CN104597570A - Integrated adjustable attenuator - Google Patents

Integrated adjustable attenuator Download PDF

Info

Publication number
CN104597570A
CN104597570A CN201510082736.2A CN201510082736A CN104597570A CN 104597570 A CN104597570 A CN 104597570A CN 201510082736 A CN201510082736 A CN 201510082736A CN 104597570 A CN104597570 A CN 104597570A
Authority
CN
China
Prior art keywords
micro
ring
coupled section
light signal
adjustable attenuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510082736.2A
Other languages
Chinese (zh)
Other versions
CN104597570B (en
Inventor
张衡
陈明华
于鸿晨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Original Assignee
Tsinghua University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University filed Critical Tsinghua University
Priority to CN201510082736.2A priority Critical patent/CN104597570B/en
Publication of CN104597570A publication Critical patent/CN104597570A/en
Application granted granted Critical
Publication of CN104597570B publication Critical patent/CN104597570B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338Loop resonators
    • G02B6/2934Fibre ring resonators, e.g. fibre coils
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/264Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29331Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
    • G02B6/29335Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
    • G02B6/29338Loop resonators
    • G02B6/29343Cascade of loop resonators

Abstract

The invention provides an integrated adjustable attenuator comprising a first microring and a second microring which are in dual-channel cascading. An optical input signal enters the integrated adjustable attenuator through a first input port. A first part of the optical input signal flows to the first microring, a second part of the optical input signal flows to the second microring, and the a third part of the optical input signal flows to a second output port. By the use of the integrated adjustable attenuator, the power balance problem of channels of multiplexed WDM (wavelength division multiplex) signal is solved.

Description

Integrated adjustable attenuator
Technical field
The present invention relates to communication technical field, be specifically related to a kind of integrated adjustable attenuator.
Background technology
Integrated variable optical attenuator (Variable Optical Attenuators is called for short VOAs) is widely used among modern wavelength-division multiplex (Wavelength Division Multiplex is called for short WDM) optical communication network.Its Main Function is exactly the watt level for dynamically monitoring and controlling light path, for other optical signal prosessing devices provide suitable stable power stage.The technology making VOA at present under the integration environment mainly comprises MEMS (micro electro mechanical system) (MEMS) technology and optical planar circuit (PLC) manufacturing technology.The silica-based PLC technology of technical maturity is adopted to carry out the advantage that making devices has low cost, high-performance, high stability and high integration.
Integrated variable optical attenuator of the prior art due to application bandwidth wide and cause the power-balance that better can not carry out each channel to the WDM signal after multiplexing, therefore needing badly provides a kind of variable optical attenuator, to solve the problem.
Summary of the invention
For defect of the prior art, the invention provides a kind of integrated adjustable attenuator, to solve the problem of the WDM signal after multiplexing being carried out to the power-balance of each channel.
For solving the problems of the technologies described above, the invention provides following technical scheme:
The invention provides a kind of integrated adjustable attenuator, comprise first micro-ring and second micro-ring of two binary channels cascades, light input signal enters this integrated adjustable attenuator by first input end mouth, and the Part I of described light input signal flows to first micro-ring, is the first light signal; The Part II of described light input signal flows to second micro-ring, is the second light signal; The Part III of described light input signal flows to the second output port, is the 3rd light signal;
Wherein, during first coupled section of the first light signal flowing to first micro-ring by the micro-ring of right side half circulation to the first of first micro-ring, a part for first light signal is by flowing to the first output port after described first coupled section, another part of first light signal by after described first coupled section through the left side half circulation of first micro-ring to second micro-ring, be the 4th light signal;
Described first coupled section is the first straight optical fiber waveguide and the place that is coupled of described first micro-ring;
Wherein, during second coupled section of the second light signal flowing to second micro-ring by the micro-ring of right side half circulation to the second of second micro-ring, a part for second light signal by flowing to the first coupled section of first micro-ring after described second coupled section and flowing to the first output port, another part of the second light signal by after described second coupled section through the left side half circulation of second micro-ring to the second output port;
Described second coupled section is the first straight optical fiber waveguide and the place that is coupled of described second micro-ring;
Wherein, during second coupled section of the 4th light signal flowing to second micro-ring by the micro-ring of right side half circulation to the second of second micro-ring, a part for 4th light signal by flowing to the first coupled section of first micro-ring after described second coupled section and flowing to the first output port, another part of the 4th light signal by after described second coupled section through the left side half circulation of second micro-ring to the second output port.
Wherein, the difference of the girth of described first micro-ring and the girth of described second micro-ring is in the first preset range.
Wherein, the girth of described first micro-ring is equal with the girth of described second micro-ring.
Wherein, the radius of described first micro-ring is 25 μm.
Wherein, the difference of the integral multiple of the semi-perimeter of the distance between described first micro-ring and second micro-ring and described first micro-ring or second micro-ring is in the second preset range.
Wherein, the length of described first coupled section is 8 ~ 12um; The length of described second coupled section is 8 ~ 12um.
Wherein, at the first coupled section place, the gap between described first direct light waveguide and described first micro-ring is 200nm; At the second coupled section place, the gap between described first direct light waveguide and described second micro-ring is 200nm.
Wherein, the material of described first micro-ring and/or described second micro-ring is silicon-on-insulator.
Wherein, described integrated adjustable attenuator also comprises well heater, for heating described first micro-ring and/or described second micro-ring.
Wherein, described well heater is provided with electrode, for providing electric current to input for described well heater.
As shown from the above technical solution, integrated adjustable attenuator of the present invention is provided with micro-ring of two cascades, by controlling the radius of two micro-rings, the distance of two micro-interannulars or realizing the adjustable object of optical attenuation by modes such as the characteristics that changes two micro-rings.And integrated adjustable attenuator of the present invention also has the characteristic of narrow attenuation bandwidth, this is mainly because the coherence of the Bragg resonance characteristic of attenuation characteristic primarily of two interannulars and the light from first micro-ring and second micro-ring decides, resonance due to micro-ring makes the acute variation of the light phase from first micro-ring and second micro-ring, thus makes adjustable damping bandwidth controlled very narrow.
In addition, in the present invention, the two micro-ring structure adopting SOI to make, on the basis of above-mentioned advantage, because the power attenuation of the Bragg resonance produced by SOI loss is very little, thus makes adjustable damping bandwidth controlled narrower.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation of the integrated adjustable attenuator that one embodiment of the invention provides;
Fig. 2 is the structural representation of well heater and the electrode arranged above first micro-ring and second micro-ring;
Fig. 3 is frequency centered by 1550.3nm, the frequency response results schematic diagram of well heater integrated adjustable attenuator under different input power of first micro-ring.
Embodiment
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, clear, complete description is carried out to the technical scheme in the embodiment of the present invention, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Fig. 1 shows the structural representation of the integrated adjustable attenuator that one embodiment of the invention provides, black arrow in figure represents the flow direction of light signal, wherein sequence number 1 represents first micro-ring, 2 represent second micro-ring, and 3 represent first input end mouth, and 4 represent the first output port, 5 represent the second output port, 6 represent the first coupled section, and 7 represent the second coupled section, and 8 represent the first straight optical fiber waveguide.As shown in Figure 1, the integrated adjustable attenuator that the present embodiment provides comprises the first micro-ring 1 and second micro-ring 2 of two binary channels cascades, light input signal enters this integrated adjustable attenuator by first input end mouth 3, and the Part I of described light input signal flows to first micro-ring 1, is the first light signal; The Part II of described light input signal flows to second micro-ring 2, is the second light signal; The Part III of described light input signal flows to the second output port 5, is the 3rd light signal;
Wherein, during first coupled section 6 of the first light signal flowing to first micro-ring 1 by the micro-ring 1 of right side half circulation to the first of first micro-ring 1, a part for first light signal is by flowing to the first output port 4 after described first coupled section 6, another part of first light signal by after described first coupled section 6 through the left side half circulation of first micro-ring 1 to second micro-ring 2, be the 4th light signal;
Described first coupled section 6 is the first straight optical fiber waveguide 8 and the place that is coupled of described first micro-ring 1;
Wherein, during second coupled section 7 of the second light signal flowing to second micro-ring 2 by the micro-ring 2 of right side half circulation to the second of second micro-ring 2, the part of second light signal by flow to the first coupled section 6 of first micro-ring after described second coupled section 7 and the another part flowing to the first output port 3, second light signal by after described second coupled section 7 through the left side half circulation of second micro-ring 2 to the second output port 5;
Described second coupled section 7 is the first straight optical fiber waveguide 8 and the place that is coupled of described second micro-ring 2;
Wherein, during second coupled section 7 of the 4th light signal flowing to second micro-ring 2 by the micro-ring 2 of right side half circulation to the second of second micro-ring 2, the part of 4th light signal by flow to the first coupled section 6 of first micro-ring 1 after described second coupled section 7 and the another part flowing to the first output port the 4, four light signal by after described second coupled section 7 through the left side half circulation of second micro-ring 2 to the second output port 5.
Above-mentioned first micro-ring or second micro-ring are Micro-ring resonator (MMR), known by foregoing description, when light input signal inputs to integrated adjustable attenuator by first input end mouth, described light input signal divide into three parts altogether, and Part I flows to first micro-ring, is the first light signal, Part II flows to second micro-ring, be the second light signal, Part III flows to the second output port, is the 3rd light signal.In the present invention, the second output port is not as optical output port, and the 3rd light signal therefore flowing to the second output port can think that light is revealed.
And the part flowing to the first light signal of first micro-ring and a part of light signal of flowing through second micro-ring are exported by the first output port after the first coupled section place is coupled, and produce a part of light and return first micro-ring, thus form resonance.In the present invention, the first output port is optical output port.And the another part flowing to the first light signal of first micro-ring flows to second micro-ring after walking around first micro-ring one circle, this part optical signals carries out flowing to the second output terminal after coupling rear portion walks around second micro-ring one circle at the second coupled section place with the second light signal flowing to second micro-ring, this part light can think that light is revealed, and another part continues to be exported by the first output port after the first coupled section place is coupled after the second coupled section place is coupled.
By known above, by the light input signal of first input end mouth, its trend is divided in order to three parts, and a part is exported by the second output port, and this part light can think that light is revealed; A part in first micro-ring, second micro-ring by and the first coupled section wave band, second coupling wave band place be coupled time attenuated; A part is exporting from the first output port after transmission in first micro-ring, second micro-ring and coupling.Therefore, by the light signal that controls to export from the second output port number, and during coupling damping capacity number just can control from the light signal of the first output port output number achieve the function of adjustable damping.
Integrated adjustable attenuator described in the embodiment of the present invention is owing to being provided with micro-ring of two cascades, by the interval controlling the radius of two micro-rings, the distance of two micro-interannulars comes the centre wavelength of attenuation band, bandwidth and attenuation band, and realize the adjustable object of optical attenuation by modes such as the characteristics that changes two micro-rings.
In order to make resonance frequency that two rings are corresponding consistent thus ensure free spectral range (the free spectral range that two rings are corresponding, be called for short FSR) identical and then make whole attenuator obtain stable attenuation band interval, simultaneously in order to control required attenuation band position, the radius of described first micro-ring is close with the girth of described second micro-ring.Namely the difference of the girth of described first micro-ring and the girth of second micro-ring will be in the first preset range.Certainly both girths also can be identical or close.Usually, described first preset range is generally 0 ~ L1, and described L1 is relevant with the girth of first micro-ring or second micro-ring, is generally first micro-ring or second micro-ring girth 0.01 ~ 0.2 times.
Certainly, if the difference difference of the girth of the girth of first micro-ring and second micro-ring is comparatively large, also can meet the effect of adjustable damping, just effect can be deteriorated, the frequency band minimizing etc. such as met the demands.
In order to obtain the FSR of approximate 1.3nm, and obtain adjustable damping frequency band at 1550.3nm place, the radius of described first micro-ring can be 25 μm.
In order to make the Bragg resonance between first micro-ring and second micro-ring, first micro-ring internal resonance, second micro-ring internal resonance is approximate to be occurred simultaneously, to ensure notch depth, distance between described first micro-ring and second micro-ring is approximately the integral multiple of the semi-perimeter of described first micro-ring or second micro-ring, namely the distance between described first micro-ring and second micro-ring can be the integral multiple of the semi-perimeter of described first micro-ring or second micro-ring, or the difference of the integral multiple of the semi-perimeter of distance between described first micro-ring and second micro-ring and described first micro-ring or second micro-ring is in the second preset range.Usually, described second preset range is generally 0 ~ L2, and the integral multiple of the semi-perimeter of described L2 and first micro-ring or second micro-ring is relevant, is generally 0.01 ~ 0.2 times of first micro-ring or second micro-ring semi-perimeter integral multiple.Such as when the radius of first micro-ring is 25 μm, the distance between described first micro-ring and second micro-ring is 154.127 μm.
Certainly, because the range of adjustment of micro-ring is very wide, even if the distance between two micro-rings does not meet the relation of semi-perimeter integral multiple, also by regulating, some frequency band is met the demands.Select near semi-perimeter integral multiple mainly in order to obtain specific character in specific frequency.
See Fig. 1, wherein the coupling coefficient of the first coupled section is K1, the coupling coefficient of the second coupled section is K2, when carrying out optically-coupled, coupling coefficient K1, K2 are only relevant with size with the material of optical wavelength and coupling unit, preferably, the size of the coupling unit i.e. length of the first or second coupled section is 8 ~ 12um; Near general selection 8 μm, left and right just can obtain good effect.Wherein, the length of the first coupled section is not necessarily equal with the length of the second coupled section.
In order to improve coupling coefficient, reduce and shake too violent because two micro-ring amplitude-frequency responses change the attenuator frequency response acutely caused, and then obtain stable adjustable damping bandwidth, in a preferred embodiment of the invention, at the first coupled section place, gap between described first direct light waveguide and described first micro-ring is 200nm, and coupling length is 8um; At the second coupled section place, the gap between described first straight optical fiber waveguide and described second micro-ring is 200nm.
Integrated adjustable attenuator described in the embodiment of the present invention is provided with micro-ring of two cascades, by controlling the radius of two micro-rings, the distance of two micro-interannulars or realizing the adjustable object of optical attenuation by modes such as the characteristics that changes two micro-rings.And integrated adjustable attenuator of the present invention also has the characteristic of narrow attenuation bandwidth, this is mainly because the coherence of the Bragg resonance characteristic of attenuation characteristic primarily of two interannulars and the light from first micro-ring and second micro-ring decides, resonance due to micro-ring makes the acute variation of the light phase from first micro-ring and second micro-ring, thus makes adjustable damping bandwidth controlled very narrow.
Silicon-on-insulator (silicon-on-insulator, being called for short SOI) material is due to the favor of its outstanding electrical and optical properties extremely photoelectric field worker in recent years, simultaneously SOI material has thermo-optical properties, can change the effective refractive index of waveguide thus change the characteristic of whole device by the temperature of adjusting means.Apply this thermo-optical properties, in a preferred embodiment of the invention, devise a kind of adjustable optical attenuator based on SOI, namely on the basis of above-mentioned adjustable optical attenuator, described first micro-ring and/or described second micro-ring is made to adopt SOI as its material, the performance of two micro-rings is regulated by the temperature controlling first micro-ring and second micro-ring, and in conjunction with the architectural characteristic of above-mentioned adjustable optical attenuator, to reach the object of adjustable damping.
When the temperature of the micro-ring of control first and second micro-ring, can well heater (as S type well heater) being preferably set above two micro-rings respectively, then carrying out electricity input by adding electrode pair well heater.As shown in Figure 2, wherein 9 is well heater, is respectively used to heat first micro-ring and second micro-ring, and 10 is electrode, is respectively used to carry out electric current input to well heater 9, to make well heater work.Above-mentioned well heater and electrode can use the Ti/TiN of 110nm to realize.By regulating the power input of two parts well heater, and then regulate two ring performances.Wherein, heater body interval is preferably 1um.
Only can certainly heat in first micro-ring or second micro-ring, to regulate the characteristic of one of them micro-ring, the object of adjustable damping can be played equally.
The integrated adjustable attenuator be made up of SOI material has the characteristic of narrow adjustable damping bandwidth, this is mainly because attenuation band decides primarily of micro-ring internal resonance, two interannular Bragg resonance characteristics and the coherence from the light of first micro-ring and second micro-ring, resonance due to micro-ring makes the acute variation of the light phase from first micro-ring and second micro-ring, and the power attenuation of the Bragg resonance to be produced by SOI loss is very little, thus make adjustable damping bandwidth controlled very narrow.Moreover, in SOI material, Si and SiO2 has very high refringence, and this makes the radius of micro-ring can control in very low scope, thus attenuator can be made to obtain larger FSR, meanwhile, because its size is less, better development prospect is had at silicon integration field.
In a preferred embodiment of the invention, described integrated adjustable attenuator comprises first micro-ring of three cascades, second micro-ring and the 3rd micro-ring.Micro-lopps of its principle and two cascades seemingly, no longer describes in detail herein.
Fig. 3 is frequency centered by 1550.3nm, the frequency response results schematic diagram of well heater integrated adjustable attenuator under different input power of first micro-ring, horizontal ordinate represents the wavelength of input light, and ordinate represents insertion loss (or the first output terminal record output power).By regulating the temperature of first micro-ring, and the temperature of the micro-ring of Reverse Turning Control second compensates, and see Fig. 3, when the power input of the well heater of first micro-ring is 4.038mW, obtains the maximum power attenuation being approximately 0dB; When the power input of the well heater of first micro-ring is 9.377mW, obtain the maximum power attenuation being approximately 30dB; Integrated adjustable attenuator described in visible the present embodiment obtains the adjustable damping setting range of 30dB near 1550.3nm equiwavelength.
Above embodiment only for illustration of technical scheme of the present invention, is not intended to limit; Although with reference to previous embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.

Claims (10)

1. an integrated adjustable attenuator, it is characterized in that, comprise first micro-ring and second micro-ring of two binary channels cascades, light input signal enters this integrated adjustable attenuator by first input end mouth, the Part I of described light input signal flows to first micro-ring, is the first light signal; The Part II of described light input signal flows to second micro-ring, is the second light signal; The Part III of described light input signal flows to the second output port, is the 3rd light signal;
Wherein, during first coupled section of the first light signal flowing to first micro-ring by the micro-ring of right side half circulation to the first of first micro-ring, a part for first light signal is by flowing to the first output port after described first coupled section, another part of first light signal by after described first coupled section through the left side half circulation of first micro-ring to second micro-ring, be the 4th light signal;
Described first coupled section is the first straight optical fiber waveguide and the place that is coupled of described first micro-ring;
Wherein, during second coupled section of the second light signal flowing to second micro-ring by the micro-ring of right side half circulation to the second of second micro-ring, a part for second light signal by flowing to the first coupled section of first micro-ring after described second coupled section and flowing to the first output port, another part of the second light signal by after described second coupled section through the left side half circulation of second micro-ring to the second output port;
Described second coupled section is the first straight optical fiber waveguide and the place that is coupled of described second micro-ring;
Wherein, during second coupled section of the 4th light signal flowing to second micro-ring by the micro-ring of right side half circulation to the second of second micro-ring, a part for 4th light signal by flowing to the first coupled section of first micro-ring after described second coupled section and flowing to the first output port, another part of the 4th light signal by after described second coupled section through the left side half circulation of second micro-ring to the second output port.
2. integrated adjustable attenuator according to claim 1, is characterized in that, the difference of the girth of described first micro-ring and the girth of described second micro-ring is in the first preset range.
3. integrated adjustable attenuator according to claim 2, is characterized in that, the girth of described first micro-ring is equal with the girth of described second micro-ring.
4. the integrated adjustable attenuator according to Claims 2 or 3, is characterized in that, the radius of described first micro-ring is 25 μm.
5. integrated adjustable attenuator according to claim 1, is characterized in that, the difference of the integral multiple of the semi-perimeter of the distance between described first micro-ring and second micro-ring and described first micro-ring or second micro-ring is in the second preset range.
6. integrated adjustable attenuator according to claim 1, is characterized in that, the length of described first coupled section is 8 ~ 12um; The length of described second coupled section is 8 ~ 12um.
7. integrated adjustable attenuator according to claim 1, is characterized in that, at the first coupled section place, the gap between described first direct light waveguide and described first micro-ring is 200nm; At the second coupled section place, the gap between described first direct light waveguide and described second micro-ring is 200nm.
8. integrated adjustable attenuator according to claim 1, is characterized in that, the material of described first micro-ring and/or described second micro-ring is silicon-on-insulator.
9. integrated adjustable attenuator according to claim 8, is characterized in that, described integrated adjustable attenuator also comprises well heater, for heating described first micro-ring and/or described second micro-ring.
10. integrated adjustable attenuator according to claim 9, is characterized in that, described well heater is provided with electrode, for providing electric current to input for described well heater.
CN201510082736.2A 2015-02-15 2015-02-15 Integrated adjustable attenuator Expired - Fee Related CN104597570B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510082736.2A CN104597570B (en) 2015-02-15 2015-02-15 Integrated adjustable attenuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510082736.2A CN104597570B (en) 2015-02-15 2015-02-15 Integrated adjustable attenuator

Publications (2)

Publication Number Publication Date
CN104597570A true CN104597570A (en) 2015-05-06
CN104597570B CN104597570B (en) 2017-09-22

Family

ID=53123470

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510082736.2A Expired - Fee Related CN104597570B (en) 2015-02-15 2015-02-15 Integrated adjustable attenuator

Country Status (1)

Country Link
CN (1) CN104597570B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107526135A (en) * 2017-10-19 2017-12-29 兰州大学 Upper download wave filter based on micro-nano fiber toroidal cavity resonator and preparation method thereof
CN108363145A (en) * 2018-02-02 2018-08-03 西南大学 It is a kind of based on plasma-induced transparent variable optical delay line, implementation method and regulation and control method with sink effect
CN110740030A (en) * 2019-09-23 2020-01-31 太原理工大学 Integrated chaotic signal generator with double-microring waveguide structure

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005010582A1 (en) * 2003-07-15 2005-02-03 Massachusetts Institute Of Technology Optical coupled-resonator filters with asymmetric coupling
CN101035391A (en) * 2007-04-10 2007-09-12 浙江大学 1xN dynamic light wavelength router based on the micro-loop
WO2008018900A2 (en) * 2006-01-03 2008-02-14 The Trustees Of Columbia University In The City Of New York Systems and methods for sensing properties of a workpiece and embedding a photonic sensor in metal
US20080166095A1 (en) * 2006-12-29 2008-07-10 Massachusetts Institute Of Technology Fabrication-tolerant waveguides and resonators
CN101871790A (en) * 2010-06-08 2010-10-27 浙江大学 Photo sensor based on vernier effect of broadband light source and cascading optical waveguide filter
US20130156369A1 (en) * 2011-12-16 2013-06-20 Electronics And Telecommunications Research Institute RING RESONATORS HAVING Si AND/OR SiN WAVEGUIDES
CN203241340U (en) * 2013-05-16 2013-10-16 成都谱视科技有限公司 Grating FP (Fabry-Perot) cavity and microring resonator cascaded optical biochemical sensor chip
US8670476B2 (en) * 2010-09-14 2014-03-11 The Board Of Trustees Of The University Of Illinois Distributed reflector in a microring resonator
CN104317068A (en) * 2014-10-29 2015-01-28 中国科学院半导体研究所 Integrated optical filter with center wavelength and filter bandwidth both adjustable independently

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005010582A1 (en) * 2003-07-15 2005-02-03 Massachusetts Institute Of Technology Optical coupled-resonator filters with asymmetric coupling
WO2008018900A2 (en) * 2006-01-03 2008-02-14 The Trustees Of Columbia University In The City Of New York Systems and methods for sensing properties of a workpiece and embedding a photonic sensor in metal
US20080166095A1 (en) * 2006-12-29 2008-07-10 Massachusetts Institute Of Technology Fabrication-tolerant waveguides and resonators
CN101035391A (en) * 2007-04-10 2007-09-12 浙江大学 1xN dynamic light wavelength router based on the micro-loop
CN101871790A (en) * 2010-06-08 2010-10-27 浙江大学 Photo sensor based on vernier effect of broadband light source and cascading optical waveguide filter
US8670476B2 (en) * 2010-09-14 2014-03-11 The Board Of Trustees Of The University Of Illinois Distributed reflector in a microring resonator
US20130156369A1 (en) * 2011-12-16 2013-06-20 Electronics And Telecommunications Research Institute RING RESONATORS HAVING Si AND/OR SiN WAVEGUIDES
CN203241340U (en) * 2013-05-16 2013-10-16 成都谱视科技有限公司 Grating FP (Fabry-Perot) cavity and microring resonator cascaded optical biochemical sensor chip
CN104317068A (en) * 2014-10-29 2015-01-28 中国科学院半导体研究所 Integrated optical filter with center wavelength and filter bandwidth both adjustable independently

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
ANDREA MELLONI: "Synthesis of a parallel-coupled ring-resonator filter", 《OPTICS LETTERS》 *
王涛: "硅基微环谐振腔中的光调控研究", 《中国博士学位论文全文数据库 信息科技辑》 *
迟泽英: "《纤维光学与光纤应用技术》", 30 April 2009 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107526135A (en) * 2017-10-19 2017-12-29 兰州大学 Upper download wave filter based on micro-nano fiber toroidal cavity resonator and preparation method thereof
CN107526135B (en) * 2017-10-19 2019-05-03 兰州大学 Upper downloading filter based on micro-nano fiber toroidal cavity resonator and preparation method thereof
CN108363145A (en) * 2018-02-02 2018-08-03 西南大学 It is a kind of based on plasma-induced transparent variable optical delay line, implementation method and regulation and control method with sink effect
CN110740030A (en) * 2019-09-23 2020-01-31 太原理工大学 Integrated chaotic signal generator with double-microring waveguide structure
CN110740030B (en) * 2019-09-23 2022-07-05 太原理工大学 Integrated chaotic signal generator with double-microring waveguide structure

Also Published As

Publication number Publication date
CN104597570B (en) 2017-09-22

Similar Documents

Publication Publication Date Title
CN105278040B (en) Optical element and optical receiver apparatus
EP3514994B1 (en) Control method and device for micro-ring resonator
WO2014067047A1 (en) Wavelength tunable laser, passive optical network system and device
WO2016149289A1 (en) Differential ring modulator
CN104597570A (en) Integrated adjustable attenuator
CN106842431B (en) A kind of restructural insert of multi-wavelength-multi-mode divides multiplexing chip
US6317233B1 (en) Optical power equalizer in WDM optical communication system and variable attenuator for use therein
KR100358181B1 (en) Thermo-optic tunable optical attenuator
CN102412499A (en) Adjustable ring-shaped cavity erbium-doped optical-fiber multi-wavelength laser based on cascade HiBi optical fibers and Sagnac rings
Kraemer et al. S-, C-and L-Band photonic integrated wavelength selective switch
US6917748B2 (en) Variable optical attenuator on an electro-optical layer
JP6226496B2 (en) Polarizer and polarization modulation system
KR100281552B1 (en) Integrated Optical Variable Optical Attenuator Using Thermo-optic Effect
US11489611B2 (en) Reconfigurable optical add-drop multiplexer with low power consumption
JP5632436B2 (en) Optical wavelength filter
JP2003005139A (en) Variable optical attenuator
JP2020140001A (en) Mode branch device
KR101423978B1 (en) Thermal Optic Variable Optical Attenuator
Petrini et al. Reconfigurable FSR-free microring resonator filter with wide hitless tunability
KR100301840B1 (en) variable light attenuator using light communication
US20040234267A1 (en) Tunable optical add-drop multiplexer based on SOI wafer and manufacturing method thereof
Tang et al. Reconfigurable 3-channel all-optical MIMO circuit on silicon based on multi-plane light conversion
KR100970927B1 (en) Variable optical attenuator based on thermo-optic effect
Oh et al. Development of microoptical waveguide on microactuating platform technologies for reconfigurable optical networking
KR19990073875A (en) Optical output equalizer of wavelength division multiplexing optical communication system

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170922

Termination date: 20210215

CF01 Termination of patent right due to non-payment of annual fee