CN107490405A - A kind of silicon rod production geometrical size measuring device - Google Patents
A kind of silicon rod production geometrical size measuring device Download PDFInfo
- Publication number
- CN107490405A CN107490405A CN201710905721.0A CN201710905721A CN107490405A CN 107490405 A CN107490405 A CN 107490405A CN 201710905721 A CN201710905721 A CN 201710905721A CN 107490405 A CN107490405 A CN 107490405A
- Authority
- CN
- China
- Prior art keywords
- silicon rod
- display
- numerical control
- control box
- measuring device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention discloses a kind of silicon rod production geometrical size measuring device,Including numerical control box,Metallographic microscope,Measure and control device and integrated detection case,The top insertion of numerical control box is provided with the first display,The side of first display is connected with operation button,The preceding upper end of numerical control box is provided with second display,Content measuring instrument is used in this kind of silicon rod production,Integrated detection case includes Laser feedback profile measurement,Temperature is imaged with resistance detection and Infrared-Ultrasound hybrid three-dimensional solid shape,The multi-step that silicon rod detects is entered into row set,Overall accuracy of detection is improved while reducing numerous and diverse operation,Provided with second display,Directly connect integrated detector,And by after the parameters combined analysis of integrated detector detection,3-D view is formed to show,Reference is carried out by the plan shown with the first display,Testing staff is facilitated to be adjusted,The parameters of silicon rod can accurately be measured,Improve the practicality of device.
Description
Technical field
The present invention relates to silicon rod tester technical field, specially a kind of silicon rod production geometrical size measuring device.
Background technology
Tester mainly with electronic equipment, measuring instrument and electronic application instrument, refers to measure using electronic technology,
Instrument, equipment and the system of electricity or non electrical quantity are observed, or light, electricity and the measurement annex supplied to measure purpose,
Measurement includes data acquisition, storage, display, printing, drawing, processing and transmission etc., belongs to information products.
But existing silicon rod production is relatively simple with geometrical size measuring device function, only has the work(of measure geometry size
Can, typically no setting metallographic microscope, the performances such as structure, quality can not be detected.
So how to design a kind of silicon rod production geometrical size measuring device, turning into us will currently solve the problems, such as.
The content of the invention
It is an object of the invention to provide a kind of silicon rod production geometrical size measuring device, to solve above-mentioned background technology
The content problem of middle proposition.
To achieve the above object, the present invention provides following technical scheme：A kind of silicon rod production geometrical size measuring device,
Including numerical control box, metallographic microscope, measure and control device and integrated detection case, the top insertion of the numerical control box is provided with the first display
Device, the side of first display are connected with operation button, and the preceding upper end of the numerical control box is provided with second display, described
Through image transmitting line is connected with, the other end of described image transmission line is connected with integrated detection case, described on the right side of numerical control box
The front of integrated detection case is arranged at measure and control device, and tool box, the integrated detection are socketed with the right side of the integrated detection case
The top of case is welded with top plate, and the middle part insertion of the top plate is provided with imaging access panel, and four angles of the top plate are fixed
Be connected with support column, the top of the support column is connected with access panel, the access panel pass on left support column be connected with it is aobvious
Micro mirror spin axis, the microscope rotation the tip of the axis are socketed with metallographic microscope, and the inside of the measure and control device is provided through passing
Defeated passage, the front of the measure and control device are provided with division board, and the bottom of the division board is connected with silicon rod row position plate, the silicon
The both ends insertion of rod row position plate is provided with data-out port.
Further, first display is foldable relative to numerical control box, and first display and metallography microscope
Mirror signal connects.
Further, the silicon rod row position plate is provided with 6 row, and both ends data-out port is demountable structure.
Further, the access panel is the high glass made using safety glass.
Further, the tool box is divided into three lattice, and foldable relative to integrated detection case.
Further, the integrated detection case includes Laser feedback profile measurement, temperature and resistance detection and infrared ray surpasses
Sound wave hybrid three-dimensional solid shape is imaged.
Compared with prior art, the beneficial effects of the invention are as follows：Content measuring instrument is used in this kind of silicon rod production, aobvious provided with first
Show device, and the first display is connected with metallographic microscope signal, and metallographic microscope is directly merged into device, reduces detection
Operating procedure, and be provided with microscope spin axis, can directly being seen to properties such as the structure of silicon rod and quality with multi-angle
Survey, provided with integrated detection case, and integrated detection case includes Laser feedback profile measurement, temperature and resistance detection and infrared ray ultrasound
Ripple hybrid three-dimensional solid shape is imaged, and the multi-step of the performance detections such as silicon rod physical dimension is entered into row set, reduces numerous and diverse operation
While improve overall accuracy of detection, provided with second display, directly connect integrated detector, and integrated detector is detected
Parameters combined analysis after, formed 3-D view show, joined by the plan shown with the first display
According to facilitating testing staff to be adjusted, can accurately measure the parameters of silicon rod, improve the practicality of device.
Brief description of the drawings
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is the measure and control device partial structural diagram of the present invention；
Fig. 3 is the integrated detection case partial structural diagram of the present invention.
In figure：1st, numerical control box；101st, the first display；102nd, Cao Zuoanjian；103rd, second display；104th, image transmitting
Line；2nd, microscope spin axis；201st, metallographic microscope；3rd, access panel；4th, measure and control device；401st, transmission channel；402nd, division board；
403rd, silicon rod row position plate；404th, data-out port；5th, detection case is integrated；501st, access panel is imaged；502nd, support column；503rd, push up
Plate；504th, tool box.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
Fig. 1-2 is referred to, the present invention provides a kind of technical scheme：A kind of silicon rod production geometrical size measuring device, bag
Numerical control box 1, metallographic microscope 2, measure and control device 4 and integrated detection case 5 are included, the top insertion of numerical control box 1 is provided with the first display
Device 101, the side of the first display 101 are connected with operation button 102, and the preceding upper end of numerical control box 1 is provided with second display
103, through image transmitting line 104 is connected with, the other end of image transmitting line 104 is connected with integrated detection on the right side of numerical control box 1
Case 5, the front of integrated detection case 5 are arranged at measure and control device, and the right side of integrated detection case 5 is socketed with tool box 504, integrates detection
The top of case 5 is welded with top plate 503, and the middle part insertion of top plate 503 is provided with imaging access panel 501, and four angles of top plate 503 are equal
Support column 502 is fixedly connected with, the top of support column 502 is connected with access panel 3, and the support column 502 that passes on left of access panel 3 connects
Microscope spin axis 2 is connected to, the end of microscope spin axis 2 is socketed with metallographic microscope 201, and the inside of measure and control device 4 is through setting
There is transmission channel 401, the front of measure and control device 4 is provided with division board 402, and the bottom of division board 402 is connected with silicon rod row position plate
403, the both ends insertion of silicon rod row position plate 403 is provided with data-out port 404.
Further, the first display 101 is foldable relative to numerical control box 1, and the first display 101 and metallographic microscope
201 signals are connected, and the image that directly can be observed metallographic microscope 201 is directly shown on the first display 101, side
Just staff observes.
Further, silicon rod row position plate 403 is provided with 6 row, and both ends data-out port 404 is demountable structure,
Silicon rod is prevented to be broken in detection, it is difficult to remove.
Further, access panel 3 is the high glass made using safety glass,.
Further, tool box 504 divides for three lattice, and foldable relative to integrated detection case 5, can place some observations
Notes, facilitate late comer to refer to.
Further, integrating detection case 5 includes Laser feedback profile measurement, temperature and resistance detection and Infrared-Ultrasound
Hybrid three-dimensional solid shape is imaged, and realizes the multi-functional detection integration such as physical dimension.
Operation principle：The power supply output of control device first, it would be desirable to the silicon rod of detection is put into imaging access panel 501,
Microscope spin axis 2 is adjusted, makes the image clearly observed, after the completion of imaging, it is aobvious to feed back to first by image transmitting line 104
Show in device 101, the first display 101 after parsing shows the plan on silicon rod top layer, is referred to for staff, then will
Silicon rod is pushed in measure and control device 4 from transmission channel 401, adjusts Cao Zuoanjian 102, detection project is controlled, in integrated detection case 5
Middle progress Laser feedback profile measurement, temperature and resistance detection and the imaging of Infrared-Ultrasound hybrid three-dimensional solid shape etc. are a variety of
Detection, and result is fed back in second display 103 and shown, each item data is digitized output, and according to each
Item data is combined into 3-D view and carries out display output, and the both ends data-out port 404 of silicon rod row position plate 403 is detachable knot
Structure, prevent silicon rod to be broken in detection, made troubles to removal.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of changes, modification can be carried out to these embodiments, replace without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (6)
1. a kind of silicon rod production geometrical size measuring device, including numerical control box（1）, metallographic microscope（2）, measure and control device（4）
With integrated detection case（5）, it is characterised in that：The numerical control box（1）Top insertion be provided with the first display（101）, it is described
First display（101）Side be connected with operation button（102）, the numerical control box（1）Preceding upper end be provided with the second display
Device（103）, the numerical control box（1）Right side through being connected with image transmitting line（104）, described image transmission line（104）It is another
One end is connected with integrated detection case（5）, the integrated detection case（5）Front be arranged at measure and control device, the integrated detection case
（5）Right side be socketed with tool box（504）, the integrated detection case（5）Top be welded with top plate（503）, the top plate
（503）Middle part insertion be provided with imaging access panel（501）, the top plate（503）Four angles be fixedly connected with support column
（502）, the support column（502）Top be connected with access panel（3）, the access panel（3）Pass on left support column（502）
It is connected with microscope spin axis（2）, the microscope spin axis（2）End be socketed with metallographic microscope（201）, the measure and control device
（4）Inside be provided through transmission channel（401）, the measure and control device（4）Front be provided with division board（402）, it is described
Division board（402）Bottom be connected with silicon rod row position plate（403）, the silicon rod row position plate（403）Both ends insertion be provided with number
According to output port（404）.
A kind of 2. silicon rod production geometrical size measuring device according to claim 1, it is characterised in that：Described first is aobvious
Show device（101）Relative to numerical control box（1）It is foldable, and first display（101）With metallographic microscope（201）Signal connects
Connect.
A kind of 3. silicon rod production geometrical size measuring device according to claim 1, it is characterised in that：The silicon rod row
Position plate（403）It is provided with 6 row, and both ends data-out port（404）It is demountable structure.
A kind of 4. silicon rod production geometrical size measuring device according to claim 1, it is characterised in that：The access panel
（3）For the high glass made using safety glass.
A kind of 5. silicon rod production geometrical size measuring device according to claim 1, it is characterised in that：The tool box
（504）It is divided into three lattice, and relative to integrated detection case（5）It is foldable.
A kind of 6. silicon rod production geometrical size measuring device according to claim 1, it is characterised in that：The integrated inspection
Measuring tank（5）It is imaged including Laser feedback profile measurement, temperature and resistance detection and Infrared-Ultrasound hybrid three-dimensional solid shape.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010659466.8A CN111595389A (en) | 2017-09-29 | 2017-09-29 | Geometric dimension measuring device for silicon rod production |
| CN201710905721.0A CN107490405B (en) | 2017-09-29 | 2017-09-29 | Geometric dimension measuring device for silicon rod production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710905721.0A CN107490405B (en) | 2017-09-29 | 2017-09-29 | Geometric dimension measuring device for silicon rod production |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010659466.8A Division CN111595389A (en) | 2017-09-29 | 2017-09-29 | Geometric dimension measuring device for silicon rod production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107490405A true CN107490405A (en) | 2017-12-19 |
| CN107490405B CN107490405B (en) | 2020-10-30 |
Family
ID=60653822
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710905721.0A Active CN107490405B (en) | 2017-09-29 | 2017-09-29 | Geometric dimension measuring device for silicon rod production |
| CN202010659466.8A Withdrawn CN111595389A (en) | 2017-09-29 | 2017-09-29 | Geometric dimension measuring device for silicon rod production |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010659466.8A Withdrawn CN111595389A (en) | 2017-09-29 | 2017-09-29 | Geometric dimension measuring device for silicon rod production |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN107490405B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111604435A (en) * | 2020-06-01 | 2020-09-01 | 穆琳瑛 | Safety protection method and protection cloud monitoring system for bending machine |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201444040U (en) * | 2009-06-19 | 2010-04-28 | 锦州航星光电设备有限公司 | Optical crystal caliper |
| WO2011144297A1 (en) * | 2010-05-20 | 2011-11-24 | Pa-Id Automation & Vermarktung Gmbh | Method for monitoring the leak-tightness of a crystallization crucible, in particular a silicon crystallization crucible |
| CN103292702A (en) * | 2013-06-25 | 2013-09-11 | 湖北工业大学 | Geometric dimension measuring instrument of silicon rod |
| CN203811890U (en) * | 2014-03-21 | 2014-09-03 | 国家电网公司 | On-site metallographic microscope |
| CN105486748A (en) * | 2016-01-21 | 2016-04-13 | 西安理工大学 | Ultrasonic testing system for defects of monocrystalline silicon sticks |
| CN107101554A (en) * | 2017-05-25 | 2017-08-29 | 芜湖中科智捷信息科技有限责任公司 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
-
2017
- 2017-09-29 CN CN201710905721.0A patent/CN107490405B/en active Active
- 2017-09-29 CN CN202010659466.8A patent/CN111595389A/en not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201444040U (en) * | 2009-06-19 | 2010-04-28 | 锦州航星光电设备有限公司 | Optical crystal caliper |
| WO2011144297A1 (en) * | 2010-05-20 | 2011-11-24 | Pa-Id Automation & Vermarktung Gmbh | Method for monitoring the leak-tightness of a crystallization crucible, in particular a silicon crystallization crucible |
| CN103292702A (en) * | 2013-06-25 | 2013-09-11 | 湖北工业大学 | Geometric dimension measuring instrument of silicon rod |
| CN203811890U (en) * | 2014-03-21 | 2014-09-03 | 国家电网公司 | On-site metallographic microscope |
| CN105486748A (en) * | 2016-01-21 | 2016-04-13 | 西安理工大学 | Ultrasonic testing system for defects of monocrystalline silicon sticks |
| CN107101554A (en) * | 2017-05-25 | 2017-08-29 | 芜湖中科智捷信息科技有限责任公司 | A kind of measurement apparatus of polycrystalline silicon rod growth diameter |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111604435A (en) * | 2020-06-01 | 2020-09-01 | 穆琳瑛 | Safety protection method and protection cloud monitoring system for bending machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107490405B (en) | 2020-10-30 |
| CN111595389A (en) | 2020-08-28 |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20200121 Address after: 433000 No. two group 24, Shahu Town, Xiantao, Hubei Applicant after: Chen Cheng Address before: 214407 No. 2 Weiye Road, Huangtang Industrial Park, Xuxiake Town, Jiangyin City, Wuxi City, Jiangsu Province Applicant before: Jiangsu master Technology Co., Ltd. |
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Effective date of registration: 20200707 Address after: 430000 No. 14 South Central Road, Wuchang District, Hubei, Wuhan Applicant after: Xu Faxi Address before: 433000 County-level Administrative Division of Hubei Province No. 24, Group II, Liangting Village, Shahu Town, Xiantao City Applicant before: Chen Cheng |
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Effective date of registration: 20201010 Address after: No.29 Dongchen village, Dongcheng village, chengtan street, Xinchang County, Shaoxing City, Zhejiang Province Applicant after: Xinchang Jintong Machinery Co.,Ltd. Address before: 430000 No. 14 South Central Road, Wuchang District, Hubei, Wuhan Applicant before: Xu Faxi |
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