CN109136847A - A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof - Google Patents

A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof Download PDF

Info

Publication number
CN109136847A
CN109136847A CN201810807194.4A CN201810807194A CN109136847A CN 109136847 A CN109136847 A CN 109136847A CN 201810807194 A CN201810807194 A CN 201810807194A CN 109136847 A CN109136847 A CN 109136847A
Authority
CN
China
Prior art keywords
film
preparation
laminated film
annealing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810807194.4A
Other languages
Chinese (zh)
Inventor
甘巧强
付博文
宋云
孙大林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fudan University
Original Assignee
Fudan University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fudan University filed Critical Fudan University
Priority to CN201810807194.4A priority Critical patent/CN109136847A/en
Publication of CN109136847A publication Critical patent/CN109136847A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons

Abstract

The invention belongs to technical field of film preparation, specially super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof.The present invention uses conventional film plating process first, successively grows Ag, Al on substrate2O3And Ag；Then once made annealing treatment；After being cooled to room temperature, regrowth layer of Au film, and carry out double annealing；Wherein, outermost metal film forms Ag-Au nano particle after annealing.The present invention makes membrane stress change to form island structure, prepares the metallic particles of different-shape by twice annealing process.Wherein, outermost metal film becomes Ag-Au nano particle after annealing, can enhance the absorbability to light.Laminated film prepared by the present invention can be used as the substrate of Surface enhanced Raman scattering, has the characteristics that absorbability is strong, light absorption range is wide, stability is good, uniformity is good, the service life is long, can be used for the detection of a variety of biochemicals.

Description

A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof
Technical field
The invention belongs to technical field of film preparation, and in particular to a kind of nanostructured surface laminated film and its preparation side Method.
Background technique
There is the composite film material of property to have very in Surface Enhanced Raman Scattering Spectrum (SERS) technology Important application.Surface Enhanced Raman Scattering Spectrum is a kind of detection means of high surface sensitivity, can be to various biologies, change Credit is effectively detected, and is had in fields such as biomedicine, safety inspection, Food Monitoring, medical treatment & healths very extensive Application.The current main direction of studying of SERS be on the basis of low cost, being suitble to large area preparation, prepare high enhancing because Sub, uniform good, reusable substrate material.However mainstream preparation process includes electron beam lithography, nano impression etc. at present, These method preparation costs are very high and are difficult to large area preparation production, and the SERS substrate majority of mainstream can only be at certain at present It uses, specific some substances can only be detected under one wavelength.Therefore SERS substrate material has considerable room for improvement.
The method that Nan Zhang et al. is combined using mim structure with metal nanoparticle will excite Raman to enhance Upper layer absorbing material of the Ag nano particles as mim structure, while utilizing 70 nm SiO2It is situated between with 150 nm Al as space Matter layer and metal back reflection layer, can be in the detection of wider wave-length coverage progress SERS (UltrabroadbandMetasurface for Efficient Light Trapping and Localization:A Universal Surface-Enhanced Raman Spectroscopy Substrate for “All” Excitation Wavelengths).This mim structure can enhance surface layer absorbing material for the absorbability of luminous energy, and furthermore total exists The wavelength of 400-1000 nm range has very strong absorbability, can cover the full spectral limit of mainstream Raman spectrum.However this Kind mim structure uses Ag particle as upper layer absorbing material, easily oxidation by air, to reduce its absorbent properties.And this The spatially uniform of kind Ag particle surface is bad, can not carry out quantitative detection.
In general, the metal material that can enhance surface Raman has gold, silver and bronze etc., what different metal materials can excite LSPR wave band is not also identical.Usually Au is able to detect a variety of different types of molecules, including antigen-antibody, DNA etc..Ag has Better detection performance, but since Ag is easy to oxidize, the SERS substrate of Ag preparation often has lower service life, mesh The substrate of preceding commercialization is still based on Au.Therefore, the present invention uses Ag-Au composite particles surface, and Raman detection both can be enhanced Signal, and its service life can be improved.
Summary of the invention
The purpose of the present invention is to provide it is a kind of it is at low cost, can be mass-produced, uniformity is good, good reliability nano junction Structure surface recombination film and preparation method thereof.
The preparation method of nanostructured surface laminated film provided by the invention, including, using conventional film plating process (such as magnetic Control sputtering, thermal evaporation, electron beam evaporation etc.), on substrate on successively grow Ag, Al2O3And Ag, then once annealed Processing；After being cooled to room temperature, regrowth layer of Au film, and carry out double annealing；Wherein, outermost metal film shape after annealing At Ag-Au nano particle.The present invention is made membrane stress change to form island structure, is prepared by twice annealing process The metallic particles of different-shape.
The preparation method of nanostructured surface laminated film provided by the invention, steps are as follows for specific steps:
(1) Ag, Al are successively grown on substrate2O3And Ag；
(2) it is made annealing treatment under ar gas environment；150-250 DEG C of temperature, time 1-1.5 h；
(3) it waits substrate to be down to room temperature, grows layer of Au film, on the basis of other conditions are identical, carry out lower temperature (100- 150 DEG C) under make annealing treatment 1-1.5 h, on the basis of the Ag nano particle formed, regrowth layer of Au nano particle.
Nanostructured surface laminated film prepared by the present invention is a kind of Ag-Al2O3Tri- layers of (metal layer-Jie of-AgAu MIM Matter layer-metal layer) structure laminated film, wherein thicker Ag film is as first layer reflectance coating, Al2O3Film is situated between as intermediate Matter layer.
In the present invention, using twice annealing technique, make upper layer metallic film stress variation, turns the metallic film of top layer Metallic particles is turned to, very strong light absorption effect is generated.
In the present invention, second of annealing is dispersed in Au particle between Ag particle using the annealing compared with low temperature In gap, the generation of Ag-Au alloy is prevented, reduces grain spacing, improves uniformity；And the presence of Au particle also can effectively inhibit The oxidation of Ag increases the service life of film.
The method of the present invention is easy to operate, at low cost without complicated photoetching process, industrially using roll-to-roll technology It is mass produced.
MIM laminated film prepared by the present invention has outstanding absorbing properties, can be used as a kind of novel surface enhancing drawing Graceful spectroscopic scatterometer (SERS) substrate material, can be used for the detection of a variety of biochemicals.The MIM laminated film preparation cost It is low, it can be mass-produced, light absorption range is wide, can carry out quantitative detection, good reliability, and long service life has wide application Prospect.
Detailed description of the invention
Fig. 1 is the preparation flow schematic diagram of MIM laminated film.
Fig. 2 is the scanning electron microscope image of MIN trilamellar membrane structure.
Fig. 3 is Raman spectrum of two kinds of MIM laminated films as SERS substrate to vinyl bipyridyl (BPE) Molecular Detection Figure.
Fig. 4 is the raman spectrum that MIM laminated film detects cocaine molecule as SERS substrate.
Fig. 5 is service life curve of the MIM composite film material as SERS substrate.
Specific embodiment
Preparation method of the invention is described in detail below in conjunction with Application Example and attached drawing.
Embodiment: the preparation of tri- layers of laminated film of MIM and its detection as SERS substrate to sample
Using the method for magnetron sputtering, 150 nm Ag, 50 nm Al are successively grown on clean silicon wafer2O3, 12 nm Ag, 200 DEG C are carried out under ar gas environment later, the annealing of 1 h.Vacuum breaker aoxidizes under the condition of high temperature in order to prevent, is not beating It begins to speak to wait substrate to be down to room temperature in the case where body, replaces target, one layer of 5 nm Au film of regrowth, in other conditions phase later 150 DEG C are carried out in the case where, the annealing of 1 h lower temperature.Later we use preparation this MIM laminated film as SERS substrate detects some molecules.For the outstanding performance for illustrating this Ag-Au composite particles surface structure film, we (identical bottom Ag and middle layer Al also under the same conditions2O3Thickness) only by once depositing and annealing, prepare single layer Ag The thin-film material of particle surface is as a comparison.
Vinyl bipyridyl (BPE) molecule contains pi-electron system and pyridyl nitrogen atom, it is easy to and metal bonding, it is For characterizing the common molecule of SERS performance.By the Ag particle surface MIM laminated film substrate only by once depositing and annealing All it is immersed in 1 mM's with the Ag-Au particle surface MIM laminated film substrate proposed by the present invention by depositing and annealing twice 10 min, take out drying later in BPE ethanol solution, after alcohol rinse, are detected, are obtained with the Raman spectrum of 785 nm wavelength Raman spectrum it is as shown in Fig. 3.As can be seen that in 1012,1200,1340,1608,1637 cm-1There is apparent Raman at place Peak is the characteristic signal of BPE molecule.Comparison it can be found that the Raman signal of mixing Ag-Au particle far more than single layer Ag particle, It illustrates preparation method proposed by the present invention, reduces intergranular gap, there is stronger enhancing ability.
The present invention also carries out SERS detection to cocaine molecule using this substrate.In many countries, the abuse of drugs is Become a serious social concern.In administration of justice test and Criminal Detecting, cocaine is a kind of important detection medicine Object.In an experiment, we are with the cocaine acetonitrile solution dropwise of 10 μ L to substrate surface, concentration from 1 mg/mL to 1 μ g/mL, Raman detection is carried out after drying, the raman characteristic peak of spectrogram result cocaine as shown in Fig. 4 is respectively 1001,1027,1275 With 1598 cm-1It can be observed, even if concentration is down to 10 μ g mL-1.In view of the volume of drop is 10 μ L, the area of coverage The area approximation in domain is 20 mm2, then the averag density of cocaine is only 5 ng mm-2, this gets well than the result reported before. Illustrate that this MIM laminated film substrate has very high sensitivity to cocaine detection in the present invention.
In the present invention, due to using Au particle to be covered on Ag particle surface, the oxidation of Ag is inhibited to a certain extent.To survey Its effective time is tried, substrate is placed in the laboratory environment of standard by we, and for temperature at 20-23 DEG C, humidity is maintained at 20%- 60%.The BPE solution of 1 mM is added dropwise on the substrate for saving 3 months and 12 months later, as shown in Fig. 5, in 1608 cm-1 The SERS signal intensity at place only reduces 10%.Illustrate that MIM laminated film substrate of the invention has very long service life.

Claims (4)

1. a kind of preparation method of super-absorbent Ag-Au nanostructured surface laminated film, which is characterized in that specific step is as follows:
(1) Ag, Al are successively grown on substrate2O3And Ag；
(2) it is made annealing treatment under ar gas environment；150-250 DEG C of temperature, time 1-1.5 h；
(3) substrate is waited to be down to room temperature, regrowth layer of Au film, on the basis of other conditions are identical, in lower temperature 100- 1-1.5 h, on the basis of the Ag nano particle formed, regrowth layer of Au nano particle are made annealing treatment at 150 DEG C.
2. the preparation method of super-absorbent Ag-Au nanostructured surface laminated film according to claim 1, feature exist In the substrate material is silicon wafer, quartz plate or glass slide.
3. the super-absorbent Ag-Au nanostructured surface laminated film that preparation method described in a kind of claim 1 obtains is Ag- Al2O3- AgAu MIM three-decker, wherein Ag film is as first layer reflectance coating, Al2O3Film is as middle dielectric layer.
4. super-absorbent Ag-Au nanostructured surface laminated film as claimed in claim 3, as answering for SERS substrate material With.
CN201810807194.4A 2018-07-21 2018-07-21 A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof Pending CN109136847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810807194.4A CN109136847A (en) 2018-07-21 2018-07-21 A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810807194.4A CN109136847A (en) 2018-07-21 2018-07-21 A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof

Publications (1)

Publication Number Publication Date
CN109136847A true CN109136847A (en) 2019-01-04

Family

ID=64801521

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810807194.4A Pending CN109136847A (en) 2018-07-21 2018-07-21 A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof

Country Status (1)

Country Link
CN (1) CN109136847A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109837207A (en) * 2019-02-28 2019-06-04 中国科学院半导体研究所 Gene sequencing chip and method
CN110129756A (en) * 2019-06-10 2019-08-16 重庆大学 Metal film coupled nanosecond island surface enhanced Raman scattering substrate and preparation method thereof
CN110527955A (en) * 2019-09-30 2019-12-03 长春理工大学 A kind of step low-refraction Al2O3The preparation method of film

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6149868A (en) * 1997-10-28 2000-11-21 The Penn State Research Foundation Surface enhanced raman scattering from metal nanoparticle-analyte-noble metal substrate sandwiches
CN103409750A (en) * 2013-08-15 2013-11-27 南京邮电大学 Arrayed silver nanorods with surface-modifying gold nanoparticles and preparation method thereof
CN104746049A (en) * 2015-04-07 2015-07-01 南京大学 Method for preparing surface-enhanced Raman scattering base with metal nanometer gaps by utilizing ALD (atomic layer deposition)
CN104764732A (en) * 2015-04-09 2015-07-08 复旦大学 Surface-enhanced raman scattering base on basis of special-material superabsorbers and preparation method thereof
CN108277484A (en) * 2018-01-22 2018-07-13 安徽师范大学 A kind of preparation method of hollow Ag-Au alloys composite construction micro-nano array

