CN109763093A - Mechanical part and preparation method thereof with composite coating - Google Patents
Mechanical part and preparation method thereof with composite coating Download PDFInfo
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- CN109763093A CN109763093A CN201910018282.0A CN201910018282A CN109763093A CN 109763093 A CN109763093 A CN 109763093A CN 201910018282 A CN201910018282 A CN 201910018282A CN 109763093 A CN109763093 A CN 109763093A
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- 238000000576 coating method Methods 0.000 title claims abstract description 144
- 239000011248 coating agent Substances 0.000 title claims abstract description 141
- 239000002131 composite material Substances 0.000 title claims abstract description 49
- 238000002360 preparation method Methods 0.000 title abstract description 15
- 239000011195 cermet Substances 0.000 claims abstract description 63
- 239000010410 layer Substances 0.000 claims abstract description 63
- 239000011230 binding agent Substances 0.000 claims abstract description 43
- 239000000463 material Substances 0.000 claims abstract description 42
- 230000007704 transition Effects 0.000 claims abstract description 40
- 239000011159 matrix material Substances 0.000 claims abstract description 31
- 239000002346 layers by function Substances 0.000 claims abstract description 27
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 41
- 239000010936 titanium Substances 0.000 claims description 35
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 26
- 239000011651 chromium Substances 0.000 claims description 24
- 230000008569 process Effects 0.000 claims description 23
- 229910052719 titanium Inorganic materials 0.000 claims description 17
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 14
- 229910052804 chromium Inorganic materials 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 13
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052727 yttrium Inorganic materials 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 7
- 239000004411 aluminium Substances 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 230000000994 depressogenic effect Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000000356 contaminant Substances 0.000 claims description 3
- 239000003921 oil Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 2
- 238000007605 air drying Methods 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 4
- 238000005520 cutting process Methods 0.000 description 23
- 229910000760 Hardened steel Inorganic materials 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 7
- 239000004615 ingredient Substances 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 3
- QFUKUPZJJSMEGE-UHFFFAOYSA-N 5-(hydroxymethyl)-1-(3-methylbutyl)pyrrole-2-carbaldehyde Chemical compound CC(C)CCN1C(CO)=CC=C1C=O QFUKUPZJJSMEGE-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004567 concrete Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
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- 238000011160 research Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- LPXPTNMVRIOKMN-UHFFFAOYSA-M sodium nitrite Chemical compound [Na+].[O-]N=O LPXPTNMVRIOKMN-UHFFFAOYSA-M 0.000 description 2
- BVPWJMCABCPUQY-UHFFFAOYSA-N 4-amino-5-chloro-2-methoxy-N-[1-(phenylmethyl)-4-piperidinyl]benzamide Chemical compound COC1=CC(N)=C(Cl)C=C1C(=O)NC1CCN(CC=2C=CC=CC=2)CC1 BVPWJMCABCPUQY-UHFFFAOYSA-N 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910008482 TiSiN Inorganic materials 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
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- 238000002242 deionisation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 239000004519 grease Substances 0.000 description 1
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- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
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- 150000004767 nitrides Chemical class 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
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- 235000010288 sodium nitrite Nutrition 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
This application involves a kind of mechanical part and preparation method thereof with composite coating.The mechanical part includes: matrix, binder course, transition zone, alternating layer and functional layer.The binder course is formed at least part surface of described matrix, wherein the material of the binder course includes any one of TiN, CrN；The transition zone is formed on the binder course, wherein the material of the transition zone is AlTiCrN；The alternating layer is formed on the transition zone, wherein the alternating layer includes the first cermet coating and the second cermet coating being sequentially alternately stacked, wherein the material of first cermet coating is TiSiYN, and the material of second cermet coating is AlTiCrN；And the functional layer is formed on the alternating layer, wherein the material of the functional layer is TiSiYN.The mechanical part with the composite coating of the application has good thermal stability, hardness and toughness, so that machining efficiency and service life be significantly increased.
Description
Technical field
Embodiments herein is related to composite coating technology field, more particularly, to the compound painting for mechanical part
Layer.
Background technique
In the industry, the use of highly difficult rapidoprint is more and more frequent, and standard machinery component is no longer satisfied new
The effect of requirement, coating obtains the close attention and research of people.By either physically or chemically being deposited in matrix surface
One layer of high rigidity, wear-resisting property are good, and the method for the excellent ganoine thin film of high high-temp stability has been used widely.
With the continuous improvement of requirement, the heat-resistant stable of surface covering, inoxidizability and mechanical part are made
Increasingly higher demands are proposed with the service life.In the quick cutting process of dry type, coating is easy to happen decomposition failure at high temperature,
It cannot achieve the protective effect to mechanical part, lead to mechanical part abrasion tipping.By structure coating nano-multilayered structures, lead to
The epitaxial growth model-based optimization coatings growth structure for crossing coating, can be further improved the high high-temp stability of coating, hardness and
Toughness.
Summary of the invention
The first purpose of embodiments herein is to provide a kind of with the mechanical part of composite coating and its preparation side
Method, the composite coating have multilayer lamination structure, wherein making each coating by difference using physical gas-phase deposite method (PVD)
The composition of alloy material, to enhance the composite coating to the associativity, high-temperature stability and abrasion resistance properties of mechanical part, from
And the mechanical part is made to meet the cutting ability requirement under high-intensitive condition of high ground stress.
Some embodiments of the present application provide a kind of mechanical part with composite coating comprising matrix, binder course,
Transition zone, alternating layer and functional layer.The binder course is formed on at least part of surface of described matrix, wherein the combination
The material of layer includes any one of TiN, CrN；The transition zone is formed on the binder course, wherein the material of the transition zone
Matter is AlTiCrN；The alternating layer is formed on the transition zone, wherein the alternating layer includes first be sequentially alternately stacked
Cermet coating and the second cermet coating, wherein the material of first cermet coating is TiSiYN, second metal
The material of ceramic layer is AlTiCrN；And the functional layer is formed on the alternating layer, wherein the material of the functional layer is
TiSiYN。
Any according to some embodiments of the present application, in first cermet coating and second cermet coating
The number of plies of person is 50 layers~100 layers.
Any according to some embodiments of the present application, in first cermet coating and second cermet coating
Person with a thickness of 0.2nm~3nm；And the overall thickness of the composite coating is 1 μm~6 μm.
According to some embodiments of the present application, in the transition zone and second cermet coating in addition to N element its
His element presses atomic percentage, including 40%~70% aluminium (Al), 10%~30% chromium (Cr) and 10%~30%
Titanium (Ti).
According to some embodiments of the present application, in the functional layer and first cermet coating in addition to N element its
He presses atomic percentage by element, including 75%~90% titanium (Ti), 10%~20% silicon (Si) and 0%~5% yttrium
(Y)。
According to some embodiments of the present application, the mechanical part is cutter.
Some embodiments of the present application provide a kind of method for preparing the mechanical part with composite coating, including as follows
Step: matrix is provided；Using PVD process in forming binder course on at least part of surface of described matrix, wherein the combination
The material of layer is to include any one of TiN, CrN；Using PVD process in forming transition zone on the surface of the binder course,
Described in transition zone material be AlTiCrN；Using PVD process in forming alternating layer on the surface of the transition zone, wherein institute
It states alternating layer to be sequentially alternately stacked and formed by the first cermet coating and the second cermet coating, wherein first cermet
The material of layer is TiSiYN, and the material of second cermet coating is AlTiCrN；And using PVD process in the alternating
Functional layer is formed on the surface of layer, wherein the material of the functional layer is TiSiYN.
According to some embodiments of the present application, the method also includes before using PVD process, by the table of described matrix
Face is pre-processed, wherein the pretreatment includes: dry through chemicals removal surface and oil contaminant, clear water rinsing and high temperature air
One of or it is a variety of.
According to some embodiments of the present application, tied using PVD process in formation on at least part of surface of described matrix
The step of closing layer includes: the argon gas for being passed through purity and being 99.999%, under conditions of back bias voltage is 100V-800V, described in cleaning
The surface of matrix；It adjusts the negative bias and is depressed into 600V~1000V, open the target of the target comprising the binder course, wherein described
The target of binder course includes or mixtures thereof (Ti), chromium (Cr), and the arc ource electric current of the target is 80A~100A；And it adjusts
The negative bias is depressed into 20V~200V, is passed through nitrogen to form the binder course on at least part of surface of described matrix.
According to some embodiments of the present application, using PVD process in forming the transition zone on the surface of the binder course
The step of are as follows: under conditions of setting back bias voltage is 20V~200V and is passed through nitrogen, the target of the target containing AlTiCr is opened, wherein
The arc ource electric current of the AlTiCr target is 80A~300A to form the transition zone on the surface of the binder course.
According to some embodiments of the present application, using PVD process in forming the alternating layer on the surface of the transition zone
The step of are as follows: (1) under conditions of setting back bias voltage is 20V~200V and is passed through nitrogen, the target comprising TiSiY target is opened,
Wherein the arc ource electric current of the TiSiY target is 80A~300A to form first metal on the surface of the transition zone
Ceramic layer；(2) it closes the target comprising TiSiY target and opens the target of the target containing AlTiCr, wherein the arc of the AlTiCr target
Ource electric current is 80A~300A to form second cermet coating on the surface of first cermet coating；And (3)
It repeats the above steps (1) and step (2) 50 to 100 times to form the alternating layer.
According to some embodiments of the present application, using PVD process in forming the functional layer on the surface of the alternating layer
The step of are as follows: under conditions of setting substrate negative voltage is 20V~200V and is passed through nitrogen, the target comprising TiSiY target is opened,
Wherein the arc ource electric current of the TiSiY target is 80A~300A to form the functional layer on the surface of the alternating layer.
Detailed description of the invention
Hereinafter will be briefly explained attached drawing necessary in order to describe the embodiment of the present application or the prior art in order to
Embodiments herein is described.It should be evident that the attached drawing in being described below is merely the section Example in the application.To this
For the technical staff of field, under the premise of not needing creative work, still can according to these attached drawings in illustrated by tie
Structure obtains the attached drawings of other embodiments.
Fig. 1 is the partial transectional face structural representation according to the composite coating for mechanical part of some embodiments of the application
Figure.
Fig. 2 is the flow chart according to the preparation method of the composite coating for mechanical part of some embodiments of the application.
Fig. 3 is the X ray diffracting spectrum according to the composite coating for mechanical part of some embodiments of the application.
Fig. 4 is the cutting experiment comparison diagram according to the composite coating for mechanical part of some embodiments of the application.
Specific embodiment
Embodiments herein will be described in detail hereinafter.In present specification full text, by identical or
Similar component and component with the same or similar function are indicated by like reference numerals.It is described herein to have
Closing the embodiment of attached drawing is illustrative, graphic nature and the basic comprehension for providing to the application.The reality of the application
It applies example and is not construed as limitation to the application.
In the present specification, unless except being specified or being limited, the word of relativity for example: it is " central ", " longitudinal
", " lateral ", " front ", " rear ", " right ", " left ", " internal ", " external ", " lower ",
" higher ", " horizontal ", " vertically ", " being higher than ", " being lower than ", " top ", " lower section ", " top ", " bottom "
And its derivative word (such as " horizontally ", " down ", " upward " etc.) should be construed to reference under discussion
It is described or retouch the direction shown in the accompanying drawings.The word of these relativities be only used for description on convenience, and be not required for by
The application construction or operation in a certain direction.
In addition, sometimes herein with range format presentation amount, ratio and other numerical value.It should be understood that such range format
It is that and should neatly understand for convenient and for purpose of brevity, not only comprising being expressly specified as the numerical value of scope limitation, but also wraps
Containing all individual numbers or subrange within the scope of this are covered by, as explicitly specified each numerical value and subrange one
As.
Furthermore for ease of description, " first ", " second ", " third " etc. can be used to distinguish herein a figure or one
The different components of series of drawing.Unless " first ", " second ", " third " etc. are not intended to describe except being specified or being limited
Corresponding component.
Coating technology has obtained the close attention and research of people in recent years, wherein hardness with higher, appropriate tough
Property, the performance of fabulous corrosion-resistant and wear resistance magnesium-yttrium-transition metal nitride hard film, which gradually can not meet, actually answers
Needs.In order to improve coating performance, coating technology, which is developed to, to be added by alloyage process into binary nitride hard film
Add multiple element, forms polynary membrane system.Such as AlTiN coating, TiCrN coating, TiSiN coating etc., microhardness can reach
3000HV, high temperature resistant property reach 800 DEG C or more.But still it is unable to satisfy the mechanical part coating of certain high-temperature and high-stress occasions
Requirement.In the quick cutting process of dry type, need to improve processing performance such as hardness, corrosion resistance, the resistance to height of mechanical part
Warm nature and wearability.In order to further increase thermal stability, hardness and the toughness of coating, one of improved mode is will
The multicomponent material coating for having different physical characteristics repeatedly stack to form the composite coating with nano-multilayered structures.
Embodiments herein is by providing a kind of mechanical part and preparation method thereof with composite coating, wherein described
Composite coating has good thermal stability, hardness and toughness, so that the mechanical part obtains excellent comprehensive mechanical
Can, so that its machining efficiency be significantly increased, improve the mechanical part service life.
In order to better illustrate the application the mechanical part with composite coating beneficial effect and technical advantage, hereafter
In it will be described further in conjunction with this embodiments herein and Figure of description.
