CN201268729Y

CN201268729Y - Seed crystal clamping device

Info

Publication number: CN201268729Y
Application number: CNU2008201759103U
Authority: CN
Inventors: 周俭
Original assignee: OMT GROUP CO Ltd
Current assignee: Shanghai JMS Electronic Materials Co., Ltd.
Priority date: 2008-10-23
Filing date: 2008-10-23
Publication date: 2009-07-08
Anticipated expiration: 2018-10-23

Abstract

The utility model relates to an inoculating crystal clamping device which comprises an upper part gripping head and a lower part gripping head, wherein the top end of the upper part gripping head can be connected with an inoculating crystal sling in a disassembling way, and the upper part gripping head can be connected with the lower part gripping head in a disassembling way; the lower part gripping head is internally provided with a first cavity of which the upper part and the lower part are communicated, the first cavity is internally sleeved with an inward gripping head which is internally provided with a second cavity which has communicated large upper part and small lower part , and the first cavity is internally sleeved with a fixing bar used for propping against the inoculating crystal. Because the inoculating crystal clamping device is provided with the inward gripping head in the lower part gripping head and clamps the inoculating crystal by the inward gripping head, and the inward gripping head is movable in the first cavity inside the lower part gripping head, only the inward gripping head is needed to replace when the inoculating crystal clamping device generates abrasion and needs replacement so as to reduce the cost. Besides, the inoculating crystal clamping device is easy to process because the first cavity inside the lower part gripping head needs not to be processed into a step shape. In addition, the fixing bar arranged in the lower part gripping head is used for firmly fixing the inoculating crystal along a vertical direction without generating rock during the growth process of monocrystal line silicon.

Description

Seed crystal clamping device

Technical field

Employed seed crystal clamping device when the utility model relates to a kind of employing Grown by CZ Method silicon single crystal belongs to the growing semiconductor crystal equipment technical field.

Background technology

Silicon single crystal is a kind of semiconductor material, generally is used to make unicircuit and other electron component, and the monocrystalline silicon growing technology has two kinds: zone melting method and vertical pulling method, wherein vertical pulling method is the method that generally adopts at present.

In the method for Grown by CZ Method silicon single crystal; the high-purity polycrystalline raw material is put in the quartz crucible; in rough vacuum heat fused under the slumpability gas shield is arranged then; cool the temperature to about 1420 degrees centigrade of silicon ctystallizing points after the fusing; the silicon single crystal (being called seed crystal) that the particular growth direction arranged is packed in the seed crystal clamping device; and seed crystal is contacted with silicon solution; temperature by adjusting silicon solution and seed crystal make progress lifting speed; seed crystal is grown up; when the diameter of silicon single crystal during near aimed dia; improve the seed crystal pulling speed; make the growth of silicon single crystal equal diameter; when the approaching end of silicon single crystal growth, the silicon solution not completely dissolve as yet in the quartz crucible is by the pulling speed of increase seed crystal and the heat supplied in the adjustment quartz crucible; make the diameter of silicon single crystal slowly dwindle into a cone; when enough hour of pyramidal point, silicon single crystal will break away from solution, thereby finishes the process of growth of silicon single crystal.

In the monocrystalline silicon growing process, seed crystal is generally all fixed with clamping device, and it need be fixed in the clamping device well, to guarantee that seed crystal can not come off in promoting the seed crystal process, the monocrystalline silicon growing process is finished smoothly.Seed crystal is generally right cylinder or rectangular parallelepiped, one or more breach are arranged above it, seed crystal are fixed in the clamping device with steady brace or wire, but with steady brace or wire fixing all exists fix insecure, inconvenience is installed, and be difficult for after coming out of the stove taking off seed crystal problem.

In order to address the above problem, the structure of seed rod has been done relative improvement in the prior art, it as number of patent application 02285894.6 Chinese patent, disclose a kind of seed rod, it comprises a body of rod, be provided with and the equipment connection structure connecting in the upper end of the body of rod, the body of rod has a cavity that vertically connects, and the cavity two that is positioned at the lower end of the body of rod is contraction-like with respect to the cavity one of its top.Number of patent application is 02131185.4 Chinese patent, a kind of silicon seed crystal holder for monocrystal silicon by vertical pulling process is also disclosed, this application has been done further improvement again to the structure of seedholder, clamper is divided into two parts up and down, it between two parts up and down detachable the connection, include the cavity of a up big and down small and up/down perforation in the clamper bottom, seed crystal just is clamped in the cavity.The seed crystal clamping device of these two kinds of structures is simple in structure, be easy to install and take off seed crystal, but these two kinds of structures all need process the inner chamber that is step-like in seed crystal clamping device, difficulty of processing is bigger, in addition, the chuck that is used for the clamping seed crystal has wearing and tearing to a certain degree, need periodic replacement, the chuck in above-mentioned two kinds of structures need be changed whole clamping device when changing, at least will change lower part of clamping device, replacement cost is higher.

Summary of the invention

The utility model main purpose is to address the above problem and is not enough, and a kind of fixation is provided, and be easy to change, and cost is low, the seed crystal clamping device that is easy to process.

For achieving the above object, the technical solution of the utility model is:

Described seed crystal clamping device, comprise upper jaw and lower jaw, the top of described upper jaw and seed crystal lifting rope removably connect, between described upper jaw and the lower jaw for removably connecting, first cavity that one up/down perforation is arranged in the described lower jaw, in described first cavity, be arranged with chuck in, have second cavity of a up big and down small and up/down perforation in described in the chuck, in described first cavity, also be with a hold-down bars that is used to withstand seed crystal.

Further improvement of the utility model is, the internal diameter of described first cavity is unanimous between the higher and lower levels, be contraction-like in its bottom, in described between chuck and described first cavity for being slidingly matched, described upper jaw is connected for being threaded or selling with web member between the seed crystal lifting rope, the sidewall of described lower jaw is provided with at least one ventilating pit, between described upper jaw and the lower jaw for being threaded, described hold-down bars is provided with the outside screw that matches with the internal thread of described lower jaw, is provided with one at the top of described hold-down bars for the mounting structure of placing screwing tool.Can also adopt the pin mode of connection between described upper jaw and the lower jaw.

The utility model further improves and is, adds a dismountable extension rod between described upper jaw and lower jaw again, and the sidewall of described extension rod is provided with at least one ventilating pit.

Content to sum up, described seed crystal clamping device, sheathed interior chuck in lower jaw, by interior chuck clamping seed crystal, because in the cavity of interior chuck in lower jaw is mobilizable, so when its generation wearing and tearing needed to change, chuck got final product in only need changing, need not lower jaw is changed together, reduce cost.In addition, the cavity in the lower jaw need not be processed into step-like, so processing is than being easier to.

This device is provided with a hold-down bars in lower jaw, be used for seed crystal is firmly fixed in vertical direction, can not produce in the monocrystalline silicon growing process and rock.Between upper jaw and lower jaw, add an extension rod, can make the seed crystal lifting rope, prolong its work-ing life away from pyritous silicon solution in the quartz crucible.

Description of drawings

Fig. 1 is the utility model structural representation;

Fig. 2 is the utility model structure wiring layout.

As depicted in figs. 1 and 2, upper jaw 1 and lower jaw 2, seed crystal lifting rope 3, first cavity 4, interior chuck 5, the second cavitys 6, hold-down bars 7, ventilating pit 8, internal thread 9, outside screw 10, mounting structure 11, extension rod 12, ventilating pit 13, latch 14, protuberance 15, outside screw 16, through hole 17, screw 18, protuberance 19, outside screw 20, seed crystal 21.

Embodiment

Below in conjunction with accompanying drawing and embodiment the utility model is described in further detail:

Embodiment one, and as shown in Figure 1, described seed crystal clamping device comprises upper jaw 1 and lower jaw 2, is connected by latch 14 between the top of upper jaw 1 and the seed crystal lifting rope 3, also can adopt to be threaded.

Upper jaw 1 and the lower jaw 2 general materials that adopt are resistant to elevated temperatures molybdenum or graphite, adopt between upper jaw 1 and the lower jaw 2 and be threaded, upper jaw 1 is a solid, first cavity 4 that one up/down perforation is arranged in lower jaw 2, the internal diameter of first cavity 4 is unanimous between the higher and lower levels, be contraction-like in the bottom of lower jaw 2, the centre is left and is used for the through hole 17 that seed crystal 21 therefrom passes.Be provided with internal thread 9 on the top of first cavity 4, be provided with a protuberance 15 in the bottom of upper jaw 1, protuberance 15 is provided with the outside screw 16 that matches with internal thread 9.

In first cavity 4, be arranged with chuck 5 in, the diameter of interior chuck 5 is slightly less than the internal diameter of first cavity 4, chuck 5 can be done along the inwall of first cavity 4 and slide up and down in making, and interior chuck 5 can not produce significantly in the horizontal direction in first cavity 4 and rock, and helps seed crystal 21 yet and aligns when mounted.Behind monocrystalline silicon growing end of processing each time, interior chuck 5 can be deviate from first cavity 4, is used to change seed crystal 21, when interior chuck 5 because wearing and tearing when needing to change, chuck 5 in also can at this point changing.

Second cavity 6 that has a up big and down small and up/down perforation in the interior chuck 5, second cavity 6 can be the shape hole of falling from power, or two stepped cylinder holes, also can be the combining of shape hole and cylinder hole of falling from power, for can be better fixing seed crystal 21, the shape of its second cavity 6 preferably can match with the shape of seed crystal 21.

In first cavity 4, also be with a hold-down bars 7 that is used to withstand seed crystal 21, as shown in Figure 1, the upper end of hold-down bars 7 is provided with the outside screw 10 that matches with the internal thread 9 of first cavity 4, the top of hold-down bars 7 is provided with one for the mounting structure 11 of placing screwing tool, can adopt the cruciate flower screwdriver as screwing tool, corresponding mounting structure 11 just can be the groove that is the cruciate flower shape that matches with it, like this, the cruciate flower screwdriver is put into the groove internal rotation, just hold-down bars 7 can be moved down, thereby withstand seed crystal 21, seed crystal 21 is securely fixed in the lower jaw 2, and hold-down bars 7 can not produce in the horizontal direction and rocks.When needs take off seed crystal 21, as long as hold-down bars 7 is just passable from the 4 interior back-outs of first cavity.

Because extreme temperatures in the process of growth of silicon single crystal, so in first cavity 4, will accumulate a large amount of high-temperature gases, because between upper jaw 1 and the lower jaw 2 by being threaded, also be threaded between hold-down bars 7 and the lower jaw, so the high-temperature gas in first cavity 4 is difficult for discharging, like this, at least one ventilating pit 8 is set on the sidewall of lower jaw 2, high-temperature gas is constantly discharged under the effect of pressure, avoid potential safety hazard, wherein ventilating pit 8 preferably can all be provided with in the upper and lower of first cavity 4, makes that the discharge of high-temperature gas is more smooth and easy.

As shown in Figure 2, when monocrystalline silicon growing, upper jaw 1 and lower jaw 2 with described clamping device disassembles earlier, then interior chuck 5 is packed into above lower jaw 2 in first cavity 4, in first cavity 4 that seed crystal 21 is packed into above lower jaw 2, and it is passed from second cavity 6, again hold-down bars 7 is packed in first cavity 4, move down hold-down bars 7, chuck 5 moves down with seed crystal 21 in driving, and abuts against the bottom of first cavity 4 up to interior chuck 5, and at this moment seed crystal 21 is withstood in the bottom of hold-down bars 7, at last upper jaw 1 and lower jaw 2 are coupled together, seed crystal 21 just is firmly secured in the clamping device like this.

Embodiment two, as shown in Figure 1, different with embodiment one is, for the distance that extends between seed crystal lifting rope 3 and the silicon solution, between upper jaw 1 and lower jaw 2, added an extension rod 12, the top of extension rod 12 is provided with the screw 18 that matches with the outside screw of upper jaw 1 bottom tab 15, the bottom of extension rod 12 also has a protuberance 19, protuberance 19 is provided with the outside screw 20 that matches with internal thread 9 in the lower jaw 2, and the dismounting mode of extension rod 12 is described with embodiment one.

Because extension rod 12 is provided with screw 18, in the process of growth of silicon single crystal, also can accumulate high-temperature gas in the screw 18, so at least one ventilating pit 13 also is set, be used to discharge high-temperature gas on the sidewall of extension rod 12.

Embodiment three, upper jaw 1, lower jaw 2, and between the extension rod 12 except that can adopting above-mentioned being threaded, also can adopt pin to connect, at this moment, hold-down bars 7 does not just need foregoing outside screw 10 and places the mounting structure 11 of throw, and be an elongated column, the diameter of hold-down bars 7 is slightly less than the internal diameter of first cavity 4, can guarantee so promptly that hold-down bars 7 can not produce significantly in the horizontal direction rocks, and also can make hold-down bars 7 be easy to take out in first cavity 4.In order to fixedly secure seed crystal 21, the length of hold-down bars 7 will be restricted, after assembling finishes, the bottom connection of the bottom of the top of hold-down bars 7 and upper jaw 1 or extension rod 12 touches, the bottom of hold-down bars 7 contacts with the top of seed crystal 21, and interior chuck 5 and interior seed crystal 21 thereof are fixedly secured in the bottom of lower jaw 2, other is not described in detail here with embodiment one and embodiment two described contents.

Embodiment four, when upper jaw 1, and lower jaw 2, and adopt when being threaded between the extension rod 12, also can adopt as implementing the structure of three described hold-down barss 7.

As mentioned above, given in conjunction with the accompanying drawings and embodiments scheme content can derive the similar techniques scheme.In every case be the content that does not break away from technical solutions of the utility model, to any simple modification, equivalent variations and modification that above embodiment did, all still belong in the scope of technical solutions of the utility model according to technical spirit of the present utility model.

Claims

1, a kind of seed crystal clamping device, comprise upper jaw (1) and lower jaw (2), the top of described upper jaw (1) and seed crystal lifting rope (3) removably connect, between described upper jaw (1) and the lower jaw (2) for removably connecting, it is characterized in that: first cavity (4) that a up/down perforation is arranged in the described lower jaw (2), in described first cavity (4), be arranged with chuck in (5), second cavity (6) that has a up big and down small and up/down perforation in described in the chuck (5) also is with a hold-down bars (7) that is used to withstand seed crystal in described first cavity (4).

2, seed crystal clamping device according to claim 1 is characterized in that: the internal diameter of described first cavity (4) is unanimous between the higher and lower levels, is contraction-like in its bottom.

3, seed crystal clamping device according to claim 2 is characterized in that: in described between chuck (5) and described first cavity (4) for being slidingly matched.

4, seed crystal clamping device according to claim 1 is characterized in that: be connected for being threaded or selling between described upper jaw (1) and the seed crystal lifting rope (3).

5, seed crystal clamping device according to claim 1 is characterized in that: the sidewall of described lower jaw (2) is provided with at least one ventilating pit (8).

6, seed crystal clamping device according to claim 1 is characterized in that: between described upper jaw (1) and the lower jaw (2) for being threaded.

7, seed crystal clamping device according to claim 6, it is characterized in that: described hold-down bars (7) is provided with the outside screw (10) that matches with the internal thread (9) of described lower jaw (2), is provided with one at the top of described hold-down bars (7) for the mounting structure (11) of placing screwing tool.

8, seed crystal clamping device according to claim 1 is characterized in that: be connected for pin between described upper jaw (1) and the lower jaw (2).

9, according to each described seed crystal clamping device of claim 1 to 8, it is characterized in that: between described upper jaw (1) and lower jaw (2), add a dismountable extension rod (12) again.

10, seed crystal clamping device according to claim 9 is characterized in that: the sidewall of described extension rod (12) is provided with at least one ventilating pit (13).