CN206709748U - A kind of measurement apparatus of polycrystalline silicon rod growth diameter - Google Patents
A kind of measurement apparatus of polycrystalline silicon rod growth diameter Download PDFInfo
- Publication number
- CN206709748U CN206709748U CN201720511506.8U CN201720511506U CN206709748U CN 206709748 U CN206709748 U CN 206709748U CN 201720511506 U CN201720511506 U CN 201720511506U CN 206709748 U CN206709748 U CN 206709748U
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- CN
- China
- Prior art keywords
- heater
- detection window
- polycrystalline silicon
- measurement apparatus
- silicon rod
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- Silicon Compounds (AREA)
Abstract
The utility model discloses a kind of measurement apparatus of polycrystalline silicon rod growth diameter,Including body of heater,The bottom of the body of heater is connected with supporting leg,The bottom of furnace body is provided with hydraulic cylinder,The output end of the hydraulic cylinder is connected with piston rod,One end of the piston rod is extend into body of heater,The end of the piston rod is connected with hoistable platform,The top of the body of heater is provided with detection window,The detection window is horizontally disposed with,Micrometer is rotatably connected at the top of the detection window,Fixed support is fixedly connected with the side wall of the body of heater,Swinging mounting is rotatably connected on the fixed support,One end of the swinging mounting is connected with light microscope,The top of the light microscope is provided with observation panel,The bottom of the light microscope is provided with camera lens,RF transmitter is additionally provided with the camera lens,The inner homogeneous of the body of heater is covered with insulation construction layer,The furnace interior is also equipped with LED,It is adapted to be widely popularized.
Description
Technical field
Field of polysilicon technology is the utility model is related to, specially a kind of measurement apparatus of polycrystalline silicon rod growth diameter.
Background technology
Polysilicon, it is a kind of form of elemental silicon.For the elemental silicon of melting when being solidified under the conditions of supercooling, silicon atom is with Buddha's warrior attendant
Stone lattice morphologic arrangement grows up to the different crystal grain of high preferred orientation into many nucleus, such as these nucleus, then these crystal grain combine,
Just crystallize into polysilicon.On Solar use, monocrystalline silicon and polysilicon also play huge effect.Although come from present
Say, to make solar power generation that there is larger market, received by vast consumer, the photoelectricity that must just improve solar cell turns
Efficiency is changed, reduces production cost.Value：It can be seen that its development trend is from the evolution of current international solar cell
Monocrystalline silicon, polysilicon, banding silicon, thin-film material (including microcrystalline silicon film, compound base film and dye film).
In the prior art, it is necessary to pre-establish out fed growth curve and current/voltage according to the growth rhythm of polysilicon
Curve, then reproduction polysilicon.In the production process of polysilicon, operating personnel need to be by the form observation on reduction furnace simultaneously
Monitor the growing state of polysilicon, such as the growth diameter of monitoring raw material silicon rod, and according to the actual growing state of polysilicon come
Optimize actual fed growth curve and current/voltage curve.However, present case is, to the growth diameter of raw material silicon rod
Monitoring mostly dependent on operating personnel observation and experience, i.e. operating personnel observe by the naked eye raw material silicon rod, and rely on it
Empirical estimating goes out the growth diameter of raw material silicon rod.Requirement of this estimation mode to the experience of operating personnel is higher, estimation knot
Fruit also varies with each individual, and error is larger.
Utility model content
The purpose of this utility model is to provide a kind of measurement apparatus of polycrystalline silicon rod growth diameter, to solve above-mentioned background
The problem of being proposed in technology.
To achieve the above object, the utility model provides following technical scheme：A kind of measurement of polycrystalline silicon rod growth diameter
Device, including body of heater, the bottom of the body of heater are connected with supporting leg, and the bottom of furnace body is provided with hydraulic cylinder, the hydraulic cylinder
Output end is connected with piston rod, and one end of the piston rod is extend into body of heater, and the end of the piston rod is connected with lifting and put down
Platform, the top of the body of heater are provided with detection window, and the detection window is horizontally disposed with, and micrometer is rotatably connected at the top of the detection window
Chi, fixed support is fixedly connected with the side wall of the body of heater, be rotatably connected to swinging mounting on the fixed support, described turn
One end of dynamic support is connected with light microscope, and the top of the light microscope is provided with observation panel, the light microscope
Bottom is provided with camera lens, is additionally provided with RF transmitter at the camera lens, the inner homogeneous of the body of heater covered with insulation construction layer,
The furnace interior is also equipped with LED.
Preferably, the bottom of the supporting leg is provided with lower margin, is threadedly coupled between the supporting leg and lower margin.
Preferably, the swinging mounting includes the first rotating turret and the second rotating turret, first rotating turret and second turn
It is rotatablely connected between moving frame.
Preferably, the front of the body of heater is additionally provided with observation window and thermometer.
Preferably, the section of the detection window is circle, and the junction of the detection window and body of heater is additionally provided with sealing ring.
Compared with prior art, the beneficial effects of the utility model are：The utility model structure is novel, easy to operate, leads to
Cross and detection window is set at the top of body of heater, and micrometer is rotatably connected at the top of detection window, operating personnel are by controlling liquid
Cylinder pressure, piston rod is set to promote hoistable platform to move up, polysilicon is placed on hoistable platform, and now polysilicon is close to detection
Window, operating personnel by the alignment lenses polysilicon of light microscope, now, are rotated micrometer, make micrometer by swinging mounting
The diameter of polysilicon is measured, the infrared light subsidiary launched using RF transmitter is positioned, and is reduced error, is passed through setting
LED, ensure the light of measurement, set up observation window and thermometer, improve the feature of device, there is very high practicality,
A kind of use feature of the measurement apparatus of polycrystalline silicon rod growth diameter is greatly improved, ensures its using effect and using effect
Benefit, it is adapted to be widely popularized.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the measurement apparatus of polycrystalline silicon rod growth diameter of the utility model；
Fig. 2 is a kind of internal structure schematic diagram of the measurement apparatus of polycrystalline silicon rod growth diameter of the utility model；
Fig. 3 is a kind of micrometer structural representation of the measurement apparatus of polycrystalline silicon rod growth diameter of the utility model；
Fig. 4 is that a kind of swinging mounting part-structure of measurement apparatus of polycrystalline silicon rod growth diameter of the utility model is illustrated
Figure.
In figure：1 body of heater, 2 supporting legs, 3 hydraulic cylinders, 4 piston rods, 5 hoistable platforms, 6 detection windows, 7 sealing rings, 8 micrometers, 9
Fixed support, 10 swinging mountings, 11 light microscopes, 12 observation panels, 13 camera lenses, 14 RF transmitters, 15 insulation construction layers,
16LED lamps, 17 first rotating turrets, 18 second rotating turrets, 19 observation windows, 20 thermometers.
Embodiment
With reference to Figure of description and embodiment, specific embodiment of the utility model is described in further detail：
Fig. 1-4 are referred to, the utility model provides a kind of technical scheme：A kind of measurement dress of polycrystalline silicon rod growth diameter
Put, including body of heater 1, the bottom of the body of heater 1 are connected with supporting leg 2, the bottom of body of heater 1 is provided with hydraulic cylinder 3, the hydraulic cylinder
3 output end is connected with piston rod 4, and one end of the piston rod 4 is extend into body of heater 1, and the end of the piston rod 4 is connected with
Hoistable platform 5, the top of the body of heater 1 are provided with detection window 6, and the detection window 6 is horizontally disposed, and the top of the detection window 6 turns
It is dynamic to be connected with micrometer 8, fixed support 9 is fixedly connected with the side wall of the body of heater 1, is rotatablely connected on the fixed support 9
There is swinging mounting 10, one end of the swinging mounting 10 is connected with light microscope 11, and the top of the light microscope 11 is set
There is observation panel 12, the bottom of the light microscope 11 is provided with camera lens 13, RF transmitter 14 is additionally provided with the camera lens 13,
The inner homogeneous of the body of heater 1 is also equipped with LED 16, the supporting leg 2 covered with insulation construction layer 15 inside the body of heater 1
Bottom be provided with lower margin, be threadedly coupled between the supporting leg 2 and lower margin, the swinging mounting 10 includes the first rotating turret 17 and the
Two rotating turrets 18, it is rotatablely connected between the rotating turret 18 of the first rotating turret 17 and second, the front of the body of heater 1 is additionally provided with sight
Window 19 and thermometer 20 are examined, the section of the detection window 6 is circle, and the junction of the detection window 6 and body of heater 1 is additionally provided with sealing
Circle 7.
Operation principle：In use, by setting detection window 6 at the top of body of heater 1, and rotate and connect at the top of detection window 6
Micrometer 8 is connected to, operating personnel make piston rod 4 promote hoistable platform 5 to move up, polysilicon placement by controlling hydraulic cylinder 3
On hoistable platform 5, now polysilicon is close to detection window 6, and operating personnel are by swinging mounting 10 by the mirror of light microscope 11
First 13 alignment polysilicon, now, rotates micrometer 8, micrometer 8 is measured the diameter of polysilicon, utilize RF transmitter 14
The infrared light subsidiary positioning launched, reduces error, by setting LED 16, ensures the light of measurement, sets up observation window
19 and thermometer 20, the feature of device is improved, there is very high practicality.
It is described above, only it is preferred embodiment of the present utility model, not technical scope of the present utility model is made
Go out any restrictions, thus it is every any trickle amendment made according to the technical essence of the utility model to above example, equivalent
Change and modification, in the range of still falling within the technical solution of the utility model.
Claims (5)
1. a kind of measurement apparatus of polycrystalline silicon rod growth diameter, including body of heater (1), it is characterised in that：The bottom of the body of heater (1)
Supporting leg (2) is connected with, body of heater (1) bottom is provided with hydraulic cylinder (3), and the output end of the hydraulic cylinder (3) is connected with piston
Bar (4), one end of the piston rod (4) are extend into body of heater (1), and the end of the piston rod (4) is connected with hoistable platform
(5), the top of the body of heater (1) is provided with detection window (6), and the detection window (6) is horizontally disposed, the top of the detection window (6)
Micrometer (8) is rotatably connected to, fixed support (9), the fixed support (9) are fixedly connected with the side wall of the body of heater (1)
On be rotatably connected to swinging mounting (10), one end of the swinging mounting (10) is connected with light microscope (11), the optics
The top of microscope (11) is provided with observation panel (12), and the bottom of the light microscope (11) is provided with camera lens (13), the camera lens
(13) place is additionally provided with RF transmitter (14), and the inner homogeneous of the body of heater (1) is covered with insulation construction layer (15), the stove
LED (16) is also equipped with inside body (1).
A kind of 2. measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：The supporting leg
(2) bottom is provided with lower margin, and the supporting leg (2) is threadedly coupled between lower margin.
A kind of 3. measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：It is described to rotate branch
Frame (10) includes the first rotating turret (17) and the second rotating turret (18), first rotating turret (17) and the second rotating turret (18) it
Between be rotatablely connected.
A kind of 4. measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：The body of heater
(1) front is additionally provided with observation window (19) and thermometer (20).
A kind of 5. measurement apparatus of polycrystalline silicon rod growth diameter according to claim 1, it is characterised in that：The detection window
(6) section is circle, and the junction of the detection window (6) and body of heater (1) is additionally provided with sealing ring (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720511506.8U CN206709748U (en) | 2017-05-09 | 2017-05-09 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720511506.8U CN206709748U (en) | 2017-05-09 | 2017-05-09 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206709748U true CN206709748U (en) | 2017-12-05 |
Family
ID=60466855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720511506.8U Expired - Fee Related CN206709748U (en) | 2017-05-09 | 2017-05-09 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206709748U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107101554A (en) * | 2017-05-25 | 2017-08-29 | 芜湖中科智捷信息科技有限责任公司 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
-
2017
- 2017-05-09 CN CN201720511506.8U patent/CN206709748U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107101554A (en) * | 2017-05-25 | 2017-08-29 | 芜湖中科智捷信息科技有限责任公司 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171205 Termination date: 20200509 |
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| CF01 | Termination of patent right due to non-payment of annual fee |