CN106842431B - A kind of restructural insert of multi-wavelength-multi-mode divides multiplexing chip - Google Patents

A kind of restructural insert of multi-wavelength-multi-mode divides multiplexing chip Download PDF

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CN106842431B
CN106842431B CN201710156935.2A CN201710156935A CN106842431B CN 106842431 B CN106842431 B CN 106842431B CN 201710156935 A CN201710156935 A CN 201710156935A CN 106842431 B CN106842431 B CN 106842431B
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waveguide
single mode
micro
wavelength
mode waveguide
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CN106842431A (en
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戴道锌
王世鹏
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/2938Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338Loop resonators
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338Loop resonators
    • G02B6/29341Loop resonators operating in a whispering gallery mode evanescently coupled to a light guide, e.g. sphere or disk or cylinder
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009Materials therefor
    • G02F1/009Thermal properties
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04JMULTIPLEX COMMUNICATION
    • H04J14/00Optical multiplex systems
    • H04J14/02Wavelength-division multiplex systems
    • H04J14/0201Add-and-drop multiplexing
    • H04J14/0202Arrangements therefor
    • H04J14/021Reconfigurable arrangements, e.g. reconfigurable optical add/drop multiplexers [ROADM] or tunable optical add/drop multiplexers [TOADM]

Abstract

The invention discloses a kind of restructural insert of multi-wavelength-multi-mode to divide multiplexing chip.Input multimode waveguide is connect through pattern demultiplexer with the input terminal of a plurality of single mode waveguide, the output end of a plurality of single mode waveguide is connect through pattern multiplexer with output multimode waveguide, every single mode waveguide is equipped with wavelength-division structure, wavelength-division structure uploads waveguide with channel respectively, channel downloading waveguide is connect, wavelength-division superstructure on every single mode waveguide is equipped with micro- heating electrode, and micro- heating electrode and wavelength-division structure constitute thermal tuning micro-ring resonator.The present invention realizes and inserts a point multiplexing to wavelength any in C-band under each mode passageway, solves the flexible upload and download problem of channel, and the loss introduced to the channel for not needing downloading is smaller, and whole have a preferable working performance, structure simply, compact layout.

Description

A kind of restructural insert of multi-wavelength-multi-mode divides multiplexing chip
Technical field
The invention belongs to integrated opto-electronic device fields, and in particular to a kind of multi-wavelength-multi-mode it is restructural insert it is point multiple Use chip.
Background technique
In order to improve the traffic rate of on piece integrated optical communication, people develop in succession and have used a variety of advanced multiplexing skills Art, including wavelength-division multiplex, mode multiplexing, palarization multiplexing etc..Wherein, wavelength-division multiplex technique be it is current using be most also extensively most at Ripe multiplexing technology has extremely wide utilization in fiber optic communication systems, and principle is: using multiple wavelength as signal Carrier, while multiple wavelength signals are transmitted in a waveguide/optical fiber, realize the extension of channel capacity.Mode multiplexing technology is then It is using multiple mode passageways as the carrier of signal, it can be achieved that simultaneous transmission multichannel is based on different moulds in a multimode waveguide The signal of formula.Multi-wavelength and multi-mode are combined, then constructs a kind of multi-wavelength-multi-mode multiplexing technology, can further mention Number of channels is risen, to realize vast capacity.
On the other hand, system flexibility and reconfigurability are for realizing that Intelligent light communication system is most important.And due to Multi-wavelength-multi-mode multiplex system has high complexity, how its wavelength channel and mode passageway is flexibly manipulated, to realize The restructural upload and downloading of its signal are a significant challenges.Its key technology is that multi-wavelength-multi-mode inserts point multiplexing chip, mesh It is preceding to be reported there is not yet disclosing.
Summary of the invention
In order to solve the problems, such as background technique, the purpose of the present invention is to provide a kind of multi-wavelength-multi-modes Restructural insert divides multiplexing chip.
The present invention is mainly by a pattern demultiplexer, the micro-ring resonator and a pattern multiplexer of four thermal tunings It constitutes.Four modes in multimode link are coupled out respectively by pattern demultiplexer first becomes TM0Mode, reusable heat The micro-ring resonator of tuning takes out a wavelength channel in each mode passageway, at the same time the letter of a new Same Wavelength Number can also be loaded into incoming link, later four road mode signals be multiplexed again via pattern multiplexer again at most template strand road it In, the operation wavelength of micro-ring resonator can be controlled by way of heat modulation, and a wavelength-mould thus may be implemented The restructural add/drop multiplexer of formula hybrid multiplex system.
The specific technical solution that the present invention uses is:
The present invention includes the input multimode waveguide for constituting ducting layer, pattern demultiplexer, waveguide intersection, a plurality of single mode wave It leads, pattern multiplexer, export multimode waveguide, channel uploads waveguide and channel downloading waveguide, input multimode waveguide are demultiplexed through mode It is connect with device with the input terminal of a plurality of single mode waveguide, the output end of a plurality of single mode waveguide is through pattern multiplexer and output multimode waveguide Connection, every single mode waveguide are equipped with wavelength-division structure, and wavelength-division structure uploads waveguide with channel respectively, channel downloading waveguide is connect, Wavelength-division superstructure on every single mode waveguide is equipped with micro- heating electrode, and micro- heating electrode is above ducting layer, micro- heating electricity Pole and wavelength-division structure constitute thermal tuning micro-ring resonator.
Each output end of the pattern demultiplexer is through respective first insulation connection waveguide and each single mode waveguide Input terminal connection, each input terminal of pattern multiplexer is defeated through respective second insulation connection waveguide and each single mode waveguide Outlet connection.
The wavelength-division structure includes waveguide intersection, the first single mode waveguide, the second single mode waveguide, third single mode waveguide and Four single mode waveguides, the first single mode waveguide, the second single mode waveguide one end be connected to waveguide intersect in a waveguide both ends, Third single mode waveguide, the 4th single mode waveguide one end be connected to waveguide intersect in another article of waveguide both ends, the 4th single mode It is arranged in parallel after the bending of the waveguide other end with the first single mode waveguide, and the cloth between the 4th single mode waveguide and the first single mode waveguide It is equipped with micro-loop waveguide, micro-loop guide symmetry two sides are coupled with the 4th single mode waveguide and the first single mode waveguide respectively.
Micro- heating electrode includes micro- heating electrode connection metal area, micro- heating electrode electric shock metal area, micro- heating Heated by electrodes metal area, micro- heating heated by electrodes metal area is covered on above micro-loop waveguide, for heating micro-loop waveguide, micro- heating It is touched through micro- heating electrode connection metal area with two micro- heating electrodes being arranged on ducting layer at heated by electrodes metal area both ends The connection of electric metal area.
The output end of first single mode waveguide through waveguide intersect in a waveguide connect with the input terminal of the second single mode waveguide, The output end of three single mode waveguides through waveguide intersect in one article of waveguide and the 4th single mode waveguide input terminal.Micro-loop waveguide is single with first Coupling forms the first coupled zone between mould waveguide, couples between micro-loop waveguide and the 4th single mode waveguide and forms the second coupled zone.
First single mode waveguide and the second single mode waveguide is arranged in single mode waveguide as a part of single mode waveguide, Third single mode waveguide, the 4th single mode waveguide upload waveguide with channel respectively, channel downloading waveguide is connect, and realize in the following way Wavelength mode, which is inserted, divides: the optical signal in addition to resonance wavelength of the first single mode waveguide input crosss into the second single mode wave through waveguide Output is led, the optical signal of resonance wavelength is coupled to micro- at the first coupled zone passed through between the first single mode waveguide and micro-loop waveguide Then ring waveguide is coupled to the 4th single mode waveguide at the second coupled zone passed through between micro-loop waveguide and the 4th single mode waveguide, It is output to channel downloading waveguide from the 4th single mode waveguide, to realize the channel downloading of resonance wavelength;Channel uploads waveguide input The optical signal in addition to resonance wavelength cross into the 4th single mode waveguide through waveguide and be output to channel downloading waveguide, resonance wave Long optical signal is coupled to micro-loop waveguide at the second coupled zone passed through between the 4th single mode waveguide and micro-loop waveguide, then passes through The first single mode waveguide is coupled in the first coupled zone between micro-loop waveguide and the first single mode waveguide, most crosss into through waveguide afterwards Two single mode waveguides simultaneously export, to realize that the channel of resonance wavelength uploads.
