CN105472856A - Low-temperature plasma generator with hexagon pipe-type structure - Google Patents

Low-temperature plasma generator with hexagon pipe-type structure Download PDF

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CN105472856A
CN105472856A CN201510974853.XA CN201510974853A CN105472856A CN 105472856 A CN105472856 A CN 105472856A CN 201510974853 A CN201510974853 A CN 201510974853A CN 105472856 A CN105472856 A CN 105472856A
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generator
temperature plasma
low
cavity
generator cavity
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袁旭东
孙路石
聂圻春
潘悦
左忠琪
王晔
袁旭君
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Huazhong University of Science and Technology
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes

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  • Spectroscopy & Molecular Physics (AREA)
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Abstract

本发明公开了一种低温等离子体发生器,它包括铜棒、发生器腔体和金属网,发生器腔体为正六边形管状,材料为石英玻璃或刚玉,作为放电间隙中间的介质;铜棒与发生器腔体形状相同,布置于发生器腔体内,其两端均通过定位塞密封固定,定位塞上均开有用于安装通气管的通孔,金属网包裹在发生器腔体的外表面,作为接地负极,以保证放电正常进行,并固定发生器腔体;工作时铜棒通过正极接线头接高压电源正极,金属网通过外接高压电线接高压电源负极,通电后铜棒与发生器腔体的缝隙间产生紫色的低温等离子体,并使低温等离子体的产生量得以增加。当多个低温等离子体发生器并联时,可提高了空间利用率,并节省介质材料与负极材料使用量。

The invention discloses a low-temperature plasma generator, which includes a copper rod, a generator cavity and a metal mesh. The generator cavity is in the shape of a regular hexagonal tube, and the material is quartz glass or corundum, which is used as a medium in the middle of the discharge gap; copper The shape of the rod is the same as that of the generator cavity, and it is arranged in the generator cavity. Both ends of the rod are sealed and fixed by positioning plugs. There are through holes for installing ventilation pipes on the positioning plugs, and the metal mesh is wrapped around the outer surface of the generator cavity. The surface is used as the negative electrode of the ground to ensure the normal discharge and fix the generator cavity; when working, the copper rod is connected to the positive electrode of the high-voltage power supply through the positive terminal, and the metal mesh is connected to the negative electrode of the high-voltage power supply through an external high-voltage wire. After power-on, the copper rod and the generator Violet low-temperature plasma is generated in the gap of the cavity, and the generation of low-temperature plasma is increased. When multiple low-temperature plasma generators are connected in parallel, the utilization rate of space can be improved, and the usage of dielectric material and negative electrode material can be saved.

Description

一种六边形管式结构的低温等离子体发生器A Low Temperature Plasma Generator with Hexagonal Tube Structure

技术领域technical field

本发明涉及低温等离子体发生器,更具体地,涉及一种利用六边形管式结构的DBD(介质阻挡放电)产生低温等离子体的发生器。The present invention relates to a low-temperature plasma generator, and more particularly, relates to a generator that utilizes a hexagonal tubular structure DBD (dielectric barrier discharge) to generate low-temperature plasma.

背景技术Background technique

DBD设备目前主要有基本两种方式产生低温等离子体,其中一种是平板电极放电,另一种是同轴圆柱电极放电。在叶振鑫等人提出了一种平行板电极放电装置(“介质阻挡放电功率相关因素分析”,机电技术,2011,34(1):41-43),该装置采用4mm的普通玻璃作为放电介质,调节放电间隙分别为2mm、2.5mm和3mm,保持其它参数不变时得出DBD放电功率随着电极间隙的增大而减小的结论;同时该装置通过调节电源电压频率,得出电源频率越接近该固有谐振频率时,放电功率越大的结论。在刘璐等(“大气压下影响介质阻挡放电的因素分析”,绝缘材料,2008,41(5):52-55)也提出了一种平行板电极放电装置试验证明,该装置通过实验推导出以下结论:采用介电常数大,较薄的介质,当电源参数及其他因素不变时,放电强度随相对介电常数的增大而增大,随介质材料厚度的增大而减小。因此为了在实际中获取高密度的低温等离体,需要合理调节放电间隙与电源频率,同时试验装置应选用介电常数较大,厚度较薄的材料作为阻挡层,尽可能提高工作电压。在赵卫东等(“同轴圆柱结构DBD装置放电功率的模拟计算及实验研究”,高压电器,2010,46(6):25-28)提出了一种同轴圆柱式DBD装置,推导了适用于各种交流电压波形的DBD装置放电功率的计算公式,对同轴圆柱结构DBD装置进行了电场及等效电容分析,并在此基础上建立了其放电功率的数学模型。At present, there are basically two ways for DBD equipment to generate low-temperature plasma, one of which is flat plate electrode discharge, and the other is coaxial cylindrical electrode discharge. Ye Zhenxin and others proposed a parallel plate electrode discharge device ("Analysis of factors related to dielectric barrier discharge power", Electromechanical Technology, 2011, 34(1): 41-43), which uses 4mm ordinary glass as the discharge medium, Adjust the discharge gaps to 2mm, 2.5mm and 3mm respectively, and keep other parameters constant, and draw the conclusion that the DBD discharge power decreases with the increase of the electrode gap; When it is close to the natural resonant frequency, the conclusion that the discharge power is greater. Liu Lu et al. ("Analysis of Factors Affecting Dielectric Barrier Discharge Under Atmospheric Pressure", Insulating Materials, 2008, 41(5): 52-55) also proposed a parallel plate electrode discharge device test proof, which was deduced through experiments The following conclusions: When the dielectric constant is large and thin, when the power supply parameters and other factors remain unchanged, the discharge intensity increases with the increase of the relative dielectric constant, and decreases with the increase of the thickness of the dielectric material. Therefore, in order to obtain high-density low-temperature plasma in practice, it is necessary to reasonably adjust the discharge gap and power frequency. At the same time, the test device should use a material with a large dielectric constant and a thin thickness as the barrier layer to increase the operating voltage as much as possible. In Zhao Weidong et al. ("Simulation calculation and experimental research on the discharge power of a coaxial cylindrical DBD device", High Voltage Electrical Appliances, 2010, 46(6): 25-28) proposed a coaxial cylindrical DBD device, deriving a suitable The calculation formula of the discharge power of the DBD device with various AC voltage waveforms, the electric field and equivalent capacitance of the coaxial cylindrical structure DBD device are analyzed, and the mathematical model of the discharge power is established on this basis.

在这两种平板电极放电与同轴圆柱电极放电使用介质阻挡放电产生低温等离子体的装置中,目前主要通过改变以上因素来提高低温等离子体产生量,但由于仅仅考虑了单个装置在实验状况下的低温等离子体产生量,而在实际情况中,为了获取足量的高密度低温等离子体,试验中经常将多个圆筒形发生器管或平板式发生器管并联,其中圆筒形发生器管由于并联时相邻圆筒之间存在间隙,故在有限的空间范围内,空间利用率并未达到最高;而平板式发生器在采用矩阵排列时,每一块正极板必将需要一块负极板,这样,为了产生足量的低温等离子体,故对极板原材料的需求比较大,同时也会增加介质层材料的使用量.In the two flat-plate electrode discharges and coaxial cylindrical electrode discharges that use dielectric barrier discharge to generate low-temperature plasma, at present, the amount of low-temperature plasma generation is mainly increased by changing the above factors, but because only a single device is considered in the experimental conditions In practice, in order to obtain a sufficient amount of high-density low-temperature plasma, multiple cylindrical generator tubes or flat-plate generator tubes are often connected in parallel in experiments, and the cylindrical generator tubes Because there is a gap between adjacent cylinders when the tubes are connected in parallel, the space utilization rate has not reached the highest within a limited space; and when the flat-plate generator is arranged in a matrix, each positive plate must need a negative plate. , In this way, in order to generate a sufficient amount of low-temperature plasma, the demand for plate raw materials is relatively large, and at the same time, the amount of dielectric layer materials used will also increase.

发明内容Contents of the invention

本发明所要解决的问题是克服现有技术中多个发生器并联使用时的空间利用率的缺陷以及负极电极材料和介质材料的使用量缺陷,提供一种六边形管式结构的低温等离子体发生器,可以实现无缝接合,以获得更高的空间利用率与较少负极材料使用量。The problem to be solved by the present invention is to overcome the defects of space utilization when multiple generators are used in parallel in the prior art and the defects of the usage of negative electrode materials and dielectric materials, and provide a low-temperature plasma with a hexagonal tubular structure The generator can be seamlessly joined to obtain higher space utilization and less anode material usage.

本发明提供的一种低温等离子体发生器,其特征在于,它包括铜棒、发生器腔体和金属网,所述发生器腔体为正六边形管状,材料为石英玻璃或刚玉,作为放电间隙中间的介质;铜棒与发生器腔体形状相同,布置于所述发生器腔体内,其两端均通过定位塞密封固定,定位塞上均开有用于安装通气管的通孔,金属网包裹在发生器腔体的外表面,作为接地负极,以保证放电正常进行,同时起到固定发生器腔体的作用;A low-temperature plasma generator provided by the present invention is characterized in that it includes a copper rod, a generator cavity and a metal mesh, the generator cavity is a regular hexagonal tube, and the material is quartz glass or corundum. The medium in the middle of the gap; the copper rod has the same shape as the generator cavity, and is arranged in the generator cavity. Wrapped on the outer surface of the generator cavity, it is used as the ground negative electrode to ensure the normal discharge, and at the same time play a role in fixing the generator cavity;

工作时,铜棒通过正极接线头接高压电源正极,金属网通过外接高压电线接高压电源负极,通电后铜棒与发生器腔体的缝隙间产生紫色的低温等离子体,并使低温等离子体的产生量得以增加。When working, the copper rod is connected to the positive pole of the high-voltage power supply through the positive terminal, and the metal mesh is connected to the negative pole of the high-voltage power supply through an external high-voltage wire. Production is increased.

按照本发明,当多个六边形管式结构的低温等离子体发生器并联时,由于发生器管外表面均设置为负极,故外表面可以紧密结合,气流通过整个发生器部分可以避免气流从相邻发生器管间损失,因而提高了空间利用率。同时由于正六边形结构可紧密无缝排列,在相同的面积情况下,正六边形周长最小,故正六边形结构所用材料最少,从而节省了介质材料与负极材料使用量。According to the present invention, when multiple low-temperature plasma generators with hexagonal tubular structures are connected in parallel, since the outer surfaces of the generator tubes are all set as negative poles, the outer surfaces can be tightly bonded, and the airflow passing through the entire generator part can avoid the airflow from Loss between adjacent generator tubes, thus improving space utilization. At the same time, because the regular hexagonal structure can be closely and seamlessly arranged, under the same area, the regular hexagonal perimeter is the smallest, so the regular hexagonal structure uses the least material, thereby saving the use of dielectric materials and negative electrode materials.

附图说明Description of drawings

图1是本发明六边形管式结构低温等离子体发生器的结构示意图;Fig. 1 is the structural representation of the low temperature plasma generator of hexagonal tubular structure of the present invention;

图2是本发明六边形管式结构低温等离子体发生器的工作流程图。Fig. 2 is a working flow chart of the low temperature plasma generator with hexagonal tubular structure of the present invention.

具体实施方式detailed description

本发明可用于以低温等离子体通过化学或物理作用除去空气中有害的无机(NOx、SOx)与有机气体(VOCs)。本发明通过实验证明,单个六边形管式结构的低温等离子体发生器对以上气体脱除率均能达到99%以上。The invention can be used to remove harmful inorganic (NO x , SO x ) and organic gases (VOCs) in the air through chemical or physical action with low-temperature plasma. The invention proves through experiments that the single low-temperature plasma generator with hexagonal tubular structure can achieve above 99% removal rate of the above gases.

以下结合附图及实施例,对本发明进行进一步详细说明。根据下面说明和权利要求书,本发明的优点特征将更清楚。需说明的是,附图均采用非常简化的形式且均使用非常精准的比率,仅用以清晰方便地辅助说明本发明实施例的目的。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments. Advantageous features of the present invention will be apparent from the following description and claims. It should be noted that the drawings are all in a very simplified form and use very precise ratios, and are only used for the purpose of clearly and conveniently assisting in describing the embodiments of the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

如图1所示,本发明实例提供的低温等离子体发生器包括通气管1、正极接线柱2、定位塞3、铜棒4、发生器腔体5和金属网6。其中发生器腔体5为正六边形管状,材料可以为石英玻璃和刚玉等,作为放电间隙中间的介质,优选石英玻璃材料,其介电常数为3.7,能够保证放电在较低电压下平稳进行,将其做成六边形形状能够在将多个发生器连接在一起的时候节省大量的空间。铜棒4与发生器腔体5相同,铜棒4位于发生器腔体5内,并利用定位塞3予以固定,并保证腔体内密封,铜棒4通过正极接线柱2接电源正极。铜棒4和发生器腔体5形状相同,以保证放电均匀,与石英玻璃管间隙为1-2mm,以保证不出现放电击穿的情况。金属网6为不锈钢、铜或银等材料制成的细网,金属网6紧紧包裹在发生器腔体5的表面,保证放电正常进行,同时起到固定石英玻璃管的作用。如图2所示,本发明实例的六边形管式结构低温等离子体发生器在工作时,铜棒4通过正极接线头2接高压电源正极,金属网6通过外接高压电线7接高压电源负极,接通电源后可清楚地看见铜棒与介质石英玻璃管的缝隙间产生了紫色的低温等离子体。根据实验,圆形管式结构在电压12KV、频率8KHZ的条件下才能产生较多的低温等离子体,而本发生器在电压8.1KV、频率8KHZ的条件下就可以产生大量的低温等离子体,所以本发生器采用六边形管式结构取代传统的圆形管式结构,既能节省大量的空间,提高空间利用率,也能够提高产生低温等离子体的效率,降低产生低温等离子体所需的电源电压大小。As shown in FIG. 1 , the low-temperature plasma generator provided by the example of the present invention includes a vent pipe 1 , a positive terminal post 2 , a positioning plug 3 , a copper rod 4 , a generator cavity 5 and a metal mesh 6 . The generator cavity 5 is in the shape of a regular hexagonal tube, and the material can be quartz glass and corundum. As the medium in the middle of the discharge gap, quartz glass is preferred, and its dielectric constant is 3.7, which can ensure that the discharge is carried out smoothly at a lower voltage. , making it a hexagonal shape can save a lot of space when connecting multiple generators together. The copper rod 4 is the same as the generator cavity 5, and the copper rod 4 is located in the generator cavity 5, and is fixed by the positioning plug 3, and ensures the sealing in the cavity, and the copper rod 4 is connected to the positive pole of the power supply through the positive pole terminal 2. The copper rod 4 has the same shape as the generator cavity 5 to ensure uniform discharge, and the gap between the copper rod 4 and the quartz glass tube is 1-2 mm to ensure that no discharge breakdown occurs. The metal mesh 6 is a fine mesh made of stainless steel, copper or silver. The metal mesh 6 is tightly wrapped on the surface of the generator cavity 5 to ensure the normal discharge and to fix the quartz glass tube. As shown in Figure 2, when the low-temperature plasma generator with hexagonal tubular structure of the example of the present invention is in operation, the copper rod 4 is connected to the positive pole of the high-voltage power supply through the positive terminal 2, and the metal mesh 6 is connected to the negative pole of the high-voltage power supply through an external high-voltage electric wire 7. After turning on the power, it can be clearly seen that a purple low-temperature plasma is generated between the copper rod and the dielectric quartz glass tube. According to the experiment, the circular tubular structure can generate more low-temperature plasma under the condition of voltage 12KV and frequency 8KHZ, but this generator can generate a large amount of low-temperature plasma under the condition of voltage 8.1KV and frequency 8KHZ, so The generator adopts a hexagonal tubular structure instead of the traditional circular tubular structure, which can not only save a lot of space, improve the space utilization rate, but also improve the efficiency of low-temperature plasma generation and reduce the power required for low-temperature plasma generation. Voltage size.

本发明的六边形管式结构低温等离子体发生器在一些利用低温等离子体工作的装置中有很广阔的应用前景,如在低温等离子体净化器、低温等离子体除菌器中使用本发生器,可以节省大量空间,同时还能够提高除尘杀菌的效率。The low-temperature plasma generator with hexagonal tubular structure of the present invention has very broad application prospects in some devices that utilize low-temperature plasma work, such as using the generator in low-temperature plasma purifiers and low-temperature plasma sterilizers , can save a lot of space, and can also improve the efficiency of dust removal and sterilization.

显然,本领域的技术人员可以对发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包括这些改动和变型之内。Obviously, those skilled in the art can make various changes and modifications to the invention without departing from the spirit and scope of the invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and equivalent technologies thereof, the present invention also intends to include these modifications and variations.

Claims (5)

1. a low-temperature plasma generator, it is characterized in that, it comprises copper rod (4), generator cavity (5) and wire netting (6), described generator cavity (5) is regular hexagon tubulose, material is quartz glass or corundum, as the medium in the middle of discharging gap; Copper rod (4) is identical with generator cavity (5) shape, be arranged in described generator cavity, its two ends are all fixing by limit plug (3) sealing, limit plug (3) all has the through hole for installing breather pipe (1), wire netting (6) is wrapped in the outer surface of generator cavity (5), as ground connection negative pole, to ensure that electric discharge is normally carried out, play the effect of fixing generator cavity (5) simultaneously;
During work, copper rod (4) connects high-voltage power cathode by positive terminal head (2), wire netting (6) connects high voltage source negative pole by external high-tension bus-bar (7), purpuric low temperature plasma between the gap of the rear copper rod (4) of energising and generator cavity (5), and the generation of low temperature plasma is increased.
2. a kind of low-temperature plasma generator according to claim 1, is characterized in that, the fine-structure mesh that described wire netting (6) is stainless steel, copper or ag material are made.
3. a kind of low-temperature plasma generator according to claim 1, is characterized in that, described rear copper rod (4) is 1mm-2mm with the spacing of generator cavity (5), to ensure the situation not occurring discharge breakdown.
4. a kind of low-temperature plasma generator according to claim 1, is characterized in that, described limit plug (3) is detachable installing structure.
5. according to described a kind of low-temperature plasma generator arbitrary in Claims 1-4, it is characterized in that, be made up of multiple described low-temperature plasma generator parallel connection, be wrapped in the wire netting (6) of the outer surface of generator cavity (5) as ground connection negative pole, air-flow is lost to avoid air-flow by whole generator part between adjacent generator tube, to improve space availability ratio, the generator cavity (5) of regular hexagon structure can arrange, to save dielectric material and negative material use amount by closed seamless.
CN201510974853.XA 2015-12-21 2015-12-21 Low-temperature plasma generator with hexagon pipe-type structure Pending CN105472856A (en)

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CN105934064A (en) * 2016-06-12 2016-09-07 上海大学 Single-dielectric barrier low-temperature plasma reactor
CN107333376A (en) * 2017-04-21 2017-11-07 南京航空航天大学 A kind of atomic plasma jet generating device of atmospheric pressure
CN113395812A (en) * 2021-06-09 2021-09-14 江苏天楹环保能源成套设备有限公司 Low-temperature plasma disinfection module, disinfection device and disinfection mask
CN113786716A (en) * 2021-09-22 2021-12-14 苏州杰宸环境科技有限公司 Three-dimensional high-density low-temperature plasma generating device
CN114710868A (en) * 2021-04-02 2022-07-05 驿清(上海)环保工程设备有限公司 Dielectric barrier discharge plasma device
CN116040749A (en) * 2022-11-03 2023-05-02 山东大学 DBD reaction device, equipment and method for preparing low-temperature plasma activated water
US20230309212A1 (en) * 2020-08-11 2023-09-28 Log10 B.V. Plasma source for generating a disinfecting and/or sterilizing gas mixture
CN121022589A (en) * 2025-09-12 2025-11-28 江苏锐拓生物科技有限公司 A cell reaction bag with a dual-channel ventilation device

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