CN107316819A - Chip package and chip packaging process - Google Patents

Chip package and chip packaging process Download PDF

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Publication number
CN107316819A
CN107316819A CN201610471869.3A CN201610471869A CN107316819A CN 107316819 A CN107316819 A CN 107316819A CN 201610471869 A CN201610471869 A CN 201610471869A CN 107316819 A CN107316819 A CN 107316819A
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CN
China
Prior art keywords
chip
carrier plate
line carrier
packing colloid
conductive pole
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CN201610471869.3A
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Chinese (zh)
Inventor
陈宪章
黄东鸿
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Chipmos Technologies Inc
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Chipmos Technologies Inc
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Publication of CN107316819A publication Critical patent/CN107316819A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/11Manufacturing methods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/12105Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H01L2224/48228Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item the bond pad being disposed in a recess of the surface of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/3025Electromagnetic shielding

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

The invention provides a chip packaging body and a chip packaging process, which comprises the following steps: the circuit board comprises a circuit carrier plate with a conductive column, a chip, a packaging colloid, a conductive layer and a plurality of external terminals. The packaging colloid is arranged on the circuit carrier plate and covers the chip and the conductive columns. The top surfaces of the conductive posts are exposed outside the packaging adhesive and are arranged on the circuit carrier plate. The chip is disposed on the circuit carrier, and the circuit carrier is electrically connected to the chip through at least one bonding wire. The external terminal is located on the circuit carrier plate, is located on the different side of the circuit carrier plate with the chip, and is electrically connected with the chip through the circuit carrier plate. The packaging colloid is provided with a conductive layer, and the conductive layer is connected with the top surface of the conductive column, so that the conductive layer is electrically connected with the circuit carrier plate and the chip through the conductive column. In summary, the technical solution of the present invention can improve the packaging yield of the chip packaging process.

