CN106903596A - Tft减薄抛光用吸附垫 - Google Patents
Tft减薄抛光用吸附垫 Download PDFInfo
- Publication number
- CN106903596A CN106903596A CN201710051131.6A CN201710051131A CN106903596A CN 106903596 A CN106903596 A CN 106903596A CN 201710051131 A CN201710051131 A CN 201710051131A CN 106903596 A CN106903596 A CN 106903596A
- Authority
- CN
- China
- Prior art keywords
- parts
- fluorochemical urethane
- perforated membrane
- mixture
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/36—Layered products comprising a layer of synthetic resin comprising polyesters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/40—Layered products comprising a layer of synthetic resin comprising polyurethanes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/06—Interconnection of layers permitting easy separation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Laminated Bodies (AREA)
- Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710051131.6A CN106903596B (zh) | 2017-01-23 | 2017-01-23 | Tft减薄抛光用吸附垫 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710051131.6A CN106903596B (zh) | 2017-01-23 | 2017-01-23 | Tft减薄抛光用吸附垫 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106903596A true CN106903596A (zh) | 2017-06-30 |
CN106903596B CN106903596B (zh) | 2018-06-19 |
Family
ID=59206549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710051131.6A Active CN106903596B (zh) | 2017-01-23 | 2017-01-23 | Tft减薄抛光用吸附垫 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106903596B (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111393831A (zh) * | 2020-04-16 | 2020-07-10 | 东莞市雄林新材料科技股份有限公司 | 一种耐温型刻字膜及其制备方法 |
CN112563132A (zh) * | 2020-11-13 | 2021-03-26 | 北京遥测技术研究所 | 一种表面异质结构的快速减薄抛光方法 |
CN113025222A (zh) * | 2021-03-10 | 2021-06-25 | 安徽禾臣新材料有限公司 | 一种电子显示屏精抛用吸附垫及其生产方法 |
CN113150712A (zh) * | 2021-03-12 | 2021-07-23 | 安徽禾臣新材料有限公司 | 一种电子显示屏生产用吸附垫及其制备工艺 |
CN113199395A (zh) * | 2021-03-31 | 2021-08-03 | 安徽禾臣新材料有限公司 | 一种无尘镀膜的可更换滤吸附垫及其实施方法 |
CN114683183A (zh) * | 2022-03-16 | 2022-07-01 | 安徽禾臣新材料有限公司 | 一种用于贵重金属表面抛光的阻尼布及其生产工艺 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3284274A (en) * | 1962-08-13 | 1966-11-08 | Du Pont | Cellular polymeric sheet material and method of making same |
CN1316939A (zh) * | 1998-07-10 | 2001-10-10 | 卡伯特微电子公司 | 半导体基材的抛光垫 |
CN1933938A (zh) * | 2004-03-23 | 2007-03-21 | 卡伯特微电子公司 | 低表面能的化学机械抛光垫 |
JP2010064212A (ja) * | 2008-09-12 | 2010-03-25 | Fujibo Holdings Inc | 研磨パッドおよびその製造方法 |
CN104755227A (zh) * | 2012-11-08 | 2015-07-01 | 东洋橡胶工业株式会社 | 层叠抛光垫 |
CN106163741A (zh) * | 2014-03-31 | 2016-11-23 | 富士纺控股株式会社 | 研磨垫及其制造方法 |
-
2017
- 2017-01-23 CN CN201710051131.6A patent/CN106903596B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3284274A (en) * | 1962-08-13 | 1966-11-08 | Du Pont | Cellular polymeric sheet material and method of making same |
CN1316939A (zh) * | 1998-07-10 | 2001-10-10 | 卡伯特微电子公司 | 半导体基材的抛光垫 |
CN1933938A (zh) * | 2004-03-23 | 2007-03-21 | 卡伯特微电子公司 | 低表面能的化学机械抛光垫 |
JP2010064212A (ja) * | 2008-09-12 | 2010-03-25 | Fujibo Holdings Inc | 研磨パッドおよびその製造方法 |
CN104755227A (zh) * | 2012-11-08 | 2015-07-01 | 东洋橡胶工业株式会社 | 层叠抛光垫 |
CN106163741A (zh) * | 2014-03-31 | 2016-11-23 | 富士纺控股株式会社 | 研磨垫及其制造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111393831A (zh) * | 2020-04-16 | 2020-07-10 | 东莞市雄林新材料科技股份有限公司 | 一种耐温型刻字膜及其制备方法 |
CN112563132A (zh) * | 2020-11-13 | 2021-03-26 | 北京遥测技术研究所 | 一种表面异质结构的快速减薄抛光方法 |
CN113025222A (zh) * | 2021-03-10 | 2021-06-25 | 安徽禾臣新材料有限公司 | 一种电子显示屏精抛用吸附垫及其生产方法 |
CN113150712A (zh) * | 2021-03-12 | 2021-07-23 | 安徽禾臣新材料有限公司 | 一种电子显示屏生产用吸附垫及其制备工艺 |
CN113199395A (zh) * | 2021-03-31 | 2021-08-03 | 安徽禾臣新材料有限公司 | 一种无尘镀膜的可更换滤吸附垫及其实施方法 |
CN113199395B (zh) * | 2021-03-31 | 2022-07-01 | 安徽禾臣新材料有限公司 | 一种无尘镀膜的可更换滤吸附垫及其实施方法 |
CN114683183A (zh) * | 2022-03-16 | 2022-07-01 | 安徽禾臣新材料有限公司 | 一种用于贵重金属表面抛光的阻尼布及其生产工艺 |
Also Published As
Publication number | Publication date |
---|---|
CN106903596B (zh) | 2018-06-19 |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Adsorption pad for TFT thinning and polishing Effective date of registration: 20201207 Granted publication date: 20180619 Pledgee: China Construction Bank Co.,Ltd. Hexian sub branch Pledgor: ANHUI HECHEN NEW MATERIAL Co.,Ltd. Registration number: Y2020340000058 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230703 Granted publication date: 20180619 Pledgee: China Construction Bank Co.,Ltd. Hexian sub branch Pledgor: ANHUI HECHEN NEW MATERIAL CO.,LTD. Registration number: Y2020340000058 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Adsorption pad for TFT thinning and polishing Effective date of registration: 20230704 Granted publication date: 20180619 Pledgee: China Co. truction Bank Corp Ma'anshan branch Pledgor: ANHUI HECHEN NEW MATERIAL CO.,LTD. Registration number: Y2023980047358 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |