CN104372299A - Multilayer-structural hard wear-resistant lubrication coating and preparation method thereof - Google Patents
Multilayer-structural hard wear-resistant lubrication coating and preparation method thereof Download PDFInfo
- Publication number
- CN104372299A CN104372299A CN201310432322.9A CN201310432322A CN104372299A CN 104372299 A CN104372299 A CN 104372299A CN 201310432322 A CN201310432322 A CN 201310432322A CN 104372299 A CN104372299 A CN 104372299A
- Authority
- CN
- China
- Prior art keywords
- wear
- coating
- resisting
- multilayered structure
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention discloses a multilayer-structural hard wear-resistant lubrication coating and a preparation method thereof, and a multilayer Mo-Al-Si-N / Mo-Ag-N coating is prepared by alternate deposition of Mo-Al-Si-N and Mo-Ag-N coatings on a substrate by magnetron sputtering. The multilayer-structural hard wear-resistant lubrication coating has high hardness and oxidation resistance temperature and low friction coefficient and wear rate, is especially suitable for plating good-quality super hard films on high speed dry cutting tools (milling cutters and drills) and other wear-resistant workpieces. The preparation method of the invention has fast deposition speed, high efficiency and low production cost.
Description
Technical field
The invention belongs to thin-film material and Surface Science technical field, be specifically related to a kind of multilayer Mo-Al-Si-N/Mo-Ag-N hard, wear-resisting, slip coating and its production and use.
Background technology
Hard and superhard coating are due to its higher hardness, good wear resistance, erosion resistance and chemical stability etc., be widely used in cutting the fields such as industry, mould industry, geological drilling, weaving, automobile making, machinofacture, aerospace, and played more and more important effect.With hard coat cut industry be applied as example, after cutting tool surface-coated hard coat, compared with non-coated tool, the working durability improve more than 5 ~ 10 times.The more important thing is, the material that the cutter that coated cutting tool can process non-coating cannot be processed, be therefore considered to cut the revolution in history.
In the course of processing, high-speed friction between coated tool and workpiece can cause meaningless energy expenditure on the one hand, also makes the temperature of coatingsurface sharply raise on the other hand, causes the mechanical property of coating to worsen under thermal shocking repeatedly.Existing data display, the direct and indirect economic loss that China causes because rubbing every year is up to billions of.Therefore, if the frictional coefficient of tool coating can be reduced, will greatly save material and save energy.In addition, along with production efficiency and the raising, particularly DRY CUTTING of working accuracy, the appearance of the technology such as high speed cutting and high-speed milling, require that the top coat of instrument not only has high hardness, and low frictional coefficient will be had.Therefore, research and development have high-quality coating that is high hard, low-friction coefficient and not only have realistic meaning and good economic benefit, and meet environmental protection under harmonious society's main body, energy-conservation theory, have important social effect.
As things go, except quasi-diamond (DLC) coating, the lubricity of most hard and superhard coating is all very poor.As can be seen from Table 1, industrial circle applies more TiN base and CrN base coating, and their frictional coefficient is generally all greater than 0.4, after adding " C ", their frictional coefficient can be reduced to 0.1-0.2, but the amplitude that the maximum operating temperature of coating declines is also very large, even lower than 400 DEG C.Although the frictional coefficient of diamond-like coating lower (< 0.1), but because following reason limits its range of application: the 1) poor heat stability of DLC film, when temperature hydrogenolysis occurs from graphite transition higher than when 200 DEG C, during higher than 450 DEG C, start to occur obvious oxidative phenomena and completely hydrogenolysis from, DLC film performance will obviously be deteriorated; 2) material that the tool matrix of DLC films deposited is the most frequently used is W-Co kind Wimet, but the cobalt in Wimet can impel diamond to transform to graphite under the condition of CVD causes the bonding strength of diamond-film-like and substrate very low, and the hardness of coating sharply declines simultaneously.
Table 1: famous Coatings Corporation produces coat type and performance
Therefore how to utilize magnetron sputtering technique to be prepared by special one-tenth component selections and structure design and can have high rigidity concurrently in broad temperature interval (0-800 DEG C), focus that the wear-resistant coating of low-friction coefficient becomes research.
Summary of the invention
The object of this invention is to provide a kind of multilayered structure coating having hard, wear-resisting, lubrication in broad temperature interval (0-800 DEG C) concurrently.
Another object of the present invention is to provide a kind of simple to operate, and sedimentation rate is fast, is easy to the method producing this multilayered structure coating in batches.
