CN106871620B - Glass-cleaning and drying device - Google Patents

Glass-cleaning and drying device Download PDF

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Publication number
CN106871620B
CN106871620B CN201710103441.8A CN201710103441A CN106871620B CN 106871620 B CN106871620 B CN 106871620B CN 201710103441 A CN201710103441 A CN 201710103441A CN 106871620 B CN106871620 B CN 106871620B
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CN
China
Prior art keywords
glass
fixing piece
air knife
cleaning
base station
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710103441.8A
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Chinese (zh)
Other versions
CN106871620A (en
Inventor
郑琼
梅澎
朱晓江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Priority to CN201710103441.8A priority Critical patent/CN106871620B/en
Publication of CN106871620A publication Critical patent/CN106871620A/en
Application granted granted Critical
Publication of CN106871620B publication Critical patent/CN106871620B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/10Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
    • F26B15/12Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
    • F26B15/18Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of materials being carried by endless belts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00Details of general application not covered by group F26B21/00 or F26B23/00

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning In General (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

The present invention provides a kind of glass-cleaning and drying device, by the way that at least one set of positioning component is arranged on the base station of carrying transmission belt, transmission belt is used for transmission glass, positioning component described in every group includes the first fixing piece and the second fixing piece being oppositely arranged, first fixing piece and second fixing piece are located above and below the transmission belt, so that when glass passes through between first fixing piece and second fixing piece therebetween by glass clamp;Wherein at least one set of positioning component is located at the feed side of the base station and is arranged close to air knife, the shake of glass can be reduced when increasing air knife wind-force through the above way, glass surface is remaining water stain so as to reducing, and can reduce the probability of glass damage, improves product quality.

Description

Glass-cleaning and drying device
Technical field
The present invention relates to display panel manufacturing technology fields, more particularly to a kind of glass-cleaning and drying device.
Background technique
In the manufacturing process of display panel, the cleaning-drying of glass substrate (such as color film glass substrate) be before processing procedure most One of important technique.At present after cleaning machine cleans glass substrate, final cleaning (final rinse) technique is had, Water membrane is uniformly sprayed to the upper surface of glass substrate, keeps glass substrate wet, prevents from having cleaned air knife (AK) section There is particulate matter (particle) to fall.Moisture film is dried up using air knife later, it is dirty on glass substrate comprehensively to take away.
However, if this layer of moisture film is not dried, it will formation water is residual on the glass substrate, leads to light in follow-up process The adhesion of resistance is poor, thus development when be easy to appear a large amount of peelings, and if the residual area of water it is larger, Photoresisting coating machines can Judgement detects foreign matter, and machine is caused to crash or shut down, and influences producing line mobility, and production efficiency reduces.
Remaining water stain on glass substrate to reduce as far as possible, the prior art generallys use the mode for increasing air knife wind-force, Moisture film is dried up.However, such mode is taken to be easy to make glass substrate that shake occur and be scratched film surface, substrate damage is caused.
Summary of the invention
The purpose of the present invention is to provide a kind of cleaning glass drying equipments, can reduce glass when increasing air knife wind-force Shake, glass surface is remaining water stain so as to reducing, and can reduce the probability of glass damage, improves product matter Amount.
The present invention provides a kind of glass-cleaning and drying device, comprising:
Base station;
Transmission belt is arranged on the base station, for carrying and transmitting glass;
Air knife is arranged along the transmission direction of glass and is located at the top of the transmission belt, for the entire width in glass On direction, to the glass jet drying gas being transmitted to below the air knife;
At least one set of positioning component is arranged on the base station, and positioning component described in every group includes first be oppositely arranged Fixing piece and the second fixing piece, first fixing piece and second fixing piece are located at the top of the transmission belt under Side, so that when glass passes through between first fixing piece and second fixing piece therebetween by glass clamp;
Wherein, the base station is divided into feed side and exit side as boundary using the position for corresponding to the air knife, and glass is from institute The lateral exit side transmission of charging is stated, at least one set positioning component is located at the feed side of the base station and close to the wind Knife setting.
In glass-cleaning and drying device of the present invention, further includes:
Lifting device is connect with the base station, for going out described in the lifting before the lower section that glass is sent to the air knife The base station of side is expected, so that the base station tilts upwards from the laterally exit side that feeds.
In glass-cleaning and drying device of the present invention, the air knife is arranged on the base station by support frame.
In glass-cleaning and drying device of the present invention, the width direction of the length direction of the air knife and glass it Between there is the angle that is not zero.
In glass-cleaning and drying device of the present invention, the width direction of the length direction of the air knife and glass it Between angle be 3 °~8 °.
In glass-cleaning and drying device of the present invention, first fixing piece and second fixing piece are rolling Wheel.
In glass-cleaning and drying device of the present invention, the quantity of the positioning component is two groups, fixed described in two groups Hyte part is located at the opposite sides edge of the transmission belt.
In glass-cleaning and drying device of the present invention, further includes:
Washing room closely surrounds the transmission belt;
Hothouse closely surrounds the transmission belt;
Water screen apparatus is arranged and is located at along the transmission direction of glass the top of the transmission belt, and is arranged in the washing Interior, for evaporation water to provide cold air to the washing room;
Flusher is arranged along the transmission direction of glass and is located at the top of the transmission belt, exists with air knife setting In the hothouse, for the glass spray water being transmitted to below the flusher;
Wherein glass successively passes through below the water screen apparatus, the flusher, the air knife.
In glass-cleaning and drying device of the present invention, further includes:
Water supply device, for being filled respectively to the water screen apparatus and the sprinkling by mutually independent two water channels Set water supply.
In glass-cleaning and drying device of the present invention, one end connection of two water channels, and be connected to The water supply device, the other end of two water channels are respectively connected to the water screen apparatus and the flusher, In be provided with control valve on a water channel.
Compared to existing glass cleaning mode, glass-cleaning and drying device of the invention is provided at least one set of positioning Component, the positioning component are located at the feed side of base station and are arranged close to air knife comprising the first fixing piece and the second fixing piece lead to It crosses and the first fixing piece and the second fixing piece is located above and below transmission belt, so that glass is from the first fixing piece and When passing through between two fixing pieces therebetween by glass clamp, stabilization is passed between the first fixing piece and the second fixing piece Defeated, thus when the wind-force for needing to increase air knife dries up glass, can greatly reduce causes glass to generate because of wind increases Shake, reduce the probability that glass damages, while can reduce remaining water stain on glass.
For above content of the invention can be clearer and more comprehensible, preferred embodiment is cited below particularly, and cooperate institute's accompanying drawings, makees Detailed description are as follows:
Detailed description of the invention
Fig. 1 is the schematic side view of one embodiment of glass-cleaning and drying device of the present invention;
Fig. 2 is the schematic top plan view of glass-cleaning and drying device shown in FIG. 1;
Fig. 3 is the schematic side view of another embodiment of glass-cleaning and drying device of the present invention, wherein being as shown in the figure base station Not inclined state;
Fig. 4 is glass-cleaning and drying device shown in Fig. 3, the inclined schematic diagram of base station;
Fig. 5 is the schematic top plan view of the another embodiment of glass-cleaning and drying device of the present invention;
Fig. 6 is the structural schematic diagram of the another embodiment of glass-cleaning and drying device of the present invention.
Specific embodiment
The explanation of following embodiment is to can be used to the particular implementation of implementation to illustrate the present invention with reference to additional schema Example.The direction term that the present invention is previously mentioned, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outside", " side " Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to The limitation present invention.
The similar unit of structure is to be given the same reference numerals in the figure.
Refering to fig. 1 and Fig. 2, Fig. 1 be one embodiment of glass-cleaning and drying device of the present invention schematic side view, Fig. 2 is Fig. 1 Shown in glass-cleaning and drying device schematic top plan view.In an embodiment of glass-cleaning and drying device of the present invention, to clear Washing dry glass can be color ink glass substrate, be also possible to array substrate, and glass-cleaning and drying device includes base station 11, passes Defeated band 12, air knife 13 and at least one set of positioning component 14.
Wherein, transmission belt 12 is arranged on base station 11, for carrying and transmitting glass 10, the wherein width direction of glass 10 It is identical with the width direction of transmission belt 12, direction indicated by the transmission direction of glass 10 arrow A as shown in Figure 1.Air knife 13 Quantity be two, and be strip air knife, one of air knife 13 along glass transmission direction setting and be located at transmission belt 12 Top, another air knife 13 are arranged and are located at along the transmission direction of glass the lower section of transmission belt 12, be provided with spray orifice on air knife 13, And air knife is in its longitudinal direction across the entire width of glass 10, for the entire width direction in glass 10, to warp The 10 jet drying gas of glass at 13 position of air knife is crossed, with dry glass 10.In other embodiments, one can also be only arranged A air knife is above transmission belt, for drying up glass.
Base station 11 is divided into feed side 111 and exit side 112 as boundary using the position for corresponding to air knife 13, and glass 10 is transmitting It is transmitted on band 12 from feed side 111 to exit side 112.
Positioning component 14 is arranged on base station 11, can be fixed with base station 11 in several ways, such as can pass through spiral shell The modes such as bolt, buckle are fixed.As shown in Figure 1, positioning component 14 is located at the feed side 111 of base station 11 and is arranged close to air knife 13. Every group of positioning component 14 includes the first fixing piece 141 and the second fixing piece 142.First fixing piece 141 is located at the upper of transmission belt 12 Side, the second fixing piece 142 is located at the lower section of transmission belt 12, and the first fixing piece 141 and the second fixing piece 142 are oppositely arranged, with So that glass 10 is sandwiched in therebetween by glass 10 when passing through between the first fixing piece 141 and the second fixing piece 142.
Specifically, the spacing of the first fixing piece 141 and the second fixing piece 142 is configured so that glass 10 can be from first Pass through between fixing piece 141 and the second fixing piece 142, and pass through between the first fixing piece 141 and the second fixing piece 142 When, glass is sandwiched between the first fixing piece 141 and the second fixing piece 142.It wherein, can between the first fixing piece 141 and glass 10 To be in the critical state touched, i.e. the first fixing piece 141 is contacted with glass 10 but is not formed to glass 10 and squeezed;Or the It is also possible to that there is lesser gap between one fixing piece 141 and glass 10, so that the first fixing piece 141 be avoided to scratch glass 10。
Pass through the effect of the first fixing piece 141 and the second fixing piece 142 as a result, glass 10 can be stablized and consolidate first Determine to transmit between part 141 and the second fixing piece 142, thus when needing to increase the wind-force of air knife 13 to blow the moisture on glass 10 When dry, the shake for causing glass 10 to generate because of wind increases can be greatly reduced, can reduce the probability of the damage of glass 10, together When, can as far as possible dry up glass 10 dry, reduce its moisture remained on surface, avoid follow-up process because of remaining moisture calmly And cause to shut down, improve production efficiency.
In the present embodiment, the quantity of positioning component 14 is two, as shown in Fig. 2, one group of positioning component 14 is arranged in transmission belt Relatively another side edge of transmission belt 12 is arranged in 12 one side edge, another group of positioning component 14, and wherein Fig. 2 illustrates two groups The position of the first fixing piece 141 in positioning component 14.
By be arranged two groups of positioning components 14, can be further improved glass 10 transmission stability, avoid glass 10 because The biggish wind-force of air knife 13 and shake.
Certainly, in his embodiment, the quantity of positioning component can also be only one group.
Wherein, the first fixing piece 141 and the second fixing piece 142 can be idler wheels, or be also possible to other fixations Block.
It is the schematic side view of another embodiment of glass-cleaning and drying device of the present invention refering to Fig. 3 and Fig. 4, Fig. 3, wherein scheming Shown in be the not inclined state of base station;Fig. 4 is glass-cleaning and drying device shown in Fig. 3, the inclined schematic diagram of base station.Such as figure Shown in 3, in the present embodiment, glass-cleaning and drying device further includes lifting device 15 and support base 16.
Lifting device 15 and support base 16 are located at side of the base station 11 backwards to transmission belt 12.Wherein lifting device 15 is located at base It the exit side 112 of platform 11 and is connect with base station 11, for being lifted base station 11;Support base 16 be located at the feed side 112 of base station 11 and It is connect with base station 11, is used to support base station 11.
Wherein, lifting device 15 before glass 10 is sent at 13 position of air knife for being lifted the base station of exit side 112 11, so that the inclination upwards from feed side 111 to exit side 112 of base station 11, as shown in Figure 4.Wherein lifting device 15 is specific Structure is not intended as emphasis of the invention, can be realized the device of elevating function, such as can be hydraulic cylinder lifting device, Or it is also possible to motor-driven lifting device.
Tilt base station 11 upwards by lifting device 15, so that feed side 111 of the glass 10 from base station 11 It is cleaned upwards to exit side 112, thus the moisture on glass 10 can be flowed to the lower side of glass 10 under the effect of gravity, The moisture on the higher side of glass 10 can be reduced, and the higher side of glass 10 first passes through air knife 13, therefore more easily glass Moisture drying on glass 10.
After glass 10 passes through the position at 13 place of air knife completely, decline lifting device 15, so that at base station 11 In formation state, as shown in figure 3, to ensure 10 horizontal transmission of glass.
Optionally, air knife 13 by support frame 131 be arranged on base station 11, thus when lifting device 15 drive base station 11 to When upper inclination, air knife 13 will also be in heeling condition, be conducive to 10 jet drying gas of glass.Certainly, in other embodiment party In formula, air knife 13 can also be suspended on above and below transmission belt 12 and tilt without the inclination with base station 11.
It is the schematic top plan view of the another embodiment of glass-cleaning and drying device of the present invention refering to Fig. 5, Fig. 5.As shown in figure 5, In the present embodiment, air knife 13 is relative to 10 inclined design of glass.Specifically, the width side of the length direction of air knife 13 and glass 10 There is the angle α being not zero between.Wherein, angle α can be configured according to actual needs, for example, can 3 °~8 ° it Between, it specifically can be 3 °, 5 ° or 6 ° etc..Alternatively, can also not limited this between 5 °~10 °.
Wherein, based on the view of Fig. 5, air knife 13 can deflection to the left, can also deflection to the right.
By making 13 inclined design of air knife, the moisture on glass 10 can be made to be easier to be dried.
It is the structural schematic diagram of the another embodiment of glass-cleaning and drying device of the present invention refering to Fig. 6, Fig. 6, wherein in figure The structure for not showing that base station, the matching relationship between base station and transmission belt can be carried out with reference to above-described embodiment.The present embodiment In, glass-cleaning and drying device further includes washing room 61, hothouse 62, water screen apparatus 63, flusher 64 and water supply device 65。
Wherein, washing room 61 and hothouse 62 surround transmission belt 12 with being all closed.The transmission direction of glass 10 is arrow A institute The direction of direction.Water screen apparatus 63 is arranged along the transmission direction of glass 10 and is located at the top of transmission belt 12, and water screen apparatus 63 are located in washing room 63.Flusher is arranged along the transmission direction of glass 10 and is located at the top of transmission belt 12, with air knife 13 It is arranged in hothouse 62.Glass 10 successively passes through from the lower section of water screen apparatus 63, flusher 64 and air knife 13.
Wherein, for cleaning to glass 10, glass 10 can carry out washing room 61 before by water screen apparatus 63 Multiple tracks cleaning process cleans glass 10, and cleaning process can be completed in washing room 61, the emphasis of this and non-present invention, Therefore it does not specifically describe herein.
Water screen apparatus 63 is, for example, cascade blower (air curtain), for evaporation water to provide cold sky to washing room Gas.Specifically, water supply device 65 supplies water to water screen apparatus 63, and when air flows through water screen apparatus, moisture carries out heat exchange, leads to It crosses water evaporation and achievees the purpose that cooling, pure air, so as to purify the air in washing room 61, reduce the place of particulate matter It is being fallen on glass 10 to avoid particulate matter.
Flusher 64 is used to spray water membrane to glass 10, to prevent glass from the stage cleaned to air knife drying There is particulate matter to fall.
Wherein, water supply device 65 is used to respectively fill water screen apparatus 63 and sprinkling by mutually independent two water channels Set 64 water supply.As shown in fig. 6, two water channels are water channel 661 and water channel 662 respectively.Two water channels 661,662 one end connection, and it is connected to water supply device 65, the other end of water channel 661 is connected to flusher 64, supplies water The other end in channel 662 is connected to water screen apparatus 63.Wherein, it is provided with control valve 67 on water channel 661, passes through control valve Door 67 can individually control the water supply size of water channel 661 and the opening and closing of water channel 661.
In through this embodiment, the water supply of water screen apparatus 63 and flusher 64 can be controlled separately, incite somebody to action with existing The mode that the water channel of two devices is integrated is compared, can individually flusher 64 water supply, so as to pass through The amount of water sprayed of flusher 64 is reduced to reduce the moisture on glass 10, is conducive to dry up in glass 10, and is sprayed when reducing When the amount of water sprayed of device 64, the influence of the water supply to water screen apparatus 63 is avoided, thereby may be ensured that the confession of water screen apparatus 63 Water avoids water screen apparatus 63 from reducing due to moisture is less to the cleaning ability of air.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention Decorations, therefore protection scope of the present invention subjects to the scope of the claims.

