CN201444040U - Optical crystal caliper - Google Patents

Optical crystal caliper Download PDF

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Publication number
CN201444040U
CN201444040U CN2009200146949U CN200920014694U CN201444040U CN 201444040 U CN201444040 U CN 201444040U CN 2009200146949 U CN2009200146949 U CN 2009200146949U CN 200920014694 U CN200920014694 U CN 200920014694U CN 201444040 U CN201444040 U CN 201444040U
Authority
CN
China
Prior art keywords
base
digital display
caliper
crystal
optical crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009200146949U
Other languages
Chinese (zh)
Inventor
刘义
苗桂杰
李今强
范军
夏光
刘红
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JINZHOU HANGXING PHOTOELECTRIC EQUIPMENT CO Ltd
Original Assignee
JINZHOU HANGXING PHOTOELECTRIC EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JINZHOU HANGXING PHOTOELECTRIC EQUIPMENT CO Ltd filed Critical JINZHOU HANGXING PHOTOELECTRIC EQUIPMENT CO Ltd
Priority to CN2009200146949U priority Critical patent/CN201444040U/en
Application granted granted Critical
Publication of CN201444040U publication Critical patent/CN201444040U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

An optical crystal caliper overcomes the problems of fussy operation, complex procedures and higher cost in the prior art. The crystal caliper comprises a base and a sighting telescope comprising a connecting tube, an eye lens set, a reticle, a prism set and an objective lens set, wherein the upper part of the base is fixedly connected with a digital display ruler; the head of the digital display ruler is fixedly connected with a universal joint comprising a semispherical base, a pressing piece, a connecting plate, a spherical base and a locking screw; and the sighting telescope is fixed on the universal joint. In practical measurement, an optical microscope is utilized to sight a bus on one side of a rotary cylindrical monocrystalline silicon crystal, the lens tube of the microscope is driven through the head of the digital display ruler to synchronously move, and then sights a bus on the other side of the cylindrical monocrystalline silicon crystal, therefore, the moving distance of the head of the digital display ruler is equal to the diameter of the monocrystalline silicon crystal to be measured. The optical crystal caliper has the benefits of simple structure, convenient operation and lower cost, and meets the requirement of measurement precision at the same time.

Description

The optical crystal caliper
Technical field
The utility model belongs to a kind of optical crystal caliper, particularly a kind of optical crystal caliper that is used for measuring the single crystal silicon diameter that rotates in the process single crystal growing furnace.
Background technology
At present, what being used for of domestic production measured that the single crystal silicon diameter that rotates in the process single crystal growing furnace adopts is the image information technology, measuring method as the disclosed a kind of pulling of crystals silicon rod diameter based on Hough transformation of CN200610105331, mainly be to adopt single camera that the image in the crystal growing process is carried out synchronous acquisition, then image information is carried out pre-service, adopt the crystal growth information in the Hough transfer pair image to detect again, obtain diameter, center of circle X coordinate and three parameters of center of circle Y coordinate, at last the parametric space curves intersection point is carried out the mean cluster operation, obtain diameter measurement value accurately.This method needs a plurality of steps, multiple devices, and complex operation, program complexity, cost are higher.
Summary of the invention
Technical problem to be solved in the utility model is to overcome prior art to need a plurality of steps, multiple devices, complex operation, program complexity, cost problem of higher, a kind of optical microscope aiming Positioning Principle of utilizing is provided, sees through the instrument that the single crystal growing furnace glass window is directly measured the single crystal silicon diameter that rotates in the single crystal growing furnace in the process.
The technical solution adopted in the utility model is:
The gun sight that the utility model includes a base and is made up of connecting cylinder, eyepiece group, graticule, prism group, objective lens, be connected with the digital display chi in the base upper fixed, the chi head of digital display chi is fixedlyed connected with the universal joint of being made up of hemisphere seat, compressing tablet, web joint and ball seat, locking nail, and described gun sight is fixed on this universal joint.
The color filter that prevents high light injury human eye in the single crystal growing furnace also is installed on the seat stand of described base.
Staple on the window boss that in use complete machine is fixed on single crystal growing furnace is housed at the base rear,, copper sheathing is installed therebetween in order to prevent the wearing and tearing of staple to base.
In actual measurement, base directly is fixed on the window boss of single crystal growing furnace, lock with locking nail, utilize a side bus of the column type single crystal silicon of optical microscope aiming rotation then, chi head by the digital display chi drives the same moved further of gun sight lens barrel, the opposite side bus of aiming column type single crystal silicon, the distance that the chi head of digital display chi moves is exactly the diameter of tested single crystal silicon.
The beneficial effects of the utility model are simple in structure, and are easy to operate, can focus according to different eyesight degree, can focus to the different operating distance.Owing to gun sight is fixed on the universal joint, therefore can carry out universal adjustment, realized measuring directly, fast the target call of the diameter of single crystal growing furnace crystal in the stove, production efficiency and the minimizing rejection rate that improves monocrystalline silicon played crucial effects.Because the utility model does not need a plurality of steps, multiple devices, thereby program is simple, cost is lower, has also satisfied the requirement of measuring accuracy simultaneously.
Description of drawings
Fig. 1 is a front view of the present utility model.
Fig. 2 is a right view of the present utility model.
Fig. 3 is a vertical view of the present utility model.
Among the figure: 1. eyepiece mount, 2. eyepiece group, 3. spacer ring, 4. eyepiece trim ring, 5. eyepiece mount tube, 6. graticule, 7. graticule trim ring, 8. connecting cylinder, 9. prism group, 10. object lens trim ring, 11. objective lens, 12. guide pins, 13. objective holders, 14. regulating sleeves, 15. hemisphere seats, 16. compressing tablet, 17. web joints, 18. ball seats, 19. locking nails, 20. digital display chis, 21. base, 22. color filters, 23. staples, 24. copper sheathings, 25. support, 26. cushion blocks, 27. pressing plates, 28. transverse slats.
Embodiment
The gun sight that the utility model includes a base 21 and is made up of connecting cylinder 8, eyepiece group 2, graticule 6, prism group 9, objective lens 11, be connected with digital display chi 20 in base 21 upper fixed, the chi head of digital display chi 20 is fixedlyed connected with the universal joint of being made up of hemisphere seat 15, compressing tablet 16, web joint 17 and ball seat 18, locking nail 19, and described gun sight is fixed on this universal joint.
Described base 21 is made by casting aluminium material, be screwed in base 21 both sides and be connected with support 25, the transverse slat 28 of connection, fixation has been installed on the support 25, on support 25, transverse slat 28, cushion block 26 is installed, cushion block 26 upper fixed are connected with 0~300 millimeter digital display chi 20, and compress with pressing plate 27.Described gun sight has a connecting cylinder 8, is connected with eyepiece mount tube 5 in the upper end of connecting cylinder 8, eyepiece mount tube 5 and eyepiece mount 1 spiral marking connection, eyepiece group 2 is installed in eyepiece mount 1, described eyepiece group 2 has 2 groups of two gummed eyeglasses, separates with spacer ring 3 therebetween, compresses with eyepiece trim ring 4 then; Graticule 6 also is installed below eyepiece mount tube 5 also to be compressed with graticule trim ring 7; Described eyepiece part can be focused by the screw thread between eyepiece mount 1 and the eyepiece mount tube 5, observes with the people who adapts to different eyesight degree; Also be bonded with the prism group 9 that turns to effect in the middle and upper part of connecting cylinder 8, objective holder 13 is installed in the lower end of connecting cylinder 8, objective lens 11 is pressed abd fixed on this objective holder 13 by object lens trim ring 10; Regulating sleeve 14 is installed outside the lower end of connecting cylinder 8, and the lower end of said connecting cylinder 8 also has one section gathering sill, and objective holder 13 utilizes regulating sleeve 14 to drive and can slide up and down in gathering sill by guide pin 12, and the different operating distance is focused.
Color filter 22 also is installed on the seat stand of described base 21, prevents high light injury human eye in the single crystal growing furnace.
Staple 23 on the window boss that in use complete machine is fixed on single crystal growing furnace is housed at base 21 rears,, copper sheathing 24 is installed therebetween in order to prevent the wearing and tearing of 23 pairs of bases 21 of staple.
In actual measurement, complete machine is fixed on the window boss of single crystal growing furnace with staple 23, utilize the column type single crystal silicon that rotates in the optical sight aiming single crystal growing furnace to measure then, tested single crystal silicon one side bus is imaged on the graticule 6, can be observed tested single crystal silicon distinct image by eyepiece group 2 by objective lens 11, prism group 9, chi head by the digital display chi drives the same moved further of gun sight again, the opposite side bus of aiming column type single crystal silicon, the distance that the chi head of digital display chi moves is exactly the diameter of tested single crystal silicon.

Claims (3)

1. optical crystal caliper, the gun sight that includes a base [21] and form by connecting cylinder [8], eyepiece group [2], graticule [6], prism group [9], objective lens [11], it is characterized in that, be connected with digital display chi [20] in base [21] upper fixed, the chi head of digital display chi [20] is fixedlyed connected with the universal joint of being made up of hemisphere seat [15], compressing tablet [16], web joint [17] and ball seat [18], locking nail [19], and described gun sight is fixed on this universal joint.
2. optical crystal caliper according to claim 1 is characterized in that, color filter [22] also is installed on the seat stand of described base [21].
3. optical crystal caliper according to claim 1 is characterized in that, the staple [23] on the window boss that in use complete machine is fixed on single crystal growing furnace is housed at base [21] rear and prevents the copper sheathing [24] of staple [23] to base [21] wearing and tearing.
CN2009200146949U 2009-06-19 2009-06-19 Optical crystal caliper Expired - Fee Related CN201444040U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009200146949U CN201444040U (en) 2009-06-19 2009-06-19 Optical crystal caliper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009200146949U CN201444040U (en) 2009-06-19 2009-06-19 Optical crystal caliper

Publications (1)

Publication Number Publication Date
CN201444040U true CN201444040U (en) 2010-04-28

Family

ID=42548723

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009200146949U Expired - Fee Related CN201444040U (en) 2009-06-19 2009-06-19 Optical crystal caliper

Country Status (1)

Country Link
CN (1) CN201444040U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107490405A (en) * 2017-09-29 2017-12-19 江苏秉宸科技有限公司 A kind of silicon rod production geometrical size measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107490405A (en) * 2017-09-29 2017-12-19 江苏秉宸科技有限公司 A kind of silicon rod production geometrical size measuring device
CN107490405B (en) * 2017-09-29 2020-10-30 新昌县晋通机械有限公司 Geometric dimension measuring device for silicon rod production

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100428

Termination date: 20120619