The wavelength selection of resonance wavelength is adjusted to the heating of micro-loop waveguide by adjusting micro- heating heated by electrodes metal area.
The first coupled zone and the second coupled zone of micro- heating micro-ring resonator are the coupling of asymmetrical directional coupler Close area.
The pattern demultiplexer is identical as pattern multiplexer structure, and the two is in mirror symmetry.
The pattern demultiplexer includes input multimode waveguide and a plurality of coupled waveguide, inputs the conduct of multimode waveguide one end The input terminal of multimode signal is simultaneously connect with input multimode waveguide, inputs multimode waveguide middle part one end with a plurality of coupled waveguide respectively The connection that is coupled forms each Mode Coupling area, and the other end for inputting the multimode waveguide other end and a plurality of coupled waveguide is used as list The output end of mould signal.
It is that single mode passes in addition to the defeated entry/exit waveguide of input multimode waveguide and output multimode waveguide and mode (solution) multiplexer Defeated waveguide.
The pattern demultiplexer and pattern multiplexer are using cascade asymmetrical directional coupler structure, each Mode Coupling Area is asymmetrical directional coupler structure.
Basic functional principle of the invention is:
The multiple Higher Order TM Modes inputted in multimode waveguide are demultiplexed and are coupled as respectively by pattern demultiplexer first TM0Mode is intersected later per mode passageway all the way via the first insulation connection waveguide connected to it and waveguide, later by every Thermal tuning micro-ring resonator downloading all the way is identical with micro-ring resonator resonance wavelength specific per mode passageway medium wavelength all the way Wavelength channel reaches the first signal output, and by channel downloading waveguide output.At the same time, the identical new letter of wavelength all the way Number waveguide input can be uploaded by channel, second signal input port is arrived at after corresponding a plurality of single mode waveguide and waveguide intersect, and It is coupled to second signal delivery outlet by the same micro-ring resonator, to be uploaded among link.
Specifically, the new wavelength signals of upload are connected with after other wavelength signals not being downloaded via the second insulation Waveguide is coupled as corresponding Higher Order TM Mode by pattern multiplexer and enters output multimode waveguide, to realize that wavelength-mode is mixed That closes multiplex system inserts a point multiplexing.
By to micro- heating electrode apply voltage, the resonance wavelength of adjustable each thermal tuning micro-ring resonator, thus The signal wavelength that associative mode channel uploads and downloads is adjusted, realizes the wavelength selectivity of device.
The invention has the advantages that:
The present invention realizes under multiple mode passageways, divides again inserting for wavelength signals any in C-band in arbitrary patterns channel With solving the flexible upload and download problem of any wavelength channel of arbitrary patterns in wavelength-mode mixture multiplex system, to not The loss that the channel for needing to download introduces is smaller, whole to have preferable working performance, simple, compact layout the spy with structure Point.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention.
Fig. 2 is pattern demultiplexer structural schematic diagram of the invention.
Fig. 3 is the partial enlargement structure chart of thermal tuning micro-ring resonator of the present invention.
Fig. 4 is the embodiment of the present invention in TM2The work spectrum of mode passageway.