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6149868A (en) * 1997-10-28 2000-11-21 The Penn State Research Foundation Surface enhanced raman scattering from metal nanoparticle-analyte-noble metal substrate sandwiches
CN103409750A (en) * 2013-08-15 2013-11-27 南京邮电大学 Arrayed silver nanorods with surface-modifying gold nanoparticles and preparation method thereof
CN104746049A (en) * 2015-04-07 2015-07-01 南京大学 Method for preparing surface-enhanced Raman scattering base with metal nanometer gaps by utilizing ALD (atomic layer deposition)
CN104764732A (en) * 2015-04-09 2015-07-08 复旦大学 Surface-enhanced raman scattering base on basis of special-material superabsorbers and preparation method thereof
CN108277484A (en) * 2018-01-22 2018-07-13 安徽师范大学 A kind of preparation method of hollow Ag-Au alloys composite construction micro-nano array

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109837207A (en) * 2019-02-28 2019-06-04 中国科学院半导体研究所 Gene sequencing chip and method
CN110129756A (en) * 2019-06-10 2019-08-16 重庆大学 Metal film coupled nanosecond island surface enhanced Raman scattering substrate and preparation method thereof
CN110129756B (en) * 2019-06-10 2020-07-10 重庆大学 Metal film coupled nano island surface enhanced Raman scattering substrate and preparation method thereof
CN110527955A (en) * 2019-09-30 2019-12-03 长春理工大学 A kind of step low-refraction Al2O3The preparation method of film

Similar Documents

Publication Publication Date Title
Bhaskar et al. Superior resonant nanocavities engineering on the photonic crystal-coupled emission platform for the detection of femtomolar iodide and zeptomolar cortisol
Zhou et al. Electrical tuning of the SERS enhancement by precise defect density control
US9127984B2 (en) SERS-active structure, fabrication method thereof, and SERS system comprising the same
CN109136847A (en) A kind of super-absorbent Ag-Au nanostructured surface laminated film and preparation method thereof
US8279436B2 (en) Trace detection device of biological and chemical analytes and detection method applying the same
Ando et al. Optical hydrogen sensitivity of noble metal–tungsten oxide composite films prepared by sputtering deposition
KR101639686B1 (en) substrate which have multiple nano-gaps and fabricating method for the same
US10527494B2 (en) Substrate on which multiple nanogaps are formed, and manufacturing method therefor
Shafi et al. Highly efficient SERS substrates with different Ag interparticle nanogaps based on hyperbolic metamaterials
Hao et al. Modified Ag nanoparticles on the regular array structure to improve the optical properties
Shoute et al. Optical interference effects in the design of substrates for surface-enhanced Raman spectroscopy
TWI500921B (en) Optical sensing chip
US20150131092A1 (en) Optical device and detection apparatus
CN104764732A (en) Surface-enhanced raman scattering base on basis of special-material superabsorbers and preparation method thereof
Wang et al. Floating silver film: A flexible surface-enhanced Raman spectroscopy substrate for direct liquid phase detection at gas–liquid interfaces
Kwon et al. Influence of surface plasmon resonance wavelength on SERS activity of naturally grown silver nanoparticle ensemble
Song et al. Gold-modified silver nanorod arrays for SERS-based immunoassays with improved sensitivity
Upender et al. SERS study of molecules on Ag nanocluster films deposited on glass and silicon substrates by cluster deposition method
Milekhin et al. Nanoantenna-assisted plasmonic enhancement of IR absorption of vibrational modes of organic molecules
Wagner et al. Towards multi-molecular surface-enhanced infrared absorption using metal plasmonics
Chen et al. Fabrication of tunable Au SERS nanostructures by a versatile technique and application in detecting sodium cyclamate
Shoute Multilayer Substrate‐Mediated Tuning Resonance of Plasmon and SERS EF of Nanostructured Silver
Zhang et al. Research on the Raman properties of NiFe/cicada wing composite SERS platform modified by silver nanoparticles
Yun et al. Highly manufacturable nanoporous Ag films using new sputtering system for surface enhanced Raman scattering substrate
JP2013246115A (en) Optical device and detector

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20190104