CN107017343B - The production method of the organic layer of organic illuminating element - Google Patents
The production method of the organic layer of organic illuminating element Download PDFInfo
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- CN107017343B CN107017343B CN201610055543.2A CN201610055543A CN107017343B CN 107017343 B CN107017343 B CN 107017343B CN 201610055543 A CN201610055543 A CN 201610055543A CN 107017343 B CN107017343 B CN 107017343B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The production method that the present invention discloses a kind of organic layer of organic illuminating element, mainly by the mode of premix organic material, and a variety of organic materials are dissolved and mixed with organic solvent, and, after completing to be dried in vacuo program, disposably mixed organic material is deposited by evaporation material container and is exited on substrate, and by the evaporation material container, with the above-mentioned process of repetitive operation in order, and then in forming multiple specific organic layers on substrate in order.
Description
Technical field
The present invention relates to the technical fields more particularly to a kind of system of the organic layer of organic illuminating element of organic element production
Make method.
Background technique
Organic electro-luminescent display (Organic Electro-luminescence Display, Organic EL
Display) being also known as Organic Light Emitting Diode (Organic Light Emitting Diode, OLED) is in 1987 Nian Youke
Up to the C.W.Tang and S.A.VanSlyk et al. of (Kodak) company, take the lead in being made using vacuum evaporation mode, respectively by hole
Transmission material and electron transport material, plating are overlying on transparent tin indium oxide (indium tin oxide, abbreviation ITO) glass,
Thereafter a metal electrode is deposited again and forms the oled device with self-luminosity, due to possessing high brightness, screen
Reaction speed is fast, it is light and short, full-color, without subtense angle, be not required to liquid crystal display formula backlight to save lamp source and power consumption, because
And become the display of new generation of great potential.
Referring to Fig. 1, being the sectional view of existing oled device;As shown in Figure 1, existing organic light emission
The construction of diode apparatus A is from the bottom to top sequentially comprising a substrate A1, an anode A 2 (Indium Tin Oxide, ITO), a sky
Cave transport layer A3 (Hole Transporting Layer, HTL), an organic luminous layer A4 (Organic Emitting
Layer, EML), an electron transfer layer A5 (Electron Transporting Layer, ETL), an electron injecting layer A6
(Electron Injection Layer, EIL) and a cathode A7.When imposing a forward bias voltage drop voltage, hole is by anode A 2
Injection, and electronics is injected by cathode A7, the potential difference due to caused by extra electric field, moves electronics and hole in the film,
And then laminating (recombination) is generated in organic luminous layer A4.Part combines discharged energy by electron hole, will
The light emitting molecule of organic luminous layer A4 excites and becoming excitation state can will release when light emitting molecule decays to ground state by excitation state
The energy released is released in the form of photon, this luminescence process is known as organic electroluminescent.
Referring to Fig. 2, the vapor deposition schematic diagram of existing oled device, as shown in Fig. 2, existing organic hair
The vapor deposition mode of optical diode device, be first depending on the vapor deposition ratio of a variety of materials and respectively by material of main part steel cylinder C, shine
Material steel cylinder D and coenosarc material steel cylinder E are heated, so that its interior of steel bottle respectively generates specified pressure;Then,
Make the material of main part of those interior of steel bottle by the valve nozzle (C1, D1, E1) for simultaneously controlling above-mentioned steel cylinder again, shine
Material and coenosarc material are deposited on a substrate B with set vapor deposition ratio, and complete oled device
Single layer be deposited process.
In addition, by constantly heating steel cylinder, and passing through when above-mentioned vapor deposition process is applied in actual product volume production
The control of valve nozzle and be in turn deposited on different substrate, until the material of interior of steel bottle is used up.However, in above-mentioned
Among mode, since the material of interior of steel bottle will be constantly lost, when its heating temperature is not adjusted therewith,
The pressure of interior of steel bottle will be unable to be maintained at its specified pressure, in this way, will lead to the material vapor deposition ratio that valve nozzle is sprayed
Error, and then reduce the production yield of Organic Light Emitting Diode.
