CN106995913A - A kind of CrTiAlSiN Quito member rigid composite coating - Google Patents

A kind of CrTiAlSiN Quito member rigid composite coating Download PDF

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CN106995913A
CN106995913A CN201611248950.1A CN201611248950A CN106995913A CN 106995913 A CN106995913 A CN 106995913A CN 201611248950 A CN201611248950 A CN 201611248950A CN 106995913 A CN106995913 A CN 106995913A
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layer
crn
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crtialsin
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张建勋
王茜
刘喜
张龙
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Qingdao Apulse Intellectual Property Management Co Ltd
QINGDAO R & D INSTITUTE XI'AN JIAOTONG UNIVERSITY
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

The invention discloses a kind of CrTiAlSiN Quito member rigid composite coating, the coating structure is CrN/CrTiAlN/CrTiAlSiN/CrTiAlSiCN, 0.45 μm of CrN layers, 1.6 μm of CrTiAlN layers, 3 μm of CrTiAlSiN layers, 0.2 μm of CrTiAlSiCN layers；The microhardness (HV0.025N) of the coating is 3200 or so；Coating binding force impression grade is HF1 grades；Coating failure critical load (Lc2) is 50.95N；Coefficient of friction Ra=0.328, the problem of present invention solves high-speed cutter and harsh hot-work die processing conditions, extends the service life of instrument.

Description

A kind of CrTiAlSiN Quito member rigid composite coating
Technical field
The invention belongs to coating for metal surfaces technical field, and in particular to a kind of CrTiAlSiN Quito member composite ganoine is applied Layer.
Background technology
Gas phase deposition technology mainly includes CVD (chemical vapor deposition) and PVD (physical vapour deposition (PVD)), is contemporary vacuum skill Most active research field in art and material science, is also the main flow direction of current tool surface coating technology, and it not only can be with For preparing the film coating of various properties, and it can also be used to prepare various functions thin-film material and decorating film painting Layer and the various compounds of deposition, nonmetallic, semiconductor, ceramics, plastic foil etc..PVD technique compared with CVD technology, Its depositing temperature；Sedimentation rate is fast；The coating of deposition has fine structure, resistance to crack extension ability strong；Coating surface is smooth, rub Wipe coefficient low；Prepared by coating is the theory of composite green manufacture under vacuum.
PVD technique mainly has evaporation coating, three kinds of methods of sputter coating and ion film plating.Evaporation coating sedimentation rate is fast, Born operating pressure and particle Impact energy are minimum, and equipment is simple, coating is fine, cheap, technique is easily grasped, can be big Batch production, but its diffractive difference, it is difficult to meet superhard material plated film.Sputter coating is compared to evaporation, and its target is without phase transformation, chemistry Stable components, alloy is difficult fractionation, and the membrane material properly prepared is more extensive, but its preparation facilities is complicated, film deposition rate compared with Low, target utilization is not high.Ion film plating combines the advantage of evaporation coating technique and sputter coating technology, and deposited particles energy is most It is high, membranous layer binding force is excellent, it is extensive to plate material, sedimentation rate fast, cleaning before copper plating process is simple, environmentally safe, but its Uniformity of film is not slightly good enough, and multi-arc ion coating easily occurs melting drop, can influence quality of coating.
Signal layer coating is used always in the preceding more than ten years that gas phase deposition technology develops, it is typical represent have TiC, TiN, CrN, remaining also has NbC, HfC, ZrC, ZrN, BN etc..Wherein CrN coatings are most widely used at present, are to be described as One of material of TiN coatings can be most substituted, and due to its high abrasion resistance, it is mainly used in the moulds such as plastic foil, cold forge dies Tool, and soft material such as titanium alloy, titanium, copper, aluminium etc. are cut according to its good anti-caking and chemical stability.
