CN106868461A - 一种射频板条co2激光器电极表面镀膜方法 - Google Patents
一种射频板条co2激光器电极表面镀膜方法 Download PDFInfo
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Abstract
本发明公开了一种射频板条CO2激光器电极表面镀膜方法,采用磁控溅射的方法对铜电极镀膜以实现对铜电极的保护,采用耐高温、耐腐蚀、抗电子溅射、以及波导损耗小的镀膜材料;在镀膜过程将对氧气浓度的控制与过渡层的设置相结合来提高膜层性能;本发明还对镀膜后的成品进行检测,包括表面光滑检测,能谱分析,反射率以及反射功率测试;通过本发明对射频板条CO2激光器的电极表面镀镀上理想的波导介质膜、使射频板条CO2激光器的平板电极形成全反射波导、降低光波导传输损耗,对高功率射频板条CO2激光器长时间的高功率稳定输出具有重要的现实意义。
Description
技术领域
本发明属于激光器技术领域,更具体地,涉及一种射频板条CO2激光器电极表面镀膜方法。
背景技术
射频板条CO2激光器电极板兼具射频放电、扩散冷却、光学波导三方面功能;电极材料表面对CO2激光的反射率、电极波导材料对CO2激光的吸收损耗、电极表面对激光冲击损伤的抵抗、电极材料的热传导性能,一直制约激光器朝功率高、使用寿命长,高光束质量与高热稳定性方向发展。
大功率射频板条CO2激光器采用铜材料做电极;铜材料的电极表面直接用来放电,经过一段时间的放电后,经放电氧化、受激光冲击损伤使得铜电极表面粗糙度增加,反射率下降,进而导致激光器谐振腔中CO2激光的传输波导损耗增加,射频放电不再均匀,激光功率下降且功率不稳定;传统的镀膜采用阳极氧化或者化学沉积法,前者所镀膜层不够致密,对铜难以起到保护作用,后者在化学反应过程中温度不易控制,电极容易形变。
发明内容
针对现有技术的以上缺陷或改进需求,本发明提供了一种射频板条CO2激光器电极表面镀膜方法,其目的在于解决射频板条CO2激光器使用寿命短,功率不稳定的问题。
为实现上述目的,按照本发明的一个方面,提供了一种射频板条CO2激光器电极表面镀膜方法,包括如下步骤:
(1)依次采用溶剂清洗和电化学清洗的方法对射频板条CO2激光器电极进行清洗;
(2)将清洗后的射频板条CO2激光器电极置于预热的真空环境下加热烘干、并进行离子轰击清洗;
(3)在负偏压、真空条件下,在Ar气氛下给射频板条CO2激光器电极镀Al膜,形成铝靶;
(4)提高溅射温度,在O2和Ar气氛下通过溅射镀膜在铝靶表面氧化生成Al2O3薄膜。
优选地,上述射频板条CO2激光器电极表面镀膜方法,步骤(4)采用恒功率溅射,溅射功率250W;采用该溅射功率既保证溅射炉内能产生辉光放电,又不至于使得铝靶表面温度过高出现熔蚀、沉积物内应力升高导致影响膜基结合强度。
优选地,上述射频板条CO2激光器电极表面镀膜方法,步骤(4)的溅射气压为0.087~0.065Pa;相对上述的溅射气压而言,若溅射气压过低,放电减弱甚至无法维持辉光放电,以至于溅射无法进行,随着工作气压的逐渐增大,反应气体的密度增大,从而增大沉积速率;若溅射气压过高,由于溅射出来的金属离子与气体碰撞的机会增加,使得溅射出来的金属离子能量降低,导致膜层沉积速率下降,会影响膜层的光学性能及力学性能。
优选地,上述射频板条CO2激光器电极表面镀膜方法,步骤(4)中O2气氛的浓度为16%~22%;
随着O2浓度的增大对Ar气造成分压,使得Ar气的溅射效率降低,从而降低Al2O3膜的生成速度,并且使得铝靶表面部分氧化生成Al2O3,形成Al和Al2O3共溅射,导致Al溅射速率降低,使得Al2O3沉积速率趋于平稳、缓慢。
总体而言,通过本发明所构思的以上技术方案与现有技术相比,能够取得下列有益效果:
(1)采用本发明的方法在射频板条CO2激光器的铜电极镀波导介质膜,使射频板条CO2激光器的平板电极形成全反射波导、以改善紫铜材料做电极引起的激光器放电过程中的弧光放电、高温溅射导致电极表面出现坑洼以及长时间放电后功率大幅度下降的问题,降低光波导传输损耗对高功率射频板条CO2激光器,使得高功率射频板条CO2激光器具备了长时间、高功率稳定输出的能力;
(2)本发明所提供的方法,所镀膜层厚度在微米量级,既不影响气体放电过程中热量通过电极冷却水道的传输,又保证膜层成分均匀,表面平整度良好;
(3)本发明所提供的方法,在射频板条CO2激光器的铜电极表面制备的Al2O3薄膜对10.6微米波段掠入射的CO2激光有很高的反射率,且Al2O3薄膜与铜电极表面有较好的结合强度、在放电过程中无脱落,能够提高表面抗电子溅射、耐高温,耐氧化、耐摩擦的能力。
附图说明
图1是实施例中沉积速率随氧气浓度的变化关系曲线图;
图2是不同入射角所对应的所对应的镀膜层表面反射率示意图;
图3是实施例的电镜扫描图和能谱分析图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。
实施例提供的射频板条CO2激光器电极表面镀膜方法,具体包括如下步骤:
(1)依次采用溶剂清洗和电化学清洗的方法对射频板条CO2激光器电极进行清洗;
(2)将清洗后的射频板条CO2激光器电极置于预热的真空环境下加热烘干、并进行离子轰击清洗;
(3)在负偏压、真空条件下,在Ar气氛下给射频板条CO2激光器电极镀Al膜,形成铝靶;
(4)提高溅射温度,在O2和Ar气氛下通过溅射镀膜在铝靶表面氧化生成Al2O3薄膜。
以下结合具体的实施例和附图来具体阐述:
实施例1包括如下步骤:
1:预处理:在大气状态下采用溶剂清洗和电化学清洗的方法对待镀膜的工件进行清洗;
实施例1中,预处理步骤具体如下:
1.1;将待镀膜的工件浸泡在甲苯溶液中,超声波清洗10分钟;
1.2:将步骤1.1清洗后的工件置于去离子水中,超声波清洗5分钟;
1.3:将步骤1.2清洗后的工件置于丙酮溶液中,超声波清洗10分钟;
1.4:将步骤1.3清洗后的工件置于去离子水中,超声波清洗5分钟;
1.5:将步骤1.4清洗后的工件置于乙醇溶液中,超声波清洗10分钟;
1.6:将步骤1.5清洗后的工件置于浓度为3%的HF溶液浸泡5分钟;
2:将预处理后的工件置于已预热并抽真空的炉内,并将温度升至280℃烘干工件;其中,炉体预热温度为230℃,炉内本底真空为8.7×10-2Pa;
3:将工件冷却后采用丙酮清洗;
4:将清洗后的工件置于真空炉内,在负偏压700V条件下,将炉体加温至100℃,保持13min;
5:在196V的负偏压、115Pa的Ar气氛下给工件表面镀Al膜;
6:将炉内温度升至300℃,通入O2,通过溅射在Al膜表面氧化沉积生成Al2O3薄膜。
实施例2~实施例6的具体步骤与上述实施例1相同,区别在于步骤2中的炉内本底真空度,以及步骤6的部分参数;实施例1~6的参数具体如下表1所列:
表1实施例工艺参数列表
上述实施例中,在O2浓度从16%增大到20%的过程中,沉积速率从2.0nm/s急剧降到0.2nm/s后趋于稳定,如图1所示,在该过程中,随着O2浓度的增大,膜层成分从Al逐步过渡到Al+A12O3,铝靶变成Al+A12O3靶,溅射出来混合物模式的粒子,由于A12O3靶溅射速率极低,这种模式降低了溅射速率,影响溅射产额;当O2浓度从20%增大到22%时,膜层沉积速率从0.2nm/s平缓降到0.1nm/s,镀膜过程趋于平稳。
使用NEXUS 670型傅里叶红外光谱仪对实施例6所获得的镀膜电极与裸铜电极进行表面反射率测试,入射角(入射光线与膜层法线夹角)分别为30°、45°、60°、80°;所测波长范围2.5μm~25μm。
测试结果如图2所示,当入射角为30°时,对于波长为10.6微米的CO2激光,镀膜层表面反射率最大值为45%,波长10.6微米处没有出现反射高峰;当入射角为45°、60°、80°时10.6微米波段反射峰均升高,反射率最高达85%,实施例提供的镀膜方法在射频板条CO2激光器电极表面所镀的这种Al2O3膜的反常色散效应得到了验证。
对实施例1在射频板条CO2激光器电极表面所镀的镀膜电极进行反射功率损耗检测;调节玻璃管激光器出光功率18.9W恒功率输出,激光入射角度(入射光线与电极法线夹角)范围10°~80°;测试得到的反射激光功率曲线如图3所示,恒功率18.9W的CO2激光以10°~80°的入射角分别入射到裸铜电极表面与实施例1所镀的镀膜电极表面时,裸铜电极与镀膜电极对CO2激光的反射功率均值分别为11.6W和16.6w;在10°~80°入射角度范围内的测试结果表明,实施例1镀膜之后的镀膜电极对CO2激光的反射功率功率损耗为39%,未经镀膜处理的裸铜电极表面对CO2激光的反射功率损耗均值为15%;
上述表面反射率测试与反射功率损耗检测表明本发明所提供的这种镀膜方法,在射频板条CO2激光器的平板电极表面形成全反射波导、降低了光波导传输损耗,对高功率射频板条CO2激光器的长时间高功率稳定输出具有重要的现实意义。
本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。
Claims (4)
1.一种射频板条CO2激光器电极表面镀膜方法,其特征在于,包括如下步骤:
(1)依次采用溶剂清洗和电化学清洗的方法对射频板条CO2激光器电极进行清洗;
(2)将清洗后的射频板条CO2激光器电极置于预热的真空环境下加热烘干、并进行离子轰击清洗;
(3)在负偏压、真空条件下,在Ar气氛下给射频板条CO2激光器电极镀Al膜,形成铝靶;
(4)提高溅射温度,在O2和Ar气氛下通过溅射镀膜在铝靶表面氧化生成Al2O3薄膜。
2.如权利要求1所述的射频板条CO2激光器电极表面镀膜方法,其特征在于,所述步骤(4)中采用恒功率溅射,溅射功率250W。
3.如权利要求1或2所述的射频板条CO2激光器电极表面镀膜方法,其特征在于,所述步骤(4)的溅射气压为0.087~0.065Pa。
4.如权利要求1或2所述的射频板条CO2激光器电极表面镀膜方法,其特征在于,所述步骤(4)中O2气氛的浓度为16%~22%。
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