CN107017343A - The preparation method of organic element - Google Patents
The preparation method of organic element Download PDFInfo
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- CN107017343A CN107017343A CN201610055543.2A CN201610055543A CN107017343A CN 107017343 A CN107017343 A CN 107017343A CN 201610055543 A CN201610055543 A CN 201610055543A CN 107017343 A CN107017343 A CN 107017343A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The present invention discloses a kind of preparation method of organic element, mainly by the mode of premix organic material, and a variety of organic materials and organic solvent are dissolved and mixed, and, after vacuum drying program is completed, disposably the organic material of mixing is deposited on substrate by evaporation material support container, and the evaporation material support container is exited, to repeat above-mentioned flow in order, and then in forming multiple specific organic layers on substrate in order.
Description
Technical field
The present invention relates to the technical field that organic element makes, more particularly to a kind of preparation method of organic element.
Background technology
Organic electro-luminescent display (Organic Electro-luminescence Display, Organic EL
Display it is by Ke in 1987) to be also known as Organic Light Emitting Diode (Organic Light Emitting Diode, OLED)
C.W.Tang and S.A.VanSlyk up to (Kodak) company et al., take the lead in being made using vacuum evaporation mode, respectively by hole
Transmission material and electron transport material, plating are overlying on transparent tin indium oxide (indium tin oxide, abbreviation ITO) glass,
Thereafter oled device of the metal electrode formation with self-luminosity is deposited again, due to possessing high brightness, screen
Reaction speed is fast, compact, full-color, without subtense angle, be not required to liquid crystal display formula backlight to save lamp source and power consumption, because
And the display of new generation as great potential.
Referring to Fig. 1, being the profile of existing oled device；As shown in figure 1, existing organic light emission
Diode apparatus A construction is from the bottom to top sequentially comprising a substrate A1, an anode A 2 (Indium Tin Oxide, ITO), a sky
Cave transport layer A3 (Hole Transporting Layer, HTL), an organic luminous layer A4 (Organic Emitting
Layer, EML), an electron transfer layer A5 (Electron Transporting Layer, ETL), an electron injecting layer A6
(Electron Injection Layer, EIL) and a negative electrode A7.When imposing a forward bias voltage drop voltage, hole is by anode A 2
Injection, and electronics is injected by negative electrode A7, the potential difference caused by extra electric field, electronics and hole is moved in the film,
And then laminating (recombination) is produced in organic luminous layer A4.Part combines discharged energy by electron hole, will
Organic luminous layer A4 light emitting molecule is excited and as excitation state, when light emitting molecule decays to ground state by excitation state, will can released
The energy released is released in the form of photon, and this luminescence process is referred to as organic electroluminescent.
Referring to Fig. 2, the evaporation schematic diagram of existing oled device, as shown in Fig. 2 existing organic hair
The evaporation mode of optical diode device, be first depending on the evaporation ratio of various materials and respectively by material of main part steel cylinder C, luminous
Material steel cylinder D and coenosarc material steel cylinder E are heated, and then cause its interior of steel bottle respectively to produce specified pressure；Then,
Cause the material of main part of those interior of steel bottle by the valve nozzle (C1, D1, E1) for simultaneously controlling above-mentioned steel cylinder again, light
Material and coenosarc material are deposited with set evaporation ratio on a substrate B, and complete oled device
Individual layer evaporation flow.
In addition, when above-mentioned evaporation flow is applied in actual product volume production, by constantly heating steel cylinder, and passing through
The control of valve nozzle and be in turn deposited on different substrate, untill the material of interior of steel bottle is used up.However, in above-mentioned
Among mode, because the material of interior of steel bottle will constantly be lost in, therefore, when its heating-up temperature is not adjusted therewith, its
The pressure of interior of steel bottle will be unable to be maintained at its specified pressure, in this way, the material for causing valve nozzle to be sprayed is deposited into ratio
Error, and then reduce the production yield of Organic Light Emitting Diode.
The narration presented, the mode by respectively heating multitube steel cylinder will more cause the raising of heating cost, and generally
After Organic Light Emitting Diode Making programme terminates, its interior of steel bottle still can remain the material not used completely, however,
Due to the reason that the compression ratio of interior of steel bottle has seriously been lacked of proper care, so, when Organic Light Emitting Diode next time makes, need
Action that steel cylinder is replaced simultaneously maintains specific material evaporation ratio；In this manner, not only resulting in material resources
Waste, the cost of manufacture of Organic Light Emitting Diode will be more significantly increased.
Via above-mentioned, it can learn that the evaporation mode of existing oled device still has the disadvantage in that and deficiency；
In view of this, the invention of this case provides a kind of preparation method of organic element.
The content of the invention
The main object of the present invention, is to provide a kind of preparation method of organic element, mainly by premix organic material
Mode, and a variety of organic materials and organic solvent are dissolved and mixed, also, after vacuum drying program is completed,
Disposably the organic material of mixing is deposited on substrate by evaporation material support container, and the evaporation material is held
Carry container to exit, to repeat above-mentioned flow in order, and then in forming multiple specific organic layers on substrate in order；Its
In, by the present invention may replace the production method of traditional Organic Light Emitting Diode, and reach avoid the wasting of resources with reduction make
Cause this effect.
Therefore, in order to reach the above-mentioned purpose of the present invention, the present invention proposes a kind of preparation method of organic element, including under
State step：
(1) will the difference weighing configuration of an at least organic material；
(2) an at least organic material is dissolved using an at least organic solvent, to form an at least organic material solution；
(3) according to allotment ratio, an at least organic material solution is equably mixed, to form a mixed solution；
(4) mixed solution is inserted into one first evaporation material support container, carries out vacuum drying program and produce one the
One solid mixt matter；
(5) by the first solid mixt matter, one first specific organic layer is prepared by vapor deposition processes；And
(6) vapor deposition processes of the first evaporation material support container and the first solid mixt matter are terminated.
In addition, the structure in order to repeatedly produce multilayer, so, the present invention after step (6) is completed further
Ground comprises the steps：
(7) whether need to continue to make one second specific organic layer, if so, then performing step (8)；If it is not, then step knot
Beam；
(8) by required at least organic material difference weighing configuration；
(9) an at least organic material is dissolved using an at least organic solvent, forms an at least organic material solution；
(10) according to allotment ratio, an at least organic material solution is uniformly mixed, one second mixed solution is formed；
(11) second mixed solution is inserted into one second evaporation material support container, carries out vacuum drying program, produced
One second solid mixt matter；
(12) by the second foregoing solid mixt matter, one second specific organic layer is prepared by vapor deposition processes；
(13) vapor deposition processes of the second evaporation material support container and the second solid mixt matter are terminated；And
(14) whether need to continue to make the specific organic layers of N, if so, then repeating step (8)~step (13)；
If it is not, then step terminates.
Below in conjunction with the drawings and specific embodiments, the present invention will be described in detail, but not as a limitation of the invention.
Brief description of the drawings
The profile of the existing oled devices of Fig. 1；
The evaporation schematic diagram of the existing oled devices of Fig. 2；
A kind of first pass figure of the preparation method of organic element of Fig. 3 present invention；
The first pass schematic diagram of the preparation method of Fig. 4 a to Fig. 4 e organic elements；
The second flow chart of the preparation method of Fig. 5 organic elements；
The second procedure schematic diagram of the preparation method of Fig. 6 a to Fig. 6 c organic elements；
The evaporation board illustrative view of Fig. 7 a to Fig. 7 b present invention；And
Fig. 8 Fig. 7 b Z region enlarged drawing.
