CN107267940A - A kind of Au Cu/Ag Al nano-multilayer film surface-enhanced fluorescence substrates and its application - Google Patents

A kind of Au Cu/Ag Al nano-multilayer film surface-enhanced fluorescence substrates and its application Download PDF

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CN107267940A
CN107267940A CN201710431891.XA CN201710431891A CN107267940A CN 107267940 A CN107267940 A CN 107267940A CN 201710431891 A CN201710431891 A CN 201710431891A CN 107267940 A CN107267940 A CN 107267940A
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CN107267940B (en
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杨瑞芳
赵南京
肖雪
殷高方
马明俊
孟德硕
方丽
甘婷婷
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Hefei Institutes of Physical Science of CAS
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
    • G01N21/643—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" non-biological material

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Abstract

The invention discloses a kind of Au Cu/Ag Al nano-multilayer film surface-enhanced fluorescence substrates and its application, slide is cleaned, dry up after it is standby；Au Cu and Ag Al composition targets are separately mounted on DC cathode, the slide after cleaning loads sample stage, start, vacuumize, then lead to people's argon gas, open shielding power supply, alternating sputtering Au Cu and Ag Al, sputtering is completed, and closes shielding power supply, stops ventilation, close molecular pump, room temperature is cooled under powered-down source, natural vacuum, sample is then taken out.The present invention is simple to operate and friendly to environment, deposition velocity is fast, efficiency high, production cost is low, be easy to the film surface enhancing fluorescent base bottom of batch production, the film is sandwich construction, prepared by the alternating deposit Au Cu on glass and Ag Al, the instrument of use is common magnetic control sputtering device.

