CN107094348A - A kind of alternation plasma discharge apparatus - Google Patents
A kind of alternation plasma discharge apparatus Download PDFInfo
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- CN107094348A CN107094348A CN201710529940.3A CN201710529940A CN107094348A CN 107094348 A CN107094348 A CN 107094348A CN 201710529940 A CN201710529940 A CN 201710529940A CN 107094348 A CN107094348 A CN 107094348A
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- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
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- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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Abstract
The invention provides a kind of alternation plasma discharge apparatus, its structure includes high pressure plasma discharge cell, high-voltage rectifying unit and high voltage power supply.High pressure plasma discharge cell includes the high-pressure side water electrode and ground terminal water electrode being oppositely arranged；High-pressure side water power extremely two, both are arranged side by side and separated；High-voltage rectifying unit includes two diodes, and two high-pressure side water electrodes connect the positive pole and negative pole of two diodes respectively, and another pole of two diodes is connected together and connects the high-pressure side of high voltage power supply.During High voltage output, two high-pressure side water electrodes for connecting diode can be conductive in turn, discharged respectively in discharging gap diverse location so as to control voltage positive and negative half period, and produce that periodicity is different in diverse location, the two kinds of plasma photon crystal structures of lattice constant not etc..The present invention has innovated electric discharge device, significant for influence of the Wall charge to electric discharge in research dielectric barrier discharge, also has wide practical use in industrial circle.
Description
Technical field
The present invention relates to plasma discharge and applied technical field, specifically a kind of alternation plasma is put
Electric installation.
Background technology
Photonic crystal is in a kind of artificial " brilliant of space periodic arrangement form by the different dielectric material of two kinds of dielectric constants
Body " structure.Space ratio and " lattice " structure of the refractive index proportioning of dielectric material and differing dielectric constant etc. are direct in crystal
The photon band gap of photonic crystal is determined, and its forbidden photon band position is fixed, is difficult to realize the adjustability control to electromagnetic wave
System.Plasma photon crystal, as a kind of new photonic crystal, because the space-time of its structure is adjustable, allows its flexible
Corresponding photon band gap is adjusted, changes its position of energy band and width, and then the light for making frequency fall in the band gap is forbidden propagating, and realizes
The control that selection and light to light frequency are propagated.Based on this, plasma photon crystal is in wave filter, plasma antenna, light
Numerous electromagnetic wave control fields such as switch and Plasma Stealth are widely used.
At present, the application study of plasma, mainly produces the feature of plasma with gas discharge and wherein chemistry is anti-
It should be main study subject.Gas discharge, which produces plasma, mainly to be had：Arc discharge, corona discharge, glow discharge, medium resistance
Gear electric discharge（DBD）It is several with atmospheric pressure glow discharge etc..Wherein, arc discharge because the plasma temperature of generation it is too high, from
And limit its application in the industrial production；The low temperature plasma that corona discharge is produced is mainly distributed on severe non-uniform electric field
In strong electric field region, be unsuitable for industrial-scale application, and this electric discharge is weaker, produce plasma and active particle
Efficiency is too low；Glow discharge is typically carried out, it is necessary to which vacuum system, needs constantly during industrial treatment at low pressure
Open vacuum chamber and take out finished product, add test product, it is difficult to continuous production, low production efficiency；Be best suitable for industrial production application is to be situated between
Glow discharge under matter barrier discharge and atmospheric pressure.
Dielectric barrier discharge（Dielectric Barrier Discharge, DBD）It is to have dielectric insertion electric discharge empty
Between a kind of nonequilibrium state gas discharge, also known as dielectric impedance corona discharge or voltolising.Dielectric barrier discharge can be in height
Air pressure and very wide frequency ranges of operation, common operating air pressure be 10 ~ 10000 Pa, supply frequency can from 50Hz to
1MHz.At present, applicant is using double water electrode medium barrier electric discharges（DBD）Device, realize has several foldings in discharge space
The plasma photonic crystal of rate is penetrated, but realizes the plasma photonic crystal of two kinds of different bandgap structures not yet in different spaces simultaneously
Research.