In figure: 1 is input multimode waveguide;2 be pattern demultiplexer, and 2a is input multimode waveguide, 2b TM3The coupling of mode Multiplex is led, 2c TM2The coupled waveguide of mode, 2d TM1The coupled waveguide of mode, 2e TM0The coupled waveguide of mode, 2f are TM3Mode Coupling area, 2g TM2Mode Coupling area, 2h TM1Mode Coupling area;3 connect waveguide for the first insulation, and 4 be waveguide Intersect;5 be thermal tuning micro-ring resonator, and 5a is micro-loop waveguide, and the first coupled zone 5b, 5c is the second coupled zone;6 be single mode wave It leads, 6a is the first single mode waveguide, and 6b is the second single mode waveguide, and 6c is third single mode waveguide, and 6d is the 4th single mode waveguide;7 be Two insulation connection waveguides, 8 be pattern multiplexer, and 9 be output multimode waveguide, and 10 upload waveguide for channel, and 11 be carrier wave under channel It leads, 12 connect metal area for micro- heating electrode, and 13 be micro- heating electrode electric shock metal area, and 14 be micro- heating heated by electrodes metal Area, 15 be the first signal input, and 16 be the first signal output, and 17 be second signal input port, and 18 export for second signal Mouthful.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
As shown in Figure 1, the present invention includes the input multimode waveguide 1 for constituting ducting layer, pattern demultiplexer 2, waveguide intersection 4, a plurality of single mode waveguide 6, pattern multiplexer 8, output multimode waveguide 9, channel upload waveguide 10 and channel downloads waveguide 11, input Multimode waveguide 1 is connect through pattern demultiplexer 2 with the input terminal of a plurality of single mode waveguide 6, and the output end of a plurality of single mode waveguide 6 is through mould Formula multiplexer 8 is connect with output multimode waveguide 9, and each output end of pattern demultiplexer 2 is through respective first insulation connection wave It leads 3 to connect with the input terminal of each single mode waveguide 6, each input terminal of pattern multiplexer 8 is through respective second insulation connection wave 7 are led to connect with the output end of each single mode waveguide 6.First insulation connection waveguide 3 and the second insulation connection waveguide 7 use gradual change wave Guide structure.
The present invention include four mode passageways, it is used based on cascade asymmetrical directional coupler pattern multiplexer and For pattern demultiplexer in addition to design parameter, basic principle and structure are identical.Wherein pattern multiplexer 2 and demultiplexer 8 Structure is identical, and the two is mirror.The micro-ring resonator 5 of four thermal tunings used in the present invention is also identical.This hair In bright in addition to input multimode waveguide 1 and output multimode waveguide 9, remaining waveguide is single mode waveguide.
2 structure of four-way pattern demultiplexer of embodiment is as shown in Figure 2.With TM3For mode, 2a is that width is biggish Multimode input waveguide, 2b are relatively narrow single mode waveguide, and positioned at the side of multimode waveguide 2a, a part of common combination of the two becomes TM3Mode Coupling area.By using the multimode input waveguide of the adiabatic waveguide cascade different mode of width gradual change, by TM1, TM2, TM3The coupled zone of mode cascades up, and coupled waveguide 2b, 2c, 2d of different mode is made successively to divide column multimode input waveguide Two sides, formation mode demultiplexer.
In specific implementation, pattern demultiplexer 2 includes input multimode waveguide 2a and three coupled waveguides, respectively TM3Mould Coupled waveguide 2b, TM of formula2Coupled waveguide 2c, TM of mode1The coupled waveguide 2d of mode inputs multimode waveguide 2a and TM0Mode Coupled waveguide 2e connection export single mode signal, TM3The coupled waveguide 2b and input multimode waveguide 2a of mode couple to form TM3Mould Formula coupled zone 2f, TM2The coupled waveguide 2c and input multimode waveguide 2a of mode couple to form TM2Mode Coupling area 2g, TM1Mode Coupled waveguide 2d and input multimode waveguide 2a couple to form TM1Mode Coupling area 2h.
It is single mode in addition to input multimode waveguide 1 and output multimode waveguide 9 and the defeated entry/exit waveguide 2a of pattern demultiplexer Transmission waveguide.
As shown in Figure 1, every single mode waveguide 6 is equipped with wavelength-division structure, wavelength-division structure uploads waveguide 10, letter with channel respectively Road is downloaded waveguide 11 and is connected, and the wavelength-division superstructure on every single mode waveguide 6 is equipped with micro- heating electrode, and micro- heating electrode is in wave Above conducting shell, micro- heating electrode and wavelength-division structure constitute thermal tuning micro-ring resonator 5.
