CN110749956B - Reconfigurable optical mode converter compatible with wavelength division multiplexing - Google Patents

Reconfigurable optical mode converter compatible with wavelength division multiplexing Download PDF

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CN110749956B
CN110749956B CN201911064559.XA CN201911064559A CN110749956B CN 110749956 B CN110749956 B CN 110749956B CN 201911064559 A CN201911064559 A CN 201911064559A CN 110749956 B CN110749956 B CN 110749956B
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waveguide
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CN110749956A (en
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田永辉
蒋永恒
肖恢芙
陈文平
韩旭
赵婷
廖苗苗
周旭东
王红侠
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Lanzhou University
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    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
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Abstract

本发明提供了一种兼容波分复用的可重构光模式转换器,包括相连接的多环级联件和模式转换器;多环级联件由一根直波导、一个无源微环和n‑1个可调微环谐振器构成,其中n为大于等于2的正整数。该光模式转换器将多环级联应用于模式转换器中,通过改变各个可调谐微环谐振器的谐振状态,使得有源微环中的光被等分为x份,并通过谐振的微环谐振器下载到相应的波导中,通过模式转换器可以实现基模同时向任意多种高阶模式的转换,即同时产生多个模式,从而解决光通信系统中需要的激光器数目过多的问题。本发明具有良好的可扩展性,能与波分复用相结合,从而提高光通信系统的灵活性。

Figure 201911064559

The invention provides a reconfigurable optical mode converter compatible with wavelength division multiplexing, which includes a multi-ring cascade and a mode converter that are connected to each other; and n-1 tunable microring resonators, where n is a positive integer greater than or equal to 2. The optical mode converter applies multi-ring cascade to the mode converter. By changing the resonant state of each tunable micro-ring resonator, the light in the active micro-ring is divided into x equal parts, and the light in the active micro-ring is divided into x parts, and the light in the active micro-ring is divided into x parts through the resonant micro-ring resonator. The ring resonator is downloaded into the corresponding waveguide, and the fundamental mode can be converted into any high-order mode at the same time through the mode converter, that is, multiple modes are generated at the same time, so as to solve the problem of too many lasers required in the optical communication system. . The invention has good expansibility and can be combined with wavelength division multiplexing, thereby improving the flexibility of the optical communication system.

Figure 201911064559

Description

一种兼容波分复用的可重构光模式转换器A Reconfigurable Optical Mode Converter Compatible with Wavelength Division Multiplexing

技术领域technical field

本发明属于光模式复用技术领域,涉及一种兼容波分复用的可重构光模式转换器。The invention belongs to the technical field of optical mode multiplexing, and relates to a reconfigurable optical mode converter compatible with wavelength division multiplexing.

背景技术Background technique

随着大数据时代的到来,人们对信息的处理速度和处理容量的要求有了进一步地提高。研究人员通过将光的先进的复用技术应用于高速的光通信系统中,使得光网络的信息传输能力得到了提高。目前应用最为成熟的复用技术是波分复用,而随着数据通信容量的增大,波分技术所需要的激光源数量将会成比例地增多,这使得光通信系统的成本也大幅度升高。为此,研究人员在光的传输中引入了光的模式复用技术。光的模式是光的波长、偏振外的一种维度,不同光的模式在波导或光纤中传播时相互独立。因此,可以将传输信号搭载在同一波长的不同模式上,利用模式的正交性进行数据传输,并在接收端通过模式解复用器,将不同的光模式解复用到不同的端口中。这样就可以通过光的模式复用技术用一种波长的不同模式代替所需的更多的波长,从而大大降低片上激光源的数目,同时提高了光通信系统中的信息处理能力。With the advent of the era of big data, people's requirements for information processing speed and processing capacity have been further improved. By applying advanced optical multiplexing technology to high-speed optical communication systems, researchers have improved the information transmission capacity of optical networks. At present, the most mature multiplexing technology is wavelength division multiplexing. With the increase of data communication capacity, the number of laser sources required by wavelength division technology will increase proportionally, which makes the cost of optical communication systems also greatly increased. rise. To this end, the researchers introduced optical mode multiplexing technology in the transmission of light. The mode of light is the wavelength of light, a dimension outside the polarization, and different modes of light propagate independently of each other in a waveguide or fiber. Therefore, the transmission signal can be carried on different modes of the same wavelength, data transmission can be carried out by using the orthogonality of the modes, and the mode demultiplexer can be used at the receiving end to demultiplex different optical modes into different ports. In this way, different modes of one wavelength can be used to replace more required wavelengths through the optical mode multiplexing technology, thereby greatly reducing the number of on-chip laser sources, and at the same time improving the information processing capability in the optical communication system.

目前的光模式转换器、模式复用器一般是将一种模式转换为另一种特定的模式,在2014年,L. W. Luo等人在著名期刊Nature Communications上发表了文章“WDM-compatible mode-division multiplexing on a silicon chip”(NatureCommunications, Vol. 5, pp. 3069)。首次提出了基于微环的模式复用器,自此关于模式的研究受到了越来越多研究人员的关注。2019年,X.Han等人在期刊Journal of LightwaveTechnology上发表了科技论文“Reconfigurable On-Chip Mode Exchange for Mode-Division Multiplexing Optical Networks”(Journal of Lightwave Technology, Vol.37, Issue 3, pp. 1008-1013)基于微环模式转换器提出了一种基模和高阶模式之间的模式选择交换器。而这些器件无法实现一种模式同时向多种模式的转换,即无法同时产生多种模式。对于波分复用技术来说,可以将不同的波长同时输入到同一根波导或光纤中。而上述器件无法实现同时产生多种模式,无法对所需的模式进行并行处理,大大降低了光通信系统的处理信息的能力,无法满足日益庞大的光通信系统的需求。The current optical mode converters and mode multiplexers generally convert one mode into another specific mode. In 2014, L. W. Luo et al. published an article in the famous journal Nature Communications "WDM-compatible mode-division multiplexing on a silicon chip” (Nature Communications, Vol. 5, pp. 3069). The pattern multiplexer based on microring was proposed for the first time. Since then, the research on patterns has attracted more and more researchers' attention. In 2019, X.Han et al. published the technical paper "Reconfigurable On-Chip Mode Exchange for Mode-Division Multiplexing Optical Networks" in the Journal of Lightwave Technology (Journal of Lightwave Technology, Vol.37, Issue 3, pp. 1008- 1013) proposed a mode-selective switch between fundamental and higher-order modes based on a micro-ring mode converter. However, these devices cannot realize the conversion from one mode to multiple modes at the same time, that is, cannot generate multiple modes at the same time. For wavelength division multiplexing, different wavelengths can be input into the same waveguide or fiber at the same time. However, the above devices cannot generate multiple modes at the same time, and cannot perform parallel processing on the required modes, which greatly reduces the information processing capability of the optical communication system and cannot meet the demands of the increasingly large optical communication system.

发明内容SUMMARY OF THE INVENTION

本发明的目的是提供一种兼容波分复用的可重构光模式转换器,实现基模同时向任意多种高阶模进行模式转换,利用模分复用减少光通信系统中的激光源数目,从而降低光通信系统的功耗。The purpose of the present invention is to provide a reconfigurable optical mode converter compatible with wavelength division multiplexing, which can realize mode conversion from the fundamental mode to any number of high-order modes at the same time, and reduce the number of laser sources in the optical communication system by using the mode division multiplexing. Thereby, the power consumption of the optical communication system is reduced.

为实现上述目的,本发明所采用的技术方案是:一种兼容波分复用的可重构光模式转换器,包括相连接的多环级联件和模式转换器;多环级联件由一根直波导、一个无源微环和n个可调微环谐振器构成。In order to achieve the above object, the technical solution adopted in the present invention is: a reconfigurable optical mode converter compatible with wavelength division multiplexing, comprising a multi-ring cascade and a mode converter connected; the multi-ring cascade is composed of It consists of a straight waveguide, a passive microring and n tunable microring resonators.

本发明光模式转换器是在现有技术中模式转换原理的基础上,将级联微环应用于模式转换器中,该光模式转换器中的无源微环R1与微环R2、微环R3、微环R4等级联,通过调节微环R2、微环R3、微环R4等有源微环的有效折射率,从而改变R2、R3、R4等有源微环的谐振状态,实现基模同时向任意多种高阶模式的转换。该光模式转换器可以很好的与成熟的CMOS工艺技术相结合,且该器件具有良好的可拓展性,可以与波分复用技术相结合,提高光网络的灵活性,在日益灵活的光通信系统中发挥重要作用。The optical mode converter of the present invention is based on the mode conversion principle in the prior art, and the cascaded micro-ring is applied to the mode converter. The passive micro-ring R1 and the micro-ring R2 and the micro-ring in the optical mode converter are R3 and microring R4 are cascaded, and by adjusting the effective refractive index of active microrings such as microring R2, microring R3 and microring R4, the resonance state of active microrings such as R2, R3 and R4 can be changed to realize the fundamental mode. Conversion to any number of higher-order modes at the same time. The optical mode converter can be well combined with mature CMOS process technology, and the device has good scalability and can be combined with wavelength division multiplexing technology to improve the flexibility of optical networks. important role in the communication system.

附图说明Description of drawings

图1是本发明光模式转换器的示意图。FIG. 1 is a schematic diagram of an optical mode converter of the present invention.

图2是本发明光模式转换器一种实施例中多环级联的示意图。FIG. 2 is a schematic diagram of a multi-loop cascade in an embodiment of the optical mode converter of the present invention.

图3是本发明光模式转换器一种实施例中模式转换结构的示意图。FIG. 3 is a schematic diagram of a mode conversion structure in an embodiment of the optical mode converter of the present invention.

图4是本发明光模式转换器中基模转换为任意一种高阶模式的输出光谱图。FIG. 4 is an output spectrum diagram of the fundamental mode converted into any high-order mode in the optical mode converter of the present invention.

图5是本发明光模式转换器中基模转换为任意两种高阶模式的输出光谱图。FIG. 5 is an output spectrum diagram of the fundamental mode converted into any two high-order modes in the optical mode converter of the present invention.

图6是本发明光模式转换器中基模转换为任意三种高阶模式的输出光谱图。6 is an output spectrum diagram of the fundamental mode converted into any three high-order modes in the optical mode converter of the present invention.

图7是硅基热光调制的微环谐振器或直波导的横截面结构示意图。Figure 7 is a schematic diagram of the cross-sectional structure of a silicon-based thermo-optically modulated microring resonator or straight waveguide.

图8是硅基电光调制的微环谐振器或直波导的横截面结构示意图。FIG. 8 is a schematic diagram of the cross-sectional structure of a silicon-based electro-optically modulated microring resonator or straight waveguide.

图9是以硅基热光调制为例,微环谐振器的波谱响应图。Figure 9 is a graph of the spectral response of a microring resonator, taking silicon-based thermo-optic modulation as an example.

图中:1.多环级联件,2.模式转换器,2-1.第一直波导,2-2.第一弯波导,2-3.第二直波导,2-4.第二弯波导,2-5.第三弯波导,2-6.第三直波导,2-7.第四弯波导,2-8.第五弯波导,2-9.第四直波导,2-10.第六弯波导,2-11.第七弯波导,2-12.第五直波导,2-13.第八弯波导,2-14.第六直波导,2-15.第七直波导,2-16.第八直波导;In the figure: 1. Multi-loop cascade, 2. Mode converter, 2-1. The first straight waveguide, 2-2. The first curved waveguide, 2-3. The second straight waveguide, 2-4. The second Curved waveguide, 2-5. Third curved waveguide, 2-6. Third straight waveguide, 2-7. Fourth curved waveguide, 2-8. Fifth curved waveguide, 2-9. Fourth straight waveguide, 2- 10. The sixth curved waveguide, 2-11. The seventh curved waveguide, 2-12. The fifth straight waveguide, 2-13. The eighth curved waveguide, 2-14. The sixth straight waveguide, 2-15. The seventh straight waveguide Waveguide, 2-16. Eighth straight waveguide;

1-1.第九直波导,1-2.第十直波导,1-3.第九弯波导,1-4.第十一直波导,1-5.第十弯波导,1-6.第十二直波导,1-7.第十一弯波导,1-8.第十三直波导,1-9.第十四直波导,1-10.第十二弯波导,1-11.第十五直波导,1-12.第十六直波导,1-13.第十三弯波导,1-14.第十七直波导,1-15.第十八直波导。1-1. The ninth straight waveguide, 1-2. The tenth straight waveguide, 1-3. The ninth curved waveguide, 1-4. The tenth straight waveguide, 1-5. The tenth curved waveguide, 1-6. Twelfth straight waveguide, 1-7. Eleventh curved waveguide, 1-8. Thirteenth straight waveguide, 1-9. Fourteenth straight waveguide, 1-10. Twelfth curved waveguide, 1-11. The fifteenth straight waveguide, 1-12. The sixteenth straight waveguide, 1-13. The thirteenth curved waveguide, 1-14. The seventeenth straight waveguide, and 1-15. The eighteenth straight waveguide.

具体实施方式Detailed ways

下面结合附图和具体实施方式对本发明进行详细说明。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

如图1所示,本发明可重构光模式转换器,包括相连接的多环级联件1和模式转换器2;多环级联件1由一根直波导、一个无源微环和n个可调微环谐振器构成。As shown in FIG. 1, the reconfigurable optical mode converter of the present invention includes a multi-ring cascade 1 and a mode converter 2 connected to each other; the multi-ring cascade 1 consists of a straight waveguide, a passive micro-ring and It consists of n tunable microring resonators.

本发明可重构光模式转换器中的模式转换器2,包括依次设置的多根模式转换器用直波导,相邻模式转换器用直波导通过绝热锥相连,该多根模式转换器用直波导的宽度依次递减;一根模式转换器用直波导与一个弯结构波导耦合,该弯结构波导由一根弯结构波导用直波导和两根弯结构波导用弯波导组成,两根弯结构波导用弯波导通过该弯结构波导用直波导相连,弯结构波导用直波导与耦合的模式转换器用直波导平行设置;同一个弯结构波导中朝向模式转换器用直波导中宽度最小直波导的弯结构波导用弯波导的另一端均与多环级联件1相连。所有弯结构波导中弯结构波导用直波导和弯结构波导用弯波导的宽度均相同。The mode converter 2 in the reconfigurable optical mode converter of the present invention includes a plurality of straight waveguides for mode converters arranged in sequence, the straight waveguides for adjacent mode converters are connected through adiabatic cones, and the plurality of mode converters use the width of the straight waveguides. Decrease in turn; a mode converter is coupled with a straight waveguide with a curved structure waveguide, the curved structure waveguide is composed of a straight waveguide for a curved structure waveguide and two curved waveguides for a curved structure waveguide, and the two curved structure waveguides pass through the curved waveguide The curved structure waveguide is connected by a straight waveguide, and the straight waveguide for the curved structure waveguide is arranged in parallel with the straight waveguide for the coupled mode converter; in the same curved structure waveguide, the curved structure waveguide with the smallest width among the straight waveguides for the mode converter is used for the curved structure waveguide. The other ends of are connected to the multi-ring cascade 1. The width of the straight waveguide for the curved structure waveguide and the curved waveguide for the curved structure waveguide are the same in all the curved structure waveguides.

图2是本发明可重构光模式转换器一种实施例中的模式转换器2,包括依次设置的第一直波导2-1、第八直波导2-16、第七直波导2-15和第六直波导2-14,第一直波导2-1通过第一个绝热锥与第八直波导2-16相连,第八直波导2-16通过第二个绝热锥与第七直波导2-15相连,第七直波导2-15通过第三个绝热锥与第六直波导2-14相连;第一直波导2-1的宽度小于第八直波导2-16的宽度,第八直波导2-16的宽度小于第七直波导2-15的宽度,第七直波导2-15的宽度小于第六直波导2-14的宽度;2 is a mode converter 2 in an embodiment of the reconfigurable optical mode converter of the present invention, including a first straight waveguide 2-1, an eighth straight waveguide 2-16, and a seventh straight waveguide 2-15 arranged in sequence and the sixth straight waveguide 2-14, the first straight waveguide 2-1 is connected to the eighth straight waveguide 2-16 through the first adiabatic cone, and the eighth straight waveguide 2-16 is connected to the seventh straight waveguide through the second adiabatic cone 2-15 are connected, the seventh straight waveguide 2-15 is connected with the sixth straight waveguide 2-14 through the third adiabatic cone; the width of the first straight waveguide 2-1 is smaller than the width of the eighth straight waveguide 2-16, the eighth The width of the straight waveguide 2-16 is smaller than the width of the seventh straight waveguide 2-15, and the width of the seventh straight waveguide 2-15 is smaller than the width of the sixth straight waveguide 2-14;

图2所示的模式转换器2还包括第二直波导2-3、第三直波导2-6、第四直波导2-9和第五直波导2-12,第二直波导2-3与第一直波导2-1平行且耦合,第三直波导2-6与第八直波导2-16平行且耦合,第四直波导2-9与第七直波导2-15平行且耦合,第五直波导2-12与第六直波导2-14平行且耦合;第二直波导2-3的两端分别连接有第一弯波导2-2和第二弯波导2-4,第三直波导2-6的两端分别连接有第三弯波导2-5和第四弯波导2-7,第四直波导2-9的两端分别连接有第五弯波导2-8和第六弯波导2-10,第五直波导2-12的两端分别连接有第七弯波导2-11和第八弯波导2-13;The mode converter 2 shown in FIG. 2 further includes a second straight waveguide 2-3, a third straight waveguide 2-6, a fourth straight waveguide 2-9 and a fifth straight waveguide 2-12, the second straight waveguide 2-3 parallel to and coupled with the first straight waveguide 2-1, the third straight waveguide 2-6 parallel to and coupled with the eighth straight waveguide 2-16, the fourth straight waveguide 2-9 parallel to and coupled with the seventh straight waveguide 2-15, The fifth straight waveguide 2-12 is parallel to and coupled with the sixth straight waveguide 2-14; the two ends of the second straight waveguide 2-3 are respectively connected with the first curved waveguide 2-2 and the second curved waveguide 2-4, the third Two ends of the straight waveguide 2-6 are respectively connected with a third curved waveguide 2-5 and a fourth curved waveguide 2-7, and two ends of the fourth straight waveguide 2-9 are respectively connected with a fifth curved waveguide 2-8 and a sixth curved waveguide Both ends of the curved waveguide 2-10 and the fifth straight waveguide 2-12 are respectively connected with a seventh curved waveguide 2-11 and an eighth curved waveguide 2-13;

第一弯波导2-2、第三弯波导2-5、第五弯波导2-8和第七弯波导2-11均朝向第一直波导2-1的方向,且第一弯波导2-2的另一端、第三弯波导2-5的另一端、第五弯波导2-8的另一端和第七弯波导2-11的另一端均与图3所示的多环级联件1相连。The first curved waveguide 2-2, the third curved waveguide 2-5, the fifth curved waveguide 2-8 and the seventh curved waveguide 2-11 all face the direction of the first straight waveguide 2-1, and the first curved waveguide 2- The other end of connected.

第一弯波导2-2的宽度、第二直波导2-3的宽度、第二弯波导2-4的宽度、第三弯波导2-5的宽度、第三直波导2-6的宽度、第四弯波导2-7的宽度、第五弯波导2-8的宽度、第四直波导2-9的宽度、第六弯波导2-10的宽度、第七弯波导2-11的宽度、第五直波导2-12的宽度和第八弯波导2-13的宽度相同。The width of the first curved waveguide 2-2, the width of the second straight waveguide 2-3, the width of the second curved waveguide 2-4, the width of the third curved waveguide 2-5, the width of the third straight waveguide 2-6, The width of the fourth curved waveguide 2-7, the width of the fifth curved waveguide 2-8, the width of the fourth straight waveguide 2-9, the width of the sixth curved waveguide 2-10, the width of the seventh curved waveguide 2-11, The width of the fifth straight waveguide 2-12 is the same as the width of the eighth curved waveguide 2-13.

本发明可重构光模式转换器中的多环级联件1,包括由第九直波导1-1和n个可调微环谐振器构成的环状结构,构成该环状结构的各器件不相接触,n个可调微环谐振器为依次设置的微环谐振器R2、微环谐振器R3、微环谐振器R4、……和微环谐振器Rn,可调微环谐振器为有源微环;该环状结构内设有微环谐振器R1,微环谐振器R1为无源微环;有源微环的数量与模式转换器2中弯结构波导的数量相同。所有有源微环的半径相同,且小于无源微环的半径。The multi-ring cascade element 1 in the reconfigurable optical mode converter of the present invention includes a ring-shaped structure composed of a ninth straight waveguide 1-1 and n tunable micro-ring resonators, and each device constituting the ring-shaped structure Not in contact with each other, the n tunable micro-ring resonators are micro-ring resonators R2, micro-ring resonators R3, micro-ring resonators R4, ... and micro-ring resonators Rn arranged in sequence, and the tunable micro-ring resonators are Active microring; the ring structure is provided with a microring resonator R1, and the microring resonator R1 is a passive microring; the number of active microrings is the same as that of the curved structure waveguides in the mode converter 2. The radius of all active microrings is the same and smaller than that of passive microrings.

每个有源微环均与一根多环级联件用直波导耦合,且该有源微环位于与该有源微环耦合的多环级联件用直波导和微环谐振器R1之间,所有与有源微环耦合的多环级联件用直波导均不相交,且一根与有源微环耦合的多环级联件用直波导通过一根连接波导与模式转换器2中的一个弯结构波导相连,即该一根与有源微环耦合的多环级联件用直波导通过一根连接波导与模式转换器2的一个弯结构波导中朝向模式转换器用直波导中宽度最小直波导的弯结构波导用弯波导的另一端相连。Each active micro-ring is coupled with a straight waveguide for the multi-ring cascade, and the active micro-ring is located between the straight waveguide for the multi-ring cascade coupled to the active micro-ring and the micro-ring resonator R1 During the period, all straight waveguides for multi-ring cascades coupled with active micro-rings do not intersect, and a straight waveguide for multi-ring cascades coupled with active micro-rings is connected to the mode converter through a connecting waveguide 2 One of the curved-structure waveguides is connected, that is, the straight waveguide for the multi-loop cascade coupled with the active micro-ring passes through a curved-structure waveguide connecting the waveguide and the mode converter 2 toward the straight waveguide for the mode converter. The curved structure waveguide with the smallest width straight waveguide is connected with the other end of the curved waveguide.

该连接波导的结构根据与有源微环耦合的多环级联件用直波导和该直波导所要连接的模式转换器2中弯结构波导之间的距离确定,可以是两根弯波导和两根直波导依次间隔设置连接而成,可以是一根弯波导连接两根直波导而成,也可以是一根直波导,且所有的连接波导不相交。The structure of the connecting waveguide is determined according to the distance between the straight waveguide for the multi-loop cascade coupled with the active micro-ring and the curved waveguide in the mode converter 2 to which the straight waveguide is to be connected, and can be two curved waveguides and two curved waveguides. The root straight waveguides are arranged and connected in sequence, and can be formed by connecting two straight waveguides with a curved waveguide, or a straight waveguide, and all the connecting waveguides do not intersect.

图3是本发明可重构光模式转换器一种实施例中的多环级联件1,包括由第九直波导1-1、微环谐振器R2、微环谐振器R3、微环谐振器R4和微环谐振器R5构成的环状结构,第九直波导1-1、微环谐振器R2、微环谐振器R3、微环谐振器R4和微环谐振器R5不相接触,该环状结构内设有微环谐振器R1,微环谐振器R1为无源微环,微环谐振器R2、微环谐振器R3、微环谐振器R4和微环谐振器R5为有源微环;微环谐振器R2的半径、微环谐振器R3的半径、微环谐振器R4的半径和微环谐振器R5的半径相同,且小于微环谐振器R1的半径。3 is a multi-ring cascade component 1 in an embodiment of the reconfigurable optical mode converter of the present invention, including a ninth straight waveguide 1-1, a micro-ring resonator R2, a micro-ring resonator R3, a micro-ring resonator The ring structure formed by the resonator R4 and the micro-ring resonator R5, the ninth straight waveguide 1-1, the micro-ring resonator R2, the micro-ring resonator R3, the micro-ring resonator R4 and the micro-ring resonator R5 are not in contact. The ring structure is provided with a micro-ring resonator R1, the micro-ring resonator R1 is a passive micro-ring, and the micro-ring resonator R2, the micro-ring resonator R3, the micro-ring resonator R4 and the micro-ring resonator R5 are active micro-rings. Ring; the radius of the micro-ring resonator R2, the radius of the micro-ring resonator R3, the radius of the micro-ring resonator R4 and the radius of the micro-ring resonator R5 are the same and smaller than the radius of the micro-ring resonator R1.

微环谐振器R2与竖直设置的第十直波导1-2耦合,第十直波导1-2的上端通过第九弯波导1-3与第十一直波导1-4的一端相连,第十一直波导1-4的另一端通过第十弯波导1-5与第十二直波导1-6的上端相连,第十二直波导1-6的下端与第一弯波导2-2的另一端相连;这里,依次相连的第九弯波导1-3、第十一直波导1-4、第十弯波导1-5和第十二直波导1-6构成连接波导。The micro-ring resonator R2 is coupled to the tenth straight waveguide 1-2 arranged vertically, and the upper end of the tenth straight waveguide 1-2 is connected to one end of the tenth straight waveguide 1-4 through the ninth curved waveguide 1-3. The other end of the tenth straight waveguide 1-4 is connected to the upper end of the twelfth straight waveguide 1-6 through the tenth curved waveguide 1-5, and the lower end of the twelfth straight waveguide 1-6 is connected to the first curved waveguide 2-2. The other ends are connected; here, the ninth curved waveguide 1-3, the tenth straight waveguide 1-4, the tenth curved waveguide 1-5 and the twelfth straight waveguide 1-6, which are connected in sequence, constitute the connecting waveguide.

微环谐振器R3与竖直设置的第十五直波导1-11耦合,第十五直波导1-11的上端通过第十二弯波导1-10与第十四直波导1-9的一端相连,第十四直波导1-9的另一端通过第十一弯波导1-7与第十三直波导1-8的上端相连,第十三直波导1-8的下端与第三弯波导2-5的另一端相连;这里,依次相连的第十二弯波导1-10、第十四直波导1-9、第十三直波导1-8和第十一弯波导1-7构成连接波导。The micro-ring resonator R3 is coupled with the vertically arranged fifteenth straight waveguide 1-11, and the upper end of the fifteenth straight waveguide 1-11 passes through the twelfth curved waveguide 1-10 and one end of the fourteenth straight waveguide 1-9 connected, the other end of the fourteenth straight waveguide 1-9 is connected to the upper end of the thirteenth straight waveguide 1-8 through the eleventh curved waveguide 1-7, and the lower end of the thirteenth straight waveguide 1-8 is connected to the third curved waveguide The other ends of 2-5 are connected; here, the twelfth curved waveguide 1-10, the fourteenth straight waveguide 1-9, the thirteenth straight waveguide 1-8 and the eleventh curved waveguide 1-7, which are connected in sequence, form a connection waveguide.

微环谐振器R4与水平设置的第十七直波导1-14耦合,第十七直波导1-14的一端通过第十三弯波导1-13与第十六直波导1-12的上端相连,第十六直波导1-12的下端与第五弯波导2-8的另一端相连;这里,相连接的第十三弯波导1-13和第十六直波导1-12构成连接波导。The microring resonator R4 is coupled with the seventeenth straight waveguide 1-14 arranged horizontally, and one end of the seventeenth straight waveguide 1-14 is connected to the upper end of the sixteenth straight waveguide 1-12 through the thirteenth curved waveguide 1-13 , the lower end of the sixteenth straight waveguide 1-12 is connected to the other end of the fifth curved waveguide 2-8; here, the connected thirteenth curved waveguide 1-13 and the sixteenth straight waveguide 1-12 constitute a connecting waveguide.

微环谐振器R5与竖直设置的第十八直波导1-15耦合,第十八直波导1-15的下端与第七弯波导2-11的另一端相连。这里,第十八直波导1-15为连接波导。The microring resonator R5 is coupled to the eighteenth straight waveguide 1-15 arranged vertically, and the lower end of the eighteenth straight waveguide 1-15 is connected to the other end of the seventh curved waveguide 2-11. Here, the eighteenth straight waveguides 1-15 are connecting waveguides.

图3中所有波导(包括直波导和弯波导)的宽度均相同。All waveguides in Figure 3 (both straight and curved) have the same width.

通过改变微环谐振器的有效折射率改变微环谐振器的谐振波长。The resonant wavelength of the microring resonator is changed by changing the effective refractive index of the microring resonator.

本发明可重构光模式转换器中模式转换器2中依次相连的不同宽度的直波导之间通过足够长的绝热锥连接,构成一个输出波导,其中绝热锥的宽度变化是线性缓变的,从较窄的波导宽度变为较宽的波导宽度,从而确保较低阶模式光信号在绝热锥中传输时不发生模式转换。由于不同的模式传输的有效折射率与波导的宽度及模式的阶数有关,要实现模式转换就必须使转换的模式的有效折射率相同,通过改变不同模式转换处的波导宽度,即可实现模式的转换。In the reconfigurable optical mode converter of the present invention, the straight waveguides of different widths connected in sequence in the mode converter 2 are connected by a sufficiently long adiabatic cone to form an output waveguide, wherein the width of the adiabatic cone changes linearly and gradually, Changing from a narrower waveguide width to a wider waveguide width ensures that the lower-order mode optical signal propagates in the adiabatic cone without mode switching. Since the effective refractive index of different modes is related to the width of the waveguide and the order of the modes, to realize the mode conversion, the effective refractive index of the converted modes must be the same. conversion.

例如,输入到第九直波导1-1的光的模式为基模TE0,输入的光中符合微环谐振器R1谐振波长λ的光经过耦合区被耦合到微环谐振器R1中。微环谐振器R1与半径小于微环谐振器R1半径的多个微环谐振器R2、R3、R4、……、Rn级联,通过改变施加在半径较小的微环谐振器上的电压,改变微环谐振器R2、R3、R4、……、Rn的波导温度,从而改变微环谐振器R2、R3、R4、……、Rn的有效折射率,相应地就实现了对微环谐振器R2、R3、R4、……、Rn的调谐作用。若要使波长为λ的光被下载到微环谐振器R2的输出波导,只需将微环谐振器R2的谐振波长调至λ即可,同理可以调节R3、R4等微环谐振器任意一个或多个谐振器的谐振波长即可实现波长为λ的光被均分后从所需的输出波导输出。若改变输入波长为λ1,相应地增加谐振微环的数量,即可同时实现λ和λ1两种波长内的多个模式同时转换。以此类推,因此本发明的可重构光模式转换器具有兼容波分复用的功能。For example, the mode of the light input into the ninth straight waveguide 1-1 is the fundamental mode TE 0 , and the input light conforming to the resonance wavelength λ of the microring resonator R1 is coupled into the microring resonator R1 through the coupling region. The micro-ring resonator R1 is cascaded with a plurality of micro-ring resonators R2, R3, R4, ..., Rn whose radius is smaller than the radius of the micro-ring resonator R1. Change the waveguide temperature of the micro-ring resonators R2, R3, R4,..., Rn, so as to change the effective refractive index of the micro-ring resonators R2, R3, R4,..., Rn, correspondingly, the micro-ring resonator is realized. Tuning effect of R2, R3, R4, ..., Rn. If the light with wavelength λ is downloaded to the output waveguide of the micro-ring resonator R2, it is only necessary to adjust the resonance wavelength of the micro-ring resonator R2 to λ. Similarly, any micro-ring resonator such as R3 and R4 can be adjusted to any The resonant wavelength of one or more resonators can realize that the light with wavelength λ is evenly divided and output from the desired output waveguide. If the input wavelength is changed to λ1 and the number of resonant microrings is correspondingly increased, the simultaneous conversion of multiple modes in the two wavelengths of λ and λ1 can be realized at the same time. By analogy, the reconfigurable optical mode converter of the present invention has the function of being compatible with wavelength division multiplexing.

图4为微环谐振器R2、R3、R4、…、Rn中任意一个微环谐振器谐振时所得的下载端光谱图,纵坐标为下载端光强度,横坐标为波长。当微环谐振器R2、R3、R4、…Rn中只有一个微环谐振器谐振时,从输入波导耦合到微环谐振器R1中的光将会直接通过谐振的微环谐振器下载到相应的波导中并进入模式转换器中。由于基模波导中的基模有效折射率与所需转换的模式在其转换区的波导宽度中传输的有效折射率相同,故基模波导中的基模将被转换为相应的模式。Figure 4 is a spectrum diagram of the download end obtained when any one of the micro-ring resonators R2, R3, R4, ..., Rn resonates, the ordinate is the light intensity of the download end, and the abscissa is the wavelength. When only one of the microring resonators R2, R3, R4,...Rn resonates, the light coupled from the input waveguide into the microring resonator R1 will be directly downloaded to the corresponding microring resonator through the resonating microring resonator into the waveguide and into the mode converter. Since the effective refractive index of the fundamental mode in the fundamental mode waveguide is the same as the effective refractive index of the mode to be converted in the waveguide width of its conversion region, the fundamental mode in the fundamental mode waveguide will be converted into the corresponding mode.

如图5所示,为微环R2、R3、R4、…Rn中任意两个微环谐振器谐振时所得的下载端光谱图,纵坐标为下载端光强度,横坐标为波长。图5中两条曲线基本重合,由于每个微环谐振器的耦合条件存在轻微的差异,使得两条曲线的顶端有略微高低的差别。在曲线当R2、R3、R4、…、Rn存在两个微环谐振器谐振时,从输入波导耦合到微环谐振器R1中的光将会被均分为两部分,分别通过谐振状态的微环谐振器下载到相应的波导中,并通过模式转换器2转换为对应的模式,转换后的模式可以同时在多模波导中传输。As shown in Figure 5, it is the download end spectrum obtained when any two microring resonators in the microrings R2, R3, R4, ... Rn resonate, the ordinate is the light intensity of the download end, and the abscissa is the wavelength. The two curves in Fig. 5 basically overlap. Due to the slight difference in the coupling conditions of each microring resonator, the tops of the two curves are slightly different. In the curve, when there are two micro-ring resonators in R2, R3, R4, ..., Rn, the light coupled from the input waveguide to the micro-ring resonator R1 will be divided into two parts, respectively, passing through the micro-ring resonator in the resonant state. The ring resonator is downloaded into the corresponding waveguide and converted into the corresponding mode by the mode converter 2, and the converted mode can be transmitted in the multi-mode waveguide at the same time.

图6为微环R2、R3、R4、…Rn中任意三个微环谐振器谐振时所得的下载端光谱图,纵坐标为下载端光强度,横坐标为波长。图6中三条曲线基本重合,由于每个微环谐振器的耦合条件有轻微差异,使得三条曲线的顶端有略微高低的差别。当R2、R3、R4、…、Rn中存在三个微环谐振器谐振时,从输入波导耦合到微环谐振器R1中的光将会被均分为三等分,分别通过谐振的微环下载到相应的波导中,再通过模式转换器2转换为对应的模式,转换后的模式可以同时在多模波导中进行传输。Figure 6 is a spectrum diagram of the download end obtained when any three micro-ring resonators in the micro-rings R2, R3, R4, ... Rn resonate, the ordinate is the light intensity of the download end, and the abscissa is the wavelength. The three curves in Fig. 6 basically overlap, and the tops of the three curves are slightly different due to the slight difference in the coupling conditions of each microring resonator. When there are three microring resonators in R2, R3, R4, ..., Rn to resonate, the light coupled from the input waveguide to the microring resonator R1 will be equally divided into three equal parts, respectively passing through the resonating microrings Downloaded to the corresponding waveguide, and then converted into the corresponding mode through the mode converter 2, the converted mode can be transmitted in the multi-mode waveguide at the same time.

本发明的器件是基于SOI材料的,由于SOI材料制成的波导芯层Si(折射率为3.45)与衬底SiO2(折射率为1.44)的折射率差较大,对光场具有很强的限制能力,从而使得器件的尺寸较小,微环谐振器的半径也可以很小。同时本发明可重构光模式转换器也可采用SIN、Ⅲ-Ⅴ族等材料来实现。The device of the present invention is based on SOI material. Since the refractive index difference between the waveguide core layer Si (refractive index: 3.45) made of SOI material and the substrate SiO 2 (refractive index: 1.44) is large, it has a strong effect on the optical field. Therefore, the size of the device is small, and the radius of the microring resonator can also be small. At the same time, the reconfigurable optical mode converter of the present invention can also be realized by using materials such as SIN and III-V groups.

本发明可重构光模式转换器中微环谐振器的谐振频率可以基于热光效应进行调谐,也可以用等离子色散效应进行调谐。图7为硅基热光调制的微环谐振器或直波导的横截面图,其衬底为Si,在衬底上具有一层SiO2材料,在SiO2层上设有波导芯层(Si材料)和调谐电极,波导芯层和调谐电极周围被SiO2材料所包围。波导芯层的宽度为W,高度为H,芯区顶部与调谐电极底部的间距为dSiO2。图8所示为硅基电光调制的微环谐振器或直波导的横截面图,电光调制结构的调制效率高,且调制速度快。通过外加的电压可以改变波导中载流子的注入和抽取,从而改变波导的有效折射率。当外加正偏压时,载流子将会从P区、N区中注入到波导SI中,当外加反偏压时,波导SI中的电子和空穴将会被抽取出来。The resonant frequency of the microring resonator in the reconfigurable optical mode converter of the present invention can be tuned based on the thermo-optic effect, or can be tuned by the plasmon dispersion effect. Figure 7 is a cross-sectional view of a silicon-based thermo-optically modulated microring resonator or straight waveguide, whose substrate is Si, with a layer of SiO2 material on the substrate, and a waveguide core layer (Si material) and tuning electrodes, the waveguide core layer and tuning electrodes are surrounded by SiO2 material. The width of the waveguide core layer is W, the height is H, and the distance between the top of the core region and the bottom of the tuning electrode is d SiO2 . Figure 8 shows a cross-sectional view of a silicon-based electro-optical modulation microring resonator or straight waveguide. The electro-optical modulation structure has high modulation efficiency and fast modulation speed. The injection and extraction of carriers in the waveguide can be changed by an applied voltage, thereby changing the effective refractive index of the waveguide. When a forward bias is applied, carriers will be injected into the waveguide SI from the P and N regions, and when a reverse bias is applied, the electrons and holes in the waveguide SI will be extracted.

图9为热光调制的微环谐振器的波谱响应图,当未施加电压时,微环谐振器的谐振波长位于λ1处,此时只有波长为λ1的光才能被微环谐振器所下载,如图9a;当施加适当电压时,由于热光效应,微环谐振器的谐振波长将会移动到λ2处,此时只有波长为λ2的光才能被微环谐振器所下载,如图9b。Figure 9 shows the spectral response of the thermo-optically modulated micro-ring resonator. When no voltage is applied, the resonant wavelength of the micro-ring resonator is located at λ1. At this time, only the light with wavelength λ1 can be downloaded by the micro-ring resonator. As shown in Figure 9a; when an appropriate voltage is applied, the resonant wavelength of the microring resonator will move to λ2 due to the thermo-optic effect, and only the light with wavelength λ2 can be downloaded by the microring resonator, as shown in Figure 9b.

本发明光模式转换器将多环级联应用于模式转换器中,通过改变各个可调谐微环谐振器(有源微环)的谐振状态,使得无源微环中的光被等分为x份,并通过x个谐振的有源微环谐振器下载到相应的波导中,通过本发明光模式转换器可以实现基模同时向任意多种高阶模式的转换,即同时产生多个模式,从而解决光通信系统中需要的激光器数目过多的问题。本发明具有良好的可扩展性,能与波分复用相结合,提高光通信系统的灵活性。The optical mode converter of the invention applies multi-ring cascade to the mode converter, and by changing the resonance state of each tunable micro-ring resonator (active micro-ring), the light in the passive micro-ring is equally divided into x The optical mode converter of the present invention can realize the conversion of the fundamental mode to any variety of high-order modes at the same time, that is, to generate multiple modes at the same time, Thus, the problem that the number of lasers required in the optical communication system is too large is solved. The invention has good expansibility, can be combined with wavelength division multiplexing, and improves the flexibility of the optical communication system.

Claims (4)

1.一种兼容波分复用的可重构光模式转换器,其特征在于,包括相连接的多环级联件(1)和模式转换器(2);多环级联件(1)由一根直波导、一个无源微环和n个可调微环谐振器构成,该光模式转换器中的无源微环与n个有源可调微环级联,通过调节有源微环的有效折射率,从而改变有源微环的谐振状态;且n≥2。1. A reconfigurable optical mode converter compatible with wavelength division multiplexing, characterized in that it comprises a connected multi-ring cascade (1) and a mode converter (2); the multi-ring cascade (1) It consists of a straight waveguide, a passive micro-ring and n tunable micro-ring resonators. The passive micro-ring in the optical mode converter is cascaded with n active tunable micro-rings. The effective refractive index of the ring, thereby changing the resonance state of the active microring; and n≥2. 2.根据权利要求1所述的兼容波分复用的可重构光模式转换器,其特征在于,所述的模式转换器(2)包括依次设置的多根模式转换器用直波导,相邻模式转换器用直波导通过绝热锥相连,该多根模式转换器用直波导的宽度依次递减;一根模式转换器用直波导与一个弯结构波导耦合,该弯结构波导由一根弯结构波导用直波导和两根弯结构波导用弯波导组成,两根弯结构波导用弯波导通过该弯结构波导用直波导相连,弯结构波导用直波导与耦合的模式转换器用直波导平行设置;同一个弯结构波导中朝向模式转换器用直波导中宽度最小直波导的弯结构波导用弯波导的另一端均与多环级联件(1)相连;所有弯结构波导中弯结构波导用直波导和弯结构波导用弯波导的宽度均相同。2 . The reconfigurable optical mode converter compatible with wavelength division multiplexing according to claim 1 , wherein the mode converter ( 2 ) comprises a plurality of straight waveguides for mode converters arranged in sequence, and adjacent to 2 . The mode converters are connected by straight waveguides through adiabatic cones, and the widths of the multiple mode converters are successively decreased by the straight waveguides; one mode converter is coupled with a straight waveguide with a curved structure waveguide, and the curved structure waveguide is composed of a straight waveguide with a curved structure waveguide. It is composed of two curved waveguides using curved waveguides, and the two curved waveguides are connected by straight waveguides through the curved waveguides, and the straight waveguides for the curved waveguides are arranged in parallel with the coupled mode converters using straight waveguides; the same curved structure The other ends of the curved waveguides of the straight waveguides with the smallest width in the straight waveguides facing the mode converter are all connected with the multi-loop cascade (1); all the curved waveguides are straight waveguides and curved waveguides in the curved waveguides The widths of the curved waveguides are all the same. 3.根据权利要求2所述的兼容波分复用的可重构光模式转换器,其特征在于,所述的多环级联件(1)包括由第九直波导(1-1)和n个可调微环谐振器构成的环状结构,构成该环状结构的各器件不相接触,该环状结构内设有微环谐振器R1,微环谐振器R1为无源微环;有源微环的数量与模式转换器(2)中弯结构波导的数量相同;所有有源微环的半径相同,且小于无源微环的半径;3. The reconfigurable optical mode converter compatible with wavelength division multiplexing according to claim 2, characterized in that the multi-ring cascade (1) comprises a ninth straight waveguide (1-1) and a A ring structure composed of n tunable micro-ring resonators, the devices constituting the ring structure are not in contact, the ring structure is provided with a micro-ring resonator R1, and the micro-ring resonator R1 is a passive micro-ring; The number of active microrings is the same as the number of curved waveguides in the mode converter (2); the radii of all active microrings are the same and smaller than that of passive microrings; 每个有源微环均与一根多环级联件用直波导耦合,且该有源微环位于与该有源微环耦合的多环级联件用直波导和微环谐振器R1之间,所有与有源微环耦合的多环级联件用直波导均不相交,且一根与有源微环耦合的多环级联件用直波导通过一根连接波导与模式转换器(2)的一个弯结构波导中朝向模式转换器用直波导中宽度最小直波导的弯结构波导用弯波导的另一端相连;所有的连接波导不相交。Each active micro-ring is coupled with a straight waveguide for the multi-ring cascade, and the active micro-ring is located between the straight waveguide for the multi-ring cascade coupled to the active micro-ring and the micro-ring resonator R1 During the period, all straight waveguides for multi-ring cascades coupled with active micro-rings do not intersect, and one straight waveguide for multi-ring cascades coupled with active micro-rings connects the waveguide with the mode converter ( 2) In one of the curved structure waveguides facing the mode converter, the curved structure waveguides of the straight waveguides with the smallest width in the straight waveguides are connected with the other end of the curved waveguides; all the connecting waveguides do not intersect. 4.根据权利要求3所述的兼容波分复用的可重构光模式转换器,其特征在于,所述的连接波导为两根弯波导和两根直波导依次间隔设置连接而成;或者,是一根弯波导连接两根直波导而成;或者,是一根直波导。4. The reconfigurable optical mode converter compatible with wavelength division multiplexing according to claim 3, wherein the connecting waveguide is formed by connecting two curved waveguides and two straight waveguides in sequence; or , is a curved waveguide connecting two straight waveguides; or, is a straight waveguide.
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