The content of the invention
, can be in different skies using the device it is an object of the invention to provide a kind of alternation plasma discharge apparatus
Between form the plasma photon crystals of different bandgap structures.
What the present invention was realized in：A kind of alternation plasma discharge apparatus, including high pressure plasma electric discharge
Unit, high-voltage rectifying unit and high voltage power supply；
The high pressure plasma discharge cell includes the high-pressure side water electrode and ground terminal water electrode being oppositely arranged；The high-pressure side
Water electrode includes filling distilled water in the single tube of two juxtapositions and separation, each single tube, and the both ends of the surface of single tube are by clear glass
Or lucite is closed, water injection hole is provided with single tube；It is close between the high-pressure side water electrode and the ground terminal water electrode
Discharging gap insulating barrier is placed with, two identical through holes, two through holes point are formed with the discharging gap insulating barrier
Not Dui Ying high-pressure side water electrode two single tubes, two through holes constitute discharging gap spaces；
The high-voltage rectifying unit includes the first high-voltage diode and the second high-voltage diode；First high-voltage diode is just
Pole connects with a single tube of the high-pressure side water electrode, another single tube of the high-pressure side water electrode and second high pressure
The negative pole of diode connects, the positive pole of the negative pole of first high-voltage diode and second high-voltage diode with the height
The high-pressure side of voltage source connects, and the ground terminal of the high voltage power supply connects with the ground terminal water electrode.
The ground terminal water electrode is made up of a single tube for filling distilled water；The diameter of the ground terminal water electrode single tube is more than
Described two single tube diameter sums of high-pressure side water electrode.
The ground terminal water electrode includes filling distilled water in the single tube of two juxtapositions and separation, each single tube；Describedly
Two single tubes of two single tubes of water electrode respectively with the high-pressure side water electrode are held to correspond.
The high-voltage rectifying unit also includes high input voltage conductive pole, positive half cycle High voltage output conductive pole, negative half period high pressure
Export conductive pole and insulation booth；The positive pole of the negative pole of first high-voltage diode and second high-voltage diode passes through institute
The high-pressure side that high input voltage conductive pole is stated with the high voltage power supply connects, and the positive pole of first high-voltage diode passes through described bear
Half cycle High voltage output conductive pole connects with a single tube of the high-pressure side water electrode, and the negative pole of second high-voltage diode leads to
The positive half cycle High voltage output conductive pole is crossed with another single tube of the high-pressure side water electrode to connect；The high input voltage is conductive
Post, the positive half cycle High voltage output conductive pole and the negative half period High voltage output conductive pole are embedded in the insulation booth.
The high pressure plasma discharge cell is placed in high pressure vacuum electric discharge tank；Noted in high pressure vacuum electric discharge tank
There is discharge gas, the discharge gas is the mixed gas of air and argon gas.
The discharging gap insulating barrier is made up of an entire plate or two blocks of plates separated.
Copper electrode is equipped with respectively in the high-pressure side water electrode and the ground terminal water electrode.
Through hole is shaped as circle, triangle, square, rectangle, pentagon, six on the discharging gap insulating barrier
Side shape, heptagon or octagon etc. rule or irregular shape.
It is connected on the discharging gap insulating barrier between two through holes by bar hole；Discharging gap border is by glass
Glass, quartz glass or plastic material make.
Discharging condition includes：Discharge voltage frequency is 50-60kHz, and discharge voltage amplitude is in 3-4kV；Applied voltage is just
Negative half period discharges in diverse location respectively, produces plasma channel, periodically arranges self-organizing with non-region of discharge and formed
The crystal structure of different spaces different refractivity, i.e. positive-negative half-cycle are in the plasma photon crystal structure produced by diverse location
It is different.
The present invention utilizes the one-way conduction characteristic of high-voltage diode, with reference to the height being made up of the single tube of two juxtapositions and separation
Pressure side water electrode and the discharging gap insulating barrier with two through holes, devise a kind of alternation plasma discharge dress
Put, by the present invention alternating voltage positive-negative half-cycle can be controlled corresponding two in two single tube end faces of high-pressure side water electrode respectively
Different spaces（In i.e. two through holes）Electric discharge, because breakdown voltage, Wall charge accumulation are different, two different spaces are in suitable bar
Self-organizing shows different spot figures under part, i.e., different plasma photon crystals are formed in two spaces.The present invention is not only
Innovated electric discharge device, and the influence for research Wall charge to electric discharge is significant, it is this in industrial circle can be with
The discharge type and the plasma photonic crystal of formation that control is only discharged in the half period also have wide practical use.