As shown in figure 3, wavelength-division structure includes that waveguide intersects the 4, first single mode waveguide 6a, the second single mode waveguide 6b, third list Mould waveguide 6c and the 4th single mode waveguide 6d, waveguide intersect two waveguide top-bottom cross arrangements to intersect, the first single mode waveguide in 4 6a, the second single mode waveguide 6b one end be connected to the both ends that waveguide intersects a waveguide in 4, third single mode waveguide 6c, the One end of four single mode waveguide 6d is connected to the both ends that waveguide intersects another waveguide in 4, the 4th single mode waveguide 6d other end It is arranged in parallel after bending with the first single mode waveguide 6a, and is disposed between the 4th single mode waveguide 6d and the first single mode waveguide 6a The symmetrical two sides micro-loop waveguide 5a, micro-loop waveguide 5a are coupled with the 4th single mode waveguide 6d and the first single mode waveguide 6a respectively.
Micro- heating electrode includes micro- heating electrode connection metal area 12, micro- heating electrode electric shock metal area 13, micro- heating electricity Metal area 14 is heated in pole, and micro- heating heated by electrodes metal area 14 is covered on above micro-loop waveguide 5a, for heating micro-loop waveguide 5a, Micro- heating 14 both ends of heated by electrodes metal area are micro- through micro- heating electrode connection metal area 12 and be arranged on ducting layer two Electrode electric shock metal area 13 is heated to connect.
The output end of first single mode waveguide 6a intersects the input terminal of a waveguide and the second single mode waveguide 6b in 4 through waveguide and connects It connects, the output end of third single mode waveguide 6c intersects the input terminal of one article of waveguide and the 4th single mode waveguide 6d in 4 through waveguide.Micro-loop wave It leads to couple between 5a and the first single mode waveguide 6a and forms the first coupled zone 5b, coupling between micro-loop waveguide 5a and the 4th single mode waveguide 6d It closes and forms the second coupled zone 5c.First single mode waveguide 6a and the second single mode waveguide 6b exists as a part setting of single mode waveguide 6 In single mode waveguide 6, third single mode waveguide 6c, the 4th single mode waveguide 6d upload waveguide 10 with channel respectively, channel downloads waveguide 11 Connection.
Micro-loop waveguide 5a and the first single mode waveguide 6a forms the first coupled zone 5b, micro-loop waveguide 5a and the first single mode waveguide 6d Form the second coupled zone 5c.Micro- heating heated by electrodes metal area 12 designs for clip type, positioned at the top of micro-loop waveguide 5a, uses It is heated in micro-loop waveguide 5a.First coupled zone 5b and the second coupled zone 5c separation two sides micro-loop waveguide 5a, in symmetrical point Cloth.Signal is inputted from the first signal input 15, is exported after micro-ring resonator 5 by second signal delivery outlet 16.
It specifically realizes that wavelength mode is inserted in the following way to divide:
The optical signal in addition to resonance wavelength of first single mode waveguide 6a input intersects 4 through waveguide and enters the second single mode waveguide 6b output, the optical signal of resonance wavelength coupling in the first coupled zone 5b passed through between the first single mode waveguide 6a and micro-loop waveguide 5a Micro-loop waveguide 5a is closed, is then coupled in the second coupled zone 5c passed through between micro-loop waveguide 5a and the 4th single mode waveguide 6d 4th single mode waveguide 6d is output to channel downloading waveguide 11 from the 4th single mode waveguide 6d, thus under realizing the channel of resonance wavelength It carries;
Channel uploads the optical signal in addition to resonance wavelength that waveguide 10 inputs and intersects 4 into the 4th single mode waveguide through waveguide 6d is simultaneously output to channel downloading waveguide 11, and the optical signal of resonance wavelength is by between the 4th single mode waveguide 6d and micro-loop waveguide 5a The second coupled zone 5c when be coupled to micro-loop waveguide 5a, then through the first coupling between micro-loop waveguide 5a and the first single mode waveguide 6a It closes area 5b and is coupled to the first single mode waveguide 6a, most intersect 4 into the second single mode waveguide 6b through waveguide afterwards and export, to realize humorous The long channel of vibration wave uploads.
The the first coupled zone 5b and the second coupled zone 5c of micro- heating micro-ring resonator 5 are the coupling of asymmetrical directional coupler Close area.
Implementation process of the invention are as follows:
It is identical in view of four road mode passageway operating modes and optical path, for purposes of illustration only, this sentences TM2For mode passageway.
Input the TM in multimode waveguide 12Mode signal is via TM in pattern demultiplexer 22Mode Coupling area 2g is coupled into TM2The coupled waveguide 2c of mode intersects 4 via waveguide, single mode wave later by the first insulation connection waveguide 3 being attached thereto 6 are led, waveguide intersects 4, and single mode waveguide 6, waveguide intersects 4, and single mode waveguide 6 reaches the first coupled zone 5b of corresponding micro-ring resonator. Due to the resonance effect of micro-ring resonator, a part of signal continues onwards transmission and intersects 4 via waveguide, and single mode waveguide 6, second absolutely It is thermally connected waveguide 7 and arrives at pattern multiplexer 8.Another part signal is coupled into disc waveguide 5a, reaches the second coupled zone 5c.Coupling The light in disc waveguide 5a is closed by the second bending coupled zone 5c, and has part signal light to be coupled to the 4th from disc waveguide 5a Single mode waveguide 6d is exported from the first signal output 16, and remaining light is coupled to circumferential wave by the second bending coupled zone 5c Lead 5a relaying resume it is defeated.In the resonance wave strong point of micro-loop filter 5, since the light path that light transmits one week in disc waveguide 5a is Field enhancement effect occurs in disc waveguide 5a for the integral multiple of wavelength.The light of resonance wave strong point interferes phase at single mode waveguide 6d Length interferes cancellation to no output to export at the first single mode waveguide 6a.In the signal of the first signal output 16 output Light is exported by the channel downloading waveguide 11 of the top in turn, realizes the downloading of resonance wavelength signal.At the same time, from the top Channel uploads the signal light that waveguide 10 inputs and intersects 4 via waveguide, and single mode waveguide 6, waveguide intersects 4, and single mode waveguide 6, waveguide is handed over Fork 4, single mode waveguide 6, waveguide intersect 4, and the 4th single mode waveguide 6d reaches second signal input port 17, and then reaches the second coupled zone 5c.Due to the resonance effect of previously described micro-ring resonator, signal identical with micro-ring resonant wavelength is finally by second signal Delivery outlet 18 exports, and then intersects 4 by waveguide, the second single mode waveguide 6b, the second insulation connection waveguide 7 reaches pattern multiplexer 8, realize the upload of resonance wavelength signal.The wavelength signals are inputted but are not coupled into humorous into micro-loop with by the first signal input 15 Shake device 5 signal together, via the TM of pattern multiplexer 82Mode Coupling waveguide enters TM2Mode Coupling area, and be finally coupled into Enter to export multimode waveguide 9.By changing the voltage being applied on micro- heating heated by electrodes metal area 14, thus it is possible to vary be applied to micro- Heat on ring resonator 5, and then change the resonance wavelength of micro-ring resonator, thus realize to the upload of resonance wavelength and under It carries.
A specific embodiment is given below.
Select the silicon nanowires optical waveguide for being based on silicon-on-insulator (SOI) material: core material is silicon, with a thickness of 220nm;On Under-clad layer material is silica, and under-clad layer is with a thickness of 2 μm, and top covering is with a thickness of 1.2 μm.
Single mode waveguide 6, signaling channel upload waveguide 10, and it is single mode waveguide that signaling channel, which downloads waveguide 11, and duct width is 500nm makes it that basic mode only be supported to transmit.Corresponding to TM0, TM1, TM2, TM3Mode, the multimode incoming wave of mode (solution) multiplexer The width led is respectively 0.4 μm, 1.02 μm, 1.68 μm and 2.35 μm.TM1, TM2, TM3The coupled waveguide width of mode is 0.4 μ m.The width of micro-loop waveguide 5a is 0.85 μm, and radius is 4 μm, the spacing with the first input waveguide 6a and the 4th input waveguide 6d It is 0.5 μm.
