CN107490405B - Geometric dimension measuring device for silicon rod production - Google Patents

Geometric dimension measuring device for silicon rod production Download PDF

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Publication number
CN107490405B
CN107490405B CN201710905721.0A CN201710905721A CN107490405B CN 107490405 B CN107490405 B CN 107490405B CN 201710905721 A CN201710905721 A CN 201710905721A CN 107490405 B CN107490405 B CN 107490405B
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display
silicon rod
numerical control
detection
integrated detection
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CN107490405A (en
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吕伟南
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Xinchang Jintong Machinery Co.,Ltd.
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Xinchang Jintong Machinery Co ltd
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Priority to CN202010659466.8A priority Critical patent/CN111595389A/en
Priority to CN201710905721.0A priority patent/CN107490405B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention discloses a geometric dimension measuring device for silicon rod production, which comprises a numerical control box, a metallographic microscope, a measurement and control device and an integrated detection box, wherein the top end of the numerical control box is embedded with a first display, the side surface of the first display is connected with an operating button, the front upper end of the numerical control box is provided with a second display, the integrated detection box comprises a laser feedback appearance detection device, a temperature and resistance detection device and an infrared ultrasonic mixed three-dimensional shape imaging device, the multiple steps of silicon rod detection are integrated, the overall detection precision is improved while the complex operation is reduced, the second display is arranged and is directly communicated with the integrated detector, and after the parameters detected by the integrated detector are combined and analyzed, a three-dimensional image is formed and displayed, and the three-dimensional image is referred by a plane graph displayed by the first display, so that the adjustment of detection personnel is convenient, all parameters of the silicon rod can be accurately measured, and the practicability of the device is improved.