The narration presented more will lead to the raising of heating cost by the mode for respectively heating multitube steel cylinder, and usually
After Organic Light Emitting Diode production process terminates, interior of steel bottle still can remain the material not used completely, however,
Due to the reason that the compression ratio of interior of steel bottle has seriously been lacked of proper care, so, when the production of Organic Light Emitting Diode next time, need
By movement that steel cylinder replaces and maintain specific material vapor deposition ratio;In this manner, not only resulting in material resources
Waste, will more be significantly increased the cost of manufacture of Organic Light Emitting Diode.
Via above-mentioned, can learn the vapor deposition mode of existing oled device still have the disadvantage with it is insufficient;
In view of this, the invention of this case provides a kind of production method of the organic layer of organic illuminating element.
Summary of the invention
The main object of the present invention is to provide a kind of production method of the organic layer of organic illuminating element, mainly by
The mode of organic material is premixed, and a variety of organic materials are dissolved and mixed with organic solvent, also, is dry completing vacuum
After dry program, disposably mixed organic material is deposited on substrate by evaporation material container, and by the steaming
Plating material container exits, with the above-mentioned process of repetitive operation in order, so that it is multiple specific organic in being formed in order on substrate
Layer;Wherein, it may replace the production method of traditional Organic Light Emitting Diode by the present invention, and reach and avoid the wasting of resources and drop
The effect of low manufacturing cost.
Therefore, in order to reach the above-mentioned purpose of the present invention, the present invention proposes a kind of system of the organic layer of organic illuminating element
Make method, includes the following steps:
(1) by plural number kind organic material difference weighing configuration;
(2) the plural number kind organic material is dissolved using at least one organic solvent, to form plural kind of organic material solution;
(3) according to allotment ratio, the plural number kind organic material solution is mixed, equably to form a mixed solution;
(4) mixed solution is placed in one first evaporation material container, carries out vacuum drying program and generation one first is solid
State compounding substances;Then, which is placed in the appearance of one first heating electrode of a plurality of heating electrodes
On device fixing piece;
(5) one first spacing board of a plurality of spacing boards is risen, and enables the first steaming described in the first heating heated by electrodes
Material container is plated, is deposited the first solid mixt matter to the surface of the substrate in the way of vapor deposition, and in the base
The surface of plate forms one first organic layer;
(
(6) film thickness of first organic layer is monitored using the film thickness inductor;
(7) it after the film thickness of first organic layer reaches scheduled thickness, enables the baffle and covers the substrate, avoid institute
It states the first solid mixt matter and continues deposition to one surface of substrate;
(8) the first heating electrode is closed, the production process of first organic layer of the organic illuminating element is completed.
In addition, in order to repeatedly produce the structure of multilayer, so, the present invention is further after completing step (8)
Ground includes the following steps:
(9) whether need to continue to make one second organic layer, if so, thening follow the steps (10);If it is not, then step terminates;
(10) abovementioned steps (1) to step (3) is repeated;
(11) mixed solution is placed in one second evaporation material container, carries out vacuum drying program and generation one second is solid
State compounding substances;Then, which is placed in one second heating electrode of a plurality of heating electrodes
On container fixing piece;
(12) one second spacing board of a plurality of spacing boards is risen, and is enabled second described in the second heating heated by electrodes
Evaporation material container, and then deposited the second solid mixt matter to the surface of the substrate in the way of vapor deposition, and
One second organic layer is formed on first organic layer;
(13) film thickness of second organic layer is monitored using the film thickness inductor;
(14) it after the film thickness of second organic layer reaches scheduled thickness, enables the baffle and covers the substrate, avoid
The second solid mixt matter continues to deposit to the surface of the substrate;
(15) the second heating electrode is closed, the production process of second organic layer of the organic illuminating element is completed.
Detailed description of the invention
The sectional view of the existing oled device of Fig. 1;
The vapor deposition schematic diagram of the existing oled device of Fig. 2;
A kind of first pass figure of the production method of the organic layer of organic illuminating element Fig. 3 of the invention;
The first pass schematic diagram of the production method of the organic layer of Fig. 4 a to Fig. 4 e organic illuminating element;
The second flow chart of the production method of the organic layer of Fig. 5 organic illuminating element;
The second procedure schematic diagram of the production method of the organic layer of Fig. 6 a to Fig. 6 c organic illuminating element;
Vapor deposition board illustrative view Fig. 7 a to Fig. 7 b of the invention;And
The Z region enlarged drawing of Fig. 8 Fig. 7 b.
Wherein, appended drawing reference A oled device
A1 substrate
A2 anode
A3 hole transmission layer
A4 organic luminous layer
A5 electron transfer layer
A6 electron injecting layer
A7 cathode
B substrate
C steel cylinder
C1 valve nozzle
D steel cylinder
D1 valve nozzle
E steel cylinder
E1 valve nozzle
Board is deposited in F
F1 machine table main body
Space is deposited in F11
F2 base board carrier
F21 substrate socket
F3 film thickness inductor
F31 support column
F4 controls baffle
F5 vacuum module
F51 mechanical pump
F52 diffusion pump
F6 heats evaporation disc
F61 baffle
F62 container fixing piece
F63 first electrode connector
F64 second electrode connector
The region Z
11,11 ' organic material
12,12 ' organic material
13,13 ' organic material
2 electronic scales
3 organic solvents
4 first evaporation material support containers
4 ' second evaporation material support containers
5 first specific organic layers
6 mixed solutions
6 ' second mixed solutions
7 first solid mixt matter
7 ' second solid mixt matter
8 second specific organic layers
S01~S14 method and step
Specific embodiment
In order to more clearly describe a kind of organic illuminating element proposed by the invention organic layer production method,
The embodiment that the present invention is applied to manufacture Organic Light Emitting Diode is introduced below in conjunction with attached drawing, and is at large illustrated of the invention
The production method of the organic layer of organic illuminating element.
Please refer to Fig. 3 and Fig. 4 a to Fig. 4 e, the of a kind of production method of the organic layer of organic illuminating element of the invention
One flow chart and first pass schematic diagram.As shown, production method of the invention mainly includes the following steps:
Firstly, executing step (S01) to carry out weighing and match organic material (11,12,13) separately by electronic scale 2
It sets;And then step (S02) and step (S03) are executed, dissolved using an organic solvent 3 those organic materials (11,12,
13), and organic material solution is respectively formed, also, equably mixes above-mentioned organic material according to the ratio of required allotment again
Expect solution, and then forms a mixed solution 6.
After completing above-mentioned steps, then executes step (S04) and held so that the mixed solution 6 is placed in one first evaporation material
It carries among container 4, and carries out vacuum drying program and then generate one first solid mixt matter 7;Also, it executes step (S05)
It is specific in preparing one first on substrate B by vapor deposition processes by the first solid mixt matter 7 with step (S06)
Organic layer 5, and terminate the vapor deposition processes of the first evaporation material support container 4 and the first solid mixt matter 7.
It must illustrate, among the present invention, the first evaporation material support container 4 and vapor deposition processes have
The once characteristic of property, i.e., after single vapor deposition process is terminated, in the first evaporation material support container 4 the
One solid mixt matter 7 is also almost used up, and after the production process for completing the first specific organic layer 5, then carries out following institute
The specific production process for having base of second stated:
Please refer to Fig. 5 and Fig. 6 a to Fig. 6 c, the second flow chart of the production method of the organic layer of organic illuminating element and the
Two flow diagrams;As shown, after completing step step (S06) and then the present invention executes step (S07) to judge
Whether need to continue to make one second specific organic layer 8, if so, thening follow the steps (S08);If it is not, then terminating entirely to make stream
Journey.Among step (S08), by required multiple organic materials (11 ', 12 ', 13 '), respectively weighing is configured, and executes step
(S09) with step (S10), using an organic solvent be dissolved in described in step (S08) those organic materials (11 ', 12 ',
13 '), and it is respectively formed organic material solution, then, then according to allotment ratio, the organic material of uniform mixing step (S09) is molten
Liquid, and form one second mixed solution 6 '.
After completing above-mentioned steps, step (S11) is executed then second mixed solution 6 ' merging one second to be deposited
Among substance support container 4 ', and carries out vacuum drying program and then generate one second solid mixt matter 7 ';Also, execute step
The second solid mixt matter 7 ' specific is had base in above-mentioned first by vapor deposition processes by (S12) and step (S13) suddenly
One second specific organic layer 8 is prepared on layer 5, terminates the second evaporation material support container 4 ' and the second solid mixt matter
7 ' vapor deposition processes.