Fig. 1 is the partial transectional face structural representation according to the mechanical part with composite coating of some embodiments of the application
Figure.As shown in Figure 1, the binder course 102 is formed on at least part of surface of described matrix 101,103 shape of transition zone
On the surface of binder course 102 described in Cheng Yu, the alternating layer 104 is formed on the surface of the transition zone 103, and the function
Layer 105 is formed on the surface of the alternating layer 104.Wherein the alternating layer 104 includes the first metal being sequentially alternately stacked
Ceramic layer 106 and the second cermet coating 107.
It will be understood by those skilled in the art that the binder course 102, transition zone 103, alternating layer 104 and functional layer in Fig. 1
The position that 105 composite coatings constituted are formed in described matrix 101, which only facilitates, illustrates having in the embodiment of the present application
The schematic diagram of the mechanical part structure of composite coating.The composite coating can according to practical application request single side coat or it is two-sided
Coated on any position on the mechanical part matrix surface.For example, described multiple when the mechanical part is cutter
Blade, knife spine, the knife edge or point of a knife can be coated on by closing coating.
In some embodiments of the present application, the mechanical part can be any need well known to those skilled in the art
The mechanical part of high rigidity and excellent high-temperature behavior, such as, but not limited to, cutter, cutting tool, mold, components etc..
In some embodiments of the present application, the material of described matrix 101 can be any suitable routine in this field
Metal material, for example it includes but be not limited to, one of hard alloy, high-speed steel and wolfram steel or a variety of.
In some embodiments of the present application, the binder course 102 can be formed in described matrix 101 by PVD method
On at least part surface, the material of the binder course 102 includes any one of TiN and CrN, and the binder course can be into one
Step promotes the composite coating to the binding force of mechanical part.
In some embodiments of the present application, described in the transition zone 103 can be formed in by PVD method and be previously formed
On the surface of binder course 102, the material of the transition zone 103 is AlTiCrN.
In some embodiments of the present application, the alternating layer 104 includes the first cermet coating being sequentially alternately stacked
106 and second cermet coating 107.The alternating layer 104 can also be formed in the transition zone 103 being previously formed by PVD method
On, wherein the material of first cermet coating 106 is TiSiYN, and the material of second cermet coating 107 is
AlTiCrN.Wherein the alternating layer can be effectively promoted by the way that yttrium (Y) is added in the first cermet coating material
Compactness and hardness so that optimization has the heat-resisting quantity and wear resistence of the mechanical part of the composite coating, and do not influence
The hardness of mechanical part with the composite coating.
Any in some embodiments of the present application, in first cermet coating and second cermet coating
The number of plies of person is 50 layers~100 layers.
In some embodiments of the present application, described in the functional layer 105 can be formed in by PVD method and be previously formed
On the surface of alternating layer 104, the material of the functional layer 104 is TiSiYN, and the functional layer can be advanced optimized with institute
The hardness, toughness, anticorrosive and abrasion resistance properties of the mechanical part of composite coating are stated, to be promoted described with the compound painting
The service life of the mechanical part of layer.
In some embodiments of the present application, in first cermet coating 106 and second cermet coating 107
Any one with a thickness of 0.2nm~3nm；And the overall thickness of the composite coating is 1 μm~6 μm.
In some embodiments of the present application, N element is removed in the transition zone 103 and second cermet coating 107
Other elements press atomic percentage in addition, including 40%~70% aluminium (Al), 10%~30% chromium (Cr) and 10%~
30% titanium (Ti).Preferably, other elements are pressed in addition to N element in the transition zone 103 and second cermet coating 107
Atomic percentage, including 48%~62% aluminium (Al), 18%~27% chromium (Cr) and 18%~27% titanium (Ti).
In some embodiments of the present application, N element is removed in the functional layer 105 and first cermet coating 106
Other elements press atomic percentage in addition, including 75%~90% titanium (Ti), 10%~20% silicon (Si) and 0%~
5% yttrium (Y).Preferably, in the functional layer 105 and first cermet coating 106 in addition to N element other elements by original
Sub- percentages, including 78%~85% titanium (Ti), 12%~17% silicon (Si) and 1%~5% yttrium (Y).
In some embodiments of the present application, the coating microhardness of the mechanical part with composite coating is
30GPa~42GPa, and it can maintain coating structure to stablize at a high temperature of 1200 DEG C.
Fig. 2 is the flow chart according to the preparation method of the mechanical part with composite coating of some embodiments of the application.
As shown in Fig. 2, the preparation method of the mechanical part with composite coating of the embodiment of the present application the following steps are included:
Step 200 can be optionally carried out first, the surface of matrix is pre-processed to remove remaining ash on the surface of described matrix
Dirt, steam, grease or clast.
In some embodiments of the present application, the pre-treatment step can be the usual all surface of those skilled in the art
One of cleaning mode is a variety of, for example, it includes, but are not limited to chemicals removal surface and oil contaminant, clear water rinsing
It is dry with high temperature air.
Step 201 is then carried out, using PVD process in depositing binder course on at least part of surface of described matrix,
Described in the material of binder course include any one of TiN, CrN.
In some embodiments of the present application, step 201 further includes following steps: matrix is fitted into coating machine,
Adjustment carrier velocity is 1rpm~10rpm, will be evacuated to 2.5 × 10 in the furnace chamber in coating machine-3Pa~7 × 10-3Pa, and
Temperature in furnace chamber is heated to 300 DEG C~500 DEG C；The argon gas (Ar) that purity is 99.999% is subsequently passed with will be in furnace chamber
Air pressure is fixed as 0.1Pa~1Pa, and under conditions of back bias voltage is 100V~800V, carries out plasma clean described matrix
Surface 15 minutes~200 minutes.Back bias voltage is then adjusted to 600V~1000V, opens the target of the target comprising the binder course,
Wherein the target of the binder course includes or mixtures thereof titanium (Ti), chromium (Cr), by adjusting the arc of the target of the binder course
Ource electric current is to 80A~100A, by titanium (Ti) or chromium (Cr) high energy bombardment described matrix to activate its surface；Then turn down back bias voltage
To 20V~200V and it is passed through nitrogen the air pressure in furnace chamber is fixed as 1Pa~6Pa, under the conditions of 300 DEG C~500 DEG C, deposition 5
Minute~20 minutes the binder course to be formed on at least part of surface of described matrix.
Step 202 is then carried out, i.e., is deposited using PVD process on the surface that step 201 is formed by the binder course
Transition zone, the material of the transition zone are AlTiCrN.
In some embodiments of the present application, step 202 further includes following steps: being 300 DEG C in furnace chamber temperature
~500 DEG C, under conditions of nitrogen pressure is 1Pa~6Pa and the back bias voltage is 20V~200V, open the target containing AlTiCr
Target adjusts the arc ource electric current of the AlTiCr target to 80A~300A, deposits 20 minutes~50 minutes with by the transition zone shape
At on the surface that step 201 is formed by the binder course.
Next step 203 and 204 is sequentially carried out, i.e., the transition zone is formed by step 202 using PVD process
Sequentially the first cermet coating of alternating deposit and the second cermet coating on surface.The wherein material of first cermet coating
For TiSiYN, and the material of second cermet coating is AlTiCrN.
In some embodiments of the present application, step 203 and 204 further includes steps of and be in furnace chamber temperature
300 DEG C~500 DEG C, under conditions of nitrogen pressure is 1Pa~6Pa and the back bias voltage is 20V~200V, opening includes TiSiY
The target of target adjusts the arc ource electric current of the TiSiY target to 80A~300A, deposits 1 minute with by first cermet
Layer is formed in step 202 and is formed by the surface of the transition zone；It is then turned off the target comprising TiSiY target, and is beaten
The target for opening the target containing AlTiCr adjusts the arc ource electric current of the AlTiCr target to 80A~300A, deposits 1 minute with will be described
Second cermet coating is formed on the surface of first cermet coating.
By repeating sequentially to carry out step 203 and 204, to form the alternating layer with multilayer lamination structure.
It in some embodiments of the present application, step 203 and 204 is sequentially repeated 50 times~100 times, so that described
The stacking number of any one of first cermet coating and second cermet coating is 50 layers~100 layers.
Then, step 205 is carried out, i.e., is formed by the surface of the alternating layer in step 203 and 204 using PVD process
Upper deposit functional layers, the material of the functional layer are TiSiYN.
In some embodiments of the present application, it is 300 DEG C that step 205, which is further included steps of in furnace chamber temperature,
It~500 DEG C, under conditions of nitrogen pressure is 1Pa~6Pa and the back bias voltage is 20V~200V, opens comprising TiSiY target
Target adjusts the arc ource electric current of the TiSiY target to 80A~300A, deposits 30 minutes~60 minutes with by the functional layer shape
At on the surface of the alternating layer.
After forming composite coating with multi-layer structure to mechanical part surface, the cavity temperature in coating machine is down to
150 DEG C~220 DEG C, then the mechanical part by described with composite coating takes out described in coating machine room temperature cooling i.e. completion and has
The preparation of the mechanical part of composite coating.
Fig. 3 is the X ray diffracting spectrum according to the composite coating for mechanical part of some embodiments of the application.