For realizing above object of the present invention, the present invention adopts following technical scheme:
A kind of multilayered structure hard, wear-resisting, slip coating, it is characterized in that described coating comprises Mo-Al-Si-N and Mo-Ag-N thin film layer alternately, have the multilayered structure of at least one Mo-Al-Si-N/Mo-Ag-N, namely described multilayered structure hard, wear-resisting, slip coating are made up of the double-layer structure of one deck Mo-Al-Si-N and one deck Mo-Ag-N thin film layer.
Preferably, described coating has the repeating structure of at least two Mo-Al-Si-N/Mo-Ag-N multilayers, namely described multilayered structure hard, wear-resisting, slip coating are by one deck Mo-Al-Si-N and one deck Mo-Ag-N thin film layer, then the multilayered structure adding at least one deck Mo-Al-Si-N and one deck Mo-Ag-N thin film layer is formed.
More preferably, described coating has the repeating structure of at least three Mo-Al-Si-N/Mo-Ag-N multilayers.
Further preferably, described coating has the repeating structure of at least four Mo-Al-Si-N/Mo-Ag-N multilayers.
Another aspect of the present invention, the preparation method of described multilayered structure hard, wear-resisting, slip coating, comprise the step of method alternating deposit Mo-Al-Si-N and the Mo-Ag-N thin film layer on substrate adopting magnetron sputtering, by first depositing one deck Mo-Ag-N thin film layer on substrate, deposit one deck Mo-Al-Si-N thin film layer again, form a Mo-Al-Si-N/Mo-Ag-N multilayered structure.
Preferably, the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer repeats at least one times, namely forms the repeating structure of two Mo-Al-Si-N/Mo-Ag-N multilayers.
More preferably, the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer repeats at least twice, namely forms the repeating structure of three Mo-Al-Si-N/Mo-Ag-N multilayers.
Further preferably, the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer repeats at least three times, namely forms the repeating structure of four Mo-Al-Si-N/Mo-Ag-N multilayers.
In a preferred embodiment, the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer comprises:
1) by stainless steel substrates through polishing, clean, dry up after obtain film substrate;
2) be arranged on respectively on DC cathode by Mo-Ag and Mo-Al-Si composition target, stainless steel substrate loads sample table, and the distance of adjustment target and substrate is 55mm;
3) start shooting, be evacuated to 1x10
-3pa, heated substrate to 400 DEG C, then logical people's argon nitrogen mixed gas, adjustment Ar/N
2throughput ratio to 3: 1, adjustment operating air pressure is to 1.0Pa;
4) open magnetron sputtering power supply, adjustment sputtering power is for being respectively 90W and 120W, and dual-target sputtering starts simultaneously, the rotating speed of adjustment substrate, and controlling total sputtering time is 90min;
5) sputtered, closed sputtering, heating power supply, stopped ventilation, below condition borehole cooling to 90 that sample vacuumizes at molecular pump DEG C, closed molecular pump, close power supply; Cool to room temperature under natural vacuum, then takes out sample.
Another aspect of the invention, described multilayered structure hard, wear-resisting, slip coating, be applicable to the high-quality superhard thin film that high-speed dry type cutting instrument (milling cutter, drill bit) and wear-resisting workpiece are coated with.
Multilayered structure coating according to the present invention has higher hardness and oxidation-resistance temperature and low frictional coefficient and wear rate, the high-quality superhard thin film that particularly suitable high-speed dry type cutting instrument (milling cutter, drill bit) and other wear-resisting workpieces are coated with.
Multilayered structure coating production sedimentation velocity of the present invention is fast, and efficiency is high, and production cost is low.
Accompanying drawing explanation
Fig. 1 is the surface topography photo of Mo-Ag-N coating of the present invention 500 DEG C annealing after 1 hour.
Fig. 2 is surface microstructure electron microscopic picture and the diffractogram of multilayered structure coating of the present invention.
Fig. 3 is that the x-ray photoelectron spectrometer chemistry key state of multilayered structure coating of the present invention characterizes schematic diagram.
Fig. 4 is multilayered structure coating X-ray diffraction spectrogram of the present invention.
Fig. 5 is multilayered structure coating stereoscan photograph of the present invention.
Fig. 6 is multilayered structure coating hardness of the present invention test schematic diagram.
Fig. 7 is multilayered structure coating PVvalue testing schematic diagram of the present invention.
Fig. 8 is multilayered structure coating cut of the present invention test schematic diagram.