Description

A kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate and its application
Technical field
The invention belongs to field of spectroscopy, more particularly to a kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate And its application.
Background technology
Fluorescent technique is as a kind of important modern spectral technique, with sensitivity is high, simple to operate, detection is rapid, nothing The advantages of needing sample pre-treatments, the need for meeting real time on-line monitoring, therefore is widely used in the inspection of the environment such as air, water body Survey.Polycyclic aromatic hydrocarbon is the pollutant of generally existing in water environment, with inertia it is relatively strong, relatively stablize, difficult degradation the features such as, in reality Even if in use, the content of polycyclic aromatic hydrocarbon is few in water body, but because its cumulative effect can still be produced to human body when being used for a long time The harm such as carcinogenic, rugged, mutagenesis of cause.Therefore, prediction more early to the polycyclic aromatic hydrocarbon pollutant in water environment more can be avoided timely Its harmfulness, this detection sensitivity to fluorescent technique proposes new requirement.
Have a variety of for improving the method for fluoroscopic examination sensitivity, for example:The inspection of instrument is improved using new technology, new device Survey sensitivity;The interference of background fluorescence is reduced from long wavelength's probe molecule;It is anti-using enzyme linked immunoassay, polymerase chain Should, the biochemical method such as many fluorescent chromophore probes improve the multiplication factor of fluorescence signal, etc..But, these methods are improved The detection sensitivity limitation of fluorescent technique is very big, and the degree of raising is limited by the quantum yield of fluorescence species itself, photodissociation And the interference of background fluorescence etc..From the aspect of instrument is improved, although in strictly control experiment condition, reduce to greatest extent In the case of background fluorescence, it is possible to achieve determined to monomolecular, but this determine needs to use complicated optical system, to inspection The quality requirement for surveying device is also especially high, therefore instrument price is expensive, and experimentation requirement is strict, and this method popularization and application are deposited In Difficulty.Therefore, it is necessary to find the approach of new raising fluoroscopic examination sensitivity.
In the 1970s, Drexhage etc. has found that precious metal surface has important shadow to the fluorescence property of neighbouring fluorogen Ring, the plasma oscillation and electromagnetic field of metal surface cut effect, make to be distributed in glimmering near metal surface or sol particle The fluorescent emission intensity of light thing strengthens than free state, i.e. surface-enhanced fluorescence effect.Maryland universities of the U.S. It is plentiful and substantial that professor Lakowiczpsj leads its research team to be achieved in the experiment and theoretical research of surface-enhanced fluorescence effect Achievement, raised the new page of surface-enhanced fluorescence effect study.Being currently used for the enhanced substrate of fluorescent surface is typically all The simple substance golden film or silverskin prepared using chemical reduction method, can only be strengthened the fluorescence of very close limit, and deposit Can not accurately control in sedimentation rate, membrane-film preparation process environmental pollution the problems such as.Harbin Institute of Technology Sun Xiudong is taught in theory The prediction surface plasmon polariton of each layer and local surface phasmon in multi-layer film structure intercouple and can realized Fluorescence is further enhanced, and related experimental study has not been reported.
The content of the invention
It is an object of the invention to provide a kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate.
The present invention is adopted the following technical scheme that to achieve these goals：
A kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate, it is characterised in that preparation method includes following step Suddenly：
1）Slide is cleaned, dry up after it is standby；
2）Au-Cu and Ag-Al composition targets are separately mounted on DC cathode, the slide after cleaning loads sample stage, adjustment The distance of target and substrate is 48-52mm；
3）Start, is evacuated to 0.9-1.1x10-3Pa, then leads to people's argon gas, and adjustment Ar flows are 29-31sccm, adjust work Air pressure is to 1.4-1.6Pa；
4）Shielding power supply is opened, alternating sputtering Au-Cu and Ag-Al, wherein sputtering power are respectively 40W and 60W, and control single splashes The time is penetrated for 0.9-1.1min, total sputtering time is 5.9-6.1min；
5）Sputtering is completed, and closes shielding power supply, stops ventilation, is closed and is cooled to room temperature under molecular pump, powered-down source, natural vacuum, so After take out sample.
A kind of described Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate, it is characterised in that：Preparation method bag Include following steps：
1）Slide is cleaned, dry up after it is standby；
2）Au-Cu and Ag-Al composition targets are separately mounted on DC cathode, the slide after cleaning loads sample stage, adjustment The distance of target and substrate is 50mm；
3）Start, is evacuated to 1x10-3Pa, then leads to people's argon gas, and adjustment Ar flows are 30sccm, and adjustment operating air pressure is extremely 1.5Pa；
4）Shielding power supply is opened, alternating sputtering Au-Cu and Ag-Al, wherein sputtering power are respectively 40W and 60W, and control single splashes The time is penetrated for 1min, total sputtering time is 6min；
5）Sputtering is completed, and closes shielding power supply, stops ventilation, is closed and is cooled to room temperature under molecular pump, powered-down source, natural vacuum, so After take out sample.
A kind of described Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate, it is characterised in that：Au-Cu and Ag- Au/Cu mass ratioes=1/4, Ag/Al mass ratio=2/3 in Al composition targets.
The application of described Au-Cu/Ag-Al nano-multilayer film surface-enhanced fluorescence substrates, it is characterised in that it can be carried Fluoroscopic examination sensitivity in high modern times spectral technique.
Beneficial effects of the present invention：The present invention is simple to operate and friendly to environment, deposition velocity fast, efficiency high, production cost Bottom, the film surface enhancing fluorescent base bottom for being easy to batch production, the film is sandwich construction, passes through the alternating deposit on glass Prepared by Au-Cu and Ag-Al, the instrument of use is common magnetic control sputtering device.The present invention can make full use of different in composite membrane Metal and the multiple layering effect of multilayer film be that surface plasmon-polarition and local surface phasmon intercouple to realize width The surface enhanced of spectral limit fluorescence.
Brief description of the drawings
Fig. 1 is that embodiment STEM sectional views show that prepared film is sandwich construction, and thickness in monolayer is controllable in 2-4nm；
Fig. 2 is that embodiment utilizes common slide, monofilm, multilayer film respectively to the fluorescence intensity after phenanthrene, pyrene, anthracene fluorometric investigation Change.
Embodiment
A kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate, preparation method comprises the following steps：
1）Slide is cleaned, dry up after it is standby.
2）Au-Cu and Ag-Al composition targets are separately mounted on DC cathode, the slide after cleaning loads sample stage, The distance for adjusting target and substrate is 50mm.Au/Cu mass ratioes=1/4, Ag/Al mass ratio=2/ in Au-Cu and Ag-Al composition targets 3。
3）Start, is evacuated to 1x10-3Pa, then leads to people's argon gas, and adjustment Ar flows are 30sccm, and adjustment operating air pressure is extremely 1.5Pa。
4）Shielding power supply is opened, alternating sputtering Au-Cu and Ag-Al, wherein sputtering power are respectively 40W and 60W, and control is single Secondary sputtering time is 1min, and total sputtering time is 6min.
5）Sputtering is completed, and closes shielding power supply, stops ventilation, closes molecular pump, powered-down source.Room is cooled under natural vacuum Temperature, then takes out sample.
A kind of application of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate, it can improve modern spectrum skill Fluoroscopic examination sensitivity in art.
The performance test of Au-Cu/Ag-Al nano-multilayer film surface-enhanced fluorescence substrates：As shown in Figure 1 and Figure 2；
The test of STEM Cross Section Morphologies shows that prepared film substrate is sandwich construction, and every layer of thickness is about 2-4 nm, gross thickness About 25nm, fluorometric investigation shows that using monofilm Au-Cu Ag-Al does polycyclic to three kinds of differences during surface fluorescence enhancing substrate Aromatic hydrocarbons phenanthrene, pyrene, the Fluorescence Increasing factor of anthracene are respectively 4,1.5,3 and 2,5,2, and using glimmering during multilayer film Fluorescence Increasing substrate Light enhancer is respectively 9,7,8, i.e., Au-Cu/Ag-Al nano-multilayer films are a kind of very effective surface-enhanced fluorescence bases Bottom.

Claims (4)

1. a kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate, it is characterised in that preparation method includes following step Suddenly：
1）Slide is cleaned, dry up after it is standby；
2）Au-Cu and Ag-Al composition targets are separately mounted on DC cathode, the slide after cleaning loads sample stage, adjustment The distance of target and substrate is 48-52mm；
3）Start, is evacuated to 0.9-1.1x10-3Pa, then leads to people's argon gas, and adjustment Ar flows are 29-31sccm, adjust work Air pressure is to 1.4-1.6Pa；
4）Shielding power supply is opened, alternating sputtering Au-Cu and Ag-Al, wherein sputtering power are respectively 40W and 60W, and control single splashes The time is penetrated for 0.9-1.1min, total sputtering time is 5.9-6.1min；
5）Sputtering is completed, and closes shielding power supply, stops ventilation, is closed and is cooled to room temperature under molecular pump, powered-down source, natural vacuum, so After take out sample.
2. a kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate according to claim 1, its feature exists In：Preparation method comprises the following steps：
1）Slide is cleaned, dry up after it is standby；
2）Au-Cu and Ag-Al composition targets are separately mounted on DC cathode, the slide after cleaning loads sample stage, adjustment The distance of target and substrate is 50mm；
3）Start, is evacuated to 1x10-3Pa, then leads to people's argon gas, and adjustment Ar flows are 30sccm, and adjustment operating air pressure is extremely 1.5Pa；
4）Shielding power supply is opened, alternating sputtering Au-Cu and Ag-Al, wherein sputtering power are respectively 40W and 60W, and control single splashes The time is penetrated for 1min, total sputtering time is 6min；
5）Sputtering is completed, and closes shielding power supply, stops ventilation, is closed and is cooled to room temperature under molecular pump, powered-down source, natural vacuum, so After take out sample.
3. a kind of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate according to claim 1, its feature exists In：Au/Cu mass ratioes=1/4, Ag/Al mass ratio=2/3 in Au-Cu and Ag-Al composition targets.
4. a kind of application of Au-Cu/Ag-Al nano-multilayer films surface-enhanced fluorescence substrate as claimed in claim 1, its feature It is, it can improve the fluoroscopic examination sensitivity in modern spectral technique.
CN201710431891.XA 2017-06-09 2017-06-09 A kind of Au-Cu/Ag-Al nano-multilayer film surface-enhanced fluorescence substrate and its application Active CN107267940B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109487221A (en) * 2018-12-12 2019-03-19 中国科学院合肥物质科学研究院 A kind of Ag-Au-Al-Cr-Cu nano composite membrane surface-enhanced fluorescence substrate and preparation method thereof
CN115181953A (en) * 2022-09-09 2022-10-14 清华大学 Preparation method of surface plasmon thin film and method for preparing multilayer film metamaterial

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110194106A1 (en) * 2010-02-10 2011-08-11 Makoto Murakami method and apparatus to prepare a substrate for molecular detection
CN102776536A (en) * 2011-05-12 2012-11-14 中国科学院合肥物质科学研究院 Mercapto-beta-cyclodextrin modified silver nano-rode array, its preparation method and its use
CN102965538A (en) * 2012-11-10 2013-03-13 清华大学 Polycrystalline silver platinum alloy plasma thin-film material and preparation method thereof
CN103353451A (en) * 2013-07-04 2013-10-16 首都师范大学 Preparation method of nano probe
CN104060245A (en) * 2014-06-10 2014-09-24 上海交通大学 Super-hydrophobic nano-silver raman-enhanced substrate material and preparation method thereof
CN104280376A (en) * 2013-07-10 2015-01-14 任贻均 Surface enhanced Raman spectroscopy (SERS) sensing substrate and manufacturing method thereof
CN104372299A (en) * 2013-09-23 2015-02-25 中国科学院合肥物质科学研究院 Multilayer-structural hard wear-resistant lubrication coating and preparation method thereof

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110194106A1 (en) * 2010-02-10 2011-08-11 Makoto Murakami method and apparatus to prepare a substrate for molecular detection
CN102776536A (en) * 2011-05-12 2012-11-14 中国科学院合肥物质科学研究院 Mercapto-beta-cyclodextrin modified silver nano-rode array, its preparation method and its use
CN102965538A (en) * 2012-11-10 2013-03-13 清华大学 Polycrystalline silver platinum alloy plasma thin-film material and preparation method thereof
CN103353451A (en) * 2013-07-04 2013-10-16 首都师范大学 Preparation method of nano probe
CN104280376A (en) * 2013-07-10 2015-01-14 任贻均 Surface enhanced Raman spectroscopy (SERS) sensing substrate and manufacturing method thereof
CN104372299A (en) * 2013-09-23 2015-02-25 中国科学院合肥物质科学研究院 Multilayer-structural hard wear-resistant lubrication coating and preparation method thereof
CN104060245A (en) * 2014-06-10 2014-09-24 上海交通大学 Super-hydrophobic nano-silver raman-enhanced substrate material and preparation method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109487221A (en) * 2018-12-12 2019-03-19 中国科学院合肥物质科学研究院 A kind of Ag-Au-Al-Cr-Cu nano composite membrane surface-enhanced fluorescence substrate and preparation method thereof
CN109487221B (en) * 2018-12-12 2021-04-02 中国科学院合肥物质科学研究院 Ag-Au-Al-Cr-Cu nano composite film surface enhanced fluorescent substrate and preparation method thereof
CN115181953A (en) * 2022-09-09 2022-10-14 清华大学 Preparation method of surface plasmon thin film and method for preparing multilayer film metamaterial
CN115181953B (en) * 2022-09-09 2022-12-06 清华大学 Preparation method of surface plasmon thin film and method for preparing multilayer film metamaterial

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