Description

Chip packing-body and chip encapsulating manufacturing procedure
Technical field
The invention relates to a kind of chip packing-body and chip encapsulating manufacturing procedure, and in particular to one kind Chip packing-body and chip encapsulating manufacturing procedure with conductive pole.
Background technology
In semiconductor industry, the production of IC (Integrated Circuits, IC) is broadly divided into three Stage:Manufacture, the making of IC and encapsulation of chip (Package) of wafer (wafer) etc..Its In, chip system is via wafer manufacturing, circuit design, light shield manufacture, circuit production and cutting crystal wafer etc. Step and complete, and each is cut formed chip by wafer, the contact on via chip with it is outer After portion's signal is electrically connected with, chip can be coated with packing colloid material again, its purpose encapsulated is to prevent Only chip is influenceed by moisture, heat, noise, and provides electric connection between chip and external circuit Medium, so i.e. complete IC production.
In the manufacturing process of communication element, after communication chip is coated with packing colloid, one must be entered Step makes exterior antenna, and the making of this exterior antenna includes being formed exterior antenna in itself and is connected to outside Contact conductor between antenna and communication chip.In general, foregoing contact conductor is typically in encapsulation Colloid is made after completing with laser drill inserting for conductive material of collocation.
However, because packing colloid is blocked up and energy of laser is difficult to control, in laser drill mode Contact openings are formed in packing colloid and are encountered by the problem of processing procedure nargin (process window) is not enough.Cause This, being electrically connected between exterior antenna and communication chip is it is possible that open a way or electrical characteristic is not good The problems such as, and then cause the encapsulation yield of communication element can not be effectively elevated.Therefore, how further The encapsulation yield of communication element is lifted, it is real into the problem for desiring most ardently solution at present.
The content of the invention
The present invention provides various chips packaging body and various chips encapsulation procedure.
The present invention provides a kind of chip encapsulating manufacturing procedure, and it comprises the following steps.Line carrier plate, this line are provided There is conductive pole on road-load plate.Chip is placed on line carrier plate, its chips by an at least bonding wire with Line carrier plate is electrically connected with.Packing colloid is formed on line carrier plate, with coating chip and conductive pole.Move Except the packing colloid of part, to expose the top surface of conductive pole.Formed on packing colloid and conductive capital The conductive layer of face connection, this conductive layer is electrically connected with by line carrier plate and chip.The shape on line carrier plate Into multiple outside terminals, this outside terminal and chip are in the not homonymy of line carrier plate, and outside terminal is logical Line carrier plate is crossed to be electrically connected with chip.
The present invention provides a kind of chip packing-body, and it includes line carrier plate, chip, packing colloid, conduction Layer and multiple outside terminals.Line carrier plate has conductive pole.Chip is configured on line carrier plate, and It is electrically connected with by an at least bonding wire and line carrier plate.Packing colloid is configured on line carrier plate, wherein sealing Colloid coating chip and conductive pole are filled, and the top surface of conductive pole is exposed to outside packing colloid.Conductive layer is configured It is connected on packing colloid with the top surface with conductive pole, wherein conductive layer is electrical with chip by line carrier plate Connection.Outside terminal and chip are located at the not homonymy of line carrier plate, and outside terminal by line carrier plate with Chip is electrically connected with.
In one embodiment of this invention, removing the method for the packing colloid of part includes grinding.
In one embodiment of this invention, forming the method for conductive layer includes plating.
In one embodiment of this invention, conductive pole is located at the homonymy of line carrier plate, and conductive pole with chip Height be more than chip thickness.