Device of the present invention has been made according to examples detailed above, and has measured the workability of the add/drop multiplexer in all cases Energy.
In Fig. 4 as it can be seen that for the TM in input multimode waveguide2Mode signal, it is different from micro-ring resonator resonance wavelength Wavelength signals are all exported from output multimode waveguide, and are only~4dB in the wave-length coverage internal loss of 1525nm -1565nm, And wavelength signals identical with micro-ring resonator resonance wavelength then have relatively large loss in output multimode waveguide, master It to download in waveguide and export in channel, and be only 5~6dB in central wavelength loss.It is specifically embodied in Fig. 4, is that curve is defeated TM in multimode waveguide out2There is apparent recess in certain wave strong point in mode (black curve), is then curve letter in contrast Download the TM in waveguide in road2There is apparent peak value at same wavelength in mode (dotted line).By Fig. 4 again it can be seen that other Curve is held on lower distribution of light intensity, this explanation inserts a point multiplexing by designed wavelength mode hybrid multiplex system After device, TM2The signal of the specific wavelength is successfully downloaded from channel downloading waveguide in mode passageway, and other wavelength Signal it is then substantially uninfluenced, continuation transmit in a communication link.At the same time, the letter that the signal of other mode passageways generates Number crosstalk has also been maintained in lower level.
Above-described embodiment is used to illustrate the present invention, rather than limits the invention, in spirit of the invention and In scope of protection of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.

Claims (9)

1. a kind of restructural insert of multi-wavelength-multi-mode divides multiplexing chip, it is characterised in that: including inputting multimode waveguide (1), mould Formula demultiplexer (2), waveguide intersect (4), a plurality of single mode waveguide (6), pattern multiplexer (8), output multimode waveguide (9), channel Waveguide (10) and channel downloading waveguide (11) are uploaded, input multimode waveguide (1) through pattern demultiplexer (2) and a plurality of single mode waveguide (6) output end of input terminal connection, a plurality of single mode waveguide (6) is connect through pattern multiplexer (8) with output multimode waveguide (9), Every single mode waveguide (6) is equipped with wavelength-division structure, and wavelength-division structure uploads waveguide (10), channel downloading waveguide (11) with channel respectively It connects, the wavelength-division superstructure on every single mode waveguide (6) is equipped with micro- heating electrode, and micro- heating electrode and wavelength-division structure are constituted Thermal tuning micro-ring resonator (5).
2. a kind of restructural insert of multi-wavelength-multi-mode according to claim 1 divides multiplexing chip, it is characterised in that: institute The each output end for the pattern demultiplexer (2) stated is through respective first insulation connection waveguide (3) and each single mode waveguide (6) Input terminal connection, each input terminal of pattern multiplexer (8) is through respective second insulation connection waveguide (7) and each single mode waveguide (6) output end connection.
3. a kind of restructural insert of multi-wavelength-multi-mode according to claim 1 divides multiplexing chip, it is characterised in that: institute The wavelength-division structure stated includes that waveguide intersects (4), the first single mode waveguide (6a), the second single mode waveguide (6b), third single mode waveguide (6c) and the 4th single mode waveguide (6d), the first single mode waveguide (6a), the second single mode waveguide (6b) one end be connected to waveguide Intersect (4) in a waveguide both ends, third single mode waveguide (6c), the 4th single mode waveguide (6d) one end be connected to waveguide Intersect the both ends of another waveguide in (4), it is parallel with the first single mode waveguide (6a) after the bending of the 4th single mode waveguide (6d) other end Arrangement, and be disposed with micro-loop waveguide (5a) between the 4th single mode waveguide (6d) and the first single mode waveguide (6a), micro-loop waveguide The symmetrical two sides (5a) are coupled with the 4th single mode waveguide (6d) and the first single mode waveguide (6a) respectively;
Micro- heating electrode includes that micro- heating electrode connects metal area (12), micro- heating electrode gets an electric shock metal area (13), is micro- It heats heated by electrodes metal area (14), micro- heating heated by electrodes metal area (14) is covered on above micro-loop waveguide (5a), for adding Hot micro-loop waveguide (5a), micro- heating heated by electrodes metal area (14) both ends are through micro- heating electrode connection metal area (12) and two Micro- heating electrode electric shock metal area (13) connection.
4. a kind of restructural insert of multi-wavelength-multi-mode according to claim 3 divides multiplexing chip, it is characterised in that: institute The first single mode waveguide (6a) and the second single mode waveguide (6b) stated are arranged as a part of single mode waveguide (6) in single mode waveguide (6) in, third single mode waveguide (6c), the 4th single mode waveguide (6d) upload waveguide (10) with channel respectively, channel downloads waveguide (11) it connects, realizes that wavelength mode is inserted in the following way and divide:
The optical signal in addition to resonance wavelength of first single mode waveguide (6a) input intersects (4) through waveguide and enters the second single mode waveguide (6b) output, the optical signal of resonance wavelength is by the first coupled zone between the first single mode waveguide (6a) and micro-loop waveguide (5a) It is coupled to micro-loop waveguide (5a) when (5b), then by the second coupling between micro-loop waveguide (5a) and the 4th single mode waveguide (6d) It is coupled to the 4th single mode waveguide (6d) when closing area (5c), is output to channel downloading waveguide (11) from the 4th single mode waveguide (6d), from And realize the channel downloading of resonance wavelength;
The optical signal in addition to resonance wavelength that channel uploads waveguide (10) input intersects (4) through waveguide and enters the 4th single mode waveguide (6d) and it is output to channel downloading waveguide (11), the optical signal of resonance wavelength is passing through the 4th single mode waveguide (6d) and micro-loop waveguide It is coupled to micro-loop waveguide (5a) when the second coupled zone (5c) between (5a), then through micro-loop waveguide (5a) and the first single mode waveguide The first single mode waveguide (6a) is coupled in the first coupled zone (5b) between (6a), most intersects (4) through waveguide afterwards and enters the second single mode Waveguide (6b) simultaneously exports, to realize that the channel of resonance wavelength uploads.
5. a kind of restructural insert of multi-wavelength-multi-mode according to claim 4 divides multiplexing chip, it is characterised in that: logical Overregulate the wavelength selection that micro- heating heated by electrodes metal area (14) adjusts resonance wavelength to the heating of micro-loop waveguide (5a).
6. a kind of restructural insert of multi-wavelength-multi-mode according to claim 4 divides multiplexing chip, it is characterised in that: institute The first coupled zone (5b) and the second coupled zone (5c) of stating micro- heating micro-ring resonator (5) are the coupling of asymmetrical directional coupler Close area.
7. a kind of restructural insert of multi-wavelength-multi-mode according to claim 1 divides multiplexing chip, it is characterised in that: institute The pattern demultiplexer (2) stated is identical as pattern multiplexer (8) structure, and the two is in mirror symmetry.
8. a kind of restructural insert of multi-wavelength-multi-mode according to claim 1 or claim 7 divides multiplexing chip, it is characterised in that: The pattern demultiplexer (2) includes multimode input waveguide (2a) and a plurality of coupled waveguide, the one end multimode input waveguide (2a) As multimode signal input terminal and with input multimode waveguide (1) connect, multimode input waveguide (2a) middle part respectively with a plurality of coupling One end that multiplex is led connection that is coupled forms each Mode Coupling area, multimode input waveguide (2a) other end and a plurality of coupled waveguide The other end be used as the output end of single mode signal.
9. a kind of restructural insert of multi-wavelength-multi-mode according to claim 8 divides multiplexing chip, it is characterised in that: institute The pattern demultiplexer (2) and pattern multiplexer (8) stated are using cascade asymmetrical directional coupler structure, each Mode Coupling area (2f, 2g, 2h) is asymmetrical directional coupler structure.
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