CN107101554A - A kind of measurement apparatus of polycrystalline silicon rod growth diameter - Google Patents
A kind of measurement apparatus of polycrystalline silicon rod growth diameter Download PDFInfo
- Publication number
- CN107101554A CN107101554A CN201710378383.XA CN201710378383A CN107101554A CN 107101554 A CN107101554 A CN 107101554A CN 201710378383 A CN201710378383 A CN 201710378383A CN 107101554 A CN107101554 A CN 107101554A
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- CN
- China
- Prior art keywords
- heater
- detection window
- polycrystalline silicon
- measurement apparatus
- silicon rod
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/08—Measuring arrangements characterised by the use of mechanical techniques for measuring diameters
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of measurement apparatus of polycrystalline silicon rod growth diameter, including body of heater, the bottom of the body of heater is connected with supporting leg, the bottom of furnace body is provided with hydraulic cylinder, the output end of the hydraulic cylinder is connected with piston rod, one end of the piston rod is extend into body of heater, the end of the piston rod is connected with hoistable platform, the top of the body of heater is provided with detection window, the detection window is horizontally disposed with, micrometer is rotatably connected at the top of the detection window, fixed support is fixedly connected with the side wall of the body of heater, swinging mounting is rotatably connected on the fixed support, one end of the swinging mounting is connected with light microscope, the top of the light microscope is provided with observation panel, the bottom of the light microscope is provided with camera lens, RF transmitter is additionally provided with the camera lens, the inner homogeneous of the body of heater is covered with insulation construction layer, the furnace interior is also equipped with LED, it is adapted to be widely popularized.
Description
Technical field
The present invention relates to field of polysilicon technology, specially a kind of measurement apparatus of polycrystalline silicon rod growth diameter.
Background technology
Polysilicon, is a kind of form of elemental silicon.The elemental silicon of melting under the conditions of supercooling when solidifying, and silicon atom is with Buddha's warrior attendant
Stone lattice morphologic arrangement is into many nucleus, and such as these nucleus grow up to the different crystal grain of high preferred orientation, then these crystal grain combine,
Just crystallize into polysilicon.On Solar use, monocrystalline silicon and polysilicon also play huge effect.Although coming from present
Say, to make solar power generation that there is larger market, received by vast consumer, the photoelectricity that must just improve solar cell turns
Efficiency is changed, production cost is reduced.Value：It can be seen that its development trend is from the evolution of current international solar cell
Monocrystalline silicon, polysilicon, banding silicon, thin-film material (including microcrystalline silicon film, compound base film and dye film).
In the prior art, it is necessary to pre-establish out fed growth curve and current/voltage according to the growth rhythm of polysilicon
Curve, then reproduction polysilicon.In the production process of polysilicon, operating personnel need to be by the form observation on reduction furnace simultaneously
Monitor the growing state of polysilicon, for example, monitor the growth diameter of raw material silicon rod, and according to the actual growing state of polysilicon come
Optimize actual fed growth curve and current/voltage curve.However, present case is, to the growth diameter of raw material silicon rod
The observation most dependent on operating personnel of monitoring and experience, i.e. operating personnel observe by the naked eye raw material silicon rod, and by it
Empirical estimating goes out the growth diameter of raw material silicon rod.Requirement of this estimation mode to the experience of operating personnel is higher, estimation knot
Fruit also varies with each individual, and error is larger.
The content of the invention
It is an object of the invention to provide a kind of measurement apparatus of polycrystalline silicon rod growth diameter, to solve above-mentioned background technology
The problem of middle proposition.
To achieve the above object, the present invention provides following technical scheme：A kind of measurement apparatus of polycrystalline silicon rod growth diameter,
Including body of heater, the bottom of the body of heater is connected with supporting leg, and the bottom of furnace body is provided with hydraulic cylinder, the output end of the hydraulic cylinder
Piston rod is connected with, one end of the piston rod is extend into body of heater, the end of the piston rod is connected with hoistable platform, described
The top of body of heater is horizontally disposed with provided with detection window, the detection window, and micrometer is rotatably connected at the top of the detection window, described
It is fixedly connected with the side wall of body of heater on fixed support, the fixed support and is rotatably connected to swinging mounting, the swinging mounting
One end be connected with light microscope, the top of the light microscope is provided with observation panel, and the bottom of the light microscope is set
Have and RF transmitter is additionally provided with camera lens, the camera lens, the inner homogeneous of the body of heater is covered with insulation construction layer, the stove
Internal portion is also equipped with LED.
It is preferred that, the bottom of the supporting leg is provided with lower margin, is threadedly coupled between the supporting leg and lower margin.
It is preferred that, the swinging mounting includes the first rotating turret and the second rotating turret, first rotating turret and second turn
Connection is rotated between moving frame.
It is preferred that, the front of the body of heater is additionally provided with observation window and thermometer.
It is preferred that, the section of the detection window is circle, and the junction of the detection window and body of heater is additionally provided with sealing ring.
Compared with prior art, the beneficial effects of the invention are as follows：Structure of the present invention is novel, easy to operate, by body of heater
Top set detection window, and detection window at the top of be rotatably connected to micrometer, operating personnel make work by controlling hydraulic cylinder
Stopper rod promotes hoistable platform to move up, and polysilicon is placed on hoistable platform, and now polysilicon is close to detection window, operating personnel
By swinging mounting by the alignment lenses polysilicon of light microscope, now, micrometer is rotated, micrometer is measured polysilicon
Diameter, the infrared light subsidiary launched using RF transmitter is positioned, and reduces error, by setting LED, it is ensured that surveyed
The light of amount, sets up observation window and thermometer, improves the feature of device, with very high practicality, greatly improves this
A kind of use feature of the measurement apparatus of polycrystalline silicon rod growth diameter, it is ensured that its using effect and utilization benefit, is adapted to extensive
Promote.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the measurement apparatus of polycrystalline silicon rod growth diameter of the invention；
Fig. 2 is a kind of internal structure schematic diagram of the measurement apparatus of polycrystalline silicon rod growth diameter of the invention；
Fig. 3 is a kind of micrometer structural representation of the measurement apparatus of polycrystalline silicon rod growth diameter of the invention；
Fig. 4 is a kind of swinging mounting part-structure schematic diagram of the measurement apparatus of polycrystalline silicon rod growth diameter of the invention.
In figure：1 body of heater, 2 supporting legs, 3 hydraulic cylinders, 4 piston rods, 5 hoistable platforms, 6 detection windows, 7 sealing rings, 8 micrometers, 9
Fixed support, 10 swinging mountings, 11 light microscopes, 12 observation panels, 13 camera lenses, 14 RF transmitters, 15 insulation constructions layer,
16LED lamps, 17 first rotating turrets, 18 second rotating turrets, 19 observation windows, 20 thermometers.
Embodiment
With reference to Figure of description and embodiment, the specific embodiment of the present invention is described in further detail：
Fig. 1-4 are referred to, the present invention provides a kind of technical scheme：A kind of measurement apparatus of polycrystalline silicon rod growth diameter, bag
Include body of heater 1, the bottom of the body of heater 1 is connected with supporting leg 2, the bottom of body of heater 1 is provided with hydraulic cylinder 3, the hydraulic cylinder 3 it is defeated
Go out end and be connected with piston rod 4, one end of the piston rod 4 is extend into body of heater 1, and the end of the piston rod 4 is connected with lifting
Platform 5, the top of the body of heater 1 is provided with detection window 6, and the detection window 6 is horizontally disposed with, and the top of the detection window 6, which is rotated, to be connected
It is connected on micrometer 8, the side wall of the body of heater 1 and is fixedly connected with fixed support 9, is rotatably connected on the fixed support 9
Dynamic support 10, one end of the swinging mounting 10 is connected with light microscope 11, and the top of the light microscope 11 is provided with sight
Mouth 12 is examined, the bottom of the light microscope 11, which is provided with camera lens 13, the camera lens 13, is additionally provided with RF transmitter 14, described
The inner homogeneous of body of heater 1 is also equipped with LED 16, the bottom of the supporting leg 2 inside the body of heater 1 covered with insulation construction layer 15
Portion is provided with lower margin, is threadedly coupled between the supporting leg 2 and lower margin, and the swinging mounting 10 includes the first rotating turret 17 and second turn
Connection is rotated between moving frame 18, the rotating turret 18 of the first rotating turret 17 and second, the front of the body of heater 1 is additionally provided with observation window
19 and thermometer 20, the section of the detection window 6 is circle, and the junction of the detection window 6 and body of heater 1 is additionally provided with sealing ring 7.
Operation principle：In use, being connected by setting detection window 6 at the top of body of heater 1, and being rotated at the top of detection window 6
Micrometer 8 is connected to, operating personnel make piston rod 4 promote hoistable platform 5 to move up by controlling hydraulic cylinder 3, polysilicon placement
On hoistable platform 5, now polysilicon is close to detection window 6, and operating personnel are by swinging mounting 10 by the mirror of light microscope 11
First 13 alignment polysilicon, now, rotates micrometer 8, micrometer 8 is measured the diameter of polysilicon, utilize RF transmitter 14
The infrared light subsidiary positioning launched, reduces error, by setting LED 16, it is ensured that the light of measurement, sets up observation window
19 and thermometer 20, the feature of device is improved, with very high practicality.
The above described is only a preferred embodiment of the present invention, not making any limit to the technical scope of the present invention
System, therefore any subtle modifications, equivalent variations and modifications that every technical spirit according to the present invention is made to above example,
In the range of still falling within technical scheme.
Claims (5)
1. a kind of measurement apparatus of polycrystalline silicon rod growth diameter, including body of heater (1), it is characterised in that：The bottom of the body of heater (1)
Supporting leg (2) is connected with, body of heater (1) bottom is provided with hydraulic cylinder (3), and the output end of the hydraulic cylinder (3) is connected with piston
Bar (4), one end of the piston rod (4) is extend into body of heater (1), and the end of the piston rod (4) is connected with hoistable platform
(5), the top of the body of heater (1) is provided with detection window (6), and the detection window (6) is horizontally disposed with, the top of the detection window (6)
It is rotatably connected on micrometer (8), the side wall of the body of heater (1) and is fixedly connected with fixed support (9), the fixed support (9)
On be rotatably connected to swinging mounting (10), one end of the swinging mounting (10) is connected with light microscope (11), the optics
The top of microscope (11) is provided with observation panel (12), and the bottom of the light microscope (11) is provided with camera lens (13), the camera lens
(13) place is additionally provided with RF transmitter (14), and the inner homogeneous of the body of heater (1) is covered with insulation construction layer (15), the stove
LED (16) is also equipped with inside body (1).
2. a kind of measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：The supporting leg
(2) bottom is provided with lower margin, and the supporting leg (2) is threadedly coupled between lower margin.
3. a kind of measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：It is described to rotate branch
Frame (10) includes the first rotating turret (17) and the second rotating turret (18), first rotating turret (17) and the second rotating turret (18) it
Between rotate connection.
4. a kind of measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：The body of heater
(1) front is additionally provided with observation window (19) and thermometer (20).
5. a kind of measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：The detection window
(6) section is circle, and the junction of the detection window (6) and body of heater (1) is additionally provided with sealing ring (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710378383.XA CN107101554A (en) | 2017-05-25 | 2017-05-25 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710378383.XA CN107101554A (en) | 2017-05-25 | 2017-05-25 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
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| Publication Number | Publication Date |
|---|---|
| CN107101554A true CN107101554A (en) | 2017-08-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710378383.XA Pending CN107101554A (en) | 2017-05-25 | 2017-05-25 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107490405A (en) * | 2017-09-29 | 2017-12-19 | 江苏秉宸科技有限公司 | A kind of silicon rod production geometrical size measuring device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206709748U (en) * | 2017-05-09 | 2017-12-05 | 永嘉利为新能源有限公司 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
-
2017
- 2017-05-25 CN CN201710378383.XA patent/CN107101554A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN206709748U (en) * | 2017-05-09 | 2017-12-05 | 永嘉利为新能源有限公司 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107490405A (en) * | 2017-09-29 | 2017-12-19 | 江苏秉宸科技有限公司 | A kind of silicon rod production geometrical size measuring device |
| CN107490405B (en) * | 2017-09-29 | 2020-10-30 | 新昌县晋通机械有限公司 | Geometric dimension measuring device for silicon rod production |
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Application publication date: 20170829 |
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