Among the present invention, in complete above-mentioned steps (S13) followed by execute step (S14) with judge whether need after
The one specific organic layer of N of continuous production, if so, repeating step (S08)~step (S13);If it is not, then step terminates.Such as
This mode, production process through the invention can complete the multilayered structure of Organic Light Emitting Diode in order, and then complete organic
The production of light emitting diode.
Wherein, it is worth further stating clearly, is disposably deposited among step (S05), i.e. the first evaporation material
The first solid mixt matter in support container only carries out executing step (S06) after being once deposited;Also, step (S12)
Among be also disposably deposited, i.e. the second solid mixt matter in the second evaporation material support container is only once deposited
Execute step (S13) later;In addition, in step (S05) with it is complete by vapour deposition method or vacuum splashing and plating method among step (S12)
At vapor deposition processes.
In addition to this, the organic solvent described in the present embodiment can be any one of following group: toluene (Toluene)
Solvent, acetone (Acetone) solvent and tetrahydrofuran (Tetrahydrofuran, THF) solvent.And organic material can be
The mixing material of one fluorescence luminescent material, a phosphorescent light-emitting materials or above two luminescent material;Further, organic material
It can be more a material of main part, and the material of main part is selected from any one of following group: Alq3 material, DPVBi material, BANE material
The mixing material of material, Rubrene material, CBP material and above-mentioned material;In addition, organic material can be more following group
Any one: electron transport layer materials, electron injecting layer material, hole transport layer material, hole injection layer material, hole blocking layer
Material and functional auxiliary material.
In the middle, the present invention is mainly by a vapor deposition board F of controllable vapor deposition sequence to execute the step (S04) extremely
Step (S06) and step (S11) are to step (S13), wherein the first evaporation material support container 4 and the second vapor deposition object
Matter support container 4 ' is deposited in succession by vapor deposition board F.In addition, substrate B is set on vapor deposition board F,
And multiple specific organic layers are deposited in order on substrate B by above-mentioned mode and in order, also, the substrate can be by
Hard material or flexible materials are constituted.
In more detail, Fig. 7 a to Fig. 7 b is please referred to, board illustrative view is deposited, as shown, vapor deposition board F is main
Include: a machine table main body F1, a heating evaporation disc F6, a vacuum module F5 and a base board carrier F2;Wherein, board master
Body F1 has a vapor deposition space F11, and heating evaporation disc F6, is set to the vapor deposition space bottom F11 and is provided with multiple add
Thermode, also, vacuum module F5 is connected to machine table main body F1 and uses so that vacuum shape is presented in the vapor deposition space F11
State.
In addition, base board carrier F2 is set at the top of the F11 of the vapor deposition space relative to the heating evaporation disc F6, and the base
Plate B is set on base board carrier F2 and corresponds to a wherein heating electrode, wherein, should when Yu Zhihang above-mentioned steps (S05)
First evaporation material container 4 is set to a wherein heating electrode, and then in such a way that electrode is heated in conducting, may make the
The first solid mixt matter hot evaporation in one evaporation material container 4 is on the substrate B of base board carrier F2 and to form this first special
Determine organic layer.
Hold above-mentioned, when carrying out the vapor deposition process, base board carrier F2 will be rotated simultaneously and be made the first solid-state
Compounding substances are equably deposited on substrate B.It also, is then to be held among step (S06) by closing first evaporation material
The heating electrode of device 4, and then terminate the vapor deposition processes of the first solid mixt matter.
On the other hand, when Yu Zhihang step (S12), which is set to another heating electrode, and
By the second solid mixt matter heat that by way of the heating electrode is connected, may make in the second evaporation material container 4 '
It is deposited on the substrate B of base board carrier F2 and rotating base board carrier F2 simultaneously and be formed uniformly the second specific organic layer
In on substrate B.Also, by closing the heating electrode of the second evaporation material container 4 ' among step (S13), and then terminate
The vapor deposition processes of the second solid mixt matter.