As shown in figure 3, according to the X ray diffracting spectrum of alternating layer in the application composite coating it is found that in the alternating layer
Material TiSiYN and AlTiCrN to be formed by the first cermet coating and the second cermet coating be face-centered cubic packing knot
Structure.Coating with the structure has preferable high high-temp stability.When Y element content is more than 5% in coating, there is the second phase
The appearance of Cr simple substance has negative effect to coating mechanical property.
Some specific embodiments of the application will be hereinafter enumerated, and cutting test has been carried out with more to section Example
Well there is the beneficial effect of the mechanical part of composite coating to be illustrated to the application.It will be apparent to one skilled in the art that
Preparation method described in hereafter is only example embodiment, other any suitable preparation methods are within the scope of application.
Embodiment 1
(1) it is pre-processed using tungsten carbide tipped tool, using ultrasonic wave alkali cleaning, (sodium nitrite of ingredient 0.0005mol/L is molten
Liquid) 6 minutes, deionization rinses 2 minutes, then dries up tool surface using dried and clean compressed air.It is not coated with preprocessed
The cutter of layer is packed on Revolving rack of film-plating machine, and adjustment carrier velocity is 4rpm, is evacuated to 3 × 10 in furnace chamber-3Pa is opened simultaneously and is added
Hot device is heated to 400 DEG C, and being passed through argon gas (Ar) that purity is 99.999% for the air pressure adjustment in furnace chamber is 0.4Pa, by negative bias
Pressure is adjusted to 800V, carries out plasma clean 20 minutes to the tool surface.Then it reduces the negative bias and is depressed into 700V, and open
Pure titanium (Ti) target is opened, arc ource electric current is adjusted as 80A and bombards the cutter 8 minutes with titanium particle high energy to activate the cutter table
Face；Then reducing the back bias voltage is 100V, is passed through nitrogen and the air pressure in furnace chamber is made to rise to 4Pa, at 400 DEG C of temperature, is sunk
Product binder course 15 minutes, wherein the material of the binder course is TiN.
(2) it is 100V that the back bias voltage is maintained in the furnace chamber of coating machine, and the target for opening AlTiCr target is (wherein described
The atomic percent of each ingredient of AlTiCr target is Al 60%, Ti 20% and Cr 20%), adjusting arc ource electric current to 150A,
Deposition transition zone 25 minutes.
(3) it is 100V that the back bias voltage is maintained in the furnace chamber of coating machine, and the target for opening TiSiY target is (wherein described
The atomic percent of each ingredient of TiSiY target is Ti 80%, Si 15% and Y 5%), arc ource electric current is adjusted to 150A, is sunk
Product the first cermet coating 1 minute.It is then shut off the target of the TiSiY target, and the target for opening AlTiCr target is (wherein described
The atomic percent of each ingredient of AlTiCr target is Al 60%, Ti 20% and Cr 20%), adjust the AlTiCr target
Arc ource electric current be 150A, maintain the back bias voltage be 100V, deposit the second cermet coating 1 minute.
(4) it according to step (3), repeated deposition 50 times, deposits when alternating layer is shared about 100 minutes.
(5) it is 100V that the back bias voltage is maintained in the furnace chamber of coating machine, closes the target of AlTiCr target, and is opened
The target (wherein the atomic percent of each ingredient of the TiSiY target is Ti 80%, Si 15% and Y5%) of TiSiY target,
The arc ource electric current of the TiSiY target is 120A, and deposit functional layers 40 minutes to complete plated film to obtain with composite coating
Cutter.After completing plated film, cutter takes out room temperature cooling after being cooled to 200 DEG C with the furnace chamber in coating machine.
Embodiment 2
Identical as the preparation method of embodiment 1, different places is in embodiment 2 in each ingredient of the AlTiCr target
Atomic percent be Al 50%, Ti 25% and Cr 25%.
Embodiment 3
Identical as the preparation method of embodiment 2, different places is each ingredient of TiSiY target described in embodiment 3
Atomic percent is Ti 83%, Si 15% and Y 2%.
Embodiment 4
Identical as the preparation method of embodiment 1, different places is in embodiment 4 according to step (3) repeated deposition 80 times.
Embodiment 5
Identical as the preparation method of embodiment 3, different places is in embodiment 5 according to step (3) repeated deposition 100
It is secondary.
After the completion of the coated cutter finished product of above-described embodiment, the thickness of its each coating is noted down.
The material ratio and coating thickness measurement result of each embodiment are as shown in table 1 below.
Table 1
Comparative example 1
Using tungsten carbide tipped tool same as Example 2, surface is uncoated.
Comparative example 2
Using tungsten carbide tipped tool same as Example 2, and by the AlTiCrN coating of coating machine deposition single layer, thickness is applied
Degree is 3.2 μm.