Embodiment
Below in conjunction with embodiment more specifically the present invention done and launches further to illustrate, but it is pointed out that Rotating fields hard of the present invention, wear-resisting, slip coating is not limited to this specific structure and preparation method.Obviously be understandable that for those skilled in the art, even if the following description content does not make any adjustments or revises, also can be directly applied in these unspecified other similar repeating structure and preparation technologies.
A kind of multilayered structure hard, wear-resisting, slip coating, it is characterized in that described coating comprises Mo-Al-Si-N and Mo-Ag-N thin film layer alternately, there is the multilayered structure of at least one Mo-Al-Si-N/Mo-Ag-N, preferably there is the multilayer repeating structure of multiple Mo-Al-Si-N/Mo-Ag-N, as shown in Figure 5, such as there is the repeating structure of at least 2 layers of Mo-Al-Si-N/Mo-Ag-N, the repeating structure of at least 3 layers of Mo-Al-Si-N/Mo-Ag-N, the repeating structure of at least 4 layers of Mo-Al-Si-N/Mo-Ag-N, the repeating structure of at least 5 layers of Mo-Al-Si-N/Mo-Ag-N, but be not limited thereto.The thickness of every one deck Mo-Al-Si-N/Mo-Ag-N thin film layer is without any restriction, and such as 10nm ~ 800nm, 100 ~ 500nm, 150 ~ 350nm etc., but be not limited thereto, all should within protection scope of the present invention.The thickness of every one deck Mo-Al-Si-N/Mo-Ag-N thin film layer also can be identical or different, and this is all that magnetically controlled sputter method passes through to regulate sputtering parameter comparatively easily to realize, also should within protection scope of the present invention.
Multilayered structure hard of the present invention, wear-resisting, slip coating have hard concurrently, know-why that is wear-resisting, lubrication three large characteristics is as follows:
1) shearing modulus of Ag is less, and therefore Ag film has excellent lubricity; The hardness of Mo-N coating is high, and wear resistance is good.
2) the high temperature annealing experiment of Mo-Ag-N coating shows: in the process of annealing; Ag in coating can be diffused into the surface of coating; form Ag particle or coacervate (as shown in Figure 1, the surface topography of Mo-Ag-N coating 500 DEG C annealing after 1 hour: the white particle on surface is silver).Follow-up friction and wear test shows, in the process of friction, meeting form one deck continuous print Ag film thus play the effect of effectively lubricating between coating and friction pair.And Ag is from the work-ing life directly determining coating in Mo-N coating to the speed of coatingsurface diffusion.
3) Mo-Al-Si-N coating has high density, hardness and oxidation resistance temperature, it is deposited on Mo-Ag-N coatingsurface and effectively can slows down speed that Ag diffuses to the surface and Mo-Ag-N coating can be protected not by high temperature oxidation.
4) laminated coating structure, the i.e. repetition of multiple Mo-Al-Si-N/Mo-Ag-N, not only can utilize super model graded effect to improve the overall performance of coating, and can extend the lubrication time of coating further.
Therefore, multilayered structure coating of the present invention has higher hardness and oxidation-resistance temperature and low frictional coefficient and wear rate, thus the high-quality superhard thin film that particularly suitable high-speed dry type cutting instrument (milling cutter, drill bit) and other wear-resisting workpieces are coated with.
Another aspect of the present invention, the step that alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer prepare multilayer Mo-Al-Si-N/Mo-Ag-N coating comprises:
1) by stainless steel substrates through polishing, clean, dry up after obtain film substrate;
2) be arranged on respectively on DC cathode by Mo-Ag and Mo-Al-Si composition target, stainless steel substrate loads sample table, and the distance of adjustment target and substrate is 55mm;
3) start shooting, be evacuated to 1x10
-3pa, heated substrate to 400 DEG C, then logical people's argon nitrogen mixed gas, adjustment Ar/N
2throughput ratio to 3: 1, adjustment operating air pressure is to 1.0Pa;
4) open magnetron sputtering power supply, adjustment sputtering power is for being respectively 90W and 120W, and dual-target sputtering starts simultaneously, the rotating speed of adjustment substrate, and controlling total sputtering time is 90min;
5) sputtered, closed sputtering, heating power supply, stopped ventilation, below condition borehole cooling to 90 that sample vacuumizes at molecular pump DEG C, closed molecular pump, close power supply; Cool to room temperature under natural vacuum, then takes out sample.
Described magnetic control sputtering device and technique all can with reference to prior aries, and this is well-known to those skilled in the art and conventional plated film means.Particularly, such as, according to above-mentioned preparation method, the Mo sheet of X-type is attached to the surface of Ag target as Mo-Ag target, the Al of long strip shape and silicon chip are attached to the surface of Mo target respectively as Mo-Al-Si composition target.The content of a component in coating can be controlled by the area ratio adjusting them.Be put at the bottom of cleaned stainless steel lining on substrate pallet, be evacuated down to 1X10
-3pa, then heated substrate is to 400 DEG C, passes into nitrogen argon mixture gas (Ar: N
2=3: 1), total operating air pressure is 1Pa, and sputtering power is for being respectively 90W and 120W.Plated film, after 90 minutes, stops arc, stops the supple of gas or steam, and disconnected heating power supply, under the condition that molecular pump vacuumizes, lowers the temperature gradually.When temperature drops to below 90 DEG C, close molecular pump, close power supply.Under natural vacuum after cool to room temperature, bleed off vacuum, take out sample, carry out pattern Microstructure characterization and performance test to coating, result is as follows.
As shown in Figure 2, adopt transmission electron microscope (JEOL, JEM-2000FX) the high-resolution electron microscopy picture obtained after observing the surface microstructure of multilayered structure coating prepared by preceding method and choose diffractogram accordingly, result shows that coating is made up of the crystal phase of face-centred cubic structure and amorphous phase.
As shown in Figure 3, adopt x-ray photoelectron spectrometer (XPS, Japan, Axis ultradld) the chemical key state to multilayered structure coating prepared by preceding method to characterize, result shows mainly there is Si-N in coating, Mo-N, Al-N key.
As shown in Figure 4, the x-ray diffraction pattern (XRD) obtained after the multilayered structure coating adopting Phillips X ' Pert type x-ray diffractometer test preceding method to prepare, the X-coordinate in figure is 2 θ angles, and ordinate zou is diffracted intensity.Result shows that coating is face-centred cubic structure.
As shown in Figure 5, the photo obtained is taken after the multilayer films surface topography adopting the field emission scanning electron microscope of Japanese JEOL company observation preceding method to prepare, can find out that coating is multilayered structure, the thickness of each basic repeating unit Mo-Al-Si-N/Mo-Ag-N is 340nm.
As shown in Figure 6, adopt the nano-hardness tester (G200) of Aglient company of the U.S. to carry out hardness test to multilayered structure coating prepared by preceding method, result shows that the hardness of coating is up to 43GPa.
As shown in Figure 7, adopt the frictional coefficient of multilayered structure coating 600 DEG C time prepared by the UMT-2 type friction and wear test instrument of U.S. CE TR test preceding method, result shows that the frictional coefficient of coating is low to 0.16.
As shown in Figure 8, adopt three-dimensional optical surface profiler (Wyko NT1100) to the observable result of the cut after testing friction, the wear rate that can calculate coating in conjunction with concrete test parameter is 4 × 10-6mm
3/ Nm.
Although give detailed description and explanation to the specific embodiment of the present invention above; but what should indicate is; we can carry out various equivalence according to conception of the present invention to above-mentioned embodiment and change and amendment; its function produced do not exceed that specification sheets and accompanying drawing contain yet spiritual time, all should within protection scope of the present invention.
Claims (10)
1. multilayered structure hard, wear-resisting a, slip coating, is characterized in that described coating comprises Mo-Al-Si-N and Mo-Ag-N thin film layer alternately, has the multilayered structure of at least one Mo-Al-Si-N/Mo-Ag-N.
2. multilayered structure hard according to claim 1, wear-resisting, slip coating, is characterized in that described coating has the repeating structure of at least two Mo-Al-Si-N/Mo-Ag-N multilayers.
3. multilayered structure hard according to claim 2, wear-resisting, slip coating, is characterized in that described coating has the repeating structure of at least three Mo-Al-Si-N/Mo-Ag-N multilayers.
4. multilayered structure hard according to claim 3, wear-resisting, slip coating, is characterized in that described coating has the repeating structure of at least four Mo-Al-Si-N/Mo-Ag-N multilayers.
5. the preparation method of the multilayered structure hard described in any one of claim 1-4, wear-resisting, slip coating, comprises the step of method alternating deposit Mo-Al-Si-N and the Mo-Ag-N thin film layer on substrate adopting magnetron sputtering.
6. the preparation method of multilayered structure hard according to claim 5, wear-resisting, slip coating, is characterized in that the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer repeats at least one times.
7. the preparation method of multilayered structure hard according to claim 6, wear-resisting, slip coating, is characterized in that the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer repeats at least twice.
8. the preparation method of multilayered structure hard according to claim 7, wear-resisting, slip coating, is characterized in that the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer repeats at least three times.
9. the preparation method of the multilayered structure hard according to any one of claim 5-8, wear-resisting, slip coating, is characterized in that the step of described alternating deposit Mo-Al-Si-N and Mo-Ag-N thin film layer comprises:
1) by stainless steel substrates through polishing, clean, dry up after obtain film substrate;
2) be arranged on respectively on DC cathode by Mo-Ag and Mo-Al-Si composition target, stainless steel substrate loads sample table, and the distance of adjustment target and substrate is 55mm;
3) start shooting, be evacuated to 1x10
-3pa, heated substrate to 400 DEG C, then logical people's argon nitrogen mixed gas, adjustment Ar/N
2throughput ratio to 3: 1, adjustment operating air pressure is to 1.0Pa;
4) open magnetron sputtering power supply, adjustment sputtering power is for being respectively 90W and 120W, and dual-target sputtering starts simultaneously, the rotating speed of adjustment substrate, and controlling total sputtering time is 90min;
5) sputtered, closed sputtering, heating power supply, stopped ventilation, below condition borehole cooling to 90 that sample vacuumizes at molecular pump DEG C, closed molecular pump, close power supply; Cool to room temperature under natural vacuum, then takes out sample.
10. the multilayered structure hard described in any one of claim 1-4, wear-resisting, slip coating, be applicable to the high-quality superhard thin film that high-speed dry type cutting instrument and wear-resisting workpiece are coated with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310432322.9A CN104372299B (en) | 2013-09-23 | 2013-09-23 | Sandwich construction hard, wear-resisting, lubricant coating and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310432322.9A CN104372299B (en) | 2013-09-23 | 2013-09-23 | Sandwich construction hard, wear-resisting, lubricant coating and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104372299A true CN104372299A (en) | 2015-02-25 |
| CN104372299B CN104372299B (en) | 2017-08-04 |
Family
ID=52551488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310432322.9A Expired - Fee Related CN104372299B (en) | 2013-09-23 | 2013-09-23 | Sandwich construction hard, wear-resisting, lubricant coating and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104372299B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106811725A (en) * | 2015-11-27 | 2017-06-09 | 中国科学院宁波材料技术与工程研究所 | Temperature range self adaptation lubricant coating wide and preparation method and application |
| CN107267940A (en) * | 2017-06-09 | 2017-10-20 | 中国科学院合肥物质科学研究院 | A kind of Au Cu/Ag Al nano-multilayer film surface-enhanced fluorescence substrates and its application |
| CN112628381A (en) * | 2020-12-02 | 2021-04-09 | 东南大学 | Temperature self-adaptive lubricating gear and preparation method thereof |
| WO2023019549A1 (en) * | 2021-08-20 | 2023-02-23 | 湖南泰嘉新材料科技股份有限公司 | Self-lubricating coated hob cutter for band saw blade milling teeth, preparation method therefor, and application thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101484605A (en) * | 2006-06-02 | 2009-07-15 | 贝卡尔特先进涂层公司 | Rotatable sputter target |
| CN102644054A (en) * | 2012-04-28 | 2012-08-22 | 南京航空航天大学 | Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces |
| US20120247948A1 (en) * | 2009-11-19 | 2012-10-04 | Seung Yong Shin | Sputtering target of multi-component single body and method for preparation thereof, and method for producing multi-component alloy-based nanostructured thin films using same |
| CN103270188A (en) * | 2010-10-28 | 2013-08-28 | 欧瑞康贸易股份公司(特吕巴赫) | Molybdenum monoxide layers, and production thereof using pvd |
-
2013
- 2013-09-23 CN CN201310432322.9A patent/CN104372299B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101484605A (en) * | 2006-06-02 | 2009-07-15 | 贝卡尔特先进涂层公司 | Rotatable sputter target |
| US20120247948A1 (en) * | 2009-11-19 | 2012-10-04 | Seung Yong Shin | Sputtering target of multi-component single body and method for preparation thereof, and method for producing multi-component alloy-based nanostructured thin films using same |
| CN103270188A (en) * | 2010-10-28 | 2013-08-28 | 欧瑞康贸易股份公司(特吕巴赫) | Molybdenum monoxide layers, and production thereof using pvd |
| CN102644054A (en) * | 2012-04-28 | 2012-08-22 | 南京航空航天大学 | Composite surface treatment process for preparing amorphous-nanocrystalline molybdenum disilicide base abrasion resistant and corrosion resistant coatings on titanium alloy surfaces |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106811725A (en) * | 2015-11-27 | 2017-06-09 | 中国科学院宁波材料技术与工程研究所 | Temperature range self adaptation lubricant coating wide and preparation method and application |
| CN106811725B (en) * | 2015-11-27 | 2019-02-15 | 中国科学院宁波材料技术与工程研究所 | Wide adaptive lubricant coating of temperature range and the preparation method and application thereof |
| CN107267940A (en) * | 2017-06-09 | 2017-10-20 | 中国科学院合肥物质科学研究院 | A kind of Au Cu/Ag Al nano-multilayer film surface-enhanced fluorescence substrates and its application |
| CN107267940B (en) * | 2017-06-09 | 2019-06-18 | 中国科学院合肥物质科学研究院 | A kind of Au-Cu/Ag-Al nano-multilayer film surface-enhanced fluorescence substrate and its application |
| CN112628381A (en) * | 2020-12-02 | 2021-04-09 | 东南大学 | Temperature self-adaptive lubricating gear and preparation method thereof |
| WO2023019549A1 (en) * | 2021-08-20 | 2023-02-23 | 湖南泰嘉新材料科技股份有限公司 | Self-lubricating coated hob cutter for band saw blade milling teeth, preparation method therefor, and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104372299B (en) | 2017-08-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105624618B (en) | TiAlSiZrN base composite coatings, the gradient ultra-fine cemented carbide cutter with the composite coating and preparation method thereof | |
| Fernandes et al. | Tribological and cutting performance of TiAlCrN films with different Cr contents deposited with multilayered structure | |
| TWI354708B (en) | Working-parts with alcr-containing hard-material l | |
| CN103252939B (en) | Chromium nitride/boron nitride titanium nano composite multi-layer coating cutter and preparation method thereof | |
| Cai et al. | Gradient architecture of Si containing layer and improved cutting performance of AlCrSiN coated tools | |
| MX2010006339A (en) | Coated article with nanolayered coating scheme. | |
| CN104131250A (en) | Nanometer composite cutting tool coating with gradient composition design and preparation method thereof | |
| Bhaduri et al. | On tribological behaviour and application of TiN and MoS2-Ti composite coating for enhancing performance of monolayer cBN grinding wheel | |
| CN109504940A (en) | A kind of AlCrN/AlCrSiNiN coating of periodic nanometer multilayered structure and its preparation method and application | |
| CN108823526A (en) | A kind of nanometer multilayer compounded superhard cutter coat and preparation method thereof | |
| CN107083551A (en) | A kind of ternary doping nano composite multiple layer diamond-like coating and its preparation method and application | |
| CN108517487B (en) | TiAlN/W with high hardness and high wear resistance2N-multilayer coating and method for producing same | |
| CN104372299A (en) | Multilayer-structural hard wear-resistant lubrication coating and preparation method thereof | |
| CN104002516A (en) | CrAlN/MoS2 multi-layered coating layer with high rigidity and low friction coefficient and preparation method thereof | |
| CN102242338A (en) | Composite coated cutting tool containing periodic coating and preparation method thereof | |
| Yang et al. | The properties and performance of Cr-based multilayer nitride hard coatings using unbalanced magnetron sputtering and elemental metal targets | |
| CN109763093A (en) | Mechanical part and preparation method thereof with composite coating | |
| Chang et al. | Influence of bi-layer period thickness on the residual stress, mechanical and tribological properties of nanolayered TiAlN/CrN multi-layer coatings | |
| CN101200797B (en) | PVD nano multiple-layer coating for cutting stainless steel and preparation method thereof | |
| CN101618614B (en) | TiC/Si3N4 nano laminated coating and preparation method thereof | |
| CN109628892A (en) | A kind of preparation method of VN/Ag wide temperature range lubrication laminated film | |
| CN102785422B (en) | Vanadium nitride tool coating and manufacturing method thereof | |
| Sun et al. | Microstructures and properties of Mo2N+ MoS2 coatings deposited by direct current magnetron sputtering | |
| CN101618615B (en) | VC/Si3N4 nano laminated coating and preparation method thereof | |
| CN105216021A (en) | A kind of composite processing diamond-coated tools and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170804 Termination date: 20200923 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |