CN107102273A - ATE power supply test passage expansion structures and its test application process - Google Patents

ATE power supply test passage expansion structures and its test application process Download PDF

Info

Publication number
CN107102273A
CN107102273A CN201710519250.XA CN201710519250A CN107102273A CN 107102273 A CN107102273 A CN 107102273A CN 201710519250 A CN201710519250 A CN 201710519250A CN 107102273 A CN107102273 A CN 107102273A
Authority
CN
China
Prior art keywords
branch road
over
current detection
current
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201710519250.XA
Other languages
Chinese (zh)
Other versions
CN107102273B (en
Inventor
曾志敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huahong Grace Semiconductor Manufacturing Corp
Original Assignee
Shanghai Huahong Grace Semiconductor Manufacturing Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Huahong Grace Semiconductor Manufacturing Corp filed Critical Shanghai Huahong Grace Semiconductor Manufacturing Corp
Priority to CN201710519250.XA priority Critical patent/CN107102273B/en
Publication of CN107102273A publication Critical patent/CN107102273A/en
Application granted granted Critical
Publication of CN107102273B publication Critical patent/CN107102273B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/40Testing power supplies
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02HEMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H3/00Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
    • H02H3/08Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

The invention discloses a kind of ATE power supply tests passage expansion structure; the current foldback circuit that power extension branch road includes is used for the size of current for detecting corresponding power extension branch road in test process, and the connection of power extension branch road and measured device is kept when the electric current of current expansion branch road is normal;The connection of deenergization extension branch road and measured device in current expansion branch road excessively stream, prevents the current expansion branch road of excessively stream from dragging down the output voltage of corresponding power supply test passage to influence to connect the test of other power extension branch roads of same power supply test passage.Current foldback circuit is used for the on off operating mode for setting each power extension branch road also during electrifying startup.The invention also discloses a kind of test application process of ATE power supply tests passage expansion structure.The present invention has excessively stream isolation features, can prevent multiple branch circuit from testing when sharing power supply test passage as caused by excessively stream to kill, moreover it is possible to save branch road selecting switch.