Simple in construction, clear principle of the invention, it is easy to accomplish, repeatability and operability are good, are preferably to carry out mechanism
Research creates condition with commercial Application.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of through hole on discharging gap insulating barrier in the present invention；Wherein, Fig. 2（a）It is two through holes
Disconnected structural representation, Fig. 2（b）It is the structural representation of two through hole connections.
Fig. 3 is the structural representation of mesohigh rectification unit of the present invention.
Fig. 4 is the plasma photon pattern formation figure produced by the embodiment of the present invention 2；Wherein, Fig. 4（a）It is positive half cycle
Corresponding pattern formation, Fig. 4（b）It is the corresponding pattern formation of negative half period.
Fig. 5 is the plasma photon pattern formation figure produced by the embodiment of the present invention 3；Wherein, Fig. 5（a）It is positive half cycle
Corresponding pattern formation, Fig. 5（b）It is the corresponding pattern formation of negative half period.
Fig. 6 is the plasma photon pattern formation figure produced by the embodiment of the present invention 4；Wherein, Fig. 6（a）It is positive half cycle
Corresponding pattern formation, Fig. 6（b）It is the corresponding pattern formation of negative half period.
In figure：1st, high pressure plasma discharge cell, 2, high-voltage rectifying unit, 3, high voltage power supply, 4, ground terminal water electrode, 5,
First single tube high-pressure side water electrode, the 6, second single tube high-pressure side water electrode, the 7, first high-voltage diode, the pole of the 8, second high pressure two
Pipe, 9, discharging gap insulating barrier, 10, glass medium plate, 11, high input voltage conductive pole, 12, negative half period High voltage output it is conductive
Post, 13, positive half cycle High voltage output conductive pole, 14, insulation booth.
Embodiment
Embodiment 1, a kind of alternation plasma discharge apparatus.
As shown in figure 1, alternation plasma discharge apparatus provided by the present invention discharges including high pressure plasma
Unit 1, high-voltage rectifying unit 2 and high voltage power supply 3.Pass through height between high pressure plasma discharge cell 1 and high-voltage rectifying unit 2
It is high-voltage ac power to press the high voltage power supply 3 in the connection of silica gel line, the present invention.
High pressure plasma discharge cell 1 includes the high-pressure side water electrode being oppositely arranged（Right side in figure）With ground terminal water electrode
4（Left side in figure）.High-pressure side water power extremely two, respectively the first single tube high-pressure side water electrode 5 and the second single tube high-pressure side water
Electrode 6, specifically, high-pressure side water electrode are set up in parallel including two（Can be set up in parallel or same water up and down
It is set up in parallel before and after in plane）And be separated from each other（Or isolation）Single tube, each single tube be cylinder insulation cavity knot
Structure, the diameter of two single tubes can be with identical（As shown in the figure）, can also be different；It is situated between in the both ends of the surface of each single tube provided with glass
Scutum, the glass medium plate of two same ends of single tube can be two pieces of a monoblock or separation；On two single tubes
Water injection hole is equipped with, distilled water is injected into two single tubes by water injection hole, the He of the first single tube high-pressure side water electrode 5 is formed
Second single tube high-pressure side water electrode 6.Two high-pressure side water electrodes are used separately as positive half cycle and negative half period plasma discharge.
Ground terminal water electrode can be one（As shown in the figure）, or two.The body junction of ground terminal water electrode 4 in Fig. 1
Structure is a cylinder insulation cavity, and the diameter of cylinder insulation cavity is more than the diameter sum of two high-pressure side water electrodes,
Specifically, lateral wall is flushed with lateral wall above the first single tube high-pressure side water electrode 5 above cylinder insulation cavity, should
Lateral wall is flushed with lateral wall below the second single tube high-pressure side water electrode 6 below cylinder insulation cavity.In the cylinder
The both ends of the surface of insulation cavity are also equipped with glass medium plate 10.Water injection hole is provided with the side wall of cylinder insulation cavity, is passed through
Water injection hole injects distilled water into cylinder insulation cavity, and then forms ground terminal water electrode 4.When ground terminal water electrode is two
When, ground terminal water electrode can also be formed, now as high-pressure side water electrode by the single tube for setting two juxtapositions and separating
It should ensure that two single tubes of ground terminal water electrode are corresponded with two single tubes of high-pressure side water electrode.
Copper electrode is respectively arranged with high-pressure side water electrode and ground terminal water electrode 4.In high-pressure side water electrode and ground terminal water
Discharging gap insulating barrier 9 closely is placed between electrode 4, i.e.,：Between the glass medium plate of the right side of ground terminal water electrode 4, electric discharge
Gap insulation dividing plate 9 and high-pressure side water electrode（Including the first single tube high-pressure side water electrode 5 being set up in parallel and the second single tube high pressure
Hold water electrode 6）The glass medium plate three of left side is sequentially close together.Discharging gap insulating barrier 9 can be a monoblock
Insulating barrier or independence, two pieces of insulating barriers of separation；If two pieces of insulating barriers, then each piece of insulating barrier pair
Answer a high-pressure side water electrode.
Two shapes, the through hole of size all same are formed with discharging gap insulating barrier 9, two through holes correspond to height respectively
Two single tubes of pressure side water electrode, and the two through holes constitute discharging gap space.The shape of through hole can be circular, triangle
Shape, square, rectangle, pentagon, hexagon, heptagon or octagon etc. regular shape or irregular shape.Two lead to
It can connect, can not also connect between hole.As shown in Fig. 2 in Fig. 2（a）Figure shows two manholes, and the two are logical
Do not connected between hole, Fig. 2（b）In be connected by elongated strip shaped through hole between two manholes.For Fig. 2（b）Shown feelings
Shape, can study the creeping discharge situation of elongated strip shaped through hole.Discharging gap border can be by glass, quartz glass or plastics
Material makes.
Mesohigh plasma discharge cells 1 of the present invention are placed in high pressure vacuum electric discharge tank；First single tube high-pressure side water power
Two copper electrodes in the single tube high-pressure side water electrode 6 of pole 5 and second connect two high-voltage connections of high pressure vacuum electric discharge tank respectively
The ground connection terminal of copper electrode connection high pressure vacuum electric discharge tank in post, ground terminal water electrode 4.High pressure vacuum electric discharge tank is closed, and
It is evacuated down to reasonable atmospheric pressure value；Backward high pressure vacuum electric discharge tank in be filled with appropriate argon gas, with high-pressure side water electrode and ground
The mixed gas that air and argon gas are formed in the discharging gap between water electrode 4 is held, the mixed gas is discharge gas.
With reference to Fig. 3, it is conductive that high-voltage rectifying unit includes the first high-voltage diode 7, the second high-voltage diode 8, high input voltage
Post 11, positive half cycle High voltage output conductive pole 13, negative half period High voltage output conductive pole 12 and insulation booth 14.First high-voltage diode 7
Carry out exchanging positive half cycle and negative half period rectification respectively with the second high-voltage diode 8, and for plasma electrion.First is high
The pressure high-voltage diode 8 of diode 7 and second is fixedly installed on inside insulation booth 14, high input voltage conductive pole 11, positive half cycle high pressure
Output conductive pole 13 and negative half period High voltage output conductive pole 12 are embedded in insulation booth 14.Inside insulation booth 14, first is high
The positive pole connection negative half period High voltage output conductive pole 12 of diode 7 is pressed, the negative pole connection high input voltage of the first high-voltage diode 7 is led
Electric post 11；The positive pole connection high input voltage conductive pole 11 of second high-voltage diode 8, the negative pole connection of the second high-voltage diode 8 is just
Half cycle High voltage output conductive pole 13.Outside insulation booth 14, high input voltage conductive pole 11 connects the high-pressure side of high voltage power supply 3, high
The ground connection terminal of the ground terminal connection high pressure vacuum electric discharge tank of voltage source 3；Positive half cycle High voltage output conductive pole 13 connects the second single tube
Copper electrode in high-pressure side water electrode 6, negative half period High voltage output conductive pole 12 connects the copper in the first single tube high-pressure side water electrode 5
Electrode.
Alternation plasma discharge experimental procedure is：
（1）Fill distilled water respectively into high-pressure side water electrode and ground terminal water electrode, select suitable discharging gap insulating barrier,
And place as shown in Figure 1.
（2）High pressure plasma discharge cell is integrally put into high pressure vacuum electric discharge tank（Figure is omited）, high-pressure side water electrode
Two interior copper electrodes connect the copper electrode connection in two high tension terminals of high pressure vacuum electric discharge tank, ground terminal water electrode respectively
The ground connection terminal of high pressure vacuum electric discharge tank；The High voltage output of high voltage power supply terminates the high input voltage conductive pole of high-voltage rectifying unit,
Positive half cycle High voltage output conductive pole and negative half period High voltage output conductive pole connect two high-voltage connections of high pressure vacuum electric discharge tank respectively
Post, the ground connection terminal of the ground connection termination high pressure vacuum electric discharge tank of high voltage power supply.
（3）High pressure vacuum electric discharge tank is closed, and it is evacuated down to reasonable atmospheric pressure value；It is filled with appropriate argon gas.
（4）High voltage power supply output is incrementally increased, general control discharge voltage frequency is 50-60kHz, and discharge voltage amplitude exists
3-4kV, the peep hole discharged by high pressure vacuum on tank observes dielectric barrier discharge phenomenon.
Sinusoidal high-tension electricity is applied on two high-pressure side water electrodes, when meeting certain discharging condition, in discharging gap
The region of discharge that two different breakdown voltages are formed in electric discharge, and positive and negative half time-of-week can be produced；By changing discharging condition bag
Include shape, the aspect ratio for changing the composition of gas in air gap, pressure, the frequency of applied voltage, amplitude and discharging gap border
Deng, discharge producing that periodicity is different in two half spaces of discharging gap, the two kinds of plasma photons of lattice constant not etc. it is brilliant
Body structure.
Positive and negative ionizing particle putting in the different region of discharges of different discharging times can be studied by the device in the present invention
Electrical phenomena, and different plasma photon crystals are formed, it is further research dielectric surface Wall charge and plasma photon
Crystal provides experimental data, industrially has wide practical use.
Apparatus of the present invention are discussed in detail with specific embodiment below and produce different bandgap structure plasmas in different spaces
The process of photonic crystal.
Embodiment 2
Alternation plasma discharge apparatus is built as shown in Figure 1, is added respectively into high-pressure side water electrode and ground terminal water electrode
Note distilled water, discharging gap insulating barrier thick selection 1.5mm, and it is identical to open up on discharging gap insulating barrier two sizes
Octagon through hole, and be connected between two octagon through holes by elongate strip through hole, two octagon through holes point
Dui Ying not two high-pressure side water electrodes.High pressure plasma discharge cell is integrally put into high pressure vacuum electric discharge tank, high-pressure side
Two copper electrodes in water electrode connect the copper electricity in two high tension terminals of high pressure vacuum electric discharge tank, ground terminal water electrode respectively
The ground connection terminal of pole connection high pressure vacuum electric discharge tank；The high input voltage of the High voltage output termination high-voltage rectifying unit of high voltage power supply is led
Electric post, positive half cycle High voltage output conductive pole and negative half period High voltage output conductive pole connects two high pressures of high pressure vacuum electric discharge tank respectively
Binding post, the ground connection terminal of the ground connection termination high pressure vacuum electric discharge tank of high voltage power supply.
High pressure vacuum electric discharge tank is closed, and vacuumize, argon gas is filled with afterwards, makes discharge gas in high pressure vacuum electric discharge tank
Air pressure is that argon gas volume content accounts for the 40% of mixed gas volume in 0.4atm, discharge gas.High voltage power supply output is incrementally increased,
The high tension voltage of high voltage power supply output is divided into positive and negative half cycle two parts through two high-voltage diodes and exported respectively, high voltage power supply
Positive half cycle output the second single tube high-pressure side water power is controlled through the second high-voltage diode and after positive half cycle High voltage output conductive pole
Pole corresponding position produces dielectric barrier discharge, and the negative half period of high voltage power supply exports through the first high-voltage diode and high through negative half period
The first single tube high-pressure side water electrode corresponding position is controlled to produce dielectric barrier discharge after pressure output conductive pole.In the present embodiment when
Additional sinusoidal voltage frequency is 53kHz, when applied voltage is 4kV, and the peep hole discharged by high pressure vacuum on tank observes two
The dielectric barrier discharge phenomenon produced in octagon through hole, acquired results are as shown in Figure 4.Fig. 4（a）It is positive half cycle High voltage output
Conductive pole connects the plasma photon spot figure produced in high-pressure side water electrode correspondence discharging gap（Spot corresponding to i.e. positive half cycle
Figure）, Fig. 4（b）It is that negative half period High voltage output conductive pole connects the plasma produced in high-pressure side water electrode correspondence discharging gap
Photon spot figure（That is the corresponding spot figure of negative half period）.Although the corresponding spot figure of positive half cycle spot figure corresponding with negative half period is different in theory
When occur, but because discharge frequency is higher, therefore visually see that both are that occur simultaneously.Fig. 4（a）Middle pattern formation, it is interior
Portion is the donut of point composition, and outside is the octagon structure convergent with border；Fig. 4（b）For cellular pattern formation.
Therefore, Fig. 4（a）And Fig. 4（b）Middle discharge wire arrangement architecture is different, and lattice constant is different, is that different plasma photons are brilliant
Body.
Embodiment 3
Compared with Example 2, two through holes in the present embodiment on discharging gap insulating barrier are square shape, discharge gas
Middle argon gas volume content accounts for the 30% of mixed gas volume, and discharge gas air pressure is 0.3atm.High voltage power supply output is incrementally increased,
Positive and negative half cycle alive outside discharges in diverse location respectively, produces plasma channel, periodic with non-region of discharge
Arrange the crystal structure that self-organizing forms different spaces different refractivity.When additional sinusoidal voltage frequency is 53kHz, applied voltage
During for 3kV, the peep hole discharged by high pressure vacuum on tank is observed the dielectric barrier discharge produced in two square through-holes and showed
As acquired results are as shown in Figure 5.Fig. 5（a）It is that positive half cycle High voltage output conductive pole connects high-pressure side water electrode correspondence discharging gap
The plasma photon spot figure of interior generation, Fig. 5（b）It is that negative half period High voltage output conductive pole connects the correspondence electric discharge of high-pressure side water electrode
The plasma photon spot figure produced in gap.Fig. 5（b）It is the square pattern structure of rule, Fig. 5（a）Apparently not, therefore
Both structures are significantly different, so lattice constant is different, it is different plasma photon crystals.
Embodiment 4
Compared with Example 2, discharging gap insulating barrier thickness is 1mm in the present embodiment, and two through holes thereon are rectangle
Argon gas volume content accounts for the 35% of mixed gas volume in shape, discharge gas, and discharge gas air pressure is 0.3atm.When it is additional just
String electric voltage frequency is 51kHz, when applied voltage is 3.5kV, and the peep hole observation two discharged by high pressure vacuum on tank is rectangular
The dielectric barrier discharge phenomenon produced in shape through hole, acquired results are as shown in Figure 6.Fig. 6（a）It is positive half cycle High voltage output conductive pole
The plasma photon spot figure produced in connect high-pressure side water electrode correspondence discharging gap, Fig. 6（b）It is that negative half period High voltage output is led
Electric post connects the plasma photon spot figure produced in high-pressure side water electrode correspondence discharging gap.Fig. 6（a）For irregular six side
Shape pattern formation, Fig. 6（b）It is cellular pattern formation, therefore both discharge wire arrangement architectures are different, lattice constant is different,
For different plasma photon crystals.
The present invention is a kind of new dielectric barrier discharge device, and this creates condition for the electric discharge of generation new model.This hair
It is bright to separate positive and negative half cycle region of discharge, control the positive-negative half-cycle different spaces respectively in same gap in plus high-pressure
Electric discharge, reduces the influence of surface charge that this half cycle deposits on glass medium plate to lower half, reduces different charge ions
Between coupling；Two kinds of plasma photon crystals with different bandgap structures can be formed in different zones by discharging, no
Only have wide practical use in industrial circle, the theoretical research for electric discharge is to study influence of the Wall charge to electric discharge also to have weight
The meaning wanted.
Claims (9)
1. a kind of alternation plasma discharge apparatus, it is characterized in that, including high pressure plasma discharge cell, high-voltage rectifying
Unit and high voltage power supply；
The high pressure plasma discharge cell includes the high-pressure side water electrode and ground terminal water electrode being oppositely arranged；The high-pressure side
Water electrode includes filling distilled water in the single tube of two juxtapositions and separation, each single tube；In the high-pressure side water electrode and institute
State and be closely placed with discharging gap insulating barrier between ground terminal water electrode, two phases are formed with the discharging gap insulating barrier
Same through hole, two through holes correspond to two single tubes of high-pressure side water electrode respectively, and two through holes constitute discharging gap spaces；
The high-voltage rectifying unit includes the first high-voltage diode and the second high-voltage diode；First high-voltage diode is just
Pole connects with a single tube of the high-pressure side water electrode, another single tube of the high-pressure side water electrode and second high pressure
The negative pole of diode connects, the positive pole of the negative pole of first high-voltage diode and second high-voltage diode with the height
The high-pressure side of voltage source connects, and the ground terminal of the high voltage power supply connects with the ground terminal water electrode.
2. alternation plasma discharge apparatus according to claim 1, it is characterized in that, the ground terminal water electrode is by one
The individual single tube for filling distilled water is constituted；The diameter of the ground terminal water electrode single tube is more than described two single pipe directs of high-pressure side water electrode
Footpath sum.
3. alternation plasma discharge apparatus according to claim 1, it is characterized in that, the ground terminal water electrode includes
Distilled water is filled in two juxtapositions and the single tube of separation, each single tube；Two single tubes of the ground terminal water electrode respectively with institute
Two single tubes for stating high-pressure side water electrode are corresponded.
4. alternation plasma discharge apparatus according to claim 1, it is characterized in that, the high-voltage rectifying unit is also
Including high input voltage conductive pole, positive half cycle High voltage output conductive pole, negative half period High voltage output conductive pole and insulation booth；Described first
The positive pole of the negative pole of high-voltage diode and second high-voltage diode passes through the high input voltage conductive pole and the high pressure
The high-pressure side of power supply connects, and the positive pole of first high-voltage diode passes through the negative half period High voltage output conductive pole and the height
One single tube of pressure side water electrode connects, and the negative pole of second high-voltage diode passes through the positive half cycle High voltage output conductive pole
Connect with another single tube of the high-pressure side water electrode；The high input voltage conductive pole, the positive half cycle High voltage output conductive pole
It is embedded in the insulation booth with the negative half period High voltage output conductive pole.
5. alternation plasma discharge apparatus according to claim 1, it is characterized in that, the high pressure plasma is put
Electric unit is placed in high pressure vacuum electric discharge tank；Discharge gas is marked with high pressure vacuum electric discharge tank, the discharge gas is
The mixed gas of air and argon gas.
6. alternation plasma discharge apparatus according to claim 1, it is characterized in that, the discharging gap insulation every
Plate is made up of an entire plate or two blocks of plates separated.
7. alternation plasma discharge apparatus according to claim 1, it is characterized in that, in the high-pressure side water electrode
Copper electrode is equipped with respectively with the ground terminal water electrode.
8. alternation plasma discharge apparatus according to claim 1, it is characterized in that, the discharging gap insulation every
Through hole is shaped as circle, triangle, square, rectangle, pentagon, hexagon, heptagon or octagon on plate.
9. alternation plasma discharge apparatus according to claim 1, it is characterized in that, the discharging gap insulation every
It is connected on plate between two through holes by bar hole.
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