CN107265113B - It is a kind of for drawing the robot device of sapphire wafer technique - Google Patents
It is a kind of for drawing the robot device of sapphire wafer technique Download PDFInfo
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- CN107265113B CN107265113B CN201710420615.3A CN201710420615A CN107265113B CN 107265113 B CN107265113 B CN 107265113B CN 201710420615 A CN201710420615 A CN 201710420615A CN 107265113 B CN107265113 B CN 107265113B
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- screw rod
- synchronous pulley
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/901—Devices for picking-up and depositing articles or materials provided with drive systems with rectilinear movements only
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Abstract
The present invention relates to sapphire wafer haulage equipments, it is desirable to provide a kind of for drawing the robot device of sapphire wafer technique.This kind is used to draw robot device synchronous pulley group, screw rod mould group, screw rod mould group mounting plate, screw rod mould group sliding block attachment base, synchronous belt wheel shaft II, synchronous belt wheel shaft I, gear, rack gear, rack gear mounting plate, small axis, the belt gripping block, guide rail slide block, rail slider mounting plate, sucker mounting base, chuck of sapphire wafer technique, can carry chip.The present invention is not required to very important person and touches chip during chip needs are transported to another platform from crystal-boat box, robotic wafer sucker, in a narrow space automatic sucking sapphire wafer, entire stroke can expand be twice it is even more.
Description
Technical field
The present invention relates to sapphire wafer haulage equipment fields, in particular to a kind of for drawing sapphire wafer technique
Robot device.
Background technique
Currently, in sapphire industry from crystal-boat box take out chip carry it is critically important, with robotic wafer sucker
This mode for removing to draw chip, avoids because the chip that manually goes to take gives chip bring secondary pollution, to sapphire
Cleaning tape carrys out very big help.
There are many multivariant manipulators on the market at present, such manipulator is bigger, and stroke is also single, the sky accounted for
Between position it is also bigger.
Summary of the invention
It is a primary object of the present invention to overcome deficiency in the prior art, provide it is a kind of can be in a space of very little
Interior, chuck automatic sucking sapphire wafer is arbitrarily put into specified crystal-boat box, and the movement travel of entire manipulator
It can expand and be twice even more robot devices.In order to solve the above technical problems, solution of the invention is:
It provides a kind of for drawing the robot device of sapphire wafer technique, can carry chip, it is described for drawing indigo plant
The robot device of jewel wafer technique includes main motor, synchronous pulley group, screw rod mould group (comprising screw rod, screw rod sliding block, axis
Hold, fixed block), screw rod mould group mounting plate, screw rod mould group sliding block attachment base, synchronous belt wheel shaft II, synchronous belt wheel shaft I, gear, tooth
Item, rack gear mounting plate, small axis, belt gripping block, guide rail slide block, rail slider mounting plate, sucker mounting base, chuck；
The synchronous pulley group includes driving wheel, synchronous belt, driven wheel, and driving wheel passes through synchronous band connection with driven wheel；
Synchronous pulley group is equipped with three groups, respectively synchronous pulley group I, synchronous pulley group II, synchronous pulley group III；
The synchronous pulley group I includes driving wheel, synchronous belt, driven wheel, expansion sleeve, and driving wheel passes through synchronous with driven wheel
Band connection；Driving wheel and main motor are keyed, and driven wheel is connect with screw rod mould group, and expansion sleeve is for fixing driven wheel；
The synchronous pulley group II includes driving wheel, synchronous belt, driven wheel, and driving wheel and driven wheel are connected by synchronous belt
It connects；Driving wheel is connect with synchronous belt wheel shaft II, is driven by gear；Driven wheel is connect with synchronous belt wheel shaft I, for driving synchronous belt
Driving wheel rotation in wheel group III；
The synchronous pulley group III includes driving wheel, synchronous belt, driven wheel, and driving wheel and driven wheel are connected by synchronous belt
It connects；Driving wheel and synchronous belt wheel shaft I are keyed, and are driven by synchronous pulley group II；Driven wheel is fixed in rail slider mounting plate；
The screw rod mould group is connected with main motor by synchronous pulley group I, and main motor can drive the screw rod of screw rod mould group to revolve
Turn, and then the screw rod sliding block of screw rod mould group can be moved forward and backward with the rotation of screw rod；One end of screw rod mould group passes through screw rod mould group
Mounting plate is fixed on platform (device chassis), and the other end screw rod sliding block and screw rod mould group sliding block attachment base of screw rod mould group connect
It connects, and then controls moving forward and backward for screw rod mould group sliding block attachment base；
The rail slider mounting plate is mounted on screw rod mould group sliding block attachment base, and (being connected by screw to) simultaneously ensures guide rail
The guide rail mounting surface on guide rail mounting surface and screw rod mould group sliding block attachment base on sliding block mounting plate is described to lead in approximately the same plane
Rail sliding block is mounted on the guide rail mounting surface of rail slider mounting plate and screw rod mould group sliding block attachment base；
The sucker mounting base is mounted on the sliding block mounting surface connection of guide rail slide block, keeps sucker mounting base sliding with guide rail
The movement of block moves forward and backward, and the chuck is mounted in sucker mounting base；Sucker mounting base is by belt gripping block and together
Belt wheel group III connection is walked, so that being able to drive chuck forward when synchronous pulley (driving wheel, driven wheel) rotation
It stretches backward；
One end of the synchronous belt wheel shaft II is connect with the driving wheel of synchronous pulley group II, and the other end is connect with gear, together
Step pulley shaft II is connect by the bearing of screw rod mould group with screw rod mould group sliding block attachment base, makes gear rotation that can drive synchronous pulley
The driving wheel rotation of group II, and then the driving wheel of synchronous pulley group II drives the driven wheel rotation of synchronous pulley group II；
One end of the synchronous belt wheel shaft I is connect with the driven wheel of synchronous pulley group II, the other end and synchronous pulley group III
Driving wheel connection, synchronous belt wheel shaft I connect by the bearing of screw rod mould group with screw rod mould group sliding block attachment base, and synchronous pulley is made
The rotational energy of the driven wheel of group II drives the driving wheel rotation of synchronous pulley group III, drives the belt front and back of synchronous pulley group III
Movement；
The driving wheel of the synchronous pulley group III is connected to one end of synchronous belt wheel shaft I, and synchronous pulley group III's is driven
Wheel is fixed on the fixed block of screw rod mould group by small axis, and the fixed block (passing through screw) is fixed on rail slider mounting plate
On；
The synchronous belt of the belt gripping block and synchronous pulley group III clamp, and the mounting surface and sucker of belt gripping block are pacified
Dress seat is fixed, and sucker mounting base, chuck and the synchronous belt of synchronous pulley group III is enable to move synchronously；
Rack gear is installed in one end of the rack gear mounting plate, and the other end is fixed on platform, and guarantees that rack and pinion engages.
As a further improvement, the chuck passes through sealing ring (sealing ring of O-ring seal or other forms)
It is sealed with sucker mounting base.
A kind of control method based on the robot device for being used to draw sapphire wafer technique is provided, specifically:
If the revolving speed of main motor is n1(r/min), the reduction ratio of synchronous pulley group I is A1, the lead of screw rod mould group is Ph
(mm), then the speed (mm/a) that the screw rod sliding block in screw rod mould group moves are as follows: ν1=n1·A1·Ph/60；
If screw rod mould group sliding block attachment base is ν with respect to rack movement speed1, then the movement velocity of rack gear opposed gear is ν1,
According to rack and pinion engagement relationship: v=π d1n、d1=m1·Z1, it is known that the revolving speed of gear are as follows:
Wherein, ν (mm/a) is the movement velocity of rack gear, d1It (mm) is reference circle, n (mm/a) is the revolving speed of gear, m1It is tooth
The modulus of wheel, Z1It is the number of teeth of gear；
If the reduction ratio of synchronous pulley group II is A2, then by the way that after synchronous pulley group II, revolving speed becomes n3, it may be assumed that n3=
n2·A2(mm/s)；
Synchronous pulley group III is reached, the revolving speed of driving wheel is n3, belt speed ν3Are as follows: ν3=π n3d2(mm/s)；
Wherein, d2=m2Z2, m2It is the modulus of driving pulley in synchronous pulley group III, Z2It is its number of teeth；
If the movement velocity of chuck and the speed ratio of screw rod mould group sliding block attachment base are set as A, meetI.e. most
The movement velocity of whole chuck and the speed ratio of screw rod mould group sliding block attachment base are as follows:
As a further improvement, the reduction ratio A of synchronous pulley group I1It is 1: 1, the reduction ratio A of synchronous pulley group II2It is 1:
The reduction ratio of 1.5, synchronous pulley group III are 1: 1；The diameter of screw rod is 20mm in screw rod mould group, drafts the lead of screw rod mould group
Ph (mm) is 5mm；Setting manipulator send the piece time as 18s, sets the movement speed of chuck as 50mm/s；Motor it is specified
Revolving speed is 3000r/min, and the modulus of gear is 0.8, the number of teeth 30.
Compared with prior art, the beneficial effects of the present invention are:
The present invention is not required to very important person and touches crystalline substance during chip needs are transported to another platform from crystal-boat box
Piece, robotic wafer sucker, in a narrow space automatic sucking sapphire wafer, entire stroke, which can expand, to be twice very
To more.
The invention can avoid chips directly to be carried generation secondary pollution by people, it is often more important that, a large amount of behaviour can be saved
Make space, space to be adequately and reasonably utilized.It automates entire producing line more, can also save a large amount of manpower object
Power.
Detailed description of the invention
Fig. 1 is the main view of robot device of the present invention for drawing sapphire wafer technique.
Fig. 2 is the left view of robot device of the present invention for drawing sapphire wafer technique.
Fig. 3 is the rearview of robot device of the present invention for drawing sapphire wafer technique.
Appended drawing reference in figure are as follows: 1 main motor；2 rack gear mounting plates；3 gears；4 synchronous belt wheel shaft II；5 rack gears；6 is synchronous
Pulley shaft I；7 synchronous pulley group III；8 screw rod mould group sliding block attachment bases；9 sucker mounting bases；10 belt gripping blocks；11 guide rails are sliding
Block；12 rail slider mounting plates；13 chucks；14 small axis；15 synchronous pulley group I；16 synchronous pulley group II；17 screw rod mould groups
Mounting plate；18 screw rod mould groups.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing:
As shown in Figure 1, Figure 2, Figure 3 shows is a kind of for drawing the robot device of sapphire wafer technique, uses a line
Property mould group and synchronous pulley group, the movement travel expansion of entire manipulator is twice even more, chip by gear 3, rack gear 5 etc.
Stretching is protruded into before and after the component of sucker 13 in this way, draws and carries chip.
It is described for draw the robot device of sapphire wafer technique to include main motor 1, synchronous pulley group I 15, screw rod
It is mould group 18, screw rod mould group mounting plate 17, screw rod mould group sliding block attachment base 8, synchronous pulley group II 16, synchronous belt wheel shaft II4, same
It is sliding to walk pulley shaft I 6, gear 3, rack gear 5, rack gear mounting plate 2, synchronous pulley group III7, small axis 14, belt gripping block 10, guide rail
Block 11, rail slider mounting plate 12, sucker mounting base 9, chuck 13.
The synchronous pulley group I 15 includes driving wheel, synchronous belt, driven wheel, expansion sleeve, and driving wheel and driven wheel pass through
Synchronous band connection；Driving wheel and main motor 1 are keyed, and driven wheel is connect with screw rod mould group 18, and expansion sleeve is for fixing driven wheel.
The synchronous pulley group II 16 includes driving wheel, synchronous belt, driven wheel, and driving wheel and driven wheel pass through synchronous belt
Connection；Driving wheel is connect with synchronous belt wheel shaft II4, is driven by gear 3；Driven wheel is connect with synchronous belt wheel shaft I 6, for driving
Driving wheel rotation in synchronous pulley group III7.
The synchronous pulley group III7 includes driving wheel, synchronous belt, driven wheel, and driving wheel and driven wheel are connected by synchronous belt
It connects；Driving wheel and synchronous belt wheel shaft I 6 are keyed, and are driven by synchronous pulley group II 16；Driven wheel is fixed on guide rail slide block installation
On plate 12.
By the connection of synchronous pulley group I 15, main motor 1 can drive screw rod mould group 18 for the screw rod mould group 18 and main motor 1
Screw rod rotation, and then the screw rod sliding block of screw rod mould group 18 can be moved forward and backward with the rotation of screw rod.One end of screw rod mould group 18
It is fixed on platform by screw rod mould group mounting plate 17, the other end screw rod sliding block of screw rod mould group 18 is connect with screw rod mould group sliding block
Seat 8 connects, and then controls moving forward and backward for screw rod mould group sliding block attachment base 8.
The rail slider mounting plate 12 is mounted on screw rod mould group sliding block attachment base 8, is connected by screw to, and ensure to lead
The guide rail mounting surface on guide rail mounting surface and screw rod mould group sliding block attachment base 8 on rail sliding block mounting plate 12 in approximately the same plane,
The guide rail slide block 11 is mounted on the guide rail mounting surface of rail slider mounting plate 12 and screw rod mould group sliding block attachment base 8.
The sucker mounting base 9 is mounted on the sliding block mounting surface connection of guide rail slide block 11, enables sucker mounting base 9 with leading
The movement of rail sliding block 11 moves forward and backward, and the chuck 13 is mounted on suction by the sealing ring of 0 type sealing ring or other forms
In disk mounting base 9；So moving forward and backward with screw rod mould group sliding block attachment base 8, so that guide rail slide block 11, guide rail slide block
Mounting plate 12, sucker mounting base 9, chuck 13 move forward and backward.Sucker mounting base 9 passes through belt gripping block 10 and synchronous pulley
Group III7 connection, so that being able to drive chuck 13 when synchronous pulley rotation and forwardly and rearwardly stretching.
One end of the synchronous belt wheel shaft II 4 is connect with the driving wheel of synchronous pulley group II 16, and the other end and gear 3 connect
It connects, synchronous belt wheel shaft II 4 is connect by bearing with screw rod mould group sliding block attachment base 8, makes the rotation of gear 3 that can drive synchronous pulley
The driving wheel rotation of group II 16, and then the driving wheel of synchronous pulley group II 16 drives the driven rotation of synchronous pulley group II 16
It is dynamic.
One end of the synchronous belt wheel shaft I 6 is connect with the driven wheel of synchronous pulley group II 16, the other end and synchronous pulley
The driving wheel connection of group III7, synchronous belt wheel shaft I 6 are connect by bearing with screw rod mould group sliding block attachment base 8, and synchronous pulley is made
The rotational energy of the driven wheel of group II 16 drives the driving wheel rotation of synchronous pulley group III7, drives the skin of synchronous pulley group III7
Band moves forward and backward.
The driving wheel of the synchronous pulley group III7 is connected to one end of synchronous belt wheel shaft I 6, synchronous pulley group III7's
Driven wheel is fixed on fixed block by small axis 14, and the fixed block is fixed by screws in rail slider mounting plate 12.
The belt of the belt gripping block 10 and synchronous pulley group III7 clamps, the mounting surface and sucker of belt gripping block 10
Mounting base 9 is fixed, enable sucker mounting base 9, chuck 13 and the belt of synchronous pulley group III7 synchronize move forward and backward.
A kind of kind of drive in this way, under the stroke of screw rod mould group 18, the stroke that chuck 13 is walked expands
It is twice even more.
Rack gear 5 is installed in one end of the rack gear mounting plate 2, and the other end is fixed on platform, and guarantees rack gear 5 and gear 3
Engagement.
The transmission process of entire mechanism: --- synchronous pulley group I 15 --- the screw rod mould group 18 --- rack gear of main motor 1
5 --- --- synchronous pulley group II 16 --- synchronous pulley group III7 --- chucks 13 of gear 3；It is specific as follows:
The revolving speed of main motor 1 is n1(r/min), the reduction ratio of synchronous pulley group I 15 is A1, the lead Ph of screw rod mould group 18
(mm), then:
The speed (mm/s) of sliding block movement in screw rod mould group 18:
v1=n1·A1·Ph/60 (1)
Rack gear 5 is fixed on rack gear mounting plate 2, and gear 3 is fixed on the connection of screw rod mould group sliding block by synchronous belt wheel shaft I 6
On seat 8, screw rod mould group sliding block attachment base 8 is ν with respect to 5 movement velocity of rack gear1, then the movement velocity of 5 opposed gear 3 of rack gear is ν1。
According to 3 rack gear of gear, 5 meshing relation:
V=π d1n (2)
d1=m1·Z1 (3)
Wherein, ν (mm/s) is the movement velocity of rack gear 5, d1It (mm) is reference circle, n (mm/s) is the revolving speed of gear 3, m1It is
The modulus of gear 3, Z1It is the number of teeth of gear 3.
It can thus be appreciated that the revolving speed of structure middle gear 3:
After synchronous pulley group II 16, revolving speed becomes n3, the reduction ratio of synchronous pulley group II 16 is A2, it may be assumed that
n3=n2·A2(mm/s) (5)
Synchronous pulley group III7 is reached, the revolving speed of driving wheel is n3, belt speed ν3Are as follows:
ν3=π n3d2(mm/s) (6)
Wherein, d2=m2Z2, m2It is the modulus of driving pulley in synchronous pulley group III7, Z2It is its number of teeth.
Chuck 13 is fixed on the belt of synchronous pulley group III7, thus the movement velocity of chuck 13 with it is synchronous
The belt speed of belt wheel group III7 is identical.
The movement velocity of chuck 13 and the speed ratio of screw rod mould group sliding block attachment base 8 are set as A:
(4), (5), (6) in above formula are substituted into (7), final speed ratio is obtained:
The main function of synchronous pulley group I is to drive screw rod mould group 18 to move by main motor 1, due to the device space
Switching transmission is carried out, transmission revolving speed is had no need to change, reduction ratio is set to 1: 1；Synchronous pulley group II is used for drive coordination belt wheel group
III movement, other than changing transmission direction, it is also necessary to improve transmission speed, reduction ratio is set to 1: 1.5；Synchronous pulley group III
For driving chuck 13 to move, transmission effect is played, does not change speed transmission, reduction ratio is set to 1: 1.
Because of the limitation of the device space and in order to guarantee required structural strength, the straight of screw rod in screw rod mould group 18 is selected
Diameter is 20mm, searches mechanical design handbook, and the lead for drafting screw rod mould group 18 is 5mm.Manipulator takes in piece measurement process, considers
Induction precision and sensitive time to wafer thickness measuring sensor set manipulator and send the piece time as 18s, the row according to design
Journey sets the movement speed of chuck 13 as about 50mm/s.
Thus the movement velocity of sucker and the speed ratio of screw rod mould group sliding block attachment base 8 are as described above, set the volume of motor
Determining revolving speed is 3000r/min, and the modulus of gear 3 is 0.8, the number of teeth 30.
Finally it should be noted that the above enumerated are only specific embodiments of the present invention.It is clear that the invention is not restricted to
Above embodiments can also have many variations.Those skilled in the art can directly lead from present disclosure
Out or all deformations for associating, it is considered as protection scope of the present invention.
Claims (4)
1. it is a kind of for drawing the robot device of sapphire wafer technique, chip can be carried, which is characterized in that described for inhaling
The robot device for taking sapphire wafer technique includes main motor, synchronous pulley group, screw rod mould group, screw rod mould group mounting plate, silk
Bar mould group sliding block attachment base, synchronous belt wheel shaft II, synchronous belt wheel shaft I, gear, rack gear, rack gear mounting plate, small axis, belt clamp
Block, guide rail slide block, rail slider mounting plate, sucker mounting base, chuck；
The synchronous pulley group includes driving wheel, synchronous belt, driven wheel, and driving wheel passes through synchronous band connection with driven wheel；It is synchronous
Belt wheel group is equipped with three groups, respectively synchronous pulley group I, synchronous pulley group II, synchronous pulley group III；
The screw rod mould group and main motor are connected by synchronous pulley group I, and main motor can drive the screw rod of screw rod mould group to rotate, into
And the screw rod sliding block of screw rod mould group can be moved forward and backward with the rotation of screw rod；One end of screw rod mould group passes through screw rod mould group mounting plate
It is fixed on platform, the other end screw rod sliding block of screw rod mould group is connect with screw rod mould group sliding block attachment base, and then controls screw rod mould
Group sliding block attachment base moves forward and backward；
The rail slider mounting plate is mounted on screw rod mould group sliding block attachment base, and ensures the guide rail in rail slider mounting plate
For guide rail mounting surface on mounting surface and screw rod mould group sliding block attachment base in approximately the same plane, it is sliding that the guide rail slide block is mounted on guide rail
On the guide rail mounting surface of block mounting plate and screw rod mould group sliding block attachment base；
The sucker mounting base is mounted on the sliding block mounting surface connection of guide rail slide block, enables sucker mounting base with guide rail slide block
Movement moves forward and backward, and the chuck is mounted in sucker mounting base；Sucker mounting base passes through belt gripping block and synchronous belt
Wheel group III connects, so that being able to drive chuck when synchronous pulley rotation and forwardly and rearwardly stretching；
One end of the synchronous belt wheel shaft II is connect with the driving wheel of synchronous pulley group II, and the other end is connect with gear, synchronous belt
Wheel shaft II is connect by the bearing of screw rod mould group with screw rod mould group sliding block attachment base, makes gear rotation that can drive synchronous pulley group II
Driving wheel rotation, and then synchronous pulley group II driving wheel drive synchronous pulley group II driven wheel rotation；
One end of the synchronous belt wheel shaft I is connect with the driven wheel of synchronous pulley group II, the master of the other end and synchronous pulley group III
Driving wheel connection, synchronous belt wheel shaft I are connect by the bearing of screw rod mould group with screw rod mould group sliding block attachment base, and synchronous pulley group II is made
Driven wheel rotational energy drive synchronous pulley group III driving wheel rotation, driving synchronous pulley group III belt move forward and backward；
The driving wheel of the synchronous pulley group III is connected to one end of synchronous belt wheel shaft I, and the driven wheel of synchronous pulley group III passes through
Small axis is fixed on the fixed block of screw rod mould group, and the fixed block is fixed in rail slider mounting plate；
The synchronous belt of the belt gripping block and synchronous pulley group III clamps, and the mounting surface and sucker mounting base of belt gripping block are solid
It is fixed, so that the synchronous belt of sucker mounting base, chuck and synchronous pulley group III is moved synchronously；
Rack gear is installed in one end of the rack gear mounting plate, and the other end is fixed on platform, and guarantees that rack and pinion engages.
2. according to claim 1 a kind of for drawing the robot device of sapphire wafer technique, which is characterized in that institute
Chuck is stated to seal by sealing ring and sucker mounting base.
3. a kind of control method based on the robot device described in claim 1 for drawing sapphire wafer technique, special
Sign is, specifically:
If the revolving speed of main motor is n1, unit r/min, the reduction ratio of synchronous pulley group I is A1, the lead of screw rod mould group is
Ph, unit mm, the then speed that the screw rod sliding block in screw rod mould group moves are as follows: v1=n1·A1Ph/60, unit mm/
s；
If screw rod mould group sliding block attachment base is v with respect to rack movement speed1, then the movement velocity of rack gear opposed gear is v1, foundation
Rack and pinion engagement relationship: v=π d1n、d1=m1·Z1, it is known that the revolving speed of gear are as follows:
Its unit is mm/s；
Wherein, v is the movement velocity of rack gear, unit mm/s；d1It is reference circle, unit mm；N is the revolving speed of gear,
Unit is mm/s；m1It is the modulus of gear, Z1It is the number of teeth of gear；
If the reduction ratio of synchronous pulley group II is A2, then by the way that after synchronous pulley group II, revolving speed becomes n3, it may be assumed that n3=n2·A2,
Its unit is mm/s；
Synchronous pulley group III is reached, the revolving speed of driving wheel is n3, belt speed v3Are as follows: v3=π n3d2, unit mm/s；
Wherein, d2=m2Z2, m2It is the modulus of driving pulley in synchronous pulley group III, Z2It is its number of teeth；
If the movement velocity of chuck and the speed ratio of screw rod mould group sliding block attachment base are set as A, meetIt is i.e. final brilliant
The movement velocity of piece sucker and the speed ratio of screw rod mould group sliding block attachment base are as follows:
4. control method according to claim 3, which is characterized in that the reduction ratio A of synchronous pulley group I1It is 1:1, synchronous belt
The reduction ratio A of wheel group II2It is 1:1.5, the reduction ratio of synchronous pulley group III is 1:1；The diameter of screw rod is 20mm in screw rod mould group,
The lead Ph for drafting screw rod mould group is 5mm；Setting manipulator send the piece time as 18s, set the movement speed of chuck as
50mm/s；The rated speed of motor is 3000r/min, and the modulus of gear is 0.8, the number of teeth 30.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710420615.3A CN107265113B (en) | 2017-06-06 | 2017-06-06 | It is a kind of for drawing the robot device of sapphire wafer technique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710420615.3A CN107265113B (en) | 2017-06-06 | 2017-06-06 | It is a kind of for drawing the robot device of sapphire wafer technique |
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| CN107265113A CN107265113A (en) | 2017-10-20 |
| CN107265113B true CN107265113B (en) | 2019-05-07 |
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ID=60065952
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710420615.3A Active CN107265113B (en) | 2017-06-06 | 2017-06-06 | It is a kind of for drawing the robot device of sapphire wafer technique |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57160828A (en) * | 1981-03-25 | 1982-10-04 | Ntn Toyo Bearing Co Ltd | Work stacker |
| DE3717957A1 (en) * | 1987-05-25 | 1988-12-15 | Wittmann Robot Systeme Gmbh | Apparatus for receiving, transporting, laying down and/or positioning workpieces |
| US5174709A (en) * | 1991-03-06 | 1992-12-29 | Leland D. Blatt | Workpiece transfer device |
| CN101259919A (en) * | 2007-03-06 | 2008-09-10 | 中西金属工业株式会社 | Sliding fork device |
| CN203222331U (en) * | 2012-12-31 | 2013-10-02 | 上海新阳半导体材料股份有限公司 | Electronic element conveying device |
| CN105059923A (en) * | 2015-07-20 | 2015-11-18 | 苏州宏瑞达新能源装备有限公司 | Synchronous driving type automatic glass feeding machine |
-
2017
- 2017-06-06 CN CN201710420615.3A patent/CN107265113B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57160828A (en) * | 1981-03-25 | 1982-10-04 | Ntn Toyo Bearing Co Ltd | Work stacker |
| DE3717957A1 (en) * | 1987-05-25 | 1988-12-15 | Wittmann Robot Systeme Gmbh | Apparatus for receiving, transporting, laying down and/or positioning workpieces |
| US5174709A (en) * | 1991-03-06 | 1992-12-29 | Leland D. Blatt | Workpiece transfer device |
| CN101259919A (en) * | 2007-03-06 | 2008-09-10 | 中西金属工业株式会社 | Sliding fork device |
| CN203222331U (en) * | 2012-12-31 | 2013-10-02 | 上海新阳半导体材料股份有限公司 | Electronic element conveying device |
| CN105059923A (en) * | 2015-07-20 | 2015-11-18 | 苏州宏瑞达新能源装备有限公司 | Synchronous driving type automatic glass feeding machine |
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| Publication number | Publication date |
|---|---|
| CN107265113A (en) | 2017-10-20 |
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