Description

Geometric dimension measuring device for silicon rod production
Technical Field
The invention relates to the technical field of silicon rod testers, in particular to a geometric dimension measuring device for silicon rod production.
Background
The tester mainly uses electronic equipment, measuring instruments and electronic application instruments, refers to instruments, equipment and systems for measuring and observing electric quantity or non-electric quantity by using electronic technology, or light, electric quantity and measuring accessories supplied for measuring purposes, and the measurement comprises data acquisition, storage, display, printing, drawing, processing, transmission and the like, and belongs to information products.
However, the conventional geometric dimension measuring device for silicon rod production has single function, only has the function of measuring geometric dimensions, is not provided with a metallographic microscope generally, and cannot detect the performances such as structure and quality.
Therefore, how to design a geometric dimension measuring device for silicon rod production becomes a problem to be solved currently.
Disclosure of Invention
The invention aims to provide a geometric dimension measuring device for silicon rod production, which solves the content problem in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a geometric dimension measuring device for silicon rod production comprises a numerical control box, a metallographic microscope, a measurement and control device and an integrated detection box, wherein a first display is embedded in the top end of the numerical control box, an operating button is connected to the side face of the first display, a second display is arranged at the front upper end of the numerical control box, an image transmission line is connected to the right side of the numerical control box in a penetrating manner, the other end of the image transmission line is connected with the integrated detection box, the front face of the integrated detection box is arranged on the measurement and control device, a tool box is sleeved on the right side of the integrated detection box, a top plate is welded at the top end of the integrated detection box, a development observation plate is embedded in the middle of the top plate, support columns are fixedly connected to four corners of the top plate, an observation plate is connected to the top end of the support columns, and the left side, the end of microscope spiral shaft has cup jointed the metallographic microscope, measurement and control device's inside is run through and is provided with transmission channel, measurement and control device's front is provided with the division board, the bottom of division board is connected with silicon rod array position board, the both ends embedding of silicon rod array position board is provided with data output port.
Further, the first display is foldable relative to the numerical control box, and the first display is in signal connection with the metallographic microscope.
Furthermore, the silicon rod array position plate is provided with 6 rows, and the data output ports at the two ends are detachable structures.
Furthermore, the observation plate is made of high-transparency glass made of toughened glass.
Further, the tool box is divided into three grids and can be folded relative to the integrated detection box.
Furthermore, the integrated detection box comprises laser feedback appearance detection, temperature and resistance detection and infrared ultrasonic mixed three-dimensional morphological imaging.
Compared with the prior art, the invention has the beneficial effects that: the content tester for silicon rod production is provided with a first display, the first display is in signal connection with a metallographic microscope, the metallographic microscope is directly combined into a device, the operation steps of detection are reduced, the rotating shaft of the microscope is arranged, the properties of the silicon rod such as structure, quality and the like can be directly observed at multiple angles, the integrated detection box is arranged, the integrated detection box comprises laser feedback appearance detection, temperature and resistance detection and infrared ultrasonic mixed three-dimensional morphological imaging, multiple steps of performance detection of the silicon rod such as geometric dimension and the like are integrated, the overall detection precision is improved while the complex operation is reduced, a second display is arranged, the integrated detection box is directly communicated, and after various parameters detected by the integrated detection box are combined and analyzed, a three-dimensional image is formed and displayed, and the three-dimensional image is referred through a plane graph displayed by the first display, the silicon rod measuring device is convenient for detection personnel to adjust, can accurately measure various parameters of the silicon rod, and improves the practicability of the device.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a partial structure of the measurement and control device of the present invention;
FIG. 3 is a partial structure diagram of the integrated detection box of the present invention.
In the figure: 1. a numerical control box; 101. a first display; 102. operating a key; 103. a second display; 104. an image transmission line; 2. rotating the axis of the microscope; 201. a metallographic microscope; 3. an observation plate; 4. a measurement and control device; 401. a transmission channel; 402. a separator plate; 403. a silicon rod array plate; 404. a data output port; 5. an integrated detection box; 501. a development observation plate; 502. a support pillar; 503. a top plate; 504. a tool box.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-2, the present invention provides a technical solution: a geometric dimension measuring device for silicon rod production comprises a numerical control box 1, a metallographic microscope 201, a measurement and control device 4 and an integrated detection box 5, wherein a first display 101 is embedded in the top end of the numerical control box 1, an operation button 102 is connected to the side face of the first display 101, a second display 103 is arranged at the front upper end of the numerical control box 1, an image transmission line 104 is connected to the right side of the numerical control box 1 in a penetrating manner, the other end of the image transmission line 104 is connected with the integrated detection box 5, the front face of the integrated detection box 5 is arranged on the measurement and control device, a tool box 504 is sleeved on the right side of the integrated detection box 5, a top plate 503 is welded at the top end of the integrated detection box 5, a display observation plate 501 is embedded in the middle of the top plate 503, support columns 502 are fixedly connected to four corners of the top plate 503, the top end of the support columns 502 is connected with, the end of the microscope rotating shaft 2 is sleeved with a metallographic microscope 201, a transmission channel 401 penetrates through the inside of the measurement and control device 4, an isolation plate 402 is arranged on the front face of the measurement and control device 4, a silicon rod array plate 403 is connected to the bottom of the isolation plate 402, and data output ports 404 are arranged at two ends of the silicon rod array plate 403 in an embedded mode.
Further, first display 101 is collapsible for numerical control box 1, and first display 101 and metallographic microscope 201 signal connection, can directly show the image that metallographic microscope 201 was observed on first display 101, makes things convenient for the staff to observe.
Further, the silicon rod array position plate 403 is provided with 6 rows, and the data output ports 404 at two ends are detachable structures, so that the silicon rods are prevented from being broken during detection and difficult to remove.
Furthermore, the observation plate 3 is made of tempered glass and is made of high-transmittance glass.
Further, the tool box 504 is divided into three compartments, and is foldable relative to the integrated detection box 5, so that observation notes can be placed for reference by the following people.
Furthermore, the integrated detection box 5 comprises laser feedback appearance detection, temperature and resistance detection and infrared ultrasonic wave mixed three-dimensional shape imaging, and multifunctional detection integration such as geometric dimension is achieved.
The working principle is as follows: firstly, controlling the power output of a device, putting a silicon rod to be detected into a developing observation plate 501, adjusting a microscope rotary shaft 2 to make an observed image clear, after imaging is finished, feeding back the silicon rod to a first display 101 through an image transmission line 104, displaying a plane image of the surface layer of the silicon rod by the first display 101 after analysis for a worker to refer to, pushing the silicon rod into a measurement and control device 4 from a transmission channel 401, adjusting an operation key 102 to control detection items, performing various detections such as laser feedback appearance detection, temperature and resistance detection, infrared ultrasonic mixed three-dimensional form imaging and the like in an integrated detection box 5, feeding back the result into a second display 103 for display, digitally outputting various data, combining the data into a three-dimensional image for display and output according to the various data, wherein data output ports 404 at two ends of a silicon rod column plate 403 are detachable structures, the silicon rod is prevented from being broken during detection, and inconvenience is brought to removal.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (4)

1. The utility model provides a silicon rod production is with geometric dimensions measuring device, includes numerical control case (1), metallographic microscope (201), measurement and control device (4) and integrated detection case (5), its characterized in that: the top embedding of numerical control case (1) is provided with first display (101), the side of first display (101) is connected with operating button (102), the preceding upper end of numerical control case (1) is provided with second display (103), the right side through connection of numerical control case (1) has image transmission line (104), the other end of image transmission line (104) is connected with integrated detection case (5), the front of integrated detection case (5) sets up in observing and controlling device, toolbox (504) have been cup jointed on the right side of integrated detection case (5), the top welding of integrated detection case (5) has roof (503), the middle part embedding of roof (503) is provided with visualization observation board (501), the equal fixedly connected with support column (502) of roof (503), the top of support column (502) is connected with observation board (3), the left side of the observation plate (3) is connected with a microscope rotating shaft (2) through a support column (502), the tail end of the microscope rotating shaft (2) is sleeved with a metallographic microscope (201), a transmission channel (401) penetrates through the inside of the measurement and control device (4), the front side of the measurement and control device (4) is provided with an isolation plate (402), the bottom of the isolation plate (402) is connected with a silicon rod array plate (403), and two ends of the silicon rod array plate (403) are embedded with data output ports (404);
the first display is in signal connection with the metallographic microscope; the second display is communicated with the integrated detection box.
2. The geometry measuring device for producing a silicon rod as set forth in claim 1, wherein: the first display (101) is foldable relative to the numerical control box (1), and the first display (101) is in signal connection with the metallographic microscope (201).
3. The geometry measuring device for producing a silicon rod as set forth in claim 1, wherein: the silicon rod array position plate (403) is provided with 6 rows, and the data output ports (404) at two ends are detachable structures.
4. The geometry measuring device for producing a silicon rod as set forth in claim 1, wherein: the observation plate (3) is made of high-transparency glass made of toughened glass.
CN201710905721.0A 2017-09-29 2017-09-29 Geometric dimension measuring device for silicon rod production Active CN107490405B (en)

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CN202010659466.8A CN111595389A (en) 2017-09-29 2017-09-29 Geometric dimension measuring device for silicon rod production
CN201710905721.0A CN107490405B (en) 2017-09-29 2017-09-29 Geometric dimension measuring device for silicon rod production

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201444040U (en) * 2009-06-19 2010-04-28 锦州航星光电设备有限公司 Optical crystal caliper
WO2011144297A1 (en) * 2010-05-20 2011-11-24 Pa-Id Automation & Vermarktung Gmbh Method for monitoring the leak-tightness of a crystallization crucible, in particular a silicon crystallization crucible
CN103292702A (en) * 2013-06-25 2013-09-11 湖北工业大学 Geometric dimension measuring instrument of silicon rod
CN203811890U (en) * 2014-03-21 2014-09-03 国家电网公司 On-site metallographic microscope
CN105486748A (en) * 2016-01-21 2016-04-13 西安理工大学 Ultrasonic testing system for defects of monocrystalline silicon sticks
CN107101554A (en) * 2017-05-25 2017-08-29 芜湖中科智捷信息科技有限责任公司 A kind of measurement apparatus of polycrystalline silicon rod growth diameter

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201444040U (en) * 2009-06-19 2010-04-28 锦州航星光电设备有限公司 Optical crystal caliper
WO2011144297A1 (en) * 2010-05-20 2011-11-24 Pa-Id Automation & Vermarktung Gmbh Method for monitoring the leak-tightness of a crystallization crucible, in particular a silicon crystallization crucible
CN103292702A (en) * 2013-06-25 2013-09-11 湖北工业大学 Geometric dimension measuring instrument of silicon rod
CN203811890U (en) * 2014-03-21 2014-09-03 国家电网公司 On-site metallographic microscope
CN105486748A (en) * 2016-01-21 2016-04-13 西安理工大学 Ultrasonic testing system for defects of monocrystalline silicon sticks
CN107101554A (en) * 2017-05-25 2017-08-29 芜湖中科智捷信息科技有限责任公司 A kind of measurement apparatus of polycrystalline silicon rod growth diameter

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