, the lifting cylinder 73 retracts the piston rod 74, the piston rod 74 pulls the lifting plate 72 to ascend, the ascending of the lifting plate 72 drives the rotating motor 60 to ascend, the ascending of the rotating motor 60 drives the crucible support 20 and the crucible located thereon to ascend, when the lifting plate 72 reaches the bottom of the lifting cylinder 73, the lifting plate 72 stops ascending, at this time, the bottom of the crucible on the crucible support 20 is higher than the top of the induction coil 30, and the crucible 10a is completely removed from the induction coil 30. Next, referring to fig. 5, the rotation motor 60 starts to operate, and the crucible support 20 and the positioning pointer 80 are rotated by the rotation shaft 61, and the crucible 10a and the crucible 10b on the crucible support 20 are also rotated. After the positioning pointer 80 rotates 180 degrees, the positioning pointer reaches the position of the first photoelectric positioning switch 81b, the light path between the transmitter and the receiver of the first photoelectric positioning switch 81b is shielded by the positioning pointer 80, at this time, the first photoelectric positioning switch 81b is triggered to generate a control signal for controlling the rotating motor 60 to stop working, the control signal is sent to the rotating motor 60, and the rotating motor 60 stops working after receiving the control signal. While the positioning indicator 80 is rotated by 180 °, the crucible 10b is correspondingly rotated by 180 ° just above the induction coil 30, and therefore the crucible 10b stops directly above the induction coil 30 when the rotary motor 60 stops operating. Then, referring to fig. 6, the lifting cylinder 73 extends out of the piston rod 74, the piston rod 74 pushes the lifting plate 72 to descend, the descending of the lifting plate 72 drives the rotating motor 60 to descend, the descending of the rotating motor 60 drives the crucible support 20 and the crucible positioned thereon to descend, the crucible 10 gradually enters the induction coil 30 in the process, when the piston rod 74 of the lifting cylinder 73 is fully extended, the lifting plate 72 reaches the lowest position and does not descend any more, and at the moment, the crucible body of the crucible 10b completely enters the induction coil 30. The induction coil 30 is supplied with a high-frequency current to heat and evaporate the coating material in the crucible 10 b. In the embodiment, the number of the crucibles is two, and in other embodiments, if the number of the crucibles is more than two, the above steps are repeated until all the coating materials in all the crucibles are heated and evaporated, and the coating process is finished.
Referring to fig. 7, fig. 7 is a schematic structural view of another embodiment of the high-frequency induction heating evaporation apparatus according to the present invention. In the high-frequency induction heating apparatus shown in fig. 7, the rotating mechanism drives the crucible support to drive the target crucible to move to a position right below the induction coil, and then the lifting mechanism directly drives the target crucible to ascend to the induction coil for heating and evaporating.
Specifically, in this embodiment, two identical crucibles are used to contain the coating material. As shown in fig. 7, the two crucibles are denoted by crucible 10a 'and crucible 10b', respectively. For the sake of brevity, the description of the crucibles 10a 'and 10b' refers to the description related to the crucibles 10a and 10b in the foregoing, and will not be repeated herein.
The crucible support 20' is horizontally disposed in the vacuum chamber of the coater for supporting the crucible 10a ' and the crucible 10b '. The crucible holder 20 'is the same or substantially the same as the crucible holder 20 in fig. 2, and for the sake of brevity, the description of the crucible holder 20' refers to the description related to the crucible holder 20 in the foregoing, and is not repeated herein.
The number of the induction coils 30 'is one, and the induction coils are arranged at a position right above the circumference of the crucible support 20' where the holes are formed. That is, when the crucible holder 20' is rotated along its central axis (i.e., an axis perpendicular to and passing through the center of the disk), the holes of the crucible holder 20' pass right under the induction coil 30 '. In this embodiment, the induction coil 30' is fixed to the side wall 41 of the coater vacuum chamber.
The moving mechanism includes a rotating mechanism extended into the vacuum chamber to be connected with the crucible holder 20 'and an elevating mechanism extended into the vacuum chamber from a position directly below the induction coil 30'. When the moving mechanism works, firstly, the rotating mechanism drives the crucible support 20' to drive the target crucible to rotate to be right below the induction coil 30', then the lifting mechanism directly drives the target crucible to leave the crucible support 20' and ascend to enter the induction coil, and after evaporation is finished, the lifting mechanism drives the target crucible to descend to leave the induction coil 30' and return to the crucible support 20 '.
As shown in fig. 7, the rotation mechanism further includes a rotation motor 60 'and a rotation shaft 61'. The rotating motor 60' is arranged below the vacuum chamber, one end of the rotating shaft 61' is connected with the rotating motor 60', and the other end extends into the vacuum chamber through the bottom plate 40 of the vacuum chamber to be connected with the crucible support 20', so that the rotating motor 60' drives the rotating shaft 61' to rotate and further drives the crucible support 20' to rotate when in operation. A sealing mechanism 52 '(hereinafter referred to as a third sealing mechanism 52') is disposed between the rotating shaft 61 'and the vacuum chamber bottom plate 40, and the third sealing mechanism 52' adopts a dynamic sealing method, specifically, a rotary sealing method. Due to the existence of the third sealing mechanism 52', air cannot enter the vacuum chamber during the rotation process of the rotating shaft 61', so that the coating can be carried out in a vacuum environment. In the present embodiment, the third seal mechanism 52 'is provided with a fixing plate 63', and the rotating electrical machine 60 'is fixed to the fixing plate 63'. The elevating mechanism further includes an elevating motor 100', an elevating rod 101', and a crucible holder 102 '. The elevating motor 100' is disposed under the vacuum chamber, one end of the elevating rod 101' is connected to the elevating motor 100' and the other end extends into the vacuum chamber, and the crucible holder 102' is disposed on one end of the elevating rod 101' located in the vacuum chamber. Wherein, a fourth sealing mechanism (not shown) is arranged between the lifting rod 101' and the vacuum chamber bottom plate 40, and the fourth sealing mechanism adopts a dynamic sealing mode, in particular a reciprocating linear motion sealing mode. Due to the existence of the fourth sealing mechanism, air cannot enter the vacuum chamber during the lifting process of the lifting rod 101'. The crucible base 102' may be made of high temperature resistant material such as tungsten, molybdenum or graphite. When the lifting mechanism works, the lifting motor 100' drives the lifting rod 101' to ascend so that the crucible base 102' lifts the target crucible out of the crucible support 20' and enters the induction coil 30', and drives the lifting rod 101' to descend so that the crucible base 102' drives the target crucible out of the induction coil 30' and returns to the crucible support 20 '. In this embodiment, the lifting motor 100' may be a high-precision rotating motor such as a servo motor. When the lifting mechanism works, the rotary motion of the lifting motor 100 'is converted into the linear motion of the lifting rod 101', so that the crucible support is driven to ascend and descend. In other embodiments, lift motor 100' may also be implemented as a stepper motor.
Preferably, the high-frequency induction heating evaporation device provided by the invention further comprises a second positioning mechanism, wherein the second positioning mechanism is connected with the rotating mechanism and is used for triggering the rotating mechanism to stop working when the target crucible is detected to rotate to be right below the induction coil 30'. Specifically, in the present embodiment, the second positioning mechanism includes a second positioning sheet and a plurality of second photoelectric positioning switches, wherein the number of the second photoelectric positioning switches is equal to the number of crucibles (in the present embodiment, the number of the crucibles is equal to 2, and the number of the second photoelectric positioning switches is also equal to 2, and is respectively denoted by reference numerals 81a 'and 81b' in fig. 7). The second positioning plate is arranged on the rotating shaft 61', and the rotating shaft 61' rotates to drive the second positioning plate to rotate. The second photoelectric positioning switches correspond to the plurality of crucibles in a one-to-one manner, and the positions of the second photoelectric positioning switches are configured such that when the target crucible rotates to a position right below the induction coil 30', the second positioning piece just rotates to a position where the second photoelectric positioning switch corresponding to the target crucible is located, the second photoelectric positioning switch is triggered to generate a control signal for controlling the rotating motor 61' to stop working, and the control signal is sent to the rotating motor 60 '. In this embodiment, the second positioning piece is implemented by a positioning pointer 80'. For the sake of simplicity, please refer to the related contents of the foregoing description for the first positioning sheet and the first photoelectric positioning switch, and no further description is given here.
Preferably, the high-frequency induction heating evaporation device provided by the invention further comprises a third positioning mechanism, wherein the third positioning mechanism is connected with the lifting mechanism and is used for triggering the lifting mechanism to stop working when the target crucible is detected to enter the induction coil 30' and triggering the lifting mechanism to stop working after the target crucible is detected to leave the induction coil 30' and return to the crucible support 20 '. Specifically, in the present embodiment, the third positioning mechanism includes a third positioning plate, a third photoelectric positioning switch 104', and a fourth photoelectric positioning switch 105'. In this embodiment, the third positioning piece is implemented by a positioning pointer 103'. The positioning pointer 103 'is arranged on the lifting rod 101', and the lifting rod 101 'ascends and descends to drive the positioning pointer 103' to ascend and descend. The positions of the third photoelectric positioning switch 104 'and the fourth photoelectric positioning switch 105' are configured such that when the target crucible enters the induction coil 30', the positioning pointer 103' moves right to the position of the third photoelectric positioning switch 104', the third photoelectric positioning switch 104' is triggered to generate a control signal for controlling the lifting motor 100 'to stop working and send the control signal to the lifting motor 100', and when the target crucible returns to the crucible support and the crucible base 102 'descends to a position that does not affect the crucible support to continue rotating, the positioning pointer 103' moves right to the position of the fourth photoelectric positioning switch 105', the fourth photoelectric positioning switch 105' is triggered to generate a control signal for controlling the lifting motor 100 'to stop working and send the control signal to the lifting motor 100'. In one arrangement, the third and fourth photoelectric position switches 104', 105' are arranged in a line parallel to the lifting rod 101', the distance between the third and fourth photoelectric position switches 104', 105' is exactly equal to the distance the target crucible moves from the crucible support 20' into the induction coil 30', and the target crucible is exactly located in the induction coil 30' when the positioning pointer 103' is located between the transmitter and receiver of the third photoelectric position switch 104', and the target crucible has returned to the crucible support 20' when the positioning pointer 103' is located between the transmitter and receiver of the fourth photoelectric position switch 105 '. In this way, when the target crucible rises into the induction coil 30', the positioning pointer 103' just blocks the light path between the emitter and the receiver of the third photoelectric positioning switch 104', and at this time, the lifting motor 100' stops working and does not drive the lifting rod 101' to continue rising; after the target crucible is returned to the crucible support 20', the positioning pointer 103' is just in the optical path between the emitter and the receiver of the fourth photoelectric positioning switch 105', and the lifting motor 100' stops working and does not drive the lifting rod 101' to descend continuously. The advantages of using the third positioning sheet, the third photoelectric positioning switch and the fourth photoelectric positioning switch to position the target crucible are as follows: high accuracy motor (for example servo motor or step motor) can guarantee that the target crucible accurately rises to induction coil 30 'in, but high accuracy rotating electrical machines often are expensive, can directly lead to the improvement of high frequency induction heating evaporation plant overall cost, and use third spacer, third photoelectric positioning switch and fourth photoelectric positioning switch also can accurately fix a position the target crucible, use with ordinary rotating electrical machines cooperation can reach the effect the same with high accuracy rotating electrical machines, but be far below high accuracy rotating electrical machines in the cost, consequently greatly reduced high frequency induction heating evaporation plant's overall cost. It is further understood by those skilled in the art that the third positioning sheet, the third photoelectric positioning switch and the fourth photoelectric positioning switch are only preferred embodiments, and in other embodiments, all the positioning mechanisms capable of accurately positioning the target crucible are included in the scope of the present invention, and are not listed here for the sake of brevity.
Preferably, the high-frequency induction heating evaporation device provided by the invention further comprises an antifouling plate 90' for preventing the coating material in the target crucible from polluting the coating material in other crucibles when the coating material is heated and evaporated. Specifically, the contamination prevention plate 90 'is fixedly provided in a position above the plurality of crucibles in the vacuum chamber, and a position corresponding to the induction coil 30' is provided with an opening having a size required to ensure that the target crucible can smoothly pass through. The antifouling board 90 'is the same or substantially the same as the antifouling board 90 in fig. 3, and therefore, the structure of the antifouling board 90' can refer to the structure of the antifouling board 90 in fig. 3. The present invention is not limited in any way to the manner in which the anti-fouling plate 90' is fixedly disposed above the plurality of crucibles. In the present embodiment, the contamination preventing plate 90' is fixed above the plurality of crucibles by fixing columns 93', as shown in fig. 7, the fixing columns 93' are also provided in the vacuum chamber, and one end of the fixing column 93' is fixed on the vacuum chamber bottom plate 40 and the other end is fixed with the contamination preventing plate 90 '. The number of the fixing posts 93' is not limited, and may be one or more. The present invention does not limit the connection between the anti-fouling plate 90' and the crucible support 20', and the anti-fouling plate and the crucible support may be movably connected through a bearing 92' or not. The position of the antifouling plate 90 'corresponding to the induction coil 30' is provided with an opening, so that in the working process of the high-frequency induction heating evaporation device, the target crucible rises into the induction coil 30 'through the opening, the coating material therein is exposed in the vacuum chamber, and other crucibles except the target crucible are all positioned below the antifouling plate 90' and are shielded by the antifouling plate, thereby effectively avoiding pollution to the coating material in other crucibles when the coating material in the target crucible is heated and evaporated.
Next, the operation of the high-frequency induction heating evaporation apparatus shown in fig. 7 will be described with reference to fig. 7 and 8, in which fig. 8 is a schematic view of the target crucible of the high-frequency induction heating evaporation apparatus shown in fig. 7 being inserted into the induction coil.
Specifically, the high-frequency induction heating evaporation apparatus shown in fig. 7 includes a crucible 10a ' and a crucible 10b ', and the crucible 10a ' and the crucible 10b ' are circumferentially distributed on a crucible support 20', specifically, at both ends of the circumferential diameter. Assume that crucible 10a ' is the target crucible and that crucible 10a ' has been rotated to just below induction coil 30 '. Referring first to fig. 7, in fig. 7, the lifting motor 100 'drives the lifting rod 101' to ascend, so that the crucible holder 102 'lifts the crucible 10a' away from the crucible support 20', and accordingly, the positioning pointer 103' on the lifting rod 101 'also ascends along with the lifting rod 101'. Referring to fig. 8, as shown in the figure, when the positioning pointer 103 'rises to the position of the third photoelectric positioning switch 104', the optical path between the transmitter and the receiver of the third photoelectric positioning switch 104 'is blocked, and the lifting motor 100' is triggered to stop working, at this time, the crucible body of the crucible 10a 'completely enters the induction coil 30'. The induction coil 30 'is supplied with a high frequency current to heat and evaporate the coating material in the crucible 10 a'.
After the heating evaporation is finished, the lifting motor 100 'drives the lifting rod 101' to descend, so that the crucible base 102 'lifts the crucible 10a' away from the induction coil 30', and correspondingly, the positioning pointer 103' on the lifting rod 101 'also descends along with the lifting rod 101'. When the positioning pointer 103 'descends to the position of the fourth photoelectric positioning switch 105', the light path between the emitter and the receiver of the fourth photoelectric positioning switch 105 'is blocked, the lifting motor 100' is triggered to stop working, and the crucible 10a 'returns to the crucible support 20'. Next, the crucible 10b 'is set as a new target crucible, and the above-described steps are repeated to heat-evaporate the plating material in the crucible 10 b'. In the embodiment, the number of the crucibles is two, and in other embodiments, if the number of the crucibles is more than two, the above steps are repeated until all the coating materials in all the crucibles are heated and evaporated, and the coating process is finished.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned. Furthermore, it will be obvious that the term "comprising" does not exclude other elements, units or steps, and the singular does not exclude the plural. A plurality of components, units or means recited in the system claims may also be implemented by one component, unit or means in software or hardware.
The high-frequency induction heating evaporation device provided by the invention drives a target crucible in a plurality of crucibles on the crucible support to enter the induction coil arranged on the fixed position through the moving mechanism, and heats and evaporates the coating material in the target crucible by introducing high-frequency current into the induction coil so as to realize the coating process. Compared with the prior art, the high-frequency induction heating device provided by the invention has the advantages that: (1) the high-frequency induction heating evaporation device provided by the invention can be suitable for various application scenes with different requirements on the capacity and the type of the coating material; (2) the number of the crucibles can be increased or decreased arbitrarily according to specific requirements within the allowable space range, the layout is convenient, and the customization degree is high; (3) because only one evaporation source is provided, only one set of power supply system for providing high-frequency current is needed, namely, the number of crucibles is increased, and the number of power supply systems is not needed to be additionally increased, so that the cost of the high-frequency induction heating evaporation device is effectively saved.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (12)
1. A high-frequency induction heating evaporation apparatus, comprising:
the crucible sealing device comprises a plurality of crucibles, crucible supports, induction coils, a moving mechanism, a first positioning mechanism and a sealing mechanism, wherein the crucibles, the crucible supports and the induction coils are arranged in a vacuum chamber, the moving mechanism and the first positioning mechanism are arranged outside the vacuum chamber, and the moving mechanism comprises a rotating mechanism and a lifting mechanism;
the plurality of crucibles are used for containing coating materials;
the crucible support is used for supporting the plurality of crucibles;
the rotating mechanism comprises a rotating motor and a rotating shaft, wherein the rotating motor is arranged below the vacuum chamber, one end of the rotating shaft is connected with the rotating motor, the other end of the rotating shaft penetrates through a bottom plate of the vacuum chamber to extend into the vacuum chamber and be connected with the crucible support, and the rotating motor drives the rotating shaft to rotate to drive the crucible support to rotate so as to drive the target crucible to rotate when working;
the first positioning mechanism comprises a first positioning piece and a plurality of first photoelectric positioning switches with the same number as the crucibles, wherein the first positioning piece is arranged on the rotating shaft, and the rotating shaft rotates to drive the first positioning piece to rotate; the first photoelectric positioning switches correspond to the crucibles in a one-to-one manner, and the positions of the first photoelectric positioning switches are configured in such a way that when the target crucible rotates to a position right above the induction coil, the first positioning sheet just rotates to a position where the first photoelectric positioning switch corresponding to the target crucible is located, the first photoelectric positioning switch is triggered to generate a control signal for controlling the rotating motor to stop working, and the control signal is sent to the rotating motor;
the lifting mechanism is connected with the rotating mechanism and used for driving the rotating mechanism to lift so as to drive the crucible support to lift and further drive the target crucible to lift, so that the target crucible enters/leaves the induction coil;
the induction coil is used for heating and evaporating the coating material in the target crucible by introducing high-frequency current;
the sealing mechanism is arranged between the moving mechanism and the vacuum chamber and is used for forming sealing between the moving mechanism and the vacuum chamber.
2. The high-frequency induction heating evaporation apparatus according to claim 1, wherein:
the crucible support is horizontally arranged in the vacuum chamber;
the plurality of crucibles are circumferentially distributed on the crucible support;
the induction coil is arranged at a position right below the circumference;
the lifting mechanism drives the rotating mechanism to ascend to drive the crucible support to ascend, so that the bottom of the target crucible is higher than the top of the induction coil;
the rotating mechanism drives the crucible support to rotate so that the target crucible rotates to be right above the induction coil along the circumference;
the lifting mechanism drives the rotating mechanism to descend so as to drive the crucible support to descend, so that the target crucible enters the induction coil.
3. The high-frequency induction heating evaporation apparatus according to claim 1, wherein:
the lifting mechanism comprises a lifting shaft, a base plate, a lifting plate and a lifting cylinder;
the lifting plate is connected with the rotating motor;
the lifting shaft is coaxially arranged outside the rotating shaft, one end of the lifting shaft is fixedly connected with the lifting plate in a sealing way, and the other end of the lifting shaft forms a seal with the vacuum chamber bottom plate through the sealing mechanism;
the substrate is connected with the sealing mechanism;
the cylinder body of the lifting cylinder is fixed on the base plate, and the piston rod of the lifting cylinder is connected with the lifting plate;
when the lifting mechanism works, the lifting cylinder drives the lifting plate and the lifting shaft to ascend and descend through the piston rod, and further drives the rotating motor and the crucible support to ascend and descend.
4. The high-frequency induction heating evaporation apparatus according to claim 3, wherein the elevating mechanism further comprises:
the lifting device comprises an adjusting screw and a nut matched with the adjusting screw, wherein one end of the adjusting screw is connected with the piston rod, the other end of the adjusting screw is connected with the lifting plate through the nut, and the lifting distance of the lifting plate is adjusted through adjusting the position of the nut.
5. The high-frequency induction heating evaporation apparatus according to claim 3, wherein the elevating mechanism further comprises:
the first guide rod is arranged between the base plate and the lifting plate, one end of the first guide rod is fixed to the base plate, the other end of the first guide rod penetrates through the lifting plate, and the lifting plate is driven by the piston rod to ascend and descend along the first guide rod.
6. The high-frequency induction heating evaporation apparatus according to any one of claims 1 to 5, further comprising:
an antifouling plate and a second guide bar both provided in the vacuum chamber;
the anti-fouling plate is arranged above the plurality of crucibles and is movably connected with the crucible support, wherein an opening is formed in the position, corresponding to the induction coil, of the anti-fouling plate;
one end of the second guide rod is fixed on the bottom plate of the vacuum chamber, the other end of the second guide rod penetrates through the anti-fouling plate, and the anti-fouling plate is driven by the crucible support to ascend and descend along the second guide rod.
7. A high-frequency induction heating evaporation apparatus, comprising:
the crucible sealing device comprises a plurality of crucibles, crucible supports, induction coils, a moving mechanism, a second positioning mechanism and a sealing mechanism, wherein the crucibles, the crucible supports and the induction coils are arranged in a vacuum chamber, the moving mechanism and the second positioning mechanism are arranged outside the vacuum chamber, and the moving mechanism comprises a rotating mechanism and a lifting mechanism;
the plurality of crucibles are used for containing coating materials;
the crucible support is used for supporting the plurality of crucibles;
the rotating mechanism comprises a rotating motor and a rotating shaft, wherein the rotating motor is arranged outside the vacuum chamber, one end of the rotating shaft is connected with the rotating motor, the other end of the rotating shaft extends into the vacuum chamber and is connected with the crucible support, and the rotating motor drives the rotating shaft to rotate to drive the crucible support to rotate so as to drive the target crucible to rotate when working;
the second positioning mechanism comprises a second positioning sheet and a plurality of second photoelectric positioning switches with the same number as the crucibles, wherein the second positioning sheet is arranged on the rotating shaft, and the rotating shaft rotates to drive the positioning sheet to rotate; the second photoelectric positioning switches correspond to the crucibles in a one-to-one manner, and the positions of the second photoelectric positioning switches are configured such that when the target crucible rotates to a position right below the induction coil, the second positioning piece just rotates to a position where the second photoelectric positioning switch corresponding to the target crucible is located, the second photoelectric positioning switch is triggered to generate a control signal for controlling the rotating motor to stop working, and the control signal is sent to the rotating motor;
the lifting mechanism extends into the vacuum chamber and is used for driving the target crucible to lift so as to enable the target crucible to enter/leave the induction coil;
the induction coil is used for heating and evaporating the coating material in the target crucible by introducing high-frequency current;
the sealing mechanism is arranged between the moving mechanism and the vacuum chamber and is used for forming sealing between the moving mechanism and the vacuum chamber.
8. The high-frequency induction heating evaporation apparatus according to claim 7, wherein:
the crucible support is horizontally arranged in the vacuum chamber;
the plurality of crucibles are circumferentially distributed on the crucible support;
the induction coil is arranged at a position right above the circumference;
the rotating mechanism drives the crucible support to rotate so that the target crucible rotates to be right below the induction coil along the circumference;
the lifting mechanism extends into the vacuum chamber from a position directly below the induction coil and is used for driving the target crucible to leave the crucible support and ascend into the induction coil and driving the target crucible to descend to leave the induction coil and return to the crucible support.
9. The high-frequency induction heating evaporation apparatus according to claim 8, wherein:
the lifting mechanism comprises a lifting motor, a lifting rod and a crucible base;
the lifting motor is arranged below the vacuum chamber, one end of the lifting rod is connected with the lifting motor, the other end of the lifting rod extends into the vacuum chamber, and the crucible base is arranged at one end of the lifting rod in the vacuum chamber;
when the lifting mechanism works, the lifting motor drives the lifting rod to ascend so that the crucible base lifts the target crucible to leave the crucible support and enter the induction coil, and drives the lifting rod to descend so that the crucible base drives the target crucible to leave the induction coil and return to the crucible support.
10. The high-frequency induction heating evaporation apparatus according to claim 9, further comprising:
and the third positioning mechanism is connected with the lifting mechanism and used for triggering the lifting mechanism to stop working when the target crucible is detected to enter the induction coil and triggering the lifting mechanism to stop working when the target crucible is detected to leave the induction coil and return to the crucible support.
11. The high-frequency induction heating evaporation apparatus according to claim 10, wherein:
the third positioning mechanism comprises a third positioning sheet, a third photoelectric positioning switch and a fourth photoelectric positioning switch;
the third positioning piece is arranged on the lifting rod, and the lifting rod rises and falls to drive the positioning piece to rise and fall;
the positions of the third photoelectric positioning switch and the fourth photoelectric positioning switch are configured in such a way that when the target crucible enters the induction coil, the third positioning sheet moves right to the position of the third photoelectric positioning switch, the third photoelectric positioning switch is triggered to generate a control signal for controlling the lifting motor to stop working and send the control signal to the lifting motor, and when the target crucible returns to the crucible support, the third positioning sheet moves right to the position of the fourth photoelectric positioning switch, the fourth photoelectric positioning switch is triggered to generate a control signal for controlling the lifting motor to stop working and send the control signal to the lifting motor.
12. The high-frequency induction heating evaporation apparatus according to any one of claims 7 to 11, further comprising:
and the antifouling plate is fixedly arranged at a position above the plurality of crucibles in the vacuum chamber, and an opening is arranged at a position corresponding to the induction coil.
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| IL313125A (en) * | 2018-11-30 | 2024-07-01 | Ferrotec Usa Corp | Crucible cover for coating with an electron beam source |
| CN109536914A (en) * | 2019-01-10 | 2019-03-29 | 合肥百思新材料研究院有限公司 | A kind of the vapor deposition film thickness set composite and its working method of detection molecules evaporation capacity |
| CN109594046B (en) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | Evaporation device for coating film |
| CN113621919A (en) * | 2021-08-12 | 2021-11-09 | 东部超导科技（苏州）有限公司 | High-frequency heating device of tungsten crucible for evaporation silver plating |
| CN117127160B (en) * | 2023-08-30 | 2024-05-28 | 苏州佑伦真空设备科技有限公司 | Large-area film-plating substrate device |
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| JP2608137B2 (en) * | 1989-04-14 | 1997-05-07 | 川崎製鉄株式会社 | Evaporator for ion plating |
| JPH06124672A (en) * | 1991-03-08 | 1994-05-06 | Sanko:Kk | Material evaporating apparatus |
| JP2008050698A (en) * | 2006-07-28 | 2008-03-06 | Netsusan Heat Kk | Alloy production method and alloy production device |
| EP2048261A1 (en) * | 2007-10-12 | 2009-04-15 | ArcelorMittal France | Industrial steam generator for depositing an alloy coating on a metal band |
| CN103160788B (en) * | 2011-12-16 | 2017-06-30 | 上海大学 | Vacuum vaporation system |
| CN207362324U (en) * | 2017-09-08 | 2018-05-15 | 霍尔果斯迅奇信息科技有限公司 | High-frequency induction heating vaporising device |
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