CN107110147B - 波纹管泵装置 - Google Patents

波纹管泵装置 Download PDF

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Publication number
CN107110147B
CN107110147B CN201580070335.3A CN201580070335A CN107110147B CN 107110147 B CN107110147 B CN 107110147B CN 201580070335 A CN201580070335 A CN 201580070335A CN 107110147 B CN107110147 B CN 107110147B
Authority
CN
China
Prior art keywords
elongation
bellows
air
air pressure
bellowspump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580070335.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN107110147A (zh
Inventor
中野笃
永江庆士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Pillar Packing Co Ltd
Original Assignee
Nippon Pillar Packing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Pillar Packing Co Ltd filed Critical Nippon Pillar Packing Co Ltd
Publication of CN107110147A publication Critical patent/CN107110147A/zh
Application granted granted Critical
Publication of CN107110147B publication Critical patent/CN107110147B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B11/00—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B11/00—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation
    • F04B11/005—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using two or more pumping pistons
    • F04B11/0058—Equalisation of pulses, e.g. by use of air vessels; Counteracting cavitation using two or more pumping pistons with piston speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • F04B43/113—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/022—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows with two or more bellows in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
    • F04B45/033—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having fluid drive
    • F04B45/0336—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows having fluid drive the actuating fluid being controlled by one or more valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/10—Motor parameters of linear elastic fluid motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/13—Pressure pulsations after the pump
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
CN201580070335.3A 2014-12-25 2015-07-06 波纹管泵装置 Active CN107110147B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014-262753 2014-12-25
JP2014262753A JP6362535B2 (ja) 2014-12-25 2014-12-25 ベローズポンプ装置
PCT/JP2015/069449 WO2016103768A1 (ja) 2014-12-25 2015-07-06 ベローズポンプ装置

Publications (2)

Publication Number Publication Date
CN107110147A CN107110147A (zh) 2017-08-29
CN107110147B true CN107110147B (zh) 2019-04-16

Family

ID=56149814

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580070335.3A Active CN107110147B (zh) 2014-12-25 2015-07-06 波纹管泵装置

Country Status (7)

Country Link
US (1) US10718324B2 (ko)
EP (1) EP3239523B1 (ko)
JP (1) JP6362535B2 (ko)
KR (1) KR102249282B1 (ko)
CN (1) CN107110147B (ko)
TW (1) TWI657198B (ko)
WO (1) WO2016103768A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014217897A1 (de) * 2014-09-08 2016-03-10 Pressure Wave Systems Gmbh Kompressorvorrichtung, eine damit ausgerüstete Kühlvorrichtung und ein Verfahren zum Betreiben der Kompressorvorrichtung und der Kühlvorrichtung
US11946466B2 (en) * 2016-10-27 2024-04-02 Baxter International Inc. Medical fluid therapy machine including pneumatic pump box and accumulators therefore
NO344401B1 (en) * 2017-07-04 2019-11-25 Rsm Imagineering As Method, system and use, of controlling working range of a pump bellows
JP7120899B2 (ja) * 2018-12-11 2022-08-17 日本ピラー工業株式会社 ベローズポンプ装置
JP7272913B2 (ja) * 2019-09-09 2023-05-12 日本ピラー工業株式会社 ベローズポンプ装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5224841A (en) * 1992-04-24 1993-07-06 Semitool, Inc. Pneumatic bellows pump with supported bellows tube
JPH11324926A (ja) * 1998-05-15 1999-11-26 Nippon Pillar Packing Co Ltd 隔膜式往復動ポンプ
JP2000002187A (ja) * 1998-06-15 2000-01-07 Dainippon Screen Mfg Co Ltd ポンプ制御機構およびそれを用いた基板処理装置ならびにポンプ制御方法
CN102057160A (zh) * 2009-06-10 2011-05-11 株式会社易威奇 双联往复运动泵
CN102325999A (zh) * 2009-02-24 2012-01-18 日本皮拉工业株式会社 波纹管泵
CN103261817A (zh) * 2011-03-15 2013-08-21 伊格尔工业股份有限公司 液体供给系统

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4021156A (en) * 1976-01-15 1977-05-03 Western Electric Co. High pressure hydraulic system
US4666374A (en) * 1983-01-11 1987-05-19 Cooper Industries, Inc. Methods and apparatus for producing uniform discharge and suction flow rates
US4534044A (en) * 1983-05-02 1985-08-06 Honeywell Information Systems Inc. Diskette read data recovery system
JPS6144686A (ja) * 1984-08-10 1986-03-04 Mitsubishi Paper Mills Ltd 感熱記録材料
DE9218858U1 (de) * 1991-05-16 1995-12-07 Sandoz-Patent-GmbH, 79539 Lörrach Doppelkolbenpumpe
JPH08296564A (ja) 1995-04-28 1996-11-12 Sony Corp ベローズポンプによる液体供給方法及びその装置
FR2783021B1 (fr) * 1998-09-09 2000-10-13 Inst Francais Du Petrole Procede et systeme de pompage de fluide utilisant une pompe avec un debit constant a l'aspiration ou au refoulement
JP3205909B2 (ja) 1999-10-25 2001-09-04 日本ピラー工業株式会社 脈動低減装置付きポンプ
JP3874416B2 (ja) * 2003-05-02 2007-01-31 日本ピラー工業株式会社 往復動ポンプ
DE10343802B4 (de) * 2003-09-22 2007-12-06 Schwing Gmbh Kolben-Dickstoffpumpe mit kontinuierlichem Förderstrom
DE10348832A1 (de) * 2003-09-30 2006-05-18 Erbe Elektromedizin Gmbh Fördereinrichtung für sterile Medien
JP4324568B2 (ja) * 2005-01-26 2009-09-02 日本ピラー工業株式会社 ベローズポンプ
JP2009030442A (ja) 2007-07-24 2009-02-12 Ckd Corp 混合流体供給システム
SE534535C2 (sv) * 2008-12-29 2011-09-27 Alfa Laval Corp Ab Pumpanordning med två pumpenheter,användning och förfarande för styrning av en sådan
FR2967220B1 (fr) 2010-11-05 2013-01-04 Commissariat Energie Atomique Systeme de compression a gaz

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5224841A (en) * 1992-04-24 1993-07-06 Semitool, Inc. Pneumatic bellows pump with supported bellows tube
JPH11324926A (ja) * 1998-05-15 1999-11-26 Nippon Pillar Packing Co Ltd 隔膜式往復動ポンプ
JP2000002187A (ja) * 1998-06-15 2000-01-07 Dainippon Screen Mfg Co Ltd ポンプ制御機構およびそれを用いた基板処理装置ならびにポンプ制御方法
CN102325999A (zh) * 2009-02-24 2012-01-18 日本皮拉工业株式会社 波纹管泵
CN102057160A (zh) * 2009-06-10 2011-05-11 株式会社易威奇 双联往复运动泵
CN103261817A (zh) * 2011-03-15 2013-08-21 伊格尔工业股份有限公司 液体供给系统

Also Published As

Publication number Publication date
US10718324B2 (en) 2020-07-21
US20170350382A1 (en) 2017-12-07
EP3239523B1 (en) 2019-12-18
TW201623796A (zh) 2016-07-01
JP6362535B2 (ja) 2018-07-25
JP2016121636A (ja) 2016-07-07
EP3239523A4 (en) 2018-08-29
KR102249282B1 (ko) 2021-05-07
TWI657198B (zh) 2019-04-21
KR20170096625A (ko) 2017-08-24
CN107110147A (zh) 2017-08-29
WO2016103768A1 (ja) 2016-06-30
EP3239523A1 (en) 2017-11-01

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