Wherein, reference A oled devices
A1 substrates
A2 anodes
A3 hole transmission layers
A4 organic luminous layers
A5 electron transfer layers
A6 electron injecting layers
A7 negative electrodes
B substrates
C steel cylinders
C1 valve nozzles
D steel cylinders
D1 valve nozzles
E steel cylinders
E1 valve nozzles
Board is deposited in F
F1 machine table main bodies
Space is deposited in F11
F2 base board carriers
F21 substrate sockets
F3 thickness inductors
F31 support columns
F4 controlling baffle plates
F5 vacuum modules
F51 mechanical pumps
F52 diffusion pumps
F6 heats evaporation disc
F61 baffle plates
F62 container fixtures
F63 first electrode connectors
F64 second electrode connectors
Z regions
11st, 11 ' organic material
12nd, 12 ' organic material
13rd, 13 ' organic material
2 electronic scales
3 organic solvents
4 first evaporation material support containers
4 ' second evaporation material support containers
5 first specific organic layers
6 mixed solutions
6 ' second mixed solutions
7 first solid mixt matter
7 ' second solid mixt matter
8 second specific organic layers
S01~S14 method and steps
Embodiment
Preparation method in order to more clearly describe a kind of organic element proposed by the invention, below in conjunction with attached
Figure introduces the present invention and is applied to the embodiment of manufacture Organic Light Emitting Diode, and at large illustrates the system of the organic element of the present invention
Make method.
Refer to Fig. 3 and Fig. 4 a to Fig. 4 e, the first pass figure of the preparation method of a kind of organic element of the invention and the
One schematic flow sheet.As illustrated, a kind of preparation method of organic element of the present invention mainly comprises the steps：
First, perform step (S01) organic material (11,12,13) is carried out weighing and matched somebody with somebody separately by electronic scale 2
Put；And then step (S02) and step (S03) are performed, dissolved using an organic solvent 3 those organic materials (11,12,
13), and it is respectively formed organic material solution, also, equably mixes above-mentioned organic material according to the ratio of required allotment again
Expect solution, and then form a mixed solution 6.
Complete after above-mentioned steps, then perform step (S04) and held so that the mixed solution 6 is inserted into one first evaporation material
Among load container 4, and carry out vacuum drying program and then produce one first solid mixt matter 7；Also, perform step (S05)
With step (S06), it is specific in preparing one first on substrate B by vapor deposition processes by the first solid mixt matter 7
Organic layer 5, and terminate the vapor deposition processes of the first evaporation material support container 4 and the first solid mixt matter 7.
It must illustrate, among the present invention, the first evaporation material support container 4 has with vapor deposition processes
The once characteristic of property, i.e., after single vapour deposition flow is terminated, the in the first evaporation material support container 4
One solid mixt matter 7 is also almost used up, and in completing after the Making programme of the first specific organic layer 5, then carries out following institute
The the second specific Making programme for having a basic unit stated：
Refer to Fig. 5 and Fig. 6 a to Fig. 6 c, second flow chart and the second procedure schematic diagram of the preparation method of organic element；
As illustrated, after step step (S06) is completed, and then the present invention performs step (S07) to judge whether to need to continue
One second specific organic layer 8 is made, if so, then performing step (S08)；If it is not, then terminating whole Making programme.In step
(S08) among, by required multiple organic materials (11 ', 12 ', 13 '), respectively weighing is configured, and performs step (S09) and step
Suddenly (S10), it is dissolved in those organic materials (11 ', 12 ', 13 ') described in step (S08), and shape respectively using an organic solvent
Into organic material solution, then, then according to allotment ratio, the organic material solution of uniform blend step (S09), and one the is formed
Two mixed solutions 6 '.
Complete after above-mentioned steps, then perform step (S11) second mixed solution 6 ' is inserted into one second evaporation
Among material support container 4 ', and carry out vacuum drying program and then produce one second solid mixt matter 7 '；Also, perform step
Suddenly (S12) and step (S13), specific have base by vapor deposition processes by the second solid mixt matter 7 ' in above-mentioned first
One second specific organic layer 8 is prepared on layer 5, terminates the second evaporation material support container 4 ' and the second solid mixt matter
7 ' vapor deposition processes.
Among the present invention, in complete above-mentioned steps (S13) followed by perform step (S14) with judge whether need after
It is continuous to make the specific organic layers of N, if so, then repeating step (S08)~step (S13)；If it is not, then step terminates.Such as
This mode, can complete the sandwich construction of Organic Light Emitting Diode in order, and then complete organic by the Making programme of the present invention
The making of light emitting diode.
Wherein, it is worth further stating clearly, is disposably deposited among step (S05), i.e. the first evaporation material
The first solid mixt matter in support container performs step (S06) after being only once deposited；Also, step (S12)
Among be also disposably deposited, i.e. the second solid mixt matter in the second evaporation material support container is only once deposited
Step (S13) is performed afterwards；In addition, in step (S05) with it is complete by vapour deposition method or vacuum splashing and plating method among step (S12)
Into vapor deposition processes.
In addition, in the organic solvent described in the present embodiment can be following group any one：Toluene (Toluene)
Solvent, acetone (Acetone) solvent and tetrahydrofuran (Tetrahydrofuran, THF) solvent.And organic material can be
The mixing material of one fluorescence luminescent material, a phosphorescent light-emitting materials or above two luminescent material；Further, organic material
Can be more a material of main part, and the material of main part is selected from any one of following group：Alq3 materials, DPVBi materials, BANE materials
The mixing material of material, Rubrene materials, CBP materials and above-mentioned material；In addition, organic material can be more following group
Any one：Electron transport layer materials, electron injecting layer material, hole transport layer material, hole injection layer material, hole blocking layer
Material and feature auxiliary material.
Central, the present invention mainly is deposited board F to perform described step (S04) extremely by the one of controllable evaporation order
Step (S06) and step (S11) to step (S13), wherein, the first evaporation material support container 4 with this second evaporation thing
Matter support container 4 ' is deposited in succession by the evaporation board F.In addition, substrate B is arranged on evaporation board F,
And multiple specific organic layers are deposited on substrate B in order in order by above-mentioned mode, also, the substrate can be by
Hard material or flexible materials are constituted.
In more detail, Fig. 7 a to Fig. 7 b are referred to, board illustrative view are deposited, as illustrated, evaporation board F is main
Include：One machine table main body F1, a heating evaporation disc F6, a vacuum module F5 and a base board carrier F2；Wherein, board master
Body F1 has an evaporation space F11, and heating evaporation disc F6, is arranged at the evaporation space F11 bottoms and is provided with multiple add
Thermode, also, vacuum module F5 is connected to machine table main body F1 and to cause evaporation space F11 that vacuum shape is presented
State.
In addition, base board carrier F2 is arranged at the top of the F11 of the evaporation space relative to the heating evaporation disc F6, and the base
Plate B is arranged on base board carrier F2 and corresponds to wherein one heating electrode, wherein, should when above-mentioned steps (S05) is performed
First evaporation material support container 4 is arranged at the wherein one heating electrode, and then by way of turning on heating electrode, can make
The first solid mixt matter hot evaporation in the first evaporation material support container 4 on base board carrier F2 substrate B and being formed
The first specific organic layer.
Hold above-mentioned, when carrying out the evaporation process, base board carrier F2 will simultaneously be rotated and be caused the first solid-state
Compounding substances are equably deposited on substrate B.Also, it is then to be held by closing first evaporation material among step (S06)
The heating electrode of container 4 is carried, and then terminates the vapor deposition processes of the first solid mixt matter.
On the other hand, when step (S12) is performed, the second evaporation material support container 4 ' is arranged at another heating electricity
Pole, and by by way of turning on the heating electrode, may be such that the second solid-state in the second evaporation material support container 4 '
Compounding substances hot evaporation causes the second specific organic layer in simultaneously rotating base board carrier F2 on base board carrier F2 substrate B simultaneously
It is formed uniformly on substrate B.Also, by closing adding for the second evaporation material support container 4 ' among step (S13)
Thermode, and then terminate the vapor deposition processes of the second solid mixt matter.
As shown in Fig. 7 a and Fig. 7 b, vacuum module F5 is made up of a mechanical pump F51 with a diffusion pump F52, and the base
Onboard tool F2 is a rotator element and is formed with multiple substrate socket F21 with accommodating substrate B, also, each substrate is accommodating
Mouthful F21 bottom is provided with barrier version (not shown), and barrier version can obstruct in substrate B and heating evaporation disc F6 it
Between.Wherein, it may be such that vacuum state is presented in evaporation space F11 by mechanical pump F51 and diffusion pump F52, in addition, passing through
Those substrate sockets F21 setting causes base board carrier F2 to be able to while multiplying the multiple substrate B of load to carry out evaporation operation in turn,
Also, by obstructing the setting of version, user may specify that any substrate B is carried out or without flow is deposited.
On the other hand, evaporation board F has further included a controlling baffle plate F4, and controlling baffle plate F4 is arranged at evaporation sky
Between in F11, wherein, controlling baffle plate F4 can be barred between the heating evaporation disc F6 and base board carrier F2；Also, the evaporation
Board F has further included an at least thickness inductor F3, and thickness inductor F3 is arranged in the F11 of the evaporation space and by one
Support column F31 and be arranged at a certain height.
Be so designed that, user can immediately be grasped by thickness inductor F3 be formed at it is specific organic on substrate B
Thickness degree, and then it is barred between heating evaporation disc F6 and base board carrier F2 to control specific to have by controlling baffle plate F4
Machine thickness degree.
Please continue to refer to Fig. 7 a and Fig. 7 b, and please refer to Fig. 8, Fig. 7 b Z region enlarged drawing, as shown in figure 8, each
Individual heating electrode includes：One first electrode connector F63, a second electrode connector F64 and a container fixture F62,
Also, evaporation material support container is arranged on container fixture F62, and container fixture F62 two ends are connected respectively
In the first electrode connector F63 and second electrode connector F64；In addition, those heating electrode retaining collars are deposited located at the heating
On disk F6, and a baffle plate F61 is provided between adjacent heating electrode, wherein, different bearer can be avoided by baffle plate F61 design
The situation that the solid mixt matter of container interacts during high temperature deposition.
In this way, it is above-mentioned completely and clearly demonstrate the present invention a kind of organic element preparation method；Also, the present invention
Tool has the advantage that：
1. the mode by the present invention can replace existing Organic Light Emitting Diode production method, so avoid the need for by
Simultaneously different materials are deposited on same substrate by heating the mode of multitube steel cylinder respectively, to form organic light-emitting diodes
The shortcomings of wasting of resources produced by the single layer structure of pipe.
2. by evaporation board and the characteristic being disposably deposited so that the present invention is able to replace existing technology, further
Ground is avoided due to being repeatedly deposited, and make it that the interior of steel bottle pressure of heating is difficult to the shortcoming for being maintained at a specified pressure, Jin Erti
The production yield of high Organic Light Emitting Diode.
Certainly, the present invention can also have other various embodiments, ripe in the case of without departing substantially from spirit of the invention and its essence
Various corresponding changes and deformation, but these corresponding changes and change ought can be made according to the present invention by knowing those skilled in the art
Shape should all belong to the protection domain of appended claims of the invention.
Claims (21)
1. a kind of preparation method of organic element, it is characterised in that including at least following steps：
(1) will the difference weighing configuration of an at least organic material；
(2) an at least organic material is dissolved using an at least organic solvent, to form an at least organic material solution；
(3) according to allotment ratio, an at least organic material solution is equably mixed, to form a mixed solution；
(4) mixed solution is inserted into one first evaporation material support container, carries out vacuum drying program and generation one first is consolidated
State compounding substances；
(5) by the first solid mixt matter, one first specific organic layer is prepared by vapor deposition processes；And
(6) vapor deposition processes of the first evaporation material support container and the first solid mixt matter are terminated.
2. the preparation method of organic element according to claim 1, it is characterised in that more wrapped after step (6) is completed
Include following step：
(7) whether need to continue to make one second specific organic layer, if so, then performing step (8)；If it is not, then step terminates；
(8) by required at least organic material difference weighing configuration；
(9) an at least organic material is dissolved using an at least organic solvent, forms an at least organic material solution；
(10) according to allotment ratio, an at least organic material solution is uniformly mixed, one second mixed solution is formed；
(11) second mixed solution is inserted into one second evaporation material support container, carries out vacuum drying program, produce one the
Two solid mixt matter；
(12) by the second foregoing solid mixt matter, one second specific organic layer is prepared by vapor deposition processes；
(13) vapor deposition processes of the second evaporation material support container and the second solid mixt matter are terminated；And
(14) whether need to continue to make the specific organic layers of N, if so, then repeating step (8)~step (13)；If
No, then step terminates.
3. the preparation method of organic element according to claim 2, it is characterised in that the organic solvent is selected from following group
Any one：Toluene solvant, acetone solvent and tetrahydrofuran solvent.
4. the preparation method of organic element according to claim 2, it is characterised in that the organic material is a luminous material
Material, and the luminescent material is selected from any one of following group：Fluorescence luminescent material, phosphorescent light-emitting materials and include above-mentioned two material
The mixing material of material.
5. the preparation method of organic element according to claim 2, it is characterised in that the organic material is a main body material
Material, and the material of main part is selected from any one of following group：Alq3 materials, DPVBi materials, BANE materials, Rubrene materials,
The mixing material of CBP materials and above-mentioned material.
6. the preparation method of organic element according to claim 2, it is characterised in that the organic material is selected from following group
Any one：Electron transport layer materials, electron injecting layer material, hole transport layer material, hole injection layer material, hole barrier
Layer material and feature auxiliary material.
7. the preparation method of organic element according to claim 2, it is characterised in that in step (5) and step (12) it
In by vapour deposition method or vacuum splashing and plating method to complete vapor deposition processes.
8. the preparation method of organic element according to claim 7, it is characterised in that carried out once among step (5)
Property evaporation, i.e. i.e. execution step after the first solid mixt matter in the first evaporation material support container is only once deposited
(6)；Also, step is also disposably deposited among (12), i.e. the second solid-state mixing in the second evaporation material support container
Material performs step (13) after being only once deposited.
9. the preparation method of organic element according to claim 7, it is characterised in that by a steaming of control evaporation order
Board is plated to perform described step (4)~(6) and step (11)~(13), wherein, the first evaporation material support container
It is deposited in succession by the evaporation board with the second evaporation material support container.
10. the preparation method of organic element according to claim 9, it is characterised in that the evaporation board is provided with a base
Plate, also, the first specific organic layer and the second specific organic layer be deposited on the substrate in order.
11. the preparation method of organic element according to claim 10, it is characterised in that the material of the substrate is by with the following group
Selection is used in conjunction：Hard material or flexible materials.
12. the preparation method of organic element according to claim 10, it is characterised in that the evaporation board includes：
One machine table main body, with an evaporation space；
One heating evaporation disc, is arranged at the evaporation space bottom and is provided with multiple heating electrodes；
One vacuum module, is connected to the machine table main body and to cause the evaporation space that vacuum state is presented；And
One base board carrier, the evaporation top of space is arranged at relative to the heating evaporation disc, and the substrate is arranged at the substrate
On carrier and correspond to wherein one heating electrode；
Wherein, when step (5) are performed, the first evaporation material support container is arranged at the wherein one heating electrode, and then
By way of turning on heating electrode so that the first solid mixt matter hot evaporation in the first evaporation material support container is in base
On the substrate of onboard tool and form the first specific organic layer；
Wherein, when carrying out the evaporation process, the base board carrier will simultaneously be rotated and cause the first solid mixt matter
Equably it is deposited on the substrate.
13. the preparation method of organic element according to claim 12, it is characterised in that by closing among step (6)
The heating electrode of the first evaporation material support container, and then terminate the vapor deposition processes of the first solid mixt matter.
14. the preparation method of organic element according to claim 12, it is characterised in that, should when step (12) are performed
Second evaporation material support container is arranged at another heating electrode, and then by way of turning on the heating electrode so that the
The second solid mixt matter hot evaporation in two evaporation material support containers is on the substrate of base board carrier and to form this second special
Determine organic layer.
15. the preparation method of organic element according to claim 14, it is characterised in that by closing among step (13)
The heating electrode of the second evaporation material support container, and then terminate the vapor deposition processes of the second solid mixt matter.
16. the preparation method of organic element according to claim 12, it is characterised in that each heating electrode includes
Have：One first electrode connector, a second electrode connector and a container fixture, also, evaporation material support container sets
It is placed on the container fixture, and the two ends of the container fixture are connected to the first electrode connector and the second electrode
Connector.
17. the preparation method of organic element according to claim 12, it is characterised in that those heating electrode retaining collars are located at should
Heat on evaporation disc, and a baffle plate is provided between adjacent heating electrode.
18. the preparation method of organic element according to claim 12, it is characterised in that the vacuum module is by a mechanical pump
Constituted with a diffusion pump.
19. the preparation method of organic element according to claim 12, it is characterised in that the base board carrier is rotating disk member
Part is simultaneously formed with an at least substrate socket to house the substrate, also, the bottom of the substrate socket is provided with barrier version,
And barrier version is obstructed between the substrate and the heating evaporation disc.
20. the preparation method of organic element according to claim 12, it is characterised in that the evaporation board has further included one
Controlling baffle plate, and the controlling baffle plate is arranged in the evaporation space, wherein, the controlling baffle plate be barred from the heating evaporation disc with should
Between base board carrier.
21. the preparation method of organic element according to claim 12, it is characterised in that the evaporation board further included to
Lack a thickness inductor, and the thickness inductor is arranged in the evaporation space and is arranged at a specific height by a support column
Degree.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101435888A (en) * | 2007-11-16 | 2009-05-20 | 爱普生拓优科梦株式会社 | Optical multilayer filter, method of manufacturing the same, and electronic apparatus |
| CN101693990A (en) * | 2009-10-16 | 2010-04-14 | 电子科技大学 | Single-source chemical vapor deposition (CVD) preparation method of a-side ZnO film |
| CN101724810A (en) * | 2009-12-10 | 2010-06-09 | 友达光电股份有限公司 | Evaporation method and evaporation equipment |
| CN104313538A (en) * | 2014-11-18 | 2015-01-28 | 京东方科技集团股份有限公司 | Vacuum evaporation device and method |
-
2016
- 2016-01-27 CN CN201610055543.2A patent/CN107017343B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101435888A (en) * | 2007-11-16 | 2009-05-20 | 爱普生拓优科梦株式会社 | Optical multilayer filter, method of manufacturing the same, and electronic apparatus |
| CN101693990A (en) * | 2009-10-16 | 2010-04-14 | 电子科技大学 | Single-source chemical vapor deposition (CVD) preparation method of a-side ZnO film |
| CN101724810A (en) * | 2009-12-10 | 2010-06-09 | 友达光电股份有限公司 | Evaporation method and evaporation equipment |
| CN104313538A (en) * | 2014-11-18 | 2015-01-28 | 京东方科技集团股份有限公司 | Vacuum evaporation device and method |
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