Description

ATE power supply test passage expansion structures and its test application process
Technical field
Field, more particularly to a kind of integrated circuit automatic testing machine are manufactured the present invention relates to semiconductor integrated circuit (ATE, Auto Test Equipment) power supply test passage expansion structure;The invention further relates to a kind of ATE power supply tests passage The test application process of expansion structure.
Background technology
As shown in figure 1, being the structure chart of existing ATE power supply tests passage expansion structure;ATE test power channel 102 (Power Supply, PS) quantity is limited under fixed configurations, and dotted line frame 101 represents the total survey configured in ATE in Fig. 1 Try power channel 102, include it is multiple, shown in Fig. 12 test power channels 102, in order to respectively the two test power supplys Passage 102, also represents corresponding test power channel 102 with PS1 and PS2 respectively in Fig. 1.
In order to improve measured device 104 (Device Under Test, DUT) test with survey number, it will usually beyond ATE Test power channel 102 is extended, structure shown in Fig. 1 is existing common expansion scheme:Mainly one test power supply The output end of passage 102 is not directly coupled measured device 104, but the output end of each test power channel 102 is same When connect multiple power extension branch roads, include a branch road selecting switch 103 in power extension branch road, power extension branch road Output end connects corresponding measured device 104.In Fig. 1, in order to distinguish the branch road selecting switch 103 in different branch, to each Road selecting switch 103 has also carried out numbering and represented, K11, K12 in such as Fig. 1 to K1n and K21, K22 to K2n;Each branch road Measured device 104 is also represented with DUT11, DUT12 to DUT1n and DUT21, DUT22 to DUT2n respectively.It can be seen by Fig. 1 Go out, each test power channel 102 is connected with n power extension branch road, and each power extension branch road provides electricity respectively Source to corresponding measured device 104 there is provided the power supply to measured device 104 respectively with P11, P12 to P1n and P21, P22 extremely P2n is represented.
Existing structure shown in Fig. 1 can easily extend the port number of test power channel 102, but be due to multiple quilts Survey device 104 directly share one test power channel 102 resource, when in test process if one of measured device 104 for some reason barrier cause the excessive situation of power pin electric current, when the electric current beyond test power channel 102 current drive capability, Will drag down test power channel 102 setting output voltage so that influence share the test power channel 102 other be tested The proper testing of device 104, causes the test of other measured devices 104 abnormal.As shown in Fig. 2 being structure shown in Fig. 1 at one There is DUT11 in state diagram during excessively stream, Fig. 2 and occurs in that failure so that its corresponding power extension branch road goes out in measured device 104 Existing high current, for more vivid expression, also with " applying harmful DUT " and represent DUT11, with " aggrieved PS1 pairs of DUT " expressions in Fig. 2 The other each DUT i.e. DUT12 to DUT1n answered, high current is represented in the corresponding power extension branch roads of DUT11 with arrow line, can To find out because the corresponding power extension branch roads of DUT11 occur in that high current so that PS1 output voltage declines, and PS1's is defeated Going out after voltage declines can be so that the corresponding power supplys of DUT12 to DUT1n i.e. P12 to P1n voltage declines, so that DUT12 can be influenceed To DUT1n proper testing, cause DUT12 to DUT1n test abnormal.As shown in Figure 3A, it is to be entered using the structure shown in Fig. 1 The multiple measured devices 104 of row share a test result figure during PS power supply;In Fig. 3 A, shown in the corresponding circle of mark 201 Measured device 104 in each region there is a measured device 104 and other each quilts that identical PS power supplys are shared during excessively stream occurs Survey device 104 and the abnormal situation of test occur;As shown in Figure 3 B, it is that 1 quilt is carried out to each measured device 104 on same wafer Survey test result figure when device 104 exclusively enjoys a PS power supply, it can be seen that no longer occur Fig. 3 A institute of mark 201 in Fig. 3 B Show the test abnormal case in region, namely exist to test in Fig. 3 A and kill (overkill) situation.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of ATE power supply tests passage expansion structure, with excessively stream every From function, it can prevent multiple branch circuit from testing when sharing power supply test passage as caused by excessively stream to kill;Therefore, the present invention also provides one Plant the test application process of ATE power supply test passage expansion structures.
In order to solve the above technical problems, the ATE power supply test passage expansion structures that the present invention is provided include:Multiple power supplys are surveyed Ping, each power supply test passage includes multiple power extension branch roads, the input of each power extension branch road is connected The output end of the corresponding power supply test passage, the output end of each power extension branch road connects a measured device.
Each power extension branch road includes current foldback circuit;The current foldback circuit is used to examine in test process The size of current of the corresponding power extension branch road is surveyed, the power supply is kept when the electric current of the current expansion branch road is normal Extend the conducting of branch road and the connection of the power extension branch road and the measured device;In the current expansion branch road excessively stream When the power extension branch road is disconnected and disconnect the connection of the power extension branch road and the measured device, prevent excessively stream The current expansion branch road output voltage of the corresponding power supply test passage is dragged down to influence connection same described The test of other power extension branch roads of power supply test passage.
What the current foldback circuit was used to setting each power extension branch road during electrifying startup leads on and off Open state.
Further improve is that the current foldback circuit includes:Over-current detection resistance, over-current detection comparator and excessively stream Protection switch;The over-current detection resistance and the overcurrent protective switch are connected in series, and the over-current detection resistance is in the electricity A voltage drop is formed between the input and output end of source extension branch road, the over-current detection comparator detects the excessively stream inspection The size of the voltage drop of measuring resistance simultaneously forms the letter that one and reference voltage compare according to the voltage drop of the over-current detection resistance Number, the output end of the over-current detection comparator exports a control signal formed according to comparative result to the overcurrent protection Switch, the overcurrent protective switch is turned on or off under the control of said control signal;When the power extension branch road excessively stream The voltage drop meeting over range of Shi Suoshu over-current detection resistance, the control signal disconnects the overcurrent protective switch, so that The power extension branch road disconnects and disconnected the connection of the power extension branch road and the measured device;When the power supply expands The voltage drop of the over-current detection resistance is in normal range (NR) when the electric current of exhibition branch road is normal, and the control signal protects the excessively stream Shield switch is held on, so as to keep conducting and the power extension branch road and the tested device of the power extension branch road The connection of part.
Further improve is that the normal phase input end of the over-current detection comparator connects the defeated of the power extension branch road Go out end, the inverting input connection reference voltage of the over-current detection comparator;The overcurrent protective switch is that low level is normally opened Type is switched.
When the voltage drop of the over-current detection resistance is in normal range (NR), the normal phase input end of the over-current detection comparator Voltage be more than the reference voltage, the control signal is 1, overcurrent protective switch conducting.
When the voltage drop of the over-current detection resistance is in over range, the normal phase input end of the over-current detection comparator Voltage is less than the reference voltage, and the control signal is 0, and the overcurrent protective switch disconnects.
Further improve is that the formula of the reference voltage is:Vref=Vcc- Δs Vcc, Vref are to be described with reference to electricity Pressure, Vcc is the output voltage of the power supply test passage, and Δ Vcc is tolerable error, the i.e. scope in Vcc to Vcc- Δs Vcc The interior measured device can carry out proper testing.
The formula of the minimum value of the over-current detection resistance is:Rmin=Δs Vcc/Itrig.
The formula of the maximum of the over-current detection resistance is:Rmax=Δs Vcc/Imax.
The resistance sizes of the over-current detection resistance all may be used between Rmin and Rmax.
Wherein, Rmin is the minimum value of the over-current detection resistance, and Rmax is the maximum of the over-current detection resistance, Itrig is excessively stream trigger value, and Imax is the maximum of current specification of each measured device under various test conditions, Itrig is more than Imax.
Further improve is that Itrig is 3 times~5 times of Imax.
Further improve is, in ATE initialization procedure, when the corresponding power extension branch road is in initialization During for that should disconnect, the inverting input of the over-current detection comparator connects the first initialization voltage, the first initialization electricity Pressure is more than or equal to the output voltage of the power supply test passage, and first initialization voltage makes the over-current detection comparator Output end output size is 0 control signal and disconnects the overcurrent protective switch, so that the power extension branch Road disconnects in initialization.
When the corresponding power extension branch road initialization when for should turn on when, the over-current detection comparator it is anti-phase Input connects the second initialization voltage, and second initialization voltage is less than 0V, makes over-current detection described in initialization procedure The output end output size of comparator is 1 control signal and turns on the overcurrent protective switch, so that the electricity Source extends branch road and turned in initialization.
After the completion of initialization, the corresponding over-current detection comparator of the power extension branch road turned on during initialization Inverting input is connected to the reference voltage, the corresponding over-current detection of the power extension branch road disconnected during initialization The voltage of the inverting input of comparator remains first initialization voltage.
In order to solve the above technical problems, the test application process for the ATE power supply test passage expansion structures that the present invention is provided Comprise the following steps:
Step 1: measured device is connected into the output end of each power extension branch road and failure measured device is set up Numbered list, the numbered list is initialized before the Section 1 test event of each measured device is carried out.
Step 2: into current test event, the initialization of the current foldback circuit is set according to the numbered list Parameter, the numbering correspondence when initiation parameter of the current foldback circuit makes to initialize after electricity in the numbered list is described Each power extension branch road corresponding to measured device is off-state, and makes the numbering correspondence in the non-numbered list Each power extension branch road corresponding to the measured device is conducting state.
Step 3: the upper electrical parameter of each power supply test passage is set, after electricity on each power supply test passage Output voltage setting voltage for needed for current test event.
Step 4: after the completion of initialization, setting corresponding to the numbering correspondence measured device in the non-numbered list Each power extension branch road the current foldback circuit test parameter.
Step 5: carrying out in the test of current test event, test process, the current foldback circuit detects corresponding institute The size of current of power extension branch road is stated, the power extension branch road is kept when the electric current of the current expansion branch road is normal Conducting and the connection of the power extension branch road and the measured device;Make the electricity in the current expansion branch road excessively stream Source extension branch road disconnects and disconnected the connection of the power extension branch road and the measured device, prevents the electric current of excessively stream Extension branch road drags down the output voltage of the corresponding power supply test passage to influence the same power supply test of connection to lead to The test of other power extension branch roads in road.
Step 6: current test event terminates, will occur the current expansion branch road pair of excessively stream in current test event The numbering for the measured device answered is added in the numbered list.
Step 7: repeat step two to six carries out next test event of each measured device, until each quilt All test events for surveying device are all completed.
Further improve is that the current foldback circuit includes:Over-current detection resistance, over-current detection comparator and excessively stream Protection switch;The over-current detection resistance and the overcurrent protective switch are connected in series, and the over-current detection resistance is in the electricity A voltage drop is formed between the input and output end of source extension branch road, the over-current detection comparator detects the excessively stream inspection The size of the voltage drop of measuring resistance simultaneously forms the letter that one and reference voltage compare according to the voltage drop of the over-current detection resistance Number, the output end of the over-current detection comparator exports a control signal formed according to comparative result to the overcurrent protection Switch, the overcurrent protective switch is turned on or off under the control of said control signal;When the power extension branch road excessively stream The voltage drop meeting over range of Shi Suoshu over-current detection resistance, the control signal disconnects the overcurrent protective switch, so that The power extension branch road disconnects and disconnected the connection of the power extension branch road and the measured device;When the power supply expands The voltage drop of the over-current detection resistance is in normal range (NR) when the electric current of exhibition branch road is normal, and the control signal protects the excessively stream Shield switch is held on, so as to keep conducting and the power extension branch road and the tested device of the power extension branch road The connection of part;The test parameter of current foldback circuit described in step 4 includes the reference voltage.
Further improve is that the normal phase input end of the over-current detection comparator connects the defeated of the power extension branch road Go out end, the inverting input connection reference voltage of the over-current detection comparator;The overcurrent protective switch is that low level is normally opened Type is switched.