Current PVD coatings have had spread over the row such as Aero-Space, machining, telecommunications, medicine equipment, household electrical appliances Industry, types of coatings also from initial TiN, TiC signal layer coating developed into laminated coating, multicomponent composite coating, gradient coating with And nano coating etc..Laminated coating can effectively suppress the growth of texture of coarse crystal compared with signal layer coating, improve coating Organization factorses, have given play to the advantage of each layer different coating material, have effectively enhanced product performance.The most frequently used laminated coating is 2 Plant the multi-layer composite coatings of coatings combine or the number of plies between 3~7 layers.
Multicomponent composite coating is addition such as Cr, Zr, V, B, Hf element in signal layer coating, laminated coating, it is possible to increase Inoxidizability and abrasion resistance, and substantially improve the adhesion between coating and base material.At present, most commonly TiCN and TiAlN, remaining also has TiSiN, TiBN, TiAlSi, TiAlCN etc..
Gradient coating is to carry out gradient distribution processing to substrate surface, coating substrate surface certain depth region is formed carbonization The toughness area of thing and carbonitride, the binder content in this region is generally greater than the nominal bond agent content of coated substrate, when splitting When line expands to this region, due to this toughness area tenacity excellent, by the effective energy for absorbing Crack Extension, making for cutter is improved Use the life-span.
Nano coating is with high rigidity, high-fire resistance, of a relatively high toughness and in overcast and the premise of green processing Under just cause researcher once emerging the features such as have high service life extensive concern.It is broadly divided into nano-multilayered structures With the class of nano composite structure coating two.
The content of the invention
The invention provides a kind of CrTiAlSiN Quito member rigid composite coating, high-speed dry type cutting cutter and heat are solved Make the problem of mould processing conditions is harsh, extend the service life of instrument.
The complete technical scheme of the present invention includes：
A kind of CrTiAlSiN Quito member rigid composite coating, it is characterised in that：The coating structure is CrN/CrTiAlN/ CrTiAlSiN/CrTiAlSiCN,
The CrN is prime coat, can form Cr in high temperature2o3, and prevent O2Persistently spread, improve in coat inside Coating inoxidizability, 0.3-0.45 μm of the CrN thickness,
The CrTiAlN is slave function layer, in coating Al element solid solutions with CrN, can high temperature when the Al that produces2o3, carry High coating high-temp inoxidizability, Ti elements are solid-solution in CrN in the form of Cr-Ti-N systems, are made between coating column structure Interface is obscured, and improves the compactness of coating；
Described CrTiAlSiN layers is functional layer, and thickness is 1.5~2 times of CrTiAlN thickness, and Si elements are consolidated in coating It is dissolved in CrN lattices, and amorphous Si can be formed3N4To prevent the formation and movement of different phase boundary interfacial dislocations, and then improve to apply Layer hardness, reduce coating surface coefficient of friction, and the Si elements in high temperature environments when can form SiO2, improve coating High-temperature oxidation resistance；
Described CrTiAlSiCN layers is to be passed through CH on functional layer surface4Formed, the layer be able to can be formed in wear process One layer of transfer membrane, enriched carbon layer is formed on friction pair material surface, and as kollag, this is thick about 0.2 μm layer by layer.
The total coating thickness is 4-7 μm, 0.45 μm of wherein CrN layers, 1.6 μm of CrTiAlN layers, 3 μm of CrTiAlSiN layers, 0.2 μm of CrTiAlSiCN layers；The microhardness (HV0.025N) of the coating is 3200 or so；Coating binding force impression grade is HF1 grades；Coating failure critical load (Lc2) is 50.95N；Coefficient of friction Ra=0.328.
The coating is after 700 DEG C of high annealings, and coating microhardness (HV0.025N) is 3021 during normal temperature, and coating is combined Trace grade is forced for HF2, coating resistance crackle opens critical load (Lc1) and coating failure critical load (Lc2) is respectively 29.85N and 48.65N.
Coat inside primary structure is NaCl structures, and main is mutually the face centered cubic c-CrN for being in the form of a column form growth With c-AlN phases, preferred orientation is (200), and after the high temperature anneal of different temperatures, preferred orientation is still (200).
The coating average grain size is 11.5nm, and crystallite dimension is 13.5nm during 400 DEG C of annealing temperature；Annealing temperature Crystallite dimension is 25.5nm when spending 500 DEG C；Crystallite dimension is 38.4nm during 600 DEG C of annealing temperature；Crystal grain during 700 DEG C of annealing temperature Size is 64nm.
The coating is in 600 DEG C of annealing temperature, and coating surface starts to generate Al2o3Oxide layer, while O2With coat inside The a small amount of TiO of Ti, Cr and Si element contact generation2、Cr2O3And SiO2Oxide；After annealing temperature reaches 700 DEG C, coating table Facial subregion is formed with Al2o3Based on, a small amount of SiO2、Cr2o3Oxide layer.
The present invention is relative to the advantage of prior art：
(1) coating uses CrN bottoming, the structure distribution of Multi-layers distributing, effectively reduces the interior of soft matrix and ganoine thin film Stress, improves film-substrate cohesion；And Cr can also be formed during high temperature2o3, O can be prevented2Persistently spread, improve in coat inside Coating inoxidizability.
(2) A1 element solid solutions in CrN, can produce distortion of lattice, reduce lattice constant in coating, produce planted agent Power, improves coating hardness；The Al produced during high temperature2o3Coating high-temp inoxidizability can not only be improved, and coating can be changed Wear mechanism, reduces coating surface coefficient of friction.
(3) on the one hand Ti elements are solid-solution in CrN formation Cr-Ti-N systems in coating, can make coating column structure it Between interface obscure, improve the compactness of coating, the relative raisings for being also beneficial to coating hardness of wherein TiN；On the other hand, Ti Transition element is belonged to Cr elements, can reduce the interfacial stress between CrN and functional layer, be conducive to each inter-layer bonding force Stabilization.
(4) Si atoms can be solid-solution in crystal grain thinning in CrN lattices together with A1 atoms in coating, reach refined crystalline strengthening Purpose, can form amorphous Si again3N4Effectively prevent to be the formation and movement of mistake between different boundaries, and then further improve painting Layer hardness, reduces coating surface coefficient of friction, improves the wearability that coating is crossed；It can be formed during except under this hot environment SiO2, TiO can be reduced accordingly2Content, it is ensured that the high-temperature oxidation resistance of coating.
(5) coating surface, which contains a small amount of carbon, to form one layer of carbon-coating in coating surface, and the carbon-coating is in wear process One layer of transfer membrane can be formed, as kollag, the shearing force between rubbing surface can be reduced, coefficient of friction is reduced, is improved The anti-attrition of coating, effectively alleviates initial wear stage coating product and accumulates small with work piece interface, friction is big, function The problem of layer serious wear, and then the normal wear of functional layer is ensure that, strengthen coating abrasion performance.
Brief description of the drawings
Pattern after Fig. 1 coating sample block ball millings.
Coating surface Rockwell after 30 DEG C of Fig. 2 (a), 400 DEG C (b), 500 DEG C (c), 600 DEG C (d), 700 DEG C of (e) high annealings Hardometer 150kg vickers indentations.
Fig. 3 coating surface SEM shape appearance figure (left figures after 600 DEG C, 700 DEG C of high annealings：600 DEG C of high annealings；Right figure： 700 DEG C of high annealings).
Coating hardness and adhesion statistics after the different high annealings of table 1.
Coating surface frictional force changes over time curve after the annealing of Fig. 4 different temperatures.
Coating surface the friction coefficient time changing curve after the annealing of Fig. 5 different temperatures.
The change of coating surface average friction force and coefficient of friction after the annealing of Fig. 6 different temperatures.
The change of coating surface elemental composition after Fig. 7 difference high annealings.
CrTiAlSiCN coating sample XRD spectrums after 700 DEG C of high annealings of Fig. 8.
The change of crystallite dimension during Fig. 9 different annealing temperatures.
Product appearance after Figure 10 coatings.
Embodiment
With reference to embodiment, the present invention will be further described.
A kind of CrTiAlSiN Quito member rigid composite coating industrial production process, it is characterised in that：Coating structure is CrN/ CrTiAlN/CrTiAlSiN/CrTiAlSiCN, wherein：
Prime coat CrN can effectively reduce the internal stress of soft matrix and ganoine thin film, improve film-substrate cohesion；During high temperature Cr can be formed again2o3, prevent O2Persistently spread in coat inside, improve coating inoxidizability.This layer substantially belongs to before coating Transition stage, general 0.3 μm or so of thickness.
CrTiAlN layers belong to slave function layer, and main function is to reduce the internal stress between prime coat and functional layer, and one Determine to improve all kinds of basic mechanical performances of coating in degree, Al element solid solutions are with that in CrN, can produce distortion of lattice, make in coating Lattice constant is reduced, and is produced internal stress, is improved coating hardness, the Al produced during high temperature2o3Coating high-temp can be improved anti-oxidant Property, change coating abrasion mechanism, reduce coating surface coefficient of friction.On the one hand Ti elements are solid-solution in formation Cr-Ti-N bodies in CrN System, can obscure the interface between coating column structure, improve the compactness of coating, there is TiN Relative layer hardness again Raising also has certain effect；On the other hand, Ti belongs to transition element with Cr elements, can make the boundary between CrN and functional layer Face stress is reduced, and is conducive to the raising of adhesion.The layer should not be blocked up, otherwise not only results in the interfacial stress between next layer Increase, and in the range of specific thicknesses, CrTiAlSiN thinner layer thickness can be made, Si constituent contents are reduced, and make Si hard to coating The raising of degree is not obvious, influences coating abrasion performance.
CrTiAlSiN layers belong to functional layer, and it is most thick to should be each interlayer of thickness, and thick relation is maintained at layer by layer with CrTiAlN Between 1.5 times~2 times.The interfacial stress of each interlayer has been effectively reduced although the reason for this layer occurs is CrTiAlN layers, has been protected Each inter-layer bonding force, and film layer compactness have been demonstrate,proved, but CrTiAlN coatings are for coating containing Si, film layer table Face is relatively rough, and coefficient of friction is larger.This, which is resulted in, changes the coating product frictional force that operationally surface is subject to greatly, exacerbates film The consumption of layer, and except generation Al in the condition of high temperature2o3Outside oxide layer, can also generating portion TiO2, due to TiO2To be big Size is shaft-like noncrystal, and oxygen can be promoted to accelerate to spread to coat inside, destroys coat inside compact structure, have impact on painting The wear resistance and high-temperature oxidation of layer.This layer be between in elemental basis in add Si elements, Si atoms can be with Al atoms are solid-solution in crystal grain thinning in CrN lattices together, reach the purpose of refined crystalline strengthening, can form amorphous Si again3N4Effectively resistance It is only wrong formation and movement between different boundaries, and then further improves coating hardness, reduces coating surface coefficient of friction, carry The wearability that high coating is crossed；In addition, Si in high temperature environments when can form SiO2, TiO can be reduced accordingly2Content, Ensure the high-temperature oxidation resistance of coating.
CrTiAlSiCN layers are the CH being passed through on functional layer surface4, form one layer of carbon-coating.This layer is primarily directed to just Phase wear stage, the stage belongs to running in stage, and coating product accumulates small with work piece interface, and friction is big, in coating table When face forms one layer of carbon-coating, the layer can form one layer of transfer membrane in wear process, and enriched carbon layer is formed on friction pair material surface, As kollag.This kollag can reduce the shearing force between rubbing surface, reduce coefficient of friction, improve coating Anti-attrition, it is ensured that the normal wear of functional layer, strengthens coating abrasion performance.Because initial wear phases-time is general shorter, Therefore this is thick layer by layer relatively thin, about 0.2 μm can meet requirement.
Total 4~7 μm of coating layer thickness, sets each layer thickness and is followed successively by：0.45 μm of CrN layers, 1.6 μm of CrTiAlN layers； 3 μm of CrTiAlSiN layers；0.2 μm of CrTiAlSiCN layers.Coating microhardness (HV0.025N) reaches 3200 or so；Coating is combined It is HF1 grades to force trace grade, and coating failure critical load (Lc2) is 50.95N, coefficient of friction Ra=0.328.
The coating is after 600 DEG C of high annealings, and coating hardness and adhesion begin with downward trend, and its main cause exists Distortion of lattice occurs for the c-AlN phases contained in coat inside, starts to h-AlN phase transformations, coating microhardness during normal temperature (HV0.025N) it is 3155, coating binding force indentation result opens critical load (Lc1) and coating by HFl, coating resistance crackle The critical load that fails (Lc2) is respectively 44.6N and 50.95N；After being retracted through 700 DEG C of high temperature, coating microhardness during normal temperature (HV0.025N) it is 3021, coating binding force indentation result opens critical load (Lc1) and coating by HF2, coating resistance crackle The critical load that fails (Lc2) is respectively 29.85N and 48.65N.
The rubbed wear test of coating measures frictional force for 9.858N, coefficient of friction Ra=0.328；It is high through 600 DEG C After temperature annealing, coating surface is initially formed with Al2o3Based on oxide, and the self-lubricating function of mating surface C element, friction Mechanism is changed from incipient tired abrasion to abrasive wear, and frictional force is 10.389N and coefficient of friction Ra=0.347；Annealing During 700 DEG C of temperature, surface forms Al2o3Based on oxide layer, scraping mechanism is abrasive wear, and frictional force is reduced to 9.802, friction Coefficient is Ra=0.327, therefore coating is in high temperature, surface C layer still have good self-lubricating function, to initial wear during contact Area is small, and the harsh conditions such as frictional force is big remain to good anti-attrition effect, and coating abrasion performance still keeps good level.
The coating surface element carries out EDS detections, as annealing temperature rises to 700 DEG C, each element quality from 400 DEG C Percentage (wt%) testing result is：Cr elements drop to 18.72%, Ti elements by 14.87% drop 3.41%, Al members by 26.3% Element drops to 26.54% by 30.22%, C element by 7.18% rise to 11.98% after and be down to 4.34%, Si elements by 0.41% increases to 0.73%, especially after annealing temperature is more than 600 DEG C, and 0 element rises to 15.67% by 5.05%, N element by 14.49% is down to 9.22%, illustrates with O2Content increases, and the element such as Ti, Al, Cr, Si is more easy to and O in CrTiAlSiCN coatings2 Reaction generation Al2o3、SiO2、Cr2o3And TiO2Deng oxide, while the generation of a large amount of oxides will nitride subtract accordingly It is few.
The coat inside primary structure is NaCl structures, containing a large amount of face centered cubic c-CrN and c-AlN phases, and Form growth is all in the form of a column, preferred orientation is (200), after the high temperature anneal of different temperatures, and preferred orientation is still (200), but there are a small number of h-AlN phases to generate, its preferred orientation be (220).In addition, this coat inside also has minority Its preferred orientation is (200).
This coating average grain size is 11.5nm, compared with the coated grains size in similar document, belongs to excellent shape State.And with increasing for annealing temperature, its crystallite dimension gradually increases, crystallite dimension is 13.5nm during 400 DEG C of annealing temperature； Crystallite dimension is 25.5nm during 500 DEG C of annealing temperature；Crystallite dimension is 38.4nm during 600 DEG C of annealing temperature；700 DEG C of annealing temperature When crystallite dimension be 64nm.
During 600 DEG C of the coating annealing temperature, coating surface starts to generate Al2o3Oxide layer, while O2With coat inside The a small amount of TiO of Ti, Cr and Si element contact generation2、Cr2o3And SiO2Deng oxide；After annealing temperature reaches 700 DEG C, coating Surface portion region is formed with Al2o3Based on, a small amount of SiO2、Cr2o3Oxide layer, it is suppressed that O2Life is persistently spread to coat inside Into the TiO of rod-like structure2, improve coating high-temp inoxidizability.
Coating hardness and adhesion statistics after the different high annealings of table 1
It is described above, only it is presently preferred embodiments of the present invention, not the present invention is imposed any restrictions, it is every according to the present invention Any simple modification, change and equivalent structure change that technical spirit is made to above example, still fall within skill of the present invention In the protection domain of art scheme.

Claims (6)

1. a kind of CrTiAlSiN Quito member rigid composite coating, it is characterised in that：The coating structure is CrN/CrTiAlN/ CrTiAlSiN/CrTiAlSiCN,
The CrN is prime coat, can form Cr in high temperature2o3, and prevent O2Persistently spread in coat inside, improve coating Inoxidizability, 0.3-0.45 μm of the CrN thickness,
The CrTiAlN is slave function layer, in coating Al element solid solutions with CrN, can high temperature when the Al that produces2o3, improve and apply Layer high-temperature oxidation resistance, Ti elements are solid-solution in CrN in the form of Cr-Ti-N systems, make the interface between coating column structure It is fuzzy, improve the compactness of coating；
Described CrTiAlSiN layers is functional layer, and thickness is 1.5~2 times of CrTiAlN thickness, in coating Si element solid solutions in In CrN lattices, and amorphous Si can be formed3N4To prevent the formation and movement of different phase boundary interfacial dislocations, and then it is hard to improve coating Degree, reduce coating surface coefficient of friction, and the Si elements in high temperature environments when can form SiO2, improve the height of coating Warm inoxidizability；
Described CrTiAlSiCN layers is to be passed through CH on functional layer surface4Formed, the layer can form one layer turn in wear process Film is moved, enriched carbon layer is formed on friction pair material surface, as kollag, this is thick about 0.2 μm layer by layer.
2. coating according to claim 1, it is characterised in that the total coating thickness is 4-7 μm, the μ of wherein CrN layers 0.45 1.6 μm of m, CrTiAlN layer, 3 μm of CrTiAlSiN layers, 0.2 μm of CrTiAlSiCN layers；The microhardness of the coating (HV0.025N) it is 3200 or so；Coating binding force impression grade is HF1 grades；Coating failure critical load (Lc2) is 50.95N； Coefficient of friction Ra=0.328.
3. coating according to claim 1, it is characterised in that the coating is after 700 DEG C of high annealings, coating during normal temperature Microhardness (HV0.025N) is 3021, and coating binding force impression grade is HF2, and coating resistance crackle opens critical load And coating failure critical load (Lc2) is respectively 29.85N and 48.65N (Lc1).
4. coating according to claim 1, it is characterised in that coat inside primary structure is NaCl structures, is mutually mainly The face centered cubic c-CrN and c-AlN phases of form growth are in the form of a column, preferred orientation is (200), and the high temperature through different temperatures After annealing, preferred orientation is still (200).
5. coating according to claim 1, it is characterised in that the coating average grain size is 11.5nm, and is annealed Crystallite dimension is 13.5nm during 400 DEG C of temperature；Crystallite dimension is 25.5nm during 500 DEG C of annealing temperature；Crystalline substance during 600 DEG C of annealing temperature Particle size is 38.4nm；Crystallite dimension is 64nm during 700 DEG C of annealing temperature.
6. coating according to claim 1, it is characterised in that the coating is in 600 DEG C of annealing temperature, and coating surface is opened Begin generation Al2o3Oxide layer, while O2The a small amount of TiO of generation is contacted with coat inside Ti, Cr and Si element2、Cr2o3And SiO2Oxygen Compound；After annealing temperature reaches 700 DEG C, coating surface portion region is formed with Al2o3Based on, a small amount of SiO2、Cr2o3Oxidation Layer.
CN201611248950.1A 2016-12-29 2016-12-29 A kind of CrTiAlSiN Quito member rigid composite coating Pending CN106995913A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
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CN107815638A (en) * 2017-11-07 2018-03-20 福建工程学院 A kind of AlTiCrCN nanometer hard coats containing sandwich construction and preparation method thereof
CN109207938A (en) * 2018-09-28 2019-01-15 清华大学 Ti/TiN/TiAlSiN/TiAlCrSiN nanometer multilayer Gradient Film and preparation method thereof
CN109763093A (en) * 2019-01-09 2019-05-17 纳狮新材料(浙江)有限公司 Mechanical part and preparation method thereof with composite coating
CN114182213A (en) * 2021-12-06 2022-03-15 西安工业大学 Titanium alloy wear-resistant antioxidant composite coating and preparation method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050058850A1 (en) * 2003-09-16 2005-03-17 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same
JP2007152456A (en) * 2005-12-02 2007-06-21 Mitsubishi Materials Corp Surface coated cutting tool having hard coating layer exhibiting excellent wear resistance in high-speed cutting high-hardness steel
CN101209611A (en) * 2006-12-27 2008-07-02 山特维克知识产权股份有限公司 Multilayered coated cutting tool
CN101224648A (en) * 2007-01-17 2008-07-23 株式会社神户制钢所 Hard coating film for forming tool and forming tool
CN101879794A (en) * 2010-05-31 2010-11-10 武汉嘉树科技有限公司 CrTiAlSiN nano composite coating, cutter deposited with same and preparation method thereof
CN104928637A (en) * 2015-05-19 2015-09-23 上海新弧源涂层技术有限公司 Nanometer composite structure protective coating made from high hardness CrAlSiN and preparation method of nanometer composite structure protective coating

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050058850A1 (en) * 2003-09-16 2005-03-17 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Multilayered film having excellent wear resistance, heat resistance and adhesion to substrate and method for producing the same
JP2007152456A (en) * 2005-12-02 2007-06-21 Mitsubishi Materials Corp Surface coated cutting tool having hard coating layer exhibiting excellent wear resistance in high-speed cutting high-hardness steel
CN101209611A (en) * 2006-12-27 2008-07-02 山特维克知识产权股份有限公司 Multilayered coated cutting tool
CN101224648A (en) * 2007-01-17 2008-07-23 株式会社神户制钢所 Hard coating film for forming tool and forming tool
CN101879794A (en) * 2010-05-31 2010-11-10 武汉嘉树科技有限公司 CrTiAlSiN nano composite coating, cutter deposited with same and preparation method thereof
CN104928637A (en) * 2015-05-19 2015-09-23 上海新弧源涂层技术有限公司 Nanometer composite structure protective coating made from high hardness CrAlSiN and preparation method of nanometer composite structure protective coating

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
宋福田等: "《铬、碳掺杂TiAlSiN硬质涂层结构和性能研究》", 《铸造技术》 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107815638A (en) * 2017-11-07 2018-03-20 福建工程学院 A kind of AlTiCrCN nanometer hard coats containing sandwich construction and preparation method thereof
CN109207938A (en) * 2018-09-28 2019-01-15 清华大学 Ti/TiN/TiAlSiN/TiAlCrSiN nanometer multilayer Gradient Film and preparation method thereof
CN109207938B (en) * 2018-09-28 2020-07-10 清华大学 Ti/TiN/TiAlSiN/TiAlCrSiN nano multilayer gradient film and preparation method thereof
CN109763093A (en) * 2019-01-09 2019-05-17 纳狮新材料(浙江)有限公司 Mechanical part and preparation method thereof with composite coating
CN114182213A (en) * 2021-12-06 2022-03-15 西安工业大学 Titanium alloy wear-resistant antioxidant composite coating and preparation method thereof

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