CN107265113A - A kind of robot device for being used to draw sapphire wafer technique - Google Patents
A kind of robot device for being used to draw sapphire wafer technique Download PDFInfo
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- CN107265113A CN107265113A CN201710420615.3A CN201710420615A CN107265113A CN 107265113 A CN107265113 A CN 107265113A CN 201710420615 A CN201710420615 A CN 201710420615A CN 107265113 A CN107265113 A CN 107265113A
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- Prior art keywords
- screw mandrel
- synchronous pulley
- pulley group
- mandrel module
- sliding block
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/901—Devices for picking-up and depositing articles or materials provided with drive systems with rectilinear movements only
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- Manipulator (AREA)
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Abstract
The present invention relates to sapphire wafer haulage equipment, it is desirable to provide a kind of robot device for being used to draw sapphire wafer technique.This kind is used for robot device synchronous pulley group, screw mandrel module, screw mandrel module installing plate, screw mandrel module sliding block connecting seat, timing belt wheel shaft II, timing belt wheel shaft I, gear, rack, rack installing plate, small axle, belt gripping block, guide rail slide block, guide rail slide block installing plate, sucker mounting seat, the chuck for drawing sapphire wafer technique, can carry chip.The present invention is during chip needs to be transported to another platform from crystal-boat box, it is not necessary to which people touches chip, robotic wafer sucker, in a narrow space automatic sucking sapphire wafer, whole stroke can expand be twice it is even more many.
Description
Technical field
The present invention is that, on sapphire wafer haulage equipment field, more particularly to one kind is used to draw sapphire wafer technique
Robot device.
Background technology
At present, chip is taken out from crystal-boat box in sapphire industry to carry out carrying critically important, robotic wafer sucker is used
Go to draw this mode of chip, it is to avoid because the secondary pollution that the chip that manually goes to take comes to wafer tape, to sapphire
Cleaning tape carrys out very big help.
There are many multivariant manipulators on the market at present, such manipulator is than larger, and stroke is also single, the sky accounted for
Between position also than larger.
The content of the invention
It is a primary object of the present invention to overcome it is of the prior art it is not enough there is provided it is a kind of can be in a space of very little
Interior, chuck automatic sucking sapphire wafer is arbitrarily put into the crystal-boat box specified, and the movement travel of whole manipulator
It can expand and be twice even more robot devices.In order to solve the above technical problems, the solution of the present invention is：
A kind of robot device for being used to draw sapphire wafer technique is provided, chip can be carried, it is described to be used to draw indigo plant
The robot device of jewel wafer technique includes main motor, synchronous pulley group, screw mandrel module and (includes screw mandrel, screw mandrel sliding block, axle
Hold, fixed block), screw mandrel module installing plate, screw mandrel module sliding block connecting seat, timing belt wheel shaft II, timing belt wheel shaft I, gear, tooth
Bar, rack installing plate, small axle, belt gripping block, guide rail slide block, guide rail slide block installing plate, sucker mounting seat, chuck；
The synchronous pulley group includes driving wheel, timing belt, driven pulley, and driving wheel is connected with driven pulley by timing belt；
Synchronous pulley group is provided with three groups, respectively synchronous pulley group I, synchronous pulley group II, synchronous pulley group III；
The synchronous pulley group I includes driving wheel, timing belt, driven pulley, expansion sleeve, and driving wheel and driven pulley pass through synchronization
Band connection；Driving wheel is connected with main motor key, and driven pulley is connected with screw mandrel module, and expansion sleeve is used to fix driven pulley；
The synchronous pulley group II includes driving wheel, timing belt, driven pulley, and driving wheel and driven pulley are connected by timing belt
Connect；Driving wheel is connected with timing belt wheel shaft II, is driven by gear；Driven pulley is connected with timing belt wheel shaft I, for driving timing belt
Driving wheel rotation in wheel group III；
The synchronous pulley group III includes driving wheel, timing belt, driven pulley, and driving wheel and driven pulley are connected by timing belt
Connect；Driving wheel is connected with timing belt wheel shaft I keys, is driven by synchronous pulley group II；Driven pulley is fixed on guide rail slide block installing plate；
The screw mandrel module and main motor are revolved by the I connections of synchronous pulley group, the screw mandrel of main motor energy drive screw module
Turn, and then the screw mandrel sliding block of screw mandrel module can be moved forward and backward with the rotation of screw mandrel；One end of screw mandrel module passes through screw mandrel module
Installing plate is fixed on platform (device chassis), and other end screw mandrel sliding block and the screw mandrel module sliding block connecting seat of screw mandrel module connect
Connect, and then control moving forward and backward for screw mandrel module sliding block connecting seat；
The guide rail slide block installing plate is arranged on screw mandrel module sliding block connecting seat, (being connected by screw) and ensures guide rail
The guide rail mounting surface on guide rail mounting surface and screw mandrel module sliding block connecting seat on sliding block installing plate is described to lead in approximately the same plane
Rail sliding block is arranged on the guide rail mounting surface of guide rail slide block installing plate and screw mandrel module sliding block connecting seat；
The sliding block mounting surface that the sucker mounting seat is arranged on guide rail slide block is connected, and enables sucker mounting seat as guide rail is slided
The movement of block is moved forward and backward, and the chuck is arranged in sucker mounting seat；Sucker mounting seat is by belt gripping block and together
Walk the III connections of belt wheel group so that when synchronous pulley (driving wheel, driven pulley) rotates, chuck can be driven forward
Stretch backward；
One end of the timing belt wheel shaft II is connected with synchronous pulley group II driving wheel, and the other end is connected with gear, together
Step belt shaft II is connected by the bearing of screw mandrel module with screw mandrel module sliding block connecting seat, pinion rotation is driven synchronous pulley
Group II driving wheel is rotated, and then synchronous pulley group II driving wheel drives synchronous pulley group II driven pulley to rotate；
One end of the timing belt wheel shaft I is connected with synchronous pulley group II driven pulley, the other end and synchronous pulley group III
Driving wheel connection, timing belt wheel shaft I is connected by the bearing of screw mandrel module with screw mandrel module sliding block connecting seat, makes synchronous pulley
The rotational energy of group II driven pulley drives synchronous pulley group III driving wheel to rotate, before and after driving synchronous pulley group III belt
Motion；
The driving wheel of the synchronous pulley group III is connected to timing belt wheel shaft I one end, and synchronous pulley group III's is driven
Wheel is fixed on by small axle on the fixed block of screw mandrel module, and the fixed block (by screw) is fixed on guide rail slide block installing plate
On；
The belt gripping block and synchronous pulley group III timing belt are clamped, and mounting surface and the sucker of belt gripping block are pacified
Dress seat is fixed, and the timing belt of sucker mounting seat, chuck and synchronous pulley group III is synchronized with the movement；
Rack is installed in one end of the rack installing plate, and the other end is fixed on platform, and ensures that rack and pinion is engaged.
As a further improvement, the chuck passes through sealing ring (sealing rings of O-ring seal or other forms)
Sealed with sucker mounting seat.
There is provided a kind of based on the control method for being used to draw the robot device of sapphire wafer technique, be specially：
If the rotating speed of main motor is n1(r/min), synchronous pulley group I speed reducing ratio is A1, the helical pitch of screw mandrel module is Ph
(mm), then the speed (mm/a) of screw mandrel sliding block movement on screw mandrel module is：ν1=n1·A1·Ph/60；
If screw mandrel module sliding block connecting seat is ν with respect to rack movement velocity1, then the movement velocity of rack opposed gear is ν1,
According to rack and pinion engagement relation：V=π d1n、d1=m1·Z1, it is known that the rotating speed of gear is：
Wherein, ν (mm/a) is the movement velocity of rack, d1(mm) it is reference circle, n (mm/a) is the rotating speed of gear, m1It is tooth
The modulus of wheel, Z1It is the number of teeth of gear；
If synchronous pulley group II speed reducing ratio is A2, then by synchronous pulley group II after, rotating speed is changed into n3, i.e.,：n3=
n2·A2(mm/s)；
Synchronous pulley group III is reached, the rotating speed of driving wheel is n3, belt speed ν3For：ν3=π n3d2(mm/s)；
Wherein, d2=m2Z2, m2It is the modulus of driving pulley in synchronous pulley group III, Z2It is its number of teeth；
If the movement velocity of chuck and the speed ratio of screw mandrel module sliding block connecting seat are set to A, meetI.e. most
The movement velocity of whole chuck and the speed ratio of screw mandrel module sliding block connecting seat are：
As a further improvement, synchronous pulley group I speed reducing ratio A1It is 1: 1, synchronous pulley group II speed reducing ratio A2It is 1:
1.5, synchronous pulley group III speed reducing ratio are 1: 1；A diameter of 20mm of screw mandrel, drafts the helical pitch of screw mandrel module in screw mandrel module
Ph (mm) is 5mm；Set manipulator and send the piece time as 18s, set the translational speed of chuck as 50mm/s；Motor it is specified
Rotating speed is 3000r/min, and the modulus of gear is 0.8, and the number of teeth is 30.
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention is during chip needs to be transported to another platform from crystal-boat box, it is not necessary to which people touches crystalline substance
Piece, robotic wafer sucker, in a narrow space automatic sucking sapphire wafer, whole stroke, which can expand, to be twice very
It is extremely more.
The present invention is avoided that chip is directly carried generation secondary pollution by people, it is often more important that, substantial amounts of behaviour can be saved
Make space, adequately and reasonably to make use of space.So so that whole producing line is more automated, substantial amounts of manpower thing can be also saved
Power.
Brief description of the drawings
Fig. 1 is used for the front view for the robot device for drawing sapphire wafer technique for the present invention.
Fig. 2 is used for the left view for the robot device for drawing sapphire wafer technique for the present invention.
Fig. 3 is used for the rearview for the robot device for drawing sapphire wafer technique for the present invention.
Reference in figure is：1 main motor；2 rack installing plates；3 gears；4 timing belt wheel shaft II；5 racks；6 is synchronous
Belt shaft I；7 synchronous pulley group III；8 screw mandrel module sliding block connecting seats；9 sucker mounting seats；10 belt gripping blocks；11 guide rails are slided
Block；12 guide rail slide block installing plates；13 chucks；14 small axles；15 synchronous pulley group I；16 synchronous pulley group II；17 screw mandrel modules
Installing plate；18 screw mandrel modules.
Embodiment
The present invention is described in further detail with embodiment below in conjunction with the accompanying drawings：
A kind of robot device for being used to draw sapphire wafer technique as shown in Figure 1, Figure 2, Figure 3 shows, uses a line
Property module and synchronous pulley group, the movement travel of whole manipulator is expanded and is twice even more many, chip by gear 3, rack 5 etc.
Sucker 13 is drawn by stretching into stretching before and after such a component and carries chip.
The robot device for being used to draw sapphire wafer technique includes main motor 1, synchronous pulley group I 15, screw mandrel
It is module 18, screw mandrel module installing plate 17, screw mandrel module sliding block connecting seat 8, synchronous pulley group II 16, timing belt wheel shaft II4, same
Belt shaft I 6, gear 3, rack 5, rack installing plate 2, synchronous pulley group III7, small axle 14, belt gripping block 10, guide rail is walked to slide
Block 11, guide rail slide block installing plate 12, sucker mounting seat 9, chuck 13.
The synchronous pulley group I 15 includes driving wheel, timing belt, driven pulley, expansion sleeve, and driving wheel and driven pulley pass through
Timing belt is connected；Driving wheel is connected with the key of main motor 1, and driven pulley is connected with screw mandrel module 18, and expansion sleeve is used to fix driven pulley.
The synchronous pulley group II 16 includes driving wheel, timing belt, driven pulley, and driving wheel and driven pulley pass through timing belt
Connection；Driving wheel is connected with timing belt wheel shaft II4, is driven by gear 3；Driven pulley is connected with timing belt wheel shaft I 6, for driving
Driving wheel rotation in synchronous pulley group III7.
The synchronous pulley group III7 includes driving wheel, timing belt, driven pulley, and driving wheel and driven pulley are connected by timing belt
Connect；Driving wheel is connected with the keys of timing belt wheel shaft I 6, is driven by synchronous pulley group II 16；Driven pulley is fixed on guide rail slide block installation
On plate 12.
The screw mandrel module 18 and main motor 1 are connected by synchronous pulley group I 15, and main motor 1 can drive screw module 18
Screw mandrel rotation, and then the screw mandrel sliding block of screw mandrel module 18 can move forward and backward with the rotation of screw mandrel.One end of screw mandrel module 18
It is fixed on by screw mandrel module installing plate 17 on platform, the other end screw mandrel sliding block of screw mandrel module 18 is connected with screw mandrel module sliding block
Seat 8 is connected, and then controls moving forward and backward for screw mandrel module sliding block connecting seat 8.
The guide rail slide block installing plate 12 is arranged on screw mandrel module sliding block connecting seat 8, is connected by screw, and ensure to lead
The guide rail mounting surface on guide rail mounting surface and screw mandrel module sliding block connecting seat 8 on rail sliding block installing plate 12 in approximately the same plane,
The guide rail slide block 11 is arranged on the guide rail mounting surface of guide rail slide block installing plate 12 and screw mandrel module sliding block connecting seat 8.
The sliding block mounting surface that the sucker mounting seat 9 is arranged on guide rail slide block 11 is connected, and enables sucker mounting seat 9 with leading
The movement of rail sliding block 11 is moved forward and backward, and the chuck 13 is arranged on by 0 type sealing ring or the sealing ring of other forms inhales
In disk mounting seat 9；So moving forward and backward with screw mandrel module sliding block connecting seat 8, and then cause guide rail slide block 11, guide rail slide block
Installing plate 12, sucker mounting seat 9, chuck 13 are moved forward and backward.Sucker mounting seat 9 passes through belt gripping block 10 and synchronous pulley
Group III7 connections so that when synchronous pulley rotates, chuck 13 can be driven forwardly and rearwardly to stretch.
One end of the timing belt wheel shaft II 4 is connected with synchronous pulley group II 16 driving wheel, and the other end connects with gear 3
Connect, timing belt wheel shaft II 4 is connected by bearing with screw mandrel module sliding block connecting seat 8, synchronous pulley can be driven by rotating gear 3
Group II 16 driving wheel is rotated, and then synchronous pulley group II 16 driving wheel drive synchronous pulley group II 16 driven rotation
It is dynamic.
One end of the timing belt wheel shaft I 6 is connected with synchronous pulley group II 16 driven pulley, the other end and synchronous pulley
Group III7 driving wheel connection, timing belt wheel shaft I 6 is connected by bearing with screw mandrel module sliding block connecting seat 8, makes synchronous pulley
The rotational energy of group II 16 driven pulley drives synchronous pulley group III7 driving wheel to rotate, driving synchronous pulley group III7 skin
Band is moved forward and backward.
The driving wheel of the synchronous pulley group III7 is connected to timing belt wheel shaft I 6 one end, synchronous pulley group III7's
Driven pulley is fixed on fixed block by small axle 14, and the fixed block is fixed by screws on guide rail slide block installing plate 12.
The belt gripping block 10 and synchronous pulley group III7 belt are clamped, the mounting surface and sucker of belt gripping block 10
Mounting seat 9 is fixed, enable sucker mounting seat 9, chuck 13 and synchronous pulley group III7 belt synchronously move forward and backward.
By a kind of such kind of drive, under the stroke of screw mandrel module 18, the stroke that chuck 13 is walked expands
It is twice even more many.
Rack 5 is installed in one end of the rack installing plate 2, and the other end is fixed on platform, and ensures rack 5 and gear 3
Engagement.
The transmission process of whole mechanism：--- synchronous pulley group I 15 --- the screw mandrel module 18 --- rack of main motor 1
5 --- --- synchronous pulley group II 16 --- synchronous pulley group III7 --- chucks 13 of gear 3；It is specific as follows：
The rotating speed of main motor 1 is n1(r/min), synchronous pulley group I 15 speed reducing ratio is A1, the helical pitch Ph of screw mandrel module 18
(mm), then：
The speed (mm/s) of sliding block movement on screw mandrel module 18：
v1=n1·A1·Ph/60 (1)
Rack 5 is fixed on rack installing plate 2, and gear 3 is fixed on screw mandrel module sliding block by timing belt wheel shaft I 6 and connected
On seat 8, screw mandrel module sliding block connecting seat 8 is ν with respect to the movement velocity of rack 51, then the movement velocity of the opposed gear 3 of rack 5 is ν1。
According to the meshing relation of 3 rack of gear 5：
V=π d1n (2)
d1=m1·Z1 (3)
Wherein, ν (mm/s) is the movement velocity of rack 5, d1(mm) it is reference circle, n (mm/s) is the rotating speed of gear 3, m1It is
The modulus of gear 3, Z1It is the number of teeth of gear 3.
It can thus be appreciated that the rotating speed of structure middle gear 3：
After synchronous pulley group II 16, rotating speed is changed into n3, synchronous pulley group II 16 speed reducing ratio is A2, i.e.,：
n3=n2·A2(mm/s) (5)
Synchronous pulley group III7 is reached, the rotating speed of driving wheel is n3, belt speed ν3For：
ν3=π n3d2(mm/s) (6)
Wherein, d2=m2Z2, m2It is the modulus of driving pulley in synchronous pulley group III7, Z2It is its number of teeth.
Chuck 13 is fixed on synchronous pulley group III7 belt, thus the movement velocity of chuck 13 with it is synchronous
Belt wheel group III7 belt speed is identical.
The movement velocity of chuck 13 is set to A with the speed ratio of screw mandrel module sliding block connecting seat 8：
(4), (5), (6) in above formula are substituted into (7), final speed ratio is obtained：
Synchronous pulley group I main function is to drive screw mandrel module 18 to move by main motor 1, due to device space reason
Carry out switching transmission, it is not necessary to change transmission rotating speed, speed reducing ratio is set to 1: 1；Synchronous pulley group II is used for drive coordination belt wheel group
III is moved, in addition to changing transmission direction, in addition it is also necessary to improve transmission speed, speed reducing ratio is set to 1: 1.5；Synchronous pulley group III
For driving chuck 13 to move, gearing is played, does not change speed transmission, speed reducing ratio is set to 1: 1.
Because the limitation of the device space and in order to ensure the straight of screw mandrel in required structural strength, selection screw mandrel module 18
Footpath is 20mm, searches mechanical design handbook, and the helical pitch for drafting screw mandrel module 18 is 5mm.Manipulator is taken in piece measurement process, it is considered to
Induction precision and sensitive time to wafer thickness measuring sensor, set manipulator and send the piece time as 18s, the row according to design
Journey sets the translational speed of chuck 13 as about 50mm/s.
The movement velocity of sucker is with the speed ratio of screw mandrel module sliding block connecting seat 8 as described above, thus setting the volume of motor
Rotating speed is determined for 3000r/min, and the modulus of gear 3 is 0.8, the number of teeth is 30.
Finally it should be noted that listed above is only specific embodiment of the invention.It is clear that the invention is not restricted to
Above example, can also there is many variations.One of ordinary skill in the art can directly lead from present disclosure
All deformations for going out or associating, are considered as protection scope of the present invention.
Claims (4)
1. a kind of robot device for being used to draw sapphire wafer technique, can carry chip, it is characterised in that described to be used to inhale
Taking the robot device of sapphire wafer technique includes main motor, synchronous pulley group, screw mandrel module, screw mandrel module installing plate, silk
Bar module sliding block connecting seat, timing belt wheel shaft II, timing belt wheel shaft I, gear, rack, rack installing plate, small axle, belt are clamped
Block, guide rail slide block, guide rail slide block installing plate, sucker mounting seat, chuck；
The synchronous pulley group includes driving wheel, timing belt, driven pulley, and driving wheel is connected with driven pulley by timing belt；It is synchronous
Belt wheel group is provided with three groups, respectively synchronous pulley group I, synchronous pulley group II, synchronous pulley group III；
The screw mandrel module and main motor are rotated, entered by the I connections of synchronous pulley group, the screw mandrel of main motor energy drive screw module
And the screw mandrel sliding block of screw mandrel module can be moved forward and backward with the rotation of screw mandrel；One end of screw mandrel module passes through screw mandrel module installing plate
It is fixed on platform, the other end screw mandrel sliding block of screw mandrel module is connected with screw mandrel module sliding block connecting seat, and then controls screw mandrel mould
Organize moving forward and backward for sliding block connecting seat；
The guide rail slide block installing plate is arranged on screw mandrel module sliding block connecting seat, and ensures the guide rail on guide rail slide block installing plate
Guide rail mounting surface on mounting surface and screw mandrel module sliding block connecting seat is in approximately the same plane, and the guide rail slide block is slided installed in guide rail
On the guide rail mounting surface of block installing plate and screw mandrel module sliding block connecting seat；
The sliding block mounting surface that the sucker mounting seat is arranged on guide rail slide block is connected, and enables sucker mounting seat with guide rail slide block
Movement is moved forward and backward, and the chuck is arranged in sucker mounting seat；Sucker mounting seat passes through belt gripping block and timing belt
Wheel group III connections so that when synchronous pulley rotates, chuck can be driven forwardly and rearwardly to stretch；
One end of the timing belt wheel shaft II is connected with synchronous pulley group II driving wheel, and the other end is connected with gear, timing belt
Wheel shaft II is connected by the bearing of screw mandrel module with screw mandrel module sliding block connecting seat, pinion rotation is driven synchronous pulley group II
Driving wheel rotate, and then synchronous pulley group II driving wheel drives synchronous pulley group II driven pulley to rotate；
One end of the timing belt wheel shaft I is connected with synchronous pulley group II driven pulley, the master of the other end and synchronous pulley group III
Driving wheel is connected, and timing belt wheel shaft I is connected by the bearing of screw mandrel module with screw mandrel module sliding block connecting seat, makes synchronous pulley group II
The rotational energy of driven pulley drive synchronous pulley group III driving wheel to rotate, transported before and after driving synchronous pulley group III belt
It is dynamic；
The driving wheel of the synchronous pulley group III is connected to timing belt wheel shaft I one end, and synchronous pulley group III driven pulley leads to
Too small axle is fixed on the fixed block of screw mandrel module, and the fixed block is fixed on guide rail slide block installing plate；
The belt gripping block and synchronous pulley group III timing belt are clamped, mounting surface and the sucker mounting seat of belt gripping block
It is fixed, the timing belt of sucker mounting seat, chuck and synchronous pulley group III is synchronized with the movement；
Rack is installed in one end of the rack installing plate, and the other end is fixed on platform, and ensures that rack and pinion is engaged.
2. a kind of robot device for being used to draw sapphire wafer technique according to claim 1, it is characterised in that institute
Chuck is stated to seal by sealing ring and sucker mounting seat.
3. a kind of based on the control method for being used to draw the robot device of sapphire wafer technique described in claim 1, it is special
Levy and be, be specially：
If the rotating speed of main motor is n1(r/min), synchronous pulley group I speed reducing ratio is A1, the helical pitch of screw mandrel module is Ph (mm),
Then the speed (mm/a) of the screw mandrel sliding block movement on screw mandrel module is：v1=n1·A1·Ph/60；
If screw mandrel module sliding block connecting seat is v with respect to rack movement velocity1, then the movement velocity of rack opposed gear is v1, foundation
Rack and pinion engagement relation：V=π d1n、d1=m1·Z1, it is known that the rotating speed of gear is：
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Wherein, ν (mm/a) is the movement velocity of rack, d1(mm) it is reference circle, n (mm/a) is the rotating speed of gear, m1It is gear
Modulus, Z1It is the number of teeth of gear；
If synchronous pulley group II speed reducing ratio is A2, then by synchronous pulley group II after, rotating speed is changed into n3, i.e.,：n3=n2·A2
(mm/s)；
Synchronous pulley group III is reached, the rotating speed of driving wheel is n3, belt speed ν3For：ν3=π n3d2(mm/s)；
Wherein, d2=m2Z2, m2It is the modulus of driving pulley in synchronous pulley group III, Z2It is its number of teeth；
If the movement velocity of chuck and the speed ratio of screw mandrel module sliding block connecting seat are set to A, meetIt is i.e. final brilliant
The movement velocity of piece sucker and the speed ratio of screw mandrel module sliding block connecting seat are：
4. control method according to claim 3, it is characterised in that synchronous pulley group I speed reducing ratio A1It is 1：1, timing belt
Wheel group II speed reducing ratio A2It is 1: 1.5, synchronous pulley group III speed reducing ratio is 1: 1；Screw mandrel is a diameter of in screw mandrel module
20mm, the helical pitch Ph (mm) for drafting screw mandrel module is 5mm；Set manipulator and send the piece time as 18s, set the movement of chuck
Speed is 50mm/s；The rated speed of motor is 3000r/min, and the modulus of gear is 0.8, and the number of teeth is 30.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710420615.3A CN107265113B (en) | 2017-06-06 | 2017-06-06 | It is a kind of for drawing the robot device of sapphire wafer technique |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710420615.3A CN107265113B (en) | 2017-06-06 | 2017-06-06 | It is a kind of for drawing the robot device of sapphire wafer technique |
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| CN107265113A true CN107265113A (en) | 2017-10-20 |
| CN107265113B CN107265113B (en) | 2019-05-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110040503A (en) * | 2019-05-06 | 2019-07-23 | 山东泓瑞光电科技有限公司 | A kind of LED wafer automatic fraction collector silicon wafer disk manipulator arm component |
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| JPS57160828A (en) * | 1981-03-25 | 1982-10-04 | Ntn Toyo Bearing Co Ltd | Work stacker |
| DE3717957A1 (en) * | 1987-05-25 | 1988-12-15 | Wittmann Robot Systeme Gmbh | Apparatus for receiving, transporting, laying down and/or positioning workpieces |
| US5174709A (en) * | 1991-03-06 | 1992-12-29 | Leland D. Blatt | Workpiece transfer device |
| CN101259919A (en) * | 2007-03-06 | 2008-09-10 | 中西金属工业株式会社 | Sliding fork device |
| CN203222331U (en) * | 2012-12-31 | 2013-10-02 | 上海新阳半导体材料股份有限公司 | Electronic element conveying device |
| CN105059923A (en) * | 2015-07-20 | 2015-11-18 | 苏州宏瑞达新能源装备有限公司 | Synchronous driving type automatic glass feeding machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110040503A (en) * | 2019-05-06 | 2019-07-23 | 山东泓瑞光电科技有限公司 | A kind of LED wafer automatic fraction collector silicon wafer disk manipulator arm component |
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| CN107265113B (en) | 2019-05-07 |
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