As shown in Fig. 7 a and Fig. 7 b, vacuum module F5 is made of a mechanical pump F51 and a diffusion pump F52, and the base
Onboard tool F2 is a rotator element and is formed with multiple substrate socket F21 to accommodate substrate B, also, each substrate accommodates
The bottom of mouthful F21 is provided with a barrier version (not shown), and the barrier version can obstruct in substrate B and heating evaporation disc F6 it
Between.Wherein, it may make the vapor deposition space F11 that vacuum state is presented by mechanical pump F51 and diffusion pump F52, in addition, passing through
The setting of those substrate sockets F21 so that base board carrier F2 is able to multiply simultaneously and carries multiple substrate B to carry out vapor deposition operation in turn,
Also, by the setting of barrier version, user may specify that any substrate B is carried out or without process is deposited.
On the other hand, vapor deposition board F has further included a control baffle F4, and control baffle F4 is set to vapor deposition sky
Between in F11, wherein control baffle F4 can be barred between the heating evaporation disc F6 and base board carrier F2;Also, the vapor deposition
Board F has further included an at least film thickness inductor F3, and film thickness inductor F3 is set in the F11 of the vapor deposition space and by one
Support column F31 and be set to a certain height.
Be designed in this way, user can immediately be grasped by film thickness inductor F3 be formed in it is specific organic on substrate B
Thickness degree, and then be barred from it between heating evaporation disc F6 and base board carrier F2 by control baffle F4 specific to have to control
Machine thickness degree.
Please continue to refer to Fig. 7 a and Fig. 7 b, and please refer to Fig. 8, the Z region enlarged drawing of Fig. 7 b, as shown in figure 8, each
A heating electrode includes: a first electrode connector F63, a second electrode connector F64 and a container fixing piece F62,
Also, evaporation material container is set on container fixing piece F62, and the both ends of container fixing piece F62 are connected to this
First electrode connector F63 and second electrode connector F64;In addition, those heating electrode retaining collars are set to heating evaporation disc F6
On, and a baffle F61 is provided between adjacent heating electrode, wherein different bearer container can avoid by the design of baffle F61
The situation that interacts during the high temperature deposition of solid mixt matter.
In this way, it is above-mentioned completely and the production side of the organic layer that clearly demonstrates a kind of organic illuminating element of the invention
Method;Also, the present invention has an advantage that
1. existing Organic Light Emitting Diode production method can be replaced by mode of the invention, so avoid the need for by
By heating the mode of multitube steel cylinder respectively simultaneously by different materials vapor deposition on same substrate, to form organic light-emitting diodes
The disadvantages of wasting of resources caused by the single layer structure of pipe.
2. by the characteristic for board being deposited with being disposably deposited, so that the present invention is able to replace existing technology, further
Ground is avoided due to being repeatedly deposited, and the interior of steel bottle pressure of heating is made to be difficult to the shortcomings that being maintained at a specified pressure, Jin Erti
The production yield of high Organic Light Emitting Diode.
Certainly, the present invention can also have other various embodiments, without deviating from the spirit and substance of the present invention, ripe
It knows those skilled in the art and makes various corresponding changes and modifications, but these corresponding changes and change in accordance with the present invention
Shape all should fall within the scope of protection of the appended claims of the present invention.
Claims (11)
1. a kind of production method of the organic layer of organic illuminating element is a vapor deposition board by can control vapor deposition sequence
It assists and completes, and the vapor deposition board includes:
One machine table main body has a vapor deposition space;
One heating evaporation disc, is set to the bottom in the vapor deposition space, and a plurality of heating electricity are provided on the heating evaporation disc
Pole;Wherein, which has a container fixing piece;
A plurality of spacing boards, each spacing board are set between two adjacent heating electrodes;
One vacuum module is connected to the machine table main body, to make the vapor deposition space that vacuum state be presented;
The top in the vapor deposition space is arranged in relative to the heating evaporation disc for one base board carrier, is loaded onto a few substrate to multiply,
Make the substrate relative to the heating electrode;
One film thickness inductor is set in the vapor deposition space;And
One baffle is set in the vapor deposition space;
It is characterized in that, the production method comprises the steps of:
(1) by plural number kind organic material difference weighing configuration;
(2) the plural number kind organic material is dissolved using at least one organic solvent, to form plural kind of organic material solution;
(3) according to allotment ratio, the plural number kind organic material solution is mixed, equably to obtain a mixed solution;
(4) mixed solution is placed in one first evaporation material container, carries out vacuum drying program and generate one first solid-state to mix
Close substance;Then, which is placed in the container of one first heating electrode of a plurality of heating electrodes
On fixing piece;
(5) one first spacing board of a plurality of spacing boards is risen, and enables the first vapor deposition described in the first heating heated by electrodes
Material container is deposited the first solid mixt matter to the surface of the substrate in the way of vapor deposition, and in the substrate
Surface formed one first organic layer;
(6) film thickness of first organic layer is monitored using the film thickness inductor;
(7) it after the film thickness of first organic layer reaches scheduled thickness, enables the baffle and covers the substrate, avoid described
One solid mixt matter continues to deposit to the surface of the substrate;
(8) the first heating electrode is closed, the production process of first organic layer of the organic illuminating element is completed.
2. the production method of the organic layer of organic illuminating element according to claim 1, which is characterized in that further include following
Step:
(9) whether need to continue to make one second organic layer, if so, thening follow the steps (10);If it is not, then step terminates;
(10) abovementioned steps (1) to step (3) is repeated;
(11) mixed solution is placed in one second evaporation material container, carries out vacuum drying program and generate one second solid-state to mix
Close substance;Then, which is placed in the container of one second heating electrode of a plurality of heating electrodes
On fixing piece;
(12) one second spacing board of a plurality of spacing boards is risen, and enables the second vapor deposition described in the second heating heated by electrodes
Material container, and then deposited the second solid mixt matter to the surface of the substrate in the way of vapor deposition, and in this
One second organic layer is formed on first organic layer;
(13) film thickness of second organic layer is monitored using the film thickness inductor;
(14) it after the film thickness of second organic layer reaches scheduled thickness, enables the baffle and covers the substrate, avoid described
Second solid mixt matter continues to deposit to the surface of the substrate;
(15) the second heating electrode is closed, the production process of second organic layer of the organic illuminating element is completed.
3. the production method of the organic layer of organic illuminating element according to claim 2, which is characterized in that the organic solvent
Any one selected from following group: toluene solvant, acetone solvent and tetrahydrofuran solvent.
4. the production method of the organic layer of organic illuminating element according to claim 2, which is characterized in that the organic material
For a luminescent material, and the luminescent material is selected from any one of following group: fluorescence luminescent material, phosphorescent light-emitting materials and packet
Mixing material containing above-mentioned two material.
5. the production method of the organic layer of organic illuminating element according to claim 2, which is characterized in that the organic material
For a material of main part, and the material of main part is selected from any one of following group: Alq3 material, DPVBi material, BANE material,
The mixing material of Rubrene material, CBP material and above-mentioned material.
6. the production method of the organic layer of organic illuminating element according to claim 2, which is characterized in that the organic material
Any one selected from following group: electron transport layer materials, electron injecting layer material, hole transport layer material, hole injection layer
Material, hole barrier layer material and functional auxiliary material.
7. the production method of the organic layer of organic illuminating element according to claim 1, which is characterized in that the substrate is one
Hard substrate or a flexible base plate.
8. the production method of the organic layer of organic illuminating element according to claim 1, which is characterized in that each heating
Electrode has further included: a first electrode connector and a second electrode connector, and the both ends of the container fixing piece are separately connected
In the first electrode connector and the second electrode connector.
9. the production method of the organic layer of organic illuminating element according to claim 1, which is characterized in that those heating electricity
Polar ring is set on the heating evaporation disc.
10. the production method of the organic layer of organic illuminating element according to claim 1, which is characterized in that the vacuum mold
Block is made of a mechanical pump and a diffusion pump.
11. the production method of the organic layer of organic illuminating element according to claim 1, which is characterized in that the substrate carries
Tool is a rotator element and is formed with an at least substrate socket to accommodate the substrate.
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CN101435888A (en) * | 2007-11-16 | 2009-05-20 | 爱普生拓优科梦株式会社 | Optical multilayer filter, method of manufacturing the same, and electronic apparatus |
CN101693990A (en) * | 2009-10-16 | 2010-04-14 | 电子科技大学 | Single-source chemical vapor deposition (CVD) preparation method of a-side ZnO film |
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