CN107059113B - Seed chuck device of semiconductor grade silicon single crystal furnace and application thereof - Google Patents
Seed chuck device of semiconductor grade silicon single crystal furnace and application thereof Download PDFInfo
- Publication number
- CN107059113B CN107059113B CN201710245957.6A CN201710245957A CN107059113B CN 107059113 B CN107059113 B CN 107059113B CN 201710245957 A CN201710245957 A CN 201710245957A CN 107059113 B CN107059113 B CN 107059113B
- Authority
- CN
- China
- Prior art keywords
- seed crystal
- seat
- flexible shaft
- transition
- conical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a seed chuck device of a semiconductor grade silicon single crystal furnace and application thereof, which consists of a seed crystal mounting end, a flexible shaft mounting end and a transition weight end; the seed crystal mounting end is mainly used for disassembling and replacing seed crystals; the flexible shaft installation end is mainly used for being fixedly connected with the flexible shaft; the transition counterweight end is mainly used for connecting the seed crystal installation end and the flexible shaft installation end, and plays roles of positioning, serial connection and counterweight through threaded connection. The advantages are that: the disassembly and maintenance of the seed crystal, the flexible shaft and the seed crystal chuck device are convenient; the graphite piece is in contact with the end part of the seed crystal, so that the volatility of parts at the seeding part is reduced, pollution is reduced, and the requirement of semiconductor-grade silicon single crystal growth can be met; the centering precision of the flexible shaft during movement is improved, and the concentricity of the flexible shaft and the seed crystal is improved.
Description
Technical Field
The invention relates to a seed chuck device for crystal growth and application thereof, in particular to a seed chuck device for crystal growth of a Czochralski semiconductor silicon single crystal furnace and application thereof.
Background
Monocrystalline silicon is a crystal with a basically complete lattice structure, is a good semiconductor material, has the purity of more than 99.9999999 percent, can be used for the production and deep processing manufacture of diode level, rectifying device level, circuit level and chip products, has been widely applied to various fields, and plays an important role in military electronic equipment as well as integrated circuits and semiconductor separation devices of subsequent productsNew materialLeading edge of development.
Semiconductor grade silicon single crystal furnaces are important crystal growth equipment in the single crystal silicon industry chain, and at present, two main methods for growing silicon single crystals in the world are mainly adopted: one is a zone-melting method, and the other is a Czochralski method, wherein the Czochralski method has the advantages of large quality, large diameter, low cost, high production efficiency and the like of grown single crystals, and is always a main means for preparing a semiconductor silicon substrate. The Czochralski method is a method in which a cooled seed crystal is brought into contact with a silicon melt and melted. When the temperature of the interface is lower than the freezing point, the seed crystal starts to grow, and in order to enable the seed crystal to grow continuously, the temperature of the melt is gradually reduced, and meanwhile, the seed chuck device is rotated to improve the temperature distribution of the melt. When the crystal grows to a certain stage, the seed chuck device is slowly lifted to enlarge the radiating surface. Therefore, the reliability, stability and convenience of use of the seed chuck device in the Czochralski silicon single crystal furnace are important. At present, the seed chuck device for crystal growth by the Czochralski method has various structures, and the seed chuck device made of integral metal molybdenum cannot meet the requirement of semiconductor-grade silicon single crystal growth because the metal molybdenum has serious volatility and can influence the crystal growth quality in the crystal growth process; the seed chuck device made of the integrated graphite has the advantages that on one hand, the centering accuracy of the sagging of the flexible shaft is not affected due to insufficient weight, and on the other hand, the contact surface of the chuck and the end part of the flexible shaft is easy to damage due to lower tensile strength of the graphite. Meanwhile, the seed chuck device is not beneficial to disassembly, assembly and maintenance, and the safety and reliability are not high in the use process.
At present, how to improve a seed chuck device and improve the safety reliability and the structural stability of the seed chuck device in a semiconductor grade silicon single crystal furnace is a subject of close attention in the field.
Disclosure of Invention
The invention aims at: aiming at the problems of low safety and reliability, low structural stability, easy pollution, difficult disassembly and maintenance and the like of the seed crystal chuck device of the semiconductor-grade silicon single crystal furnace by the existing pulling method, the novel and reliable seed crystal device for the semiconductor-grade silicon single crystal furnace by the pulling method and the application thereof are provided.
The purpose of the invention is realized in the following way: a seed chuck device for semiconductor grade silicon single crystal furnace, includes seed crystal seat, its characterized in that: the chuck device includes seed crystal installation end, transition counter weight and flexible axle installation end, wherein:
the seed crystal mounting end comprises a seed crystal seat, a conical nut, a spacer and a gasket, wherein the outer part of the seed crystal seat is a conical positioning surface, the inner part of the seed crystal seat is provided with a conical mounting hole, and the spacer and the gasket are used for adjusting and pressing the seed crystal; one end of the interior of the conical nut is provided with a conical mounting hole matched with the conical positioning surface of the exterior of the seed crystal seat, the other end of the conical nut is provided with an internal thread, the seed crystal seat is fixed in the conical nut through the conical positioning surface of the exterior, the seed crystal seat and the conical mounting hole of the conical nut are concentric, and the conical nut is connected with the transition counterweight end through the internal thread;
the transition counterweight comprises a molybdenum stud, a transition sleeve, a transition seat, a mandrel and a pin, wherein the molybdenum stud is provided with external threads matched with the internal threads of the conical nut, both ends of the mandrel are provided with external threads, the molybdenum stud, the transition sleeve and the transition seat are provided with concentric through holes, and the molybdenum stud at the tail end of the through hole is also provided with internal threads matched with the external threads at the end part of the mandrel; the molybdenum stud, the transition sleeve and the transition seat are positioned in series sequentially through pins, the mandrel penetrates through each through hole, the end part of the mandrel is connected with the molybdenum stud through matched external threads, the molybdenum stud is connected with the conical nut through matched external threads, and the mandrel extending out of the through hole is connected with the installation end of the flexible shaft through the external threads;
the flexible shaft installation end comprises a flexible shaft seat, a transition bolt and a flexible shaft, wherein the end part of the flexible shaft is provided with a conical positioning step, the transition bolt is provided with an external thread and an internal thread matched with the external thread at the end part of the core shaft, the flexible shaft seat is provided with a conical installation hole corresponding to the conical positioning step at the end part of the flexible shaft and an internal thread matched with the external thread of the transition bolt, the flexible shaft is installed in the flexible shaft seat through the conical positioning step, and the transition bolt is respectively connected with the flexible shaft seat and the core shaft through the matched external thread and the internal thread;
after assembly, the flexible shaft, the mandrel and the fixed seed crystal are positioned on the same central axis.
In the present invention: the seed crystal seat, the conical nut, the spacer and the transition seat are all made of high-strength isostatic pressing graphite; the gasket is made of graphite paper; the soft shaft seat, the molybdenum stud, the transition sleeve, the mandrel and the pin are all made of metal molybdenum; the transition bolt is made of heat-resistant stainless steel 310S.
In the present invention: the purity of the high-strength isostatic graphite and graphite paper is required to be 5 ppm.
In the present invention: the flexible shaft is made of tungsten metal.
The application of the seed chuck device is characterized in that the end part of the seed crystal is provided with a conical positioning step matched with the conical mounting hole in the seed crystal seat, the seed crystal passes through the conical mounting holes of the seed crystal seat and the conical nut, the seed crystal is mounted in the seed crystal seat through the conical positioning step at the end part of the seed crystal, the seed crystal is adjusted by the spacer and the gasket and then is connected with the transition counterweight through the conical nut through the internal thread, at the moment, the seed crystal is pressed in the seed crystal seat, the seed crystal seat and the conical nut cooperatively position and support the seed crystal radially, and after the seed crystal is assembled, the flexible shaft, the mandrel and the fixed seed crystal are positioned on the same gravity vertical line.
In the application of the seed chuck device as described above: the seed crystal is made of high-purity silicon single crystal.
The invention has the advantages that: the seed chuck device adopts a split thread assembly structure, and is arranged into three parts of a seed crystal installation end, a flexible shaft installation end and a transition counterweight end, so that the disassembly and maintenance of the seed crystal, the flexible shaft and the seed chuck device are convenient; the graphite piece is in contact with the end part of the seed crystal, so that the volatility of parts at the seeding part is reduced, pollution is reduced, and the requirement of semiconductor-grade silicon single crystal growth can be met; heavy metal molybdenum is used as a counterweight at the transition counterweight end, so that the centering accuracy of the flexible shaft during movement is improved; because the transition weight end is positioned and connected by the mandrel, the concentricity of the flexible shaft and the seed crystal is improved.
Drawings
FIG. 1 is a schematic view of an exemplary embodiment of a seed chuck assembly according to the present invention;
FIG. 2 is a view showing the appearance of the seed chuck device according to the present invention;
in the figure: 1. cone nut 2, seed crystal seat, 3, molybdenum stud, 4, pin, 5, transition sleeve, 6, transition seat, 7, soft shaft seat, 8, transition bolt, 9, mandrel, 10, seed crystal, 11, spacer, 12, gasket, 13, soft shaft.
Description of the embodiments
The drawings disclose, without limitation, the specific construction of an embodiment in accordance with the present invention, and the invention is further described below in connection with the accompanying drawings.
As can be seen from fig. 1 and 2: the invention comprises a seed crystal installation end, a transition counterweight and a flexible shaft installation end, wherein:
the seed crystal mounting end comprises a seed crystal seat 2, a conical nut 1, a spacer 11 and a gasket 12, wherein the outer part of the seed crystal seat 2 is a conical positioning surface, a conical mounting hole is formed in the seed crystal seat, a seed crystal 10 is mounted in the seed crystal seat 2 through a conical positioning step at the end part, and the spacer 11 and the gasket 12 at the end part are adjusted and pressed in the seed crystal seat 2; the inside one end of cone nut 1 is equipped with the toper mounting hole that matches with the outside toper locating surface of seed seat 2, and the other end is equipped with the internal thread, and seed seat 2 is fixed in cone nut 1 through outside toper locating surface, and seed seat 2 and cone nut 1's toper mounting hole are with the heart, and cone nut 1 passes through the internal thread and is connected with the transition counter weight end.
The transition counterweight comprises a molybdenum stud 3, a transition sleeve 5, a transition seat 6, a mandrel 9 and a pin 4, wherein the molybdenum stud 3 is provided with external threads matched with the internal threads of the conical nut 1, both ends of the mandrel 9 are provided with external threads, the molybdenum stud 3, the transition sleeve 5 and the transition seat 6 are provided with concentric through holes, and the molybdenum stud 3 at the tail end of the through holes is also provided with internal threads matched with the external threads at the end part of the mandrel 9. The molybdenum stud 3, the transition sleeve 5 and the transition seat 6 are sequentially positioned in series through the pin 4, the mandrel 9 penetrates through each through hole, the end part of the mandrel is connected with the molybdenum stud 3 through matched external threads, the molybdenum stud 3 is connected with the conical nut 1 through matched external threads, and the mandrel 9 extending out of the through holes is connected with the flexible shaft installation end through the external threads.
The flexible shaft mounting end comprises a flexible shaft seat 7, a transition bolt 8 and a flexible shaft 13, wherein the end part of the flexible shaft 13 is provided with a conical positioning step, the transition bolt 8 is provided with an external thread and an internal thread matched with the external thread of the end part of the mandrel 9, the flexible shaft seat 7 is provided with a conical mounting hole corresponding to the conical positioning step of the end part of the flexible shaft 13 and an internal thread matched with the external thread of the transition bolt 8, the end part of the flexible shaft 13 is mounted in the flexible shaft seat 7 through the conical positioning step, and the transition bolt 8 is connected with the flexible shaft seat through the matched external thread and is connected with the mandrel 9 through the internal thread.
After assembly, the flexible shaft 13, the mandrel 9 and the fixed seed crystal 10 are positioned on the same central axis.
In this embodiment: the seed crystal seat 2, the conical nut 1, the spacer 11 and the transition seat 6 are all made of high-strength isostatic pressing graphite; the gasket 12 is made of graphite paper; the flexible shaft seat 7, the molybdenum stud 3, the transition sleeve 5, the mandrel 9 and the pin 4 are all made of metal molybdenum; the transition bolt 8 is made of heat-resistant stainless steel 310S. Wherein, the high-strength isostatic graphite and the graphite paper are subjected to high-temperature purification treatment, and the purity of the high-strength isostatic graphite and the graphite paper is required to be 5 ppm.
In this embodiment: the flexible shaft is made of tungsten metal.
In practical use, the end part of the seed crystal 10 is required to be provided with a conical positioning step matched with the conical mounting hole in the seed crystal seat 2, the seed crystal 10 passes through the conical mounting holes of the seed crystal seat 2 and the conical nut 1, is mounted in the seed crystal seat 2 through the conical positioning step at the end part of the seed crystal, is adjusted by the spacer 11 and the gasket 12 and then is connected with the transitional weight through the conical nut 1 through the internal thread, at the moment, the seed crystal 10 is pressed in the seed crystal seat 2, the seed crystal seat 2 and the conical nut 1 are cooperated to radially position and support the seed crystal 10, during assembly, the seed crystal 10 is hung in the center of the semiconductor grade silicon single crystal furnace through the flexible shaft 13, and after assembly, the flexible shaft 13, the mandrel 9 and the seed crystal 10 after fixing are positioned on the same gravity vertical line (in use, the left end of fig. 1 and 2 is positioned on the flexible shaft 13, and the right end 10 is positioned below).
In use, the material composition of the seed crystal 10 is a high purity silicon single crystal.
Claims (4)
1. The utility model provides a semiconductor level silicon single crystal furnace's seed chuck device, includes seed crystal seat, its characterized in that: the chuck device includes seed crystal installation end, transition counter weight and flexible axle installation end, wherein:
the seed crystal mounting end comprises a seed crystal seat, a conical nut, a spacer and a gasket, wherein the outer part of the seed crystal seat is a conical positioning surface, the inner part of the seed crystal seat is provided with a conical mounting hole, and the spacer and the gasket are used for adjusting and pressing the seed crystal; one end of the interior of the conical nut is provided with a conical mounting hole matched with the conical positioning surface of the exterior of the seed crystal seat, the other end of the conical nut is provided with an internal thread, the seed crystal seat is fixed in the conical nut through the conical positioning surface of the exterior, the seed crystal seat and the conical mounting hole of the conical nut are concentric, and the conical nut is connected with the transition counterweight end through the internal thread;
the transition counterweight comprises a molybdenum stud, a transition sleeve, a transition seat, a mandrel and a pin, wherein the molybdenum stud is provided with external threads matched with the internal threads of the conical nut, both ends of the mandrel are provided with external threads, the molybdenum stud, the transition sleeve and the transition seat are provided with concentric through holes, and the molybdenum stud at the tail end of the through hole is also provided with internal threads matched with the external threads at the end part of the mandrel; the molybdenum stud, the transition sleeve and the transition seat are positioned in series sequentially through pins, the mandrel penetrates through each through hole, the end part of the mandrel is connected with the molybdenum stud through matched external threads, the molybdenum stud is connected with the conical nut through matched external threads, and the mandrel extending out of the through hole is connected with the installation end of the flexible shaft through the external threads;
the flexible shaft installation end comprises a flexible shaft seat, a transition bolt and a flexible shaft, wherein the end part of the flexible shaft is provided with a conical positioning step, the transition bolt is provided with an external thread and an internal thread matched with the external thread at the end part of the core shaft, the flexible shaft seat is provided with a conical installation hole corresponding to the conical positioning step at the end part of the flexible shaft and an internal thread matched with the external thread of the transition bolt, the flexible shaft is installed in the flexible shaft seat through the conical positioning step, and the transition bolt is respectively connected with the flexible shaft seat and the core shaft through the matched external thread and the internal thread;
after assembly, the flexible shaft, the mandrel and the fixed seed crystal are positioned on the same central axis;
the seed crystal seat, the conical nut, the spacer and the transition seat are all made of high-strength isostatic pressing graphite; the gasket is made of graphite paper; the soft shaft seat, the molybdenum stud, the transition sleeve, the mandrel and the pin are all made of metal molybdenum; the transition bolt is made of heat-resistant stainless steel 310S; the flexible shaft is made of tungsten metal.
2. The seed chuck device of a semiconductor grade silicon single crystal furnace as set forth in claim 1, wherein: the purity of the high-strength isostatic graphite and graphite paper is required to be 5 ppm.
3. The use of a seed chuck assembly for a semiconductor grade silicon single crystal furnace as set forth in claim 1 or 2 wherein the end of the seed crystal is provided with a tapered locating step matching the tapered mounting hole in the seed crystal seat, the seed crystal is inserted through the tapered mounting hole in the seed crystal seat and the tapered nut, is mounted in the seed crystal seat by the tapered locating step at the end, is adjusted by the spacer and the spacer, and is connected with the transitional weight by the tapered nut through the internal thread, at this time, the seed crystal is pressed in the seed crystal seat, the seed crystal seat and the tapered nut cooperate to radially locate and support the seed crystal, and the flexible shaft, the mandrel and the fixed seed crystal are positioned on the same gravity vertical line after the assembly.
4. The use of a seed chuck assembly for a semiconductor grade silicon single crystal furnace as set forth in claim 3, wherein: the seed crystal is made of high-purity silicon single crystal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710245957.6A CN107059113B (en) | 2017-04-14 | 2017-04-14 | Seed chuck device of semiconductor grade silicon single crystal furnace and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710245957.6A CN107059113B (en) | 2017-04-14 | 2017-04-14 | Seed chuck device of semiconductor grade silicon single crystal furnace and application thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107059113A CN107059113A (en) | 2017-08-18 |
| CN107059113B true CN107059113B (en) | 2023-07-14 |
Family
ID=59600986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710245957.6A Active CN107059113B (en) | 2017-04-14 | 2017-04-14 | Seed chuck device of semiconductor grade silicon single crystal furnace and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107059113B (en) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201268729Y (en) * | 2008-10-23 | 2009-07-08 | Omt集团有限公司 | Seed crystal clamping device |
| CN201560249U (en) * | 2009-09-27 | 2010-08-25 | 上海元亮光电科技有限公司 | Novel seedchuck structure |
| CN201942789U (en) * | 2011-01-19 | 2011-08-24 | 江西神硅科技有限公司 | Seed crystal holding device used for producing solar-grade silicon single crystal |
| CN102312288A (en) * | 2011-07-04 | 2012-01-11 | 浙江晶盛机电股份有限公司 | Self-tightening type seed crystal chuck |
| CN202482486U (en) * | 2011-12-23 | 2012-10-10 | 东方电气集团峨嵋半导体材料有限公司 | Silicon seed crystal clamping device for growing mono-crystalline silicon with Czochralski method |
| CN104611765B (en) * | 2013-11-05 | 2017-08-08 | 有研半导体材料有限公司 | A kind of seedholder component |
| CN203546200U (en) * | 2013-11-11 | 2014-04-16 | 英利能源（中国）有限公司 | Connecting device for producing silicon single crystal rod by using czochralski method and equipment for producing silicon single crystal rod |
| CN206799792U (en) * | 2017-04-14 | 2017-12-26 | 南京晶能半导体科技有限公司 | Semiconductor grade silicon single crystal furnace seed crystal chuck device |
-
2017
- 2017-04-14 CN CN201710245957.6A patent/CN107059113B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN107059113A (en) | 2017-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109338462B (en) | Diameter-variable seed crystal for Czochralski single crystal and seeding method | |
| JP5296992B2 (en) | Silicon crystal material and manufacturing method thereof | |
| CN201762481U (en) | Single crystal furnace seed crystal chuck mechanism | |
| CN202492611U (en) | Holding device for single crystals for zone melting furnace | |
| CN110257910A (en) | A kind of silicon semiconductor material single crystal growing furnace | |
| CN110670122A (en) | Novel seed crystal for pulling single crystal and welding process | |
| CN107059113B (en) | Seed chuck device of semiconductor grade silicon single crystal furnace and application thereof | |
| CN108866621A (en) | A kind of silicon single crystal seeding structure and technique | |
| CN103343385A (en) | Special-shape size czochralski silicon and growth method thereof | |
| CN206799792U (en) | Semiconductor grade silicon single crystal furnace seed crystal chuck device | |
| CN201268729Y (en) | Seed crystal clamping device | |
| CN107268080A (en) | A kind of pulling growth method of the unparalleled crest line monocrystalline silicon of major diameter | |
| CN101748483A (en) | Germanium melt dross removing device and method | |
| CN107538631B (en) | Small-sized side's silicon core hi-precision cutting technique | |
| CN106149047A (en) | Single crystal growing furnace | |
| CN202272987U (en) | Molybdenum seed crystal gripper for single crystal furnace | |
| CN201801631U (en) | Quartz crucible lifting appliance | |
| CN221740512U (en) | Inner crucible of double-area quartz crucible | |
| CN214422780U (en) | Zone-melting seed crystal clamp | |
| CN111826711A (en) | Carbon-carbon composite material seed crystal chuck for single crystal furnace | |
| CN202047168U (en) | Seed holder for monocrystalline silicon growth | |
| CN203440496U (en) | Sapphire seed chuck with double positioning pins | |
| CN201232093Y (en) | Cable fasteners for silicon monocrystal recharging or inoculating crystal production apparatus by Czochralski method | |
| CN202246977U (en) | Crystal supporting device for growing zone-melting monocrystal | |
| CN207391598U (en) | A kind of single crystal furnace seed crystal clamping device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |