CN103826379B - Nonequilibrium plasma generation device and particulate powder surface modification treatment system - Google Patents
Nonequilibrium plasma generation device and particulate powder surface modification treatment system Download PDFInfo
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Abstract
本发明公开了一种非平衡等离子体产生装置及颗粒状粉末表面改性处理系统,包括腔体、屏蔽网以及设置在腔体内的高压电极单元和低压电极单元;高压电极单元设置在高压电极绝缘盖板的下表面,高压电极单元包括多个均匀阵列排布的高压线电极,在高压电极绝缘盖板上设置有多个均匀阵列排布的第一通孔;各个高压线电极的一端与高压电极引线的一端固定;高压线电极的另一端通过高压电极固定螺栓固定,高压电极引线的另一端通过第一通孔引出;并将各个高压电极引线连接后作为非平衡等离子体产生装置的脉冲高压输入端。本发明采用了高压纳秒重复频率脉冲直接驱动大气压下空气中非平衡等离子体,放电峰值电流密度更大,产生活性粒子的效率更好,等离子体的非平衡性也更高。
The invention discloses an unbalanced plasma generating device and a granular powder surface modification treatment system, which include a cavity, a shielding net, and a high-voltage electrode unit and a low-voltage electrode unit arranged in the cavity; the high-voltage electrode unit is arranged on the high-voltage electrode insulation On the lower surface of the cover plate, the high-voltage electrode unit includes a plurality of high-voltage line electrodes arranged in a uniform array, and a plurality of first through holes arranged in a uniform array are arranged on the high-voltage electrode insulating cover plate; one end of each high-voltage line electrode is connected to the lead wire of the high-voltage electrode One end of the high-voltage wire electrode is fixed; the other end of the high-voltage wire electrode is fixed by the high-voltage electrode fixing bolt, and the other end of the high-voltage electrode lead is drawn out through the first through hole; and each high-voltage electrode lead is connected as the pulse high-voltage input end of the unbalanced plasma generating device. The invention adopts the high-voltage nanosecond repetition frequency pulse to directly drive the non-equilibrium plasma in the air under the atmospheric pressure, the discharge peak current density is higher, the efficiency of generating active particles is better, and the non-equilibrium of the plasma is also higher.
Description
技术领域technical field
本发明属于气体放电与等离子体应用领域,涉及一种非平衡等离子体产生装置及颗粒状粉末表面改性处理系统。The invention belongs to the field of gas discharge and plasma application, and relates to a non-equilibrium plasma generating device and a granular powder surface modification treatment system.
背景技术Background technique
近几年来,大气压空气非平衡等离子体由于独有的优势和巨大的应用前景受到了格外的关注。非热平衡等离子体是一种部分电离的低温等离子体,它的电子和离子温度相差很大。这种等离子体中含有大量电子、亚稳态离子、自由基等活性粒子,具有较强的反应活性,因此在能源、材料、机械加工、环境保护等诸多领域具有应用前景。其中很重要的一个研究方向是用于对材料表面改性处理的应用探索。非平衡等离子体用于材料的处理大多集中在对薄膜等宏观成品的处理,颗粒状粉末作为一种比宏观成品有更广泛和特殊用途的中间原料,对其进行表面改性处理的研究却相对较少。与薄膜或类似材料相比,颗粒状粉末材料与气体的接触面积要大得多。因而,等离子体处理后粉体的表面形态以及结构,甚至粒径大小都有可能发生显著变化。In recent years, atmospheric pressure air non-equilibrium plasma has received special attention due to its unique advantages and huge application prospects. Non-thermal equilibrium plasma is a partially ionized low-temperature plasma in which the electron and ion temperatures differ greatly. This kind of plasma contains a large number of active particles such as electrons, metastable ions, and free radicals, and has strong reactivity, so it has application prospects in many fields such as energy, materials, mechanical processing, and environmental protection. One of the most important research directions is the application exploration for surface modification of materials. Most of the non-equilibrium plasma used in the treatment of materials focuses on the treatment of macroscopic finished products such as thin films. As an intermediate material with wider and special uses than macroscopic finished products, the research on surface modification treatment of granular powder is relatively limited. less. Granular powder materials have a much larger contact area with the gas than films or similar materials. Therefore, the surface morphology and structure of the powder after plasma treatment, and even the particle size may change significantly.
目前,大气压空气非平衡等离子较成熟的产生方法是介质阻挡放电和电晕放电,如CN101838800.B。介质阻挡放电由于绝缘介质的存在,放电间隙的距离一般都比较小,影响了放电电极的结构扩展和实际应用,此外介质阻挡层在使用中可能改变性状并产生污染,其材质属性也可能对放电反应造成影响。电晕放电的不足之处是气体的电离主要集中在电极附近,很难获得整个空间大气中大体积的等离子体,且等离子体电离效率有限,产生的电子能量并不高,难以应用于大规模工业生产。因此,在常温大气压空气的自然环境中低成本、连续地产生大面积或大体积非热平衡等离子体,对于等离子体的工业化应用具有重要意义。At present, the relatively mature methods for generating non-equilibrium plasma in atmospheric pressure air are dielectric barrier discharge and corona discharge, such as CN101838800.B. Due to the existence of insulating medium, the distance of the discharge gap is generally relatively small in dielectric barrier discharge, which affects the structural expansion and practical application of the discharge electrode. In addition, the dielectric barrier layer may change its properties and cause pollution during use, and its material properties may also affect the discharge. Reaction affects. The disadvantage of corona discharge is that the ionization of the gas is mainly concentrated near the electrode, it is difficult to obtain a large volume of plasma in the entire space atmosphere, and the plasma ionization efficiency is limited, and the energy of the generated electrons is not high, so it is difficult to apply large-scale industrial production. Therefore, low-cost and continuous generation of large-area or large-volume non-thermal equilibrium plasma in the natural environment of normal temperature and atmospheric pressure air is of great significance for the industrial application of plasma.
发明内容Contents of the invention
针对现有技术的缺陷,本发明提供了一种非平衡等离子体产生装置,其目的在于解决现有等离子体放电形式存在的难以获得大体积的等离子体、能量利用效率低、放电峰值电流密度小、产生活性粒子效率低、等离子体非平衡性差、使用限制大、应用成本高等技术难题。Aiming at the defects of the prior art, the present invention provides a non-equilibrium plasma generating device, the purpose of which is to solve the problems existing in the existing plasma discharge forms that it is difficult to obtain a large volume of plasma, the energy utilization efficiency is low, and the discharge peak current density is small. , Low efficiency of generating active particles, poor plasma imbalance, large use restrictions, high application cost and other technical problems.
本发明提供了一种非平衡等离子体产生装置,包括腔体、屏蔽网以及设置在腔体内的高压电极单元和低压电极单元;所述腔体中相对的两个表面作为高压电极绝缘盖板和低压电极绝缘盖板,相对的两个侧面作为屏蔽网,另外两个相对的侧面作为密封绝缘板;所述高压电极单元设置在所述高压电极绝缘盖板的下表面,所述高压电极单元包括多个均匀阵列排布的高压线电极,在所述高压电极绝缘盖板上设置有多个均匀阵列排布的第一通孔;各个高压线电极的一端与所述高压电极引线的一端固定;所述高压线电极的另一端通过所述高压电极固定螺栓固定,所述高压电极引线的另一端通过所述第一通孔引出;并将各个高压电极引线连接后作为所述非平衡等离子体产生装置的脉冲高压输入端;所述低压电极单元设置在所述低压电极绝缘盖板的下表面,所述低压电极单元包括多个均匀阵列排布的低压线电极;在所述低压电极绝缘盖板上设置有多个均匀阵列排布的第二通孔;各个低压线电极的一端与所述低压电极引线的一端固定;所述低压线电极的另一端通过所述低压电极固定螺栓固定,所述低压电极引线的另一端通过所述第二通孔引出;并将各个低压电极引线连接后接地。The invention provides an unbalanced plasma generating device, which includes a cavity, a shielding net, and a high-voltage electrode unit and a low-voltage electrode unit arranged in the cavity; the two opposite surfaces of the cavity are used as high-voltage electrode insulating cover plates and The low-voltage electrode insulation cover plate, the two opposite sides are used as shielding nets, and the other two opposite sides are used as sealing insulation plates; the high-voltage electrode unit is arranged on the lower surface of the high-voltage electrode insulation cover plate, and the high-voltage electrode unit includes A plurality of high-voltage line electrodes arranged in a uniform array, a plurality of first through holes arranged in a uniform array are arranged on the insulating cover plate of the high-voltage electrodes; one end of each high-voltage line electrode is fixed to one end of the lead wire of the high-voltage electrode; The other end of the high-voltage wire electrode is fixed by the high-voltage electrode fixing bolt, and the other end of the high-voltage electrode lead is drawn out through the first through hole; and each high-voltage electrode lead is connected as the pulse of the unbalanced plasma generating device. High-voltage input terminal; the low-voltage electrode unit is arranged on the lower surface of the low-voltage electrode insulating cover plate, and the low-voltage electrode unit includes a plurality of low-voltage line electrodes arranged in a uniform array; the low-voltage electrode insulating cover plate is provided with A plurality of second through holes arranged in a uniform array; one end of each low-voltage line electrode is fixed to one end of the low-voltage electrode lead; the other end of the low-voltage line electrode is fixed by the low-voltage electrode fixing bolt, and the low-voltage electrode lead The other end of the electrode is led out through the second through hole; and each low-voltage electrode lead is connected to the ground.
其中,所述高压线电极和所述低压线电极的结构相同,所述高压线电极的直径为0.2mm至1mm;所述高压线电极的长度为10cm至200cm。Wherein, the structure of the high voltage line electrode and the low voltage line electrode is the same, the diameter of the high voltage line electrode is 0.2 mm to 1 mm; the length of the high voltage line electrode is 10 cm to 200 cm.
其中,所述高压线电极和低压线电极的垂直间距为2cm至8cm,所述高压电极单元中的各个高压线电极的水平间距为5cm至15cm。Wherein, the vertical distance between the high-voltage line electrodes and the low-voltage line electrodes is 2 cm to 8 cm, and the horizontal distance between the high-voltage line electrodes in the high-voltage electrode unit is 5 cm to 15 cm.
其中,所述非平衡等离子体产生装置的脉冲高压输入端接收的纳秒脉冲的重复频率为100Hz至1000Hz,电压幅值为50kV至150kV,单次高压脉冲的上升沿时间为30ns。Wherein, the repetition frequency of nanosecond pulses received by the pulse high voltage input terminal of the unbalanced plasma generating device is 100 Hz to 1000 Hz, the voltage amplitude is 50 kV to 150 kV, and the rising edge time of a single high voltage pulse is 30 ns.
其中,所述屏蔽网的网孔直径为0.5mm。Wherein, the mesh diameter of the shielding net is 0.5 mm.
本发明还提供了一种颗粒状粉末表面改性处理系统,包括非平衡等离子体产生装置、脉冲发生器和收纳笼,所述脉冲发生器通过高压导线与所述非平衡等离子体产生装置的脉冲高压输入端连接;所述收纳笼用于收集已处理颗粒;所述非平衡等离子体产生装置为上述的非平衡等离子体产生装置。The present invention also provides a granular powder surface modification treatment system, including a non-equilibrium plasma generating device, a pulse generator and a storage cage. The high-voltage input end is connected; the storage cage is used to collect processed particles; the non-equilibrium plasma generation device is the above-mentioned non-equilibrium plasma generation device.
本发明能够带来如下技术效果:The present invention can bring following technical effect:
(1)采用了高压纳秒重复频率脉冲直接驱动大气压下空气中非平衡等离子体,实验结果显示,相比于介质阻挡放电和电晕放电,这种放电形式中放电峰值电流密度更大,产生活性粒子的效率更好,等离子体的非平衡性也更高。(1) A high-voltage nanosecond repetition frequency pulse is used to directly drive the non-equilibrium plasma in the air under atmospheric pressure. The experimental results show that compared with the dielectric barrier discharge and corona discharge, the discharge peak current density in this discharge form is higher, resulting in The efficiency of the active particles is better and the non-equilibrium of the plasma is higher.
(2)线阵列电极可有不同的长度和数量,可以增大放电中大气压非平衡等离子分布的体积,从而让空气电离区充满在整个放电装置中,提高了脉冲电源能量的利用效率。(2) The line array electrodes can have different lengths and numbers, which can increase the volume of the atmospheric pressure non-equilibrium plasma distribution in the discharge, so that the air ionization area can be filled in the entire discharge device, and the energy utilization efficiency of the pulse power supply can be improved.
(3)线阵列电极设置于开放的常温常压空气环境下,不需要复杂的介质阻挡绝缘层,摒弃了昂贵且繁琐的真空、充气系统,容易构造出结构紧凑、重量轻、体积小、性能稳定的非平衡等离子体产生装置。从而使得它的使用限制较小,应用成本大大降低。(3) The line array electrode is set in an open air environment at normal temperature and pressure, does not require complicated dielectric barrier insulating layers, and abandons expensive and cumbersome vacuum and inflation systems. It is easy to construct a Stable non-equilibrium plasma generator. Thereby making its use less restrictive, and the application cost is greatly reduced.
附图说明Description of drawings
图1是本发明非平衡等离子体产生装置及颗粒状粉末表面改性处理系统示意图。Fig. 1 is a schematic diagram of a non-equilibrium plasma generating device and a surface modification treatment system for granular powders of the present invention.
图2是本发明非平衡等离子体产生装置的正面示意图。Fig. 2 is a schematic front view of the non-equilibrium plasma generating device of the present invention.
图3是本发明非平衡等离子体产生装置的反面示意图。Fig. 3 is a schematic view of the reverse side of the non-equilibrium plasma generating device of the present invention.
在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:Throughout the drawings, the same reference numerals are used to designate the same elements or structures, wherein:
1为非平衡等离子体产生装置,101为高压线电极;102为低压线电极;103为高压电极引线;104为低压电极引线;105为高压电极绝缘盖板;106为低压电极绝缘盖板;107为第一通孔;108为第二通孔;109为等离子体产生区域;110为左侧屏蔽网;111为右侧屏蔽网;112为侧面绝缘盖板;113为高压电极固定螺栓;114为低压电极固定螺栓;2为脉冲发生器;3为待处理颗粒;4为已处理颗粒;5为收纳笼;51为半开口绝缘盒;52为静电屏蔽板。1 is an unbalanced plasma generating device, 101 is a high-voltage line electrode; 102 is a low-voltage line electrode; 103 is a high-voltage electrode lead; 104 is a low-voltage electrode lead; 105 is a high-voltage electrode insulation cover; 106 is a low-voltage electrode insulation cover; 107 is 108 is the second through hole; 109 is the plasma generation area; 110 is the left shielding mesh; 111 is the right shielding mesh; 112 is the side insulation cover plate; 113 is the high voltage electrode fixing bolt; 114 is the low voltage Electrode fixing bolts; 2 is a pulse generator; 3 is particles to be processed; 4 is processed particles; 5 is a storage cage; 51 is a half-open insulating box; 52 is an electrostatic shielding plate.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
本发明实施例提供的非平衡等离子体产生装置1可以应用于材料的表面改性处理,医疗仪器设备的杀菌消毒等。图1示出了该非平衡等离子体产生装置1的结构,为了便于说明,仅示出了与本发明实施例相关的部分,现详述如下:The non-equilibrium plasma generating device 1 provided by the embodiment of the present invention can be applied to surface modification treatment of materials, sterilization and disinfection of medical instruments and equipment, and the like. Fig. 1 shows the structure of the non-equilibrium plasma generating device 1, and for the convenience of explanation, only shows the part related to the embodiment of the present invention, which is now described in detail as follows:
非平衡等离子体产生装置1包括腔体、屏蔽网以及设置在腔体内的高压电极单元和低压电极单元;其中腔体可以为长方体腔体;长方体腔体中相对的两个表面分别为高压电极绝缘盖板105和低压电极绝缘盖板106;长方体腔体中相对的两个侧面为屏蔽网110、111;长方体腔体中另外两个相对的侧面为密封绝缘板112。The unbalanced plasma generating device 1 includes a cavity, a shielding net, and a high-voltage electrode unit and a low-voltage electrode unit arranged in the cavity; wherein the cavity can be a cuboid cavity; the opposite surfaces of the cuboid cavity are respectively high-voltage electrode insulation The cover plate 105 and the low-voltage electrode insulation cover plate 106; the two opposite sides of the cuboid cavity are shielding nets 110, 111; the other two opposite sides of the cuboid cavity are sealing insulating plates 112.
高压电极单元设置在高压电极绝缘盖板105的下表面,高压电极单元包括多个均匀阵列排布的高压线电极101;在高压电极绝缘盖板105上设置有多个均匀阵列排布的第一通孔107;各个高压线电极101的一端与高压电极引线103的一端固定;高压线电极101的另一端通过高压电极固定螺栓113固定,高压电极引线103的另一端通过第一通孔107引出;并将各个高压电极引线103连接后作为非平衡等离子体产生装置1的脉冲高压输入端。The high-voltage electrode unit is arranged on the lower surface of the high-voltage electrode insulating cover plate 105. The high-voltage electrode unit includes a plurality of high-voltage line electrodes 101 arranged in a uniform array; Holes 107; one end of each high-voltage line electrode 101 is fixed to one end of the high-voltage electrode lead wire 103; the other end of the high-voltage line electrode 101 is fixed by a high-voltage electrode fixing bolt 113, and the other end of the high-voltage electrode lead wire 103 is drawn through the first through hole 107; and each The high-voltage electrode leads 103 are connected as the pulse high-voltage input end of the unbalanced plasma generating device 1 .
低压电极单元设置在低压电极绝缘盖板106的下表面,低压电极单元包括多个均匀阵列排布的低压线电极102;在低压电极绝缘盖板106上设置有多个均匀阵列排布的第二通孔108;各个低压线电极102的一端与低压电极引线104的一端固定;低压线电极102的另一端通过低压电极固定螺栓114固定,低压电极引线104的另一端通过第二通孔108引出;并将各个低压电极引线103连接后接地。The low-voltage electrode unit is arranged on the lower surface of the low-voltage electrode insulating cover plate 106. The low-voltage electrode unit includes a plurality of low-voltage line electrodes 102 arranged in a uniform array; Through hole 108; one end of each low-voltage line electrode 102 is fixed to one end of low-voltage electrode lead 104; the other end of low-voltage line electrode 102 is fixed by low-voltage electrode fixing bolt 114, and the other end of low-voltage electrode lead 104 is drawn through the second through hole 108; And each low-voltage electrode lead 103 is connected to ground.
在本发明实施例中,高压电极引线103与低压电极引线104不能设置在同一个平面,以避免电极引线间形成的电场影响到线电极之间的电场分布,从而造成非平衡等离子体的产生区域集中在装置的一侧;将高压电极引线103与低压电极引线104分别设置在高压电极绝缘盖板105和106的两侧。In the embodiment of the present invention, the high-voltage electrode leads 103 and the low-voltage electrode leads 104 cannot be arranged on the same plane, so as to avoid the electric field formed between the electrode leads from affecting the electric field distribution between the line electrodes, thereby causing an unbalanced plasma generation area Concentrate on one side of the device; the high-voltage electrode leads 103 and the low-voltage electrode leads 104 are respectively arranged on both sides of the high-voltage electrode insulating cover plates 105 and 106 .
在实际工作中,高压重复频率纳秒脉冲施加在高、低压电极引线103、104的两端,从而在高、低线阵列电极之间形成极不均匀电场,该极不均匀场使得空气发生放电。随着高、低线阵列电极之间的距离的改变,放电的形式也将发生改变。适当地选取高、低线阵列电极之间的距离,可得到介于火花放电和电晕放电之间的弥散状辉光放电。弥散状辉光放电产生的大气压非平衡等离子体均匀在分布于高、低线阵列电极之间。In actual work, the high-voltage repetition frequency nanosecond pulse is applied to the two ends of the high and low voltage electrode leads 103, 104, thereby forming an extremely uneven electric field between the high and low line array electrodes, and the extremely uneven field causes the air to discharge . As the distance between the high and low line array electrodes changes, the form of the discharge will also change. Appropriately selecting the distance between the high and low line array electrodes can obtain a diffuse glow discharge between spark discharge and corona discharge. The atmospheric pressure non-equilibrium plasma generated by the diffuse glow discharge is evenly distributed between the high and low line array electrodes.
总体而言,通过本发明所构思的以上技术方案与现有技术相比,能够获得下列优势:Generally speaking, compared with the prior art, the above technical solution conceived by the present invention can obtain the following advantages:
(1)该装置采用了高压纳秒重复频率脉冲直接驱动大气压下空气中非平衡等离子体的方法,实验结果显示,相比于介质阻挡放电和电晕放电,这种放电形式中放电峰值电流密度更大,产生活性粒子的效率更好,等离子体的非平衡性也更高。(1) The device uses a high-voltage nanosecond repetition frequency pulse to directly drive non-equilibrium plasma in air under atmospheric pressure. The experimental results show that compared with dielectric barrier discharge and corona discharge, the discharge peak current density in this discharge form Larger, more efficient generation of active particles and higher plasma non-equilibrium.
(2)该装置中,线阵列电极可有不同的长度和数量,可以增大放电中大气压非平衡等离子分布的体积,从而让空气电离区充满在整个放电装置中,提高了脉冲电源能量的利用效率。(2) In this device, the line array electrodes can have different lengths and numbers, which can increase the volume of the atmospheric pressure non-equilibrium plasma distribution in the discharge, so that the air ionization area is filled in the entire discharge device, and the utilization of pulse power energy is improved. efficiency.
(3)该装置中,线阵列电极设置于开放的常温常压空气环境下,不需要复杂的介质阻挡绝缘层,摒弃了昂贵且繁琐的真空、充气系统,容易构造出结构紧凑、重量轻、体积小、性能稳定的非平衡等离子体产生装置。从而使得它的使用限制较小,应用成本大大降低。(3) In this device, the line array electrode is set in an open air environment at normal temperature and pressure, without the need for a complicated dielectric barrier insulating layer, and the expensive and cumbersome vacuum and inflation system is abandoned, and it is easy to construct a compact, light-weight, An unbalanced plasma generator with small size and stable performance. Thereby making its use less restrictive, and the application cost is greatly reduced.
在本发明实施例中,高压线电极101和低压线电极102均可以采用线状电极,采用线电极的主要原因在于线电极的曲率半径小,更容易在电极之间形成极不均匀电场,而极不均匀电场是产生大气压非平衡等离子体的必要条件。高压线电极101和低压线电极102可以采用由铜、铝、石墨等导体制作,制作电极的工艺属于本领域技术人员能够获知的公知技术,在此不再赘述。In the embodiment of the present invention, both the high-voltage wire electrode 101 and the low-voltage wire electrode 102 can use wire-shaped electrodes. An inhomogeneous electric field is a necessary condition for generating non-equilibrium plasma at atmospheric pressure. The high-voltage line electrode 101 and the low-voltage line electrode 102 can be made of copper, aluminum, graphite and other conductors. The process of making electrodes belongs to the known technology known to those skilled in the art, and will not be repeated here.
在本发明实施例中,左、右侧屏蔽网以及高、低压电极固定螺栓均为绝缘材料制成,屏蔽网网孔直径取为0.5mm。屏蔽网的作用为滤除大直径杂志颗粒进入非平衡等离子体产生装置1,并且保证非平衡等离子体产生装置1的内部工作条件始终保持为大气压空气条件,摒弃了昂贵且繁琐的真空、充气系统,使得装置的使用条件不受限制。In the embodiment of the present invention, the left and right shielding nets and the high and low voltage electrode fixing bolts are all made of insulating materials, and the mesh diameter of the shielding net is 0.5mm. The role of the shielding net is to filter out large-diameter magazine particles entering the unbalanced plasma generator 1, and to ensure that the internal working conditions of the unbalanced plasma generator 1 are always maintained at atmospheric pressure air conditions, and expensive and cumbersome vacuum and gas filling systems are discarded , so that the conditions of use of the device are not limited.
在本发明实施例中,高压线电极101和低压线电极102的直径可以选为0.2mm至1mm。高压线电极101和低压线电极102的长度调节范围可以在10cm至200cm之间。高、低压线电极101、102直径和长度的设置主要是以形成电极间极不均匀电场为目的,这也是空气中非平衡等离子体产生的必要条件之一。In the embodiment of the present invention, the diameters of the high-voltage line electrodes 101 and the low-voltage line electrodes 102 may be selected from 0.2 mm to 1 mm. The length adjustment range of the high-voltage wire electrode 101 and the low-voltage wire electrode 102 can be between 10 cm and 200 cm. The diameter and length of the high and low voltage line electrodes 101 and 102 are set mainly for the purpose of forming an extremely uneven electric field between the electrodes, which is also one of the necessary conditions for the generation of non-equilibrium plasma in the air.
其中,高压线电极101和低压线电极102的垂直间距可以在2cm到8cm之间,高压电极单元中的各个高压线电极101的水平间距可以在5cm到15cm之间。低压电极单元中各个低压线电极102的设置与高压电极单元中的电极设置相同。高、低压线电极101、102垂直间距和水平间距的设置同样是以形成电极间极不均匀电场为目的,实验发现,随着电极垂直间距的减小,放电由弥散形的辉光放电向丝状的火花放电形式发展,而随着电极垂直间距的增大,放电由弥散形的辉光放电向微弱的电晕放电发展。同样,随着电极水平间距的减小,放电由弥散形的辉光放电向丝状的火花放电形式发展,而随着电极水平间距的增大,放电由大体积弥散形的辉光放电向各自独立的弥散形辉光放电发展。Wherein, the vertical distance between the high-voltage line electrodes 101 and the low-voltage line electrodes 102 can be between 2 cm and 8 cm, and the horizontal distance between the high-voltage line electrodes 101 in the high-voltage electrode unit can be between 5 cm and 15 cm. The arrangement of each low-voltage line electrode 102 in the low-voltage electrode unit is the same as that in the high-voltage electrode unit. The vertical and horizontal spacings of the high and low-voltage line electrodes 101 and 102 are also set for the purpose of forming an extremely uneven electric field between the electrodes. Experiments have found that as the vertical spacing of the electrodes decreases, the discharge changes from a diffuse glow discharge to the wire. The form of spark discharge develops, and with the increase of the vertical distance between electrodes, the discharge develops from diffuse glow discharge to weak corona discharge. Similarly, as the horizontal spacing of electrodes decreases, the discharge develops from diffuse glow discharge to filamentary spark discharge, and as the horizontal spacing of electrodes increases, the discharge develops from large-volume diffuse glow discharge to individual A separate diffuse glow discharge develops.
在本发明实施例中,非平衡等离子体产生装置1的脉冲高压输入端接收的纳秒脉冲的重复频率在100Hz到1000Hz内,电压幅值在50kV到150kV内,单次高压脉冲的上升沿时间为30ns。脉冲高压的幅值和上升沿的选择同样是以形成电极间极不均匀电场为目的,这也是空气中非平衡等离子体产生的一个必要条件。实验发现,随着高压脉冲的上升沿时间的减小,放电由丝状的火花放电形式发展为能够产生非平衡等离子体的弥散形辉光放电,而纳秒脉冲的幅值越大,频率越高,辉光放电的放电强度越大,并逐步使得放电由弥散形的辉光放电向丝状的火花放电形式发展。In the embodiment of the present invention, the repetition frequency of the nanosecond pulses received by the pulsed high-voltage input terminal of the unbalanced plasma generating device 1 is within 100 Hz to 1000 Hz, the voltage amplitude is within 50 kV to 150 kV, and the rising edge time of a single high-voltage pulse is 30ns. The selection of the amplitude and rising edge of the pulse high voltage is also aimed at forming an extremely uneven electric field between the electrodes, which is also a necessary condition for the generation of non-equilibrium plasma in the air. Experiments have found that as the rising time of the high-voltage pulse decreases, the discharge develops from a filamentous spark discharge to a diffuse glow discharge that can generate non-equilibrium plasma, and the greater the amplitude of the nanosecond pulse, the higher the frequency. The higher the discharge intensity, the greater the discharge intensity of the glow discharge, and gradually make the discharge develop from diffuse glow discharge to filamentary spark discharge.
为了更进一步的说明本发明实施例提供的非平衡等离子体产生装置1,现结合具体实例详述如下:In order to further illustrate the non-equilibrium plasma generating device 1 provided by the embodiment of the present invention, it is now described in detail in conjunction with specific examples as follows:
在实践过程中,通过调节高压纳秒脉冲的幅值、上升沿时间和重复频率,以及调节线阵列电极的材料、直径、长度、水平间距、垂直间距、线电极数量,设计并完成了大量的放电实验,获得了大量得到大体积弥散放电的实例经验,具体举例如下。In practice, by adjusting the amplitude, rising edge time and repetition frequency of high-voltage nanosecond pulses, as well as adjusting the material, diameter, length, horizontal spacing, vertical spacing, and number of wire array electrodes, a large number of In the discharge experiment, a large number of examples of large-volume diffuse discharge have been obtained. The specific examples are as follows.
本实施例为一种产生空气中非平衡等离子用于颗粒状粉末表面改性处理的装置,其结构布局示意图如图1、图2、图3所示。高压线电极101和低压线电极102为直径0.8mm、长度100cm的石墨丝,高、低压线阵列电极线的数量分别为6根,线阵列电极间的垂直间距为4cm,水平间距为12cm。非平衡等离子体产生装置1的脉冲高压输入端输入脉冲幅值为120kV,上升沿时间为30ns,重复频率为500Hz,待处理颗粒4为纳米炭黑。实验中产生大体积弥散放电等离子体,并使纳米炭黑材料属性在处理后得到改善。This embodiment is a device for generating non-equilibrium plasma in the air for surface modification treatment of granular powder, and its structural layout is shown in Fig. 1 , Fig. 2 and Fig. 3 . The high-voltage line electrode 101 and the low-voltage line electrode 102 are graphite wires with a diameter of 0.8mm and a length of 100cm. The number of high-voltage and low-voltage line array electrode lines is 6 respectively. The vertical spacing between the line array electrodes is 4cm, and the horizontal spacing is 12cm. The input pulse amplitude of the pulse high voltage input terminal of the unbalanced plasma generating device 1 is 120kV, the rising edge time is 30ns, the repetition frequency is 500Hz, and the particle 4 to be treated is nano-carbon black. In the experiment, a large-volume diffuse discharge plasma was generated, and the properties of the nano-carbon black material were improved after treatment.
本发明实施例提供的非平衡等离子体产生装置1中各个参数的具体实例详见下表:The specific examples of each parameter in the non-equilibrium plasma generating device 1 provided by the embodiment of the present invention are detailed in the following table:
表1Table 1
本发明实施例提供的非平衡等离子体产生装置1可以应用于颗粒状粉末表面改性处理系统中,如图1所示,颗粒状粉末表面改性处理系统包括非平衡等离子体产生装置1、脉冲发生器2和收纳笼5;其中脉冲发生器2通过高压导线与非平衡等离子体产生装置1的脉冲高压输入端连接;待处理颗粒3由吹风机将其透过左侧屏蔽网后吹入非平衡等离子体产生装置中,进入等离子体产生区域,颗粒状粉末材料在经过等离子体表面改性处理后,已处理颗粒4在吹风机的风力下透过右侧屏蔽网111进入收纳笼5。最终,已处理颗粒4在表面静电吸附力的作用下,沉积在静电屏蔽板下,从而完成颗粒粉末材料的收集。The non-equilibrium plasma generation device 1 provided by the embodiment of the present invention can be applied to a granular powder surface modification treatment system. As shown in Figure 1, the granular powder surface modification treatment system includes an non-equilibrium plasma generation device 1, a The generator 2 and the storage cage 5; wherein the pulse generator 2 is connected to the pulse high-voltage input end of the unbalanced plasma generating device 1 through a high-voltage wire; In the plasma generation device, after entering the plasma generation area, the granular powder material is subjected to plasma surface modification treatment, and the treated particles 4 enter the storage cage 5 through the right shielding net 111 under the wind force of the blower. Finally, the processed particles 4 are deposited under the electrostatic shielding plate under the action of surface electrostatic adsorption, thereby completing the collection of particle powder materials.
其中,非平衡等离子体产生装置1包括高压线电极101、低压线电极102、高压电极引线103、低压电极引线104、高压电极绝缘盖板105、低压电极绝缘盖板106、第一通孔107、第二通孔108、等离子体产生区域109、左侧屏蔽网110、右侧屏蔽网111、侧面绝缘盖板112、高压电极固定螺栓113、低压电极固定螺栓114。Among them, the unbalanced plasma generating device 1 includes a high-voltage line electrode 101, a low-voltage line electrode 102, a high-voltage electrode lead 103, a low-voltage electrode lead 104, a high-voltage electrode insulating cover plate 105, a low-voltage electrode insulating cover plate 106, a first through hole 107, and a first through hole 107. Two through holes 108 , plasma generation area 109 , left shielding mesh 110 , right shielding mesh 111 , side insulation cover 112 , high voltage electrode fixing bolts 113 , and low voltage electrode fixing bolts 114 .
收纳笼5包括半开口绝缘盒51和静电屏蔽板52。The storage cage 5 includes a semi-open insulating box 51 and an electrostatic shielding plate 52 .
非平衡等离子体产生装置1为长方体型非平衡等离子体产生装置,整个发生器的结构设计和布置方式呈前后中心对称式。非平衡等离子体产生装置1的上下表面由高压电极绝缘盖板105和低压电极绝缘盖板106构成。高压线电极101安置于高压电极绝缘盖板105的下表面,低压线电极102安置于高压电极绝缘盖板106的上表面。第一通孔107位于高压电极绝缘盖板105的一端,第二通孔108则位于低压电极绝缘盖板106的一端。高压电极引线103通过第一通孔107向下引出,低压电极引线104通过第二通孔108向上引出。高压线电极101的一端通过缠绕的方式与高压电极引线103的下端固定,并取得可靠电气连接;高压线电极101的另一端则通过高压电极固定螺栓113固定。同样的,低压线电极102的一端通过缠绕的方式与高压电极引线104的上端固定,并取得可靠电气连接;低压线电极102的另一端则通过低压电极固定螺栓114固定。为避免高、低压电极引线之间的电场引起线阵列电极之间的电场产生畸变,高压线电极101和低压线电极102与各自引线的连接端并不取在同一个竖直面上,而是分别固定在非平衡等离子体产生装置1的前后两端。同时,高压线电极101和低压线电极102与高、低压绝缘盖板之间的固定均为可拆卸连接,以方便在实际应用中的电极更换。The unbalanced plasma generating device 1 is a rectangular parallelepiped unbalanced plasma generating device, and the structural design and arrangement of the entire generator are front-back and center-symmetrical. The upper and lower surfaces of the unbalanced plasma generator 1 are composed of a high-voltage electrode insulating cover plate 105 and a low-voltage electrode insulating cover plate 106 . The high-voltage line electrode 101 is placed on the lower surface of the high-voltage electrode insulating cover plate 105 , and the low-voltage line electrode 102 is placed on the upper surface of the high-voltage electrode insulating cover plate 106 . The first through hole 107 is located at one end of the high voltage electrode insulating cover plate 105 , and the second through hole 108 is located at one end of the low voltage electrode insulating cover plate 106 . The high-voltage electrode leads 103 are led downward through the first through hole 107 , and the low-voltage electrode lead 104 is led upward through the second through hole 108 . One end of the high-voltage wire electrode 101 is fixed to the lower end of the high-voltage electrode lead wire 103 by winding, and a reliable electrical connection is obtained; the other end of the high-voltage wire electrode 101 is fixed by a high-voltage electrode fixing bolt 113 . Similarly, one end of the low-voltage line electrode 102 is fixed to the upper end of the high-voltage electrode lead wire 104 by winding, and a reliable electrical connection is obtained; the other end of the low-voltage line electrode 102 is fixed by a low-voltage electrode fixing bolt 114 . In order to avoid distortion of the electric field between the line array electrodes caused by the electric field between the high-voltage and low-voltage electrode leads, the connection ends of the high-voltage line electrodes 101 and the low-voltage line electrodes 102 and the respective leads are not taken on the same vertical plane, but are respectively It is fixed at the front and rear ends of the unbalanced plasma generating device 1 . At the same time, the fixing between the high-voltage wire electrode 101 and the low-voltage wire electrode 102 and the high-voltage and low-voltage insulating cover plates are all detachable connections, so as to facilitate electrode replacement in practical applications.
等离子体产生区域109位于高压线电极101和低压线电极102之间。非平衡等离子体产生装置1的左右两侧分别为左侧屏蔽网110和右侧屏蔽网111,前后两侧为侧面绝缘盖板112,这三者与高压电极绝缘盖板105和低压电极绝缘盖板106共同构成了大气压下半封闭型的等离子体发生腔体。The plasma generation region 109 is located between the high voltage line electrode 101 and the low voltage line electrode 102 . The left and right sides of the unbalanced plasma generating device 1 are respectively a left shielding net 110 and a right shielding net 111, and the front and rear sides are side insulating covers 112, which are connected with the high voltage electrode insulating cover 105 and the low voltage electrode insulating cover. The plates 106 together constitute a semi-closed plasma generation chamber under atmospheric pressure.
本发明中,高压线电极101和低压线电极102为导电细丝,可由铜、铝等金属导体制作,也可由石墨等非金属导体制作。高压线电极101和低压线电极102的数量可调,具体可在1至20根之间调节。高压线电极101和低压线电极102的直径在0.2mm至1mm之间。高压线电极101和低压线电极102的长度亦可调节,具体调节范围在10cm到至200cm之间。弥散放电非平衡热等离子体仅能在极不均匀电场的条件下产生,鉴于此,高压线电极101和低压线电极102的垂直间距取在2cm到8cm之间,水平间距取在5cm到15cm之间。In the present invention, the high-voltage line electrode 101 and the low-voltage line electrode 102 are conductive filaments, which can be made of metal conductors such as copper and aluminum, or non-metallic conductors such as graphite. The number of high-voltage line electrodes 101 and low-voltage line electrodes 102 is adjustable, specifically, it can be adjusted between 1 and 20. The diameters of the high-voltage line electrodes 101 and the low-voltage line electrodes 102 are between 0.2 mm and 1 mm. The lengths of the high-voltage line electrodes 101 and the low-voltage line electrodes 102 can also be adjusted, and the specific adjustment range is between 10 cm and 200 cm. Diffuse discharge non-equilibrium thermal plasma can only be generated under the condition of extremely uneven electric field. In view of this, the vertical distance between the high-voltage line electrode 101 and the low-voltage line electrode 102 is between 2cm and 8cm, and the horizontal distance is between 5cm and 15cm. .
高压电极绝缘盖板105、低压电极绝缘盖板106和侧面绝缘盖板112由高绝缘性能的材料制成,可以选择有机玻璃、环氧树脂等材料。The high-voltage electrode insulating cover 105 , the low-voltage electrode insulating cover 106 and the side insulating cover 112 are made of high-insulating materials, such as plexiglass and epoxy resin.
高压电极引线103、低压电极引线104可由铜导线、铝导线等导电材料制成,直径大小取为0.8mm。第一通孔107、第二通孔108为圆型通孔,直径大小取为1mm。The high-voltage electrode leads 103 and the low-voltage electrode leads 104 can be made of conductive materials such as copper wires and aluminum wires, with a diameter of 0.8mm. The first through hole 107 and the second through hole 108 are circular through holes with a diameter of 1 mm.
左侧屏蔽网110和右侧屏蔽网111均为绝缘材料制成,屏蔽网网孔直径取为0.5mm,以滤除大直径杂志颗粒进入非平衡等离子体产生装置1。所述高压电极固定螺栓113和低压电极固定螺栓114同样由绝缘材料制成。在放电过程中,等离子体产生区域109呈现为大体积空间弥散状放电态。The shielding net 110 on the left side and the shielding net 111 on the right side are both made of insulating materials, and the mesh diameter of the shielding net is 0.5 mm, so as to filter out large-diameter foreign matter particles entering the unbalanced plasma generator 1 . The high-voltage electrode fixing bolts 113 and the low-voltage electrode fixing bolts 114 are also made of insulating materials. During the discharge process, the plasma generation region 109 is in a large-volume space dispersed discharge state.
脉冲发生器2通过高压导线连接到非平衡等离子体产生装置1。待处理颗粒3可为纳米炭黑、PET薄膜材料等有机颗粒状粉末,已处理颗粒4为经等离子体表面改性处理后的纳米炭黑、PET薄膜材料等有机颗粒状粉末。收纳笼5是一个半开口型立方体盒。半开口绝缘盒51由绝缘材料制成,以防止对等离子体产生区域电场的影响,可以选择有机玻璃、环氧树脂等材料;静电屏蔽板52由金属导电材料制成,可以选择铜、铁、铝等材料。The pulse generator 2 is connected to the unbalanced plasma generating device 1 through a high-voltage wire. The particles 3 to be treated can be organic granular powders such as nano-carbon black and PET film materials, and the treated particles 4 are organic granular powders such as nano-carbon black and PET film materials after plasma surface modification. Storage cage 5 is a semi-open cube box. The semi-open insulating box 51 is made of insulating material, to prevent the influence of the electric field in the plasma generation area, materials such as plexiglass and epoxy resin can be selected; the electrostatic shielding plate 52 is made of metal conductive material, and can be selected from copper, iron, Aluminum and other materials.
在系统实际运行工作中,脉冲发生器2为非平衡等离子体产生装置1中的高低压线阵列电极两端提供弥散放电所需重复频率的高压纳秒脉冲,所施脉冲的重复频率可在100Hz到1000Hz内调节,电压幅值可在50kV到150kV内调节,单次高压脉冲的上升沿时间在纳秒级,具体可为30ns。高压纳秒脉冲施加到线阵列电极两端后,在非平衡等离子体产生装置的中心区域产生了在大气压空气条件下大体积的弥散放电非平衡热等离子体。待处理颗粒3由吹风机将其透过左侧屏蔽网110后吹入非平衡等离子体产生装置1中,进入等离子体产生区域109,颗粒状粉末材料在经过等离子体表面改性处理后,已处理颗粒4在吹风机的风力下透过右侧屏蔽网111进入收纳笼5。最终,已处理颗粒4在表面静电吸附力的作用下,沉积在静电屏蔽板52下,从而完成颗粒粉末材料的收集。In the actual operation of the system, the pulse generator 2 provides high-voltage nanosecond pulses with a repetition frequency required for diffuse discharge for both ends of the high-voltage and low-voltage line array electrodes in the unbalanced plasma generation device 1. The repetition frequency of the applied pulses can be 100Hz It can be adjusted within 1000Hz, the voltage amplitude can be adjusted within 50kV to 150kV, and the rising edge time of a single high-voltage pulse is at the nanosecond level, specifically 30ns. After the high-voltage nanosecond pulse is applied to both ends of the line array electrodes, a large-volume diffuse discharge non-equilibrium thermal plasma under atmospheric pressure air conditions is generated in the central area of the non-equilibrium plasma generating device. The particles 3 to be treated are blown into the unbalanced plasma generating device 1 by the blower through the left shielding net 110, and enter the plasma generating area 109. After the plasma surface modification treatment, the granular powder material has been treated. Particles 4 enter the storage cage 5 through the right shielding net 111 under the wind force of the blower. Finally, the processed particles 4 are deposited under the electrostatic shielding plate 52 under the action of surface electrostatic adsorption, thereby completing the collection of particle powder materials.
在大气压空气环境下,气体放电更多时候表现为火花通道型放电和电晕放电。弥散型辉光放电是一种介于火花放电和电晕放电之间的特殊放电形态。弥散放电产生的非热平衡等离子体是一种部分电离的低温等离子体,其电子和离子温度相差很大。非平衡等离子体对材料的处理大多集中在对薄膜等宏观成品的处理,与薄膜或类似材料相比,颗粒状粉末材料与气体的接触面积要大得多。因此,等离子体处理后粉体的表面形态以及结构,甚至粒径大小都有可能发生显著变化。In atmospheric air environment, gas discharge is more often manifested as spark channel discharge and corona discharge. Diffuse glow discharge is a special discharge form between spark discharge and corona discharge. The non-thermal equilibrium plasma generated by diffuse discharge is a partially ionized low-temperature plasma, and the temperature difference between electrons and ions is very large. The treatment of materials by non-equilibrium plasma mostly focuses on the treatment of macroscopic finished products such as thin films. Compared with thin films or similar materials, the contact area between granular powder materials and gases is much larger. Therefore, the surface morphology and structure of the powder after plasma treatment, and even the particle size may change significantly.
总体而言,通过本发明所构思的以上技术方案与现有技术相比,能够获得下列优势:Generally speaking, compared with the prior art, the above technical solution conceived by the present invention can obtain the following advantages:
(1)本发明所介绍的颗粒状粉末表面改性处理系统能产生大体积非平衡等离子体,从而增大了颗粒状粉末与等离子体的接触面积,使得颗粒状粉末材料表面改性处理能够进行得更为充分,大大提高了粉末表面改性处理的效率。(1) The granular powder surface modification treatment system introduced in the present invention can generate a large volume of non-equilibrium plasma, thereby increasing the contact area between the granular powder and the plasma, so that the surface modification treatment of the granular powder material can be carried out More fully, greatly improving the efficiency of powder surface modification treatment.
(2)该系统中,粉末状颗粒表面改性处理均在常温常压空气环境下,不需要复杂的介质阻挡绝缘层,避免了在表面改性处理过程中介质阻挡层材质对颗粒的污染。(2) In this system, the surface modification treatment of powdery particles is carried out in an air environment at normal temperature and pressure, and no complicated dielectric barrier insulating layer is required, which avoids the pollution of the particles by the material of the dielectric barrier layer during the surface modification process.
(3)该系统摒弃了昂贵且繁琐的真空、充气系统,容易构造出结构紧凑、重量轻、体积小、性能稳定的装置系统。从而使得该系统的使用限制较小,对于等离子体的工业化应用具有重要意义。(3) The system abandons the expensive and cumbersome vacuum and inflation systems, and it is easy to construct a device system with compact structure, light weight, small volume and stable performance. Therefore, the limitation of the use of the system is small, which is of great significance for the industrial application of plasma.
本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
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