The present invention provides another chip encapsulating manufacturing procedure, and it comprises the following steps.Line carrier plate is provided, this There is conductive pole on line carrier plate.Chip is placed in line carrier plate, its chips by an at least bonding wire with Line carrier plate is electrically connected with.Packing colloid is formed on line carrier plate, with coating chip and conductive pole.Move Except the packing colloid of part, it is open with being formed in packing colloid, and this opening exposes the top of conductive pole Face.Contact conductor is inserted in the opening.The conduction with contacting the connection of conductor top surface is formed on packing colloid Layer, this conductive layer is electrically connected with by contacting conductor and line carrier plate with chip.
The present invention provides another chip packing-body, and it includes line carrier plate, contact conductor, chip, envelope Fill colloid, conductive layer and multiple outside terminals.Line carrier plate has conductive pole.Conductor configuration is contacted to exist On conductive pole.Chip is configured on line carrier plate, and is electrically connected with line carrier plate.Packing colloid is matched somebody with somebody Put on line carrier plate, wherein packing colloid coating chip, conductive pole and contact conductor, and contact conductor Top surface outside the packing colloid.Conductive layer configuration is on packing colloid with the top surface company with contacting conductor Connect, wherein conductive layer is electrically connected with by contacting conductor and line carrier plate with chip.Outside terminal and chip Positioned at the not homonymy of line carrier plate, and outside terminal passes through line carrier plate and chip electric connection.
In another embodiment of the invention, the packing colloid for removing part is opened with being formed in packing colloid The method of mouth includes laser drill.
In another embodiment of the invention, forming the method for conductive layer includes plating.
In another embodiment of the invention, also it is included on line carrier plate and forms multiple outside terminals, its Middle outside terminal is located at the not homonymy of line carrier plate with chip, and outside terminal passes through line carrier plate and chip It is electrically connected with.
In another embodiment of the invention, conductive pole, contact conductor and chip are located at the same of line carrier plate Side.
Based on above-mentioned, the above embodiment of the present invention first formation on line carrier plate before packing colloid is formed Conductive pole, this process sequence can lift the encapsulation yield of chip encapsulating manufacturing procedure.Further, since conductive pole Formation of the making earlier than packing colloid, therefore the thickness of packing colloid does not interfere with the making of conductive pole Yield.
For the features described above and advantage of the present invention can be become apparent, special embodiment below, and coordinate Accompanying drawing is described in detail below.
Brief description of the drawings
Figure 1A to Fig. 1 D is that a kind of manufacturing process of chip packing-body according to first embodiment of the invention shows It is intended to;
Fig. 1 D are the diagrammatic cross-sections of the chip packing-body according to first embodiment of the invention;
Fig. 2A to Fig. 2 D is that a kind of manufacturing process of chip packing-body according to second embodiment of the invention shows It is intended to;
Fig. 2 D are the diagrammatic cross-sections of the chip packing-body according to second embodiment of the invention.
Description of reference numerals:
200、200’:Chip packing-body;
210:Line carrier plate;
210a:First surface;
210b:Second surface;
S1、S2:Surface;
212a:First connection pad;
212b:Second connection pad;
214a:First welding resisting layer;
214b:Second welding resisting layer;
C:Conductor;
216:Outside terminal;
220、220’:Conductive pole;
H、H’:Highly;
220a:Top surface;
230:Chip;
240:Bonding wire;
250、250’、251:Packing colloid;
252:Contact openings;
T1、T2、T3:Thickness;
260:Contact conductor;
260a:Top surface;
270:Conductive layer.
Embodiment
Figure 1A to Fig. 1 D is that a kind of manufacturing process of chip packing-body according to first embodiment of the invention shows It is intended to.First, Figure 1A is refer to there is provided the line carrier plate 210 for having been formed with conductive pole 220, wherein Line carrier plate 210 has first surface 210a and second surface 210b, and conductive pole 220 is located at circuit On the first surface 210a of support plate 210.Specifically, line carrier plate 210 includes core layer 212, led Body C, the first connection pad 212a, the second connection pad 212b, the first welding resisting layer 214a and the second welding resisting layer 214b, Wherein core layer 212 is hard or the dielectric material of pliability, the first connection pad 212a and the second connection pad 212b Respectively on two apparent surface S1, S2 of core layer 212, and the first connection pad 212a is respectively with passing through The conductor C being embedded in core layer 212 is electrically connected with corresponding second connection pad 212b.First welding resisting layer 214a and the second welding resisting layer 214b are respectively overlay on two apparent surface S1, S2 of core layer 212, and Expose the first connection pad 212a and the second connection pad 212b.In one embodiment, conductive pole 220 is located at circuit On the surface S1 of the core layer 212 of support plate 210, and conductive pole 220 is, for example, to be embedded in the first welding resisting layer In 214a.However, the present invention does not limit conductive pole 220 and must be embedded in the first welding resisting layer 214a.Change speech It, in other embodiments, conductive pole 220 can be disposed on line carrier plate 210, and (i.e. first is anti-welding Layer 214a) first surface 210a on.Or, conductive pole 220 is except that can be embedded in the first welding resisting layer 214a In, also further it can be embedded in or extend in core layer 212.
In the present embodiment, line carrier plate 210 is, for example, to have the printed circuit board (PCB) of individual layer circuit or have The printed circuit board (PCB) of multilayer line.Foregoing line carrier plate 210 can be hard line carrier plate or pliability line Road-load plate.First connection pad 212a and the second connection pad 212b material be, for example, copper, nickel, gold, tin or on The combination stated, the first welding resisting layer 214a and the second welding resisting layer 214b material be, for example, epoxy resin or Other anti-welding materials, and the material of conductive pole 220 is, for example, copper or copper alloy.
Then, Figure 1B is refer to, chip 230 is placed on the first surface 210a of line carrier plate 210, So that chip 230 is located at the same side of line carrier plate 210 with conductive pole 220, then, pass through at least one Bonding wire 240 makes chip 230 be electrically connected with the first connection pad 212a on line carrier plate 210.
As shown in Figure 1B, foregoing conductive pole 220, chip 230 and bonding wire 240 are all located at line carrier plate 210 the same side.In one embodiment, chip 230 is configured on welding resisting layer 214a surface.Complete Into after the engagement of chip 230 and line carrier plate 210, chip 230 can by line carrier plate 210 it Conductor C is electrically connected with conductive pole 220.
After engagement of the chip 230 with line carrier plate 210 is completed, then, on line carrier plate 210 Packing colloid 250 is formed, with coated with conductive post 220 and chip 230.Specifically, foregoing packaging plastic Body 250 in addition to coated with conductive post 220 and chip 230, can further coat bonding wire 240 and by The first connection pad 212a that welding resisting layer 214a is exposed.In the present embodiment, such as communication chip of chip 230, Such as gold thread of bonding wire 240, and packing colloid 250 is, for example, in the way of ejection formation (mold injection) Make, and the thickness and the camber of bonding wire 240 of chip 230 determine the packing colloid 250 to be formed Thickness T1.Herein, the thickness T1 of packing colloid 250 is enough to cover the top surface 220a of conductive pole 220.
After the making of packing colloid 250 is completed, the present embodiment can be in the second table of line carrier plate 210 Outside terminal 216 is formed on the 210b of face, wherein outside terminal 216 by welding resisting layer 214b with being exposed The second connection pad 212b be electrically connected with.For example, outside terminal 216 can for soldered ball, projection etc., and Chip 230 can pass through bonding wire 240, the first connection pad 212a, conductor C, the second connection pad 212b and outside Terminal 216 is electrically connected with outer member.
Then, Fig. 1 C are refer to, the packing colloid 250 of part are removed, until the top surface of conductive pole 220 220a is exposed.In the present embodiment, packing colloid 250 can by grind processing procedure, etch process or its He carries out thinning by processing procedure, to form packing colloid 250 '.It is worth noting that, when the envelope that thickness is T1 When dress colloid 250 is thinned and turns into packing colloid 250 ', the thickness of packing colloid 250 ' is T2..
Fig. 1 D are refer to, after packing colloid 250 ' is formed, then in shape on packing colloid 250 ' Into a conductive layer 270, this conductive layer 270 is connected with the top surface 220a of conductive pole 220, makes conductive layer 270 It is electrically connected with by conductive pole 220, line carrier plate 210 and chip 230.In addition, in the present embodiment, The method for forming conductive layer 270 is, for example, plating, sputter or other appropriate film forming processing procedures, conductive layer 270 Material be, for example, metal.In the present embodiment, conductive layer 270 can be used as antenna stack.
In the present embodiment, as shown in figs 1C and 1D, due to conductive pole 220 can it is pre- it is leading making simultaneously It is arranged on line carrier plate 210, therefore the present embodiment can be accurately controlled the top surface 220a of conductive pole 220 Flatness so that the top surface of the packing colloid 250 ' after top surface 220a and thinning is trimmed (substantially altogether Plane), and then enable top surface 220a of the conductive layer 270 being subsequently formed successfully with conductive pole 220 It is electrically connected with.It is conductive in the case where the top surface 220a of conductive pole 220 flatness obtains good control The top surface 220a of layer 270 and conductive pole 220 can form good Ohmic contact so that overall encapsulation letter Property is relied to be lifted.
The making of the chip packing-body 200 of the present embodiment can be substantially completed after above-mentioned processing procedure.On The chip packing-body 200 stated include line carrier plate 210, conductive pole 220, chip 230, bonding wire 240, Packing colloid 250 ', conductive layer 270 and outside terminal 216.Line carrier plate 210 has first surface 210a and second surface 210b, and conductive pole 220, chip 230, bonding wire 240, packing colloid 250 ' And conductive layer 270 is located on the first surface 210a of line carrier plate 210, outside terminal 216 is located at circuit On the second surface 210b of support plate 210.In one embodiment, line carrier plate 210 include core layer 212, Conductor C, the first connection pad 212a, the second connection pad 212b, the first welding resisting layer 214a and the second welding resisting layer 214b, the first connection pad 212a and the second connection pad 212b respectively positioned at core layer 212 two apparent surface S1, On S2, and the first connection pad 212a respectively with the conductor C by being embedded in core layer 212 and corresponding Two connection pad 212b are electrically connected with.Chip 230 is sudden and violent with by welding resisting layer 214a institutes by an at least bonding wire 240 The the first connection pad 212a exposed is electrically connected with.Outside terminal 216 and exposed by welding resisting layer 214b Second connection pad 212b is electrically connected with.Therefore, chip 230 by an at least bonding wire 240, the first connection pad 212a, Conductor C, the second connection pad 212b and outside terminal 216 are electrically connected with outer member.Packing colloid 250 ' It is configured on line carrier plate, except coating chip 230 and conductive pole 220, can further coats bonding wire 240 And the first connection pad 212a exposed by welding resisting layer 214a, and conductive pole 220 is exposed conductive pole 220 top surface 220a.Conductive layer 270 is configured on packing colloid 250 ', leads the contact of conductive layer 270 The top surface 220a of electric post 220, and electrically connected by conductive pole 220, line carrier plate 210 and chip 230 Connect.
The manufacturing process of chip packing-body will be illustrated with different embodiments below.In this mandatory declaration It is that following embodiments adopt the element numbers and partial content of previous embodiment, wherein using identical mark Number represent identical or approximate element, and eliminate the explanation of constructed content.On omission portion The explanation divided may be referred to previous embodiment, and following embodiments are no longer repeated.
Fig. 2A to Fig. 2 D is that a kind of manufacturing process of chip packing-body according to second embodiment of the invention shows It is intended to.First, refer to has conduction in Figure 1A, Figure 1B, Fig. 2A and Fig. 2 B, the present embodiment The line carrier plate 210 of post 220 ' and the circuit with conductive pole 220 shown in Figure 1A and Figure 1B Support plate 210 is similar, and difference is therebetween:Formed in the present embodiment (Fig. 2A and Fig. 2 B) In the conductive pole 220 ' on line carrier plate 210 compared with conductive pole 220 (Figure 1A and Figure 1B) to be short.
Then, Fig. 2 C are refer to, after the making of packing colloid 251 is completed, in packing colloid 251 Middle formation contact openings 252, this contact openings 252 expose the top surface 220a of conductive pole 220 '.Then, Contact conductor 260 is inserted in contact openings 252, herein, contact conductor 260 and the electricity of conductive pole 220 ' Property connection.The present embodiment can be by etching, grinding drilling, laser drill or other processing procedures in packing colloid Contact openings 252 are formed in 251.In addition, contact conductor 260 material be, for example, tin cream, silver paste or Other melting points are less than the conductive materials of the material of conductive pole 220 '.
In the present embodiment, as shown in figs. 2 b and 2 c, due to conductive pole 220 ' can pre-production simultaneously It is arranged on line carrier plate 210, therefore contact openings 252 of the present embodiment in packing colloid 251 is formed When, the depth-to-width ratio (aspect ratio) of contact perforate 252 in packing colloid 251 will be effectively reduced so that Processing time shortens, and then increases production capacity.
Fig. 2 D are refer to, it is then conductive in formation on packing colloid 251 after contact conductor 260 is inserted Layer 270, so that conductive layer 270 is by contacting conductor 260, conductive pole 220 and line carrier plate 210 It is electrically connected with chip 230.
In the present embodiment, as shown in Fig. 2 C and Fig. 2 D, foregoing contact conductor 260 is in inserting opening Afterwards, contact conductor 260 has top surface 260a, and wherein top surface 260a will not be packaged colloid 251 and be coated, And then enable the conductive layer 270 being subsequently formed successfully with to contact the top surface 260a of conductor 260 electrical Connection.
The making of the chip packing-body 200 ' of the present embodiment can be substantially completed after above-mentioned processing procedure. Above-mentioned chip packing-body 200 ' include line carrier plate 210, conductive pole 220, chip 230, bonding wire 240, Packing colloid 251, contact conductor 260, conductive layer 270 and outside terminal 216.Line carrier plate 210 has Have a first surface 210a and second surface 210b, and conductive pole 220, chip 230, bonding wire 240, Packing colloid 251, contact conductor 260 and conductive layer 270 are located at the first surface 210a of line carrier plate 210 On, outside terminal 216 is located on the second surface 210b of line carrier plate 210.In one embodiment, line Road-load plate 210 includes core layer 212, conductor C, the first connection pad 212a, the second connection pad 212b, first Welding resisting layer 214a and the second welding resisting layer 214b, the first connection pad 212a are located at respectively with the second connection pad 212b On two apparent surface S1, S2 of core layer 212, and the first connection pad 212a respectively with by being embedded in core Conductor C in layer 212 is electrically connected with corresponding second connection pad 212b.Chip 230 passes through at least one weldering Line 240 and the first connection pad 212a exposed by welding resisting layer 214a are electrically connected with.Outside terminal 216 With the second connection pad 212b electric connections exposed by welding resisting layer 214b.Therefore, chip 230 passes through An at least bonding wire 240, the first connection pad 212a, conductor C, the second connection pad 212b and outside terminal 216 It is electrically connected with outer member.Packing colloid 251 is configured on line carrier plate 210, except coating chip 230th, contact conductor 260 and conductive pole 220, can further coat bonding wire 240 and by welding resisting layer 214a The the first connection pad 212a exposed, and contact conductor 260 is exposed the top surface 260a for contacting conductor 260. Conductive layer 270 is configured on packing colloid 251, makes the contact contact conductor 260 of conductive layer 270, and logical Conductive pole 220, line carrier plate 210 is crossed to be electrically connected with chip 230.
In summary, the above embodiment of the present invention formed packing colloid before prior on line carrier plate formed Conductive pole, this process sequence can lift the encapsulation yield of chip encapsulating manufacturing procedure.Further, since conductive pole Formation of the making earlier than packing colloid, therefore the thickness of packing colloid does not interfere with the making of conductive pole Yield.
Finally it should be noted that:Various embodiments above is merely illustrative of the technical solution of the present invention, rather than right It is limited;Although the present invention is described in detail with reference to foregoing embodiments, this area it is common Technical staff should be understood:It can still modify to the technical scheme described in foregoing embodiments, Or equivalent substitution is carried out to which part or all technical characteristic;And these modifications or replacement, and The essence of appropriate technical solution is not set to depart from the scope of various embodiments of the present invention technical scheme.

Claims (11)

1. a kind of chip encapsulating manufacturing procedure, including:
There is provided has conductive pole on line carrier plate, the line carrier plate;
Chip is placed in line carrier plate, and the chip is passed through an at least bonding wire and line carrier plate electricity Property connection;
Packing colloid is formed on the line carrier plate to coat the chip and the conductive pole;
The packing colloid of part is removed to expose the top surface of the conductive pole;And
The conductive layer being connected with the top surface of the conductive pole, wherein institute are formed on the packing colloid Conductive layer is stated to be electrically connected with by the line carrier plate and the chip;
Multiple outside terminals are formed on the line carrier plate, wherein the multiple outside terminal and the core Piece is located at the not homonymy of the line carrier plate, and the multiple outside terminal passes through the line carrier plate and institute State chip electric connection.
2. chip encapsulating manufacturing procedure according to claim 1, wherein removing the packing colloid of part Method include grinding.
3. chip encapsulating manufacturing procedure according to claim 1, wherein forming the method bag of the conductive layer Include plating.
4. a kind of chip packing-body, including:
Line carrier plate, the line carrier plate has conductive pole;
Chip, is configured on the line carrier plate, and passes through an at least bonding wire and line carrier plate electricity Property connection;
Packing colloid, is configured on the line carrier plate, wherein the packing colloid coat the chip and The conductive pole, and the conductive pole top surface outside the packing colloid;
Conductive layer, configuration is connected on the packing colloid with the top surface with the conductive pole, wherein The conductive layer is electrically connected with by the line carrier plate and the chip;And
Multiple outside terminals, wherein the multiple outside terminal is located at the line carrier plate with the chip Not homonymy, and the multiple outside terminal passes through the line carrier plate and chip electric connection.
5. chip packing-body according to claim 4, wherein the conductive pole is located at the chip The homonymy of the line carrier plate, and thickness of the height more than the chip of the conductive pole.
6. a kind of chip encapsulating manufacturing procedure, including:
There is provided has conductive pole on line carrier plate, the line carrier plate;
Chip is placed in line carrier plate, and the chip is passed through an at least bonding wire and line carrier plate electricity Property connection;
Packing colloid is formed on the line carrier plate to coat the chip and the conductive pole;
The packing colloid of part is removed with forming opening in the packing colloid, wherein the opening Expose the top surface of the conductive pole;
Contact conductor is inserted in said opening;And
The conductive layer with the top surface connection for contacting conductor is formed on the packing colloid, wherein described Conductive layer is electrically connected with by the contact conductor and the line carrier plate with the chip.
7. chip encapsulating manufacturing procedure according to claim 6, wherein removing the packing colloid of part Include laser drill in the method that the opening is formed in the packing colloid.
8. chip encapsulating manufacturing procedure according to claim 6, wherein forming the method bag of the conductive layer Include plating.
9. chip encapsulating manufacturing procedure according to claim 6, is additionally included on the line carrier plate and is formed Multiple outside terminals, wherein the multiple outside terminal is located at the difference of the line carrier plate with the chip Side, and the multiple outside terminal passes through the line carrier plate and chip electric connection.
10. a kind of chip packing-body, including:
Line carrier plate, the line carrier plate has conductive pole;
Conductor is contacted, is configured on the conductive pole;
Chip, is configured on the line carrier plate, and is electrically connected with the line carrier plate;
Packing colloid, is configured on the line carrier plate, wherein the packing colloid cladding chip, The conductive pole and the contact conductor, and the top surface for contacting conductor is outside packing colloid;
Conductive layer, is configured to be connected with the top surface for contacting conductor on the packing colloid, its Described in conductive layer pass through the contact conductor and the line carrier plate and the chip are electrically connected with;And
Multiple outside terminals, wherein the multiple outside terminal is located at the line carrier plate with the chip Not homonymy, and the multiple outside terminal passes through the line carrier plate and chip electric connection.
11. chip packing-body according to claim 10, wherein the conductive pole, the contact are led Body is located at the homonymy of the line carrier plate with the chip.
CN201610471869.3A 2016-04-27 2016-06-24 Chip package and chip packaging process Pending CN107316819A (en)

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TW105113070A TWI590349B (en) 2016-04-27 2016-04-27 Chip package and chip packaging process
TW105113070 2016-04-27

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Cited By (1)

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CN104011858A (en) * 2011-10-17 2014-08-27 英闻萨斯有限公司 Package-on-package assembly with wire bond vias
CN104037166A (en) * 2013-03-07 2014-09-10 日月光半导体制造股份有限公司 Semiconductor package including antenna layer and manufacturing method thereof

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CN104011858A (en) * 2011-10-17 2014-08-27 英闻萨斯有限公司 Package-on-package assembly with wire bond vias
CN103632988A (en) * 2012-08-28 2014-03-12 宏启胜精密电子(秦皇岛)有限公司 Stacked encapsulation structure and manufacturing method thereof
CN104037166A (en) * 2013-03-07 2014-09-10 日月光半导体制造股份有限公司 Semiconductor package including antenna layer and manufacturing method thereof

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Publication number Priority date Publication date Assignee Title
TWI763056B (en) * 2020-06-10 2022-05-01 大陸商訊芯電子科技(中山)有限公司 Semiconductor devices and methods for manufacturing the semiconductor devices

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