When the voltage drop of the over-current detection resistance is in normal range (NR), the normal phase input end of the over-current detection comparator Voltage be more than the reference voltage, the control signal is 1, overcurrent protective switch conducting.
When the voltage drop of the over-current detection resistance is in over range, the normal phase input end of the over-current detection comparator Voltage is less than the reference voltage, and the control signal is 0, and the overcurrent protective switch disconnects.
Further improve is that the formula of the reference voltage is:Vref=Vcc- Δs Vcc, Vref are to be described with reference to electricity Pressure, Vcc is the output voltage of the power supply test passage, and Δ Vcc is tolerable error, the i.e. scope in Vcc to Vcc- Δs Vcc The interior measured device can carry out proper testing.
The formula of the minimum value of the over-current detection resistance is:Rmin=Δs Vcc/Itrig.
The formula of the maximum of the over-current detection resistance is:Rmax=Δs Vcc/Imax.
The resistance sizes of the over-current detection resistance all may be used between Rmin and Rmax.
Wherein, Rmin is the minimum value of the over-current detection resistance, and Rmax is the maximum of the over-current detection resistance, Itrig is excessively stream trigger value, and Imax is the maximum of current specification of each measured device under various test conditions, Itrig is more than Imax.
Further improve is that Itrig is 3 times~5 times of Imax.
Further improve is that the initiation parameter of current foldback circuit described in step 2 is to be connected to the over-current detection The voltage of the inverting input of comparator.
When the corresponding power extension branch road initialization when for disconnect when, the over-current detection comparator it is anti-phase defeated Enter the first initialization voltage of end connection, first initialization voltage is more than or equal to the output voltage of the power supply test passage, First initialization voltage make the output end output size of the over-current detection comparator for 0 the control signal and make institute Overcurrent protective switch disconnection is stated, so that the power extension branch road disconnects in initialization.
When the corresponding power extension branch road initialization when for conducting when, the over-current detection comparator it is anti-phase defeated Enter the second initialization voltage of end connection, second initialization voltage is less than 0V, makes the ratio of over-current detection described in initialization procedure The control signal for being 1 compared with the output end output size of device simultaneously turns on the overcurrent protective switch, so that the power supply Extension branch road is turned in initialization.
After the completion of initialization, the test parameter of the step 4 setting current foldback circuit is:The institute turned on during initialization The inverting input for stating the corresponding over-current detection comparator of power extension branch road is connected to the reference voltage, during initialization The voltage of the inverting input of the corresponding over-current detection comparator of the power extension branch road disconnected remains described the One initialization voltage.
The present invention is provided with current foldback circuit in each power extension branch road, when current foldback circuit can detect test pair The size of current for the power extension branch road answered, power extension branch road and tested device are kept when the electric current of current expansion branch road is normal The connection of part;The connection of deenergization extension branch road and measured device in current expansion branch road excessively stream, so as to prevent excessively stream Current expansion branch road the output voltage of corresponding power supply test passage is dragged down so as to influenceing to connect same power supply test passage Other power extension branch roads test, so the present invention can realize excessively stream isolate, can prevent multiple branch circuit share power supply test lead to Tested and killed as caused by excessively stream during road, so as to improve test accuracy and testing efficiency.
In addition, the present invention will when each power extension branch road only can be achieved with power-up initializing by current foldback circuit Each power extension branch road disconnected is needed all to disconnect, it is only necessary to carry out parameter setting to current foldback circuit and can be achieved with, such as:Pass through The voltage of the inverting input of over-current detection comparator in setting current foldback circuit, with regard to that can make to be located at failure measured device The corresponding power extension branch road of measured device in numbered list disconnects in initialization and is always maintained at disconnecting, and can make non- The corresponding power extension branch road of measured device in numbered list is turned in initialization, so can be achieved with after test starts Test to measured device, and cut off in measured device excessively stream the branch road of the excessively stream.From the foregoing, it will be observed that the present invention need not be set Extra branch road selecting switch sets the state of each power extension branch road during initialization, it is only necessary to set current foldback circuit to enter Row parameter setting can be achieved with, and can further reduce accessory, cost-effective.
Brief description of the drawings
The present invention is further detailed explanation with reference to the accompanying drawings and detailed description:
Fig. 1 is the structure chart of existing ATE power supply tests passage expansion structure;
Fig. 2 is the state diagram when excessively stream occurs in a measured device of structure shown in Fig. 1;
Fig. 3 A are that test result figure when multiple measured devices share a PS power supply is carried out using the structure shown in Fig. 1;
Fig. 3 B are that test knot when 1 measured device exclusively enjoys a PS power supply is carried out to each measured device on same wafer Fruit is schemed;
Fig. 4 is the structure chart of ATE power supply test passage expansion structures of the embodiment of the present invention;
Fig. 5 be each measured device in test process of structure shown in Fig. 4 electric current it is all normal when state diagram;
Fig. 6 is the state diagram when excessively stream of measured device occurs in test process in structure shown in Fig. 4.
Embodiment
As shown in figure 4, being the structure chart of the expansion structure of ATE power supply tests of embodiment of the present invention passage 1;The embodiment of the present invention The expansion structure of ATE power supply tests passage 1 includes:Multiple power supply test passages 1, as shown in dotted line frame 301 in Fig. 4, in dotted line frame Include multiple power supply test passages 1 in 301, because each power supply test passage 1 is all identical, therefore only shown in Fig. 4 One power supply test passage 1, meanwhile, also represent a corresponding power supply test passage 1 with PS1 in Fig. 4.
Each power supply test passage 1 includes multiple power extension branch roads, and a power supply test passage is shown in Fig. 4 1 has n power extension branch road.
The input of each power extension branch road connects the output end of the corresponding power supply test passage 1, each described The output end of power extension branch road connects a measured device 3.Represented in order to clearer, in Fig. 4, the corresponding each power supplys of PS1 The corresponding measured device 3 of extension branch road also represents with DUT11, DUT12 to DUT1n respectively, each power extension branch road it is defeated The power supply for going out end output is represented with PS11, PS12 to PS1n respectively.
Each power extension branch road includes current foldback circuit 2;The current foldback circuit 2 is used in test process The size of current of the corresponding power extension branch road is detected, the electricity is kept when the electric current of the current expansion branch road is normal The conducting of source extension branch road and the connection of the power extension branch road and the measured device 3;In the current expansion branch road The power extension branch road is disconnected and disconnect the connection of the power extension branch road and the measured device 3 during excessively stream, prevent Only the current expansion branch road of excessively stream drags down the output voltage of the corresponding power supply test passage 1 to influence connection same The test of other power extension branch roads of power supply test passage 1 described in one.
What the current foldback circuit 2 was used to setting each power extension branch road during electrifying startup leads on and off Open state.
In the embodiment of the present invention, the current foldback circuit 2 includes:Over-current detection resistance 4, the and of over-current detection comparator 6 Overcurrent protective switch 5.Represented in order to clearer, in Fig. 4, the corresponding over-current detection electricity of the corresponding each power extension branch roads of PS1 Resistance 4 also represents that overcurrent protective switch 5 is also represented with KK11, KK12 to KK1n respectively, over-current detection with R11, R12 to R1n respectively Comparator 6 is also represented with Comp11, Comp12 to Comp1n respectively.
The over-current detection resistance 4 and the overcurrent protective switch 5 are connected in series, and the over-current detection resistance 4 is described A voltage drop is formed between the input and output end of power extension branch road, the over-current detection comparator 6 detects the mistake Flow the size of the voltage drop of detection resistance 4 and one and reference voltage ratio are formed according to the voltage drop of the over-current detection resistance 4 Compared with signal, the output end of the over-current detection comparator 6 exports a control signal formed according to comparative result described in Overcurrent protective switch 5, the overcurrent protective switch 5 is turned on or off under the control of said control signal;When the power supply expands The voltage drop meeting over range of the over-current detection resistance 4 when opening up branch road excessively stream, the control signal makes the overcurrent protective switch 5 Disconnect, so that the power extension branch road disconnects and disconnected the connection of the power extension branch road and the measured device 3; When the electric current of the power extension branch road is normal, the voltage drop of the over-current detection resistance 4 is in normal range (NR), the control letter Number it is held on the overcurrent protective switch 5, so as to keep the conducting of the power extension branch road and the power extension The connection of branch road and the measured device 3.
The normal phase input end of the over-current detection comparator 6 is+output end for connecting the power extension branch road is held, it is described The inverting input of over-current detection comparator 6 is-hold connection reference voltage;The overcurrent protective switch 5 is low level open type Switch.Represented in order to clearer, in Fig. 4, the corresponding over-current detection comparator 6 of the corresponding each power extension branch roads of PS1 Inverting input connection reference voltage represented respectively with Vref11, Vref12 to Vref1n;In the embodiment of the present invention, each institute State the inverting input of over-current detection comparator 6 sets end to include subsequently initial for the parameter of the current foldback circuit 2 Be when changing parameter and test parameter, test parameter is exactly reference voltage, namely needing and test parameter is set by Vref11, The reference voltages such as Vref12 to Vref1n are added to the anti-of the corresponding over-current detection comparator 6 of corresponding each power extension branch road On phase input.
When the voltage drop of the over-current detection resistance 4 is in normal range (NR), the positive input of the over-current detection comparator 6 The voltage at end is more than the reference voltage, and the control signal is 1, and the overcurrent protective switch 5 is turned on.
When the voltage drop of the over-current detection resistance 4 is in over range, the normal phase input end of the over-current detection comparator 6 Voltage be less than the reference voltage, the control signal be 0, the overcurrent protective switch 5 disconnects.
More preferably it is selected as, the formula of the reference voltage is:Vref=Vcc- Δs Vcc, Vref are the reference voltage, Vcc is the output voltage of the power supply test passage 1, and Δ Vcc is tolerable error, i.e., in the range of Vcc to Vcc- Δs Vcc The measured device 3 can carry out proper testing, and Vcc is configured the need for the test event according to the measured device 3, example Such as, the corresponding Vcc of a test event is 5V, and Δ Vcc is 0.01V, then Vref is 4.99V.
The formula of the minimum value of the over-current detection resistance 4 is:Rmin=Δs Vcc/Itrig.
The formula of the maximum of the over-current detection resistance 4 is:Rmax=Δs Vcc/Imax.
The resistance sizes of the over-current detection resistance 4 all may be used between Rmin and Rmax.
Wherein, Rmin is the minimum value of the over-current detection resistance 4, and Rmax is the maximum of the over-current detection resistance 4, Itrig is excessively stream trigger value, and Imax is the maximum of current specification of each measured device 3 under various test conditions, Itrig is more than Imax.Itrig is also unsuitable excessive under conditions of more than Imax, and Itrig is the 3 of Imax in the embodiment of the present invention Times~5 times.
In ATE initialization procedure, when when the corresponding power extension branch road is in initialization to disconnect, the mistake The inverting input for flowing detection comparator 6 connects the first initialization voltage, and first initialization voltage is more than or equal to the electricity The output voltage of source TCH test channel 1, first initialization voltage makes the output end output size of the over-current detection comparator 6 The control signal for 0 simultaneously disconnects the overcurrent protective switch 5, so that the power extension branch road is disconnected in initialization Open.That is, the present invention is configured by the inverting input to the over-current detection comparator 6 and Jia the first initialization is electric Pressure, the corresponding branch road of measured device 3 that those can natively be proved to failure disconnects from the beginning, it is not necessary to use volume Outer branch road selecting switch.
When the corresponding power extension branch road initialization when for conducting when, the over-current detection comparator 6 it is anti-phase Input connects the second initialization voltage, and second initialization voltage is less than 0V, makes over-current detection described in initialization procedure The output end output size of comparator 6 is 1 control signal and turns on the overcurrent protective switch 5, so that described Power extension branch road is turned in initialization.
After the completion of initialization, the corresponding over-current detection comparator 6 of the power extension branch road turned on during initialization Inverting input be connected to the reference voltage, the reference voltage of different branch in Fig. 4 respectively with Vref11 extremely Vref1n is represented.The anti-phase input of the corresponding over-current detection comparator 6 of the power extension branch road disconnected during initialization The voltage at end remains first initialization voltage.
Circuit of the embodiment of the present invention can be good at realizing that excessively stream is isolated:
As shown in figure 5, be the state diagram when electric current of each measured device in test process of structure shown in Fig. 4 is all normal, Represented in order to clearer, in Fig. 5, the corresponding electric current of the corresponding each power extension branch roads of PS1 is also respectively with I11, I12 to I1n Represent, the output end voltage of each power extension branch road is represented with V11, V12 to V1n respectively;It can be seen that I11, I12 to I1n all There is no excessively stream, therefore voltage drop of each power extension branch road on the over-current detection resistance 5 is both less than Δ Vcc so that it is each described The voltage of the normal phase input end of over-current detection comparator 6 be V11, V12 to V1n both greater than reference voltages, make each excessively stream inspection The output end all output signals 1 for surveying comparator 6 are " 1 " in Fig. 5, and each overcurrent protective switch 5 is that KK11, KK12 are led to KK1n Logical, each measured device 3 realizes proper testing.
As shown in fig. 6, in being the state diagram when excessively stream of measured device occurs in test process in structure shown in Fig. 4, Fig. 6 There is excessively stream in display I11, and this can cause V11 to be less than reference voltage i.e. Vref11, so that Comp11 output end output letter " 0 " in number 0 i.e. Fig. 6, KK11 disconnects, and the power extension branch road corresponding to DUT11 disconnects, and other each power extension branch roads are still Normal work;Because the power extension branch road corresponding to the DUT11 of excessively stream disconnects, therefore drop will not be caused to PS1 output voltage Low influence, so as to also not interfere with the test of other each power extension branch roads.
Test application process of the embodiment of the present invention is using ATE power supply tests of the embodiment of the present invention passage extension shown in Fig. 4 Structure is tested, following steps:
Step 1: measured device 3 is connected into the output end of each power extension branch road and failure measured device 3 is set up Numbered list, initialize the numbered list before the Section 1 test event of each measured device 3 is carried out.
Step 2: into current test event, the initialization of the current foldback circuit 2 is set according to the numbered list Parameter, the numbering correspondence institute when initiation parameter of the current foldback circuit 2 makes to initialize after electricity in the numbered list Each power extension branch road stated corresponding to measured device 3 is off-state, and makes the numbering in the non-numbered list Each power extension branch road corresponding to the correspondence measured device 3 is conducting state.Being set by initiation parameter makes The corresponding branch road of the measured device 3 that failure must be had been proved to is not turned on from the beginning.
In present invention method, the initiation parameter of the current foldback circuit 2 is to be connected to the over-current detection The voltage of the inverting input of comparator 6.
When the corresponding power extension branch road initialization when for disconnect when, the over-current detection comparator 6 it is anti-phase Input connects the first initialization voltage, and first initialization voltage is more than or equal to the output electricity of the power supply test passage 1 Pressure, first initialization voltage make the output end output size of the over-current detection comparator 6 for 0 the control signal simultaneously Disconnect the overcurrent protective switch 5, so that the power extension branch road disconnects in initialization.
When the corresponding power extension branch road initialization when for conducting when, the over-current detection comparator 6 it is anti-phase Input connects the second initialization voltage, and second initialization voltage is less than 0V, makes over-current detection described in initialization procedure The output end output size of comparator 6 is 1 control signal and turns on the overcurrent protective switch 5, so that described Power extension branch road is turned in initialization.
Step 3: the upper electrical parameter of each power supply test passage 1 is set, after electricity on each power supply test passage 1 Output voltage setting for needed for current test event voltage, such as:When voltage needed for current test event is 5V, then by Vcc It is set to 5V.
Step 4: carrying out ATE upper electricity;After the completion of initialization, set the numbering correspondence in the non-numbered list described The test parameter of the current foldback circuit 2 of each power extension branch road corresponding to measured device 3.
In present invention method, the test parameter for setting the current foldback circuit 2 is:The institute turned on during initialization The inverting input for stating the corresponding over-current detection comparator 6 of power extension branch road is connected to the reference voltage;The present invention In embodiment, the reference voltage is set to Vref=Vcc- Δ Vcc, such as:Vcc is 5V, and when Δ Vcc is 0.01V, Vref is 4.99V。
The inverting input of the corresponding over-current detection comparator 6 of the power extension branch road disconnected during initialization Voltage remains first initialization voltage.
Step 5: carrying out in the test of current test event, test process, the current foldback circuit 2 detects corresponding The size of current of the power extension branch road, the power extension branch road is kept when the electric current of the current expansion branch road is normal Conducting and the power extension branch road and the measured device 3 connection;Make institute in the current expansion branch road excessively stream The connection that power extension branch road disconnects and disconnected the power extension branch road and the measured device 3 is stated, the institute of excessively stream is prevented Current expansion branch road is stated to drag down the output voltage of the corresponding power supply test passage 1 to influence the same power supply of connection The test of other power extension branch roads of TCH test channel 1.
As shown in figure 5, I11, I12 are respectively found out to all no excessively streams of I1n, therefore each power extension branch road is in the over-current detection Voltage drop on resistance 4 is both less than Δ Vcc so that the voltage of the normal phase input end of each over-current detection comparator 6 be V11, V12 to V1n is both greater than corresponding reference voltage i.e. Vref11, Vref12 to Vref1n, makes each over-current detection comparator 6 Output end all output signals 1 are " 1 " in Fig. 5, and each overcurrent protective switch 6 is that KK11, KK12 are turned on to KK1n, each tested device Part 3 realizes proper testing.
As shown in fig. 6, when excessively stream occurs in I11, V11 can be caused to be less than reference voltage i.e. Vref11, so that Comp11 output end output signal 0 is " 0 " in Fig. 6, and KK11 disconnects, and the power extension branch road corresponding to DUT11 disconnects, its Its each power extension branch road still normal work;Because the power extension branch road corresponding to the DUT11 of excessively stream disconnects, therefore will not be right PS1 output voltage causes the influence of reduction, so as to also not interfere with the test of other each power extension branch roads.
Step 6: current test event terminates, will occur the current expansion branch road pair of excessively stream in current test event The numbering for the measured device 3 answered is added in the numbered list.
Step 7: repeat step two to six carries out next test event of each measured device 3, until each quilt All test events for surveying device 3 are all completed.
The present invention is described in detail above by specific embodiment, but these not constitute the limit to the present invention System.Without departing from the principles of the present invention, those skilled in the art can also make many modification and improvement, and these also should It is considered as protection scope of the present invention.

Claims (12)

1. a kind of ATE power supply tests passage expansion structure, it is characterised in that including:Multiple power supply test passages, each power supply TCH test channel includes multiple power extension branch roads, and the input of each power extension branch road connects the corresponding power supply test The output end of passage, the output end of each power extension branch road connects a measured device;
Each power extension branch road includes current foldback circuit;
The current foldback circuit is used for the size of current for detecting the corresponding power extension branch road in test process, in institute State current expansion branch road electric current it is normal when keep conducting and the power extension branch road and the institute of the power extension branch road State the connection of measured device;The power extension branch road is set to disconnect and disconnect the electricity in the current expansion branch road excessively stream Source extends the connection of branch road and the measured device, prevents the current expansion branch road of excessively stream by the corresponding power supply test The output voltage of passage drags down to influence to connect the survey of other power extension branch roads of the same power supply test passage Examination;
The current foldback circuit is used to set the conducting of each power extension branch road during electrifying startup and disconnects shape State.
2. ATE power supply tests passage expansion structure as claimed in claim 1, it is characterised in that:The current foldback circuit bag Include:Over-current detection resistance, over-current detection comparator and overcurrent protective switch;The over-current detection resistance and the overcurrent protection are opened Pass is connected in series, and the over-current detection resistance forms a voltage between the input and output end of the power extension branch road Drop, the over-current detection comparator detects the size of the voltage drop of the over-current detection resistance and according to the over-current detection resistance Voltage drop form the signal that one and reference voltage compare, the output end of the over-current detection comparator export one according to than The control signal of relatively result formation is to the overcurrent protective switch, and the overcurrent protective switch is under the control of said control signal It is turned on or off;When the power extension branch road excessively stream, the voltage drop of the over-current detection resistance can over range, the control Signal disconnects the overcurrent protective switch, so that the power extension branch road disconnects and disconnected the power extension branch road With the connection of the measured device;When the electric current of the power extension branch road is normal, the voltage drop of the over-current detection resistance exists Normal range (NR), the control signal is held on the overcurrent protective switch, so as to keep leading for the power extension branch road Pass to and the power extension branch road and the measured device connection.
3. ATE power supply tests passage expansion structure as claimed in claim 2, it is characterised in that:The over-current detection comparator Normal phase input end connect the output end of the power extension branch road, the inverting input connection ginseng of the over-current detection comparator Examine voltage;The overcurrent protective switch switchs for low level open type;
When the voltage drop of the over-current detection resistance is in normal range (NR), the electricity of the normal phase input end of the over-current detection comparator Pressure is more than the reference voltage, and the control signal is 1, the overcurrent protective switch conducting;
When the voltage drop of the over-current detection resistance is in over range, the voltage of the normal phase input end of the over-current detection comparator Less than the reference voltage, the control signal is 0, and the overcurrent protective switch disconnects.
4. ATE power supply tests passage expansion structure as claimed in claim 3, it is characterised in that:The formula of the reference voltage For:Vref=Vcc- Δs Vcc, Vref are the reference voltage, and Vcc is the output voltage of the power supply test passage, and Δ Vcc is Tolerable error, i.e., the measured device can carry out proper testing in the range of Vcc to Vcc- Δs Vcc;
The formula of the minimum value of the over-current detection resistance is:Rmin=Δs Vcc/Itrig;
The formula of the maximum of the over-current detection resistance is:Rmax=Δs Vcc/Imax;
The resistance sizes of the over-current detection resistance all may be used between Rmin and Rmax;
Wherein, Rmin is the minimum value of the over-current detection resistance, and Rmax is the maximum of the over-current detection resistance, Itrig For excessively stream trigger value, Imax is the maximum of current specification of each measured device under various test conditions, and Itrig is more than Imax。
5. ATE power supply tests passage expansion structure as claimed in claim 4, it is characterised in that:Itrig is 3 times~the 5 of Imax Times.
6. ATE power supply tests passage expansion structure as claimed in claim 3, it is characterised in that:In ATE initialization procedure In, when when the corresponding power extension branch road is in initialization for that should disconnect, the anti-phase input of the over-current detection comparator The first initialization voltage of end connection, first initialization voltage is more than or equal to the output voltage of the power supply test passage, institute State the first initialization voltage make the output end output size of the over-current detection comparator for 0 the control signal and make described Overcurrent protective switch disconnects, so that the power extension branch road disconnects in initialization;
When the corresponding power extension branch road is in initialization for that should turn on, the anti-phase input of the over-current detection comparator The second initialization voltage of end connection, second initialization voltage is less than 0V, compares over-current detection described in initialization procedure The output end output size of device is 1 control signal and turns on the overcurrent protective switch, so that the power supply expands Exhibition branch road is turned in initialization;
After the completion of initialization, the corresponding over-current detection comparator of the power extension branch road turned on during initialization it is anti-phase Input is connected to the reference voltage, and the corresponding over-current detection of the power extension branch road disconnected during initialization compares The voltage of the inverting input of device remains first initialization voltage.
7. the test application process of ATE power supply tests passage expansion structure as claimed in claim 1, it is characterised in that including Following steps:
Step 1: measured device is connected into the output end of each power extension branch road and the numbering of failure measured device is set up List, the numbered list is initialized before the Section 1 test event of each measured device is carried out;
Step 2: into current test event, the initiation parameter of the current foldback circuit is set according to the numbered list, Numbering correspondence when the initiation parameter of the current foldback circuit makes to initialize after electricity in the numbered list is described tested Each power extension branch road corresponding to device is off-state, and makes the numbering correspondence in the non-numbered list described Each power extension branch road corresponding to measured device is conducting state;
Step 3: the upper electrical parameter of each power supply test passage is set, by the output after electricity on each power supply test passage Voltage is set to voltage needed for current test event;
Step 4: after the completion of initialization, setting each corresponding to the numbering correspondence measured device in the non-numbered list The test parameter of the current foldback circuit of the power extension branch road;
Step 5: carrying out in the test of current test event, test process, the current foldback circuit detects the corresponding electricity Source extends the size of current of branch road, and the conducting of the power extension branch road is kept when the electric current of the current expansion branch road is normal And the connection of the power extension branch road and the measured device;Expand the power supply in the current expansion branch road excessively stream Exhibition branch road disconnects and disconnected the connection of the power extension branch road and the measured device, prevents the current expansion of excessively stream Branch road drags down the output voltage of the corresponding power supply test passage to influence the same power supply test passage of connection The test of other power extension branch roads;
Step 6: current test event terminates, the current expansion branch road for occurring excessively stream in current test event is corresponding The numbering of measured device is added in the numbered list;
Step 7: repeat step two to six carries out next test event of each measured device, until each tested device All test events of part are all completed.
8. the test application process of ATE power supply tests passage expansion structure as claimed in claim 7, it is characterised in that:It is described Current foldback circuit includes:Over-current detection resistance, over-current detection comparator and overcurrent protective switch;The over-current detection resistance and The overcurrent protective switch is connected in series, the over-current detection resistance the power extension branch road input and output end it Between form a voltage drop, the over-current detection comparator detects the size of the voltage drop of the over-current detection resistance and according to institute The voltage drop for stating over-current detection resistance forms the signal that one and reference voltage compare, the output end of the over-current detection comparator The control signal that output one is formed according to comparative result is to the overcurrent protective switch, and the overcurrent protective switch is in the control It is turned on or off under the control of signal processed;When the power extension branch road excessively stream, the voltage drop of the over-current detection resistance can surpass Scope, the control signal disconnects the overcurrent protective switch, so that the power extension branch road disconnects and disconnected institute State the connection of power extension branch road and the measured device;The over-current detection when the electric current of the power extension branch road is normal The voltage drop of resistance is in normal range (NR), and the control signal is held on the overcurrent protective switch, so as to keep the electricity The conducting of source extension branch road and the connection of the power extension branch road and the measured device;Overcurrent protection described in step 4 The test parameter of circuit includes the reference voltage.
9. the test application process of ATE power supply tests passage expansion structure as claimed in claim 8, it is characterised in that:It is described The normal phase input end of over-current detection comparator connects the output end of the power extension branch road, the over-current detection comparator it is anti- Phase input connects reference voltage;The overcurrent protective switch switchs for low level open type;
When the voltage drop of the over-current detection resistance is in normal range (NR), the electricity of the normal phase input end of the over-current detection comparator Pressure is more than the reference voltage, and the control signal is 1, the overcurrent protective switch conducting;
When the voltage drop of the over-current detection resistance is in over range, the voltage of the normal phase input end of the over-current detection comparator Less than the reference voltage, the control signal is 0, and the overcurrent protective switch disconnects.
10. the test application process of ATE power supply tests passage expansion structure as claimed in claim 9, it is characterised in that:It is described The formula of reference voltage is:Vref=Vcc- Δs Vcc, Vref are the reference voltage, and Vcc is defeated for the power supply test passage Go out voltage, Δ Vcc is tolerable error, i.e., the measured device can be surveyed normally in the range of Vcc to Vcc- Δs Vcc Examination;
The formula of the minimum value of the over-current detection resistance is:Rmin=Δs Vcc/Itrig;
The formula of the maximum of the over-current detection resistance is:Rmax=Δs Vcc/Imax;
The resistance sizes of the over-current detection resistance all may be used between Rmin and Rmax;
Wherein, Rmin is the minimum value of the over-current detection resistance, and Rmax is the maximum of the over-current detection resistance, Itrig For excessively stream trigger value, Imax is the maximum of current specification of each measured device under various test conditions, and Itrig is more than Imax。
11. the test application process of ATE power supply tests passage expansion structure as claimed in claim 10, it is characterised in that: Itrig is 3 times~5 times of Imax.
12. the test application process of ATE power supply tests passage expansion structure as claimed in claim 9, it is characterised in that:Step The initiation parameter of current foldback circuit described in two is the voltage for the inverting input for being connected to the over-current detection comparator;
When the corresponding power extension branch road is in initialization for that should disconnect, the anti-phase input of the over-current detection comparator The first initialization voltage of end connection, first initialization voltage is more than or equal to the output voltage of the power supply test passage, institute State the first initialization voltage make the output end output size of the over-current detection comparator for 0 the control signal and make described Overcurrent protective switch disconnects, so that the power extension branch road disconnects in initialization;
When the corresponding power extension branch road is in initialization for that should turn on, the anti-phase input of the over-current detection comparator The second initialization voltage of end connection, second initialization voltage is less than 0V, compares over-current detection described in initialization procedure The output end output size of device is 1 control signal and turns on the overcurrent protective switch, so that the power supply expands Exhibition branch road is turned in initialization;
After the completion of initialization, the test parameter of the step 4 setting current foldback circuit is:The electricity turned on during initialization The inverting input of the corresponding over-current detection comparator of source extension branch road is connected to the reference voltage, is disconnected during initialization The voltage of inverting input of the corresponding over-current detection comparator of the power extension branch road remain at the beginning of described first Beginningization voltage.
CN201710519250.XA 2017-06-30 2017-06-30 ATE power supply test channel expansion structure and its test application method Active CN107102273B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710519250.XA CN107102273B (en) 2017-06-30 2017-06-30 ATE power supply test channel expansion structure and its test application method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710519250.XA CN107102273B (en) 2017-06-30 2017-06-30 ATE power supply test channel expansion structure and its test application method

Publications (2)

Publication Number Publication Date
CN107102273A true CN107102273A (en) 2017-08-29
CN107102273B CN107102273B (en) 2019-08-13

Family

ID=59664153

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710519250.XA Active CN107102273B (en) 2017-06-30 2017-06-30 ATE power supply test channel expansion structure and its test application method

Country Status (1)

Country Link
CN (1) CN107102273B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113533927A (en) * 2020-04-16 2021-10-22 第一检测有限公司 Chip test circuit and test method thereof
CN113791333A (en) * 2021-09-16 2021-12-14 长江存储科技有限责任公司 Chip testing device and chip testing system
CN116865203A (en) * 2023-06-01 2023-10-10 湖南恩智测控技术有限公司 Electronic load overcurrent protection method, electronic load and computer readable storage medium

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783714A (en) * 1987-03-23 1988-11-08 General Dynamics Electronics Division Switching logic driver with overcurrent protection
CN1059429A (en) * 1990-08-30 1992-03-11 西屋电气公司 Overcurrent trip circuit
TW460699B (en) * 1999-12-18 2001-10-21 Speedbus Technologies Inc Testing system of PCI board
JP2002124552A (en) * 2000-10-13 2002-04-26 Seiko Instruments Inc Probe card and semiconductor-inspecting equipment
CN1834678A (en) * 2005-03-17 2006-09-20 上海华虹集成电路有限责任公司 Multi-channel analyzer of non-contact applied chip
CN101149392A (en) * 2006-09-18 2008-03-26 中芯国际集成电路制造(上海)有限公司 Wafer test card over current protection method and related wafer test system
CN101162240A (en) * 2006-10-13 2008-04-16 上海华虹Nec电子有限公司 Detecting probe card testing system
CN101238536A (en) * 2005-08-02 2008-08-06 菲尼克斯电气公司 Safety switching unit for controlling a safety device into a safe state
CN101320071A (en) * 2007-06-04 2008-12-10 慧荣科技股份有限公司 Testing apparatus, system, and method for testing at least one device with a connection interface
CN104280572A (en) * 2013-07-12 2015-01-14 上海华虹宏力半导体制造有限公司 ATE test channel designing method
JP2015012706A (en) * 2013-06-28 2015-01-19 旭化成エレクトロニクス株式会社 Driving circuit for transistor, semiconductor breaker using the same, and method for controlling cut-off of the same
CN204216774U (en) * 2013-11-24 2015-03-18 半导体元件工业有限责任公司 Load detecting circuit
CN104641557A (en) * 2012-12-17 2015-05-20 富士电机株式会社 Semiconductor device and current detection circuit using said semiconductor device
CN106646198A (en) * 2016-12-28 2017-05-10 张家港市欧微自动化研发有限公司 IC electrical characteristic test method capable of test and real-time feedback

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4783714A (en) * 1987-03-23 1988-11-08 General Dynamics Electronics Division Switching logic driver with overcurrent protection
CN1059429A (en) * 1990-08-30 1992-03-11 西屋电气公司 Overcurrent trip circuit
TW460699B (en) * 1999-12-18 2001-10-21 Speedbus Technologies Inc Testing system of PCI board
JP2002124552A (en) * 2000-10-13 2002-04-26 Seiko Instruments Inc Probe card and semiconductor-inspecting equipment
CN1834678A (en) * 2005-03-17 2006-09-20 上海华虹集成电路有限责任公司 Multi-channel analyzer of non-contact applied chip
CN101238536A (en) * 2005-08-02 2008-08-06 菲尼克斯电气公司 Safety switching unit for controlling a safety device into a safe state
CN101149392A (en) * 2006-09-18 2008-03-26 中芯国际集成电路制造(上海)有限公司 Wafer test card over current protection method and related wafer test system
CN101162240A (en) * 2006-10-13 2008-04-16 上海华虹Nec电子有限公司 Detecting probe card testing system
CN101320071A (en) * 2007-06-04 2008-12-10 慧荣科技股份有限公司 Testing apparatus, system, and method for testing at least one device with a connection interface
CN104641557A (en) * 2012-12-17 2015-05-20 富士电机株式会社 Semiconductor device and current detection circuit using said semiconductor device
JP2015012706A (en) * 2013-06-28 2015-01-19 旭化成エレクトロニクス株式会社 Driving circuit for transistor, semiconductor breaker using the same, and method for controlling cut-off of the same
CN104280572A (en) * 2013-07-12 2015-01-14 上海华虹宏力半导体制造有限公司 ATE test channel designing method
CN204216774U (en) * 2013-11-24 2015-03-18 半导体元件工业有限责任公司 Load detecting circuit
CN106646198A (en) * 2016-12-28 2017-05-10 张家港市欧微自动化研发有限公司 IC electrical characteristic test method capable of test and real-time feedback

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113533927A (en) * 2020-04-16 2021-10-22 第一检测有限公司 Chip test circuit and test method thereof
CN113791333A (en) * 2021-09-16 2021-12-14 长江存储科技有限责任公司 Chip testing device and chip testing system
CN116865203A (en) * 2023-06-01 2023-10-10 湖南恩智测控技术有限公司 Electronic load overcurrent protection method, electronic load and computer readable storage medium
CN116865203B (en) * 2023-06-01 2024-05-07 湖南恩智测控技术有限公司 Electronic load overcurrent protection method, electronic load and computer readable storage medium

Also Published As

Publication number Publication date
CN107102273B (en) 2019-08-13

Similar Documents

Publication Publication Date Title
CN107078499B (en) Detect the ground connection isolated fault in Ethernet PoDL system
US9335370B2 (en) On-chip test for integrated AC coupling capacitors
CN107102273A (en) ATE power supply test passage expansion structures and its test application process
US20100085670A1 (en) Photovoltaic module monitoring system
US10481216B1 (en) Device for field verification of multi-device power over ethernet
CN106526456B (en) Integrated circuit on-line testing device and testing method
CN106501714A (en) A kind of digitizing switch detection circuit and method with fault diagnosis functions
CN104168011B (en) A kind of analog signal input circuit
US11353486B2 (en) Circuit arrangement having an active measuring voltage for determining an insulation resistance against ground potential in an ungrounded power supply system
US20190250194A1 (en) Voltage detecting circuit
CN103267940B (en) Multimode parallel test system
CN108181570A (en) Chip ground pin continuity testing method and device, readable storage medium storing program for executing
US9645192B2 (en) Ground fault circuit interrupter and method
CN101769962B (en) Electric energy meter detecting system and device for detecting contact resistance and method thereof
CN107144780A (en) ATE power supply test passage expansion structures and its test application process
CN104635142B (en) Improve the test device and test method of test accuracy
CN109873398A (en) Chip under-voltage protection circuit and chip circuit
CN105067996B (en) The detection method and detecting system of a kind of toggle switch
KR102436271B1 (en) Relay apparatus for having diagnosis function of digital signal input circuit
CN106200508A (en) Chain protection control circuit
KR20040024990A (en) Interface apparatus of protective relay and tester
CN207249419U (en) A kind of cascade circuit with precisely wrong discrimination function
CN113900003A (en) Chip pin disconnection detection device and detection method
CN106153986A (en) Test interface plate for bare chip and the test system for bare chip
US9665455B2 (en) Input module for programmable logic controller

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant