CN107101723B - High-resolution echelle spectrometer two dimension deviation spectrum analysis and bearing calibration - Google Patents
High-resolution echelle spectrometer two dimension deviation spectrum analysis and bearing calibration Download PDFInfo
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- 238000010183 spectrum analysis Methods 0.000 title claims description 9
- 238000004458 analytical method Methods 0.000 claims abstract description 21
- 238000012937 correction Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 15
- 230000004075 alteration Effects 0.000 claims abstract description 11
- 239000006185 dispersion Substances 0.000 claims description 39
- 238000001228 spectrum Methods 0.000 claims description 37
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 10
- 229910052753 mercury Inorganic materials 0.000 claims description 10
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 6
- 229910052805 deuterium Inorganic materials 0.000 claims description 6
- 238000004364 calculation method Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 abstract description 9
- 230000008901 benefit Effects 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000004451 qualitative analysis Methods 0.000 abstract description 2
- 210000000262 cochlear duct Anatomy 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/443—Emission spectrometry
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Abstract
The invention belongs to spectral technique field, the analysis and bearing calibration of a kind of high-resolution echelle spectrometer two dimension deviation spectrogram more particularly to.This method comprises the following steps：Step 1, obtains the two-dimentional spectrogram of echelle spectrometer；Step 2, interpretation is carried out to the two-dimentional spectrogram of acquisition；Step 3, the departure of inverting prism parameters and/or the departure of echelle grating parameter；Step 4, is corrected the two-dimentional deviation spectrogram of echelle spectrometer.The method of the present invention can realize the qualitative analysis of two-dimentional deviation spectrogram and quantitative calculating, the correction work of two-dimentional deviation spectrogram can be realized at the same time, after two-dimentional deviation spectrogram is analyzed and corrected, the advantages such as echelle spectrometer high spectral resolution, high sensitivity, low detection limits can be given full play to, at the same time the bearing calibration only need to do minor alteration to adjustment frock, have the advantages that it is easy to operate, be easily achieved.
Description
Technical field
The invention belongs to spectral technique field, a kind of high-resolution echelle spectrometer two dimension deviation more particularly to
The analysis and bearing calibration of spectrogram.
Background technology
In recent years, Atomic Emission Spectrometer AES just constantly to full spectrum direct-reading, intelligence, miniaturization, harmonic analysis cost direction
Development.Core of the beam splitting system as Atomic Emission Spectrometer AES, directly determines the performance level of overall instrument.High-resolution
Echelle spectrometer has the advantages that wide wavelength band, high resolution, high sensitivity, full spectrum instantaneous measurement, it has also become former
The emphasis of sub- emission spectrographic analysis technical research.
Echelle spectrometer is a kind of full spectrum light with low dispersing prism and high dispersion echelle grating crossed dispersion
Spectrometer, it uses prism longitudinal chromatic aberration, coordinates the horizontal dispersion of echelle grating high diffracting grade time, two-dimensional spectrum is formed in image planes
Figure, and two-dimentional spectrogram is gathered with planar array detector.Crucial light-splitting device in spectral module -- the incisure density of echelle grating
Generally 10g/mm~100g/mm, diffraction time are tens grades to levels up to a hundred, and blaze angle is 60 ° -80 °, and manufacture craft is quite multiple
It is miscellaneous.At present, echelle grating still depends on import, and purchase cost is of a relatively high.
The two-dimentional spectrogram information of echelle spectrometer depends primarily upon dispersion system, if optics in crossed dispersion system
There is deviation in the technical parameter of element, spectrometer rear end two dimension spectrogram information will be produced and seriously affected, and cause two-dimentional spectrogram to exist
There is deviation in position in detector image planes, causes the detectable signal signal-to-background ratio of test elements corresponding wavelength to reduce, can not be abundant
The characteristics of having given play to echelle spectrometer and advantage.The presence of the phenomenon, seriously limits echelle spectrometer height
The embodiment of the advantages such as spectral resolution, high sensitivity, low detection limits.Further influence using echelle spectrometer as light splitting mould
The detection limit of the emission spectrometer of block and sensitivity, influence the measuring accuracy of element spectrum analysis, at present still without for two dimension
The analysis and bearing calibration of deviation spectrogram.
The content of the invention
For above-mentioned technical problem, the object of the present invention is to provide a kind of high-resolution echelle spectrometer two dimension is inclined
The analysis and bearing calibration of poor spectrogram, solve high-resolution echelle spectrometer two dimension spectrogram there are during deviation, Wu Faman
The problem of full border use demand.
To achieve these goals, the present invention provides following technical solution：
The present invention provides a kind of analysis and bearing calibration of high-resolution echelle spectrometer two dimension deviation spectrogram, should
Method includes the following steps：
Step 1, obtains the two-dimentional spectrogram of echelle spectrometer；
Gather the spectrogram of linear light sorurce and continuous light source respectively using echelle spectrometer, obtain echelle grating light
The two-dimentional spectrogram of spectrometer discrete spectrum and continuous spectrum；
Step 2, interpretation is carried out to the two-dimentional spectrogram of acquisition；
The two-dimentional spectrogram of interpretation discrete spectrum and continuous spectrum respectively, determines two dimension spectrogram in prism dispersion direction and scala media
Terraced grating dispersion direction whether there is deviation；
Step 3, the departure of inverting prism parameters and/or the departure of echelle grating parameter；
Step 4, is corrected the two-dimentional deviation spectrogram of echelle spectrometer；
The departure of the prism parameters obtained according to Inversion Calculation and/or the departure of echelle grating parameter, determine rib
The actual working state of mirror and/or echelle grating, emulates and designs prism and/or the adjustment frock of echelle grating；According to
Frock is to echelle spectrometer again adjustment, so as to fulfill the correction of two-dimentional deviation spectrogram.
In the step 1, using mercury lamp as linear light sorurce, using deuterium lamp as continuous light source.
In the step 2, the two-dimentional spectrogram of interpretation discrete spectrum, carries out the relative position of discrete spectrum reference wavelength
Calculate analysis, you can determine that two dimension spectrogram whether there is deviation in prism dispersion direction；Detailed process is as follows：
3 wavelength of selection mercury lamp calculate relative spacing of the reference wavelength in longitudinal chromatic aberration as wavelength is referred to；If with
Reference wavelength is compared in the theoretical relative spacing of longitudinal chromatic aberration, and difference exceeds ± 3pixel, then it is believed that in prism dispersion direction
There are deviation, it is necessary to be corrected to deviation；Otherwise it is assumed that deviation is not present in prism dispersion direction.
In the step 2, the two-dimentional spectrogram of interpretation continuous spectrum, if the continuous spectrogram of whole two dimension is in detector image planes
On transverse center be imaged on substantially in the center setting range of detector, center setting range is arranged to ± 50pixel, then may be used
Think in echelle grating dispersion direction two dimension spectrogram zero deflection；Beyond center setting range, then it is assumed that two-dimentional spectrogram is in scala media
Terraced grating dispersion direction is there are deviation, it is necessary to be corrected to deviation.
In the step 3, using the spectrogram departure of the prism dispersion direction gone out by discrete spectrum analysis, according to prism
Refraction principle, with reference to the structural parameters of echelle spectrometer, the departure of inverting prism parameters.
In the step 3, the spectrogram departure of the echelle grating dispersion direction gone out by continuous spectrum analysis, root are utilized
According to echelle grating diffraction principle, with reference to the structural parameters of echelle spectrometer, the deviation of inverting echelle grating parameter
Amount.
Compared with prior art, the beneficial effects of the present invention are：
The method of the present invention can realize the qualitative analysis of two-dimentional deviation spectrogram and quantitative calculating, while can realize two dimension
The correction work of deviation spectrogram, after two-dimentional deviation spectrogram is analyzed and corrected, can give full play to echelle grating spectrum
The advantages such as instrument high spectral resolution, high sensitivity, low detection limits, while the bearing calibration only needs to do small change to adjustment frock
Become, have the advantages that it is easy to operate, be easily achieved.
Brief description of the drawings
Fig. 1 a are the structure diagram of echelle spectrometer；
Fig. 1 b are the principle schematic of echelle spectrometer；
Fig. 2 is the flow of analysis and the bearing calibration of high-resolution echelle spectrometer two dimension deviation spectrogram of the present invention
Figure；
Fig. 3 is echelle spectrometer discrete spectrum two dimension spectrogram before being corrected in the embodiment of the present invention；
Fig. 4 is echelle spectrometer continuous spectrum two dimension spectrogram before being corrected in the embodiment of the present invention；
Fig. 5 is echelle spectrometer discrete spectrum two dimension spectrogram after being corrected in the embodiment of the present invention；
Fig. 6 is echelle spectrometer continuous spectrum two dimension spectrogram after being corrected in the embodiment of the present invention.
Embodiment
The present invention is further described with reference to embodiment.
Fig. 1 a and Fig. 1 b are respectively the structure diagram and principle schematic of echelle spectrometer.As shown in Figure 1a, in
Echelle spectrograph mainly includes three parts：Light source, spectral module and detection system, wherein spectral module are key components.
As shown in Figure 1 b, the light beam that light source is sent enters spectral module, the collimated mirror of light beam collimates it through preposition light path by slit
Afterwards, into crossed dispersion system (prism and echelle grating crossed dispersion system), finally focused on by focus lamp, detector receives
Photosignal.
Variance analysis is carried out to the chromatic dispersion principle of the two-dimentional spectrogram of echelle spectrometer, according to echelle grating spectrum
The crossed dispersion principle of instrument, the longitudinal chromatic aberration of two-dimentional spectrogram depend on prism, and horizontal dispersion depends on echelle grating.
As shown in Fig. 2, analysis and the school of high-resolution echelle spectrometer two dimension deviation spectrogram provided by the invention
Correction method, includes the following steps：
Step 1, obtains the two-dimentional spectrogram of echelle spectrometer.
Be utilized respectively the linear light sorurce of echelle spectrometer and continuous light source to obtain echelle spectrometer discrete
The two-dimentional spectrogram of spectrum and continuous spectrum.
Using mercury lamp as linear light sorurce, using deuterium lamp as continuous light source.
Step 2, interpretation is carried out to the two-dimentional spectrogram of acquisition.
The two-dimentional spectrogram of interpretation discrete spectrum, calculating analysis is carried out to the relative position of discrete spectrum reference wavelength, you can
Determine that two dimension spectrogram whether there is deviation in prism dispersion direction.3 wavelength of selection mercury lamp calculate reference as wavelength is referred to
Relative spacing of the wavelength in longitudinal chromatic aberration.If compared with theoretical relative spacing of the reference wavelength in longitudinal chromatic aberration, difference exceeds
± 3pixel, then it is believed that in prism dispersion direction there are deviation, it is necessary to be corrected to deviation；Otherwise it is assumed that in prismatic colours
Dissipate direction and deviation is not present.
The two-dimentional spectrogram of interpretation continuous spectrum, if continuous transverse center base of the spectrogram in detector image planes of whole two dimension
Originally it is imaged in the center setting range of detector and (is arranged to ± 50pixel), then it is believed that in echelle grating dispersion direction
Two-dimentional spectrogram zero deflection；Beyond center setting range, then it is assumed that two-dimentional spectrogram, there are deviation, is needed in echelle grating dispersion direction
Deviation is corrected.
Step 3, the departure of inverting prism parameters and/or the departure of echelle grating parameter.
It is theoretical with reference to crossed dispersion according to the sentence read result of step 2, the departure of inverting prism parameters and/or middle ladder
The departure of grating parameter.
Using the spectrogram departure of the prism dispersion direction gone out by discrete spectrum analysis, according to refraction by prism principle, with reference to
The structural parameters of echelle spectrometer, the departure of inverting prism parameters.
Using the spectrogram departure of the echelle grating dispersion direction gone out by continuous spectrum analysis, spread out according to echelle grating
Principle is penetrated, with reference to the structural parameters of echelle spectrometer, the departure of inverting echelle grating parameter.
Step 4, is corrected the two-dimentional deviation spectrogram of echelle spectrometer.
The departure of the prism parameters obtained according to Inversion Calculation and/or the departure of echelle grating parameter, determine rib
The actual working state of mirror and/or echelle grating, emulates and designs prism and/or the adjustment frock of echelle grating；According to
Frock is to echelle spectrometer again adjustment, so as to fulfill the correction of two-dimentional deviation spectrogram.
Verification
After being corrected to two-dimentional deviation spectrogram, echelle spectrometer discrete spectrum and continuous spectrum are resurveyed
Two-dimentional spectrogram, and the two-dimentional deviation spectrogram contrast before correction, verification analysis are feasible effectively with bearing calibration.
Embodiment
Below exemplified by a certain echelle spectrometer two dimension deviation spectrogram is analyzed and corrected, to the present invention's
The analysis of the two-dimentional deviation spectrogram of high-resolution echelle spectrometer is described in further detail with bearing calibration.But should
Embodiment is it is not intended that limiting the scope of the invention.
The systematic parameter of echelle spectrometer is as shown in table 1.
Step 1, using mercury lamp as linear light sorurce, the two dimension of the discrete spectrum of acquisition echelle spectrometer mercury lamp
Spectrogram, as shown in Figure 3；Using deuterium lamp as continuous light source, the two dimension of the continuous spectrum of acquisition echelle spectrometer deuterium lamp
Spectrogram, as shown in Figure 4.
The two-dimentional spectrogram of interpretation discrete spectrum, select mercury lamp three reference wavelengths 313.1548nm, 404.656nm and
579.066nm but it is not limited to above three wavelength.Phases of the 313.1548nm and 404.656nm and 579.066nm in longitudinal chromatic aberration
It is respectively 79pixel and 136pixel to interval, is differed with the theoretical relative spacing (78pixel and 135pixel) of longitudinal chromatic aberration
1pixel, difference is without departing from ± 3pixel, then it is assumed that in prism dispersion direction zero deflection.
The two-dimentional spectrogram of interpretation continuous spectrum, two-dimentional spectrogram is integral into as on the right side of detector photosurface, having exceeded horizontal stroke
To center (+50pixel), there is deviation in echelle grating dispersion direction in two-dimentional spectrogram, causes the noise on the left of spectrogram
Than relatively low, it can not meet the requirement of echelle spectrometer low detection limits.
Step 3, according to two-dimentional spectrogram echelle grating dispersion direction departure, with reference to the dispersion of echelle grating
Principle, inverting show that the departure of echelle grating parameter is 0.3 °.
Step 4, the departure of the echelle grating parameter obtained according to Inversion Calculation, determines the reality of echelle grating
Working status, emulates and designs the adjustment frock of echelle grating, according to frock to echelle grating again adjustment, realizes two dimension
The correction of deviation spectrogram.
Gather two-dimentional spectrogram again to the echelle spectrometer after correction, the two-dimentional spectrogram of mercury lamp discrete spectrum is as schemed
Shown in 5, the two-dimentional spectrogram of deuterium lamp continuous spectrum is as shown in Figure 6.Fig. 4 and Fig. 6 are compared, it can be seen that whole two after correction
Vertical central axis almost symmetry of the position on detector image planes of spectrogram imaging on the detector is tieed up, disclosure satisfy that test needs
Ask, illustrate that calibration result is significantly effective.
The structural parameters of 1 echelle spectrometer of table
Claims (6)
1. a kind of analysis and bearing calibration of high-resolution echelle spectrometer two dimension deviation spectrogram, it is characterised in that：Should
Method includes the following steps：
Step 1, obtains the two-dimentional spectrogram of echelle spectrometer；
Gather the spectrogram of linear light sorurce and continuous light source respectively using echelle spectrometer, obtain echelle spectrometer
The two-dimentional spectrogram of discrete spectrum and continuous spectrum；
Step 2, interpretation is carried out to the two-dimentional spectrogram of acquisition；
The two-dimentional spectrogram of interpretation discrete spectrum and continuous spectrum respectively, determines two dimension spectrogram in prism dispersion direction and middle ladder light
Grid dispersion direction whether there is deviation；
Step 3, the departure of inverting prism parameters and/or the departure of echelle grating parameter；
Step 4, is corrected the two-dimentional deviation spectrogram of echelle spectrometer；
The departure of the prism parameters obtained according to Inversion Calculation and/or the departure of echelle grating parameter, determine prism and/
Or the actual working state of echelle grating, emulate and design prism and/or the adjustment frock of echelle grating；According to frock pair
Echelle spectrometer adjustment again, so as to fulfill the correction of two-dimentional deviation spectrogram.
2. the analysis of high-resolution echelle spectrometer two dimension deviation spectrogram according to claim 1 and correction side
Method, it is characterised in that：In the step 1, using mercury lamp as linear light sorurce, using deuterium lamp as continuous light source.
3. the analysis of high-resolution echelle spectrometer two dimension deviation spectrogram according to claim 1 and correction side
Method, it is characterised in that：In the step 2, the two-dimentional spectrogram of interpretation discrete spectrum, to the opposite position of discrete spectrum reference wavelength
Put and carry out calculating analysis, you can determine that two dimension spectrogram whether there is deviation in prism dispersion direction；Detailed process is as follows：
3 wavelength of selection mercury lamp calculate relative spacing of the reference wavelength in longitudinal chromatic aberration as wavelength is referred to；If with reference
Wavelength is compared in the theoretical relative spacing of longitudinal chromatic aberration, and difference exceeds ± 3pixel, then it is believed that existing in prism dispersion direction
Deviation is, it is necessary to be corrected deviation；Otherwise it is assumed that deviation is not present in prism dispersion direction.
4. the analysis of high-resolution echelle spectrometer two dimension deviation spectrogram according to claim 1 and correction side
Method, it is characterised in that：In the step 2, the two-dimentional spectrogram of interpretation continuous spectrum, if the continuous spectrogram of whole two dimension is detecting
Transverse center in device image planes is imaged in the center setting range of detector, and center setting range is arranged to ± 50pixel, then
It is believed that in echelle grating dispersion direction two dimension spectrogram zero deflection；Beyond center setting range, then it is assumed that two-dimentional spectrogram is in
Echelon dispersion direction is there are deviation, it is necessary to be corrected to deviation.
5. the analysis of high-resolution echelle spectrometer two dimension deviation spectrogram according to claim 1 and correction side
Method, it is characterised in that：In the step 3, the spectrogram departure of the prism dispersion direction gone out by discrete spectrum analysis, root are utilized
According to refraction by prism principle, with reference to the structural parameters of echelle spectrometer, the departure of inverting prism parameters.
6. the analysis of high-resolution echelle spectrometer two dimension deviation spectrogram according to claim 1 and correction side
Method, it is characterised in that：In the step 3, the spectrogram deviation of the echelle grating dispersion direction gone out by continuous spectrum analysis is utilized
Amount, according to echelle grating diffraction principle, with reference to the structural parameters of echelle spectrometer, inverting echelle grating parameter
Departure.
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| CN109269771B (en) * | 2018-09-03 | 2021-02-12 | 钢研纳克检测技术股份有限公司 | Light path structure of echelle grating efficiency tester with adjustable offset angle and testing method |
| CN109541773A (en) * | 2018-12-27 | 2019-03-29 | 天津国阳科技发展有限公司 | Adjust the grating line method parallel with linear light source |
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| US4820048A (en) * | 1987-11-19 | 1989-04-11 | The Perkin-Elmer Corporation | Detector for a spectrometer |
| CN1126832A (en) * | 1994-06-09 | 1996-07-17 | 云南大学 | Method for expanding spectrum width of multichannel spectrometer with multi-layer grating polychromator |
| US5565983A (en) * | 1995-05-26 | 1996-10-15 | The Perkin-Elmer Corporation | Optical spectrometer for detecting spectra in separate ranges |
| DE10205142B4 (en) * | 2002-02-07 | 2004-01-15 | Gesellschaft zur Förderung angewandter Optik, Optoelektronik, Quantenelektronik und Spektroskopie e.V. | Arrangement and method for wavelength calibration in an Echelle spectrometer |
| CN102155990B (en) * | 2011-03-28 | 2012-09-19 | 中国科学院长春光学精密机械与物理研究所 | Debugging method of echelle grating spectrograph |
| CN102226716A (en) * | 2011-03-28 | 2011-10-26 | 中国科学院长春光学精密机械与物理研究所 | Light path structure of echelle grating spectrometer |
| CN102353450A (en) * | 2011-08-31 | 2012-02-15 | 深圳市世纪天源环保技术有限公司 | Spectral analysis method based on photon counting full spectrum direct reading |
| CN102507517B (en) * | 2011-10-14 | 2013-10-30 | 深圳市世纪天源环保技术有限公司 | Photon counting full-spectrum direct reading fluorescence spectrometer |
| CN102538969B (en) * | 2012-01-17 | 2014-04-23 | 北京华夏科创仪器技术有限公司 | High resolution spectrometer and optical calibrating method thereof |
| CN102809428B (en) * | 2012-07-25 | 2014-07-09 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting small echelle grating spectrometer |
| CN102778293A (en) * | 2012-07-25 | 2012-11-14 | 中国科学院长春光学精密机械与物理研究所 | Optical path structure of small echelle grating spectrometer |
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