CN106976172A - Intelligent silicon ingot cutting system - Google Patents
Intelligent silicon ingot cutting system Download PDFInfo
- Publication number
- CN106976172A CN106976172A CN201710339815.6A CN201710339815A CN106976172A CN 106976172 A CN106976172 A CN 106976172A CN 201710339815 A CN201710339815 A CN 201710339815A CN 106976172 A CN106976172 A CN 106976172A
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- CN
- China
- Prior art keywords
- silicon ingot
- ingot cutting
- intelligent
- motor
- cutting system
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a kind of intelligent silicon ingot cutting system, including silicon ingot cutting machine, intelligent machine arm, raw material and conveyor line of waste and finished product pipeline, silicon ingot cutting machine is provided with some, silicon ingot cutting machine rule is randomly distributed, silicon ingot cutting machine center is provided with intelligent machine arm, raw material and conveyor line of waste and finished product pipeline, the invention provides there is provided a kind of rational in infrastructure, operating efficiency is high, the intelligent silicon ingot cutting system that high yield rate, time saving and energy saving, automaticity are high.
Description
Technical field
The present invention relates to silicon ingot cutting equipment field, a kind of intelligent silicon ingot cutting system is more particularly to.
Background technology
For monocrystalline silicon growing into silicon rod become silicon wafer, in addition it is also necessary to being exactly the step of by by the cutting of silicon rod will
Defective part is cut away inside the out-of-flatness of cubical silicon ingot two ends and silicon ingot, so needing to utilize intelligent silicon ingot cut-out system
Uniting, it is smooth to carry out cutting to the two ends of silicon ingot.Need to exist in advance in the current cutting system progress cutting silicon ingot using intelligence silicon ingot
Draw the line to be cut on silicon ingot, then put silicon ingot on workbench successively by operating personnel, then be directed at intelligent silicon ingot cut-out
Line of cut in system, then cut by intelligent silicon ingot cutting system, treat that one end has been cut and adjust silicon ingot by operating personnel again
And the line of cut being aligned on intelligent silicon ingot cutting system is cut.Existing regulation cutting machine has following defect:
1st, intelligent silicon ingot cutting system, which is often cut, is once required to operating personnel and is exchanged, and efficiency is low;
2nd, operating personnel against the line of cut on the intelligent silicon ingot cutting system of line alignment finished on silicon ingot due to being artificial
Operation, silicon ingot has cut easy appearance to the big wasting phenomenon of line deviation;
3rd, silicon ingot is weighed very much, and it is very big that operating personnel shift from one place to another physical demands.
The content of the invention
In order to solve the above problems, object of the present invention is to provide a kind of rational in infrastructure, operating efficiency is high, yield rate
The high intelligent silicon ingot cutting system of high, time saving and energy saving, automaticity.
According to an aspect of the invention, there is provided intelligent silicon ingot cutting system it include silicon ingot cutting machine, intelligent machine
Arm, raw material and conveyor line of waste and finished product pipeline, silicon ingot cutting machine is provided with some, regular or irregular point of silicon ingot cutting machine
Cloth, silicon ingot cutting machine center is provided with intelligent machine arm, raw material and conveyor line of waste and finished product pipeline.
In some embodiments, silicon ingot cutting machine includes frame and rack-mounted take-up and pay-off device, cutting
Device and rotary working platform, take-up and pay-off device are connected by line of cut with cutter device, and cutter device is arranged at rotation work
Make directly over platform, rotary working platform is included on body, lifting drive mechanism, bindiny mechanism and rotary drive mechanism, body
End face is provided with fixture, and the lower surface of body is provided with lifting drive mechanism, and lifting drive mechanism is driven by bindiny mechanism and rotation
Motivation structure is connected, and lifting drive mechanism carries out rotation after rising and reloaded, and the silicon ingot of opposite side can pass through people while cutting
The progress of work or manipulator is changed, and the silicon ingot that side cut-out terminates opposite side has been changed by the lifting of lifting drive mechanism and revolved
Turn drive mechanism and rotate 180 °, connect such production efficiency height, save the time.
In some embodiments, lifting drive mechanism includes the first actuator, the second actuator and rotary shaft, and first drives
Moving part drives the second actuator to rise or decline, and the second actuator is connected with body, rotary shaft pass through the first actuator and in
Second actuator is fixedly connected, rotary shaft connection rotary drive mechanism, and the rising of body is easy to implement by the first actuator.
In some embodiments, rotary shaft two ends are arranged with bindiny mechanism, and bindiny mechanism includes clutch shaft bearing and second
Bearing, clutch shaft bearing is fixed on the first actuator, and fixing rotary shaft by two groups of bearings is easy to make rotary shaft more stablize, together
When driving body rotation it is more laborsaving.
In some embodiments, take-up and pay-off device includes the first cable pulling-pushing device and the second cable pulling-pushing device, and first receives
Cutter device, the first cable pulling-pushing device and the second retractable cable are connected by line of cut between payingoff mechanism and the second cable pulling-pushing device
Mechanism structure is identical, by two groups of cable pulling-pushing devices while the rotation of forward and reverse, drives line of cut to realize and silicon ingot is cut
Cut.
In some embodiments, the first cable pulling-pushing device includes the first motor, retractable cable roller, line rail, screw mandrel, screw mandrel spiral shell
Female seat, the second motor, the first mounting seat and sliding block, the first motor connection retractable cable roller, the first motor and retractable cable roller are fixed on
In first mounting seat, sliding block is set on line rail, and screw mandrel is provided with feed screw nut's seat, and screw mandrel connects the second motor, the first peace
Fill seat to be arranged on feed screw nut's seat and sliding block, do straight reciprocating motion on the second motor driving online rail of the first mounting seat, lead to
Cross the second motor and drive the movement of retractable cable roller, prevent line of cut to be laminated, the bortz on destruction line of cut.
In some embodiments, cutter device includes Lift Part, cutting rack and guide roller, Lift Part driving cutting
Frame is moved up and down above rotary working platform, and some guide rollers, guide roller and the first cable pulling-pushing device are provided with cutting rack
Connected, driven by Lift Part above and below line of cut by line of cut with the second cable pulling-pushing device, realize the cutting to silicon ingot.
In some embodiments, rotary drive mechanism includes the 3rd motor, the second mounting seat, the first drive, second
Drive and driving-chain, the 3rd motor are fixed in the second mounting seat, and the first drive is connected with the 3rd motor output shaft, the
Two driving wheel tubes are set on the rotating shaft, and driving-chain connects the first drive and the second drive, is realized by rotary drive mechanism
The rotation that 180 ° of body.
In some embodiments, fixture is provided with two groups, just with realizing 2 groups of silicon ingots of clamping simultaneously, is conducive to improving production
Efficiency.
In some embodiments, mechanical arm includes manipulator, rotating mechanism and image comparison mechanism, image comparison mechanism
Manipulator and rotating mechanism can be driven to capture semi-finished product from raw material and conveyor line of waste to be placed on rotary working platform simultaneously
Finished product is grabbed into finished product pipeline, manipulator can grab waste material on raw material and conveyor line of waste.
Brief description of the drawings
Fig. 1 is the structural representation of intelligent silicon ingot cutting system of the invention;
Fig. 2 is the structural representation of the silicon ingot cutting machine of intelligent silicon ingot cutting system of the invention;
Fig. 3 is the structural perspective of the silicon ingot cutting machine of intelligent silicon ingot cutting system of the invention;
Fig. 4 is the structural representation of the rotary working platform of intelligent silicon ingot cutting system of the invention;
Fig. 5 is the sectional view in A-A directions in Fig. 4;
Fig. 6 is the structural representation of the mechanical arm of intelligent silicon ingot cutting system of the invention.
Embodiment
With reference to embodiment, the present invention is further illustrated.
As shown in figure 1, a kind of intelligent silicon ingot cutting system of the present invention include silicon ingot cutting machine 1, intelligent machine arm 2,
Raw material and conveyor line of waste 3 and finished product pipeline 4, silicon ingot cutting machine 1 is provided with some, the rule of silicon ingot cutting machine 1 or irregular
Distribution, the center of silicon ingot cutting machine 1 is provided with intelligent machine arm 2, raw material and conveyor line of waste 3 and finished product pipeline 4.
As shown in Fig. 2 silicon ingot cutting machine 1 includes frame 11 and take-up and pay-off device 12 in frame 11, cutting
Device 13 and rotary working platform 14, take-up and pay-off device 12 are connected by line of cut 15 with cutter device 13, cutter device 13
It is arranged at directly over rotary working platform 14.Line of cut 15 is due to being that should utilize diamond using diamond wire for cutting silicon ingot
Relative grinding motion is formed between line and cut object, so as to realize the purpose of cutting.
As shown in figure 3, take-up and pay-off device 12 includes the first cable pulling-pushing device 121 and the second cable pulling-pushing device 122, first receives
Cutter device 13, the first cable pulling-pushing device are connected by line of cut 15 between the cable pulling-pushing device 122 of payingoff mechanism 121 and second
121 is identical with the structure of the second cable pulling-pushing device 122, by two groups of cable pulling-pushing devices while the rotation of forward and reverse, drive is cut
Secant realizes the cutting to silicon ingot.
First cable pulling-pushing device 121 includes the first motor 1211, retractable cable roller 1212, line rail 1213, screw mandrel 1214, screw mandrel
Nut seat 1215, the second motor 1216, the first mounting seat 1217 and sliding block 1218, the first motor 1211 connection retractable cable roller
1212, the first motor 1211 and retractable cable roller 1212 are fixed in the first mounting seat 1217, and sliding block 1218 is arranged online rail 1213
On, screw mandrel 1214 is installed, screw mandrel 1214 connects the second motor 1216, and the first mounting seat 1217 is installed in feed screw nut's seat 1215
On feed screw nut's seat 1215 and sliding block 1218, straight line is done on the second motor 1216 driving online rail 1213 of the first mounting seat 1217
Move back and forth, drive retractable cable roller to move by the second motor 1216, prevent line of cut 15 to be laminated, diamond wire room is by diamond
Over the metal lines, stacking can make on line of cut 5 bortz drop influence cutting effect to bonding.
Cutter device 13 includes Lift Part 131, cutting rack 132 and guide roller 133, and Lift Part 131 passes through motor belt motor
Dynamic screw mandrel, and then drive moving back and forth above and below mobile realization on the online rail of sliding block.The driving cutting rack 132 of Lift Part 131 exists
The top of rotary working platform 14 is moved up and down, and some guide rollers 133, the folding and unfolding of guide roller 133 and first are provided with cutting rack 132
The cable pulling-pushing device 122 of line mechanism 121 and second is connected by line of cut 15, and line of cut is driven about 15 by Lift Part 131,
Realize the cutting to silicon ingot.
As shown in figure 4, rotary working platform 14 includes body 141, lifting drive mechanism 142, bindiny mechanism 143 and rotation
Drive mechanism 144, the upper surface of body 141 is provided with fixture 1411, and fixture 1411 is provided with two groups, just with realizing 42 groups of silicon of clamping simultaneously
Ingot, the fixture that every group of fixture is provided with 4 silicon ingots is used to 8 silicon ingots of clamping, is conducive to improving production efficiency.Under body 141
End face is provided with lifting drive mechanism 142, and lifting drive mechanism 142 is connected by bindiny mechanism 143 and rotary drive mechanism 144
Connect, cut when lifting drive mechanism 142 is fallen, the silicon ingot of opposite side can pass through artificial or machine while cutting
The progress of tool hand is changed, and the silicon ingot that side cut-out terminates opposite side has been changed by the lifting of lifting drive mechanism 1421 and rotated drive
Motivation structure rotates 180 °, connects such production efficiency height, saves the time.
As shown in figure 5, lifting drive mechanism 142 includes the first actuator 1421, the second actuator 1424 and rotary shaft
1422, the first actuator 1421 drives the second actuator 1424 to rise or decline, and the second actuator 1424 connects with body 141
Connect, rotary shaft 1422 is fixedly connected through the first actuator 1421 and in the second actuator 1424, the connection rotation of rotary shaft 1422
Drive mechanism 144, the rising of body is easy to implement by the first actuator 1421.First actuator 1421 can using pneumatic or
The drive mechanism of person's hydraulic pressure, can use pneumatic system or hydraulic system according to intelligent silicon ingot cutting system and determine, separately
Rotary shaft 1422 can just drive the second actuator 1424 after the outer driving of first actuator 1421 lifting of second actuator 1424
Rotation;First actuator 1421 is driven after the decline of the second actuator 1424, the first actuator 1421 and the second actuator 1424
Engaging ensures the static fixation of the second actuator 1424.
The two ends of rotary shaft 1422 are arranged with bindiny mechanism 143, and bindiny mechanism 143 includes clutch shaft bearing 1423 and second bearing
1431, clutch shaft bearing 1423 is fixed on the first actuator 1421, is easy to make rotation by two groups of bearing fixed bias circuits 1422
Axle 1422 is more stablized, while driving body rotation more laborsaving.
Rotary drive mechanism 144 includes the 3rd motor 1441, the second mounting seat 1442, the first drive 1443, second and passed
Driving wheel 1444 and driving-chain 1445, the 3rd motor 1441 are fixed in the second mounting seat 1442, on the output shaft of the 3rd motor 1441
The first drive 1443 is connected with, the second drive 1444 is set in rotary shaft 1422, the connection of driving-chain 1,445 first is driven
The drive 1444 of wheel 1443 and second, 180 ° of rotation of body 1 is realized by rotary drive mechanism 144.Can be by turning
It is positioned proximate to switch 180 ° that realize body 141 of rotation on moving axis 1422, can also be by the way that the 3rd motor 1441 be arranged to
Servomotor stops to realize 180 ° of body 141 of rotation by the standard of main shaft.
As shown in fig. 6, mechanical arm 2 includes manipulator 21, rotating mechanism 22 and image comparison mechanism 23, image comparison mechanism
23 can drive manipulator 21 and rotating mechanism 22 captured from raw material and conveyor line of waste 3 semi-finished product be placed on rotary work put down
Finished product pipeline 4 is grabbed on platform 14 and by finished product, manipulator 21 can grab waste material on raw material and conveyor line of waste 3.
Image comparison mechanism 23 can recognize the line manually drawn on silicon ingot, and the silicon ingot of semi-finished product is placed on rotation by control machinery hand 21
On workbench 14 and it is directed at line of cut 15.The silicon ingot completed simultaneously for cutting processing, manipulator 21 grabs into finished product
Product pipeline 4 in scrap feed material and conveyor line of waste 3, will realize the automation of a full set of process.
In the specific implementation, first by being put the silicon ingot for finishing line in raw material and conveyor line of waste 3 successively by operating personnel
On, image comparison mechanism 23 can recognize the line manually drawn on silicon ingot, and the silicon ingot of semi-finished product is placed on by control machinery hand 21
On rotary working platform 14 and it is directed at line of cut 15, the first cable pulling-pushing device 121 and the second cable pulling-pushing device 122 drive line of cut
15 rotations, the driving cutting rack 132 of Lift Part 131, which declines, drives line of cut 15 to move down cutting silicon ingot, waits after cutting completion, rises
The drop driving cutting rack 132 of part 131, which rises, drives line of cut 15 to move up, and the first actuator 1421 driving body 141 rises, and the 3rd
Motor 1441 drives the first drive 1443 to rotate, and then drives the second drive 1444 and rotary shaft 1422 to rotate, final real
Existing body 141 rotates 180 °;Final body 141 rotates the first actuator 1421 driving body 141 after 180 ° and declined, then by cutting
Line 15 is cut to silicon ingot, and so on.Make full use of intelligent silicon ingot cutting system in the time cut to silicon ingot to silicon ingot
It is adjusted or changes, is finally reached operating efficiency height, high yield rate, time saving and energy saving beneficial effect.
Above-described is only some embodiments of the present invention, it is noted that for one of ordinary skill in the art
For, on the premise of the creation design of the present invention is not departed from, other modification and improvement can also be made, these belong to this hair
Bright protection domain.
Claims (10)
1. intelligent silicon ingot cutting system, it is characterised in that including silicon ingot cutting machine (1), intelligent machine arm (2), raw material and waste material
Pipeline (3) and finished product pipeline (4), the silicon ingot cutting machine (1) provided with some, silicon ingot cutting machine (1) rule or
It is randomly distributed, silicon ingot cutting machine (1) center is defeated provided with intelligent machine arm (2), raw material and conveyor line of waste (3) and finished product
Line sending (4).
2. intelligent silicon ingot cutting system according to claim 1, it is characterised in that the silicon ingot cutting machine (11) includes machine
Frame (11) and take-up and pay-off device (12), cutter device (13) and rotary working platform (14) in frame (11), institute
State take-up and pay-off device (12) by line of cut (15) with cutter device (13) to be connected, the cutter device (13) is arranged at rotation
Directly over workbench (14), the rotary working platform (14) includes body (141), lifting drive mechanism (142), connection machine
Structure (143) and rotary drive mechanism (144), body (141) upper surface are provided with fixture (1411), the body (141)
Lower surface is provided with lifting drive mechanism (142), and the lifting drive mechanism (142) is driven by bindiny mechanism (143) and rotation
Motivation structure (144) is connected.
3. intelligent silicon ingot cutting system according to claim 2, it is characterised in that lifting drive mechanism (142) bag
Include the first actuator (1421), the second actuator (1424) and rotary shaft (1422), the first actuator (1421) driving the
Two actuators (1424) rise or declined, and second actuator (1424) is connected with body (141), the rotary shaft
(1422) pass through the first actuator (1421) and be fixedly connected in the second actuator (1424), rotary shaft (1422) the connection rotation
Turn drive mechanism (144).
4. intelligent silicon ingot cutting system according to claim 3, it is characterised in that rotary shaft (1422) two ends are arranged
There is bindiny mechanism (143), the bindiny mechanism (143) includes clutch shaft bearing (1423) and second bearing (1431), described first
Bearing (1423) is fixed on the first actuator (1421).
5. intelligent silicon ingot cutting system according to claim 2, it is characterised in that the take-up and pay-off device (12) includes the
One cable pulling-pushing device (121) and the second cable pulling-pushing device (122), first cable pulling-pushing device (121) and the second wire rewinding and paying off machine
Cutter device (13), first cable pulling-pushing device (121) and the second retractable cable are connected by line of cut (15) between structure (122)
Mechanism (122) structure is identical.
6. intelligent silicon ingot cutting system according to claim 5, it is characterised in that first cable pulling-pushing device (121)
Including the first motor (1211), retractable cable roller (1212), line rail (1213), screw mandrel (1214), feed screw nut's seat (1215), second
Motor (1216), the first mounting seat (1217) and sliding block (1218), the first motor (1211) connection retractable cable roller (1212),
First motor (1211) and retractable cable roller (1212) are fixed in the first mounting seat (1217), and the sliding block (1218) is arranged
On online rail (1213), screw mandrel (1214), screw mandrel (1214) connection second are installed in feed screw nut's seat (1215)
Motor (1216), first mounting seat (1217) is arranged on feed screw nut's seat (1215) and sliding block (1218), and described second
Motor (1216) drives and does straight reciprocating motion on the online rail (1213) of the first mounting seat (1217).
7. intelligent silicon ingot cutting system according to claim 1, it is characterised in that the cutter device (13) includes lifting
Part (131), cutting rack (132) and guide roller (133), Lift Part (131) the driving cutting rack (132) is in rotary work
Move up and down above platform (14), some guide rollers (133) be installed on the cutting rack (132), the guide roller (133) with
First cable pulling-pushing device (121) and the second cable pulling-pushing device (122) are connected by line of cut (15).
8. intelligent silicon ingot cutting system according to claim 3, it is characterised in that rotary drive mechanism (144) bag
Include the 3rd motor (1441), the second mounting seat (1442), the first drive (1443), the second drive (1444) and driving-chain
(1445), the 3rd motor (1441) is fixed in the second mounting seat (1442), on the 3rd motor (1441) output shaft
The first drive (1443) is connected with, second drive (1444) is set in rotary shaft (1422), the driving-chain
(1445) the first drive of connection (1443) and the second drive (1444).
9. intelligent silicon ingot cutting system according to claim 3, it is characterised in that the fixture (1411) is provided with two groups.
10. intelligent silicon ingot cutting system according to claim 1, it is characterised in that the mechanical arm (2) includes manipulator
(21), rotating mechanism (22) and image comparison mechanism (23), described image contrast mechanism (23) can drive manipulator (21) and
Rotating mechanism (22) captures semi-finished product from raw material and conveyor line of waste (3) and is placed on rotary working platform (4) and by finished product
Finished product pipeline (4) is grabbed, the manipulator (21) can grab waste material on raw material and conveyor line of waste (3).
Priority Applications (1)
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CN201710339815.6A CN106976172B (en) | 2017-05-15 | 2017-05-15 | Intelligent silicon ingot cutting system |
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CN201710339815.6A CN106976172B (en) | 2017-05-15 | 2017-05-15 | Intelligent silicon ingot cutting system |
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CN106976172A true CN106976172A (en) | 2017-07-25 |
CN106976172B CN106976172B (en) | 2019-12-10 |
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Cited By (1)
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CN109421177A (en) * | 2017-09-01 | 2019-03-05 | 隆基绿能科技股份有限公司 | Work pieces process production system |
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CN109421177B (en) * | 2017-09-01 | 2023-11-28 | 隆基绿能科技股份有限公司 | Workpiece processing production system |
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