Below by the cutting test by being carried out to cutter prepared by comparative example 1, comparative example 2 and the embodiment of the present application 2
Illustrate compared to the prior art, the cutter in the embodiment of the present application with composite coating can get preferable thermal stability, hard
Degree and toughness.
Cutting test:
Selection is by cutter prepared by comparative example 1, comparative example 2 and the embodiment of the present application 1,2,3, wherein passing through embodiment
1, the composite coating thickness of tool surface prepared by 2,3 is 3.2 μm, and wherein joint thickness is 0.1 μm.To selected knife
Tool carries out high-speed cutting hardened steel comparative test.Wherein the hardened steel be SKD11 (HRC=55), cutting speed 180m/s,
Cutting depth is 0.1mm, cutting width 2mm, and side milling is air-cooled.Carry out the knife that cutter to be measured is recorded while high-speed cutting
Surface damage and its length of cut.
By the cutting test, by hardened steel 10m described in Tool in Cutting prepared by comparative example 1, by comparative example 2
Hardened steel 50m described in prepared Tool in Cutting, by hardened steel described in Tool in Cutting prepared by the embodiment of the present application 1
102m, by hardened steel 95m described in Tool in Cutting prepared by the embodiment of the present application 2, by prepared by the embodiment of the present application 3
Hardened steel 142m described in Tool in Cutting.
Fig. 4 is the cutting experiment comparison diagram according to the composite coating for mechanical part of some embodiments of the application.
As shown in figure 4, compared to uncoated and single layer AlTiCrN coating cutter, having in the embodiment of the present application 1-3
The cutter of composite coating can effectively improve the length of Tool in Cutting hardened steel, that is, improve its machining efficiency, improve institute
State cutter life.By table 1 it is known that yttrium (Y), aluminium (Al), titanium (Ti) and chromium (Cr) are multiple in the embodiment of the present application
The thermal stability of the cutter with composite coating of its formation, hardness and tough can be promoted by closing different adding proportion in coating
Property.When the TiSiY target that the content using yttrium (Y) is 2%, and use the content of aluminium (Al) for the content of 50%, titanium (Ti)
When the AlTiCr target that the content for 25% and chromium (Cr) is 25%, hardened steel described in the Tool in Cutting with composite coating
Length reaches maximum value 142m.In addition, the thermal stability and mechanical property of the composite coating can also pass through not synsedimentary time
Number is to change the mode of coating layer thickness to realize.
By the above cutting test as a result, those skilled in the art are it is known that compared to the prior art, have by this
Apply for that the cutter of composite coating prepared by embodiment has good thermal stability, hardness and toughness, so that the cutter
Excellent comprehensive mechanical performance is obtained, so that its machining efficiency be significantly increased, improves the cutter life.
Described above make a summary sorts out the feature of several embodiments, this makes those of ordinary skill in the art
It can more understand a variety of aspects of the application.Those of ordinary skill in the art can be made using the application easily
Based on, to design or modify other compositions, so as to the identical purpose of the embodiment realized with applied herein and/or reach phase
Same advantage.Those of ordinary skill in the art is also it is understood that these impartial examples and without departing from the application's
Spirit and scope, and it can carry out various changes, replacement and modification to the application, without deviating from spirit herein and model
Farmland.It is described although method disclosed herein has been referred to the concrete operations that concrete order executes, it should be appreciated that can be
These operations are combined, segment or resequenced in the case where the teaching for not departing from the application to form equivalent method.Therefore, unless
Special instructions herein, the order otherwise operated and grouping are not the limitations to the application.
Claims (12)
1. a kind of mechanical part with composite coating comprising:
Matrix；
Binder course is formed at least part surface of described matrix, wherein the material of the binder course includes TiN, CrN
Any one of；
Transition zone is formed on the binder course, wherein the material of the transition zone is AlTiCrN；
Alternating layer is formed on the transition zone, and the alternating layer includes the first cermet that multilayer is sequentially alternately stacked
Layer and the second cermet coating, wherein the material of first cermet coating is TiSiYN, second cermet coating
Material is AlTiCrN；And
Functional layer is formed on the alternating layer, wherein the material of the functional layer is TiSiYN.
2. mechanical part according to claim 1, wherein first cermet coating and second cermet coating
Any one of the number of plies be 50 layers~100 layers.
3. mechanical part according to claim 1, wherein first cermet coating and second cermet coating
Any one of with a thickness of 0.2nm~3nm；And
The overall thickness of the composite coating is 1 μm~6 μm.
4. mechanical part according to claim 1, wherein removing N element in the transition zone and second cermet coating
Other elements press atomic percentage in addition, including 40%~70% aluminium (Al), 10%~30% chromium (Cr) and 10%~
30% titanium (Ti).
5. mechanical part according to claim 1, wherein removing N element in the functional layer and first cermet coating
Other elements press atomic percentage in addition, including 75%~90% titanium (Ti), 10%~20% silicon (Si) and 0%~
5% yttrium (Y).
6. mechanical part according to claim 1, wherein the mechanical part is cutter.
7. a kind of method for preparing the mechanical part according to claim 1 to 6 with composite coating, including
Following steps:
Matrix is provided；
Using PVD process in forming binder course at least part surface of described matrix, wherein the material of the binder course is
Include any one of TiN, CrN；
Using PVD process in forming transition zone on the surface of the binder course, wherein the material of the transition zone is AlTiCrN；
Using PVD process in forming alternating layer on the surface of the transition zone, wherein the alternating layer is by the first cermet coating
And second cermet coating sequentially be alternately stacked to be formed, wherein the material of first cermet coating is TiSiYN, described the
The material of two cermet coatings is AlTiCrN；And
Using PVD process in forming functional layer on the surface of the alternating layer, wherein the material of the functional layer is TiSiYN.
8. according to the method described in claim 7, further including being carried out the surface of described matrix pre- before using PVD process
Processing, wherein the pretreatment includes: through one of chemicals removal surface and oil contaminant, clear water rinsing and high temperature air drying
Or it is a variety of.
9. according to the method described in claim 7, wherein being formed using PVD process at least part surface of described matrix
The step of binder course includes:
It is passed through the argon gas that purity is 99.999%, under conditions of back bias voltage is 100V-800V, cleans the surface of described matrix；
It adjusts the negative bias and is depressed into 600V~1000V, the target of the target containing the binder course is opened, wherein the target of the binder course
Material includes or mixtures thereof (Ti), chromium (Cr), and the arc ource electric current of the target is 80A~100A；And
It adjusts the negative bias and is depressed into 20V~200V, be passed through nitrogen described in the formation at least part surface of described matrix
Binder course.
10. according to the method described in claim 7, wherein using PVD process in forming the mistake on the surface of the binder course
The step of crossing layer are as follows:
Under conditions of setting back bias voltage is 20V~200V and is passed through nitrogen, the target of the target containing AlTiCr is opened, wherein described
The arc ource electric current of AlTiCr target is 80A~300A to form the transition zone on the surface of the binder course.
11. according to the method described in claim 7, wherein using PVD process in forming the friendship on the surface of the transition zone
The step of for layer are as follows:
(1) under conditions of setting back bias voltage is 20V~200V and is passed through nitrogen, the target of the target containing TiSiY is opened, wherein described
The arc ource electric current of TiSiY target is 80A~300A to form first cermet coating on the surface of the transition zone；
(2) target for closing target and the opening target containing AlTiCr of the target containing TiSiY, wherein the arc ource electric current of the AlTiCr target
It is 80A~300A to form second cermet coating on the surface of first cermet coating；And
(3) it repeats the above steps (1) and step (2) 50 to 100 times to form the alternating layer.
12. according to the method described in claim 7, wherein using PVD process in forming the function on the surface of the alternating layer
The step of ergosphere are as follows:
Under conditions of setting back bias voltage is 20V~200V and is passed through nitrogen, the target of the target containing TiSiY is opened, wherein described
The arc ource electric current of TiSiY target is 80A~300A to form the functional layer on the surface of the alternating layer.
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| CN111321381A (en) * | 2020-03-05 | 2020-06-23 | 武汉大学 | AlCrNbSiTiBN-based nano composite coating of hard alloy blade and preparation method thereof |
| CN115386834A (en) * | 2022-08-11 | 2022-11-25 | 湖南泰嘉新材料科技股份有限公司 | Composite nitride coating circular saw blade and preparation method thereof |
| CN115572945A (en) * | 2022-09-09 | 2023-01-06 | 纳狮新材料有限公司 | Composite coating and preparation method thereof |
| CN116397201A (en) * | 2023-03-01 | 2023-07-07 | 纳狮新材料有限公司杭州分公司 | Ultrasonic cleaning of stamping die and preparation of CrAlN coating on surface of stamping die |
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Address after: 314200, No. two, No. 1661, Xingping economic and Technological Development Zone, Jiaxing, Zhejiang, Pinghu Applicant after: Nashi new materials Co.,Ltd. Address before: 314200, No. two, No. 1661, Xingping economic and Technological Development Zone, Jiaxing, Zhejiang, Pinghu Applicant before: NASHI NEW MATERIAL (ZHEJIANG) Co.,Ltd. |
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Application publication date: 20190517 |