CN107218895A - A kind of optical thickness monitor device and monitoring method - Google Patents
A kind of optical thickness monitor device and monitoring method Download PDFInfo
- Publication number
- CN107218895A CN107218895A CN201710425177.XA CN201710425177A CN107218895A CN 107218895 A CN107218895 A CN 107218895A CN 201710425177 A CN201710425177 A CN 201710425177A CN 107218895 A CN107218895 A CN 107218895A
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- Prior art keywords
- light
- coating
- coating layer
- layer thickness
- precoating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D5/00—Control of dimensions of material
- G05D5/02—Control of dimensions of material of thickness, e.g. of rolled material
- G05D5/03—Control of dimensions of material of thickness, e.g. of rolled material characterised by the use of electric means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Coating Apparatus (AREA)
Abstract
A kind of optical thickness monitor device and monitoring method, for monitoring the coating layer thickness on coated substrates, the supervising device includes light sensing system and processor, and the light sensing system is electrically connected with the processor；Wherein, the light sensing system is used to detect the coating layer thickness on precoating roller, and the processor is used to obtain the coating layer thickness on the coated substrates according to the coating layer thickness on the precoating roller.The device, so as to obtain the coating layer thickness on coated substrates according to the coating layer thickness on precoating roller, realizes the real-time monitoring of coating layer thickness by the way that optical thickness monitor device is arranged on precoating roller with the coating layer thickness on real-time monitoring precoating roller.
Description
Technical field
The present invention relates to technical field of liquid crystal display, more particularly, to a kind of optical thickness monitor device and monitoring method.
Background technology
Color membrane substrates in display screen are general by by black matrix" (BM), red (R) photoresist, green (R) photoresistance
Material, blueness (B) photoresist, diaphragm and sept are coated on coated substrates, the shape after overexposure, development and drying
Into.R photoresists, G photoresists and B photoresists form R photoresistances, G photoresistances and B respectively after overexposure, development and drying
Photoresistance.Because fine and ultrathin are the development trends of current display screen technology, and ultrathin requirement is entered to the thickness of photoresistance
The strict management and control of row.But thickness can not be monitored during board volume production, when there is the unequal coating of film breakage/thickness
When abnormal, it is impossible to find in time, easily cause and flowed after abnormal piece, rear processing procedure is impacted.Prior art discloses one kind inspection
The method for surveying coated substrates thickness, this method is that directly the thickness on coated substrates is detected, but is deposited when on coated substrates
In the pattern of concavo-convex inequality, light path scattering can lead to not receive retroreflection light, can not be realized in actual production to coating base
The monitoring of plate thickness.
And in production, in order to prevent the photoresistance in light blockage coating head from, because blocking coating head after idle a period of time, generally existing
Before idle certain time or formal coating, estimated coating action is done on the precoating roller (Dummy roller) that board is set.
But, it is necessary to after using coated with glass photoresistance when current light blockage coating head carries out thickness debugging, then tested with measurement platform,
Usual thickness debugging needs three to four benefit values to debug success, takes longer and consuming glass is more.
The content of the invention
For the above-mentioned technical problem in the presence of prior art, the present invention proposes a kind of optical thickness monitor device,
For monitoring the coating layer thickness on coated substrates, the device is by the way that optical thickness monitor device is arranged on precoating roller with reality
When monitoring precoating roller on coating layer thickness so that according to precoating roller on coating layer thickness obtain coated substrates on painting thickness
Degree, solves and runs into the prior art when there is concavo-convex uneven pattern on coated substrates, the directly painting on detection coated substrates
The problem of thickness degree can not be realized, realizes the real-time monitoring to coating layer thickness on coated substrates, in addition, the present invention can be additionally used in
Thickness is debugged, the time and glass for reducing the debugging of prior art thickness are consumed.
According to an aspect of the present invention, a kind of optical thickness monitor device, for monitoring the coating layer thickness on coated substrates,
The supervising device includes light sensing system and processor, and the light sensing system is electrically connected with the processor；
Wherein, the light sensing system is used to detect the coating layer thickness on precoating roller, and the processor is used for according to institute
State the coating layer thickness on the coating layer thickness acquisition coated substrates on precoating roller.
The device is by the way that optical thickness monitor device is arranged on precoating roller with the painting on real-time monitoring precoating roller
Thickness degree, so as to obtain the coating layer thickness on coated substrates according to the coating layer thickness on precoating roller, is realized to coated substrates
The real-time monitoring of upper coating layer thickness.
In one embodiment, the light sensing system includes light source emission system, receiving system and calculates single
Member, the computing unit is electrically connected with the light source emission system and the receiving system respectively；
Wherein, the light source emission system is used for the precoating roller transmitting incident light；
The receiving system, is used to receive the incident light through the precoating cylinder surface reflection before Coating
The first reflected light afterwards, is used to receive the incident light after the coating surface reflection on the precoating roller after Coating
The second reflected light；
The reflected light signal that the computing unit is received according to receiving system obtains the painting on the precoating roller
Thickness degree.
In one embodiment, the processor includes database, and the database is used to store the precoating roller
On coating layer thickness and the coating layer thickness on the coated substrates corresponding relation.
In one embodiment, the light source emission system includes the advance of light source and the light sent along the light source
The slit and the first convergent mirror set gradually on direction, the receiving system includes setting gradually along along the reflection direction of light
The second convergent mirror and linear transducer；
Wherein, the linear transducer includes light receiving unit and amplifier, and the light receiving unit is used to receive described first
Reflected light and second reflected light, the amplifier are used to amplify the optical signal that light receiving unit is received.
Before Coating, light source splits the light into some beams by slit, and the light after beam splitting is projected by the first convergent mirror
To the surface of the precoating roller, a part is through after the surface reflection for precoating roller, the light is projected through the second convergent mirror
On unit.After Coating, light source splits the light into some beams by slit, and the light after beam splitting is projected by the first convergent mirror
Coating surface on the precoating roller a, part is projected after precoating the coating surface reflection on roller through the second convergent mirror
Onto light receiving unit；Another part is through reaching the coating on precoating roller after the coating refraction for precoating cylinder surface, due to the prison
Control device and be applied to light blockage coating in most cases, therefore reach that the wide part of coating is absorbed by photoresistance.The amplifier will be by
The reflected light signal that light unit is received is amplified processing.Specifically, by the first reflected light and the second reflected light signal by
The distance between incident point in light unit is amplified, and according to optical detection principle, obtains the thickness of the coating on the precoating roller
Degree, then, according to pair of the coating layer thickness on the coating layer thickness and the coated substrates on the precoating roller stored in database
The coating layer thickness obtained on the coated substrates should be related to.
In one embodiment, the light source emission system also include the first refractive component, first refractive component,
First convergent mirror and slit constitute axle system of sharing the same light.
In one embodiment, the receiving system also include the second refractive component, second refractive component,
Second convergent mirror and linear transducer constitute axle system of sharing the same light.
First refractive component and second refractive component are set suitable for the limited monitoring of environmental in space, first
Refractive component and the second refractive component include two dioptric elements being engaged, and first convergent mirror is located at first folding
Between two dioptric elements in optical assembly, second convergent mirror is located at two dioptric elements in second refractive component
Between.By setting the first refractive component and the second refractive component so that light is projected according to default light path.
In one embodiment, the angle on the incident light and the default roller between the tangent line of coating surface is small
In or equal to 12 degree.The angle is smaller, and the first reflected light and the second reflected light projects are bigger to the distance between linear transducer,
Recall rate and the degree of accuracy also can be higher.
In one embodiment, the processor connection coating controller, the coating controller connects coating head；Its
In, the coating controller receives the signal of coating layer thickness on the coated substrates that the processor is got, and uses real-time control
The coating head is made to adjust the thickness of coating on the coated substrates.
In addition, the supervising device can also be used to debug thickness, applied by detecting to do on precoating roller when estimated coating is acted
The thickness of layer, and be adjusted in time, reduce thickness debug time and glass consumes.
According to another aspect of the present invention, a kind of method for monitoring coating layer thickness on coated substrates, comprises the following steps：
S1, the coating layer thickness obtained on precoating roller；
S2, the coating layer thickness obtained according to the coating layer thickness on the precoating roller on the coated substrates.
In one embodiment, the step S1 includes：
S11, to the precoating roller transmitting incident light, detect the incident light before Coating through the precoating roller
The first reflected light after the reflection of surface, and detect the incident light after Coating through the coating surface on the precoating roller
The second reflected light after reflection；
S12, the reflected light signal received according to receiving system obtain precoating the coating layer thickness on roller.
Compared with prior art, it is an advantage of the current invention that the device is pre- by the way that optical thickness monitor device is arranged on
Apply with the coating layer thickness on real-time monitoring precoating roller on roller, so as to obtain coating base according to the coating layer thickness on precoating roller
Coating layer thickness on plate, solves and runs into the prior art when there is concavo-convex uneven pattern on coated substrates, directly detection painting
The problem of coating layer thickness on cloth substrate can not be realized, realizes the real-time monitoring to coating layer thickness on coated substrates, in addition, this
Invention can also be used to debug thickness, and the time and glass for reducing the debugging of prior art thickness are consumed.
Brief description of the drawings
The preferred embodiments of the present invention are described in detail below in conjunction with accompanying drawing.In figure：
Fig. 1 shows the structural representation of the optical thickness monitor device described in embodiments in accordance with the present invention.
Fig. 2 shows the schematic diagram of the apparatus for coating described in embodiments in accordance with the present invention.
Fig. 3 shows the light sensing system structural representation of the optical thickness monitor device described in embodiments in accordance with the present invention
Figure.
Fig. 4 is shown applies thickness on the optical thickness monitor assembly monitor precoating roller described in embodiments in accordance with the present invention
The principle schematic one of degree.
Fig. 5 is shown applies thickness on the optical thickness monitor assembly monitor precoating roller described in embodiments in accordance with the present invention
The principle schematic two of degree.
Fig. 6 shows the optical thickness monitor assembly monitor precoating roller coating layer thickness described in embodiments in accordance with the present invention
Optical principle schematic diagram one.
Fig. 7 shows the optical thickness monitor assembly monitor precoating roller coating layer thickness described in embodiments in accordance with the present invention
Optical principle schematic diagram two.
Fig. 8 shows the method flow diagram for monitoring coating layer thickness on coated substrates described in embodiments in accordance with the present invention.
In the accompanying drawings, identical part uses identical reference.Accompanying drawing is not drawn according to actual ratio.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
As shown in figure 1, the present invention provides a kind of optical thickness monitor device, for monitoring the painting thickness on coated substrates
Degree, the supervising device includes light sensing system 1 and processor 2, and the light sensing system 1 is electrically connected with the processor 2.
As shown in Figure 2, it is shown that a kind of apparatus for coating, wherein, the light sensing system 1 pass through detect precoating roller 3 on
Coating thickness, the processor 2 obtained on the coated substrates 5 according to the thickness of the coating on the precoating roller 3
Coating layer thickness.Wherein, the coating that is designated as on first coating 4, the coated substrates 5 of coating on the precoating roller 3 is designated as the
Two coating (not shown)s.
The device is precoated on roller 3 by the way that optical thickness monitor device is arranged on precoating roller 3 with real-time monitoring
The thickness of first coating 4, so as to obtain the second coating on coated substrates 5 according to the thickness of the first coating 4 on precoating roller 3
Thickness, realize the real-time monitoring to the thickness of the second coating on coated substrates 5.
In one embodiment, as shown in figure 3, the light sensing system 1, which includes light source emission system 11, signal, receives system
System 12 and computing unit 12, the computing unit 12 are electric with the light source emission system 11 and the receiving system 12 respectively
Property connection；
Referring to shown in Fig. 4 and Fig. 5, wherein, the light source emission system 11 is used for the precoating roller 3 transmitting incident light
A, the receiving system 12 is used to receive the incident light a after the reflection of precoating roller 3 surface before Coating
The first reflected light b, after Coating be used for receive the incident light a through it is described precoating roller 3 on coating surface reflect
The second reflected light c afterwards；
Optical signal of the computing unit 13 according to the first reflected light b and the second reflected light c on receiving system 12
Obtain the thickness of the first coating 4.
In one embodiment, the processor 2 includes database 21, and the database 21 is used to store first painting
The corresponding relation of the thickness of layer 4 and the thickness of second coating.
In one embodiment, as shown in fig. 6, the light source emission system 11 includes light source 111 and along the light source
The convergent mirror 113 of slit 112 and first set gradually in the direction of advance of 111 light sent, the receiving system 12 is wrapped
Include the second convergent mirror 121 and linear transducer 122 set gradually along along the reflection direction of light；
Wherein, the linear transducer 122 includes light receiving unit (not shown) and amplifier (not shown), institute
Stating light receiving unit is used to receive the first reflected light a and the second reflected light b, and the amplifier is used to amplify the light
The optical signal that unit is received.
Before Coating, light source 111 splits the light into some beams, preferably three light beams, by the way that light is divided by slit 112
Beam, the signal interference that can prevent dropping fire from causing, the light after beam splitting projects the precoating roller by the first convergent mirror 113
3 surface, a part through the second convergent mirror 121 through after the surface reflection for precoating roller 3, projecting on the light receiving unit.Apply
After cloth coating, light source 111 splits the light into some beams by slit 112, and the light after beam splitting is projected by the first convergent mirror 113
The surface of the first coating 4, after surface reflection of the part through first coating 4, light list is projected through the second convergent mirror 121
In member；Another part is through reaching first coating 4, it is preferred that the first coating 4 and second coating are photoresistance, into photoresistance
Wide to be partly absorbed, the light that light receiving unit is reached after being reflected through photoresistive surface is amplified processing by the amplifier.Wherein,
Before Coating, incident points of first reflected light bs of the incident light a after the reflection of precoating roller 3 surface on light receiving unit
Be designated as origin O, between incident points of the second reflected light c on light receiving unit after being reflected by origin O and by first coating 4 away from
It is convenient to calculate from amplification.
Obtain after the distance amplification between the incident point of the origin O and the second reflected light c on light receiving unit, according to light
The principle of detection is learned, the coating layer thickness on the precoating roller 3 is obtained, afterwards according on the precoating roller 3 stored in database
Coating layer thickness and the corresponding relations of coating layer thickness of the coated substrates 5 obtain coating layer thickness on the coated substrates 5.
In one embodiment, it is described as shown in fig. 7, the light source emission system 11 also includes the first refractive component 114
First refractive component 114, the first convergent mirror 113 and slit 112 constitute axle system of sharing the same light.
In one embodiment, the receiving system 12 also includes the second refractive component 123, the second refractive power group
Part 123, the second convergent mirror 121 and linear transducer 122 constitute axle system of sharing the same light.
First refractive component 114 and second refractive component 123 is set to be applied to the limited monitoring of environmental in space
In, the first refractive component 114 and the second refractive component 123 include two dioptric elements being engaged, first convergent mirror
113 are located between two dioptric elements in first refractive component 114, and second convergent mirror 121 is located at described second
Between two dioptric elements in refractive component 123.By setting the first refractive component 114 and the second refractive component 123 so that
Light is projected according to default light path.
In one embodiment, the angle between the tangent line on the surface of the incident light and the first coating 4 be less than or
Equal to 12 degree.The angle is smaller, and the first reflected light b and the second reflected light c project the distance between linear transducer 122 more
Greatly, recall rate and the degree of accuracy also can be higher.
In one embodiment, the connection of the processor 2 coating controller (not shown), the coating controller connects
Connect coating head 7；Wherein, the coating controller receives the signal of the thickness for the first coating 4 that the processor 2 is got, and
Use and control the coating head 7 to adjust the thickness of the second coating in real time.
In addition, the supervising device can also be used to debug thickness, by detecting that precoating roller 3 is done first when estimated coating is acted
The thickness of coating 4, and benefit value adjustment is carried out in time, reduce thickness debug time and glass consumes.
As shown in figure 8, the present embodiment provides a kind of method for monitoring coating layer thickness on coated substrates, comprise the following steps：
S1, the first coating 4 obtained on precoating roller 3 thickness；
S2, the thickness according to the second coating on the thickness of the first coating 4 acquisition coated substrates 5.
In one embodiment, the step S1 includes：
S11, to the precoating roller 3 transmitting incident light a, detect the incident light a before Coating through the precoating
The first reflected light b after the reflection of the surface of roller 3, and detect the incident light a after Coating through on the precoating roller 3
The second reflected light c after coating surface reflection；
S12, precoated in the optical signal of receiving system 12 according to the first reflected light b and the second reflected light c
Coating layer thickness on roller 3.
Compared with prior art, it is an advantage of the current invention that the device is pre- by the way that optical thickness monitor device is arranged on
Apply with the coating layer thickness on real-time monitoring precoating roller on roller, so as to obtain coating base according to the coating layer thickness on precoating roller
Coating layer thickness on plate, solves and runs into the prior art when there is concavo-convex uneven pattern on coated substrates, directly detection painting
The problem of coating layer thickness on cloth substrate can not be realized, realizes the real-time monitoring to coated substrates coating layer thickness, in addition, this hair
Bright to can also be used to debug thickness, the time and glass for reducing the debugging of prior art thickness are consumed.
The preferred embodiment of the present invention is the foregoing is only, but the scope of the present invention is not limited thereto, Ren Heben
The technical staff in field easily can be changed or change in technical scope disclosed by the invention, and this change or change
Change should be all included within the scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Enclose and be defined.
Claims (10)
1. a kind of optical thickness monitor device, for monitoring the coating layer thickness on coated substrates, it is characterised in that the monitoring dress
Put including light sensing system and processor, the light sensing system is electrically connected with the processor；
Wherein, the light sensing system is used to detect the coating layer thickness on precoating roller, and the processor is used for according to described pre-
Apply the coating layer thickness on the coating layer thickness acquisition coated substrates on roller.
2. optical thickness monitor device according to claim 1, it is characterised in that the light sensing system is sent out including light source
System, receiving system and computing unit are penetrated, the computing unit connects with the light source emission system and the signal respectively
Receipts system is electrically connected with；
Wherein, the light source emission system is used for the precoating cylinder surface transmitting incident light；
The receiving system, is used to receive the incident light after the precoating cylinder surface reflection before Coating
First reflected light, is used to receive the of the incident light after the coating surface reflection on the precoating roller after Coating
Two reflected lights；
The reflected light signal that the computing unit is received according to receiving system obtains the painting thickness on the precoating roller
Degree.
3. optical thickness monitor device according to claim 1, it is characterised in that the processor includes database, institute
State the corresponding relation that database is used to store the coating layer thickness on the precoating roller and the coating layer thickness on the coated substrates.
4. optical thickness monitor device according to claim 2, it is characterised in that the light source emission system includes light source
And the slit and the first convergent mirror set gradually in the direction of advance of the light sent along the light source, the receiving system
Including the second convergent mirror set gradually on the reflection direction along light and linear transducer；
Wherein, the linear transducer includes light receiving unit and amplifier, and the light receiving unit is used to receive first reflection
Light and second reflected light, the amplifier are used to amplify the optical signal that light receiving unit is received.
5. optical thickness monitor device according to claim 4, it is characterised in that the light source emission system also includes the
One refractive component, first refractive component, the first convergent mirror and slit constitute axle system of sharing the same light.
6. optical thickness monitor device according to claim 4, it is characterised in that the receiving system also includes the
Two refractive components, second refractive component, the second convergent mirror and linear transducer constitute axle system of sharing the same light.
7. optical thickness monitor device according to claim 1, it is characterised in that the incident light and the default roller
On coating surface tangent line between angle be less than or equal to 12 degree.
8. optical thickness monitor device according to claim 1, it is characterised in that the processor connection coating control
Device, the coating controller connects coating head；Wherein, the coating controller receives the coated substrates that the processor is got
The signal of upper coating layer thickness, and use and control the coating head in real time to adjust the thickness of coating on the coated substrates.
9. coating layer thickness on the optical thickness monitor assembly monitor coated substrates described in a kind of use claim any one of 1-8
Method, it is characterised in that comprise the following steps：
S1, the coating layer thickness obtained on precoating roller；
S2, the coating layer thickness obtained according to the coating layer thickness on the precoating roller on the coated substrates.
10. the method for coating layer thickness on monitoring coated substrates according to claim 9, it is characterised in that the step S1
Including：
S11, to the precoating roller transmitting incident light, detect the incident light before Coating through the precoating cylinder surface
The first reflected light after reflection, and the detection incident light reflect after Coating through the coating surface on the precoating roller
The second reflected light afterwards；
S12, the reflected light signal received according to receiving system obtain precoating the coating layer thickness on roller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710425177.XA CN107218895A (en) | 2017-06-07 | 2017-06-07 | A kind of optical thickness monitor device and monitoring method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710425177.XA CN107218895A (en) | 2017-06-07 | 2017-06-07 | A kind of optical thickness monitor device and monitoring method |
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| CN201710425177.XA Pending CN107218895A (en) | 2017-06-07 | 2017-06-07 | A kind of optical thickness monitor device and monitoring method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107894209A (en) * | 2017-10-11 | 2018-04-10 | 汕头大学 | A kind of dip roll Coating thickness machine vision detection method |
| CN108534689A (en) * | 2018-04-03 | 2018-09-14 | 汕头大学 | A kind of leaching roller coating cloth coating layer thickness online test method and its detection platform |
| CN110038748A (en) * | 2019-04-01 | 2019-07-23 | 深圳市华星光电技术有限公司 | The film thickness monitoring method of optical film |
| CN112518849A (en) * | 2020-11-10 | 2021-03-19 | 四川羽玺新材料股份有限公司 | Optical-grade PET release film slitting process quality monitoring system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107894209A (en) * | 2017-10-11 | 2018-04-10 | 汕头大学 | A kind of dip roll Coating thickness machine vision detection method |
| CN108534689A (en) * | 2018-04-03 | 2018-09-14 | 汕头大学 | A kind of leaching roller coating cloth coating layer thickness online test method and its detection platform |
| CN110038748A (en) * | 2019-04-01 | 2019-07-23 | 深圳市华星光电技术有限公司 | The film thickness monitoring method of optical film |
| CN112518849A (en) * | 2020-11-10 | 2021-03-19 | 四川羽玺新材料股份有限公司 | Optical-grade PET release film slitting process quality monitoring system |
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Application publication date: 20170929 |