CN106868477A - 一种溶胶涂布法制备钛酸镧薄膜的方法 - Google Patents
一种溶胶涂布法制备钛酸镧薄膜的方法 Download PDFInfo
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- C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
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Abstract
本发明公开了一种溶胶涂布法制备钛酸镧薄膜的方法,本发明通过对硅基底表面进行预处理可很好地提高其对导电溶胶的亲和性能,使得喷涂过程中导电溶胶更加均匀的分布在硅基底表面,本发明采用化学溶液沉积法制得的钛酸镧导电薄膜材料,有效提高了钛酸镧导电薄膜材料的导电性,具有工艺简单。
Description
技术领域
本发明涉及导电材料领域,具体涉及一种溶胶涂布法制备钛酸镧薄膜的方法。
背景技术
透明导电薄膜是一种兼备高导电及可见光波段高透明特性的基础光电材料,广泛应用于显示器、发光器件、太阳能电池、传感器、柔性触摸屏等光电显示领域,具有广泛的商业应用前景。
钛酸镧是一种具有钙钛矿结构的金属氧化物,它在很多方面具有优良的性质,如室温导电性和制备成本低廉等。钛酸镧导电薄膜材料的这些优良性质决定了钛酸镧导电薄膜不仅可以作为铁电薄膜的底电极,而且可以作为具有钙钛矿结构的铁电导电薄膜的缓冲层使用。在众多制备钛酸镧导电薄膜材料的方法中,化学溶液沉积法具有制备工艺简单,反应温度低且反应易于进行等优点
经对现有技术检索,大多数技术是利用各类导电物质制备的油墨涂布或者喷涂在柔性基底上制备成柔性透明导电薄膜,此类技术制备的透明导电薄膜,虽然具有较好的薄膜附着力,但光学透过率和导电性能仍然有待提升。
发明内容
本发明提供一种溶胶涂布法制备钛酸镧薄膜的方法,本发明通过对硅基底表面进行预处理可很好地提高其对导电溶胶的亲和性能,使得喷涂过程中导电溶胶更加均匀的分布在硅基底表面,本发明采用化学溶液沉积法制得的钛酸镧导电薄膜材料,有效提高了钛酸镧导电薄膜材料的导电性,具有工艺简单。
为了实现上述目的,本发明提供了一种溶胶涂布法制备钛酸镧薄膜的方法,该方法包括如下步骤:
(1)基底处理
用Si(100)作基底,用酒精棉球反复轻轻擦洗衬底表面,以除去表面的有机物;
将擦洗过的基片放入装有丙酮的烧杯中,在超声清洗槽内清洗10-15分钟;
然后将基底放入到硝酸中静置浸泡2-4h;
取出基底放入到去离子水中静置2-3h,除去表面的硝酸;
放在通风橱中静置晾干5-10h;
(2)以乙二醇甲醚为溶剂,以硝酸镧、醋酸钛和硝酸银为溶质配制绿色透明溶液,其中La3+、Ti2+和Ag+的摩尔比为1:1:0.05-0.1,La3+的摩尔浓度为0.1mol/L;将配制的绿色透明溶液滴到基底上进行旋涂镀膜,先以500-800转/分的速率旋涂5-10秒,再以2500-3500转/分的速率旋涂35-45秒得到前驱体湿膜;将得到的前驱体湿膜放入马弗炉中于350-380℃退火处理1-2分钟;重复多次涂镀和退火制得所需厚度的钛酸镧复合导电薄膜材料,其中最后一次的退火时间延长为10-15分钟。
具体实施方式
实施例一
用Si(100)作基底,用酒精棉球反复轻轻擦洗衬底表面,以除去表面的有机物;将擦洗过的基片放入装有丙酮的烧杯中,在超声清洗槽内清洗10分钟;后将基底放入到硝酸中静置浸泡2h;取出基底放入到去离子水中静置2h,除去表面的硝酸;放在通风橱中静置晾干5h。
以乙二醇甲醚为溶剂,以硝酸镧、醋酸钛和硝酸银为溶质配制绿色透明溶液,其中La3+、Ti2+和Ag+的摩尔比为1:1:0.05,La3+的摩尔浓度为0.1mol/L;将配制的绿色透明溶液滴到基底上进行旋涂镀膜,先以500转/分的速率旋涂5秒,再以2500转/分的速率旋涂35秒得到前驱体湿膜;将得到的前驱体湿膜放入马弗炉中于350℃退火处理1分钟;重复多次涂镀和退火制得所需厚度的钛酸镧复合导电薄膜材料,其中最后一次的退火时间延长为10分钟。
实施例二
用Si(100)作基底,用酒精棉球反复轻轻擦洗衬底表面,以除去表面的有机物;将擦洗过的基片放入装有丙酮的烧杯中,在超声清洗槽内清洗15分钟;后将基底放入到硝酸中静置浸泡4h;取出基底放入到去离子水中静置3h,除去表面的硝酸;放在通风橱中静置晾干10h。
以乙二醇甲醚为溶剂,以硝酸镧、醋酸钛和硝酸银为溶质配制绿色透明溶液,其中La3+、Ti2+和Ag+的摩尔比为1:1: 0.1,La3+的摩尔浓度为0.1mol/L;将配制的绿色透明溶液滴到基底上进行旋涂镀膜,先以800转/分的速率旋涂10秒,再以3500转/分的速率旋涂45秒得到前驱体湿膜;将得到的前驱体湿膜放入马弗炉中于350-380℃退火处理2分钟;重复多次涂镀和退火制得所需厚度的钛酸镧复合导电薄膜材料,其中最后一次的退火时间延长为15分钟。
以上所述,仅是本发明的较佳实施例,并非对本发明做任何限制,凡是根据发明技术实质对以上实施例所作的任何简单修改、变更以及等效结构变化,均仍属于本发明技术方案的保护范围内。
Claims (1)
1.一种溶胶涂布法制备钛酸镧薄膜的方法,该方法包括如下步骤:
(1)基底处理
用Si(100)作基底,用酒精棉球反复轻轻擦洗衬底表面,以除去表面的有机物;
将擦洗过的基片放入装有丙酮的烧杯中,在超声清洗槽内清洗10-15分钟;
然后将基底放入到硝酸中静置浸泡2-4h;
取出基底放入到去离子水中静置2-3h,除去表面的硝酸;
放在通风橱中静置晾干5-10h;
(2)以乙二醇甲醚为溶剂,以硝酸镧、醋酸钛和硝酸银为溶质配制绿色透明溶液,其中La3+、Ti2+和Ag+的摩尔比为1:1:0.05-0.1,La3+的摩尔浓度为0.1mol/L;将配制的绿色透明溶液滴到基底上进行旋涂镀膜,先以500-800转/分的速率旋涂5-10秒,再以2500-3500转/分的速率旋涂35-45秒得到前驱体湿膜;将得到的前驱体湿膜放入马弗炉中于350-380℃退火处理1-2分钟;重复多次涂镀和退火制得所需厚度的钛酸镧复合导电薄膜材料,其中最后一次的退火时间延长为10-15分钟。
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CN107400880A (zh) * | 2017-08-11 | 2017-11-28 | 苏州南尔材料科技有限公司 | 一种钛酸镧薄膜的制备方法 |
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Cited By (3)
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CN107400880A (zh) * | 2017-08-11 | 2017-11-28 | 苏州南尔材料科技有限公司 | 一种钛酸镧薄膜的制备方法 |
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