Claims (9)

1. a kind of glass-cleaning and drying device characterized by comprising
Base station;
Transmission belt is arranged on the base station, for carrying and transmitting glass, the width direction of the glass and the transmission belt Width direction it is identical;
Air knife, the air knife are strip air knife, are arranged and are located at the top of the transmission belt along the transmission direction of glass, described Air knife is in its longitudinal direction across the entire width of the glass, for the entire width direction in glass, to being transmitted to Glass jet drying gas below the air knife, between the length direction of the air knife and the width direction of glass have be not Zero angle;
At least one set of positioning component is arranged on the base station, and positioning component described in every group includes that first be oppositely arranged is fixed Part and the second fixing piece, first fixing piece and second fixing piece are located above and below the transmission belt, So that when glass passes through between first fixing piece and second fixing piece therebetween by glass clamp;
Wherein, the base station is divided into feed side and exit side as boundary using the position for corresponding to the air knife, glass from it is described into The lateral exit side transmission of material, at least one set positioning component are located at the feed side of the base station and set close to the air knife It sets;
Wherein, the critical state in touching between the first fixing piece and glass, i.e. the first fixing piece be not with glass contact but right Glass, which is formed, to be squeezed;Or first have lesser gap between fixing piece and glass.
2. glass-cleaning and drying device according to claim 1, which is characterized in that further include:
Lifting device is connect with the base station, for being lifted the exit side before the lower section that glass is sent to the air knife Base station so that the base station feeds the lateral exit side and tilts upwards from described.
3. glass-cleaning and drying device according to claim 2, which is characterized in that the air knife is arranged by support frame On the base station.
4. glass-cleaning and drying device according to claim 1, which is characterized in that the length direction and glass of the air knife Width direction between angle be 3 °~8 °.
5. glass-cleaning and drying device according to claim 1, which is characterized in that first fixing piece and described second Fixing piece is idler wheel.
6. glass-cleaning and drying device according to claim 1, which is characterized in that the quantity of the positioning component is two Group, positioning component described in two groups are located at the opposite sides edge of the transmission belt.
7. glass-cleaning and drying device according to claim 1, which is characterized in that further include:
Washing room closely surrounds the transmission belt;
Hothouse closely surrounds the transmission belt;
Water screen apparatus is arranged and is located at along the transmission direction of glass the top of the transmission belt, and is arranged in the washing room, For evaporation water to provide cold air to the washing room;
Flusher is arranged and is located at along the transmission direction of glass the top of the transmission belt, is arranged with the air knife described In hothouse, for the glass spray water being transmitted to below the flusher;
Wherein glass successively passes through below the water screen apparatus, the flusher, the air knife.
8. glass-cleaning and drying device according to claim 7, which is characterized in that further include:
Water supply device, for being supplied respectively the water screen apparatus and the flusher by mutually independent two water channels Water.
9. glass-cleaning and drying device according to claim 8, which is characterized in that one end of two water channels connects Logical, and be connected to the water supply device, the other end of two water channels is respectively connected to the water screen apparatus and described Flusher, wherein being provided with control valve on a water channel.
CN201710103441.8A 2017-02-24 2017-02-24 Glass-cleaning and drying device Active CN106871620B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710103441.8A CN106871620B (en) 2017-02-24 2017-02-24 Glass-cleaning and drying device

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Application Number Priority Date Filing Date Title
CN201710103441.8A CN106871620B (en) 2017-02-24 2017-02-24 Glass-cleaning and drying device

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CN106871620B true CN106871620B (en) 2019-05-24

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CN108091549A (en) * 2017-11-10 2018-05-29 盐城金合盛光电科技有限公司 A kind of nitrogen cleaning equipment suitable for silicon chip
CN109731877B (en) * 2019-03-20 2021-02-26 东旭(营口)光电显示有限公司 Method for cleaning glass substrate
CN110076169A (en) * 2019-04-08 2019-08-02 深圳市华星光电技术有限公司 A kind of glass substrate cleaning device and its clean method
CN113857188A (en) * 2021-10-26 2021-12-31 江苏诚成节能玻璃有限公司 Air equalizing device for glass cleaning machine
CN114082693A (en) * 2021-11-02 2022-02-25 姜霞 Washing angle-adjustable chip cleaning machine for glass processing and cleaning method thereof

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CN102679696A (en) * 2011-03-14 2012-09-19 无锡康力电子有限公司 Drying device for cleaned ultrathin glass
CN202668282U (en) * 2012-05-08 2013-01-16 广东新海岸机械有限公司 Glass bilateral grinding and polishing equipment
JP2013089609A (en) * 2011-10-13 2013-05-13 Dainippon Screen Mfg Co Ltd Substrate processing apparatus
CN103369840A (en) * 2012-03-29 2013-10-23 大日本网屏制造株式会社 Substrate treating apparatus
CN105290003A (en) * 2015-11-25 2016-02-03 青岛金智高新技术有限公司 Glass cleaning machine and method
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Publication number Priority date Publication date Assignee Title
US6282812B1 (en) * 1999-12-20 2001-09-04 St Assembly Test Services Pte Ltd. Multi air-knife box and method of use
CN102679696A (en) * 2011-03-14 2012-09-19 无锡康力电子有限公司 Drying device for cleaned ultrathin glass
JP2013089609A (en) * 2011-10-13 2013-05-13 Dainippon Screen Mfg Co Ltd Substrate processing apparatus
CN103369840A (en) * 2012-03-29 2013-10-23 大日本网屏制造株式会社 Substrate treating apparatus
CN202668282U (en) * 2012-05-08 2013-01-16 广东新海岸机械有限公司 Glass bilateral grinding and polishing equipment
CN105290003A (en) * 2015-11-25 2016-02-03 青岛金智高新技术有限公司 Glass cleaning machine and method
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